TWI449435B - Magnetic diaphragm and manufacture method thereof - Google Patents

Description

Magnetic diaphragm and method of manufacturing same

The present invention relates to a magnetic diaphragm and a method of manufacturing the same, and in particular to a magnetic diaphragm for forming a magnetic layer on a diaphragm substrate by a thin film deposition method and a method of fabricating the same.

In recent years, due to the development of music files, the file format that greatly reduces the amount of audio data has been added. The playback quality of such files has not decreased significantly compared with the original uncompressed audio, and does not affect the listening experience of most users. Therefore, the current music player is produced in a large amount, and the speaker responsible for playing the music file is the key component of the sound output. The manufacturers of various music players usually have the quality and design of the speaker. Most concerned and focused.

Referring to FIG. 1, a conventional speaker 10 is disclosed. The speaker 10 is composed of a housing 11, a lower yoke plate 12, an upper yoke plate 13, a magnet 14, a voice coil 15, and a diaphragm. 16 is composed, wherein the lower yoke plate 12 is embedded in the casing 11, and the magnet 14 is placed on the lower yoke plate 12, and the upper yoke plate 13 is placed on the magnet 14, and the voice coil 15 is ringed. And is coupled to the diaphragm 16, and the voice coil 15 is interposed between the gap formed by the lower yoke plate 12 and the upper yoke plate 13, so that the voice coil 15 is located by the lower yoke plate 12, the upper yoke plate 13, and the magnet 14. Among the magnetic circuits that make up.

The above-mentioned conventional speaker 10 is the most common structural composition at present, and by providing the voice coil 15 and an electric signal to generate magnetism, it can attract or repel the characteristics of the magnetic circuit, and then drive the diaphragm 16 to generate vibration and emit sound. Obviously, among the components of the speaker, the diaphragm is the most important core component. It can even be said that the history of the development of the diaphragm is the development history of the diaphragm, and in the development of the diaphragm, it is usually aimed at The shape or material composition or the manufacturing method is changed. In order to make the speaker produce better acoustic quality, the quality, rigidity, damping, magnetic permeability, air tightness, elastic modulus, and geometric shape of the diaphragm must be considered. Heat resistance, moisture resistance, and ease of processing, so it is mostly selected from the following materials: pulp, plastic, metal, composite materials, cloth, silk, hemp, seaweed, bacteria and so on. Due to the different characteristics of different materials, diaphragm designers can choose the matching according to the acoustic quality requirements of the speakers.

In view of the fact that all kinds of electronic products are now designed to be miniaturized or thinned, various speaker design companies are currently thinking about how to reduce or reduce the components without affecting their acoustic performance, or even better. Acoustic performance, in addition, because the diaphragm must be driven by the tight combination with the voice coil, so a process must be added between the two, which is also a cost-cost loop, how to design a composite The function of the diaphragm to further save the use of components is an important issue.

In view of the above problems, an object of the present invention is to provide a magnetic diaphragm which is formed by forming a magnetic layer on a diaphragm substrate by a thin film deposition method and a method of assembling the same.

Therefore, in order to achieve the above object, the magnetic diaphragm of the present invention comprises a magnetic diaphragm for being disposed in an electroacoustic transducer. The magnetic diaphragm has a diaphragm substrate, and a magnetic material is deposited on the diaphragm substrate by a thin film deposition method on the diaphragm substrate to form a magnetic layer, so that the diaphragm substrate has magnetic properties. The layer is magnetic, and therefore has to be magnetically negotiated with one of the electroacoustic transducers.

In addition, in order to manufacture the above magnetic diaphragm, the present invention discloses a method for manufacturing a magnetic diaphragm, comprising: preparing a material for preparing a diaphragm substrate; and depositing a magnetic material onto the diaphragm substrate to form a magnetic film. a magnetic layer; heat treatment, molding the diaphragm substrate having the magnetic layer by heat treatment; and cutting, cutting the formed diaphragm substrate to a predetermined size.

Since the present invention utilizes a thin film deposition method to deposit a magnetic material on a diaphragm substrate, the magnetic diaphragm can increase the magnetic flux of the magnetic circuit and increase the loudness thereof when applied to a conventional electroacoustic transducer. And magnetic gas performance; in addition, since the diaphragm itself is magnetic, when it is sandwiched between electroacoustic transducers having two sets of magnetic circuits, it is reciprocatingly vibrated in two sets of magnetic circuits, and thus sound is generated. In this configuration, the magnet is omitted, and the electroacoustic transducer can be further advanced in a thinner manner.

