TWI463714B - Method for forming the organic optoelectrical thin film - Google Patents
Method for forming the organic optoelectrical thin film Download PDFInfo
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- TWI463714B TWI463714B TW097131851A TW97131851A TWI463714B TW I463714 B TWI463714 B TW I463714B TW 097131851 A TW097131851 A TW 097131851A TW 97131851 A TW97131851 A TW 97131851A TW I463714 B TWI463714 B TW I463714B
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- organic
- organic solvent
- film
- organic photoelectric
- stamper
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- 238000000034 method Methods 0.000 title claims description 52
- 239000010409 thin film Substances 0.000 title claims description 27
- 239000010408 film Substances 0.000 claims description 50
- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 26
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 26
- -1 methyl oxime Chemical class 0.000 claims description 24
- 239000003960 organic solvent Substances 0.000 claims description 23
- 239000000758 substrate Substances 0.000 claims description 21
- 239000012535 impurity Substances 0.000 claims description 11
- 238000010438 heat treatment Methods 0.000 claims description 6
- 229920001921 poly-methyl-phenyl-siloxane Polymers 0.000 claims description 6
- 150000002923 oximes Chemical class 0.000 claims description 5
- XTDKZSUYCXHXJM-UHFFFAOYSA-N 2-methoxyoxane Chemical compound COC1CCCCO1 XTDKZSUYCXHXJM-UHFFFAOYSA-N 0.000 claims description 3
- 238000002203 pretreatment Methods 0.000 claims description 2
- 238000000748 compression moulding Methods 0.000 claims 10
- NIHNNTQXNPWCJQ-UHFFFAOYSA-N fluorene Chemical compound C1=CC=C2CC3=CC=CC=C3C2=C1 NIHNNTQXNPWCJQ-UHFFFAOYSA-N 0.000 claims 8
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 claims 2
- JNSHJDXBICHABV-UHFFFAOYSA-N 11-oxatetracyclo[7.5.0.02,7.010,12]tetradeca-1(9),2,4,6,13-pentaene Chemical compound C12C(C=CC=3C4=CC=CC=C4CC13)O2 JNSHJDXBICHABV-UHFFFAOYSA-N 0.000 claims 1
- 238000004049 embossing Methods 0.000 claims 1
- 238000013086 organic photovoltaic Methods 0.000 claims 1
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 20
- 230000008569 process Effects 0.000 description 13
- 238000004519 manufacturing process Methods 0.000 description 10
- 238000012546 transfer Methods 0.000 description 8
- 239000011521 glass Substances 0.000 description 7
- 239000000463 material Substances 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 230000005693 optoelectronics Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- PXRMLPZQBFWPCV-UHFFFAOYSA-N dioxasilirane Chemical compound O1O[SiH2]1 PXRMLPZQBFWPCV-UHFFFAOYSA-N 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000002052 molecular layer Substances 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 229920001600 hydrophobic polymer Polymers 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- NBTOZLQBSIZIKS-UHFFFAOYSA-N methoxide Chemical compound [O-]C NBTOZLQBSIZIKS-UHFFFAOYSA-N 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 150000003384 small molecules Chemical class 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
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- Photovoltaic Devices (AREA)
Description
本發明為一種形成有機光電薄膜元件的方法，特別是一種以聚二甲基矽氧烷壓模形成有機光電薄膜元件的方法。The present invention is a method of forming an organic photoelectric thin film element, and more particularly, a method of forming an organic photoelectric thin film element by polydimethylsiloxane.
新一代的有機光電薄膜元件已逐步使用於各式光電元件領域，除了在材料以及製程成本的優勢上優於無機元件之外，更具有可撓曲、輕巧與環保的獨特優異性。A new generation of organic optoelectronic thin-film components has been gradually used in various fields of optoelectronic components. In addition to superior advantages in terms of materials and process costs, inorganic optoelectronic thin-film components are unique, flexible, lightweight and environmentally friendly.
而傳統技術上，例如有機薄膜電晶體係以有機共軛分子材料為其主動層所形成之電晶體。相較傳統的無機矽電晶體，有機薄膜電晶體可在較低溫下進行製造，且可望在基板選擇上採用較輕、薄且便宜之塑膠以取代玻璃，由於可適用於塑膠基板領域，故而對降低製造成本亦有相當大的效益。In the conventional art, for example, an organic thin film electro-crystal system has an organic conjugated molecular material as an active layer formed by the active layer. Compared with the traditional inorganic germanium crystal, the organic thin film transistor can be fabricated at a lower temperature, and it is expected to use a lighter, thinner and cheaper plastic to replace the glass in the substrate selection, since it can be applied to the field of plastic substrates, There are also considerable benefits in reducing manufacturing costs.
此外，在傳統半導體製造過程中，例如於微機電領域的製造過程中，亦曾採用聚二甲基矽氧烷(Polydimethyl Siloxane,PDMS)。聚二甲基矽氧烷為一種疏水性高分子材料，其主要多運用於前述半導體製造之微影製程相關領域，目前亦有研究顯示，已逐步運用於前述有機薄膜光電元件之製造領域，但由於尚未達到相當成熟之技術，並未具體大量採用。In addition, in the conventional semiconductor manufacturing process, for example, in the manufacturing process of the microelectromechanical field, polydimethylsiloxane (PDMS) has also been used. Polydimethyl siloxane is a hydrophobic polymer material, which is mainly used in the lithography process related to semiconductor manufacturing. At present, research has shown that it has been gradually applied to the manufacture of the above-mentioned organic thin film photovoltaic elements, but Since it has not yet reached a fairly mature technology, it has not been specifically adopted in large quantities.
故為因應各式光電元件技術之生產需求，尚需發展有 機薄膜光電元件相關製造的製程技術，藉以節省製造人力與製造時間等成本，且能有效形成有機薄膜光電元件，達到節能減碳之目的。Therefore, in response to the production needs of various types of optoelectronic components technology, there is still a need to develop The process technology related to the manufacturing of thin film photovoltaic elements can save the cost of manufacturing manpower and manufacturing time, and can effectively form organic thin film photovoltaic elements to achieve the purpose of energy saving and carbon reduction.
本發明一種以聚二甲基矽氧烷壓模(PDMS Stamp)形成有機薄膜光電元件的方法，首先以有機溶劑預先處理聚二甲基矽氧烷壓模的表面。The invention relates to a method for forming an organic thin film photovoltaic element by a PDMS stamp, which firstly pretreats the surface of the polydimethyl methoxy oxane stamper with an organic solvent.
次而，再將有機光電薄膜均勻成形於聚二甲基矽氧烷壓模的表面。Next, the organic photoelectric film was uniformly formed on the surface of the polydimethyl siloxane mold.
最後，搭配各式不同的製程參數控制，將聚二甲基矽氧烷壓模表面的有機光電薄膜轉移至任何所需的基板上。Finally, the organic photo-electric film on the surface of the polydimethyl siloxane oxide mold is transferred to any desired substrate with various process parameter controls.
本發明係以溶劑預先處理過的聚二甲基矽氧烷壓模表面，藉以進行製造有機光電薄膜元件。The present invention is a process for producing an organic photoelectric thin film element by using a polydimethyl methoxy hydride molded surface which has been previously treated with a solvent.
本發明之聚二甲基矽氧烷壓模表面無須進行任何額外的處理方式，例如不須以臭氧、電漿處理，即可進行下一階段的薄膜轉印，簡化了多層結構的製程。The polydimethylsiloxane oxide stamper surface of the invention does not need to be subjected to any additional treatment, for example, the next stage of film transfer can be carried out without treatment with ozone or plasma, which simplifies the process of the multilayer structure.
本發明具有廣泛的使用方式，任何輔助聚二甲基矽氧烷壓模薄膜轉移的方式皆可採用，例如外加壓力、熱處理等方式皆可採用。The invention has a wide range of modes of use, and any mode of assisting the transfer of the polydimethyl siloxane oxide film can be used, for example, an applied pressure, a heat treatment or the like can be used.
