TWI332578B - Test head positioning system and method - Google Patents

Description

1332578 13432pifl IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to a positioning and operation of a manipulating loads system, and more particularly to a test head (position and operating system of 恍st. Technology] In the manufacture of integrated circuits (ICs) and other electronic devices, all the spears are operated by automatic test equipment (ATE). Special handling equipment can be used; ^, In some cases, the special place == Wei Wei is described as the appropriate temperature and / or to maintain the second degree of the object of the job. Special treatment equipment includes different types "Probe, (pr〇k) f test unpackaged objects on the wafer, and "object console,, (device

TmlT (Peripheral a»s) ° & and the ATE system of the blame, including - the test head is connected to the place = set and the device under test (DeviceUnderTest, DUT) accepts the accurate, = shout test. Therefore, in the ATE system "electronic test, (4) depends on the test object (DUT), and the number of electrical connections as much as possible: = two: test: very heavy, and the object to be tested is also due to The original shot = complex. The size and weight of the test head; growing to 2 to 3 thousand pounds, mainfra / connected to the ATE system's fixed station (stationary) for signal conduction, grounding, electrical use. In addition, 13432ριΠ A hose is provided to provide cooling and is often bundled in the I-line. Electrical connection °, there are thousands of connections between the test head and the test object. Two, delicate, close contact When the completed 2 connection f is measured as an unpackaged object on the wafer, the sturdy rn1 on the probe card is connected to the _ _ _ _ ^ ^ = d e_llke) Saki pin entity board (DUT / When the object is used, the test frame (test SGeket) fixed on a P board to be tested UTb_) is often used to feed the needle card or the material plate, and the touch point is connected. The test head also has a interface unit (5) == ), including the pin card or the board to be tested connected ele_).—In general, the contact is spring loaded ρ (four) head to the foot is easy to break It is fragile and fragile, so it is necessary to avoid damage. The test head console (manipulat〇r) can be manipulated (_eu (four) and the processing device, off the head. The phase series is over - more than a meter. Quickly change another processing device or quickly, away from the current processing device and or replace the interface component. When the test f is opposite to the processing device, the position between the test head and the probe card or the board to be tested is connected. Already finished, the head of the job is docked (d〇c is in the process & set. In order to be able to dock, the test head must have six degrees of freedom (sdc degrees 〇f freed〇m) Cartesian coordinate system (Cartesian The coordinate system) to accurately align the position. In particular, the test head console can first manipulate the test head to roughly align one of the first positions, about a few centimeters near the stop position, and then stop by d〇Ckingapparatus) completes the final precise alignment work. ^, 1332578 I3432pifi Part of the docking device is placed on the test head, while the rest is configured. The - side test head can be used by multiple processing devices, docked The more expensive part is placed on the test head. Stop the soil. The two zones including the actuator and the docking device can be connected to each other to stop the circumference of the test head, so X (=gment) Wen) docking. Parking device or weighing device, important functions, including: (1) the test head and the processing device have a good alignment and then separate the test head and the wire (3) to provide electrical connection; The (pre-alignment) protection function (4) is locked together (pulling the test head and the processing device.疋 ... according to the inTEST manual (inTEST 1996 fifth edition). The test head positioning means that the test head can be easily moved to a processing device and accurately aligned with the processing device to smoothly complete the docking and non-stopping. The test Lai Zuo can also be used as a - lang positioning ^. The test head is combined with a suitable docking device to operate the positioning of the test head. For example, U.S. Patent Nos. 5,608,334, 5,450,766, 5,030,869, 4,893,074, 4,715,574, 4,589,815, the entire disclosure of which is incorporated herein by reference. The above patents have a motivation to drive || The head positioning system is a well-known device that provides both the long-distance test head manipulation and the final accurate docking. For example, reference is made to U.S. Patent No. 6,057,695 (Holt et al.) and U.S. Patent Nos. 5,9,737, and 5,265,258 (Graham et al.). Yes, the console is driven instead of the actuator. However, in the present invention, 13432 pifl is widely used to drive the actuator drive system. In a general dynamic drive positioning system, the test head is moved from - position to another position. Operation: Yes;: The test head in the test head 2 system can be fully controlled. The movement is performed by the operator directly controlling the actuator: the longitudinal test head drives the shaft with partial manual and partial actuators in order to be able to use the process襄To stop the test head, the operator must first select the head to reach the position of the position, so that the movement can be controlled. The actuator drives the last position. Here, different alignment devices provide the final positioning of the test head. From the beginning to the most, the docking uses two or more sets of alignment devices of different types. In general, the position of the test head is preferably five degrees of freedom before the structural oil is contacted. The hoe can be arranged in a line, which corresponds to the sixth degree of freedom, which is perpendicular to the plane of the interface (usually the plane of the probe card or the plane of the object to be tested), without the need to damage the lateral direction of the interface. In addition to (sideways scrub) or external forces, they are connected. When the sin actuator is operated, if there is no final alignment and positioning of all of its axial directions, the test head generally moves non-fixedly. In the axial direction of the console, it is properly controlled and not actuated. The drive is not a problem. However, actuator drive shafts generally require a mating mechanism. Some common examples are mentioned in U.S. Patent Nos. 5,931,048 (Slocum et al) and 5,994,002 (Alden). Cooperating mechanisms (c〇mpliance 13432ρΐΠ mechanisms), especially non-horizontal unbalanced axes (n〇nh〇riz〇ntai unbalanced axis), including spring-like machines to additionally cooperate to increase the amount of rebound (am〇unt〇fresilience Or bounce back. In addition, the winding between the connection test head and the ATE host is also dependent. When the operator attempts to operate the test head to the proper position and can be retrieved by the docking mechanism. In position, he or she must overcome the _ resilience, but the test head is very heavy and large. If the operator releases the test support before the docking mechanism is properly engaged' The force of the matching lining may cause the test head to leave the docking device, which is the so-called bounce effect (bQ e e Μ effect) 〇 US Patent No. 4,589, 815 (Smith) reveals the conventional-type docking, structure. The docking mechanisms described in 5A, 5B, and 5C use a combination of two guide pin holes to provide the final positioning and the second cam. When the cam is rotated by a fixed handle, the two halves of the docking mechanism (halve) ) — The pull-up is pulled up so that the spigot is fully inserted in the matching guide =. The winding connects the two & wheel to rotate synchronously, and the arrangement is arranged to enable the custodial mechanism to be provided by the second handle. The external force is used to operate. Here, the handle is based on the parking actuator. The basic idea of Patent 815 is that when the test head becomes large, the docking mechanism has - or four sets of cable-connected spigots and circular cams. In the drawings = a, 38b, 38c, 38d of the present invention, a conventional docking mechanism having four lances and a combination of V holes and four circular cams will be described, which will be described in detail below. The mechanism has a corresponding actuation of each cam Put the 13432pifl hand, but the sin mechanism only operates a cable driver with a single actuator handle. When the cable driver rotates with the handle, the cable rotates synchronously with the four cams, such (four) read operation The ability to place a single actuator handle can also be used to adjust the ratio of the size of the cam to the size of the winding drive under a large mechanical advantage. The docking mechanism in U.S. Patent No. 5,654,631, issued to No. 5,744,974. , = use the tip and the guide hole to the (four) half. However, the docking mechanism is driven by a vacuum unit 2 to force the two halves together. When the vacuum continues to hold, the two halves remain, together. However, the external force generated by the vacuum device has a limit, which is the product of the atmospheric pressure and the effective area. Therefore, there is a limit to the use of such a docking mechanism. The operation and structure of the docking mechanism are known in the following Figures 38a to 5, respectively. A docking device as mentioned in U.S. Patent No. 4,589,815. The figure shows a test head _ placed on the - bracket ((10) die) 2, the schematic 'ordered by a test console (not shown) to the branch. The 'test head η (9) shown in the cut area of the soil peripheral device 2108 is a schematic view that can be partially enlarged by the processing of the periphery of the map 3 (the special processing device , two package object processor, the square is docked.) In Fig. 38c, Tr. 219. ^ οι λ See that the test head 2100 has an electrical interface 2126, while the processing device 21〇8 and the dead one have a corresponding electrical interface 2128. The lightning interface 2126, 2128 is usually and ancient, electrical contact (not shown), when the test 瓸 (3) ^ π i + do not do 旳冤 ^, L type is taken after