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TWI447933B - Vertical led with eutectic layer - Google Patents

Vertical led with eutectic layer Download PDF

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TWI447933B
TWI447933B TW096117543A TW96117543A TWI447933B TW I447933 B TWI447933 B TW I447933B TW 096117543 A TW096117543 A TW 096117543A TW 96117543 A TW96117543 A TW 96117543A TW I447933 B TWI447933 B TW I447933B
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emitting diode
light
substrate
layer
diode structure
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TW096117543A
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TW200847461A (en
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Wen Huang Liu
Jui Kang Yen
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Semi Photonics Co Ltd
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具有共熔層之立式發光二極體 Vertical light-emitting diode with eutectic layer

本發明係關於發光二極體(LED,Light-emitting diode)技術之領域,尤有關於一立式發光二極體(VLED,vertical light-emitting diode)結構。 The present invention relates to the field of light-emitting diode (LED) technology, and more particularly to a vertical light-emitting diode (VLED) structure.

發光二極體(LEDs,Light-emitting diodes)已經大約有數十年了,而研究及發展努力還持續不斷地朝向改善它們的發光效率前進,因而增加其可應用的數目。散熱為改善發光效率上的主要限制因素,且因此對於LEDs的設計者來說,熱傳處理是一件重要的事。 Light-emitting diodes (LEDs) have been around for decades, and research and development efforts are continually moving toward improving their luminous efficiency, thereby increasing the number of applications that can be applied. Heat dissipation is a major limiting factor in improving luminous efficiency, and thus heat transfer processing is an important consideration for designers of LEDs.

當用高電流驅動LEDs時,由於從半導體晶粒之活性層到週遭環境的熱傳不足,會產生高元件溫度。高溫不只會導致元件損害及加速老化,且LED之光學特性也會隨著溫度而變。例如,一LED之光輸出一般會隨著元件溫度的增加而減少。再者,由於半導體能隙能量中的改變,發射波長會隨著溫度而改變。 When LEDs are driven with high currents, high component temperatures are created due to insufficient heat transfer from the active layer of the semiconductor die to the surrounding environment. High temperatures not only cause component damage and accelerated aging, but the optical properties of the LEDs also change with temperature. For example, the light output of an LED generally decreases as the temperature of the component increases. Furthermore, due to changes in the energy of the semiconductor band gap, the emission wavelength will change with temperature.

習知LED結構係形成於如藍寶石、碳化矽、矽、鍺、ZnO或砷化鎵之基板上,這些材質為熱絕緣體或具有不良熱傳導特性。藉由用如鉬之較佳熱傳導材質來取代習知LEDs之基板,已經創造出立式發光二極體(VLED,vertical light-emitting diode)結構來改善散熱,而其係透過以一銀膠(silver epoxy)或銀漿(silver paste)膠合或結合元件層,接著再將原來的基板用雷射來剝離或以蝕刻去除。因為此結構之薄磊晶層夾在n與p電極之間,所以贏得VLED這個名字。為了進一步改善散熱,稱為金屬基板垂直電流激發式LEDs(MvpLEDs,metal vertical photon LEDs)之新近的VLED結構,在不使用一膠合層或一接合層下,已經用基於金屬之基板取代由如SiO2或藍寶石之不良熱傳導性材質組成的基板;相反的, MvpLEDs使用如電或無電化學沉積之沉積技術,來使基於金屬之基板直接鄰近該元件層而形成,而沒有一居中的膠合或接合層來阻礙熱傳導。 Conventional LED structures are formed on substrates such as sapphire, tantalum carbide, tantalum, niobium, ZnO or gallium arsenide, which are thermal insulators or have poor thermal conductivity properties. By replacing the substrate of the conventional LEDs with a preferred heat-conducting material such as molybdenum, a vertical light-emitting diode (VLED) structure has been created to improve heat dissipation, which is transmitted through a silver paste ( The silver epoxy or silver paste is glued or bonded to the component layer, and then the original substrate is peeled off by laser or removed by etching. Since the thin epitaxial layer of this structure is sandwiched between the n and p electrodes, the name VLED is won. In order to further improve heat dissipation, a recent VLED structure called metal vertical photo-excited LEDs (MvpLEDs, metal vertical photon LEDs) has been replaced with a metal-based substrate such as SiO without using a glue layer or a bonding layer. 2 or a substrate composed of a poorly thermally conductive material of sapphire; in contrast, MvpLEDs use deposition techniques such as electroless or electrochemical deposition to form a metal-based substrate directly adjacent to the element layer without a centering glue or bonding layer To hinder heat transfer.

還有,在先前技術中散熱的主要路徑係經由熱傳導,從LED疊層之活性層經過基於金屬之基板及一相對厚的銀膠層,到一印刷電路板(PCB,printed circuit board)之金屬導線架或銲墊。此設計的問題在於銀膠具有一低熱傳導性及一高熱膨脹係數(CTE,thermal coefficient of expansion)。具有此一低熱傳導性,相對厚的銀膠層有點像是一熱阻器;具有此相對高CTE,由於銀膠層之膨脹及收縮所造成之應力,在高溫且一段時間下,習知技術VLEDs亦具有減少之可靠度。 Also, the main path of heat dissipation in the prior art is through heat conduction from the active layer of the LED stack through the metal-based substrate and a relatively thick silver paste layer to the metal of a printed circuit board (PCB). Lead frame or pad. The problem with this design is that the silver paste has a low thermal conductivity and a high coefficient of thermal expansion (CTE). With such a low thermal conductivity, the relatively thick silver rubber layer is a bit like a thermal resistor; with this relatively high CTE, due to the stress caused by the expansion and contraction of the silver rubber layer, at a high temperature for a period of time, the conventional technology VLEDs also have reduced reliability.

