1325595 九、發明說明: 【發明所屬之技術領域】 ^發於半導體裝置,尤其關zq校準結果、用以調 =出魏錄㈣DLL(賴較魏)魏,以關於且有此 種dll電路之半導體裝置。 /、 【申請案之優先權】 於此主張前案謂5-308072之優先權,其揭露係併入 【先前技術】 近來之電子系統已在運轉上加速,其中已名 =之半導體裝置間的資料傳送速率。再者已 求焉速之資料傳送速率。因此,在半導體裝置内部採用 時脈信!虎(之後亦僅稱為”時脈”)同步U寺脈同步系統。例如, 有以同步動態隨機存取記憶體(之後簡稱為” sdram t己憶體裝置。再者,與時脈之前緣與後_步之ddr(雙倍 經發、及職3撕^的“均已 電路為ϋ卜ΐ時脈同步,這些先進SDRAMs之每-者採用dll if η 將内部時脈與外部時脈之間的時序同步化。圖1A為 夕卜之^兔圖。由於用於DLL電路中之叫緩衝器在其 值S戶斤以使叫缓衝器輸出之振幅抑制成小數 所以方面’由於DQ 物不具有終止元件, Q複製輸出(RCLK)將呈現出完整振幅,如圖π所示。 這些輸出之傾角與延遲量(tP_溫度、賴、及製程上 而Γί變:且這些輸出之延遲時間Ati與〜2因其間之振幅差異 l it不同。使DLL電路之延遲線運轉以便使DQ複製輸出盜 。叫脈CK得以同步。因此,如圖2所示,觀察加與之間 (S ) 595 的差異為DQ緩衝器之輸出與外部時脈之間的偏斜。 在驾知SDRAM巾’並未有測量由溫度、電壓、及曰 :之壓(Vth)所引起之延遲量之變化且將其反饋的功能。: 1 吸收那些變化之控制。亦即,-直存在著-個問 ^糸統之延遲里變化及DQ複製系統之延 斜(Skws),且因此使DLL電路無法達成高速運轉,動置接成為偏 a安^於此⑯等DLL電路,有一先前技術文獻1(日本未審杳專利申 ^旱電路,有先刖技術文獻2(日本未審杳 004-032070 3( 9 2004-145709號)。再者,關於兮己㈣_ 甲:月’ A) 本未審查專辨請案先敎獻技術4(曰 先前技術文獻1揭露一種DLL系統,並 ===之相位差’以藉此消=之^ 信號外部之控制 獲=反射波而加』== 保持時間決疋母錢體晶片之建立時間(,㈣與 電晶S電路中,並未有測量溫度、電壓、及M0S =日日體之Vth之變化且將其反饋的功能。因 :上及MOS電晶體之Vth等變化所引 1延二斑 複製糸統之域量上的魏魏偏狀_ 出知鮮電軸記髓純巾,亦未針對這些 偏斜徒出改善方案且因此仍留下此問題。1325595 IX. Description of the invention: [Technical field to which the invention belongs] ^ Issued in a semiconductor device, especially the calibration result of zq, used to adjust = Wei Lu (four) DLL (Lai Wei Wei) Wei, a semiconductor with such a dll circuit Device. /, [Priority of the application] The priority of the prior claim is 5-308072, the disclosure of which is incorporated into the prior art. Recently, electronic systems have been accelerated in operation, among which semiconductor devices have been named Data transfer rate. Furthermore, the data transfer rate of idle speed has been sought. Therefore, the U-channel pulse synchronization system is synchronized inside the semiconductor device using the clock signal tiger (hereinafter also referred to as "clock"). For example, there is a synchronous dynamic random access memory (hereinafter referred to as "sdram t" memory device. Furthermore, with the front edge of the clock and the ddr of the back_step (double the hair, and the 3 tears ^) The circuit has been synchronized with the clock. Each of these advanced SDRAMs uses dll if η to synchronize the timing between the internal clock and the external clock. Figure 1A is a rabbit figure. The buffer in the DLL circuit is in its value S to suppress the amplitude of the output of the buffer to a decimal. Therefore, since the DQ does not have a termination element, the Q replica output (RCLK) will exhibit a full amplitude, as shown in the figure. π shows the inclination of these outputs and the amount of delay (tP_temperature, Lai, and process): and the delay time Ati and ~2 of these outputs are different due to the amplitude difference l it. The delay line of the DLL circuit The operation is to make the DQ copy and steal. The called pulse CK is synchronized. Therefore, as shown in Fig. 2, the difference between the observation (S) 595 is observed as the skew between the output of the DQ buffer and the external clock. Driving the SDRAM towel 'not measured by temperature, voltage, and 曰: pressure (Vth) The function of delaying the amount of delay and feeding it back.: 1 absorbing the control of those changes. That