docking, it is accurate and reliable independent Electrical contacts. In the Taiming ☆丨^ ^ sinlian Gancheng target case, the lower surface of the treatment device 2108 1332578 13432pif) contains interface 2128, while the test head is suspended from the bottom up. The possible positioning methods are also included, but the θ is not limited to the lower surface*, and the horizontal movement is stopped at a plane perpendicular to the vertical table ^ or the vertical line clamp. Han/, water thousand Θ, and 38b are not painted in the whole four-point docking device, and the parts are arranged on the processing device 2108 or the measurement 铽Μ μ -§91ΠΛ. H-type 2 is just above. The configuration is carried out on the test head 2100, and the four plugs 2112 are disposed near the four corners of the tablet. The tablet employs a central opening disposed on the test head 2· such that the electrical interface 2126 of the test head (not shown) can protrude from the opening, and the tip 2112 defines a rectangular shape. The center point has an electrical interface 2126. A Gusset plate 2114 is disposed on the lower surface of the processing device 21〇8. The liner 2114 has a central opening disposed in the processing device 21A8 such that the electrical interface 2128 of the processor can protrude from the opening. Four profiles 2116 are placed on the liner 2114' near the four corners. Each pad 2116 has a guide hole or socket 2112a. Each of the guide holes 2112a corresponds to a respective spigot 2112, so that each spigot 2112 can be fully inserted into the guide hole 2112a to completely stop the test head. Each of the spigots 2112 is in close fitting relationship with the corresponding guide hole 2112a, so that the spigot 2112 and the guide hole 2n2a can provide the effect of alignment between the test head 2100 and the processing device 2108. Four docking cams 2110 are rotatably disposed on the plates 21A6. The cam 2110 is circular and similar to the shape described in the '815 patent. In particular, the circumferential surface of the female cam 2110 has a side spiral groove 2129 having an upper cut surface 1332578 13432 pifl 2 adjacent to the respective tip 2i12," Yamaguchi - straight to the test head electrical interface dragon (four) 12 is located in the cam (1) (four) head electrical interface two = t; = r16 and the corner of the lining 2114 has a - round:) 吏 insert 2m inserted in the pad guide In the hole 2112a, the circumferential surface of each of the turns is adjacent to the pad 2116 and is concentric with the respective w-shaped cut-offs of the dragon pad 2: green, or can be inserted first when initially positioned 2U2 4 = two self-conducting holes 2112a. The pad 2116, the cam 21 3 = arrangement allows the electrical interface of the processing device to assist and measure: ίΓ: Γ 126 remains separated until the spigot 2112 is indeed inserted into the pre-alignment =2: So far. Thus 'available electrical contact' provides two sets of aligning objects (feetUre), namely (1) the positioning between the pads 2116 cam 2110 and (2) the combination of the spigots 2112.匕nza's cable driver (CirCUlarcabledriver) 2132 and the corresponding docking ring The hand 2135 is rotatably disposed on the plate 21〇 6. The docking cable 2115 is connected to each cam 211〇 and the cable driver 21%. The roller 2137 is located on the cable path of the cable driver 2132, and the cable The wire drive is rotated by the force pushed by the handle 2135. When the cable driver 2132 rotates and transmits an external force to the cable 2, the cam 211 is also rotated at the same time. 13432 pifl Round cut of each pad 2116 The extension of the fracture is a cam follower 2110a. The cam follower 2n〇a is fixed to the upper cut-off of the upper surface of the respective cam 2110. Figure 38c shows the test head 21 is docked at A cross-sectional view of the processing device 2108. The tip 2112 is partially inserted into the guide hole 2112a of the viewing pad 2116. Note that in this example, the tip end of the tip is tapered and its junction to the plate 21〇6 In Fig. 38c, the tip 2112 has been inserted into the guide hole 2n2a, which is just within the fixed diameter of the guide hole 2U2a. In Fig. 38c, each cam follower 2n〇 a has also been inserted into the table above the respective cam 2110 The upper cutting opening 2125 has a depth at the uppermost end of the spiral cam groove 2129. In this state, the docking device has been prepared to be driven by an external force urged by the handle 2135 (not shown in Fig. 38c) to rotate the cam 2110. Therefore, in this state, it can also be called, ready to drive the 〃 position. = What is required is that the position is up to five degrees of freedom in this position. In particular, when the plane of the electrical interface 2126 of the processing device is the χγ plane of the three-dimensional interface, the entire diameter of the spigot 2112 is inserted into the via 2112a to complete the alignment of X, Y, and Z. In addition, cam follower 2110a is fully inserted into all of the cut-out ports 2125 to form a planarization between the electrical interface 2126 of the processing device and the electrical interface 2128 of the test head. Figure 38d shows a cross-sectional view of the wheel 2110 after the entire rotation. Test head 2100 has now been docked entirely on processing device 2108. It will be appreciated that after the cam 211 is rotated, the cam follower 211a is brought to the point closest to the plate 2106 with the spiral groove 2129. Further, the lance 2112 is entirely inserted into the respective guide holes 2112a. The range of the fixed diameter of the spigot 2112, 13432 pifl, and the tightness of the respective guide holes 2112a_side can determine the effect of the electrical interface 2128 of the processing device and the electrical interface 2126 of the test head. Therefore, the requirements for tight fit are usually between three thousandths. In addition, the lance 2112 must be placed very precisely on the plate 2, 6 relative to the position of the pad so that the lining 2114 can be disposed on the processing device 108. In order to manufacture such a plug 2112, the configuration is adjustable in the flat plate 6 (4), the money made by the material is transferred, and the milk is widely distributed in the above discussion towel, and the Wei-step discussion of the docking process and the definition of a j. The purpose of the docking is to make the electrical interface of the test head buckle device:! Each of the electrical mediators ~ 佃土人+ see pay but the pass R is parallel to the electrical terminal. When the two sinful planes of the field are to be parallel to each other, it is better to first connect the two interfaces 2126'212 to =1, and then estimate the docking position of the squatting machine in five degrees of freedom. The electrical contacts can be structurally contacted. Suppose that the parallel planes of the μ planes of the two-dimensional dimension f-system are perpendicular to the Χ-Υ plane so that the respective HZ axes are rotated centrally ’ ^ so that the respective contacts can be aligned with the other joints. The yin surface = the y-axis of the y-axis is parallel to each other. In the case of two electric and planarized turns, this process is called the plane of the two interfaces (c〇-Planar). Once the planar interface has been planarized or coaxially oriented. During the docking process, test === 14 13432pifi Loading and setting 2 I 08 with i kg, cut π wheel coffee to lining the 2116 round cut and convex _ _ 疋 疋 疋 position. This position is also the one mentioned before, and the second 2m is placed in this state, and the insertion holes are tested in the respective guide holes 2112a. Further, it will be the position to prepare the drive, as previously shown in Figures 38a to 38d: Ϊ Ϊ 疋 疋 'prepare the position of the drive' means that the test head has been driven by the device. At the position where the drive is to be prepared, the alignment of the Χ, Υ, Υ, and Ζ axes has been completed. When the π-tips driven by the docking device are inserted into their respective guide holes, the alignment and planarization, Wang: are more precise. Note that in the patent, 258 and patent, 737, the two drives are docked, and the sensor is used to detect the position to be driven to change the coarse positioning mode to the fine positioning mode. Therefore, in the conventional technique The sensor-prepared drive position disclosed in '258 and the '737 patent is a natural association with an actuator-driven stop. The above-mentioned docking type can successfully dock more than the test head of the Millennium. When the weight of the test head is #重重, Record: When it is increased, many problems will appear. The external force of the first point will also increase. Usually, the number of each contact is necessary. Therefore, 'Laitou has 1QQQ. One or more of the joints are 50 or just kilograms. When the test head position is in the ready-to-park position and the = position, the increase in the cubic volume of the test head also increases the difficulty of operating the lining cam. Also due to the matching mechanism spot = the rebound on the head console, this bounce effect will increase the test head; ^ 15 1332578 13432pifl Difficulty in synchronizing the drive and the synchronous drive. It will cause the booster to drive. On the cam of the institution The force is unsynchronized by the cable stretching. Similarly, the use of a solid ring (sdid Hnk) and a bell crank causes the mechanism distortion to be common in the docking. θ The sin-discriminating device is characterized in that a plurality of lances and guide holes are used. The device described in the patent 815 is characterized by two-point stop, and the device shown in Figures 38a to 38d is docked at four points. The principle of docking

It is also widely used, and the present invention will describe a three-point stop type, but other types may not be used. x SUMMARY OF THE INVENTION Accordingly, the present invention provides a load-bearing device that includes a pneumatic unit and a connector connected to a negative side (the QppQsite connector moves the load in parallel). And an axial direction, and the first axial direction corresponds to a driving direction of the pneumatic unit. At least, the connection 11 rotates the load in a second axial direction of the vertical first-axial direction.