因此,所需要的就是一改善技術來製造VLEDs,較佳的是改善發光效率、展現較大散熱及增加可靠度。 Therefore, what is needed is an improved technique for fabricating VLEDs, preferably to improve luminous efficiency, exhibit greater heat dissipation, and increase reliability.

本發明之一實施例提供一立式發光二極體(VLED,vertical light-emitting diode)結構。該結構通常包含一共熔層、一鄰近該共熔層而配置之基於金屬的基板、一配置在該基板之上的發光二極體疊層、及一連接到該發光二極體疊層之電極。某些實施例可包含一反射層,用來幫助沿一單一方向導引光線,因而增加發光效率;及/或一供較佳黏著度之金屬保護層,且因此增加可靠度。 One embodiment of the present invention provides a vertical light-emitting diode (VLED) structure. The structure generally includes a eutectic layer, a metal-based substrate disposed adjacent to the eutectic layer, a light emitting diode stack disposed on the substrate, and an electrode connected to the light emitting diode stack . Some embodiments may include a reflective layer to help direct light in a single direction, thereby increasing luminous efficiency; and/or a metal protective layer for better adhesion, and thus increasing reliability.

本發明之另一實施例提供一立式發光二極體(VLED,vertical light-emitting diode)結構。該結構通常包含一導線架、一基於金屬之基板、一配置在該導線架與該基於金屬之基板間的共熔層、一配置在該基板之上的發光二極體疊層,及一連接到該發光二極體疊層之電極。某些實施例可包含一反射層,用來幫助沿一單一方向導引光線,因而增加發光效率;及/或一供較佳黏著度之金屬保護層,且因此增加可靠度。 Another embodiment of the present invention provides a vertical light-emitting diode (VLED) structure. The structure generally includes a lead frame, a metal-based substrate, a eutectic layer disposed between the lead frame and the metal-based substrate, a light-emitting diode stack disposed on the substrate, and a connection To the electrode of the LED stack. Some embodiments may include a reflective layer to help direct light in a single direction, thereby increasing luminous efficiency; and/or a metal protective layer for better adhesion, and thus increasing reliability.

本發明之另一實施例提供一立式發光二極體(VLED,vertical light-emitting diode)結構。該結構通常包含一共熔層、一配置在該共熔層之上的導線架、一配置在該導線架與一基於金屬之基板間的接合層、一配置在該基板之上的發光二極體疊層,及一連接到該發光二極體疊層之電極。該接合層可為一第二共熔層。某些實施例可包含一反射層,用來幫助沿一單一方向導引光線,因而增加發光效率;及/或一供較佳黏著度之金屬保護層,且因此增加可靠度。 Another embodiment of the present invention provides a vertical light emitting diode (VLED, vertical) Light-emitting diode) structure. The structure generally includes a eutectic layer, a lead frame disposed on the eutectic layer, a bonding layer disposed between the lead frame and a metal-based substrate, and a light emitting diode disposed on the substrate A laminate, and an electrode connected to the LED stack. The bonding layer can be a second eutectic layer. Some embodiments may include a reflective layer to help direct light in a single direction, thereby increasing luminous efficiency; and/or a metal protective layer for better adhesion, and thus increasing reliability.

本發明之實施例提供一可併入MvpLEDs之立式發光二極體(VLED,vertical light-emitting diode)結構,且相較於習知VLEDs提供一改善熱傳路徑及增加可靠度。 Embodiments of the present invention provide a vertical light-emitting diode (VLED) structure that can be incorporated into MvpLEDs, and provide an improved heat transfer path and increased reliability compared to conventional VLEDs.

一例示性LED結構An exemplary LED structure

根據本發明之一實施例,圖1為具有一共熔層110之VLED結構100的橫剖面略圖。一LED疊層104為任何VLED結構之必要組件,且可包含任何合適的材質,如AlGaInN或AlGaInP。一基板108可位於該LED疊層104之下。該基板108可包含單一層或複數層,且一般具有10到400μm的厚度。在任何情況中,該基板108可由如Cu、Ni、Ag、Au、Al、Cu-Co、Ni-Co、Cu-W、Cu-Mo、Ni/Cu及Ni/Cu-Mo之合適金屬或金屬合金的單一元素或組合構成。該基板108之材質的選擇,係能夠與該共熔層110形成共熔合接(eutectic bond)。因此,相對於藍寶石或其他非金屬基板材質,一般可使用金屬合金,且不管怎樣金屬合金通常擁有較佳熱傳導特性。一電極102可配置在該LED疊層104之上,並與之連接。 1 is a schematic cross-sectional view of a VLED structure 100 having a eutectic layer 110, in accordance with an embodiment of the present invention. An LED stack 104 is an essential component of any VLED structure and may comprise any suitable material, such as AlGaInN or AlGaInP. A substrate 108 can be located below the LED stack 104. The substrate 108 may comprise a single layer or a plurality of layers, and typically has a thickness of 10 to 400 μm. In any case, the substrate 108 may be a suitable metal or metal such as Cu, Ni, Ag, Au, Al, Cu-Co, Ni-Co, Cu-W, Cu-Mo, Ni/Cu, and Ni/Cu-Mo. A single element or combination of alloys. The material of the substrate 108 is selected to form a eutectic bond with the eutectic layer 110. Therefore, metal alloys can generally be used with respect to sapphire or other non-metallic substrate materials, and metal alloys generally have better heat transfer characteristics. An electrode 102 can be disposed over and coupled to the LED stack 104.

在LED疊層104相對於電極102的一側上(如下方),可形成一反射層106(或如圖中標示的鏡面)來反射由LED疊層104之該側所產生的光線。有此反射,光線不會浪費且貢獻到總光線射出上,因而增加發光效率。該反射層106可由任何合適材質組成, 如AgNi、Ni/Ag/Ni/Au、Ag/Ni/Au、AuZn、AuBe、ITO/Ag、ITO/Ag2O/Ag、ITO/Al或Ag/Ti/Ni/Au。該反射層106也可使用一包含Ag、Au、Cr、Pt、Pd、Rh或Al的合金。製造時,在基板108加到此結構之前,反射層106就已經沉積在前述LED疊層104之該側上。 On the side of the LED stack 104 relative to the electrode 102 (as follows), a reflective layer 106 (or mirror as indicated in the figure) can be formed to reflect the light generated by the side of the LED stack 104. With this reflection, the light is not wasted and contributes to the total light emission, thus increasing the luminous efficiency. The reflective layer 106 may be composed of any suitable material such as AgNi, Ni/Ag/Ni/Au, Ag/Ni/Au, AuZn, AuBe, ITO/Ag, ITO/Ag 2 O/Ag, ITO/Al or Ag/Ti. /Ni/Au. The reflective layer 106 may also use an alloy comprising Ag, Au, Cr, Pt, Pd, Rh or Al. At the time of manufacture, the reflective layer 106 has been deposited on the side of the aforementioned LED stack 104 before the substrate 108 is applied to the structure.

一共熔層110形成於基板108之下。VLED製造時,共熔層110之使用容許在一低處理溫度下,具有高接合強度及良好穩定度之共熔合接,形成於該基板108與該共熔層110之間。再者,如表格1中可觀察到的,與先前技術VLED結構中所使用的Ag膠相比,共熔體(如AuSn、CuMo及CuW)具有一較高熱傳導性及一較低熱膨脹係數。 A common fused layer 110 is formed under the substrate 108. When the VLED is fabricated, the use of the eutectic layer 110 allows for a eutectic bond with high bonding strength and good stability at a low processing temperature, formed between the substrate 108 and the eutectic layer 110. Furthermore, as can be observed in Table 1, the eutectic (e.g., AuSn, CuMo, and CuW) has a higher thermal conductivity and a lower coefficient of thermal expansion than the Ag paste used in prior art VLED structures.

共熔層110與VLED結構100之一導線架(未顯示)或其他基底連接元件間的較高熱傳導性,導致該LED疊層104之活性層與週遭環境之間總熱阻的減少。因為此減少的熱阻,當與習知VLEDs做比較時,在一給定操作電流下,本發明之實施例可增加光輸出及可靠度,因而產生具有較大發光效率之裝置。 The higher thermal conductivity between the eutectic layer 110 and one of the leadframes (not shown) or other substrate connection components of the VLED structure 100 results in a reduction in the total thermal resistance between the active layer of the LED stack 104 and the surrounding environment. Because of this reduced thermal resistance, embodiments of the present invention can increase light output and reliability at a given operating current when compared to conventional VLEDs, thereby resulting in devices having greater luminous efficiency.

再者,當與習知裝置相比時,較低熱膨脹係數之共熔特性及共熔合接本身,可導致可靠度增加。當裝置內發生高溫時,共熔層110之膨脹及形狀改變,少於一般包含習知VLEDs之銀膠的相對應層。並且,共熔合接可導致基板108之較佳黏著度。由此原因,在該VLED之長期壽命中,該共熔層110可與該基板108維持較緊密、固定的連接。 Furthermore, the eutectic properties of the lower coefficient of thermal expansion and the eutectic bonding itself can result in increased reliability when compared to conventional devices. When a high temperature occurs in the device, the expansion and shape of the eutectic layer 110 changes less than the corresponding layer of silver paste generally containing conventional VLEDs. Also, the eutectic bonding can result in a better adhesion of the substrate 108. For this reason, the eutectic layer 110 can maintain a tighter, fixed connection with the substrate 108 over the long term life of the VLED.

至於共熔層110本身,可包含任何合適材質之單一層或複數層,如Sn、In、Pb、AuSn、CuSn、AgIn、CuIn、SnPb、SnInCu、SnAgIn、SnAg、SnZn、SnAgCu、SnZnBi、SnZnBiIn或SnAgInCu。該VLED結構100之製造時,可藉由沉積、濺鍍、蒸鍍、電鍍、無電電鍍、塗佈、噴墨或印刷來形成該共熔層110。對某些實施例來說,雖然共熔層110之厚度可在0.01到100μm之間,但其一般具有0.5到2μm的厚度。此一般厚度範圍比習知VLEDs中Ag膠層一般5到20μm的厚度薄上許多。該共熔層110減少的厚度亦可改善某些實施例之VLED結構100的熱傳導性。 The eutectic layer 110 itself may comprise a single layer or a plurality of layers of any suitable material, such as Sn, In, Pb, AuSn, CuSn, AgIn, CuIn, SnPb, SnInCu, SnAgIn, SnAg, SnZn, SnAgCu, SnZnBi, SnZnBiIn or SnAgInCu. When the VLED structure 100 is fabricated, the eutectic layer 110 can be formed by deposition, sputtering, evaporation, electroplating, electroless plating, coating, inkjet, or printing. For certain embodiments, although the eutectic layer 110 may have a thickness between 0.01 and 100 μm, it typically has a thickness of 0.5 to 2 μm. This general thickness range is much thinner than the thickness of the Ag glue layer in conventional VLEDs, typically 5 to 20 μm. The reduced thickness of the eutectic layer 110 also improves the thermal conductivity of the VLED structure 100 of certain embodiments.

