TWI312870B - - Google Patents

Description

1312870 IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to TCP (Tape Carrier Package) or C0F (Chip On Film) for testing one of ic components (hereinafter, TCP, COF, Other TAB (Tape Automated Bonding) assembly technology is generally referred to as "TCP" TCP processing device and positional alignment method at the connection terminal of the TCP processing device. [Previous Technology] The electronic component test apparatus of an electronic component such as an IC component requires an electronic component test device that tests the performance or function of the finally manufactured IC component or the component at the intermediate stage, and in the case of TCP, uses TCP. Test device. The test device for TCP is generally composed of a tester body, a test head, and a TCP processing device (hereinafter also referred to as a r Tcp processor). The TCP processor includes a test function for electrically connecting the carrier tape and the test head by carrying a carrier tape of a plurality of TCPs on the tape (also including the concept of a film. The same applies hereinafter). The probe of the probe card and the test base of the TCP are contacted with the probe, and the plurality of TCp are sequentially delivered for testing. In order to use the TCP processor for efficient and readable testing, it is necessary to make the test pads of the TCP and the probes of the probe card make sure contact. Due to this requirement, in the case of using the TCP processor, before the actual operation and testing, in order to make the test base of the TCP and the probe card: the probe is surely contacted, the TCP processor is initially set, Parallel =

21.92-8560-PF 1312870 Register the job for this setting. The initial setting of the TCP processing cry D is performed, for example, as follows. First, move the 1 LP to the top, - ', 61 position, and hold the carried TCP with the pusher unit. “A "f man’s moved the fish to the height of the TCP using the camera, and then saw the test pedestal of the camera with the camera and displayed the image on the monitor. The operator knows the angle of rotation of the TCP by visually π, and looks at the i-viewer. In order to clearly recognize the probe of the probe card with the camera, the push::: is moved to the point where the camera cannot clearly recognize the TCP. After the height, the probe of the phase probe card is used, and the image is displayed on the monitor. The operator looks at the monitor on the side of the monitor. The face is rotated manually by the probe card table, and the probe card is rotated at an angle of Tcp. Then, move 7L early to clearly recognize the height of Tcp and the probe with the camera. While watching the monitor, move the probe card table toward the X-axis direction and/or γ f direction by manual operation, and confirm that all the test bases of the TCP are in contact with the probes of the probe card. In the above way, the location set by the registration is started. [Problem to be Solved by the Invention] I is 'in this initial setting method, because the control of the rotation angle of TCP and the adjustment of the rotation angle of the probe card are based on the feeling of the operator, and some workers need a lot. Working time. x, when adjusting the probe card = corner 1 'Because the test base of TCP is not displayed on the monitor, it is difficult to adjust the rotation angle of the probe card with respect to the rotation angle of T; and

2192-8560-PF 1312870 TCP king mouth | 5 test pedestal can not be said, 雹晷 60,000 from the go, - 休 卞 卞 彳 彳 针 Γ Γ 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四The rotation of a is very complicated. Under the mouth, especially with the recent capacity of TCP, 4 Mountain Workers

, , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , Difficulty, the initial setting of the working time also changed to 2. 2, may not be able to correctly carry out the alignment of the TCP and the probe, for reasons of this, in the actual drop of the clock from + m to the towel may also be in poor contact, The contact resistance is not standardized, and the short circuit between adjacent terminals is used. The present invention has been made in view of such a reality, and an object of the present invention is to provide a TCP processing apparatus capable of accurately and easily performing alignment operation of a contact terminal of a contact portion and an external terminal of a TCP, and which is correct in the Tcp processing apparatus. A method of performing position alignment processing in each of the places. [Means for Solving the Problem] In order to achieve the above object, the present invention provides a TCP processing apparatus that transports a carrier tape on which a plurality of TCPs have been formed, and a plurality of contact portions electrically connected to the test head The connection terminal pushes the carrier tape, and by connecting the external terminal of the TCP and the connection terminal, the TCP processing device capable of delivering the plurality of Tcp according to the test is characterized in that it includes a contact portion capable of connecting the plurality of connection terminals. a moving device moving in a plane direction and a vertical axis thereof, and a photographing device capable of photographing an external terminal of the tested TCP and the connection terminal; photographing the outside of the tested TCP by the photographing device, and obtaining a coordinate of the external terminal Data, and the connection terminal is taken, and the coordinate data of the connection terminal is obtained; the coordinate of the external terminal is 2192-8560-Pp 1312870^ and the coordinate of the connecting material is turned to obtain the position deviation of the material part and the position of the material According to the position deviation amount, the contact portion is moved, and the connection is performed, and the position of the detected pair of 35 κρ-sub-positions is performed. !). 4 ^ # According to the invention (invention...Because of the external: and the coordinate data of the connection terminal, the external terminal and the connection are moved, so that the external terminal and the external contact can be correctly and easily moved. The position of the contact terminals is aligned. Therefore, you can use the 1CP processing tool to perform the initial setting in a short time and efficiently. When the table is set up, the invention (invention, ―, get the seat = Connect the coordinate data of the terminal, and find the position deviation of the external terminal and the yoke around the vertical axis, and then connect the deviation amount, and use the moving device to make the position of the t t t axis again... The vertical axis rotates; secondly, the coordinate data of the ^ sub-connection is obtained, and the position deviation of the external terminal and the terminal in the plane direction of the connection terminal is determined to be the deviation amount, and the "moving wear: R" according to the plane direction is used. Positioning of the contact portion toward the plane direction ☆ According to the 4th invention (Invention 2), the TCP and the contact portion are surely performed by the positional alignment of the vertical axis and the positional alignment in the plane direction. Positioning. Kyrgyzstan / the hair (the date of the month), the position deviation of the external terminal and the connection of the connection terminal can be obtained from the angle of the first line obtained from the two bits of the external terminal: the coordinate data, from the connection terminal The difference between the angles of the second straight lines obtained from the coordinate data (invented

2192-8560-PF 1312870 3). In the invention (Invention 3), the TCP processing apparatus further includes a display device; and the first line and/or the second line can be displayed on the display device preferably (Invention 4). According to the invention (Invention 4), the positional deviation around the vertical axis can be visually confirmed by displaying the first straight line and/or the first straight line on the display device ’. According to the invention (Invention 4), it is preferable that the first straight line overlaps with the image of the external terminal photographed by the photographing device and is superimposed and displayed on the display device (Invention 5), and further, the invention (invention) 4) The second straight line may be superimposed on the image of the connection terminal captured by the photographing device, and displayed on the display device in an overlapping manner (Invention 6). In the case of the invention (Invention 4), the difference between the angle of the first straight line and the angle of the second straight line can be displayed on the display device (Invention 7). According to the invention (Day of the month 7), the amount of positional deviation around the vertical axis can be confirmed by displaying the difference between the angle of the first straight line and the angle of the second line. The value is on the screen. The day of the month (the day of the month 4), the contact portion is rotated about the vertical axis, and the difference between the angle of the i-th line and the angle of the second line becomes changed to be displayed on the display device The color of the first straight line and/or the second straight line is preferred (Invention 8). According to the invention (Invention 8), the display device visually confirms that the positional deviation around the vertical axis has been corrected. According to the invention (Invention 4), when the contact portion is rotated about the vertical axis so that the angle of the first straight line is smaller and the value is smaller, the difference k is better than the predetermined X-out notification sound ( Invention 9). According to the invention