= the first axial direction and the second axial direction. At least - the air pressure unit provides a first axial direction and a second axial direction. The above and other objects, features, and advantages of the present invention will become more apparent from the following description of the preferred embodiments. Exam, the rest! ^ The present invention - a preferred embodiment - is a schematic diagram of the positioning of music, death W. Positioning system, system 1 () "@定和移动-重载 16 1332578 13432pifl

(heavy load) is, for example, a test head. A test head as described in U.S. Patent No. 4,529,942 is hereby incorporated by reference. As shown in Figure 6, six degrees of freedom have been defined. A six degree of freedom positioning system is implemented in accordance with a preferred embodiment of the present invention. 2 is an exploded perspective view of the positioning system 10 of FIG. 1. The substrate 50 is shown at the bottom of FIG. An in-out unit 100 slides on the substrate 50 and bears against the floor. Entering the unit 1, its thinking slides in parallel with the in direction of the Z-axis along the bottom of the person and the out direction (the direction of entry is the surface after entering the unit 100) The direction of the opening, and the direction of the exit is toward the rear surface). The direction of entry is usually toward the direction around the docking position, and the direction of the exit is usually away from its surroundings. The side-to-side unit 200 slides along the X-axis above the entry-out unit 100, also parallel to the bottom. The moving direction of the edge-to-edge unit 2 is perpendicular to the moving direction of the entering unit 100.

The swing unit 300 is disposed on the edge-to-edge unit 2, and the steering unit 300 is pivotally connected to the γ-axis, and is moved to the axial direction of the side-to-side unit 2, and the axial direction of the moving unit is moved. Vertical refers to the twisting, swinging, and yaw motions. The main arm units 400, 5 are arranged vertically above and below the track on the gamma axis on the steering unit_. In order to provide the γ-axis (lionier) ruler, the vernierarm _ can move up and down along the vertical line = =. In addition, the cursor arm: the linear line that has been placed on the main arm 500 moves up and down. Υ 游 游 匕 匕 匕 匕 匕 匕 ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( , 17 1332578 13432pifl Fortunately, it can also be done by means of air pressure floating. The tumble pivot unit 900 is coupled to the wiper arm 600 and the flip pivot unit 8 is coupled to the wiper arm 700. The test head is rotated in the X-axis direction (i.e., flipped or turned) to extend beyond the tumble drive unit 800 and the flip pivot unit 900. The shaft is placed through the center of gravity of the load so that the test head can be pivoted with minimal external force. FIG. 3 further illustrates a schematic diagram of the different components in the positioning system 10. Figure 4 illustrates the situation of the base 50 in more detail. The base 50 includes two linear tracks 52a, 52b (one of which is not visible). Enter the drive motor (drive 吁 m〇t〇r) 65 and enter the position encoder 70 sets on the base. The motor 65 can be mated with a suitable reduction gear. The motor 65 can also be used with a brake unit for positioning. More clearly, FIG. 5 shows that a conventional motor roller 66 is disposed on a rotating shaft that enters and exits the motor 65. Positioning encoder 70 (not visible in Figure 5) is coupled to bracket 80 and to base 50. The encoder pulley 71 is disposed on the transfer of the encoder 70. $2 timing belt (not shown) can also be used with it. The first belt connection - between the motor roller 66 and the roller 60' causes the roller 60 to rotate with the motor roller 66. The first belt is generally parallel to the linear lanes 52a, 52b. The second belt is coupled between the other motor roller 66 and the encoder roller 71 to cause the encoder roller 71 to rotate with the motor. 6 and 7 further illustrate a reference diagram of the entry unit 100. The linear guide bearing 1〇2, 1〇4, 106, 108 is placed at 18 1332578 13432pifl and enters the bottom of the substrate lio. The linear bearings 102, 104 move along the linear way 52a. In addition, the linear bearings 106, 108 move along the linear way 52b. When the motor 65 is driven, it enters the unit! 〇〇 can move in the direction of entry and exit. In particular, when the motor 65 is driven, the belt begins to rotate (not shown in Fig. 4 and Fig. 5). The belt connecting the motor roller 66 and the roller 60 is disposed to easily enter the unit 100 to rotate the belt. The entry unit 100 moves inward or outward in accordance with the direction in which the motor 65 rotates. The motor 65 can be coupled to a brake unit' to lock the access unit 100 in a fixed position relative to the base 50. As shown in Figures 6 and 7, the linear tracks 112, 114 are fixed to the top surface of the substrate 110 and perpendicular to the linear tracks 52a, 52b on the bottom plate 50. The edge-to-edge drive motor 120 is also included. Motor mount 125 and roller 142 are adjacent to motor 120, and motor 120 can be coupled to a suitable reduction gear. The motor 120 can also be used with a brake unit for positioning. Edge-to-edge positioning encoder 130 may also be included therein. The roller 144 can fix the positioning encoder 13A. A belt (not shown) connects the roller 142 to the roller 144, and the belt is generally parallel to the lanes 112, 114. Therefore, the encoder 130 rotates with the motor 120. The upper covers 152, 154 can also be matched with them. In Figs. 8, 9, and 10, the features of the edge-to-edge unit 200 are as follows. Figure 10 clearly illustrates the bottom of the edge-to-edge unit 2, which includes linear bearings 210, 212, 214, 216. The linear bearings 214, 216 are moved along the line 114, and the linear bearings 210, 212 are disposed along the linear track 112. The first mentioned tracks 112, 114 are respectively disposed on the entry substrate 11 〇 1332578 13432 pifl. The edge-to-edge substrate 220 includes a through opening suitable for use in a swing plate mounting assembly 260. The steering plate assembly 260 includes a drive link 260a with a plurality of gaskets and seals. Steering drive motor 230 is mated therein and includes appropriate deceleration gears. The motor 230 can also be used with a brake unit for positioning. The drive shaft 250 is coupled to the roller 254' and the roller 254 is coupled to the other roller 256 by a belt (not shown). The wheel 256 is disposed on the position encoder 240, and the position encoder 240 is coupled to the drive shaft 250 by a gear.

The axis of rotation of the drive shaft 250 is generally horizontal and perpendicular to the axis of rotation of the steering plate assembly member 260. The two are coupled together by a suitable gear, such as a spiral gear drive 〇r worm gear drive, so that the assembly 260 can rotate in the vertical direction when the % shaft 250 is rotated. The drive shaft 250 is slightly separable from the steering plate assembly 260. * The movement of the edge-to-edge unit 200 with respect to the susceptor 100 will be described as being connected between the rollers 142, 144 and disposed at an appropriate position on the edge-to-edge substrate 2:. Therefore, when the edge-to-edge drive motor 12 turns the skin;