為了進一步增加可靠度,如圖2之VLED略圖中所示,某些實施例亦可包含一金屬保護層202,介插於共熔層110與基板108之間。該金屬保護層202可幫助避免共熔層110中之成分氧化及擴散進入基板108,因而增加該共熔層110之壽命,且因此增加界定之VLED結構100的壽命及可靠度。該金屬保護層202一般具有0.01到100μm的厚度,其可包含Ni、W、Mo、Pt、Ta、Rh、Au、V、TiW、TaN或Ni-Co,且可由沉積、濺鍍、蒸鍍、電鍍、無電電鍍、塗佈、噴墨及印刷來形成。 To further increase the reliability, as shown in the VLED schematic of FIG. 2, some embodiments may also include a metal protection layer 202 interposed between the eutectic layer 110 and the substrate 108. The metal cap layer 202 can help prevent oxidation and diffusion of components in the eutectic layer 110 into the substrate 108, thereby increasing the lifetime of the eutectic layer 110, and thus increasing the lifetime and reliability of the defined VLED structure 100. The metal protective layer 202 generally has a thickness of 0.01 to 100 μm, which may include Ni, W, Mo, Pt, Ta, Rh, Au, V, TiW, TaN or Ni-Co, and may be deposited, sputtered, evaporated, Electroplated, electroless plating, coating, inkjet, and printing are formed.

為了具有將VLED結構100安裝到一PCB銲墊或其他合適表面的裝置,如圖4中說明,本發明之實施例可包含一導線架402。該導線架402可配置在共熔層110之下,且經由共熔合接與之連接,以設法受惠於伴隨共熔體之增加的熱傳導及可靠度。如上述說明且進一步圖解於圖5中,某些具有一導線架402及一共熔層110之實施例,亦可具有一金屬保護層202,介插於基於金屬之基板108與該共熔層110之間。對某些實施例來說,如圖6中所示,一第二共熔層602可形成於該導線架402下方,設法提供與黏著表面強而可靠且具有低熱阻的連接。和上述說明之共熔層110一樣,該第二共熔層602可由相同材質相同方式形成,且擁有相同厚度。對具有一第二共熔層602之實施例來說,該共熔層110可被一接合層604取代,該接合層604可包含如銀膠之任何合適的材質,用來將基板108接合到導線架。 In order to have means for mounting the VLED structure 100 to a PCB pad or other suitable surface, as illustrated in FIG. 4, embodiments of the present invention may include a leadframe 402. The leadframe 402 can be disposed below the eutectic layer 110 and coupled thereto via eutectic bonding to seek to benefit from increased heat transfer and reliability with the eutectic. As described above and further illustrated in FIG. 5, some embodiments having a lead frame 402 and a eutectic layer 110 may also have a metal protective layer 202 interposed between the metal-based substrate 108 and the eutectic layer 110. between. For some embodiments, as shown in FIG. 6, a second eutectic layer 602 can be formed under the leadframe 402 to provide a connection that is strong and reliable with a low thermal resistance to the adhesive surface. Like the eutectic layer 110 described above, the second eutectic layer 602 can be formed in the same manner from the same material and have the same thickness. For embodiments having a second eutectic layer 602, the eutectic layer 110 can be replaced by a bonding layer 604, which can comprise any suitable material, such as silver paste, for bonding the substrate 108 to Lead frame.

再者,具有一第二共熔層602之實施例,可具有一第二金屬保護層(未顯示),介插於該第二共熔層602與該導線架402之間。該第二金屬保護層可幫助避免第二共熔層602中之成分氧化及擴散進入導線架402,因而增加該第二共熔層602之壽命,且因此增加界定之VLED結構100的壽命及可靠度。該第二金屬保護層一般具有0.01到100μm的厚度,其可包含Ni、W、Mo、Pt、Ta、Rh、Au、V、TiW、TaN或Ni-Co,且可經由沉積、濺鍍、蒸鍍、電鍍、無電電鍍、塗佈、噴墨及印刷來形成。 Furthermore, an embodiment having a second eutectic layer 602 can have a second metal protective layer (not shown) interposed between the second eutectic layer 602 and the leadframe 402. The second metal protective layer can help prevent oxidation and diffusion of components in the second eutectic layer 602 into the leadframe 402, thereby increasing the lifetime of the second eutectic layer 602, and thus increasing the lifetime and reliability of the defined VLED structure 100. degree. The second metal protective layer generally has a thickness of 0.01 to 100 μm, which may include Ni, W, Mo, Pt, Ta, Rh, Au, V, TiW, TaN or Ni-Co, and may be deposited, sputtered, steamed Formed by plating, electroplating, electroless plating, coating, inkjet, and printing.