is, - there is a delay in the delay and the delay of the DQ replication system (Skws), and thus The DLL circuit can not achieve high-speed operation, and the splicing becomes a DLL circuit of the 16th, etc., and there is a prior art document 1 (Japanese unexamined patent application ^ drought circuit, there is a prior art document 2 (Japanese unexamined 004 -032070 3 (9 2004-145709). In addition, about 兮 ( (4) _ A: Month 'A) This unexamined special case first filed the technology 4 (曰 Previous Technical Document 1 revealed a DLL system, and == = The phase difference ' is controlled by the external control of the signal = the reflected wave is added 』 == The hold time depends on the settling time of the mother money chip (, (4) and the electric crystal S circuit, there is no measurement Temperature, voltage, and M0S = the change of the Vth of the Japanese body and the feedback function. Because: the Vth and other changes of the MOS transistor lead to the Wei Wei eccentricity on the domain of the plaque _ I know the fresh electric axis, and I have not improved the solution for these deviations and therefore still leave this problem.
t上所述’在DLL電路中,並未有測量溫度、電遷、及M ί sf 變化且將其反_魏。耻,存有由溫度、電 :二Q ΓίΓΛ體之Vth等變化所引起的DQ緩衝器系統之延遲 ;達成高Si統之延遲量上的變化變成偏斜的問題,且因此無 【發明内容】In the DLL circuit, there is no measurement temperature, electromigration, and M sf change and it is reversed. Shame, there is a delay of the DQ buffer system caused by changes in temperature, electricity, Vth, etc.; the change in the delay amount of the high Si system becomes a problem of skew, and therefore there is no [invention]
因此本發明之-目的為提供藉由將與 電路而降低偏斜的DLL電路。 V㈣、、σ狄饋、、,σ DLL 目的為提供包含此—DLL電路之半導體裝置。 本發明之其他目的將隨說明之進行而變得清楚。 zo M具有測量連接於專用焊塾之外部電阻元件的 卜部電阻70件縣受到由溫度、雜及製程所引 程等i化°因此’與校準之結果為反應溫度、電壓、及製 = 作為料:得以調整DLL電路之複製系統= 广 里〇猎由將ZQ^準結果回饋給dll電路而降低輸出時 =偏斜。此架構’便能提供具有減少 DLL電呈 有此一 DLL電路之半導體裝置。 电崎,、八 不、、上2前Ϊ目的,基本上,本發明係採用如下所述之技術。 不j多說即知:衫麟本伽之馳顧下,可財種汀加 以變化之應用技術亦包含於此申請案中。 使4 T據ί發明之實施態樣’設有—DLL(延遲鎖^迴路)電路, 有輸出緩衝器之輸出緩衝路徑與—含有複製輸出電路 =裝路徑’其中該DLL電路更包含一延遲量可變電路,係藉由 ==調整輸出緩衝ϋ之輸出阻抗之控制信號而調整複製路徑 1325595 吾人可使賴量可變電路接受_ DLL献信號的控制信 說0 -放吾人延遲量可變電路包含m〇s電晶體以作為可變電容 f體連接於複製路徑之信號線,且Ls 基 極係連接於控制信號、或控制信號的 電晶體時,可將其加以配置使得 雷二!汲極連接於控制信號,且當可變 連接於控制信號的反向信號。 心土极源極及及極 ,一轉換因子’將該控制信號轉換成第二控制传 號,^利用該第二控制信號調整該延遲量可變電路之延遲^ 。人可利用查找表,將該控制信號轉換成第 利用該第三控繼號調魏輯量可變電路之延遲I。°虎’且 的控:Γ吏控制信號成為用以控制輸出緩衝器之驅動側電晶體 的控吏控制信號成為用以控制輸出緩衝器之負載側電晶體 的晶體 根據本發明之另-實施態樣,提供一動制信號。 路,包含:以時脈信號輸入之延遲線;以來自疋^路)電 时之時脈信號加以輸入之輸出緩衝器;以 夺脈驅動 號加以輸人之複製雜驅動器;以來自 ^遲線之時脈信 信號加以輸入之延€量可變電路;以1自2,驅,器德 脈信號加以輸人之輸出複製緩衝器;及以“ 電路之時 之時脈信號及輸入至該延遲線之時脈信號加^輸出複製緩衝器 珞,藉此偵測輸入時脈信號之間的相位差,之相位偵測電 >、r該延遲線之延遲 8 1325595 ,,,來自該相位細彳電路之判斷結果加以調整,膽延遲量可 係藉由用以調整輸出緩衝器之輸出阻抗的控制信 具有校準功能之半導體 刖述DLL電路,每一者係基於由連接於一 ZQ校準 未”广DLL電路之複製系 藉由將ZQ校準妹果5二=錢化的貧料。因此能 亦即,可路而降低輸出時序之偏斜。 序之=降低由溫度,、及製程等變化所造成的DQ輸出時 【實施方式】 ϊί外明,-實施例說明DLL電路。 輸入站而傳播至^綠由―DLL電路專用起始 係經由- 過延f線1之適當延遲之時脈, 體資料輸itl的DQ緩衝k ^ =緩衝3與4送至進行記憶 = =出時脈咖至 器6、-緩衝ί7’已一通延過遲延旦遲線^之時脈亦經由一複製時脈驅動 進如同DQ緩衝器5,里可Ί路8、及一緩衝器9而送至促 6至DQ複製10°之路^ =Q H10 °吾人將自複製驅動器 以監測DQ複製10之輸㈣i緩==:= 9 1325595 進行相位比較,然後反饋該比較之判斷結杲給 步咖罐1猶戦㈣5次= ,差異(抓△〖_可能小,且應更進=== ^電壓、及製程中的變化而狀不變。然而, 5,之終止元件並未就減少電流之目的複^ =以設置,所以輸出資料之振幅係彼此不同。再者, 的3長輸 自動/Λ至rDQ緩衝器5之DQ緩衝器系統路徑 置於 ϋ^ΝΤ作為修正此一變化的參數。藉由將ZQ校準^ 可㈣-聯脑-使右、ί衝器 ZQ校準電路12係藉由監測連接於校料 5之輸出阻抗。由於zq校準電路= ^曰體遺電日曰體係千仃地連接於印校準端;一計數器;及一比較 作。根據計衫之獅- 10 1325595 個電晶體’ g而調整複製輸出電路之阻抗。當複製輸出電路之阻 抗與外部電阻元件尺之阻抗彼此變成相等時,亦即,當ZQ校準 端之電位與參考電位彼此變成相料,雜器將停止運轉以決定 ZQ校準結果DRZQNT作為計數器輸出。 )藉由輸入來自該計數器所輸出之ZQ校準結果DRZQNT,可 5周整輸出,路之阻抗讀使其等於外部電阻元件之電阻值。藉由 ,此ZQ校準外部電阻元件之電阻值設成等於系統之傳輸線之阻 几專輸線之阻抗與輸出電路之阻抗彼此相匹配。 假定該輸出電路係由四個電晶體所 TQNT 4具有四位元架構且以ZQ校準結果腿j以 丄ΐ將這四個電日日體之丨見行驅動能力配成8:4:2:1之比例,以便 個別位元。在此例中,藉由根據該二元系統而設 ^QkUDRZQNT,可將其作為直接控制電晶體之控制信 ZQ权準電路並未特別限於前述結構,只要使其可盘 DRZQNT<3:〇>來控制阻抗。 Y /、叫权準結果 趙晶片由=2;電:所以並不會受到半導 i Q父準果為反應半導體裝置之溫度、電壓、Ϊ # fk化的貪枓’且因此為用來補償這些變化 電_^私 杲之戰準結果DRZQN^f^ 件下,代表校準結 及MOS雷β㈣夕你'"u ^ 取传尚數值,而在高溫、高電壓、 及MOS電曰曰體之低Vth的條件下,則ZQ校準結果聰^=〉 1325595 取得低數值。亦即’當輸出電路之電晶體之驅動能力小時,則選 擇性地開啟更多電晶體以匹配阻抗。反之,當輸出電路之電晶體 之驅動能力大時’則選擇性地開啟較少電晶體以匹配阻抗。 亦參考圖3B,將說明延遲量可變電路8。It is therefore an object of the present invention to provide a DLL circuit that reduces skew by virtue of circuitry. V(4), σ, and σ DLL are intended to provide a semiconductor device including the DLL circuit. Other objects of the invention will become apparent as the description proceeds. Zo M has 70 parts of the resistance of the external resistance element connected to the special soldering iron. The county is subject to temperature, miscellaneous and process. Therefore, the result of the calibration is the reaction temperature, voltage, and system. : The copying system of the DLL circuit can be adjusted = 广 〇 由 由 由 由 由 将 将 将 Z Z Z Z Z Z Z Z Z Z Z Z Z 。 。 。 This architecture can provide a semiconductor device having a reduced DLL circuit with such a DLL circuit. In the case of Dianqi, 八不, and 2, basically, the present invention employs the technique described below. If you don't know more about it, you can see that the application technology of the variant is also included in this application. According to the embodiment of the invention, the DLL is provided with a DLL (Delayed Circuit) circuit having an output buffer path of the output buffer and a copy output circuit = a path including a delay amount. The variable circuit adjusts the copy path by the control signal of the output impedance of the output buffer = ================================================================================== The variable circuit includes a m〇s transistor as a variable capacitance f body connected to the signal line of the replica path, and the Ls base is connected to the control signal or the transistor of the control signal, and can be configured such that the second The drain is connected to the control signal and is variably connected to the reverse signal of the control signal. The core source and the pole, a conversion factor' converts the control signal into a second control signal, and the second control signal is used to adjust the delay of the delay variable circuit. The person can use the lookup table to convert the control signal into the delay I of the third variable control circuit. Control of the 虎 ' Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏 Γ吏In this way, a signal is provided. The circuit includes: a delay line input with a clock signal; an output buffer input with a clock signal from the 疋^路); a copy-of-purchase driver input with a pulse-driven drive number; The clock signal is input to the variable variable circuit; the output buffer is input by the input signal from the 2, drive, and the pulse signal; and the clock signal of the circuit is input to the circuit The clock signal of the delay line is added to the output buffer 珞, thereby detecting the phase difference between the input clock signals, the phase detection power >, the delay of the delay line 8 1325595, from, the phase The judgment result of the fine circuit is adjusted, and the bile delay amount can be a semiconductor description DLL circuit having a calibration function by using a control signal for adjusting the output impedance of the output buffer, each of which is based on being connected to a ZQ calibration. "The replication of the wide DLL circuit is based on the ZQ calibration of the sister fruit 5 = money. Therefore, it is possible to reduce the skew of the output timing. Preface = Reducing the DQ output caused by changes in temperature, and process, etc. [Embodiment] ϊί外明, - The embodiment illustrates a DLL circuit. Input station and propagate to ^ green by the "DLL circuit dedicated start line via - delay the appropriate delay of the f line 1 clock, body data input itl DQ buffer k ^ = buffer 3 and 4 sent to memory = = out The clock processor 6 and the buffer ί7' have been delayed by the delay delay. The clock is also driven through a replica clock into the DQ buffer 5, the Ί路8, and a buffer 9 To promote 6 to DQ to copy 10° ^^Q H10 ° We will self-replicate the drive to monitor DQ copy 10 (4) i slow ==:= 9 1325595 for phase comparison, then feedback the comparison judgment to the step Tank 1 is still (four) 5 times =, the difference (grab △ _ _ may be small, and should be further === ^ voltage, and the change in the process does not change. However, 5, the termination component does not reduce the current The purpose is set to ^, so the amplitudes of the output data are different from each other. Furthermore, the DQ buffer system path of the 3 long-distance automatic/Λ to rDQ buffer 5 is placed as a parameter for correcting this change. By zQ calibration ^ (4) - brain - to make the right, Z Z calibration circuit 12 by monitoring the output impedance connected to the school 5. Since zq Calibration circuit = ^ The body of the system is connected to the calibration end; a counter; and a comparison. Adjust the impedance of the replica output circuit according to the lion - 10 1325595 transistor ' g. When the impedance of the replica output circuit and the impedance of the external resistor component become equal to each other, that is, when the potential of the ZQ calibration terminal and the reference potential become phase with each other, the miscellaneous device will stop operating to determine the ZQ calibration result DRZQNT as the counter output. By inputting the ZQ calibration result DRZQNT outputted from the counter, the output can be completed for 5 weeks, and the impedance of the path is read to be equal to the resistance value of the external resistance element. By means, the resistance value of the external resistor element of the ZQ calibration is set equal to the impedance of the transmission line of the system, and the impedance of the dedicated transmission line and the impedance of the output circuit match each other. It is assumed that the output circuit is composed of four transistors TQNT 4 has a four-bit architecture and the ZQ calibration result leg j is used to combine the driving ability of the four electric Japanese bodies into 8:4:2: The ratio of 1 to individual bits. In this example, by setting ^QkUDRZQNT according to the binary system, it can be used as a control signal for directly controlling the transistor. The ZQ registration circuit is not particularly limited to the foregoing structure, as long as it can make the disk DRZQNT<3:〇> To control the impedance. Y /, called the right result Zhao chip by = 2; electricity: so it is not subject to the semi-conducting i Q father criterion for the temperature, voltage, Ϊ # fk of the semiconductor device greedy 'and therefore used to compensate These changes are based on the results of the DRZQN^f^ component, which represents the calibration junction and the MOS thunder β (four) eve you '"u ^ take the pass value, while in the high temperature, high voltage, and MOS electric body Under the condition of low Vth, the ZQ calibration result is a low value of ^=> 1325595. That is, when the driving ability of the transistor of the output circuit is small, more transistors are selectively turned on to match the impedance. Conversely, when the driving ability of the transistor of the output circuit is large, then less transistors are selectively turned on to match the impedance. Referring also to Fig. 3B, the delay amount variable circuit 8 will be explained.
延遲量可變電路8包含:一 D-FF族群13,其包含四個d-FF 且以ZQ校準結果DRZQNT<3:0>加以輸入;一反向器族群14,其 包含四個用以分別反轉ZQ校準結果DRZQNT<3:0>之對應成分^ ZQ校準結果DRZQNT的反向器;及電容式延遲元件族群15與 16,係連接於一信號線且每一者包含四個電容式延遲元件。每一 電容式延遲元件之形式為具有連接於該信號線之閘極電極的電晶 體。設於圖3Β之上側上之電容式延遲元件族群15的電容式延1 元件為Ρ-通道MOS電容式元件,而設於下侧上之電容式延遲元件 族群16的電容式延遲元件則為η_通道m〇s電容式元件。在此, 將電晶體之電容值對應於二元系統從右邊算起設定成8:4:2:1的比 例。藉由設定對應於二元系統之電容值,吾人可依據二元系統 ZQ校準結果DRZQNT<3:0;^^^控制。 ZQ校準結果DRZQNT<3:〇W連接於p-通道M〇s電容式元 件之基板、源極、及汲極’而ZQ校準結果drzqnt<3.〇>之反向 ZQ校準結果DRZQNB<3:0>則連接於n-通道M〇s電容式元件^ 基板、源極、及汲極。將ZQ校準結果DRZQNT<3:0>與反向ZQ 校準結果DRZQNB<3:0>輸入,以藉此控制施加於電容式延 之電位。 例如,當ZQ校準結果DRZQNT為<〇100>時,設在圖3B之 上侧自右算起之第二個的電容式延遲元件係連接於供應電位,而 設在下側自右算起之第二個的電容式延遲元件則連接於接 位,因而改變其電容值。在上側上之剩餘電容式延遲元件 於接地電位,而在下側上之剩餘電容式延遲元件則連供 位。因為電晶體呈反向’所以依據具有高位準之成分2: DRZQNT所輸入之電容式延遲元件將降低其電容值。反之,=具 12 1325595 有低位準之成分ZQ校準結果DRZQNT所輸入之電容式延遲元件 作為儲存區域’因此其電容值變大。以此方式,電容值係取決於 相對應之成分ZQ校準結果之高位準或低位準而改變。 當輸出電路之電晶體的驅動能力由於低溫、低電壓、及製程 變化而降低時’ ZQ校準結果DRZQNT便取得大數值。因此,電 谷式延遲元件之電容反而呈現小數值。然而,利用由於製程變化 而具有小驅動能力的電晶體進行驅動時,其延遲量將以等同於Dq 緩衝器系統路徑之延遲量增加。因此,在Dq緩衝器系統路徑與 DQ複製系統路徑之間的延遲量差異(△Τ1_ΔΤ2)維持不變。以^ 方式,藉由切換供應電位與接地電位之間之每一電晶體(電容式延 遲元件)之基板、源極、及沒極處的電位,將改變其電容值。夢 值,使信號間之延遲量差異受到控“ 难符在小且固疋不變的情況。 如上所述,利用ZQ校準結果DRZQNT<3:〇>作為延遲量 換信號,使得在溫度、電壓等變化範圍内之延遲量差異(λτι· Τ2)固定不變。 〜 該D-FFs分別接受與DLL鎖定信號同步之校 drzqnt<3:〇>之對應成分ZQ校準結果drzqnt。因此了 路中將發生在延遲量可變電路之延遲iii 示’k化。藉由合許在檢查虹鎖定時輸入最終项 、貫 生變化。在進行1^電^ 電路以便在DLL鎖定完成後應用ZQ校準結果。检鎖〇叫 =’在DLL電路中之DLL較調整的 之時序圖加以說明。 叶烁作將參考圖4 脈二 為了回應複製時脈驅動器6所輸出之時脈LCL^pT另;^面, 複製 1325595 10便在ΔΤ2後輸出資料。△τι與^Τ2因溫度、電壓、及製程之 變化而改變。已知ATI之最快延遲量為,而之最 慢延遲量為ATliAW)。同樣地,已知之最快延遲詈為/\ T2(MW),而ΛΤ2之最慢延遲量為△TSiAW)。