1314129 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種基板傳送裝置，且特別是有關於一 種適用於大尺寸基板之傳送裝置。 【先前技術】BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate transfer apparatus, and more particularly to a transfer apparatus suitable for a large-sized substrate. [Prior Art]
近年來，為降低平面顯示器（例如液晶顯示器或有機電 激發光顯示器）之生產成本，玻璃基板之尺寸必須大型化， 以利進行最有經濟效益之切割。玻璃基板尺寸雖然大型化 而使重量增加，但是玻璃基板的厚度反而越來越薄，玻璃 基板越來越脆弱，容易破裂，這使得基板在傳送上面臨了 更大的挑戰。 第1圖係繪示習知製程機台内因應製程的需要而承载 並傳送基板向前或向後移動或晃動的傳送裝置的俯視示意 圖。傳送裝置100具有馬達102、齒輪104以及傳動軸1〇6, 其中馬達102藉由齒輪1()4帶動傳動& 1()6正轉或反轉。 傳動軸106的兩端具有承載部1〇8，傳送裝置1〇〇藉由承载 部1〇8承載基板ii〇(例如玻璃基板）。當馬達1〇2帶動傳動 軸106正轉時，位於承載部1〇8上之基板ιι〇會朝—方向 傳送，而當馬们02帶動傳動軸刚反轉時，位於 t之ΐ板U〇會朝另-方向傳送。另外，當馬達102 反覆瞬間交替正、反轉時，則 之基板ιι〇。 肖則了以晃動位於承載部⑽上 100的缺點就 隨著基板110尺寸增加，f知傳送裝置 5 1314129 逐一浮現。傳送裝置100藉由基板110和承載部1〇8間的 摩擦力來帶動基板11〇移動或晃動。基板11〇尺寸增加， 重量也隨之增加，基板在移動及晃動時因應力不均及重量 過重等因素，使得傳統傳動軸式的傳送裝置難以負荷或不 易長期保持運轉。例如，大尺寸玻璃基板容易因為應力不 均而破裂，以及現行傳動軸式的基板傳送裝置了為因應大 尺寸玻璃基板進行面板的製程，必須將各種的零件作加大 尺寸的設計，各零件會因尺寸過大過重而容易變形、磨損 因而產生帶動不良而不易使傳送裝置長期保持運轉。 因此，此一技術領域者急需要解決基板傳送的問題的 解決方案。 【發明内容】 據上所述，為了解決習知基板傳送裝置易使玻璃基板 因應力不均而破裂或裝置本身不易長期保持運轉的問題， 本發明利用磁浮及磁力互斥吸引的原理來設計傳送裝置， 藉以降低玻璃基板尺寸增加後所帶來的各種傳送上的問 題0 本發明所提供之基板傳送裝置包括承載平台，承載平 台具有不同固定磁性之第一磁性區塊交替設置於承载平台 相對兩側，以及傳送軌道，傳送軌道具有二組可變磁性之 第二磁性區塊，設置於傳送軌道的兩側，其中二組第二磁 性區塊間之距離大於承載基板的寬度，第二磁性區塊與第 一磁性區塊間的斥力使承載平台能夠磁浮於傳送軌道之 6 1314129 上’並藉由改變第二磁性區塊之磁性使承载平台朝特定方 向做加速、減速、等速、往復移動之運動或停止運動。 由於玻璃基板係整片放置於承載平台之上，承載平a 可絕對保持基板的應力平均，故不至發生玻螭基板承受應 力不均而破裂之情事。再者，承載平台係磁浮於傳送軌道 之上，傳送軌道以超距力支撐起承載平台可杜絕習知接觸 式傳送裝置中存在之零件摩耗的問題，即使玻璃基板的重 量增加亦無礙於本發明所揭露之基板傳送裝置之運作。 此外，習知技術係利用傳動軸上之承載部來承載基 板’當齒輪為馬達所驅動時，特別是在前後晃動時，無可 避免地會有些許不規則的振動，這些不規則的振動會導致 存在於玻璃基板上之藥液（例如在顯影製程中之顯影劑）分 佈不均’進而影響已曝光後之光阻層圖案化的形成。然而， 運用本發明的基板傳送裝置，不會發生此種機械性的不規 則振動，可以確保製程中的平順度，而可避免藥液分佈不 均。 本發明之基板傳送裝置係藉由承載平台的下方磁力系 統（例如具有二組可變磁性之第二磁性區塊的傳送軌道）所 帶來的斥力以及承載基板的承載平台本身的重量來達成傳 送系統在垂直方向的平衡，並藉由改變第二磁性區塊之磁 性使承載平台朝特定方向做加速、減速、等速、往復移動 之運動或停止運動’進而使基板得以順利進行各種製程。 【實施方式】 1314129 以下將藉由各式實施例並配合所附圖式來詳細解說本 發明之基板傳送裝置。 請參照第2圖，第2圖係繪示依照本發明較佳實施例 的一種玻璃基板傳送裝置的侧視圖。玻璃基板傳送裝置2〇〇 包括承載平台202以及傳送軌道208,玻璃基板210置於承 載平台202之上。承載平台202具有不同固定磁性之磁性 區塊204、206交替設置於承載平台202下方。在本實施例 中’磁性區塊204為N極磁性，磁性區塊206則為S極磁 性；當然，反之亦可。 傳送執道208係為可變磁性之磁性區塊212、214，其 中磁性區塊212、214可具有不同之磁性。請參見第3圖， 第3圖係繪示由第2圖M’剖面方向的示意視圖。磁性區塊 204設置於承載平台202的兩側，磁性區塊212則分設於承 載平台202外侧的下方，且兩磁性區塊212間之距離大於 承載平台202的寬度。此種設計可使磁性區塊212對磁性 區塊204的斥力F和水平（垂直）面成一夾角。斥力可分 解成水平分力Fx及垂直分力Fy，垂直分力Fy能使承載平台 202磁浮於傳送軌道2〇8之上，而水平分力Fx則使承載平 台202穩定的磁浮於傳送軌道2〇8之上。 第4圖係繪示另一實施例中具有不同磁性區塊配置組 成之傳送軌道。如第4圖所示，磁性區塊212可一分為二， 磁性區塊212a對磁性區2〇4的斥力匕能使承載平台2〇2 磁浮於傳送軌道208之上，磁性區塊212b對磁性區2〇4的 斥力Fx則使承載平台2〇2穩定的磁浮於傳送執道之 8 1314129 上。傳送軌道之磁性區塊尚可運用其他不同之配置，但均 係為產生向上和向内的磁斥力，以使承載平台穩定的磁浮 於傳送軌道之上。 第5A圖及第5B圖係繪示藉由改變傳送軌道之磁性區 塊之磁性而使承載平台朝特定方向前進的方法。基板21〇 位於承載平台202之上，承載平台202具有不同固定磁性 之磁性區塊204、206。在本實施例中，磁性區塊2〇4係為 N型磁性，而磁性區塊206係為s型磁性。傳送軌道2〇8 係為可變磁性之磁性區塊212、214，其中在第5A圖的階 段磁性區塊212為N型磁性，磁性區塊214則為S型磁性。 磁性區塊212對磁性區塊204的斥力以及磁性區塊2丨4對 磁性區塊204的引力會使承載平台202朝箭頭的方向移 動；同樣地’磁性區塊214對磁性區塊206的斥力以及磁 1"生£塊212對磁性區塊206的引力亦會使承載平台202朝 箭頭的方向移動。 請參見第5B圖，當承載平台202的磁性區塊204、206 移動:¾別滑過磁性區塊212及214時，磁性區塊212及214 的磁性反轉，磁性區塊212轉變為S型磁性而磁性區塊214 轉變為N型磁性，磁性區塊214對磁性區塊204的斥力以 及磁性區塊212對磁性區塊204的引力會使承載平台202 朝箭頭的方向移動；同樣地，磁性區塊212對磁性區塊206 的斥力以及磁性區塊214對磁性區塊206的引力亦會使承 載千台202朝箭頭的方向加速移動。 若需對第5A圖中向箭頭方向移動的承載平台202做減 1314129 速的操作’可將第5A圖中所示之磁性區塊212及214的磁 性反轉’磁性區塊212對磁性區塊204的引力以及磁性區 塊214對磁性區塊204的斥力使承載平台2〇2減速，甚至 可疋全停止。此時，如第5A圖所示，若繼續在磁性區塊 212及214上加上適當的磁性以提供所需的磁力又可使承 載平σ 202重新朝箭頭方向加速前進。藉由上述反覆的操 作，可使承載平台2〇2在傳送軌道2〇8上往復移動。另外， 在承載平台202以所需要的速度運動時，磁性區塊212及 214可同時變成同一磁性，由於承載平台2〇2磁浮於傳送軌 道208上，且承載平台202與傳送執道208間無摩擦力， 如此可使承載平台202在傳送軌道208上等速移動。 請參照第6Α圖及第6Β圖。第6Α圖及第6Β圖係繪示 土板自承載平台之上表面裝/卸載的裝置。