Hereinafter, a magnetic diaphragm and a method of manufacturing the same according to a preferred embodiment of the present invention will be described with reference to the related drawings.

The present invention discloses a magnetic diaphragm for use in an electroacoustic transducer such as a speaker. When used in a speaker, the speaker generates a magnetic field by an electric signal to cause the diaphragm to vibrate and emit an acoustic signal; The magnetic diaphragm of the invention has a diaphragm substrate, and a magnetic material is deposited on the diaphragm substrate by a thin film deposition method to form a magnetic layer, so that the diaphragm substrate is magnetic and is obtained from the speaker. One of the magnetic circuits generates magnetic representations.

Furthermore, in order to manufacture a magnetic diaphragm that can be used in an electroacoustic transducer, a diaphragm substrate is prepared through the following processes: preparing a film, depositing a magnetic material onto the diaphragm substrate. Forming a magnetic layer; heat treating, molding the diaphragm substrate having the magnetic layer by heat treatment; and cutting, cutting the formed diaphragm substrate to a predetermined size.

Hereinafter, as shown in FIG. 2, in order to manufacture a magnetic diaphragm, a schematic diagram of a process such as Physical Vapor Deposition (PVD) is used here, which is a magnetic material. The microparticles are generated and the microparticles are deposited on a diaphragm substrate. Such physical vapor deposition generally includes vacuum evaporation and sputtering, in which the magnetic diaphragm is produced by sputtering. .

In the second figure, a working machine 20 is mainly disclosed, and a sealed space 21 is formed in the working machine 20, and a magnetic material 30 and a diaphragm substrate 40 are disposed in the sealed space 21; further, the working machine 20 In addition, a power source 50, a vacuum pump 60, and an ionizer 70 are disposed. One of the negative electrodes of the power source 50 is electrically connected to the magnetic material 30, and the positive electrode is connected to the diaphragm substrate 40. In addition, the vacuum pump 60 is inserted through The vacuum tube 61 of one of the sealed spaces 21 extracts air so that a vacuum state is formed in the sealed space 21, and the ionizer 70 is inserted into the sealed space 21 by an output tube 71, and ions are generated to bombard the magnetic material 30 to generate fine particles.

In this embodiment, the magnetic material 30 may be a soft magnetic material or a hard magnetic material, wherein the soft magnetic material is, for example, pure iron, low carbon steel, iron lanthanum alloy, iron aluminum alloy, iron lanthanum aluminum alloy, nickel iron alloy. , iron-cobalt alloy, soft ferrite, amorphous soft magnetic alloy, ultra-microcrystalline soft magnetic alloy and the above materials. The hard magnetic material is, for example, a ferrite permanent magnet material, an alumino-nickel-cobalt permanent magnet material, a rare earth permanent magnet material, an iron-chromium-cobalt permanent magnet material, an iron-nickel-copper permanent magnet material, a platinum-cobalt permanent magnet material, A combination of iron-platinum permanent magnet materials and the above materials.

In addition, the material selected for the diaphragm substrate 40 may be metal, plastic, cloth, paper, oxide, and a combination of the above materials.

The ions generated by the ionizer 70 may be a passive gas, for example, argon ions. When bombarding the magnetic material 30, the particles in the gas phase may be shot to be deposited on the diaphragm substrate 40 by sputtering. Because it is non-polluting, has good adhesion, and almost any material can be deposited, it is often used. In order to make the particles have a magnetic force on the diaphragm substrate 40, it is necessary to pass through a crystallization process to crystallize the particles.

The above-described process for crystallizing the fine particles can be carried out in the following several ways, and is merely exemplified here, and in fact, the same or similar crystallization process can be replaced.

<Method 1>

After the magnetic material 30 is sputtered on the diaphragm substrate 40 by a sputtering method, the magnetic material 30 is formed into a film on the diaphragm substrate 40, and then placed in a vacuum high temperature furnace for heat treatment, wherein the high temperature furnace is used. It is necessary to first vacuum and mix with the working environment at 4~5 °C / min to about 600 °C (or above), and after a constant temperature of about 20 minutes, cool down to room temperature at 4~5 °C / min to form a crystalline state.