本發明之某些實施例可包含供某些應用之附屬特徵。例如,對某些實施例來說,如圖3之VLED略圖中所示,該LED疊層104之一部份表面302,可以任何所欲的方式圖案化,以設法改善光擷取。此表面圖案可增加VLED的亮度,因而增加其發光效率。並且在某些實施例中,任何圖式中所示VLED結構100,可併入一LED裝置,例如,藉由將該結構封裝在具有導線之殼體中,該導線提供該TED疊層104及基板108之外部電連結。 Certain embodiments of the invention may include accessory features for certain applications. For example, for some embodiments, as shown in the VLED sketch of Figure 3, a portion of surface 302 of the LED stack 104 can be patterned in any desired manner to seek to improve light extraction. This surface pattern can increase the brightness of the VLED, thus increasing its luminous efficiency. And in some embodiments, the VLED structure 100 shown in any of the figures can be incorporated into an LED device, for example, by packaging the structure in a housing having a wire that provides the TED stack 104 and The external connection of the substrate 108 is electrically connected.

雖然上述係指向本發明之實施例,然而在沒有離開本發明之 基本範疇下,可想出本發明其他及另外的實施例,且其範疇由隨後申請專利範圍來決定之。 Although the above is directed to embodiments of the invention, without departing from the invention Other and additional embodiments of the invention are conceivable in the basic scope, and the scope of the invention is determined by the scope of the subsequent claims.

100‧‧‧立式發光二極體結構 100‧‧‧Vertical LED structure

102‧‧‧電極 102‧‧‧Electrode

104‧‧‧發光二極體疊層 104‧‧‧Light Emitting Body Lamination

106‧‧‧反射層 106‧‧‧reflective layer

108‧‧‧基板 108‧‧‧Substrate

110‧‧‧共熔層 110‧‧‧Composite layer

202‧‧‧金屬保護層 202‧‧‧Metal protective layer

302‧‧‧表面 302‧‧‧ surface

402‧‧‧導線架 402‧‧‧ lead frame

602‧‧‧第二共熔層 602‧‧‧Second eutectic layer

604‧‧‧接合層 604‧‧‧ joint layer

上述簡短摘要之本發明的更特定說明,可參考部分說明於附加圖式中的實施例,以使本發明之上述特徵可被詳細的了解。然而,吾人應注意的是,因為此發明可容許其他等效的實施例,所以附加圖式只是說明本發明之代表性實施例,且因此不該被視為其範圍的限制。 The above-described features of the present invention will be described in detail with reference to the preferred embodiments of the invention. However, it is to be understood that the appended claims are not intended to be limited

根據本發明之一實施例,圖1為具有一共熔層之VLED的橫剖面略圖;根據本發明之一實施例,圖2為具有一共熔層與一金屬保護層之VLED的橫剖面略圖;根據本發明之一實施例,圖3為具有一共熔層之VLED的橫剖面略圖,其描繪該LED疊層之圖案化表面;根據本發明之一實施例,圖4為具有一共熔層及一導線架之VLED的橫剖面略圖;根據本發明之一實施例,圖5為具有一共熔層、一金屬保護層及一導線架之VLED的橫剖面略圖;及根據本發明之一實施例,圖6為具有一接合層、一導線架及一共熔層之VLED的橫剖面略圖。 1 is a schematic cross-sectional view of a VLED having a eutectic layer; FIG. 2 is a cross-sectional view of a VLED having a eutectic layer and a metal protective layer, according to an embodiment of the present invention; An embodiment of the present invention, FIG. 3 is a schematic cross-sectional view of a VLED having a eutectic layer depicting a patterned surface of the LED stack; FIG. 4 is a eutectic layer and a wire in accordance with an embodiment of the present invention. FIG. 5 is a schematic cross-sectional view of a VLED having a eutectic layer, a metal protective layer, and a lead frame; and FIG. 6 is an embodiment of the present invention, FIG. 6 is a schematic cross-sectional view of a VLED of a VLED; A cross-sectional view of a VLED having a bonding layer, a leadframe, and a eutectic layer.

100‧‧‧立式發光二極體結構 100‧‧‧Vertical LED structure

102‧‧‧電極 102‧‧‧Electrode

104‧‧‧發光二極體疊層 104‧‧‧Light Emitting Body Lamination

106‧‧‧反射層 106‧‧‧reflective layer

108‧‧‧基板 108‧‧‧Substrate

110‧‧‧共熔層 110‧‧‧Composite layer

Claims (41)

一種發光二極體結構,包含:一基板,包括金屬及金屬合金材質至少其中一種;一共熔層,與該基板熱性耦合,其中該共熔層包含Sn、In、Pb、AuSn、CuSn、AgIn、CuIn、SnPb、SnInCu、SnAgIn、SnAg、SnZn、SnAgCu、SnZnBi、SnZnBiIn及SnAgInCu至少其中一種;一發光二極體疊層,配置在該基板之上;及一電極,連接到該發光二極體疊層。 A light emitting diode structure comprising: a substrate comprising at least one of a metal and a metal alloy material; a eutectic layer thermally coupled to the substrate, wherein the eutectic layer comprises Sn, In, Pb, AuSn, CuSn, AgIn, At least one of CuIn, SnPb, SnInCu, SnAgIn, SnAg, SnZn, SnAgCu, SnZnBi, SnZnBiIn, and SnAgInCu; a light emitting diode stack disposed on the substrate; and an electrode connected to the LED stack Floor. 如申請專利範圍第1項之發光二極體結構,其中該共熔層包含複數層。 The luminescent diode structure of claim 1, wherein the eutectic layer comprises a plurality of layers. 如申請專利範圍第1項之發光二極體結構,其中該共熔層具有0.01到100μm的厚度。 The light-emitting diode structure of claim 1, wherein the eutectic layer has a thickness of 0.01 to 100 μm. 如申請專利範圍第1項之發光二極體結構,其中藉由沉積、濺鍍、蒸鍍、電鍍、無電電鍍、塗佈、噴墨及印刷至少其中一種來形成該共熔層。 The light-emitting diode structure of claim 1, wherein the eutectic layer is formed by at least one of deposition, sputtering, evaporation, electroplating, electroless plating, coating, inkjet, and printing. 如申請專利範圍第1項之發光二極體結構,其中該基板包含單一層或複數層。 The light-emitting diode structure of claim 1, wherein the substrate comprises a single layer or a plurality of layers. 如申請專利範圍第1項之發光二極體結構,其中該基板包含Cu、Ni、Ag、Au、Al、Cu-Co、Ni-Co、Cu-W、Cu-Mo、Ni/Cu及Ni/Cu-Mo至少其中一種。 The light-emitting diode structure of claim 1, wherein the substrate comprises Cu, Ni, Ag, Au, Al, Cu-Co, Ni-Co, Cu-W, Cu-Mo, Ni/Cu, and Ni/ At least one of Cu-Mo. 如申請專利範圍第1項之發光二極體結構,其中該基板具有10到400μm的厚度。 The light-emitting diode structure of claim 1, wherein the substrate has a thickness of 10 to 400 μm. 如申請專利範圍第1項之發光二極體結構,更包含一反射層,配置在該基板與該發光二極體疊層之間。 The light emitting diode structure of claim 1 further includes a reflective layer disposed between the substrate and the light emitting diode stack. 如申請專利範圍第8項之發光二極體結構,其中該反射層包含AgNi、Ni/Ag/Ni/Au、Ag/Ni/Au、Ag/Ti/Ni/Au、AuZn、AuBe、ITO/Ag、ITO/Ag2O/Ag、ITO/Al及一合金至少其中一種,該合金包含Ag、Au、Cr、Pt、Pd、Rh或Al。 The light-emitting diode structure of claim 8, wherein the reflective layer comprises AgNi, Ni/Ag/Ni/Au, Ag/Ni/Au, Ag/Ti/Ni/Au, AuZn, AuBe, ITO/Ag. At least one of ITO/Ag 2 O/Ag, ITO/Al, and an alloy containing Ag, Au, Cr, Pt, Pd, Rh, or Al. 如申請專利範圍第1項之發光二極體結構,其中該發光二 極體疊層係AlGaInN及AlGaInP至少其中一種。 Such as the light-emitting diode structure of claim 1 of the patent scope, wherein the light-emitting diode The polar body layer is at least one of AlGaInN and AlGaInP. 如申請專利範圍第1項之發光二極體結構,其中該發光二極體疊層之一部份表面係圖案化,以改善光擷取。 The light-emitting diode structure of claim 1, wherein a portion of the surface of the light-emitting diode stack is patterned to improve light extraction. 如申請專利範圍第1項之發光二極體結構,更包含一供外部連接之導線架,配置在該共熔層之下。 The light-emitting diode structure of claim 1 further includes a lead frame for external connection, disposed under the eutectic layer. 一種發光二極體結構,包含:一基板,包括金屬及金屬合金材質至少其中一種;一共熔層,與該基板熱性耦合;一金屬保護層,配置在該基板與該共熔層之間;一發光二極體疊層,配置在該基板之上,及一電極,連接到該發光二極體疊層。 A light emitting diode structure comprising: a substrate comprising at least one of a metal and a metal alloy material; a eutectic layer thermally coupled to the substrate; a metal protective layer disposed between the substrate and the eutectic layer; A light emitting diode stack is disposed on the substrate, and an electrode is connected to the light emitting diode stack. 如申請專利範圍第13項之發光二極體結構,其中該金屬保護層包含Ni、W、Mo、Pt、Ta、Rh、Au、V、TiW、TaN及Ni-Co至少其中一種。 The light-emitting diode structure of claim 13, wherein the metal protective layer comprises at least one of Ni, W, Mo, Pt, Ta, Rh, Au, V, TiW, TaN and Ni-Co. 如申請專利範圍第13項之發光二極體結構,其中該金屬保護層具有0.01到100μm的厚度。 The light-emitting diode structure of claim 13, wherein the metal protective layer has a thickness of 0.01 to 100 μm. 如申請專利範圍第13項之發光二極體結構,其中藉由沉積、濺鍍、蒸鍍、電鍍、無電電鍍、塗佈、噴墨及印刷至少其中一種來形成該金屬保護層。 The light-emitting diode structure of claim 13, wherein the metal protective layer is formed by at least one of deposition, sputtering, evaporation, electroplating, electroless plating, coating, inkjet, and printing. 