如第6Α圖所 示，裝載基座216位於承載平台2〇2的下方，裝載基座216 具有複數個凸出物218，凸出物218可經由承載平台2〇2 通孔220伸出承載平台2〇2之上表面之上。當機械手臂 (未綠示）將基板210自基板承載架取下時，裝載基座216 之凸出物218由承載平台2〇2之通孔22〇伸出承載平台2〇2 之上表面之上，機械手臂將基板210置於突出物218之上。 第Β圖所示，裝載基座216向下降，當突出物SB的頂 端降至承載平台2G2之上表面之下時，基板210被放置於 載平σ 202之上表面之上。此時，裝載基座m繼續向 下降’直到凸出物218完全脫出通孔22〇為止。當基板21〇 要從承載平台2〇2之上被卸載下來時，可以將裝載=座216 1314129 ==218由承載平台2〇2之通孔22〇伸出承載 口 上表面之上㈣起絲210,細機械手臂將基 板210移開。凸出物218可為針狀、塊狀或長條狀。通孔 220可與凸出物218配合或略大於突出物218均可。 ‘ .· 由上述本發明所揭露的基板傳送裝置之實施例可知， 、 錢基板係整片放置於承載平台之上，承載平台可絕對保 #基板的應力平均，故不至發生玻璃基板承受應力不均而 破裂之情事。承載平台係磁浮於傳送軌道之上，傳送軌道 ® 以超距力支撐起承載平台可杜絕習知接觸式傳送裝置中存 在之零件摩耗的問題，即使玻璃基板的重量增加亦無礙於 本發明所揭露之基板傳送裝置之運作。 雖然本發明已以較佳實施例揭露如上，然其並非用以 限定本發明，任何熟習此技藝者，在不脫離本發明之精神 和範圍内’當可作各種之更動與潤飾，例如將磁性區塊的 位置略做調整或是在不同磁性區塊上使用不同強度的磁 性’以使承載平台做特殊的運動模式；此外，雖然上述實 # 施例係以玻璃基板為例來解說本發明之應用，但其他形式 的基板亦適用。因此，本發明之保護範圍當視後附之申請 專利範圍所界定者為準。 【圖式簡單說明】 為讓本發明之上述和其他目的、特徵、優點與實施例 能更明顯易僅，所附圖式之簡單說明如下： 11 1314129 内因應製程的需要而承 的傳送裝置的俯視示意 第1圖係繪示在習知製程機台 栽傳送基板或前或後的移動或晃動 圖； 之玻璃基板傳送裝置之較佳實施 第2圖係緣示本發明 例的側視圖； 第3圖係綠示由第2圖中1-1，剖面方向的示意圖； 第4圖係綠示另一實施例中具有不同磁性區塊配置扭 成之傳送軌道； 第5A圖及第5B圖係繪示藉由改變傳送軌道之磁性區 塊之磁性而使承載平台朝特定方向前進的方法；以及 第6A圖及第68圖係繪示將基板自承載平台之上表面 裝/卸載的裝置。 【主要元件符號說明】 100、200 :傳送裝置 102 :馬達 104 :齒輪 1〇6 :傳動軸 108 :承載部 110 ' 21〇 :基板 202 :承載平台 204 206、212、212a、212b、214:磁性區塊 208 :傳送軌道 216 :裝載基座 12 1314129 218 :凸出物 220 :通孔In recent years, in order to reduce the production cost of a flat panel display such as a liquid crystal display or an organic electroluminescent display, the size of the glass substrate must be increased to facilitate the most economical cutting. Although the size of the glass substrate is increased to increase the weight, the thickness of the glass substrate is increasingly thinner, and the glass substrate is more and more fragile and easily broken, which makes the substrate more challenging in transport. BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a top plan view showing a transfer device for carrying and transporting a substrate forward or backward in response to a process in a conventional process machine. The transfer device 100 has a motor 102, a gear 104, and a drive shaft 1〇6, wherein the motor 102 drives the drive & 1() 6 forward or reverse by the gear 1(). Both ends of the transmission shaft 106 have a carrying portion 1〇8, and the conveying device 1 carries the substrate ii (for example, a glass substrate) by the carrying portion 1〇8. When the motor 1〇2 drives the transmission shaft 106 to rotate forward, the substrate ιι on the carrying portion 1〇8 will be transmitted in the direction of the direction, and when the horse 02 drives the transmission shaft to just reverse, the 〇 plate U〇 at t Will be transmitted in the other direction. In addition, when the motor 102 alternates between positive and negative in an instant, the substrate is ιι. The shortcoming of shaking the substrate 100 on the carrier (10) is that as the size of the substrate 110 increases, the transfer device 5 1314129 appears one by one. The conveying device 100 drives the substrate 11 to move or shake by the frictional force between the substrate 110 and the carrying portion 1〇8. The size of the substrate 11 is increased, and the weight is also increased. When the substrate moves and shakes due to factors such as uneven stress and excessive weight, the conventional transmission shaft type conveying device is difficult to load or is not easy to operate for a long time. For example, a large-sized glass substrate is liable to be broken due to uneven stress, and a current drive-type substrate transfer device has been