When the connected rollers 142 and 144 move, the movement of the edge-to-edge unit Μ is also caused. If the motor 12 is equipped with a brake unit, the edge-to-edge unit 200 can be locked by the brake unit in relation to the entry and exit. Unit 1 〇〇. One position. _ Figures ^, 1113, 12 show a schematic diagram of a steering unit 3 。. Figure 4 shows the steering unit opening 302 and the steering plate assembly 26 3 3 also = two, when the steering plate assembly 260 is rotated, the steering unit: square turn. In particular, as the motor 230 rotates, the drive shaft 25c 20 13432pifl rotates therewith. The steering plate assembly 260 is also rotated by the drive shaft 25〇 as described above. Therefore, when the steering plate assembly 26 is rotated, it is rotated, and 300 is also rotated. If the motor 23 is armored with a brake, the unit 3GG can be locked at one of the relative rotations 200 by the brake unit. τ hard early element Please refer to Figure 11a, lib and 12, and the steering unit 3〇〇 includes the unit substrate 3〇5. The cylinder 31, 31 讣 and the side plates 31 〇 a, 3 ι 7 = are directed to the steering unit substrate 305. The linear tracks 32〇a, 32〇b are respectively disposed on the cylinders 315a, 315b and are parallel to each other, and (4) a vertical plane (outer ^ in ^ane). Iare screws 325a, 325b are respectively disposed on the turn: unit substrate 305 and located in front of the pillars 315a, 315b. Rollers 326a and 326b are disposed at the ends of the lead wires 325a and 325b, respectively. 326a, 326b are disposed below the substrate 305 and the guiding spirals 325a, 325 = the holes that pass upward through the substrate 305. The use of suitable bearings ensures that the lead screws 325a, 325b are free to rotate on the substrate 305. However, the lead screws 325 & 325b will eventually support heavy loads, while the thread type and spacing must be able to avoid back-off situations. Taking the vertical drive motor 330 as an example, it may include a suitable deceleration motor and a vertical position encoder 340. The motor 330 can also be equipped with a brake to avoid rotation. The motor roller 331 can also be disposed on the rotating shaft of the motor 330, and the encoder roller 341 can also be disposed on the encoder 340. A crank crank 350 can also be disposed on the crank roller 351. The rollers 33, 341, 351 are located below the substrate 305. An idler pulley 371 can be disposed on the bottom surface of the substrate 305. 1332578 I3432pifl A set of belts 361, 362, 363 are connected between the rollers 326a, 326b, 331, 341, 351, 371. The first belt 361 is coupled between the motor roller 331 and the guide roller 326b. The second belt 362 is coupled between the guide roller 326b and the encoder roller 341 and the crank roller 351, and the idle gear 371 adjusts the tension of the second belt 362. Finally, the third belt 363 is coupled between the guide roller 326a and the crank roller 351. Therefore, when the & axis of the motor 330 is turned, the one guide spiral 326a, 3265 and the encoder 340 are rotated. The crank handle 350 also rotates with it. Under manual operation, the crank handle 350 can also rotate the two guide spirals 325a, 325b. The two-conducting screw ^^, ^ north has the same thread and spacing and can be driven synchronously by the motor 33〇 or the crank handle 35〇. As shown in FIG. 2, the main arms 400, 500 slide along the linear rails 32 ribs, 320a, respectively. When there are two main arms, it is called the main arm 4〇〇 and the main arm, and only the main arm 400 will be described below. As for the description of the main arm 500, the same as the main arm 4's except for the position, and the linear track and the screw are disposed thereon. As shown in Figures 13, Ma, the main arm 400 includes a linear guide bearing 410, 420. The linear guides 41〇, 42〇 produce a linear track 32〇b sliding (as shown in Figure u). The elongated diameter ((4) two-bore) 462 is slightly larger than the diameter of the guiding spirals 325a, 325b, extending the main arm The length of the weight. The entry area of the aperture 462 is larger than the sleeve nut 46 nut. It is fixedly disposed on the main arm 400. The thread of the nut 46 can be interlocked with the guide screw 325b, so the guide screw 32 The north can pass through the nut 46 to enter the bore 462. Therefore, when the lead screw 325b rotates, the nut 46〇 slides up and down along the guide screw 22]3432ρίΠ 325b. Thus, the main arm 400 can move up or down. The main arm 400 includes a pneumatic cylinder 440, a linear rail 470, and a retaining member 450 to fix the pneumatic cylinder to the top 480. Since the guiding spirals 325a, 325b rotate synchronously and have the same thread, one main arm 400, 500 can be synchronized Move up and down. When the main arm 4〇〇, 5〇〇 month color rises and falls accordingly, the vertical position encoder 340 records its position. The motor 330 should be equipped with a brake to lock the lead screw 325a, 325b to avoid its rotation. Even in the best case, the lead screw The safety is not reversed due to heavy loads. The operation of the vernier arms 600, 700 is similar. The cursor arm 600, shown in Figure 15, moves along the linear way 470. To this end, the cursor arm 600 Linear bearings 61〇, 620 are included. Further, the travel #700' as shown in Fig. 16 moves along the linear track 570. To this end, the wiper arm 7〇〇 includes linear bearings 710, 720. The wiper arms 600, 7〇 〇The air cylinders are respectively 440 and 540. The oxygen pressure piston shafts (pneumatic pist〇n smear) 441 and 541 are directly arranged at the bottom of the cursor arms 6〇〇 and 7(8). As shown in Fig. 2 and Fig. 2 In detail, the flip pivot unit (tumblepiv〇tunit) 2〇〇 is disposed on the cursor arm 600' and the flip pivot unit 8〇〇 is disposed on the cursor 1 700 ° horizontal, and the flip pivot is connected to the pivot unit Between the 900 and the drive unit 800. The test head load is rotatably fixed to the pivot unit 9A and the drive unit 7G with the shaft passing therethrough. The flipping is preferably parallel to the two parallel lanes 320a, 320b. Defined plane... - therefore 'measured 5 head load system The towers of the inverting pivoting unit 9 and the inverting drive unit 800 are supported by the pneumatic cylinders 440 and 540, respectively. 23 1332578 13432pifl The pneumatic cylinders 440 and 540 are respectively connected to the main arms 4〇〇, 5〇〇. The range in which the vernier vertical arms 600, 700 are moved in the vertical direction is approximately ±25 mm with respect to the main arms 4, 5 。. The purpose of the vertical cursor arms 600, 700 is to provide a test head that can move in two degrees of freedom during a standstill. Each pneumatic cylinder 44〇, 54〇 can be filled with a suitable amount of air. That is, two regulators are provided. One for the pneumatic cylinder 440, and one for the pneumatic cylinder 540. Generally, a high pressure air supply can use two regulators. The pressure in each of the pneumatic cylinders 440, 54 is independently adjustable. By adjusting the air pressure in the pneumatic cylinders 440, 540, the test head can be moved forward or backward relative to the main arm 400'500. In this way, the test head can be moved near the center of the vertical cursor arm # near the center. The position of the test head between the vertical cursor arms can be maintained at a fixed pressure in the pneumatic cylinders 440, 540 under external force, which is sufficient to compensate for the test head load generated by the respective piston shafts 441, 541. Down force (d〇wnward [sink (3)). Since each pneumatic cylinder can be independently adjusted, the pressures in the two pneumatic cylinders 44〇, 54〇 do not need to be the same. In other words, the center of gravity of the bearing does not need to be located at the center of the two cylinders. If there is a force in the white, the pressure in the pneumatic cylinder can be increased. It can be adjusted to a fixed pressure according to the amount of gas output, so that the test head is down and the same as the spear. Similarly, if there is an upward external force, the pressure of the pneumatic cylinder will drop, and the surrounding state can supply more air to maintain the fixed position. The pressure causes the test head to go up. The 5 head can be maintained in a weightless or 'two motion= state. Material, if there is external torque generated by the head, and the force is at the other end, the pneumatic cylinder can supply more gas to the pneumatic cylinder through the regulator, and release the air in the other pneumatic cylinder to adjust it. . 24 13432ριΠ Therefore, the test head moves in the direction of two degrees of freedom: vertical motion (γ-axis) and rotational motion (ζ-axis), perpendicular to the axis of the plane defined by the linear obstructions 320a, 320b, which is flat彳 Rotate in the Z axis direction. In addition, the movement of the one-axis rotation does not need to pass through the center of gravity of the load, and the movement is not determined by the position of the rotation axis in the state of no weight and floating. In order to be able to perform vertical and rotational movements with pneumatic cylinders 440, 540 and a pressure regulating device, as shown in Figure 14b. While the present description and embodiments use air as the working fluid, it is still the spirit of the present invention to replace it with other working fluids. Two identical pressure regulation systems are available for the parent-pressure bar 440, 540' to allow the pressure in each cylinder to be independently controlled. Both conditioning systems can pressurize the gas from the same source R7, which is most often provided by test or other industrial equipment. Each pressure regulating system R6 includes a pressure regulator R8 that regulates sufficient pressure into the corresponding pneumatic cylinder 440 to support the building. The pressure supplied by the regulator R8 first flows through the electromagnetic control valve R9, the switching of which allows the flow through the pneumatic cylinder 440 in the actuated state. When the valve R9 has a returning bomb meal to disable the electric power, the valve R9 returns to the return position, and the pneumatic cylinder 440 is blocked to prevent the instantaneous pressure from being lost during the load. Regulator system R6 allows more air to be output from source R7 to maintain a fixed pressure, in the case of a pressure drop during load, and to release air with a pressure rise at load. Therefore, the regulator R8 can provide stable control. Parallel to the valve R9 is a one-way limiting valve (〇ne_way restrict〇r) R0, which uses a fluid of a transient response to cause a small amount of load to be applied by an external force to achieve positioning. The valve R9 and the limit valve R0 13432pif] can be used together to make the gas flow within the 験44〇. When one side of the plant is manually raised relative to the pneumatic cylinder 440 ^, the pressure in the gas is reduced with the rising force. The pressure regulation system R6 can determine the force (4) to increase the pressure and the pressure of the rainbow 440, until the scheduled target # 厌七, # ^ Tian added the capture to the funeral + 7 shells 昼 昼 force reached. In addition, if the negative =: side is pressed against the barometric force 440, the pressure in the pneumatic cylinder 44 = = plus: the pressure (four) system R6 can ensure the pressure of the limb when the pressure is increased until the predetermined target pressure is reached again. The axis (or rotary axis) motion provides the appropriate flexibility to connect the test head T to the positioning system. For example, '1_ fitting' ball 俨 ^ socket (mother (five) or appropriate sliding or flexible with ^ connection. Next to discuss the flip motion 'flip drive coffee 700. So when the cursor arm along the line The rollover drive unit is also moved with the cursor arm unit 700. Fig. 17, 18, 19, 20 disk 21--<1,,,,,,,,,,,,,,,,,,,, Including the repurchase motor _ 820. The motor ^ also includes a reduction gear. When the motor is required ^ Γ煞 car. Second: her decay wheel 875. Drive shaft 83. Connect roller 875. Roller 87 is connected to - belt (cut). The drive shaft 830 also rotates when the motor_rotary shaft rotates. In another embodiment, the gears can also replace the rollers 875, 876 and the belt. The drive shaft 830 includes a screw (similar) * wheel 889 (not shown) The drive gear 88 is sprayed with the drive gear 88 (Fig. 18, 丨9, not shown, subsequent). The drive shaft 83 is connected to the positioning encoder through the roller 8 871 26 1332578 13432 pifl and the leather armor* (not shown). 82〇. Therefore, when the drive shaft 830 rotates, the positioning stone machine 82〇 also rotates. In another embodiment, the gear can also replace the rollers 871, 872 and the belt. Figure 20 shows the drive gear and the shaft kit (a schematic diagram of the decomposition of the axle 5 (in order to make other S parts visible, 17 and 18, 19. The drive gear 880 includes gears (not shown) around the circumference 899 that mesh with the teeth 889 of the drive shaft. Drive gear 88G Also included - center circle open σ (Cal (4) dreular. (4) (4)) 898, and the opening 898 is surrounded by an open cylinder 897. The circular flange # (flange) 896 is located within π 898 and has a ring shape (annuiar Opening 898a. Six circular holes 881 are evenly distributed over the flange 896 to surround the annular opening 898a. The bearing 885 can be fitted into the annular opening 89. The shaft sleeve 894 includes a shaft 890 and is fixed to the shaft 89. The upper collar (axledng) 893 and the attachment unit are 2. The six hard rubber pins 891 can be inserted relatively into the six circular holes of the shaft 893 and are wrapped around the shaft. 89〇. As shown in the figure, 'The rubber wins the tip parallel to the shaft 890. The test head The end is disposed on the fitting 892 so that the test head can be flipped with the center of rotation of the shaft 89 (that is, the previously mentioned, flipped "axis). To minimize the torque required to rotate the test head 'axis most It is good to pass the center of gravity of the load. The shaft 890 fits within the bearing 885 and each rubber insert 891 is inserted oppositely into the circular hole 881 of the flange 896. The bearing 885 is fixed such that the collar is slightly spaced from the flange 896. Therefore, the shaft 890, the collar 893, and the fitting 892 are elastically coupled to the drive gear 88A. The rubber inserts the state's hard 27 丄 to ;) / s 13432pif) degrees enough to rotate, _ gear 88 〇, and the shaft kit 894 followed (four). False execution = the load connected to the accessory 892 is not too large, so that the shaft can pass the center of gravity. However, if the drive gear _ can remain fixed at a position == the tip of the plug is sufficient to allow the load connected to the fitting δ92 to rotate positively and negatively several degrees. The collar 892 is reduced from the flange just to reduce the likelihood of shear stress on the rubber insert 891 at the same interval to adjust the stiffness of the associated assembly. Therefore, the assembly can be used as a rotary drive mechanism for 2. In operation (mampulat〇r) system ^ the test head is docked on a peripheral device during the movement of the component. Therefore, the fitting 892 limits this with respect to the drive gear 88: = = = This is: The circle Q89^ of the drive gear m is perpendicular to the drive shaft 830. The position of the wheel 889 9: the gear and the corresponding drive wheel also rotate the gear ^ to rotate the drive shaft 830 accordingly, the drive gear, the shaft assembly 895 and the negative disk 2 U are preferably a peristaltic gear or a screw gear In order to drive the sauce = relative to the axis, it can also be rotated perpendicular to the drive. = Flip the drive housing "1#" 841 (see Figure 17) - (8) 840 includes - the opening includes - the opening 861 (through the cover. (Sun 〇 860 where the bearing 865 is also tm8, 19) so that the fitting 892 protrudes also includes an accurate, low friction member. 28 1332578 13432pifl piece, which is arranged in the test head: another, the pivoting unit 900 1- no power On the vernier arm 600, as described above, the end a: the flip pivot unit 9 〇〇 configuration name moves up and down. The flip pivot single ^ _ along the linear way 57! It is connected to - the pivotable test head solid ^ = Box (reetangular box) mounting device. In -^1 (pivotab) e coffee h (10) through the pivot unit. Short axis (^ in the example, there is a round hole 90 on the test head. Best _ saki =: ^ over = _ And solid _

