TWI447084B - With a groove of the wheel - Google Patents

Description

Slotted cutter wheel

The present invention relates to a scoring wheel (generally also referred to as a scoring wheel) for forming a score line on a surface of a substrate when a brittle material substrate such as a glass substrate, a semiconductor wafer, a sapphire or a ceramic is divided, and more specifically relates to The blade leading edge ridge line is provided with a groove (notch) cutter wheel.

When a brittle material substrate such as a glass substrate is divided, a method of forming a scribe line by rotating a disk-shaped cutter wheel along a predetermined line is known.

As the cutter wheel used for forming the score line, a grooved cutter wheel having a small groove (notch) at a certain pitch along the ridge line has been disclosed (for example, refer to Patent Document 1).

The grooved cutter wheel can prevent sliding when rotating due to the large frictional force on the substrate than the conventional cutter wheel without the groove. Further, by providing the grooves, the ridge line portion becomes a protrusion, and a striking impact can be applied to the substrate, so that deep vertical cracks can be effectively formed, and the scribing performance can be improved.

Specific examples of the grooved cutter wheel having such a feature include a Pennet (registered trademark) cutter wheel manufactured by Samsung Diamond Industries Co., Ltd., and an APIO (registered trademark) cutter wheel. The depth of the groove (notch) forming the cutter wheel is about 1 to 100 μm (especially 2 to 30 μm), and the pitch of the groove is about 10 to 200 μm (especially 30 to 150 μm). The groove having the groove in the ridge direction is longer than the length of the projection (the length of the ridge line between the groove and the groove), and the depth of the vertical crack extending in the thickness direction of the substrate tends to increase.

Conventionally, the grooved cutter wheel uses a blade leading edge which is symmetrical with respect to the ridge line 13 as shown in Fig. 6 from the viewpoint of not impairing the straightness stability of the scribe, and a groove formed at equal pitch along the ridge line 13. 14 is also symmetrical with respect to the ridge line 13 as a center.

Further, the ridge line direction (circumferential direction) of the groove 14 is also made to have two rotation symmetry from the viewpoint of forming the same quality scribe line regardless of whether the rotation is reversed or reversed in either direction. The shape (the shape that is consistent when rotated 180 degrees). Specifically, the cross section in the direction orthogonal to the ridge line 13 as shown in FIG. 6 has an elliptical shape, and the cross section in the direction of the ridge line 13 (front-rear direction) also has an elliptical shape.

That is, if the central split surface L is equally divided into two directions orthogonal to the ridge line 13, the groove 14 is centered on the central split surface L, and the groove faces 14a, 14a (the blade face of the groove) are rotated twice. Shape (also face symmetry).

In addition to the groove of the shape shown in FIG. 6, the grooved cutter wheel has a groove having a flat cross section at the center split surface L as shown in FIG. 7(a), and an elliptical groove in the cross section of the ridge line. As shown in Fig. 7(b), the cross section of the central split surface L is a flat groove, and the cross section of the ridge line is a V-shaped groove. The cross section at the central split surface L as shown in Fig. 7(c) is The groove having a flat shape in which the cross section of the ridge line is a shape in which the inclined surface is combined with the flat bottom surface is a flat groove in the central split surface L as shown in FIG. 7(d), and the U-shaped cross section is formed in the ridge line. A groove (the bottom surface is flat) or the like.

In the meantime, the valley lines L ₁ , L ₂ , L ₃ , and L ₄ appearing in a straight line at the position where the center dividing plane L intersects with the groove 14 are orthogonal to the ridge line section (as a difference from the present invention described later) In the slot).

Further, as shown in Figs. 7(a) to 7(d), the groove 14 having a flat groove in the direction of the rotation axis direction can be easily processed, and is suitable for a grooved cutter wheel. For example, when a groove is formed by laser ablation processing, the cutter wheel can be manufactured by setting the direction of the laser beam parallel to the rotation axis of the cutter wheel and matching the shape of the groove.