designed to cover a large-sized glass substrate, and various parts must be designed to be oversized. Because the size is too large and too heavy, it is easily deformed and worn, resulting in poor driving, and it is not easy to keep the conveyor running for a long time. Therefore, there is an urgent need in the art to solve the problem of substrate transfer problems. SUMMARY OF THE INVENTION According to the above, in order to solve the problem that the conventional substrate transfer device is easy to cause the glass substrate to be broken due to uneven stress or the device itself is not easy to keep running for a long time, the present invention utilizes the principle of magnetic floating and magnetic mutual attraction to design and transmit. The device, in order to reduce the various transmission problems caused by the increase of the size of the glass substrate. The substrate transfer device provided by the present invention comprises a carrying platform, and the first magnetic blocks having different fixed magnetic properties of the carrying platform are alternately arranged on the carrying platform. a side, and a transport track, the transport track has two sets of variable magnetic second magnetic blocks disposed on both sides of the transport track, wherein the distance between the two sets of second magnetic blocks is greater than the width of the carrier substrate, and the second magnetic region The repulsion between the block and the first magnetic block enables the carrier platform to be magnetically floated on the transmission track 6 1314129' and accelerates, decelerates, equalizes, reciprocates the carrier platform in a particular direction by changing the magnetic properties of the second magnetic block Exercise or stop exercising. Since the whole substrate of the glass substrate is placed on the bearing platform, the bearing flat a can absolutely maintain the stress average of the substrate, so that the glass substrate does not suffer from uneven stress and breaks. Furthermore, the carrying platform is magnetically floating on the transport track, and the transport track supports the carrying platform with the over-range force to eliminate the problem of the wear of the components existing in the conventional contact type conveying device, even if the weight of the glass substrate increases, it does not hinder the present. The operation of the substrate transfer device disclosed by the invention. In addition, the prior art utilizes the bearing portion on the drive shaft to carry the substrate. When the gear is driven by the motor, especially when it is swayed back and forth, there will inevitably be some irregular vibrations. These irregular vibrations will occur. The distribution of the chemical liquid (for example, the developer in the developing process) existing on the glass substrate is uneven, which in turn affects the formation of the patterned photoresist layer after exposure. However, with the substrate transfer apparatus of the present invention, such mechanical irregular vibration does not occur, and smoothness in the process can be ensured, and uneven distribution of the chemical liquid can be avoided. The substrate transfer device of the present invention achieves transmission by the repulsive force of the lower magnetic system of the carrying platform (for example, the transfer track of the second magnetic block having two sets of variable magnetic properties) and the weight of the