2192-8560-PF 1312870 9) 'Even if the system is to go to 4 _ Alignment around the vertical axis: in the case of beaming, it can be confirmed by hearing to wear Jin Ming Xu Yue Ming 3) 'The TCP processing device The mobile device includes a mobile device that can move the camera device; the camera device uses the camera to move the mobile device, and the camera is moved by two positions of the external terminal and the fifth terminal. It is preferable that the two positions 詈r^BB 1ηλ are above (Invention 1). According to the second aspect of the invention, the photographic apparatus can capture a plurality of portions of the external terminals that are located away from each other and the plurality of portions of the connection terminals that are located away from each other:: 乂 can obtain #Tcp and contact portions with better precision The positional deviation and the alignment of the Tcp and the contact portion can be performed more correctly. In the invention (Invention 1), the TCP processing device further includes a movable diffusing reflector. When the connecting terminal of the contact portion is photographed, it is preferable to insert the diffusing reflection plate between the connecting terminal and the carrying tape. Invention (1). According to (4) Ming (Invention (1), since the image of the connection terminal of the contrast is known by using the diffused reflection plate as a background, the coordinates of the connection i can be taken with good precision, and The Tcp and the alignment are more correctly performed. ° Second, the present invention provides a TCP processing apparatus for carrying a carrier (4) in which a plurality of TCPs have been formed, and connecting the plurality of contacts electrically connected to the test head. The terminal pushes the carrier tape, and the Tcp processing device that can sequentially deliver the plurality of TCPs to the test by connecting the external terminal of the TCP to the connection terminal is characterized in that it includes an external terminal capable of capturing the detected TCP and a photographing device and a display device for connecting terminals; a contact portion having the plurality of connection terminals is movable toward a plane direction thereof and around a vertical axis;

2192-8560-PF 10 1312870 The first straight line obtained by capturing the coordinate data of the external terminal obtained by capturing the two positions of the external terminal of the tested Tcp by the photographing device and/or the photographing of the connecting terminal by the photographing device The second straight line of the coordinate data of the 'shai connection terminal obtained from the above position is shown on the display device. (Invention 1 2). According to the invention (Invention (2), since the operator can view the first straight line and/or the second straight line displayed on the display device, the contact portion is moved around the vertical wire, so that the TCP and the contact portion can be more accurately and easily performed. Alignment with respect to the vertical axis. :: Invention (Invention 12) 'This first line can be superimposed on the image of the external terminal by the photographic assembly, i is superimposed on the display, slave (Invention 12), and According to the invention (Invention 13), it is preferable that the second straight line overlaps with the image of the connection terminal imaged by the photographing device and is superimposed on the display device (Invention 14). In the invention (Invention 12) Alternatively, the angle of inclination of the first straight line and/or the line may be displayed as a display device (invention 15). According to the invention (invention 15), = ', month, to show the tilt angle of the skirt and / or coordinate value =, 隹 仃 TCP and the position of the contact, so it is more correct and easy to also carry out the position of the TCP and the contact 2 invention (invention 12) 'can be the first straight line The difference between the angle and the second degree is preferably displayed on the display device (Invention 16). If Yiming (Invention 16), the difference between the angles of the two lines is displayed, so that the difference is close to 〇 (degrees) way to perform TCP and contact

2192-8560-PF 11 1312870 Position Alignment 'This alignment can be performed more correctly and easily. In the ride (Invention 12), the contact portion is rotated about the vertical axis, and the difference between the angle of the first straight line and the angle of the second straight line becomes smaller than the predetermined one. ^ ^ ^, the color of the first straight line and/or the second straight line is better (invention 17). According to the invention (invention 17), by k, the first straight line and/or the first The first ^ ± brother is the color of the line, because the operator sees the position deviation around the vertical axis

^ ^ t is already, ,, σ bundle, so it is easier to position the KP and the contact. Ming (Invention 12) 'When the contact portion is rotated about the vertical axis, and the difference between the angle of the straight line and the angle of the second straight line becomes smaller than the predetermined value, it is better to give a notification sound. (Invention 18). According to the invention (the month 18), the hunting sound is issued, and * Zhuo α is a correction for the operator to confirm the positional deviation around the vertical axis by hearing.