The delay amount variable circuit 8 includes: a D-FF group 13 including four d-FFs and input with a ZQ calibration result DRZQNT<3:0>; an inverter group 14, which includes four Inverting the corresponding component of the ZQ calibration result DRZQNT<3:0>^ZQ calibration result DRZQNT, respectively; and the capacitive delay element groups 15 and 16, are connected to a signal line and each of the four capacitive types Delay element. Each of the capacitive delay elements is in the form of an electric crystal having a gate electrode connected to the signal line. The capacitive delay element of the capacitive delay element group 15 disposed on the upper side of FIG. 3 is a Ρ-channel MOS capacitive element, and the capacitive delay element of the capacitive delay element group 16 disposed on the lower side is η _ channel m〇s capacitive components. Here, the capacitance value of the transistor is set to a ratio of 8:4:2:1 from the right of the binary system. By setting the capacitance value corresponding to the binary system, we can control according to the binary system ZQ calibration result DRZQNT<3:0;^^^. ZQ calibration result DRZQNT<3: 〇W is connected to the substrate, source, and drain of the p-channel M〇s capacitive element' and the ZQ calibration result drzqnt<3.〇> reverse ZQ calibration result DRZQNB<3 :0> is connected to the n-channel M〇s capacitive component ^ substrate, source, and drain. The ZQ calibration result DRZQNT<3:0> and the reverse ZQ calibration result DRZQNB<3:0> are input to thereby control the potential applied to the capacitive extension. For example, when the ZQ calibration result DRZQNT is <〇100>, the second capacitive delay element from the right side on the upper side of Fig. 3B is connected to the supply potential, and the lower side is set from the right side. The second capacitive delay element is connected to the junction, thus changing its capacitance value. The residual capacitive delay element on the upper side is at ground potential and the remaining capacitive delay element on the lower side is connected. Since the transistor is in the reverse direction, the capacitive delay element input according to component 2: DRZQNT with a high level will lower its capacitance value. On the other hand, = 12 1325595 has a low level component ZQ calibration result. The capacitive delay element input by DRZQNT is used as the storage area' so that its capacitance value becomes large. In this way, the capacitance value changes depending on the high or low level of the corresponding component ZQ calibration result. When the driving capability of the transistor of the output circuit is lowered due to low temperature, low voltage, and process variation, the ZZ calibration result has a large value. Therefore, the capacitance of the valley type delay element exhibits a small value. However, when driving with a transistor having a small driving capability due to a process variation, the amount of delay will increase by the amount of delay equivalent to the path of the Dq buffer system. Therefore, the difference in delay amount (ΔΤ1_ΔΤ2) between the Dq buffer system path and the DQ copy system path remains unchanged. In the mode, the capacitance value is changed by switching the potential of the substrate, the source, and the gate