carrying platform itself of the carrying substrate. The system is balanced in the vertical direction, and by changing the magnetic properties of the second magnetic block, the carrier platform is accelerated, decelerated, constant velocity, reciprocating or stopping motion in a specific direction, thereby enabling the substrate to smoothly perform various processes. [Embodiment] 1314129 Hereinafter, a substrate transfer apparatus of the present invention will be described in detail by way of various embodiments and with reference to the accompanying drawings. Referring to Figure 2, there is shown a side view of a glass substrate transfer apparatus in accordance with a preferred embodiment of the present invention. The glass substrate transfer device 2A includes a carrier platform 202 and a transfer track 208 on which the glass substrate 210 is placed. The magnetic blocks 204, 206 of the carrying platform 202 having different fixed magnetic properties are alternately disposed below the carrying platform 202. In the present embodiment, the magnetic block 204 is N-pole magnetic, and the magnetic block 206 is S-polar magnetic; of course, vice versa. The transfer path 208 is a magnetically variable magnetic block 212, 214 in which the magnetic blocks 212, 214 can have different magnetic properties. Referring to Fig. 3, Fig. 3 is a schematic view showing the direction of the cross section taken along the line M' of Fig. 2. The magnetic blocks 204 are disposed on two sides of the carrying platform 202, and the magnetic blocks 212 are disposed below the outer side of the loading platform 202, and the distance between the two magnetic blocks 212 is greater than the width of the carrying platform 202. This design allows the magnetic block 212 to form an angle with respect to the repulsive force F of the magnetic block 204 and the horizontal (vertical) plane. The repulsion can be decomposed into a horizontal component Fx and a vertical component Fy. The vertical component Fy can make the carrier platform 202 float on the transport track 2〇8, and the horizontal component Fx can make the load platform 202 stable on the transport track 2 Above 〇8. Figure 4 is a diagram showing a transport track having a different magnetic block configuration in another embodiment. As shown in FIG. 4, the magnetic block 212 can be divided into two. The repulsive force of the magnetic block 212a on the magnetic region 2〇4 enables the carrying platform 2〇2 to be magnetically floated on the transport track 208, and the magnetic block 212b is paired. The repulsive force Fx of the magnetic region 2〇4 causes the magnetic field of the carrying platform 2〇2 to float on the transmission channel 8 1314129. The magnetic blocks of the transfer track can be used in other different configurations, but both generate upward and inward magnetic repulsive forces to allow the magnetically stable platform to float above the transport track. Figures 5A and 5B illustrate a method of advancing the carrier platform in a particular direction by changing the magnetic properties of the magnetic blocks of the transport track. The substrate 21 is located above the carrier platform 202, and the carrier platform 202 has magnetic blocks 204, 206 of different fixed magnetic properties. In the present embodiment, the magnetic block 2〇4 is N-type magnetic, and the magnetic block 206 is s-type magnetic. The transfer track 2〇8 is a magnetically variable magnetic block 212, 214 in