<Method 2>

After the ions are struck against the magnetic material 30 to generate the fine particles, the working machine for sputtering is heated to about 600 ° C (or above), so that the fine particles are crystallized after passing through the high temperature region, and the crystallized magnetic material is deposited on the diaphragm material. 40 surface to form a film.

By the above process method, the diaphragm substrate 40 which is not magnetic is formed to form a magnetic film under the deposition of the magnetic material 30, so that the magnetic diaphragm is utilized in the present Among the more common speakers or other electroacoustic transducers, it can help to enhance the magnetic flux in the magnetic circuit, so that the magnetic performance in the speaker is better, and the control of the loudness can be effectively improved.

In addition, referring to FIG. 3, a speaker 90 with a magnetic diaphragm 80 is disclosed. The speaker 90 is composed of a first yoke plate 91, a second yoke plate 92, a first bracket 93, and a second bracket. 94. A first voice coil 95, a second voice coil 96, a steel sheet 97 and a circuit board 98, wherein the first bracket 93 and the second bracket 94 are respectively annularly formed in a disk shape. The first yoke plate 91 and the outer edge of the second yoke plate 92, the first voice coil 95 and the second voice coil 96 are respectively sleeved on one of the first yoke plate 91 (not shown) and the second On one of the protrusions 921 of the yoke plate 92, the magnetic diaphragm 80 is bonded to the sheet of the silicon steel sheet 97 to be sandwiched between the first bracket 93 and the second bracket 94, and the circuit board 98 is coupled to the first yoke plate 91. One end of the protrusion is provided, and is electrically connected to the wires 951 and 961 pulled out by the first voice coil 95 and the second voice coil 96.

In actual use, the electrical signal can be input to the first voice coil 95 and the second voice coil 96 according to requirements, and thus the magnetism generates magnetism, and the speaker 90 has a first magnetic circuit and a second magnetic circuit at the same time. When the two magnetic circuits are made to have corresponding magnetic properties and alternately excited, the magnetic diaphragm 80 interposed therebetween is magnetically attracted to the two magnetic circuits, and thus vibrates up and down to generate sound.

Obviously, since the magnetic diaphragm 80 itself has magnetic properties, it is even possible to omit the magnet in the conventional speaker, which is magnetically repulsed by the magnetic circuit itself and the magnetic circuit disposed thereon and below. Or attracting, and then vibrating to produce sound without affecting the function that the original speaker should achieve.

Finally, it must be noted that in addition to the above examples, physical vapor deposition is used to produce a magnetic diaphragm, and chemical vapor deposition (CVD) may also be selected to produce a magnetic diaphragm. At present, the most commonly used CVD techniques are: (1) "atmospheric pressure CVD" (abbreviated as APCVD) system, and (2) "low pressure CVD" (abbreviated LPCVD). System, (3) "plasma enhanced CVD" (abbreviated PECVD) system, (4) "high density plasma CVD" (HDP CVD) system.

In summary, the present invention utilizes a thin film deposition method to deposit a magnetic material on a diaphragm substrate, thereby enabling the magnetic diaphragm to assist in enhancing the magnetic circuit when applied to a conventional electroacoustic transducer. The magnetic flux has a certain influence on the control of loudness or magnetic performance. In addition, since the magnetic diaphragm itself has active magnetic attraction and magnetic repulsion, it can replace the magnet originally arranged in the electroacoustic transducer. When two sets of electroacoustic transducers of magnetic circuit are provided, the reciprocating pushing action can be performed in the two sets of magnetic circuits, and it is also a convenient structural design, but the invention of the original good sounding function is preserved.

The above is intended to be illustrative only and not limiting. Any equivalent modifications or alterations to the spirit and scope of the invention are intended to be included in the scope of the appended claims.

10. . . speaker

11. . . case

12. . . Lower yoke plate

13. . . Upper yoke plate

14. . . magnet

15. . . Voice coil

16. . . Diaphragm

20. . . Work machine

twenty one. . . hermetic space

30. . . Magnetic material

40. . . Diaphragm substrate

50. . . power supply

60. . . Vacuum pump

61. . . Vacuum tube

70. . . Ionizer

71. . . Output tube

80. . . Magnetic diaphragm

90. . . speaker

91. . . First yoke plate

92. . . Second yoke plate

921. . . Bulge

93. . . First bracket

94. . . Second bracket

95. . . First voice coil

951. . . wire

96. . . Second voice coil

961. . . wire

97. . . Steel sheet

98. . . Circuit board

Figure 1 is a schematic cross-sectional view of a conventional speaker;

2 is a schematic view showing the process of the magnetic diaphragm of the preferred embodiment of the present invention;

Figure 3 is a schematic view showing the magnetic diaphragm of the preferred embodiment of the present invention applied to a speaker.