Patent Document 1: Japanese Patent No. 3074143

As shown in Fig. 6, the conventional cutter wheel system has two rotations of the two groove faces 14a and 14a (the groove face) which are centered on the center division surface L orthogonal to the ridge line section H. Symmetrical shape (face symmetry).

When the conventional scribing wheel Wh is used to process the scribe line, the groove surface 14a of the cutter wheel Wh having the groove at the boundary portion between the ridge line 13 and the groove 14 is oriented in a right direction, so as shown in FIG. The groove surface 14a cuts in a state in which the portion F pressed into the brittle material substrate M is in surface contact. Therefore, when the ridge line 13 is cut into the substrate, the resistance generated by the surface pressure greatly changes when the groove surface 14a is cut into the substrate, and there is a impact effect.

Fig. 9 is a conceptual diagram showing the cutting marks remaining on the brittle material substrate when the scribe line S is processed by the grooved cutter wheel Wh of Fig. 6. Further, for convenience of explanation, the width W of the score line S is exaggerated and displayed to be wider than the actual size.

When the grooved cutter wheel Wh is rotated, since the line connecting the AA point in FIG. 9(a) and the line connecting the BB point are orthogonal to the ridge line 13, the cutting marks of the portion are connected as FIG. 9(b). The line of the A'-A' point and the B'-B' point in the middle appears, and the cutting marks of the substantially square shape having the four corners of the substantially right angle remain. At the time of processing, a crack hit by a state in which the ridge line 13 is cut and a state in which the groove surface 14a is cut is cut, and a crack or crack such as a crack or a crack extending to the side of the scribe line is formed at each corner portion of the cutting mark of the square. produce. This flaw E becomes a factor that reduces the strength of the end face of the brittle material substrate.

In view of the above problems, the present invention has an object of providing a grooved cutter wheel which can reduce the occurrence of cracks or cracks of the flaw E during the processing of the score line.

In order to solve the above problems, the grooved cutter wheel of the present invention is provided with a plurality of grooves along the ridgeline of the front edge of the left and right symmetrical shape, wherein each groove has two rotational symmetry centering on the central split surface (L). The direction in which the central dividing surface (L) is formed is the groove surface in the major axis direction or the short axis direction of the groove; the central dividing surface (L) of each of the grooves is transverse to the center of the individual groove and the ridge line profile (H) is The side of the rotating shaft (J) is inclined to be an inclined surface in an oblique direction.

According to the present invention, the central division of each groove faces the ridgeline section so as not to be orthogonal but inclined obliquely, and the direction of the central division plane is the long axis direction or the short axis direction of the groove (the shape of an anisotropic shape), so that the ridge line The groove faces on the left and right sides (the blade faces of the grooves) are formed to be asymmetrical. Therefore, when the cutter wheel of the present invention is rotated, when the cutting state of the substrate is switched from the ridge line to the groove surface, the cutting marks of the blade surface of the groove portion are not perpendicular to the direction of the cutter wheel but are inclined. The length of the flaw that becomes a cause of cracks or cracks becomes small and becomes asymmetrical to the left and right. About half of the scars (two of the four) are formed in the direction toward the score line, so the crack becomes a crack or a turtle. A flaw caused by cracks, etc. In addition, the sharpness at the time of forming the score line can be significantly improved.

In addition, it is confirmed that the ridge line portion between the groove and the groove is intermittently cut in due to the fact that the groove surface is asymmetrical in the left and right sides of the ridge line, and the straight line stability is affected. Compensation, so the effect of the asymmetry of the groove surface on the left and right sides of the ridge line is practically absent.

In addition, since each groove has two rotational symmetry planes with the central split surface (L) at the center of the transverse groove, the same quality can be formed regardless of whether the forward or reverse rotation is performed in either direction. Dash.

In the above invention, it is preferable that the angle θ formed between the center split surface (L) and the ridge line cross section (H) is set to be in the range of 20 to 70 degrees.

By setting such an angle, the processing of the groove is easy, and the influence of the flaw which is a cause of the decrease in the strength of the end face can be suppressed.

Further, in the above invention, the shape of the groove of the cross section orthogonal to the center dividing surface (L) may be any of an elliptical shape, a V shape, a shape in which the inclined surface is combined with a flat bottom surface, and a U shape.

Hereinafter, the grooved cutter wheel of the present invention will be described in detail based on the drawings.

Figure 3 is a schematic front elevational view showing a general scoring apparatus for forming a scribe line on a substrate of a brittle material by mounting a grooved cutter wheel of the present invention.

The scribing device includes a horizontally rotatable platform 5 for holding a brittle material substrate M such as glass, and the platform 5 is held as a rail 6 movable in one direction, and is bridged to the rail 6 above the platform 5 The guide rod 7 in the direction (the left-right direction of Fig. 1) is provided as a scribe head 8 which is movable along the guide rod 7, and a cutter holder 9 which is movable up and down is attached to the lower end of the scribe head 8. Here, the cutter holder 9 mounts the grooved cutter wheel CW of the present invention. When the scribe line is formed in the brittle material substrate M, the grooved cutter wheel CW is lowered, pressed against the brittle material substrate M, and the stage 5 or the scribe head 8 is relatively moved along the scribe line.

Next, the description will be given to the grooved cutter wheel CW of the present invention. 1 is a side view and a front view showing a cutter wheel CW having a groove, and FIG. 2 is a partial enlarged view of FIG. The disk-shaped main body 2 having the mounting hole 1 in the axial center portion is formed with a ridge line 3 which is a bilaterally symmetrical shape of the leading edge of the blade, and the blade surface is formed with an elliptical groove 4 at a regular interval along the ridge line 3.

The grooves 4 are formed on the basis of the center split surface L, respectively. The center split surface L is a surface that crosses the center of each of the grooves 4, and as shown in Fig. 1(b), the ridge line section H is inclined at an angle of θ toward the rotation axis J side. The angle θ is set to be in the range of 20 to 70 degrees (more preferably 30 to 60 degrees) depending on the easiness of processing. However, as long as θ is 0 degrees (90 degrees), it can be made into a central split surface.

Further, the groove 4 is formed such that the shape of the blade surface is not circular (the shape of the isotropic shape) and is defined as a long axis direction (an ellipse in the case of FIGS. 1 and 2). The blade surface of the groove 4 is asymmetrical left and right centering on the ridge line.

Further, the long axis direction (the short axis may be) of the groove 4 is made to coincide with the direction of the center dividing surface L.

By making the direction of the major axis (short axis) of the groove 4 coincide with the direction of the central division plane L inclined obliquely with respect to the ridgeline section H at an angle θ as described above, as shown in FIG. 2, the central division plane L by the groove 4 The two-divided groove faces 4a, 4a (the blade face faces) are formed to be inclined with respect to the direction of the cutter wheel along the line to be scored, and have a second-order rotational symmetry.

When the grooved cutter wheel CW is rotated to machine the scribe line S of the width W, the groove surface 4a of the grooved cutter wheel CW is inclined with respect to the direction of the cutter wheel, so that the brittle material substrate M is obliquely cut. In addition, the line connecting the CC point in FIG. 2(a) and the line connecting the DD point are inclined to the leading edge ridgeline 3, so the cutting trace of the portion is used as the C'-C' point in FIG. 2(b). The line is formed by a line connecting the points D'-D', and the cutting marks of the parallelogram having the corners of the pair of acute angles and the corners of the obtuse angle remain. From this trace, it is understood that the leading edge of the groove surface of the grooved surface 4a including the grooved cutter wheel CW cuts into the corner portion of the brittle material substrate M to form a sharper angle than the conventional one.