which the magnetic block 212 in the stage of Fig. 5A is N-type magnetic and the magnetic block 214 is S-type magnetic. The repulsive force of the magnetic block 212 on the magnetic block 204 and the attraction of the magnetic block 2丨4 to the magnetic block 204 cause the carrier platform 202 to move in the direction of the arrow; likewise the repulsive force of the magnetic block 214 on the magnetic block 206 And the attraction of the magnetic 1" block 212 to the magnetic block 206 also causes the carrier platform 202 to move in the direction of the arrow. Referring to FIG. 5B, when the magnetic blocks 204, 206 of the carrier platform 202 move: 3⁄4, the magnetic blocks 212 and 214 are reversed, and the magnetic blocks 212 and 214 are reversed, and the magnetic block 212 is converted into an S-type. Magnetic and magnetic block 214 is converted to N-type magnetic, the repulsive force of magnetic block 214 to magnetic block 204 and the attraction of magnetic block 212 to magnetic block 204 cause carrier platform 202 to move in the direction of the arrow; likewise, magnetic The repulsive force of the block 212 on the magnetic block 206 and the attraction of the magnetic block 214 to the magnetic block 206 also cause the load carrying station 202 to accelerate in the direction of the arrow. If the loading platform 202 moving in the direction of the arrow in FIG. 5A needs to be operated by 1314129 speed, 'the magnetic inversion of the magnetic blocks 212 and 214 shown in FIG. 5A' can be reversed to the magnetic block 212. The gravitational force of 204 and the repulsive force of the magnetic block 204 on the magnetic block 204 decelerate the load bearing platform 2〇2 and may even stop. At this time, as shown in Fig. 5A, if the appropriate magnetic force is continuously applied to the magnetic blocks 212 and 214 to provide the required magnetic force, the load level σ 202 can be accelerated again in the direction of the arrow. By the above-described repeated operation, the carrier platform 2〇2 can be reciprocated on the transport track 2〇8. In addition, when the carrier platform 202 is moving at the required speed, the magnetic blocks 212 and 214 can become the same magnetic at the same time, since the carrying platform 2〇2 is magnetically floating on the transport track 208, and there is no between the carrying platform 202 and the transport 208. The frictional force, thus, enables the carrier platform 202 to move at a constant speed on the transport track 208. Please refer to the 6th and 6th drawings. Figure 6 and Figure 6 show the installation/unloading of the surface of the earth plate from the load-bearing platform. As shown in FIG. 6 , the loading base 216 is located below the carrying platform 2〇2, and the loading base 216 has a plurality of protrusions 218, and the protrusions 218 can extend out of the carrying platform via the carrying platform 2〇2 through holes 220. Above 2 〇 2 above the surface. When the robot arm (not shown) removes the substrate 210 from the substrate carrier, the protrusion 218 of the loading base 216 protrudes from the upper surface of the carrying platform 2〇2 by the through hole 22 of the carrying platform 2〇2. Above, the robot arm places the substrate 210 over the protrusions 218. As shown in the figure, the loading base 216 is lowered downward, and when the top end of the projection SB is lowered below the upper surface of the carrier platform 2G2, the substrate 210 is placed above the