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TWI339745B - Method for fabricating polymer ridged waveguides by using tilted immersion lithography - Google Patents

Method for fabricating polymer ridged waveguides by using tilted immersion lithography

Info

Publication number
TWI339745B
TWI339745B TW096121056A TW96121056A TWI339745B TW I339745 B TWI339745 B TW I339745B TW 096121056 A TW096121056 A TW 096121056A TW 96121056 A TW96121056 A TW 96121056A TW I339745 B TWI339745 B TW I339745B
Authority
TW
Taiwan
Prior art keywords
immersion lithography
ridged waveguides
fabricating polymer
tilted
tilted immersion
Prior art date
Application number
TW096121056A
Other languages
English (en)
Other versions
TW200848813A (en
Inventor
Hsiharng Yang
Chung Chiung Wu
Original Assignee
Nat Univ Chung Hsing
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nat Univ Chung Hsing filed Critical Nat Univ Chung Hsing
Priority to TW096121056A priority Critical patent/TWI339745B/zh
Priority to US12/000,348 priority patent/US7635555B2/en
Publication of TW200848813A publication Critical patent/TW200848813A/zh
Application granted granted Critical
Publication of TWI339745B publication Critical patent/TWI339745B/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/201—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by an oblique exposure; characterised by the use of plural sources; characterised by the rotation of the optical device; characterised by a relative movement of the optical device, the light source, the sensitive system or the mask
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/138—Integrated optical circuits characterised by the manufacturing method by using polymerisation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/7035—Proximity or contact printers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12097—Ridge, rib or the like

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
TW096121056A 2007-06-11 2007-06-11 Method for fabricating polymer ridged waveguides by using tilted immersion lithography TWI339745B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW096121056A TWI339745B (en) 2007-06-11 2007-06-11 Method for fabricating polymer ridged waveguides by using tilted immersion lithography
US12/000,348 US7635555B2 (en) 2007-06-11 2007-12-12 Method for fabricating polymer ridged waveguides by using tilted immersion lithography

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW096121056A TWI339745B (en) 2007-06-11 2007-06-11 Method for fabricating polymer ridged waveguides by using tilted immersion lithography

Publications (2)

Publication Number Publication Date
TW200848813A TW200848813A (en) 2008-12-16
TWI339745B true TWI339745B (en) 2011-04-01

Family

ID=40096191

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096121056A TWI339745B (en) 2007-06-11 2007-06-11 Method for fabricating polymer ridged waveguides by using tilted immersion lithography

Country Status (2)

Country Link
US (1) US7635555B2 (zh)
TW (1) TWI339745B (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010256877A (ja) * 2009-03-31 2010-11-11 Panasonic Electric Works Co Ltd 光導波路コアの製造方法、光導波路の製造方法、光導波路、及び光電気複合配線板
JP6281219B2 (ja) * 2013-09-20 2018-02-21 住友ベークライト株式会社 光導波路の製造方法および反射面形成方法
US10254649B2 (en) * 2013-10-21 2019-04-09 Tokai University Educational System Method for producing optical waveguide
CN106597810B (zh) * 2015-10-14 2019-05-21 华邦电子股份有限公司 晶圆图案化制程
US10503071B2 (en) * 2017-10-26 2019-12-10 Waymo Llc Method for manufacturing light guide elements

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004133300A (ja) * 2002-10-11 2004-04-30 Sony Corp 導波路用金型および導波路の製造方法

Also Published As

Publication number Publication date
US20080305438A1 (en) 2008-12-11
US7635555B2 (en) 2009-12-22
TW200848813A (en) 2008-12-16

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