一種發光二極體,包含:一殼體;一基板,包括金屬及金屬合金材質至少其中一種;一共熔層,與該基板熱性耦合,其中該共熔層包含Sn、In、Pb、AuSn、CuSn、AgIn、CuIn、SnPb、SnInCu、SnAgIn、SnAg、SnZn、SnAgCu、SnZnBi、SnZnBiIn及SnAgInCu至少其中一種;一發光二極體疊層,配置在該基板之上,及電極,提供該發光二極體疊層及基板之外部電連結。 A light emitting diode comprising: a casing; a substrate comprising at least one of a metal and a metal alloy; a eutectic layer thermally coupled to the substrate, wherein the eutectic layer comprises Sn, In, Pb, AuSn, CuSn At least one of AgIn, CuIn, SnPb, SnInCu, SnAgIn, SnAg, SnZn, SnAgCu, SnZnBi, SnZnBiIn, and SnAgInCu; a light emitting diode stack disposed on the substrate, and an electrode to provide the light emitting diode The external connection of the laminate and the substrate. 如申請專利範圍第17項之發光二極體,更包含一金屬保護層,配置在該基板與該共熔層之間。 The light-emitting diode of claim 17 further includes a metal protective layer disposed between the substrate and the eutectic layer. 如申請專利範圍第17項之發光二極體,更包含一反射層,配置在該基板與該發光二極體疊層之間。 The light-emitting diode of claim 17 further comprising a reflective layer disposed between the substrate and the light-emitting diode stack. 如申請專利範圍第17項之發光二極體,其中該發光二極體疊層之一部份表面係圖案化,以改善光擷取。 The light-emitting diode of claim 17, wherein a portion of the surface of the light-emitting diode stack is patterned to improve light extraction. 一種發光二極體結構,包含:一共熔層,其中該共熔層包含Sn、In、Pb、AuSn、CuSn、AgIn、CuIn、SnPb、SnInCu、SnAgIn、SnAg、SnZn、SnAgCu、SnZnBi、SnZnBiIn及SnAgInCu至少其中一種;一供外部連接之導線架,配置在鄰近於該共熔層;一接合層,配置在該導線架與一基板之間,其中該基板包括金屬及金屬合金材質至少其中一種;一發光二極體疊層,配置在該基板之上,及一電極,連接到該發光二極體疊層。 A light emitting diode structure comprising: a eutectic layer, wherein the eutectic layer comprises Sn, In, Pb, AuSn, CuSn, AgIn, CuIn, SnPb, SnInCu, SnAgIn, SnAg, SnZn, SnAgCu, SnZnBi, SnZnBiIn, and SnAgInCu At least one of the two; a lead frame for external connection, disposed adjacent to the eutectic layer; a bonding layer disposed between the lead frame and a substrate, wherein the substrate comprises at least one of a metal and a metal alloy material; A light emitting diode stack is disposed on the substrate, and an electrode is connected to the light emitting diode stack. 如申請專利範圍第21項之發光二極體結構,其中該共熔層包含複數層。 The luminescent diode structure of claim 21, wherein the eutectic layer comprises a plurality of layers. 如申請專利範圍第21項之發光二極體結構,其中該共熔層具有0.01到100μm的厚度。 The light-emitting diode structure of claim 21, wherein the eutectic layer has a thickness of 0.01 to 100 μm. 如申請專利範圍第21項之發光二極體結構,其中藉由沉積、濺鍍、蒸鍍、電鍍、無電電鍍、塗佈、噴墨及印刷至少其中一種來形成該共熔層。 The light-emitting diode structure of claim 21, wherein the eutectic layer is formed by at least one of deposition, sputtering, evaporation, electroplating, electroless plating, coating, inkjet, and printing. 如申請專利範圍第21項之發光二極體結構,其中該基板包含單一層或複數層。 The luminescent diode structure of claim 21, wherein the substrate comprises a single layer or a plurality of layers. 如申請專利範圍第21項之發光二極體結構,其中該基板包含Cu、Ni、Ag、Au、Al、Cu-Co、Ni-Co、Cu-W、Cu-Mo、Ni/Cu及Ni/Cu-Mo至少其中一種。 The light-emitting diode structure of claim 21, wherein the substrate comprises Cu, Ni, Ag, Au, Al, Cu-Co, Ni-Co, Cu-W, Cu-Mo, Ni/Cu, and Ni/ At least one of Cu-Mo. 如申請專利範圍第21項之發光二極體結構,其中該基板具有10到400μm的厚度。 The light-emitting diode structure of claim 21, wherein the substrate has a thickness of 10 to 400 μm. 如申請專利範圍第21項之發光二極體結構,更包含一反射層,配置在該基板與該發光二極體疊層之間。 The light emitting diode structure of claim 21, further comprising a reflective layer disposed between the substrate and the light emitting diode stack. 如申請專利範圍第28項之發光二極體結構,其中該反射層包含AgNi、Ni/Ag/Ni/Au、Ag/Ni/Au、Ag/Ti/Ni/Au、AuZn、AuBe、ITO/Ag、ITO/Ag2O/Ag、ITO/Al及一合金至少其中一種,該合金包含Ag、Au、Cr、Pt、Pd、Rh或Al。 The light-emitting diode structure of claim 28, wherein the reflective layer comprises AgNi, Ni/Ag/Ni/Au, Ag/Ni/Au, Ag/Ti/Ni/Au, AuZn, AuBe, ITO/Ag At least one of ITO/Ag 2 O/Ag, ITO/Al, and an alloy containing Ag, Au, Cr, Pt, Pd, Rh, or Al. 如申請專利範圍第21項之發光二極體結構,其中該發光二極體疊層係AlGaInN及AlGaInP至少其中一種。 The light-emitting diode structure of claim 21, wherein the light-emitting diode stack is at least one of AlGaInN and AlGaInP. 