本發明無須形成會影響元件性能的多餘分子層(犧牲層)，即可形成多層有機光電薄膜元件。The present invention can form a multilayer organic photoelectric film element without forming an excess molecular layer (sacrificial layer) which affects the performance of the element.
本發明可有效提升有機光電元件的性能，且搭配簡易的複合膜製備方式與高效率的材料開發，有機光電薄膜元 件將較傳統無機元件具有更高的市場應用性。The invention can effectively improve the performance of the organic photoelectric component, and is combined with a simple composite film preparation method and high-efficiency material development, the organic photoelectric thin film element The piece will have higher market applicability than traditional inorganic components.
與現有之技術相比較，本發明可直接以旋轉塗佈以及壓印方式，即可形成各式多層有機薄膜結構，無須採用具有如高真空需求之小分子薄膜蒸鍍技術。Compared with the prior art, the present invention can directly form various multilayer organic thin film structures by spin coating and imprinting, without using a small molecule thin film evaporation technology such as high vacuum demand.
故而，關於本發明之優點與精神可以藉由以下發明詳述及所附圖式得到進一步的瞭解。Therefore, the advantages and spirit of the present invention will be further understood from the following detailed description of the invention.
本發明為一種以聚二甲基矽氧烷壓模形成有機薄膜光電元件的方法，詳細步驟如下所示：請參考第1A圖所示，以半導體製程中的旋轉塗佈方式為例，於旋轉機柱11上，裝置玻璃底材12，而由矽晶片表面所造的聚二甲基矽氧烷壓模(PDMS Stamp)13則固定裝置於玻璃底材12上，接著將有機溶劑(Organic Solvent)14，例如丙酮逐步滴在聚二甲基矽氧烷壓模13的表面上以進行表面性質修飾之預先處理。而預先處理的方式包含了以有機物質之化學方式處理，或是以氧電漿之物理方式處理。再於進行旋轉後，得到聚二甲基矽氧烷壓模13的特殊表面。The invention relates to a method for forming an organic thin film photovoltaic element by polydimethyl siloxane molding, and the detailed steps are as follows: Please refer to FIG. 1A, taking a spin coating method in a semiconductor process as an example, and rotating On the column 11, the glass substrate 12 is mounted, and a polydimethyl methoxide mold 13 (PDMS Stamp) 13 formed on the surface of the wafer is fixed on the glass substrate 12, followed by an organic solvent (Organic Solvent). 14), for example, acetone is gradually dropped on the surface of the polydimethyl siloxane molded mold 13 to carry out pretreatment of surface property modification. The pre-treatment method involves chemical treatment with organic matter or physical treatment with oxygen plasma. After the rotation, a special surface of the polydimethyl siloxane oxide die 13 is obtained.
請參考第1B圖所示，有機光電材料溶液15逐步滴在聚二甲基矽氧烷壓模13的表面上。Referring to FIG. 1B, the organic photoelectric material solution 15 is gradually dropped on the surface of the polydimethyl siloxane mold 13.
之後，如第1C圖所示，有機光電薄膜15凝固成型於聚二甲基矽氧烷壓模13表面上。Thereafter, as shown in Fig. 1C, the organic photoelectric film 15 is solidified and formed on the surface of the polydimethyl siloxane mold 13.
參考第1D圖所示，進行轉移有機光電薄膜15，即翻 轉固定裝置於玻璃底材12的聚二甲基矽氧烷壓模13，將凝固成型的有機光電薄膜15以壓印方式轉移至目標表面(Target Surface)16上，即例如基板的表面上。此時可搭配各式不同的製程參數控制，或是施加輔助轉移有機光電薄膜的方式，如同步進行退火熱處理製程或是外加壓力的方式。Referring to FIG. 1D, transferring the organic photoelectric film 15 is performed. The polydimethylsiloxane mold 13 is fixed to the glass substrate 12, and the solidified organic photoelectric film 15 is transferred to the target surface 16 by imprinting, that is, for example, on the surface of the substrate. At this time, it can be controlled with various process parameters, or a method of assisting transfer of the organic photoelectric film, such as synchronous annealing treatment process or external pressure.