upper surface of the carrier σ 202. At this time, the loading base m continues to descend ' until the projection 218 completely comes out of the through hole 22'. When the substrate 21 is to be unloaded from above the carrying platform 2〇2, the load=seat 216 1314129==218 can be protruded from the upper hole 22 of the carrying platform 2〇2 over the upper surface of the carrying port (4) the wire 210 The fine mechanical arm moves the substrate 210 away. The protrusions 218 can be needle-shaped, block-shaped or elongated. The through hole 220 may be fitted with the protrusion 218 or may be slightly larger than the protrusion 218. According to the embodiment of the substrate transfer device disclosed in the present invention, the whole substrate of the money substrate is placed on the carrying platform, and the load platform can absolutely guarantee the stress average of the substrate, so that the glass substrate is not subjected to stress. Uneven and ruptured. The carrying platform is magnetically floating on the conveying track, and the conveying track® supports the carrying platform with the over-range force to eliminate the problem of the wear of the components existing in the conventional contact conveying device, even if the weight of the glass substrate increases, the invention is not hindered by the present invention. The operation of the disclosed substrate transfer device. Although the present invention has been described above in terms of the preferred embodiments thereof, it is not intended to limit the invention, and it is to be understood that those skilled in the art can make various changes and modifications, such as magnetic properties, without departing from the spirit and scope of the invention. The position of the block is slightly adjusted or magnetics of different strengths are used on different magnetic blocks to make the carrying platform perform a special motion mode; moreover, although the above embodiment uses a glass substrate as an example to illustrate the present invention. Application, but other forms of substrate are also suitable. Therefore, the scope of the invention is defined by the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS In order to make the above and other objects, features, advantages and embodiments of the present invention more obvious, the description of the drawings is as follows: 11 1314129 1 is a plan view showing a moving or swaying diagram of a conventional substrate transfer substrate or a front or rear substrate; a preferred embodiment of a glass substrate transfer device; FIG. 2 is a side view showing an example of the present invention; 3 is a schematic diagram showing the cross-sectional direction of 1-1 in Fig. 2; Fig. 4 is a green transmission showing a transmission track having different magnetic block configurations twisted in another embodiment; Figs. 5A and 5B A method of advancing the carrying platform in a specific direction by changing the magnetic properties of the magnetic blocks of the transport track is illustrated; and FIGS. 6A and 68 are diagrams showing means for loading/unloading the substrate from the upper surface of the carrying platform. [Description of main component symbols] 100, 200: conveying device 102: motor 104: gear 1〇6: transmission shaft 108: carrying portion 110' 21〇: substrate 202: carrying platform 204 206, 212, 212a, 212b, 214: magnetic Block 208: Transfer Track 216: Load Base 12 1314129 218: Projection 220: Through Hole