It is matched with the matching screw hole; the ^ is simplified by the screw (not shown) == straight-tight arm ^ 匕 flip pivot unit 900 and drive unit _. 2: - has been placed on the test head. Next, the t-unit and the fresh-keeping element are arranged in a schematic manner, and the schematic diagram of the docking mechanism of the other embodiment of the present invention is shown. In the test head 1 示范 shown in Fig. 23, it is connected to the stent. The stand listens to the connection flip drive unit_ and the flip pivot unit 900. A plurality of docking mechanisms 1010 are disposed on the sides of the test head 1000. In the present embodiment, two docking mechanisms 1010 are illustrated. Each docking mechanism is placed on the bottom support frame (bott(10) support) 1020, and the docking mechanism 1〇1〇 is arranged on the side correction rod with a screw or adjusting screw 1075 (side canbmti〇n

Bar) 1015. The purpose of the side correction rod 1015 is to secure the docking mechanism 1〇1〇 to the bottom support frame 1020. The bottom support frame 1020 is disposed on a bottom calibration platform 1030 by a screw or adjustment screw 1〇35. Because 29 1332578 13432pifl this 'docking mechanism 1010 can be moved to an appropriate position, which is related to the position of the docking mechanism 1〇1〇 changed by the side correction lever 1015, and the bottom support frame 1〇2 changed from the bottom correction plate 1030 The ambiguity is related. The illustrated docking station 105〇' is fixed to peripheral devices (i.e., package processors, wafer probes, or other delta devices). A plurality of docking pins are fixed to the docking frame, and the docking pins and the docking mechanism are fixed, so that the docking pins can be aligned and inserted into the corresponding docking mechanism. FIG. 24 is a schematic view showing the docking pin 1〇6〇 of FIG. 23. The docking tip 1〇6〇 includes the tip base (1^11“幻11〇〇 and the upwardly extending tip section (coffee section) U5〇, 114〇, 113〇. As shown in the figure, the diameter of the tip gradually becomes The tip of the docking tip 1060 is reduced, mainly to stop a test head on the peripheral device. 'The smaller diameter of the tip 1130 allows relatively large internal tolerances to the test head on the peripheral device. The positioning system should have enough The allowable 1 straight (small part of the unpowered movement) makes the small part not accurate to the test head and the processor, and can be corrected correctly. As shown in Figure 24, the cam follower ιΐ2〇 is placed in the 彳 罪 插 〇 〇 〇 〇 〇 The sides of the cam follower 112 are properly mated on the docking mechanism 1010 as described below. 'Please refer to ® 25a and Figure 25b, which shows a cross-sectional side view of an embodiment of the present invention. Fig. 26 is a schematic exploded view. In Fig. 25b, the docking insert 1060 is inserted into the pinreceptade i3qq, and the docking female is inserted through the plug detector in Figs. 25a, 25b (pm detector). 1400, and the tip socket 13〇〇 is connected to the arm ι6〇〇, which is subjected to The piston unit 1500 is moved by the influence of the piston of the piston unit 1500. The piston unit includes the movable base 1515 without the shaft 151. The piston unit 15 (8) also includes a pole contact 13432pifl (pivotpoint) 1505 on its opposite side (only one of which is shown). The pivot point 1505 enables the piston unit 15 to produce a small amount of rotational motion. In one embodiment, the piston unit 1500 is, for example, a pneumatic unit, however, other types such as hydraulic, electric, etc. can also be used. The pivot point 15〇5 The piston unit 1500 can be rotated by a pivot guide 1〇8〇, which is located on the side of the enclosure 1012 and the cover 1〇14, inwardly toward the docking structure 1010. The arm 1600 The pivoting point 162 is included. By engaging with the pivoting path 1090 (located on the side of the cover 1012 and the cover 1〇14, inwardly toward the docking mechanism 1010), the pivot point 162 can enable the arm In Fig. 25b, the piston 1515 is clearly shown in the piston unit 15A. Different types of tip sockets 1300 will be described as follows. Fig. 26 is a schematic exploded view of the docking mechanism 1010. In the middle, you can clearly see the docking mechanism The cover 1012 and the cover 1014 of the docking mechanism. Of course, the tip socket 13〇〇, the tip detector, the arm portion 1600 and the piston unit 15〇〇 can also be seen. In Fig. 27, the tip socket 13 is shown. The tip socket 13〇〇 includes a cam groove 13〇5. The cam groove 13〇5 is a 5-position socket 1300 of each side piece 1315' and the figure 24 is located at the docking pin 1〇 The cam follower 1120 on the side of the 6 turns can cooperate with the cam groove 1305. The tip socket 1300 slides into the cover 1〇12 and the cover body 1〇1, in particular, the rod ^ i3i6 and the groove 1022 are engaged in the cover 1012, and the rod member 1317 and the groove 〇2〇 are combined with the cover body. 1014. More clearly, the piston 1515 and the piston shaft 1510 are coupled to the tip socket 13 by a pivoting arm 1600. As a result of 1332578 13432pifl, the movement of the piston 1515 causes the tip socket 13 to slide to the left and right. In the figure, when the piston shaft 1510 is retracted to bring the piston 1515 to the leftmost position, the tip socket 1300 is positioned at the rightmost position. Similarly, when the piston shaft 1515 is extended to bring the piston 1510 to the far right, the tip socket 13 is clamped to the leftmost position. 28 is a schematic diagram of the spigot detector 1400. As shown, the Detector Benefit 1400 includes a detect 〇r tab 1405. FIG. 29 is a schematic diagram showing the removal of the tab 14〇5 of the lance detector 14〇〇. The detector switch iWO can be seen in FIG. Lu Tu 30 shows a schematic diagram of the detector tab 1405. The detector adjustment tab 1405 includes a tab 〇pening ^450 to enable the detector tab 1405 to rotate. The detector tab 14〇5 also includes a roller mechanism 丨 470 that is inserted into the roller opening 1460 with a shaft. The debt detector tab 1405 also includes a rear member 1480. Figure 25b more clearly shows the operation of the lance detector 14 。. In particular, when the docking pin 1〇6〇 enters the tip detector 14〇〇, the detector tab 1405 is moved rearward relative to the tab opening 145〇. As a result of the backwards ® transition, the back member 148 is pushed toward the detector switch 1410. As such, the spigot detector 1400 senses that the docking spigot 1 〇 6 〇 has entered the spigot detector 1400. The detector switch 141 can also be used with an electronic switch of an electronic control system, an air valve of a pneumatic system, or a valve of a hydraulic system. Figure 31 depicts a schematic view of a non-piston unit. The piston unit 1500 includes a piston 1515 (not visible), a piston shaft 1510 and an arm mount 32 13432 ρ Π 1520 〇 FIG. 32 is a schematic view of the arm portion 1600. The arm portion 1600 includes an arm body 1630. An arm head 1610 is disposed at one end of the arm body 1630 by a head pivot 1660 to enable the arm head mo to rotate. An extension 1640 is disposed at the other end of the arm body 163, and the extension piece 1640 includes an extension opening 1650. An arm pivot 1620 is also included. As shown in Fig. 33, the docking pin 1〇6〇 is a schematic diagram relative to the docking machine when docked. In the docking phase, the docking _ bit == 1300 is above the opening of the cam groove 13〇5, that is, the rightmost position. When the detector tab 1405 is not pushed to the detector switch 141, it indicates that the plug 1060 is not inserted. In particular, the test head has been adjusted by the positioner , first, so that the docking tip 1060 is aligned with the position of the docking mechanism 1〇1〇 in FIG. 33, and then the docking surface of the test head and the docking plate 1〇5〇 The surface A defined to the surrounding device is approximately parallel. The test head is also in the position to be docked ". The encoder is built into the positioner , so that the position of the peripheral device of one, 疋 can be recorded by the system controller. Therefore, the system controller can automatically position the test head to a position ready to be docked, as described above. Figure 2 shows the position where the docking pin 1〇6〇 has entered the docking mechanism ι〇ι〇. Specifically, the cam follower 112 〇 has entered the cam groove 13 〇 5 in the downhill region (dQwnwardsl ping regum) of the cam groove 13Q5 which the tip socket 13 〇〇 slides to the left. Also, docking the plug 1〇6〇 to insert the docking mechanism ι〇ι〇 is enough to call 578 l3432pif] ^ ’ to make the docking plug 1060 push the detector to adjust the brain. Yuan Plug-in: When you reach this location, it is enough to push the detection. "Weighing the whole piece of 14G5' and making the back part sturdy to the side. :: 1:10 has been pushed inward' to start the docking mechanism 1010. The special parts are arranged in, ready to drive " When the switch can be activated, 疋, the test head is, the position of 'ready to stop', and some docking _ position is relative to the docking station 1〇]

About 2 drives, set. Therefore, when all the price detector switches 141 are activated, the (four) docking mechanism faces are also started simultaneously. Preferably, not all of the debt detector switches 141. Already started, otherwise the docking agency Chuan 1 will not start. When the test head is moved between the position to be parked and the position to be driven, it is preferably moved along the - straight motion and perpendicular to the plane of the stop # foot to protect the engagement of the elongated electrical contacts.