As described above, the cutting sharpness can be remarkably improved by obliquely cutting the leading edge of the grooved cutter wheel CW including the groove surface 4a. Further, it is possible to suppress the occurrence of cracks or cracks in the corner portions of the cutting marks at the time of forming the score line, and it is possible to improve the end face strength after the breaking of the brittle material substrate. In addition, there is no problem with straight-through stability, and there is a difference in performance between normal rotation and reverse rotation.

Fig. 4 is a view showing a grooved cutter wheel CW2 according to another embodiment of the present invention, which is an example in which the groove 4 is V-shaped. Further, Fig. 5 is a view showing a grooved cutter wheel CW3 of another embodiment of the present invention, which is an example in which the groove 4 is a pan-bottom shape having a flat bottom. In any case, similarly to Fig. 1, the central dividing surface L of the groove 4 is formed by inclining the angle θ with respect to the ridge line section H.

Therefore, in this case, the groove surface divided by the center dividing surface L2 is inclined with respect to the direction of the cutter wheel along the line to be scribed, and the same effect as in the previous embodiment can be exhibited at the time of scribing. Even the U-shaped groove and the like described with reference to Fig. 7 other than this are the same. Further, when there is a groove in which the valley line appears at the bottom of the groove 4 as shown in Figs. 4 and 5, the direction of the valley line shows the angle θ, so that the inclination angle of the center dividing surface L can be confirmed.

The above is a description of the exemplary embodiments of the present invention, and the present invention is not limited to the above-described embodiments, and may be appropriately modified or changed without departing from the scope of the claims of the present invention.

[Industrial availability]

The grooved cutter wheel of the present invention can be utilized when scribing a brittle material substrate such as a glass substrate, a semiconductor wafer, sapphire or ceramic.

CW, CW2, CW3‧‧‧ slotted cutter wheel

M‧‧‧Battery material substrate

S‧‧ scribe

Central division of the L‧‧‧ slot

1‧‧‧ mounting hole

2‧‧‧ Ontology

3‧‧‧blade edge ridge

4‧‧‧ slots

4a‧‧‧ slotted surface

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a side elevational view and a front elevational view of a slotted cutter wheel of the present invention.

Figure 2 is a view showing a partially enlarged view of the grooved cutter wheel of Figure 1 and a cutting mark produced by the grooved cutter wheel.

Figure 3 is a schematic view of a scoring apparatus for mounting a grooved cutter wheel of the present invention.

Figure 4 is a side elevation and front elevational view of another embodiment of a slotted cutter wheel of the present invention.

Figure 5 is a side elevational view and a front elevational view showing still another embodiment of the slotted cutter wheel of the present invention.

Fig. 6 is a side view and a front view showing a conventional cutter wheel having a groove.

Fig. 7 is a perspective view showing a central divided surface of the groove.

Figure 8 is an enlarged cross-sectional view showing the scribed state produced by the grooved cutter wheel.

Fig. 9 is a view showing a partial enlarged view and a cutting mark of a conventional cutter wheel having a groove.

CW. . . Slotted cutter wheel

S. . . Scribing

L. . . Central split plane

3. . . Blade leading edge ridge

4. . . groove

4a. . . Groove surface

Claims (3)

A grooved cutter wheel having a plurality of grooves along a front edge ridge line of a left-right symmetric shape, wherein the ridge line portion is a protrusion due to the groove; each groove has two times centered on the central division surface (L) Rotational symmetry, the direction in which the central dividing surface (L) is formed is the groove surface in the long axis direction or the short axis direction of the groove; the central dividing surface (L) of each groove crosses the center of the individual groove and makes the ridge line profile ( H) Tilting to the side of the rotating shaft (J) is inclined to the inclined surface. For example, the grooved cutter wheel of the first aspect of the patent application, wherein the angle θ between the central split surface (L) and the ridge line profile (H) is set in the range of 20 degrees to 70 degrees. The grooved cutter wheel according to the first aspect of the patent application, wherein the shape of the groove orthogonal to the central split surface (L) is an elliptical shape, a V shape, a shape in which the inclined surface is combined with a flat bottom surface, and U Any of the word shapes.