of each transistor (capacitive delay element) between the supply potential and the ground potential. The dream value is such that the difference in the amount of delay between the signals is controlled. "It is difficult to match the small and solid state. As described above, the ZQ calibration result DRZQNT<3:〇> is used as the delay amount to change the signal so that the temperature is The difference in delay amount (λτι· Τ2) within the range of voltage variation is fixed. ~ The D-FFs respectively accept the ZZ calibration result drzqnt of the corresponding component of the drzqnt<3:〇> synchronized with the DLL lock signal. The delay occurred in the delay variable circuit is shown as 'k'. By inputting the final term and the continuous change when checking the rainbow lock, the circuit is performed in order to apply the ZQ after the DLL lock is completed. Calibration result. Check lock yell = 'The DLL in the DLL circuit is adjusted according to the timing chart. Ye Shuo will refer to Figure 4 pulse 2 in response to the clock pulse output from the output of the clock driver LCL^pT; ^面, copy 1325595 10 will output data after ΔΤ2. Δτι and ^Τ2 change due to temperature, voltage, and process changes. The fastest delay of ATI is known, and the slowest delay is ATliAW). Similarly, the fastest known delay is /\ T2 (MW) The slowest delay amount of ΛΤ2 as △ TSiAW).
一般而言,ΛΤ1之變化量(△TKAW)- ATICMW))盥ΛΤ2變 化量(AT2(AW)_ △T2(MW))彼此不同。因此,將由於溫度、電壓、 及製程中之變化而在DQ緩衝器5之資料輸出時序與DQ複製1〇 之資料輸出時序之間產生一偏差。由於DLL電路中之延遲線監測 DQ複製之輸出且使其與外部時脈同步化,所以添加產生之偏^作 為外部時脈與DQ輸出之間的偏斜。 因此 將延遲里可變電路8插置於時脈LCLKREPT之路秤 不管溫度、電壓、及製程中之變化如何,將使DQ緩衝 器輸出與DQ複製輸出之間的時序差異成為固定值。當相對於 而的延遲因溫度、電壓、及製程中之變化 輯量可㈣路8之延遲量控·減少,而當相 敗: 2LCLKREPT的延遲減少時,便將延遲量可變電 路8之延遲量控制為增加。 a里』支*€ 為高壓Μ 時取得高數4、以及在溫度 (rQ=載 vth之間的失衡者慮果::;= 1325595 在此例中,可利用反向控制信號作為n_mif 鎮定 ,準結果)而添加了改善輸出時序之果 在S知DLL電路中,將自dll輸出時脈ό ^ 脈(LCLKOET)送至DQ緩衝器,且調整延遲 所,出之時 使資料輸出時序與外部時脈同步。此延遲線)以便 =進行相位比較,比較:¾的給 路中ϊΐίπ路中’延遲量可變電路係插置於m。電 統路“ Q複製系:=收:緩衝器系 可改善時序調整準確度度== 如電此路,In general, the amount of change of ΛΤ1 (ΔTKAW) - ATICMW)) 盥ΛΤ2 change amount (AT2(AW)_ ΔT2(MW)) is different from each other. Therefore, a deviation occurs between the data output timing of the DQ buffer 5 and the data output timing of the DQ copy 1 due to changes in temperature, voltage, and process. Since the delay line in the DLL circuit monitors the output of the DQ replica and synchronizes it with the external clock, the added offset is used as the skew between the external clock and the DQ output. Therefore, inserting the delay variable circuit 8 into the clock of the clock LCLKREPT regardless of changes in temperature, voltage, and process will make the timing difference between the DQ buffer output and the DQ replica output a fixed value. When the relative delay is due to temperature, voltage, and variation in the process, the delay of the (4) way 8 can be controlled and reduced, and when the phase is defeated: the delay of 2LCLKREPT is reduced, the delay variable circuit 8 is The amount of delay is controlled to increase. In the case of a high pressure 取得, the high number is 4, and the temperature (rQ=the imbalance between the vths is considered to be::; = 1325595. In this case, the reverse