Medium, system (4) has the responsibility to control the docking motion, which can record the position of the ready-to-drive device to the encoder to obtain control information. In a system, the ready-to-park position and the ready-to-drive position are prepared, and other positions can be entered into the system controller + to enter a coaching procedure. In this guidance mode, the test head is operated by the operator to position it in a different position. The system reads the coordinates of the encoder and the position of the recorded position. After that, the system also uses and guides the location of the " to plan the path. Therefore, the system controller can automatically move the test head along a path by a service position (service p〇siti〇n) (for example, the position of the test head 34 1332578 • 3432pifi) 'away from the week to the ready-to-stop position And to a ready to stop location. It is important that during the docking process, when the test head is in the position to be driven, the power of the positioning system drive motor is interrupted. However, the pressure of the pneumatic cylinders 440, 54〇 and the other power units that provide relative motion remain unchanged. In particular, when the positioning system moves the test head to a different position, the positioning system can understand the position of the test head by means of a plurality of positioning encoders, as shown above. Therefore, when the positioning encoder indicates that the position to be driven has been reached in the positioning system, the other motors in the positioning system stop all movement, and the movement of the test head is further provided by the docking mechanism 1〇. If the console motor is equipped with a brake, the brake is released to allow the test head to move. Now, when the position shown in FIG. 34 is reached, the docking mechanism 1010 is in, ready to drive, and in the mode Y, in this mode, unless the positioning system continues to push the test head toward the periphery, the docking mechanism 1010 The test head will be pulled towards the peripheral device. In the present embodiment, the docking mechanism 1010 is driven by air pressure and begins to pull as the positioning system releases the motor. Therefore, the control nickname between the docking system and the positioning system does not need to be centered by the docking phase. FIG. 35 is a schematic illustration of the docking mechanism 1010 after activation. In other words, when the docking mechanism 1010 is in the state of Figure 35, the docking mechanism '1〇1〇' is to pull the test head toward the processor. In particular, in the following steps, when all of the detector switches 1410 are depressed, the piston unit 1500 is activated, and the piston shaft 151 of the piston unit 1500 begins to extend. In the system of the _^, the piston unit 1500 is a pneumatic device for pneumatic supply. When the piston 35 伸出 extends at 378 13432 pifl ^ 1510, the arm portion 1600 begins to pivot with the pivot arm 1620. a 1600 when the pivot arm 1620 begins to rotate 'the pivot joint 1610 pushes:: The seat 1300 causes it to begin to slide. Therefore, the pivot joint 1610 is rotated in rotation with respect to the % of the arm portion. The distance is provided by the straight knife of the pivot 101Q. As shown in Fig. 35, the tip socket noo is slid to the left relative to the figure. When the tip socket 1300 slides, the cam 1305 also slides relative to the cam follower 1120. As shown in Fig. 35, the depth of the convex groove 13G5 is increased from the opening to the end thereof. Therefore, when the 1300 is moved, the tip 1〇6〇 is also moved downward due to the sliding of the tip socket 13〇〇. Figure 36 shows a diagram of the docking mechanism 1〇1 in the fully docked position. In this position, the piston shaft 151 〇 extends to the bottom, and the arm portion is rotated, and the bottom 乂 60 is pushed to the bottom end, and the periphery of the test head disk is also stopped. Clothing placement When the test head is pulled from the ready-to-drive position to the fully parked position, all six degrees of freedom are slightly relative to each other after the docking spigot is aligned with the peripheral device. Therefore, it is better to allow the axial movement of the system (4) and the system 1G. In addition to the vertical drive motor, other motors can be configured to de-energize and release (). The action of the pneumatic cylinders 440, 540 and the inversion drive unit 8 is effected by this effect. In addition, in addition to these methods, other known prior A technologies can be added. When the test head is not parked relative to the position of the processor, the piston 15 is retracted by the signal to make the arm 66 〇〇 clockwise rotation and the cam follower 36 1332578 13432pifl 】 120 position in the groove 1305 At the opening. The motor in the positioning system is driven by the processor and the test head is controlled by the test head. The positioner control system can be a micro-processing system (hereinafter referred to as different components (for example, Motor, air pressure, etc.: 'Controlled by the = positioning system (four) system (hereinafter referred to as, docking ^ mechanism microprocessor. All test heads and surrounding skirts ^ door =) can also be - under: between the placement of the dock The operation procedure is as follows: 1. The operator manually, teaches, locates the crying device, prepares the docking position, and prepares to drive the system. The specific peripheral 2_operator also, 'teaching 〃 positioning write (called ^ P〇 Sid〇n) and The order of the relevant points between the standing paths on the predetermined path. 1 The position of the test head is placed on the service position and the test is prepared. 4. The position of the position controller control system is determined by the position of the positioner control system. The encoder determines the test head to be ready to stop. 5. When the ready to stop position is reached, = ''open, or enable—the independent docking system sends a signal as described in step 9 (see step 37 of Figure 37). ) City structure' as follow-up steps 8 and 6 · Small positioner control system The ground is shifted and perpendicular to the /σ-straight line where the position to be driven is located. (Refer to step 6 in Figure 37.) Spot = ten sides' It can also be used by the encoder at this time. After the lapse of a period of time, the fixed control system releases all the drives of the 1332578 13432 pifl motor and releases the brakes (if used), except for the vertical drive motor. 8. Within time T, The docking control system determines that the test head is already in the position to be driven by detecting the driving state of all the switches. 9. At the same time, in the time T of step 8, the docking control system drives all the piston units (drive units) 1010 (see figure). Step 9) of 37. 10. After time T has elapsed, the test head is moved to the fully rest position by the control of the docking control system, and the positioner is allowed to move in all axial directions. 11. Between the test head and the peripheral device When the respective electrical contacts are engaged, the test head and the peripheral device can be tested. At this time, the motor brake can be used to lock the position of the positioner or release the brake to allow the vibration to be absorbed. Although the present invention has been described in terms of a preferred embodiment, it is not intended to limit the invention, and those skilled in the art can make some modifications and refinements without departing from the spirit and scope of the invention. Therefore, the scope of the present invention is defined by the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a schematic diagram of a positioning system in accordance with a preferred embodiment of the present invention. 1 is an exploded perspective view of the positioning system of Fig. 1. Fig. 4 is a schematic view showing the base of the positioning system of Fig. 1. Fig. 5 is a schematic enlarged view of the base of Fig. 4. FIG. 6 is an exploded perspective view of the entry and exit unit of a positioning system. FIG. 7 further illustrates an exploded schematic view of the entry unit of FIG. 6. FIG. 8 is a schematic exploded view of the edge-to-edge unit of a positioning system. 38 1332578 13432pifl Figure 9 is a partial exploded view of the edge-to-edge unit of Figure 8 viewed from different perspectives. Figure 10 further illustrates a schematic of the edge-to-edge unit. Figure 11a is an exploded perspective view of a steering unit of a positioning system. Figure lib shows a schematic view of the belt of the steering unit. Figure 12 is a partial exploded view showing the steering unit of Figure 11a viewed from different perspectives. Figure 13 is an exploded perspective view of the main arm of a positioning system. Figure 14a is a partial exploded view of the main arm unit of Figure 13 viewed from different perspectives. Figure 14b is a block diagram showing the pressure regulating system used in the pneumatic cylinder of Figures 13 and 14a. Figure 15 is a schematic illustration of a cursor arm of a positioning system. Figure 16 is a schematic illustration of another cursor arm of the positioning system. 17 is an exploded perspective view of the inversion drive unit of the positioning system. Figure 18 is a diagram showing the decomposition of the flip drive unit of Figure 17 viewed from different viewing angles. Figure 19 is an exploded perspective view of the flip drive unit of Figures 17 and 8 viewed from a different perspective. Figure 20 is an exploded perspective view showing the gears, bushings and shafts used in the flip drive unit of Figures 17, 18 and 19. Figure 21 is a schematic view showing the gear, the bushing and the shaft assembled by the flip drive unit of Figures 17, 18 and 19. 22a, b are schematic views of a flip drive unit of a positioning system. 39 1332578 13432pifl FIG. 23 is a schematic view showing a docking mechanism according to an embodiment of the present invention. FIG. 24 is a schematic diagram of a docking plug according to an embodiment of the invention. 25a, b show a schematic cross-sectional view of the docking mechanism. Figure 26 is an exploded perspective view of a docking mechanism in accordance with an embodiment of the present invention. FIG. 27 is a schematic diagram of a tip socket according to an embodiment of the invention. FIG. 28 is a schematic diagram of a plug detector according to an embodiment of the invention. FIG. 29 is a schematic diagram of a patch detector after removing a detector block according to an embodiment of the invention. FIG. 30 is a schematic diagram of a detector tab according to an embodiment of the invention. Figure 31 is a schematic view of a piston unit in accordance with an embodiment of the present invention. 32 is a schematic view of an arm body according to an embodiment of the present invention. 33 to 36 are schematic flow charts showing a method of stopping a docking mechanism according to an embodiment of the present invention. Figure 37 is a flow chart showing a test head docked to a peripheral device. Figure 38a shows a schematic view of a conventional docking device. Figure 38b is a schematic illustration of a conventional docking device configured in a peripheral device. Figure 38c is a cross-sectional view showing a conventional docking device in a ready to drive position. Figure 38d is a schematic cross-sectional view showing a conventional docking device in a fully rested position. 40 1332578 13432pifl [Description of main component symbols] 10 : Positioning system 50 : Substrate 52a, 52b : Linear track 65 : Entry and exit drive motor 66 : Motor roller 70 : Positioning encoder 71 : Code roller 80 : Fixing frame 100 : Entry unit 102, 104, 106, 108: linear bearing 110: entering the substrate 112, 114: linear track 120: edge-to-edge drive motor 125: motor mount 130: positioning encoder 142, 144: roller 152, 154: upper cover 200 Edge-to-edge unit 210, 212, 214, 216: linear bearing 220: edge-to-edge substrate 230: steering drive motor 240: positioning encoder 250: drive shaft 1332578 13432pifl 254, 256: roller 260: steering plate assembly 260a Drive ring 300: Steering unit 302: Steering unit opening 305: Steering unit substrate 310a, 310b: Side plates 315a, 315b: Columns 320a, 320b: Linear roads 325a, 325b: Guide spirals 326a, 326b: Roller 330: Drive motor 331: Motor roller 340. Position code benefit 341: Encoder roller 350: Crank handle 351: Crank roller 361, 362, 363: Belt 371: Idler 400, 500: Main arm 410, 420: Linear guide shaft 440: pneumatic cylinders 441, 541: pneumatic piston shaft 450: positioning member 42 1332578 13432pifl 460: nut 462: elongated caliber 470: linear obstruction 480: top 570: linear obstruction 600, 700: cursor arms 610, 620: Linear bearings 710, 720: linear bearings 800, 900: flip pivot unit® 810: flip drive motor 820: flip positioning encoder 830: drive shaft 840: flip drive housing 841: opening 855: well 860: cover 861: Opening #865: bearings 871, 872: rollers 875, 876: roller 880: drive gear 881: round hole 885: bearing 889. gear 43 1332578 13432pifl 890: shaft 891: hard rubber tip 892: fitting 893: collar 894 : Shaft kit 895: Shaft kit 896: Round flange 897: Cylinder 898: Center round opening w 898a: Annular opening 899: Gear circumference 901: Round hole 1000: Test head 1005: Bracket 1010: Docking mechanism 1012: Cover 1014: cover body 1015: side correction rod 1020: bottom support frame 1021, 1022: groove 1030: bottom correction plate 1035: adjustment screw 1060: docking pins 1080, 1090: frame channel 44 13432ρίΠ 13432ρίΠ 1332578 1120: cam Follower 1150, 1140 1130: Tip 1300: Tip socket 1305: Cam groove 1315: Side pieces 1316, 1317: Rod 1400: Snap detector 1405: Detector tab 1410: Detector switch * 1450: Tab opening 1460 : roller opening 1470: rolling mechanism 1480: rear member 1500 · piston unit 1505: pivot point 1510: piston shaft 1515: piston φ 1520: fixed arm 1600: arm 1610: arm head 1620: pivot point 1630: arm body 1640: Extension arm 1650: Extension opening 45 1332578 13432pifl 1660: Pivot joint R6: Pressure regulation system R7: Source R8: Pressure regulator R9: Electromagnetic control room R0: Limit valve 2100: Test head 2106: Plate 2108: Peripheral device® 2110 : parking cam 2110a · cam follower 2112 : spigot 2112a : socket (guide hole) 2114 : lining 2115 : cable 2116 : pad 2125 : upper cutting port # 2126, 2128 : electrical interface 2129 : lateral spiral Groove 2132: annular cable driver 2135: docking handle 2137: roller 2190: bracket 46

