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TWI460405B - Light amount measuring device and light amount measuring method - Google Patents

Light amount measuring device and light amount measuring method Download PDF

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Publication number
TWI460405B
TWI460405B TW102127493A TW102127493A TWI460405B TW I460405 B TWI460405 B TW I460405B TW 102127493 A TW102127493 A TW 102127493A TW 102127493 A TW102127493 A TW 102127493A TW I460405 B TWI460405 B TW I460405B
Authority
TW
Taiwan
Prior art keywords
light
light receiving
emitting diode
range
measuring device
Prior art date
Application number
TW102127493A
Other languages
English (en)
Chinese (zh)
Other versions
TW201405106A (zh
Inventor
望月學
藤森昭一
Original Assignee
日本先鋒公司
先鋒自動化設備股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本先鋒公司, 先鋒自動化設備股份有限公司 filed Critical 日本先鋒公司
Publication of TW201405106A publication Critical patent/TW201405106A/zh
Application granted granted Critical
Publication of TWI460405B publication Critical patent/TWI460405B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00—Assemblies consisting of a plurality of semiconductor or other solid state devices
    • H01L25/03—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes
    • H01L25/04—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/075—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H10H20/00
    • H01L25/0753—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H10H20/00 the devices being arranged next to each other
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/0242—Control or determination of height or angle information of sensors or receivers; Goniophotometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/0266—Field-of-view determination; Aiming or pointing of a photometer; Adjusting alignment; Encoding angular position; Size of the measurement area; Position tracking; Photodetection involving different fields of view for a single detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0411—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using focussing or collimating elements, i.e. lenses or mirrors; Aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/06—Restricting the angle of incident light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/10—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void
    • G01J1/20—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void intensity of the measured or reference value being varied to equalise their effects at the detectors, e.g. by varying incidence angle
    • G01J1/28—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void intensity of the measured or reference value being varied to equalise their effects at the detectors, e.g. by varying incidence angle using variation of intensity or distance of source
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/06—Restricting the angle of incident light
    • G01J2001/061—Baffles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/06—Restricting the angle of incident light
    • G01J2001/067—Restricting the angle of incident light for angle scan
    • G01J2001/068—Restricting the angle of incident light for angle scan by diaphragm or the like
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J2001/4247—Photometry, e.g. photographic exposure meter using electric radiation detectors for testing lamps or other light sources
    • G01J2001/4252—Photometry, e.g. photographic exposure meter using electric radiation detectors for testing lamps or other light sources for testing LED's
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Led Devices (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
TW102127493A 2012-07-31 2013-07-31 Light amount measuring device and light amount measuring method TWI460405B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/JP2012/069515 WO2014020713A1 (ja) 2012-07-31 2012-07-31 光量測定装置及び光量測定方法
PCT/JP2013/064785 WO2014020978A1 (ja) 2012-07-31 2013-05-28 光量測定装置及び光量測定方法

Publications (2)

Publication Number Publication Date
TW201405106A TW201405106A (zh) 2014-02-01
TWI460405B true TWI460405B (zh) 2014-11-11

Family

ID=50027443

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102127493A TWI460405B (zh) 2012-07-31 2013-07-31 Light amount measuring device and light amount measuring method

Country Status (2)

Country Link
TW (1) TWI460405B (ja)
WO (2) WO2014020713A1 (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6402307B2 (ja) * 2015-01-15 2018-10-10 株式会社新川 測定装置及び制御方法
JP6449830B2 (ja) * 2016-10-11 2019-01-09 日機装株式会社 試験装置および発光装置の製造方法
US11536760B2 (en) * 2017-11-28 2022-12-27 Ase Test, Inc. Testing device, testing system, and testing method
JP6955989B2 (ja) * 2017-12-13 2021-10-27 東京エレクトロン株式会社 検査装置
JP7402652B2 (ja) * 2019-10-04 2023-12-21 株式会社日本マイクロニクス 光プローブ、光プローブアレイ、検査システムおよび検査方法
TWI759864B (zh) * 2020-09-17 2022-04-01 均豪精密工業股份有限公司 檢測設備及其收光裝置
CN114252238B (zh) * 2020-09-24 2025-05-30 均豪精密工业股份有限公司 检测设备及其收光装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07201945A (ja) * 1993-12-28 1995-08-04 Ricoh Co Ltd 半導体検査装置
TW200745521A (en) * 2006-05-26 2007-12-16 Min-Jun Jang 3 Dimensional light measuring apparatus
JP2008002858A (ja) * 2006-06-21 2008-01-10 Sumitomo Electric Ind Ltd 光半導体検査装置
CN201229204Y (zh) * 2008-04-23 2009-04-29 广州市光机电技术研究院 一种led光源光强空间分布特性测试装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5239716B2 (ja) * 2008-10-06 2013-07-17 株式会社日本マイクロニクス Ｌｅｄの試験装置
WO2012073345A1 (ja) * 2010-11-30 2012-06-07 パイオニア株式会社 発光素子用受光モジュール及び発光素子用検査装置
CN103370802B (zh) * 2010-12-01 2015-12-09 日本先锋公司 一种半导体发光元件用光接收模块以及半导体发光元件用检测装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07201945A (ja) * 1993-12-28 1995-08-04 Ricoh Co Ltd 半導体検査装置
TW200745521A (en) * 2006-05-26 2007-12-16 Min-Jun Jang 3 Dimensional light measuring apparatus
JP2008002858A (ja) * 2006-06-21 2008-01-10 Sumitomo Electric Ind Ltd 光半導体検査装置
CN201229204Y (zh) * 2008-04-23 2009-04-29 广州市光机电技术研究院 一种led光源光强空间分布特性测试装置

Also Published As

Publication number Publication date
WO2014020978A1 (ja) 2014-02-06
WO2014020713A1 (ja) 2014-02-06
TW201405106A (zh) 2014-02-01

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