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TWI339851B - Halogen gas discharge laser electrodes - Google Patents

Halogen gas discharge laser electrodes

Info

Publication number
TWI339851B
TWI339851B TW093121901A TW93121901A TWI339851B TW I339851 B TWI339851 B TW I339851B TW 093121901 A TW093121901 A TW 093121901A TW 93121901 A TW93121901 A TW 93121901A TW I339851 B TWI339851 B TW I339851B
Authority
TW
Taiwan
Prior art keywords
gas discharge
halogen gas
discharge laser
laser electrodes
electrodes
Prior art date
Application number
TW093121901A
Other languages
Chinese (zh)
Other versions
TW200509178A (en
Inventor
Thomas D Steiger
Richard C Ujazdowski
Timothy S Dyer
Thomas P Duffey
Walter D Gillespie
Bryan G Moosman
Richard G Morton
Brian D Strate
Original Assignee
Cymer Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/629,364 external-priority patent/US7132123B2/en
Priority claimed from US10/672,182 external-priority patent/US7339973B2/en
Priority claimed from US10/672,722 external-priority patent/US7230965B2/en
Priority claimed from US10/672,181 external-priority patent/US7095774B2/en
Priority claimed from US10/877,737 external-priority patent/US7301980B2/en
Application filed by Cymer Inc filed Critical Cymer Inc
Publication of TW200509178A publication Critical patent/TW200509178A/en
Application granted granted Critical
Publication of TWI339851B publication Critical patent/TWI339851B/en

Links

TW093121901A 2003-07-29 2004-07-22 Halogen gas discharge laser electrodes TWI339851B (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US10/629,364 US7132123B2 (en) 2000-06-09 2003-07-29 High rep-rate laser with improved electrodes
US10/672,182 US7339973B2 (en) 2001-09-13 2003-09-26 Electrodes for fluorine gas discharge lasers
US10/672,722 US7230965B2 (en) 2001-02-01 2003-09-26 Anodes for fluorine gas discharge lasers
US10/672,181 US7095774B2 (en) 2001-09-13 2003-09-26 Cathodes for fluorine gas discharge lasers
US10/877,737 US7301980B2 (en) 2002-03-22 2004-06-25 Halogen gas discharge laser electrodes

Publications (2)

Publication Number Publication Date
TW200509178A TW200509178A (en) 2005-03-01
TWI339851B true TWI339851B (en) 2011-04-01

Family

ID=55855714

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093121901A TWI339851B (en) 2003-07-29 2004-07-22 Halogen gas discharge laser electrodes

Country Status (1)

Country Link
TW (1) TWI339851B (en)

Also Published As

Publication number Publication date
TW200509178A (en) 2005-03-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees