1326753 九、發明說明： 【發明所屬之技術領域】 本發明係關於-種蓄熱式焚化爐線上熱 隹:(別是關於-種用以去除或防止高树機物二:: 物質附著於含蓄熱材料之熱交換單元由務及 上熱生或保持其蓄熱功能之蓄熱式焚化爐：1326753 IX. Description of the invention: [Technical field to which the invention pertains] The present invention relates to a type of regenerative incinerator line that is hot: (don't care about - to remove or prevent high tree organisms 2:: substance attached to heat storage The heat exchange unit of the material is a regenerative incinerator that is capable of heating up or maintaining its heat storage function:
【先前技術】 進來，國内外對於環保議題日益重視，對於 排放標準日趨嚴格，揮發性有機物(VQCs)已為目前:乳 染防治重點之一。 工乳污[Previous technology] In addition, domestic and international attention has been paid more and more to environmental protection issues. As emission standards become more stringent, volatile organic compounds (VQCs) have become one of the current focus of prevention and control of emulsions. Industrial pollution
焚化法為處理VOCs廢氣之一種，在適當焚化 V0Cs之去除率可達99%以上，燃燒產物依進氣體右 所不同，通常之產物為水、二氧化碳、氮氧化物 物等。焚化法一般可有效改善廢氣中所含之v〇Cs及臭氣 問題，然而，其相當耗費燃料。因此，燃燒器之設計應使 VOCs與惡臭物質直接通過火焰，並有足夠之燃燒溫度、停 留時間及適當氣流強度，以提高去除率。 如美國專利案第5,837,205號中所揭示，—般蓄熱式焚 化爐（Regenerative Thermal Oxidizer ; RTO)至少包括二個蓄 熱床、進氣控制設備、加熱及溫度控制設備，蓄熱床内填 充石質或陶瓷蓄熱材料。雙蓄熱床式焚化爐之操作包含2 步驟： 5 1326753 步驟1 :將欲處理氣體先導入一蓄熱床（第1床）預熱至 一定溫度，然後通過火焰燃燒後再進入另一蓄熱 床（第2床），此時，燃燒後之高溫氣流會將第2 床加熱，即將高溫氣流之溫度轉移儲存於第2床 之蓄熱材料中。 步驟2 :待一設定時間經過後，改將欲處理氣體導入已蓄 熱之第2床預熱，再經燃燒後進入已冷卻之第1 床，高溫氣流可再將熱儲存於第1床，而完成一 循環熱交換。 美國專利案第5,538,420號中揭示一種三蓄熱床焚化 爐及其使用方法，亦即有三蓄熱床（第1、第2及第3床）， 且每一蓄熱床除進氣及出氣端外，尚包含一沖洗淨化端。 三蓄熱床焚化爐因在蓄熱及預熱步驟間多一個通入沖洗淨 化氣體(purge air)之步驟，故需多一個蓄熱床。 亦有揭示一種如第一圖所示之迴轉式蓄熱焚化爐，其 包含一加熱單元10、多組之熱交換單元20、一迴轉閥30 及一驅動單元40，該迴轉閥30包含一定子31與一轉子 32，定子31上設有一進氣口 311、一排氣口 312及沖洗氣 體入口 313，該熱交換單元20由多組組成，設於迴轉閥30 之上方，藉由迴轉轉子32可改變各熱交換單元之進氣、排 氣或導入沖洗淨化氣體。 然而，上述三種蓄熱式焚化爐有一共同之缺點，以第 一圖之迴轉式蓄熱焚化爐為例，熱交換單元20内充填有蓄 熱材料，該熱交換單元20之溫度會隨著深度而逐漸下降， 1326753 在焚化爐使用一段時間之後，因熱交換單元20底部溫度不 足而會有高沸點有機物、油霧及焦質（tar)類物質附著於熱 交換單元20之蓄熱材料上，而使該熱交換單元20逐漸喪 失熱交換功能。一般清除此高沸點有機物、油霧及焦質（tar) 類物質可將焚化爐系統關閉後以熱水或溶劑等清除，然 而，此等方式十分費時且僅能清熱交換單元20上方部分， 並不能徹底清除乾淨。 φ 美國專利案第6,203,316 B1號中揭示一種迴轉式焚化 爐連續線上無煙熱烘(bake-out)之方法，其目的在於使用一 外源熱源加熱所導入之沖洗淨化氣體，藉由迴轉閥之旋轉 並配合高溫之沖洗氣體，逐一將熱交換單元由底部向上熱 烘，以解決上述高沸點有機物、油霧及焦質（tar)類物質附 著之問題。然而，此設計必須多加一組外源熱源來加熱沖 洗淨化氣體，就工業製造成本而言，其增加了燃料費用支 出，就環境保護而言，其增加了二氧化碳等廢氣之排放量， • 並不符合近年來工業界削減二氧化碳排放量之目的，故並 非十分理想的設計。 因此，如何提供一種裝置成本低、結構簡易、易於控 制、操作可靠度高及維修之蓄熱式焚化爐線上熱烘裝置係 為相關業者所急迫有待尋求解決之方案以及改進之處。 【發明内容】 為了改善上述習知技術所面臨的問題，本發明提供一 種蓄熱式焚化爐線上熱烘(bake out)裝置，可用以去除或防 7 1326753 止高沸點有機物、油霧及焦質（tar)類物質附著於含蓄熱材 料之熱交換單元底部，使熱交換單元能再生或保持其蓄熱 功能，其中該蓄熱式焚化爐用以處理有機廢氣，且其包含 至少一加熱器、至少二設有一進氣口及一排氣口之熱交換 單元，該熱烘裝置外接於該焚化爐，且至少包含： 一加熱單元，其至少一端導通至該焚化爐之上方； 一沖洗淨化氣體風機，可將空氣通過該加熱單元加熱 後抽送至該焚化爐；及 φ 一控溫單元，可控制該加熱單元於一預設溫度。 在本發明之蓄熱式焚化爐線上熱烘裝置中，該焚化爐 並無特別限制，較佳可為三組熱交換單元之蓄熱式焚化爐 或迴轉式蓄熱焚化爐。此外，上述各種形式之焚化爐之熱 交換單元進一步包含可導入空氣之沖洗淨化氣體入口，該 沖洗氣體之目的在於解決預熱/蓄熱切換時有未處理之氣 體交差污染排放及洩漏等低效率及惡臭的問題。 上述迴轉式蓄熱焚化爐包含至少一加熱器、至少二熱 · 交換單元、一迴轉閥（rotary valve)，該迴轉閥包含一定子與 一轉子，定子上設有一進氣口、一排氣口及沖洗淨化氣體 入口。該熱交換單元由多組組成，設於迴轉閥之上方，其 排列方式必須配合轉子之設計。第二圖為迴轉式蓄熱焚化 爐經迴轉閥轉子氣流分佈之俯視示意圖，例如第二圖中所 示，該轉子上端區隔成10個導通區域時，則10個熱交換 區隔單元可設計成輻射狀，各熱交換單元經由管路與迴轉 閥轉子之導通區域連通，藉由迴轉閥内部轉子之迴轉，可 8 1326753 改變各熱交換單元之進氣、排氣或導入沖洗淨化氣體。 在本發明之迴轉式蓄熱焚化爐線上熱烘裝置中，若該 蓄熱式焚化爐設有上述之沖洗淨化氣體入口，則該沖洗淨 化氣體風機可將空氣抽送導入該加熱單元加熱，該加熱單 元由控溫單元控制於一預設溫度，而通過並加熱後之氣流 可由該沖洗淨化氣體入口導入焚化爐之熱交換單元進行熱 烘。此外，該沖洗淨化氣體風機之抽送風功能可由其他可 Φ 造成壓力差而形成沖洗淨化氣體流動的裝置與方法取代。 在本發明之迴轉式蓄熱焚化爐線上熱烘裝置中，該熱 烘裝置之設置位置並無特別限制，只要能夠由該焚化爐導 引熱源以加熱沖洗淨化氣體風機所抽送之氣流，可配合焚 化爐之設計等加以變化，例如可以旁通模式或頂接模式等 設置於焚化爐上。旁通模式為該加熱單元一端連接至該焚 化爐之上方，另一端連接至該焚化爐之進氣口，其可進一 步增設一熱氣旁通風機，設置於該加熱單元與焚化爐之進 籲 氣口之間，以利於抽送焚化爐之熱源。頂接模式為該加熱 單元設置於該蓄熱式焚化爐之上方，且該加熱單元之二端 分別跨接於該蓄熱式焚化爐上方兩端，因焚化爐兩端溫度 差及氣流流動之變化，可將熱源由加熱單元之一端通過加 熱單元而由另一端流出，因直接設置於焚化爐之上方，因 此可節省熱源達到更佳之加熱效率。 本發明亦提供一種蓄熱式焚化爐線上熱烘方法，其用 以去除或防止高沸點有機物、油霧及焦質類物質附著於含 蓄熱材料之熱交換單元底部，使熱交換單元能正常保持其 9 1326753 蓄熱再生功能及防止蓄熱床高溫悶燃之危害，該熱烘方法 包含下列步驟： (1) 提供一熱烘裝置，其至少包含： 一加熱單元，其至少一端導通至該焚化爐之上 方； 一沖洗淨化氣體風機，可將空氣通過該加熱單元 加熱後抽送至該焚化爐；及 一控溫單元，可控制加熱單元於一預設溫度； (2) 啟動或保持該焚化爐之運作，該焚化爐内之熱源可經 由管路導引至該加熱單元； (3) 開啟沖洗淨化氣體風機，將空氣通過該加熱單元並加 熱，將加熱後之氣流導入蓄熱式焚化爐之熱交換單元 進行熱烘； (4) 藉由變換該蓄熱式焚化爐之熱交換單元之加熱/蓄熱/ 沖洗淨化模式，可將全部熱交換單元再生或保持其蓄 熱功能。 在本發明之蓄熱式焚化爐線上熱烘方法中，該焚化爐 並無特別限制，較佳可為三組熱交換單元之蓄熱式焚化爐 或迴轉式蓄熱焚化爐。此外，上述各種形式之焚化爐之熱 交換單元進一步包含可導入空氣之沖洗淨化氣體入口，該 沖洗淨化氣體目的在於解決預熱/蓄熱切換時有未處理之 氣體交羞污染排放及洩漏等低效率及惡臭的問題。 上述迴轉式蓄熱焚化爐包含至少一加熱器、至少二熱 交換單元、一迴轉閥，該迴轉閥包含一定子與一轉子，定 1326753 子上設有一進氣口、一排氣口及沖洗氣體入口。第三圖為 迴轉蓄熱式焚化爐之迴轉閥轉子及氣流流動之示意圖。如 第2及第三圖所示，含VOCs之廢氣可經由定子之進氣口 進入經由轉子（如進氣路徑A)導入熱交換單元；經焚化 及蓄熱後之氣流可由轉子（如排氣路徑B)經定子之排氣 口導出排放；而上述沖洗淨化氣體可經由定子之入口進 入，而經由轉子（如沖洗淨化路徑C)導入熱交換單元。 _ 該熱交換單元由多組組成，設於迴轉閥之上方，其排列方 式必須配合轉子之設計，例如第三圖中所示，該轉子上端 區隔成10個導通區域時，則10個熱交換單元可設計成輻 射狀，各熱交換單元經由管路與迴轉閥轉子之導通區域連 通，藉由迴轉閥内部轉子之迴轉，可改變各熱交換單元之 進氣、排氣或導入沖洗氣體。 在本發明之蓄熱式焚化爐線上熱烘方法中，若該蓄熱 式焚化爐設有上述之沖洗淨化氣體入口，則在步驟（3)中， • 該沖洗淨化氣體風機可將空氣抽送導入該加熱單元加熱， 該加熱單元由控溫單元控制於一預設溫度，而加熱後之氣 流可由該沖洗氣體入口導入焚化爐進行熱烘。此外，該沖 洗淨化氣體風機之抽送風功能可由其他可造成壓力差而形 成沖洗淨化氣體流動的裝置與方法取代。 在本發明之蓄熱式焚化爐線上熱烘方法中，該熱烘裝 置之設置位置並無特別限制，只要能夠由該焚化爐導引熱 源以加熱沖洗淨化氣體風機所抽送之氣流，可配合焚化爐 之設計等加以變化，例如可以熱氣旁通模式或頂接模式等 11 1326753 設置於焚化爐上。熱氣旁通模式為該加熱單元一端連接至 該焚化爐之上方，另一端可連接至該焚化爐之進氣口，其 亦可進一步增設一熱氣旁通風機，設置於該加熱單元與焚 化爐之進氣口之間，以利於抽送焚化爐之熱源。頂接模式 為該加熱單元設置於該蓄熱式焚化爐之上方，且該加熱單 元之二端分別跨接於該蓄熱式焚化爐上方兩端，因焚化爐 兩端溫度差造成之自然對流效應及氣流流動之變化，可將 熱源由加熱單元之一端通過加熱單元而由另一端流出，因 直接設置於焚化爐之上方，因此可節省熱源達到更佳之加 熱效率。 【實施方式】 本發明以下列實施例進一步說明，惟該實施例不應限 制本發明之範疇，熟習此項技藝者於不背離本發明之範疇 及精神下進行合理的變化。 實施例1 第四圖為本發明蓄熱式焚化爐線上熱烘裝置搭配迴轉 蓄熱式焚化爐之較佳具體實施例示意圖。如圖所示，該焚 化爐為包含一加熱器10、多組之熱交換單元20、一迴轉閥 30，該迴轉閥30包含一定子31與一轉子32，定子上設有 一進氣口 311、一排氣口 312及沖洗淨化氣體入口 313。該 熱烘裝置包含一加熱單元60，其一端導通至該焚化爐之上 方，另一端可導通至進氣口 311; —沖洗淨化氣體風機51， 12 1326753 可將空氣通過該加熱單元60加熱後抽送至沖洗淨化氣體 入口 313 ; —熱氣旁通風機52，設置於該加熱單元60與進 氣口 311之間，以利於抽送焚化爐之熱源；風機53 ;及一 控溫單元70，可控制加熱單元60於一預設溫度。而該加 熱單元為旁通模式，即一端連接至該焚化爐之上方，另一 端可導通至該進氣口 311。 進行本發明蓄熱式焚化爐線上熱烘方法時，首先啟動 _ 或保持該焚化爐之運作，該焚化爐内之熱源可藉由熱氣旁 通風機52之抽送經由管路通過加熱單元60後導引至進氣 口 311。開啟沖洗淨化氣體風機51，可使空氣通過該加熱 單元60而加熱，將加熱後之氣流導入蓄熱式焚化爐之沖洗 淨化氣體入口 313，經由迴轉閥之轉子32導入熱交換單元 20進行熱烘。換言之，即以加熱之氣流進行上述蓄熱式焚 化爐之沖洗步驟。此時，熱交換單元20之蓄熱材料上的高 沸點有機物、油霧及焦質類物質，可經加熱後之氣流熱烘 • 分解，並隨氣流由排氣口 312排出。 轉子上端區隔成數個輻射狀導通區域，各熱交換單元 亦配合轉子設計，並經由管路與迴轉閥轉子之導通區域連 通，以驅動元件40驅動轉子32轉動，藉由迴轉轉子32可 改變各熱交換單元之進氣、排氣或導入沖洗淨化氣體。亦 即，連續轉動轉子32 —段預設時間後，即可使各熱交換單 元完成熱烘，而能再生或保持其蓄熱功能。 實施例2 13 1326753 第五圖為本發明蓄熱式焚化爐線上熱烘裝置搭配迴轉 式蓄熱式焚化爐之較佳具體實施例示意圖。其中該蓄熱式 焚化爐及迴轉閥如實施例1中所述。如圖所示，該熱烘裝 置包含一加熱單元60，其二端跨接於該焚化爐之上方；一 沖洗淨化氣體風機51，可將空氣通過該加熱單元60加熱 後抽送至沖洗淨化氣體入口 313 ;及一控溫單元70，可控 制加熱單元60於一預設溫度。而該加熱單元60為頂接模 式，即該加熱單元60設置於該蓄熱式焚化爐之上方，且該 φ 加熱單元60之二端分別跨接於該蓄熱式焚化爐上方兩端。 進行本發明蓄熱式焚化爐線上熱烘方法時，首先啟動 或保持該焚化爐之運作，因焚化爐兩端溫度差及氣流流動 之變化，可將熱源由加熱單元60之一端通過加熱單元60 而由另一端再流入焚化爐，因此可節省熱源達到更佳之加 熱效率。之後，開啟沖洗淨化氣體風機51，可使空氣通過 該加熱單元60而加熱，將加熱後之氣流導入蓄熱式焚化爐 之沖洗氣體入口 313，經由迴轉閥之轉子32導入熱交換單 · 元20進行熱供。換言之，即以加熱之氣流進行上述蓄熱式 焚化爐之沖洗淨化步驟。此時，熱交換單元20之蓄熱材料 上的高沸點有機物、油霧及焦質類物質，可經加熱後之氣 流熱烘分解，並隨氣流由排氣口 312排出。 轉子上端區隔成數個輻射狀之導通區域，各熱交換單 元亦配合轉子設計，並經由管路與迴轉閥轉子之導通區域 連通，以驅動元件40驅動轉子32轉動，藉由迴轉轉子32 可改變各熱交換單元之進氣、排氣或導入沖洗淨化氣體。 14 1326753 亦即，連續轉動轉子32 —段預設時間後，即可使各熱交換 單元進行熱烘，而能再生或保持其蓄熱功能。 實施例3 第六圖為本發明蓄熱式焚化爐線上熱烘裝置搭配三槽 式蓄熱焚化爐之較佳具體實施例示意圖。如圖所示，該焚 化爐為包含三組熱交換單元21、22、23，且每一組熱交換 φ 單元除進氣口及排氣口端外，尚包含一淨化氣體入口端， 且各入口端各設有一控制閥。該熱烘裝置包含一加熱單元 60，其二端跨接於該焚化爐之上方；一沖洗淨化氣體風機 51，可將空氣通過該加熱單元60加熱後抽送至沖洗淨化氣 體入口 313 ;及一控溫單元70，可控制加熱單元60於一預 設溫度。而該加熱單元60為頂接模式，即該加熱單元60 設置於該蓄熱式焚化爐之上方，且該加熱單元60之二端分 別跨接於該蓄熱式焚化爐上方兩端。 • 進行本發明蓄熱式焚化爐線上熱烘方法時，首先啟動 或保持該焚化爐之運作，因焚化爐兩端溫度差及氣流流動 之變化，可將熱源由加熱單元60之一端通過加熱單元60 而由另一端再流入焚化爐，因此可節省熱源達到更佳之加 熱效率。之後，開啟沖洗淨化氣體風機51，可使空氣通過 該加熱單元60而加熱，將加熱後之氣流導入蓄熱式焚化爐 之沖洗氣體入口 313，開啟閥211、222及233，並關閉閥 212、213、221、223、231 及 232，此時，熱交換單元 21 導入廢氣預熱，熱交換單元23通入經加熱單元60加熱後 15 1326753 之沖洗淨化氣體，而將上一循環中該床未處理之廢氣沖入 廢氣流中，並使熱交換單元23進行熱烘，蓄熱材料上的高 沸點有機物、油霧及焦質類物質，可經加熱後之氣流熱烘 分解，並隨燃燒後之氣流通入熱交換單元22，將熱儲存後 由排氣口 312排出。 其次，開啟閥213、221及232，並關閉閥211、212、 222、223、231及233，此時，熱交換單元22導入廢氣預 熱，熱交換單元21通入經加熱單元60加熱後之沖洗淨化 φ 氣體，而將上一循環中該床未處理之廢氣沖入廢氣流中， 並使熱交換單元23進行熱烘，蓄熱材料上的高沸點有機 物、油霧及焦質類物質，可經加熱後之氣流熱烘分解，並 隨燃燒後之氣流通入熱交換單元23，將熱儲存後由排氣口 312排出。 之後，開啟閥212、223及231，並關閉閥211、213、 221、222、232及233，此時，熱交換單元23導入廢氣預 熱，熱交換單元22通入經加熱單元60加熱後之沖洗淨化 Φ 氣體，而將上一循環中該床未處理之廢氣沖入廢氣流中， 並使熱交換單元22進行熱烘，蓄熱材料上的高沸點有機 物、油霧及焦質類物質，可經加熱後之氣流熱烘分解，並 隨燃燒後之氣流通入熱交換單元21，將熱儲存後由排氣口 312排出。 依此方式，經由開啟/關閉各熱交換單元21、22及23 所設置之閥，可將各熱交換單元21、22及23依次進行進 氣預熱/沖洗淨化並熱烘/排氣蓄熱之步驟，即可使熱交換單 16 1326753 元21、22及23進行熱烘，而能再生或保持其蓄熱功能。 產業可利用性 本發明之蓄熱式焚化爐線上熱烘裝置及其使用方法， 可用以去除或防止高沸點有機物、油霧及焦質類物質附著 於含蓄熱材料之熱交換單元底部，使熱交換單元能正常保 持其蓄熱再生功能及防止蓄熱床高溫悶燃之危害，是處理 φ 再生蓄熱材料之良好設備及方法，兼具節省燃料費用支 出，並削減二氧化碳等廢氣之排放量等優點，亦可有效降 低操作成本及悶燃之危害風險，相當符合環保、安全及能 源需求之優良技術，值得應用於產出大量低濃度有機廢氣 之高科技晶圓及光電製造業、石化及化工業、塗裝印刷業 與膠帶製造產業。 【圖式簡單說明】 • 第一圖為習知迴轉式蓄熱焚化爐之之示意圖。 第二圖為迴轉式蓄熱焚化爐經迴轉閥轉子氣流分佈之 俯視示意圖。 第三圖為迴轉式蓄熱焚化爐之迴轉閥轉子及氣流流動 之示意圖。 第四圖為本發明蓄熱式焚化爐線上熱烘裝置搭配迴轉 蓄熱式焚化爐之較佳具體實施例示意圖。 第五圖為本發明蓄熱式焚化爐線上熱烘裝置搭配迴轉 式蓄熱焚化爐之較佳具體實施例示意圖。 17 1326753 第六圖為本發明蓄熱式焚化爐線上熱烘裝置搭配三槽 蓄熱式焚化爐之較佳具體實施例示意圖。 【主要元件符號說明】 10 加熱器 20、21、22、23 熱交換單元 211、212、213、221、222、223、231、232、233 閥 30 迴轉閥 φ 31 定子 32 轉子 311 進氣口 312 排氣口 313 沖洗淨化氣體入口 40 驅動元件 51 沖洗淨化氣體風機 52 熱氣旁通風機 · 53 風機 60 加熱單元 70 控溫單元 A 進氣路徑 B 排氣路徑 C 沖洗淨化路徑 18The incineration method is a kind of waste gas for treating VOCs. The removal rate of VCCs in appropriate incineration can reach more than 99%, and the combustion products are different depending on the right gas. The usual products are water, carbon dioxide, nitrogen oxides and the like. The incineration method generally improves the v〇Cs and odors contained in the exhaust gas, however, it is quite expensive. Therefore, the burner should be designed so that VOCs and odorous materials pass directly through the flame and have sufficient combustion temperature, residence time and proper airflow strength to increase the removal rate. As disclosed in U.S. Patent No. 5,837,205, a Regenerative Thermal Oxidizer (RTO) includes at least two regenerator beds, intake control devices, heating and temperature control devices, and a regenerative bed filled with stone or ceramic. Heat storage material. The operation of the double regenerative bed incinerator comprises 2 steps: 5 1326753 Step 1: The gas to be treated is first introduced into a regenerator bed (the first bed) to be preheated to a certain temperature, and then burned by the flame before entering another regenerator bed (the first 2 beds), at this time, the high temperature gas stream after combustion will heat the second bed, that is, the temperature transfer of the high temperature gas stream is stored in the heat storage material of the second bed. Step 2: After a set time has elapsed, the gas to be treated is introduced into the second bed preheating of the regenerative heat, and then burned to enter the cooled first bed, and the high temperature airflow can store the heat in the first bed. Complete a cycle of heat exchange. U.S. Patent No. 5,538,420 discloses a three-storage bed incinerator and a method of using the same, that is, three regenerator beds (first, second, and third beds), and each regenerator bed except for the intake and exhaust ports. Contains a flushing cleansing end. The three-storage bed incinerator requires one more regenerator bed because of one more step of flushing the purge air between the heat storage and preheating steps. There is also disclosed a rotary regenerative incinerator as shown in the first figure, comprising a heating unit 10, a plurality of sets of heat exchange units 20, a rotary valve 30 and a drive unit 40, the rotary valve 30 comprising a stator 31 And a rotor 32, the stator 31 is provided with an air inlet 311, an exhaust port 312 and a flushing gas inlet 313. The heat exchange unit 20 is composed of a plurality of groups, which are disposed above the rotary valve 30, and can be rotated by the rotary rotor 32. The intake, exhaust or introduction of the purge gas of each heat exchange unit is changed. However, the above three types of regenerative incinerators have a common disadvantage. Taking the rotary accumulator incinerator of the first figure as an example, the heat exchange unit 20 is filled with a heat storage material, and the temperature of the heat exchange unit 20 gradually decreases with depth. , 1326753 After the incinerator is used for a period of time, high-boiling organic matter, oil mist and tar substances are attached to the heat storage material of the heat exchange unit 20 due to insufficient temperature at the bottom of the heat exchange unit 20, and the heat is applied. The switching unit 20 gradually loses its heat exchange function. Generally, the removal of the high-boiling organic matter, oil mist and tar substances can be performed by shutting down the incinerator system with hot water or solvent, etc. However, such a method is very time consuming and can only heat the upper part of the exchange unit 20, and Can't be completely cleaned up. U.S. Patent No. 6,203,316 B1 discloses a method of a smokeless bake-out on a continuous line of a rotary incinerator, the purpose of which is to use an external source of heat to heat the introduced flushing purge gas by rotation of the rotary valve. In combination with the high-temperature flushing gas, the heat exchange unit is heat-baked upward from the bottom to solve the problem of adhesion of the above-mentioned high-boiling organic matter, oil mist and tar. However, this design must add a set of external heat sources to heat the purged purge gas. In terms of industrial manufacturing cost, it increases the fuel cost. In terms of environmental protection, it increases the emission of carbon dioxide and other exhaust gases. In line with the goal of reducing carbon dioxide emissions in the industrial sector in recent years, it is not a very ideal design. Therefore, how to provide a refrigerating incinerator on-line hot-drying device with low cost, simple structure, easy control, high operational reliability and maintenance is an urgent solution and improvement of related industries. SUMMARY OF THE INVENTION In order to improve the problems faced by the above-mentioned prior art, the present invention provides a bake out device on a regenerative incinerator line, which can be used to remove or prevent high boiling organic matter, oil mist and coke from 7 1326753 ( The tar) substance is attached to the bottom of the heat exchange unit containing the heat storage material to enable the heat exchange unit to regenerate or maintain its heat storage function, wherein the regenerative incinerator is for treating the organic waste gas, and comprises at least one heater, at least two a heat exchange unit having an air inlet and an exhaust port, the hot drying device being externally connected to the incinerator, and comprising at least: a heating unit having at least one end electrically connected to the incinerator; and a flushing purge gas fan The air is heated by the heating unit and pumped to the incinerator; and φ a temperature control unit, the heating unit can be controlled at a preset temperature. In the refrigerating incinerator line hot-drying apparatus of the present invention, the incinerator is not particularly limited, and preferably a regenerative incinerator or a rotary accumulator incinerator of three sets of heat exchange units. In addition, the heat exchange unit of the above various forms of incinerator further comprises a flushing purge gas inlet capable of introducing air, and the purpose of the flushing gas is to solve the inefficiency of untreated gas cross-contamination discharge and leakage during preheating/heat storage switching. Stinking problem. The rotary type thermal storage incinerator comprises at least one heater, at least two heat exchange units, and a rotary valve. The rotary valve includes a stator and a rotor, and the stator is provided with an air inlet and an exhaust port. Flush the purge gas inlet. The heat exchange unit is composed of multiple groups and is arranged above the rotary valve, and the arrangement thereof must match the design of the rotor. The second figure is a schematic plan view of the rotor airflow distribution of the rotary regenerative incinerator through the rotary valve. For example, as shown in the second figure, when the upper end of the rotor is divided into 10 conduction areas, 10 heat exchange compartments can be designed. Radial, each heat exchange unit communicates with the conduction region of the rotary valve rotor via a pipeline, and by the rotation of the internal rotor of the rotary valve, the air inlet and exhaust of each heat exchange unit or the introduction of the purge purification gas can be changed by 8 1326753. In the hot-drying device of the rotary heat storage incinerator line of the present invention, if the regenerative incinerator is provided with the above-mentioned flushing purge gas inlet, the flushing purge gas blower can pump air to the heating unit for heating, the heating unit is The temperature control unit is controlled at a predetermined temperature, and the passed and heated air flow can be introduced into the heat exchange unit of the incinerator by the flushing purge gas inlet for hot baking. In addition, the pumping air function of the flushing purge gas fan can be replaced by other devices and methods that can cause a pressure differential to create a flushing purge gas flow. In the hot-drying device of the rotary heat storage incinerator line of the present invention, the setting position of the hot-drying device is not particularly limited as long as the heat source can be guided by the incinerator to heat the gas stream pumped by the purge gas blower, and can be combined with incineration. The design of the furnace is changed, for example, it can be placed in the incinerator in a bypass mode or a top mode. The bypass mode is such that one end of the heating unit is connected to the incinerator, and the other end is connected to the inlet of the incinerator, and a hot gas bypass fan can be further added to the inlet and outlet of the heating unit and the incinerator. In order to facilitate the pumping of the heat source of the incinerator. In the priming mode, the heating unit is disposed above the regenerative incinerator, and the two ends of the heating unit are respectively connected to the upper ends of the regenerative incinerator respectively, because of the temperature difference between the two ends of the incinerator and the change of the flow of the airflow. The heat source can be passed from one end of the heating unit to the other end through the heating unit, and is directly disposed above the incinerator, thereby saving heat source and achieving better heating efficiency. The invention also provides a thermal drying method for a regenerative incinerator line, which is used for removing or preventing high-boiling organic matter, oil mist and coke substance from adhering to the bottom of the heat exchange unit containing the heat storage material, so that the heat exchange unit can normally maintain the same 9 1326753 The heat storage regeneration function and the protection against the high temperature smoldering of the regenerator bed, the hot baking method comprises the following steps: (1) providing a thermal drying device comprising at least: a heating unit, at least one end of which is electrically connected to the incinerator a flushing gas fan that can be heated by the heating unit and pumped to the incinerator; and a temperature control unit that can control the heating unit to a predetermined temperature; (2) start or maintain the operation of the incinerator, The heat source in the incinerator can be guided to the heating unit via a pipeline; (3) the flushing purge gas fan is turned on, the air is passed through the heating unit and heated, and the heated gas stream is introduced into the heat exchange unit of the regenerative incinerator. (4) All heat exchange units can be replaced by changing the heating/heat storage/rinsing purification mode of the heat exchange unit of the regenerative incinerator Life or to maintain its heat storage function. In the thermal drying method of the regenerative incinerator line of the present invention, the incinerator is not particularly limited, and preferably a regenerative incinerator or a rotary regenerative incinerator of three sets of heat exchange units. In addition, the heat exchange unit of the above various forms of incinerator further comprises a flushing purge gas inlet capable of introducing air, and the flushing purge gas is intended to solve the inefficiency of untreated gas cross-contamination discharge and leakage during preheat/heat storage switching. And the stench problem. The above-mentioned rotary type thermal storage incinerator comprises at least one heater, at least two heat exchange units, and a rotary valve. The rotary valve comprises a stator and a rotor, and an inlet, an exhaust port and a flushing gas inlet are arranged on the 1326753. . The third picture is a schematic diagram of the rotary valve rotor and airflow of the rotary regenerative incinerator. As shown in the second and third figures, the exhaust gas containing VOCs can be introduced into the heat exchange unit via the rotor inlet (such as the intake path A) through the air inlet of the stator; the airflow after incineration and heat storage can be performed by the rotor (such as the exhaust path) B) discharging is discharged through the exhaust port of the stator; and the flushing purge gas can be introduced through the inlet of the stator and introduced into the heat exchange unit via the rotor (such as the flushing purification path C). _ The heat exchange unit consists of multiple sets and is placed above the rotary valve. The arrangement must be in accordance with the design of the rotor. For example, as shown in the third figure, when the upper end of the rotor is divided into 10 conduction areas, 10 heats are applied. The exchange unit can be designed to be in a radial shape, and each heat exchange unit communicates with the conduction region of the rotary valve rotor via a pipeline. The rotation of the internal rotor of the rotary valve can change the intake, exhaust or introduction of the flushing gas of each heat exchange unit. In the thermal drying method of the regenerative incinerator line of the present invention, if the regenerative incinerator is provided with the above-mentioned flushing purge gas inlet, in step (3), the flushing purge gas blower can introduce air to the heating. The unit is heated, the heating unit is controlled by the temperature control unit at a preset temperature, and the heated air stream can be introduced into the incinerator by the flushing gas inlet for hot baking. In addition, the pumping air function of the flushing purge gas blower can be replaced by other means and methods that create a pressure differential to create a flush purge gas flow. In the hot-drying method of the regenerative incinerator line of the present invention, the setting position of the hot-drying device is not particularly limited as long as the heat source can be guided by the incinerator to heat the gas stream pumped by the purge gas blower, and the incinerator can be matched. The design and the like are changed, for example, in a hot gas bypass mode or a top connection mode, etc. 11 1326753 is set on the incinerator. The hot gas bypass mode is such that one end of the heating unit is connected to the incinerator, and the other end is connectable to the inlet of the incinerator, and a further hot gas bypass fan may be further added to the heating unit and the incinerator. Between the air inlets to facilitate pumping the heat source of the incinerator. In the top mode, the heating unit is disposed above the regenerative incinerator, and the two ends of the heating unit are respectively connected to the upper ends of the regenerative incinerator, and the natural convection effect caused by the temperature difference between the two ends of the incinerator The change of the flow of the airflow can pass the heat source from one end of the heating unit to the other end through the heating unit, and is directly disposed above the incinerator, thereby saving the heat source to achieve better heating efficiency. The invention is further illustrated by the following examples, which are not intended to limit the scope of the invention, and the skilled artisan can make a reasonable change without departing from the scope and spirit of the invention. Embodiment 1 The fourth embodiment is a schematic view of a preferred embodiment of a regenerative incinerator on-line hot-drying apparatus in combination with a rotary regenerative incinerator. As shown in the figure, the incinerator comprises a heater 10, a plurality of sets of heat exchange units 20, and a rotary valve 30. The rotary valve 30 includes a stator 31 and a rotor 32. The stator is provided with an air inlet 311. An exhaust port 312 and a purge purge gas inlet 313. The hot-drying device comprises a heating unit 60, one end of which is connected to the upper side of the incinerator, and the other end of which can be connected to the air inlet 311; - the flushing and purifying gas fan 51, 12 1326753 can heat the air through the heating unit 60 and pump it Up to the purge gas inlet 313; a hot gas bypass fan 52 disposed between the heating unit 60 and the air inlet 311 to facilitate pumping the heat source of the incinerator; the fan 53; and a temperature control unit 70 to control the heating unit 60 at a preset temperature. The heating unit is in a bypass mode, that is, one end is connected to the upper side of the incinerator, and the other end is connected to the air inlet 311. When carrying out the hot-drying method of the regenerative incinerator line of the present invention, firstly, the operation of the incinerator is started or maintained, and the heat source in the incinerator can be guided by the hot gas bypass fan 52 through the pipeline through the heating unit 60. To the air inlet 311. The flushing purge gas blower 51 is turned on to allow the air to be heated by the heating unit 60, and the heated gas stream is introduced into the flushing purge gas inlet 313 of the regenerative incinerator, and introduced into the heat exchange unit 20 via the rotor 32 of the rotary valve for hot baking. In other words, the rinsing step of the above-described regenerative incinerator is carried out with a heated gas stream. At this time, the high-boiling organic matter, oil mist, and coke-like substance on the heat storage material of the heat exchange unit 20 can be thermally decomposed and decomposed by the heated gas stream, and discharged through the exhaust port 312 with the gas flow. The upper end of the rotor is divided into a plurality of radial conduction regions, and each heat exchange unit is also matched with the rotor design, and communicates with the conduction region of the rotary valve rotor via the pipeline, and the driving member 40 drives the rotor 32 to rotate, and the rotary rotor 32 can be changed. The intake, exhaust or introduction of the purge unit of the heat exchange unit. That is, after continuously rotating the rotor 32 for a predetermined period of time, each of the heat exchange units can be thermally baked to regenerate or maintain its heat storage function. Embodiment 2 13 1326753 The fifth figure is a schematic view of a preferred embodiment of a regenerative incinerator on-line hot-drying device in combination with a rotary regenerative incinerator. The regenerative incinerator and the rotary valve are as described in the first embodiment. As shown in the figure, the hot-drying device comprises a heating unit 60, the two ends of which are connected above the incinerator; a flushing gas fan 51, which can heat the air through the heating unit 60 and pump it to the flushing gas inlet. 313; and a temperature control unit 70, the heating unit 60 can be controlled at a preset temperature. The heating unit 60 is in a topping mode, that is, the heating unit 60 is disposed above the regenerative incinerator, and the two ends of the φ heating unit 60 are respectively connected to the upper ends of the regenerative incinerator. When carrying out the hot-drying method of the regenerative incinerator line of the present invention, the operation of the incinerator is first started or maintained, and the heat source can be passed from one end of the heating unit 60 to the heating unit 60 due to the temperature difference between the two ends of the incinerator and the change of the flow of the gas stream. From the other end to the incinerator, the heat source can be saved to achieve better heating efficiency. Thereafter, the flushing purge gas fan 51 is turned on, the air can be heated by the heating unit 60, and the heated gas stream is introduced into the flushing gas inlet 313 of the regenerative incinerator, and introduced into the heat exchange unit/element 20 via the rotor 32 of the rotary valve. Hot supply. In other words, the rinsing and purifying step of the above-described regenerative incinerator is carried out by a heated gas stream. At this time, the high-boiling organic matter, the oil mist, and the coke-like substance on the heat storage material of the heat exchange unit 20 can be thermally decomposed by the heated gas stream, and discharged from the exhaust port 312 with the gas flow. The upper end of the rotor is divided into a plurality of radial conduction regions, and each heat exchange unit is also matched with the rotor design, and communicates with the conduction region of the rotary valve rotor via the pipeline, and the driving member 40 drives the rotor 32 to rotate, which can be changed by the rotary rotor 32. The intake, exhaust or introduction of the purge gas of each heat exchange unit. 14 1326753 That is, after continuously rotating the rotor 32 for a predetermined period of time, the heat exchange units can be thermally baked to regenerate or maintain their heat storage function. Embodiment 3 FIG. 6 is a schematic view showing a preferred embodiment of a refrigerating incinerator on-line hot-drying apparatus in combination with a three-tank type regenerative incinerator according to the present invention. As shown, the incinerator comprises three sets of heat exchange units 21, 22, 23, and each set of heat exchange φ units includes a purge gas inlet end, in addition to the inlet and outlet ends, and each A control valve is provided at each inlet end. The hot-drying device comprises a heating unit 60, the two ends of which are connected above the incinerator; a flushing purge gas fan 51, which can heat the air through the heating unit 60 and pump it to the flushing purge gas inlet 313; The temperature unit 70 can control the heating unit 60 at a preset temperature. The heating unit 60 is in a topping mode, that is, the heating unit 60 is disposed above the regenerative incinerator, and the two ends of the heating unit 60 are respectively connected to the upper ends of the regenerative incinerator. • When carrying out the hot-drying method of the regenerative incinerator line of the present invention, firstly, the operation of the incinerator is started or maintained, and the heat source can be passed from one end of the heating unit 60 to the heating unit 60 due to a temperature difference between the two ends of the incinerator and a change in the flow of the gas stream. From the other end, it flows into the incinerator, thus saving heat source and achieving better heating efficiency. Thereafter, the flushing purge gas fan 51 is turned on, the air can be heated by the heating unit 60, the heated gas stream is introduced into the flushing gas inlet 313 of the regenerative incinerator, the valves 211, 222, and 233 are opened, and the valves 212, 213 are closed. 221, 223, 231 and 232, at this time, the heat exchange unit 21 introduces the exhaust gas preheating, and the heat exchange unit 23 passes the flushing purge gas heated by the heating unit 60 15 1326753, and the bed is untreated in the previous cycle. The exhaust gas is flushed into the exhaust gas stream, and the heat exchange unit 23 is thermally baked. The high-boiling organic matter, the oil mist and the coke-like substance on the heat storage material can be thermally decomposed and decomposed by the heated gas stream, and the gas after combustion It flows into the heat exchange unit 22, and is stored in the exhaust port 312 after the heat is stored. Next, the valves 213, 221, and 232 are opened, and the valves 211, 212, 222, 223, 231, and 233 are closed. At this time, the heat exchange unit 22 introduces the exhaust gas to be preheated, and the heat exchange unit 21 is heated by the heating unit 60. Flushing and purifying φ gas, and flushing the untreated exhaust gas of the bed in the previous cycle into the exhaust gas stream, and subjecting the heat exchange unit 23 to heat drying, high-boiling organic matter, oil mist and coke substance on the heat storage material, The heated gas stream is thermally decomposed and decomposed with the gas stream after combustion into the heat exchange unit 23, and is stored by the exhaust port 312 after the heat is stored. Thereafter, the valves 212, 223, and 231 are opened, and the valves 211, 213, 221, 222, 232, and 233 are closed. At this time, the heat exchange unit 23 introduces exhaust gas preheating, and the heat exchange unit 22 is heated by the heating unit 60. Flushing and purifying Φ gas, and flushing the untreated exhaust gas of the bed in the previous cycle into the exhaust gas stream, and heat-treating the heat exchange unit 22 to high-boiling organic matter, oil mist and coke-like substances on the heat storage material. The heated gas stream is thermally decomposed and decomposed into the heat exchange unit 21 with the gas stream after combustion, and is discharged from the exhaust port 312 after the heat is stored. In this manner, each of the heat exchange units 21, 22, and 23 can be sequentially subjected to intake preheating/rinsing purification and hot drying/exhaust heat storage by opening/closing the valves provided in the respective heat exchange units 21, 22, and 23. In the step, the heat exchange sheets 16 1326753, 21, 22 and 23 can be thermally baked to regenerate or maintain their heat storage function. INDUSTRIAL APPLICABILITY The regenerative incinerator line hot-drying device of the present invention and the method of using the same can be used to remove or prevent high-boiling organic substances, oil mist and coke-like substances from adhering to the bottom of a heat exchange unit containing a heat storage material, so as to exchange heat. The unit can normally maintain its heat storage regeneration function and prevent the high temperature smoldering of the regenerator bed. It is a good equipment and method for processing φ regenerative heat storage materials, and has the advantages of saving fuel costs and reducing the emission of carbon dioxide and other exhaust gases. Effectively reduce the risk of operation and the risk of smoldering. It is an excellent technology that meets the requirements of environmental protection, safety and energy. It is worthy of being applied to high-tech wafers and optoelectronic manufacturing, petrochemical and chemical industries, and coatings that produce large amounts of low-concentration organic waste gas. Printing industry and tape manufacturing industry. [Simple description of the diagram] • The first figure is a schematic diagram of a conventional rotary type thermal storage incinerator. The second picture is a top view of the airflow distribution of the rotary regenerative incinerator through the rotary valve rotor. The third picture is a schematic diagram of the rotary valve rotor and airflow of a rotary accumulator incinerator. The fourth figure is a schematic view of a preferred embodiment of the regenerative incinerator on-line hot-drying device with a rotary regenerative incinerator. Fig. 5 is a schematic view showing a preferred embodiment of the regenerative incinerator on-line hot-drying device in combination with the rotary regenerative incinerator. 17 1326753 The sixth figure is a schematic view of a preferred embodiment of the regenerative incinerator on-line hot-drying device with a three-slot regenerative incinerator. [Main component symbol description] 10 Heater 20, 21, 22, 23 Heat exchange unit 211, 212, 213, 221, 222, 223, 231, 232, 233 Valve 30 rotary valve φ 31 stator 32 rotor 311 air inlet 312 Exhaust port 313 Flush purge gas inlet 40 Drive element 51 Flush purge gas fan 52 Hot gas bypass fan · 53 Fan 60 Heating unit 70 Temperature control unit A Intake path B Exhaust path C Flush purification path 18