4 ^ , has , , , σ beam, so the alignment of TCP and contact can be performed more easily. In the invention (invention) 2), the TCP processing device further includes a camera system that allows the camera to be moved by the camera, and the camera device utilizes the camera. It is preferable to move the moving device 'and to shoot two or more positions of the external terminal and two or more positions of the 忒 connection terminal ((Invention (9), because the photographic insertion can be right according to the invention, the external terminals are located at a position away from each other. The number of turns and the joints are located at a plurality of locations away from each other's position. Therefore, it is possible to more accurately determine the angle of the 苐-straight line and the second straight line, and more accurately perform the alignment of the Tcp and the contact portion. (4) Invention 12), the TCP processing device further includes a movable month reversed when the connection terminal of the contact portion is photographed, the diffusion is reversed

.2192-8560-PF 12 1312870 It is preferable to insert a plate into the connection terminal and the carrier V tape (Invention 20). According to the invention (invention 2〇), because the diffuse reflector is used as the background, the connection to the south contrast is covered early... straight green... image, so it can be more accurately obtained. A straight line angle, and can correct the younger. Also, the location of the tcp and the contact portion is provided by the method of aligning the connection terminals of the Luben 35, and the position of the connection terminal of the 祯 祯 祯 山 山 牟 牟 牟 牟 山 山 山===The carrier tape of the complex TCP is formed, and the carrier tape is pushed to the two _^TrD connection, and the external terminal of the TCP is connected with the connection terminal.

The test is delivered in sequence, and is characterized in that: the last number of TCP data and the +, the coordinate data of the terminal of the external terminal is obtained. The position deviation of the connecting terminal around the vertical axis: the terminal and the position deviation amount , the contact x is rotated according to the axis of the vertical axis to the axis; second, the flat == coordinate data, and the external terminal and the connecting end are obtained: the position deviation amount in the two directions is further determined according to The contact portion is moved in the plane direction (Invention 21). The deviation τ is provided by the month of the present invention. The method of aligning the material is connected to the terminal of the CP processing device, and the device is transported to form a plurality of TCP carriers. ::Please handle the multiple connections of the electrical connection contacts:::' and connect the external terminals of the TCP and the material to the test object. The test is characterized by the second delivery test, which can be used in & The plurality of TCPs are based on the coordinate data of the connection terminal of the external terminal of the β-hai, and the block information and the connection terminal are obtained.

2192-8560-PF 1312870% The amount of positional deviation of the vertical axis and the amount of positional deviation in the plane direction, and then the contact portion is moved in the x direction toward the vertical axis and/or toward the plane according to the positional deviation amount (Invention 22). ❿ In the shoulder S Ming (Invention 21, 22) 'The positional deviation of the external terminal and the connecting terminal about the vertical axis is the angle of the first straight line obtained from the coordinate data of two or more positions of the external terminal, The difference between the angles of the second straight lines obtained from the coordinate data of the connection terminal 2 2 = ^) is determined by the difference between the angle of the first straight line and the angle of the second straight line, compared with the invention (Invention 23). Preferably, the value is displayed on the display device (Invention (4). In the present invention (Invention 23), the first straight line and the second straight line are displayed as φ τ, and the contact portion is rotated about a vertical axis, so that When the angle of the first straight line and the angle of the second straight line are changed, it is preferable to change the first straight line and/or the first color displayed on the display device (Invention 25). The good one is (the invention (9), The contact portion is rotated about the vertical axis, and the angle between the straight line and the second straight line value + day # heart s (four) angle difference becomes more than the predetermined value, and the notification sound is better (invention 26). In the invention (invention 21) , 9 9 , . , , will diffuse & Μ 4 '纟 shoot the connection of the contact (Invention 27) Preferably, between the cymbal and the carrier tape, the present invention provides a device for handling the connection terminal of the processing device to carry a complex TCP load method: "CP Glue f, and to and test head