如申請專利範圍第21項之發光二極體結構,其中該發光二極體疊層之一部份表面係圖案化,以改善光擷取。 The light-emitting diode structure of claim 21, wherein a portion of the surface of the light-emitting diode stack is patterned to improve light extraction. 如申請專利範圍第21項之發光二極體結構,其中該接合層係一第二共熔層,包含Sn、In、Pb、AuSn、CuSn、AgIn、CuIn、SnPb、SnInCu、SnAgIn、SnAg、SnZn、SnAgCu、SnZnBi、SnZnBiIn及SnAgInCu至少其中一種。 The light-emitting diode structure of claim 21, wherein the bonding layer is a second eutectic layer comprising Sn, In, Pb, AuSn, CuSn, AgIn, CuIn, SnPb, SnInCu, SnAgIn, SnAg, SnZn At least one of SnAgCu, SnZnBi, SnZnBiIn, and SnAgInCu. 一種發光二極體結構,包含:一共熔層;一供外部連接之導線架,配置在該共熔層之上;一金屬保護層,配置在該導線架與該共熔層之間;一接合層,配置在該導線架與一基板之間,其中該基板包括金屬及金屬合金材質至少其中一種,該接合層係一第二共熔層,包含Sn、In、Pb、AuSn、CuSn、AgIn、CuIn、SnPb、SnInCu、SnAgIn、SnAg、SnZn、SnAgCu、SnZnBi、SnZnBiIn及SnAgInCu至少其中一種;一發光二極體疊層,配置在該基板之上,及一電極,連接到該發光二極體疊層。 A light emitting diode structure comprising: a eutectic layer; a lead frame for external connection disposed on the eutectic layer; a metal protective layer disposed between the lead frame and the eutectic layer; a layer disposed between the lead frame and a substrate, wherein the substrate comprises at least one of a metal and a metal alloy, the bonding layer being a second eutectic layer comprising Sn, In, Pb, AuSn, CuSn, AgIn, At least one of CuIn, SnPb, SnInCu, SnAgIn, SnAg, SnZn, SnAgCu, SnZnBi, SnZnBiIn, and SnAgInCu; a light emitting diode stack disposed on the substrate, and an electrode connected to the LED stack Floor. 如申請專利範圍第33項之發光二極體結構,其中該金屬保護層包含Ni、W、Mo、Pt、Ta、Rh、Au、V、TiW、TaN及Ni-Co至少其中一種。 The light-emitting diode structure of claim 33, wherein the metal protective layer comprises at least one of Ni, W, Mo, Pt, Ta, Rh, Au, V, TiW, TaN, and Ni-Co. 如申請專利範圍第33項之發光二極體結構,其中該金屬保護層具有0.01到100μm的厚度。 The light-emitting diode structure of claim 33, wherein the metal protective layer has a thickness of 0.01 to 100 μm. 如申請專利範圍第33項之發光二極體結構,其中藉由沉 積、濺鍍、蒸鍍、電鍍、無電電鍍、塗佈、噴墨及印刷至少其中一種來形成該金屬保護層。 For example, the structure of the light-emitting diode of claim 33, wherein by sinking At least one of product, sputtering, evaporation, electroplating, electroless plating, coating, inkjet, and printing is used to form the metal protective layer. 一種發光二極體結構,包含:一第一共熔層,熱性耦合到一供外部連接之導線架;一第一金屬保護層,配置在該導線架與該第一共熔層之間;一第二共熔層,配置在該導線架之上且熱性耦合到一基板,其中該基板包括金屬及金屬合金材質至少其中一種;一第二金屬保護層,配置在該第二共熔層與該基板之間;一發光二極體疊層,配置在該基板之上,及一電極,連接到該發光二極體疊層。 A light emitting diode structure comprising: a first eutectic layer thermally coupled to a lead frame for external connection; a first metal protective layer disposed between the lead frame and the first eutectic layer; a second eutectic layer disposed on the lead frame and thermally coupled to a substrate, wherein the substrate comprises at least one of a metal and a metal alloy material; a second metal protective layer disposed on the second eutectic layer Between the substrates; a light-emitting diode stack disposed on the substrate, and an electrode connected to the light-emitting diode stack. 如申請專利範圍第37項之發光二極體結構,其中該第一及第二共熔層,包含Sn、In、Pb、AuSn、CuSn、AgIn、CuIn、SnPb、SnInCu、SnAgIn、SnAg、SnZn、SnAgCu、SnZnBi、SnZnBiIn及SnAgInCu至少其中一種。 The light-emitting diode structure of claim 37, wherein the first and second eutectic layers comprise Sn, In, Pb, AuSn, CuSn, AgIn, CuIn, SnPb, SnInCu, SnAgIn, SnAg, SnZn, At least one of SnAgCu, SnZnBi, SnZnBiIn, and SnAgInCu. 如申請專利範圍第37項之發光二極體結構,其中該第一及第二金屬保護層,包含Ni、W、Mo、Pt、Ta、Rh、Au、V、TiW、TaN及Ni-Co至少其中一種。 The light-emitting diode structure of claim 37, wherein the first and second metal protective layers comprise at least Ni, W, Mo, Pt, Ta, Rh, Au, V, TiW, TaN and Ni-Co one of them. 如申請專利範圍第37項之發光二極體結構,更包含一反射層,配置在該基板與該發光二極體疊層之間。 The light emitting diode structure of claim 37, further comprising a reflective layer disposed between the substrate and the light emitting diode stack. 如申請專利範圍第37項之發光二極體結構,其中該發光二極體疊層之一部份表面係圖案化,以改善光擷取。 The light-emitting diode structure of claim 37, wherein a portion of the surface of the light-emitting diode stack is patterned to improve light extraction.
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