control signal can be used as the n_mif stabilization, The result of the improved output timing is added to the DLL circuit, and the DLL output clock pulse (LCLKOET) is sent to the DQ buffer, and the delay is adjusted, and the data output timing is externally generated. Clock synchronization. This delay line) is used to make a phase comparison. The comparison: 3⁄4 of the way to the ϊΐίπ road' delay amount variable circuit is inserted in m. Electric circuit "Q copy system: = receive: buffer system can improve the timing adjustment accuracy == If this way,
15 S 132559515 S 1325595
可高速運轉半導體裝置。 雖然本發_至目前已結合其單—實施例加以綱,但孰習 此項技藝者應可㈣地以各種其他方絲實施本發明。在上^ 施=中、’ 6根據將ZQ校準結果DRZQNT<3:〇>直接作為控制信號 之情況進行綱。然而,ZQ校準結果drzqnt<3:g>係為輸出電 路之阻抗㈣信號,因此’有可能為未以完美hl之方式與電 制信號達成-致的情況。因此,為了更準確之控制,吾人 ^ 利用-轉換时轉換ZQ鱗絲drzqnt<3:g>, ^ 為電容控制信號。再者’吾人可安排利用查找表來轉換ZQ校^士 果DRZQNT<3:0>,然後將其作為電容控制信號。 、° 【圖式簡單說明】 圖1A係習知DLL電路之方塊圖。 DQ緩衝器之輸 DQ複製之輪出 圖1B係顯示包含於圖ία之DLL電路中之 出的波形圖。 圖ic係顯示包含於圖1A<DLL電路中之 (RCLK)的波形圖。 圖2係圖1A之DLL電路的時序圖。 圖3A係根據本發明之一實施例之DLL電路的方塊 圖。圖3B係包含於圖认之耻電路中之_量可變電路的電略 圖4係圖3A之DLL電路的時序圖。 圖5係顯示用以解釋本發明之效果的偏斜比較結果圖。 【主要元件符號說明】 1〜延遲線 2〜DLL輸出時脈驅動器 3〜緩衝器 4〜緩衝器 1325595 5〜DQ緩衝器 6〜複製時脈驅動器 7〜緩衝器 8〜延遲量可變電路 9〜緩衝器 10〜DQ複製 11〜相位偵測電路 12〜ZQ校準電路 13〜DFF族群 14〜反向器族群 15〜電容式延遲元件族群 16〜電容式延遲元件族群The semiconductor device can be operated at high speed. Although the present invention has been described in connection with its single-embodiment, it is to be understood by those skilled in the art that the present invention can be implemented in various other square wires. In the above, the "6" is based on the case where the ZQ calibration result DRZQNT<3:〇> is directly used as the control signal. However, the ZQ calibration result drzqnt <3:g> is the impedance (four) signal of the output circuit, so it is possible that it is not achieved with the electrical signal in a perfect hl manner. Therefore, for more accurate control, we use Z-scale to convert ZZ scale drzqnt<3:g>, ^ to the capacitance control signal. Furthermore, 'we can arrange to use the lookup table to convert the ZQ school's DRZQNT<3:0>, and then use it as a capacitance control signal. [FIG. 1A] FIG. 1A is a block diagram of a conventional DLL circuit. DQ Buffer Input DQ Copy Wheel Out Figure 1B shows the waveform diagram contained in the DLL circuit of Figure ία. Figure ic shows a waveform diagram of (RCLK) included in the DLL circuit of Figure 1A. 2 is a timing diagram of the DLL circuit of FIG. 1A. Figure 3A is a block diagram of a DLL circuit in accordance with an embodiment of the present invention. Fig. 3B is a schematic diagram of a variable amount circuit included in the circuit of Fig. 3A. Fig. 4 is a timing chart of the DLL circuit of Fig. 3A. Fig. 5 is a graph showing the results of the skew comparison for explaining the effects of the present invention. [Description of main component symbols] 1 to delay line 2 to DLL output clock driver 3 to buffer 4 to buffer 1325595 5 to DQ buffer 6 to copy clock driver 7 to buffer 8 to delay amount variable circuit 9 ~ Buffer 10 to DQ Copy 11 to Phase Detection Circuit 12 to ZQ Calibration Circuit 13 to DFF Group 14 to Inverter Group 15 to Capacitive Delay Element Group 16 to Capacitive Delay Element Group