Claims (1)

I3432pif2 is 93_G in the __Difficult positive pulse date: " June 7th 10' patent application scope: 1·- kinds of load read cleavage, including: Most pressure units; and a number of connectors, connections To the opposite side of the load, the connectors move to different positions to move the load parallel to the _th axis, and the _ axial direction corresponds to the driving direction of the gas relay unit, and at least one connector is moved by One of the connectors to a different position to rotate the load in a vertical, one of the first axial directions, the load along the first axial direction and around the second axial direction and at least the air pressure The unit is provided along the first axis and the ring, the second axis. 2. The load-supporting device of claim 1, further comprising a diverting blade that moves the load around the first axial direction. 3. The load-supporting device of claim 1, wherein when the load is wrapped around the second axis, one of the connectors moves in a different direction: a) another of the connectors The opposite direction of movement; or b) the other of the connectors remains fixed.隹 4. The device for load support according to claim 1, further comprising an entry and exit plate that moves the load parallel to the second axial direction. 5. The load supporting device of claim 1, further comprising a side edge plate that moves the load along a third axis, and the third axis is perpendicular to the first Han direction With the second axial direction. 6. The load-supporting device of claim 1, wherein the connections 1 § are rotated by a third axis and the second axis is perpendicular to the 47 1332578 13432 pif2. Revision date: June 1999 7曰 is the Chinese patent range of 93108800 without the slash correction of the second axial direction. 7. For example, the load-carrying correction device described in item (4), (f), the negative _ ring _ second (four), and whether the second axis is independent of the center of gravity of the load. δ. A device for load support as described in claim i, wherein the pressure units are independently adjustable. 9. If the load support (four) is described in the scope of the patent application, the singular ship, which moves the wire element to its respective first position 'and the pressure unit can move the load to - Last position. 10. A load-supporting device comprising: a plurality of oxygen pressure units; and a plurality of health connectors connecting the Wei press unit to opposite sides of the load, = connecting the ports to different positions to move the load parallel to - First pumping ... at least - the connector can provide at least two by moving one of the connectors to a different = to rotate the load in a second axial direction perpendicular to the first axis Degree of freedom. U. The device for load support according to the scope of claim 1G, comprising a plurality of actuators that move the load along the first axial direction to connect H to move the load to the second axial direction And the second Han direction is opposite to the driving direction of the "moving II". The air pressure units drive the load along the first axial direction and surround the second axial direction. 12. The load-supporting device of claim 5, comprising a diverting blade that moves the load around the first axial direction. 13. For the load-supporting device described in claim 11 of the patent scope, 48 1332578 13432pif2 is 93108800. The scope of the Chinese patent is not underlined. The date of this correction is: June 7, 1999, when the load is around the second axis. In one direction, one of the connectors moves in a different direction: a) the opposite direction of the other movement of the connectors; or b) the other of the connectors remains fixed. 14. The load-supporting device of claim 4, further comprising an entry and exit plate that moves the load parallel to the second axial direction. 15. The device as claimed in claim π, further comprising a side panel that moves the load along a third axis, and the third axis is perpendicular to the first axis The second axial direction. A device for load support according to claim 5, wherein the connectors are rotated in a third axial direction and the third axial direction is perpendicular to the second axial direction. 17. A load-supporting device comprising: a plurality of cylinders; a plurality of main arms 'moving along the cylinders respectively' to move the load along a first axis; and a cursor arm along at least A main arm moves, the vernier arm can provide a second axial direction, and the second axial direction is perpendicular to the first axial direction. 18. The load-supporting farm as described in claim 17 further includes a pressure unit that allows the cursor arm to move. 19. The device for load support according to claim 17, further comprising - connecting a connection to the side of the load - the side n is driven by the cursor arm and the connector moves the load along the first An axial direction and surrounding the second axial direction. 49 1332578 13432pif2 is the 931(10)_ Chinese patent range without a slash correction. The date of this amendment is: June 7, 1989. The device of the load-bearing building as described in claim 18 of the patent application, further includes - the steering piece' movement The load surrounds the first axial direction. 21. The load-supporting device of claim 19, wherein when the load is wrapped around the second axis, one of the connectors moves in a different direction: a) another of the connectors The opposite direction of movement; or b) the other of the connectors remains fixed. 22. The load-supporting device of claim 18, further comprising an entry and exit plate that moves the load parallel to the second axial direction. 23. The load-supporting device of claim 18, further comprising a side-to-side panel that moves the load along a third axial direction and the second axis is perpendicular to the first axial direction With the second axial direction. 24. The load-supporting device of claim 18, wherein the connector rotates the load in a third axial direction and the third axis is perpendicular to the first and second axial directions. 25' A load-supporting device comprising: 〇 a plurality of connectors connected to opposite sides of the load, at least one connector drive, the load being rotated in a rotational axis, the at least - the connector comprising a match疋 having a flexible member to provide a rotation around the axis of rotation, the connectors moving to different positions to move the load parallel to a first axis, at least one connector being moved by the connectors One to a different position to rotate the load in a second axial direction that is perpendicular to the first axis. 26. The load-supporting device of claim 25, wherein the 5 ho connector moves the load to the first axial direction of the rotational axis 50 1332578. Date of revision: June 7, 1999 ϋ 3321Ρ〇 The Chinese patent range is not scribed and surrounds the second axis ' and the second axis is perpendicular to the first axis and the axis of rotation. The load-bearing device of claim 26, wherein the load is along the first axial direction and surrounds the second axial direction. 28. The device of claim 26, wherein when the load is wrapped around the second axis, one of the connectors is moved in a direction: a) the other of the connectors The opposite direction of a move; or b) The other of the connectors remains fixed. 29. The load-supporting device of claim 26, further comprising an entry and exit plate that moves the load along the second axial direction. 30. The apparatus of claim 3, further comprising a side edge panel that moves the load along the axis of rotation and the axis of rotation is perpendicular to the second axis. The device for load support according to claim 25, wherein the flexible member comprises rubber. 32. The device for load support according to claim 25, wherein the financial member is connected to the power drive gear. For the application of the device for the smashing of the slap in the 25th item, the source of the power of the device is selected from the method of power and air pressure bearing, including: Call ==== 51 1332578 13432pif2 is the Chinese patent scope of No. 93108800 without a slash correction. This correction date: June 7, 1999, by actuating one of the actuators to move one of the connectors to a different position ' Rotating the load in a vertical direction of the first axial direction to provide a degree of freedom along the first axial direction; and providing a degree of freedom perpendicular to the second axial direction of the first axial direction. 35. The method of load support according to claim 34, wherein one of the actuators moves in a selected direction when the load is wrapped around the second axis. a) the opposite direction of the other movement of the connectors; or b) the other of the connectors remains fixed. 36. The method of load support of claim 34, further comprising moving the load parallel to the second axis. 37. The method of load support of claim 34, further comprising moving the load along a third axis, the third axis being perpendicular to the first axis and the second axis. 38. The method of load support as described in claim 34 of the scope of the patent application, The rotation is performed in a third axial direction, and the third axial direction is perpendicular to the second axial direction. 39. A method of load support as described in claim 34, comprising adjusting at least a pressure unit to provide degrees of freedom. The method of load support according to claim 39, wherein the pressure unit is one of the pressure units, which is provided to provide the degree of freedom. The door i 41' is a load supporting method as described in claim 39, 52 1332578 13432pif2 is 93108800 Chinese patent range without a slash correction. The correction period: June 7th, 1999, wherein the actuators move The at least one air pressure unit to a first position, and the air pressure unit can move the load to a final position. 53