參考第1E圖所示，分離固定裝置於玻璃底材12的聚二甲基矽氧烷壓模13，於目標表面16上則具有凝固成型的有機光電薄膜15。Referring to Fig. 1E, the polydimethylsiloxane mold 13 of the fixing device is separated from the glass substrate 12, and the organic photoelectric film 15 is solidified on the target surface 16.
本發明之聚二甲基矽氧烷係為一種有機聚矽氧烷衍生物，如聚氫基甲基矽氧(Polyhydrogenmethylsiloxane,PHMS)，聚乙烯基甲基矽氧(polyvinylmethylsiloxane簡稱PVMS)，聚二苯基矽氧(Polydiphenylsiloxane,PDPS)，以及聚甲基苯基矽氧(Polymethylphenylsiloxane,PMPS)等之有機聚矽氧化合物中所形成。The polydimethyloxane of the present invention is an organopolyoxane derivative such as polyhydrogenmethylsiloxane (PHMS), polyvinylmethyloxysilane (PVMS), polydiethylene. It is formed from an organic polyoxosiloxane such as polydiphenylsiloxane (PDPS) and polymethylphenylsiloxane (PMPS).
如第2圖所示本發明一種以聚二甲基矽氧烷壓模形成有機薄膜光電元件的方法之實施步驟流程圖，首先如步驟21，本發明以有機溶劑預先處理聚二甲基矽氧烷壓模的表面。FIG. 2 is a flow chart showing the steps of the method for forming an organic thin film photovoltaic element by polydimethyl methoxy hydride according to the second embodiment of the present invention. First, as step 21, the present invention pretreats polydimethyl oxime with an organic solvent. The surface of the mold.
次而，如第2圖所示步驟22，再將有機光電薄膜均勻成形於聚二甲基矽氧烷壓模的表面。Next, as in step 22 shown in Fig. 2, the organic photoelectric film is uniformly formed on the surface of the polydimethylsiloxane mold.
如第2圖所示步驟23，再搭配各式不同的製程參數控制，將聚二甲基矽氧烷壓模表面的有機光電薄膜轉移至任何所需的基板上。Step 23, as shown in Figure 2, is combined with various process parameter controls to transfer the organic photo-electric film on the surface of the polydimethylsiloxane to the desired substrate.
第3圖所示為以本發明方法所形成的多層有機發光薄膜之測試結果，而其結果以螢光強度(PL Intensity)為縱軸，波長為橫軸所作圖形。Fig. 3 is a view showing the results of testing of the multilayer organic light-emitting film formed by the method of the present invention, and the result is a graph in which the fluorescence intensity (PL Intensity) is plotted on the vertical axis and the wavelength is plotted on the horizontal axis.
第4圖所示為以本發明之多層有機發光薄膜所形成的太陽能電池元件之測試結果，其結果以電流密度為縱軸，電壓(伏特)為橫軸所作圖形。Fig. 4 is a view showing the results of testing of a solar cell element formed by the multilayer organic light-emitting film of the present invention. The result is a graph in which the current density is plotted on the vertical axis and the voltage (volts) is plotted on the horizontal axis.
由第3圖與第4圖之測試結果所示，所形成的元件特性與元件表現絲毫不受薄膜轉移過程的影響，複合膜的表現結合了不同層材料的特性，且隨著元件結構上的設計，將有效提升元件性能。As shown in the test results of Figures 3 and 4, the formed device characteristics and component performance are not affected by the film transfer process. The performance of the composite film combines the properties of different layers of materials, and along with the structure of the components. Design will effectively improve component performance.
本發明無須形成任何會影響效率或增加成本的分子層，即可直接將有機薄膜轉移至目標表面上。而本發明所使用的可轉印聚二甲基矽氧烷，可重複約數十次的使用，且可形成大面積式的均勻薄膜，而非僅有小面積式的轉印。且本發明於轉印過程中，不會影響底層薄膜的原有性質，故不同有機薄膜層間可形成良好的接觸。The invention can directly transfer the organic film to the target surface without forming any molecular layer which may affect the efficiency or increase the cost. The transferable polydimethyl siloxane used in the present invention can be reused for about several tens of times, and can form a large-area uniform film instead of only a small-area transfer. Moreover, the present invention does not affect the original properties of the underlying film during the transfer process, so that good contact can be formed between different organic film layers.
本發明可應用於有機太陽能電池、發光二極體、以及電晶體，感測器等各式有機功能性元件。且本發明可突破以往溶液製程在多層膜製作的限制，以及減低不純物對元件表現的影響，本發明所形成的均勻薄膜多層結構可提升元件的性能以及有機薄膜的不同應用範圍。The invention can be applied to various organic functional elements such as organic solar cells, light-emitting diodes, and transistors, sensors, and the like. The invention can break through the limitation of the conventional solution process in the manufacture of the multilayer film and reduce the influence of the impurity on the performance of the component. The uniform film multilayer structure formed by the invention can improve the performance of the component and the different application range of the organic film.
以上所述僅為本發明之較佳實施例而已，並非用以限定本發明之申請專利範圍；凡其它未脫離本發明所揭示之精神下所完成之等效改變或修飾，均應包含在下述之申請 專利範圍內。The above is only the preferred embodiment of the present invention, and is not intended to limit the scope of the present invention; all other equivalent changes or modifications which are not departing from the spirit of the present invention should be included in the following. Application Within the scope of the patent.
11‧‧‧旋轉機柱11‧‧‧Rotating machine column
12‧‧‧裝置玻璃底材12‧‧‧Device glass substrate
13‧‧‧聚二甲基矽氧烷壓模13‧‧‧Polydimethyloxane molding
14‧‧‧有機溶液14‧‧‧ organic solution
15‧‧‧有機光電薄膜15‧‧‧Organic Photoelectric Film
16‧‧‧目標表面16‧‧‧ Target surface
第1A至第1E圖所示為本發明之較佳實施例圖。1A to 1E are diagrams showing a preferred embodiment of the present invention.
第2圖所示為本發明之較佳實施步驟流程圖。Figure 2 is a flow chart showing a preferred embodiment of the present invention.
第3圖所示為以本發明方法所形成的多層有機發光薄膜之測試結果。Figure 3 shows the test results of the multilayer organic light-emitting film formed by the method of the present invention.
第4圖所示為以本發明之多層有機發光薄膜所形成的太陽能電池元件之測試結果。Fig. 4 is a view showing the results of testing of solar cell elements formed by the multilayer organic light-emitting film of the present invention.
11‧‧‧旋轉機柱11‧‧‧Rotating machine column
12‧‧‧裝置玻璃底材12‧‧‧Device glass substrate
13‧‧‧聚二甲基矽氧烷壓模13‧‧‧Polydimethyloxane molding
14‧‧‧有機溶液14‧‧‧ organic solution
15‧‧‧有機光電薄膜15‧‧‧Organic Photoelectric Film
16‧‧‧目標表面16‧‧‧ Target surface
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070042505A1 (en) * | 2005-05-06 | 2007-02-22 | Platypus Technologies, Llc | Liquid crystal based analyte detection |
| US20070056680A1 (en) * | 2003-05-23 | 2007-03-15 | The Regents Of The University Of Michigan | Imprinting polymer film on patterned substrate |
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2008
- 2008-08-21 TW TW097131851A patent/TWI463714B/en not_active IP Right Cessation
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070056680A1 (en) * | 2003-05-23 | 2007-03-15 | The Regents Of The University Of Michigan | Imprinting polymer film on patterned substrate |
| US20070042505A1 (en) * | 2005-05-06 | 2007-02-22 | Platypus Technologies, Llc | Liquid crystal based analyte detection |
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| TW201010154A (en) | 2010-03-01 |
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