20. . . Work machine

twenty one. . . hermetic space

30. . . Magnetic material

40. . . Diaphragm substrate

50. . . power supply

60. . . Vacuum pump

61. . . Vacuum tube

70. . . Ionizer

71. . . Output tube

80. . . Magnetic diaphragm

Claims (18)

A magnetic diaphragm for being disposed in an electroacoustic transducer, the magnetic diaphragm having a diaphragm substrate, and a magnetic material deposited on the diaphragm substrate by a thin film deposition method A magnetic layer is formed on the material to make the diaphragm substrate magnetic, and magnetic interaction with one of the electroacoustic transducers is generated. The magnetic diaphragm of claim 1, wherein the magnetic diaphragm is disposed in a speaker. The magnetic diaphragm of claim 1, wherein the magnetic material is a soft magnetic material. The magnetic vibrating membrane according to claim 3, wherein the soft magnetic material is one selected from the group consisting of pure iron, low carbon steel, iron lanthanum alloy, iron aluminum alloy, iron lanthanum aluminum alloy, Nickel-iron alloy, iron-cobalt alloy, soft ferrite, amorphous soft magnetic alloy, ultra-microcrystalline soft magnetic alloy and the above materials. The magnetic diaphragm of claim 1, wherein the magnetic material is a hard magnetic material. The magnetic diaphragm according to claim 5, wherein the hard magnetic material is one of the following materials: a ferrite permanent magnet material, an alumino-nickel-cobalt permanent magnet material, a rare earth permanent magnet material, iron Chromium-cobalt permanent magnet material, iron-nickel-copper permanent magnet material, platinum-cobalt permanent magnet material, iron-platinum permanent magnet material and the above materials. The magnetic diaphragm of claim 1, wherein the diaphragm substrate is selected from the group consisting of metal, plastic, cloth, paper, oxide, and a mixture of the above materials. The magnetic diaphragm of claim 1, wherein the magnetic material is deposited on the diaphragm substrate by physical vapor deposition. The magnetic diaphragm of claim 1, wherein the magnetic material is deposited on the diaphragm substrate by chemical vapor deposition. A method for manufacturing a magnetic diaphragm, comprising: preparing a material for preparing a diaphragm substrate; depositing a magnetic material onto the diaphragm substrate to form a magnetic layer; and heat treating the magnetic layer The diaphragm substrate is formed by heat treatment; and the cutting is performed to cut the formed diaphragm substrate to a predetermined size. The method for producing a magnetic diaphragm according to claim 10, wherein the magnetic material first excites the magnetic material by physical vapor deposition, and then the fine particles are re-deposited on the diaphragm substrate. The method for producing a magnetic diaphragm according to claim 11, wherein the magnetic material is deposited on the diaphragm substrate by vacuum evaporation. The method for producing a magnetic diaphragm according to claim 11, wherein the magnetic material is deposited on the diaphragm substrate by sputtering. The method for producing a magnetic diaphragm according to claim 11, wherein the fine particles are deposited on the diaphragm substrate, and then moved to a vacuum high temperature furnace for annealing treatment to crystallize the fine particles. The method for producing a magnetic diaphragm according to claim 11, wherein the fine particles are deposited on the diaphragm substrate after passing through a high temperature region. The method for producing a magnetic diaphragm according to claim 15, wherein the temperature in the high temperature region is 600 or more. The method for producing a magnetic diaphragm according to claim 10, wherein the magnetic material is deposited on the diaphragm substrate by chemical vapor deposition. The method for manufacturing a magnetic diaphragm according to claim 17, wherein the chemical vapor deposition method can select one of the following systems: an atmospheric pressure chemical vapor deposition (APCVD) system, a low pressure chemical vapor deposition (LPCVD) system. Plasma-assisted chemical vapor deposition (PECVD) systems, high-density plasma chemical vapor deposition (HDPCVD) systems.