2192-8560-PF 14 1312870 The multi-connection terminal of the electrically connected contact portion pushes the tape, and by connecting the external connector to the connection terminal, the plurality of TCp can be sequentially delivered for testing. : Using the camera to capture the two positions of the external terminal - the above - the first line of the acquired external terminal is displayed on the display farm, and the camera is used to capture the connection. The second green color obtained from the coordinate data of the connection terminal τ # # • The straight line f is displayed on the display device together. Therefore, the operator can view the first line and the first line displayed on the display device. The two straight ''surfaces rotate the contact about the vertical axis (Invention 28). In the invention (Invention 28), the difference between the angle of the first straight line and the angle of the second straight line is not preferable to the display device (invention). ▲ In the invention (Invention 28), the contact portion is rotated about a vertical axis, so that the difference between the angle of the first straight line and the angle between the first line of 哕篦 ▲ ▲ and the first straight line of the angle becomes a predetermined μ day, ' It is preferable to change the color of the first straight line and/or the second straight line displayed on the display device (Invention 3). Let the first Ζ Ζ U ^ 28) rotate the contact portion around the # wire, and the difference between the angle of the value L':, 1, and the angle of the second straight line becomes a better than the established 'Temple' Preferably (Invention 31). In the invention (Invention 28), when the connection of the connection/reflection plate is inserted between the connection terminal and the carrier tape, I: [Effect of the invention] If the position of the Tcp processing device or the connection terminal is aligned with the present invention, The contact terminals of the contact portion and the outside of the TCP can be correctly and easily performed

2192-8560-PF 15 1312870 Terminals are aligned. [Embodiment] Hereinafter, embodiments of the present invention will be described in detail based on the drawings. Fig. 1 is a front elevational view showing a TCP test apparatus using a TCP processor according to an embodiment of the present invention, and Fig. 2 is a side view of a pusher unit in the TCP processing of the embodiment, and Fig. 3 is a view The plan view of the push-pull workbench of the TCP processing state of this embodiment, and the fourth figure is the plan view of the grab-card workbench of the TCP processor. FIG. 5 is a front view of the probe card workbench of the TCP processor. Figure. First, the overall configuration of a test device for Tcp including a TCP processor according to an embodiment of the present invention will be described. The TCP test apparatus i is composed of a tester body (not shown), a test head 10 electrically connected to the tester body, and a TCP processor 2 not placed on the test head 1 side.

The TCP processing benefit 2 system tests each of the plurality of Tcps formed on the carrier tape 5 in accordance with the parent-child payment. In the present embodiment, in order to simplify the description, each of the TCPs is delivered as a test. However, the present invention is not limited thereto, and a plurality of TCP simultaneous delivery tests may be performed on the carrier tape 5 in the tandem direction and/or the parallel direction. The TCP processor 2 includes a roll-out reel 21, a reeling tape 5 before the reeling test of the reel 21, 21 rolls out 'and is wound up on a roll-up reel 21 and a reel-reel strip 5 after delivery test The peeled protective tape 51 is wound from the reel 22 by the winding and winding reel 22, and the reeling tape 5 is unwound. Between 2 and 2, the setting will be carried by the carrier rubber take-up reel 21 to the winding reel 22

2192-8560-PF 16 1312870 Three spacer rollers 23a' 23b, and 23c. Each of the spacer rollers 23, 23b, and 23c can be moved up and down to adjust the tension of the protective tape 5i. On the lower side of the unwinding reel 21, a tape guide 2", a roll-out limit roller 25a, an inlet-side sub-groove 25b, and an inlet-side guide wheel 25 are provided, and the carrier is unwound by the take-up reel 21. The tape 5' is guided by the tape guide wheel 24a, and is carried to the pusher unit 3 via the take-up limit roller 25a, the inlet-side auxiliary sheave 25b, and the inlet-side guide sheave 25c. On the lower side of the winding reel 22 The tape guide roller 2, the take-up limit roller 25f, the exit side auxiliary sheave 25e, and the exit side guide wheel 25d are disposed, and the test carrying tape 5 is delivered, and the exit side guide wheel 25d and the outlet side auxiliary sheave are provided. The 25e and the take-up limit roller 25f are guided by the tape guide wheel 24, and are wound around the winding reel 22, and are disposed between the inlet side guide roller 25c and the outlet side guide wheel 52d. Pusher unit 3. As shown in Figs. 1 and 2, a feeding motor 3 that can rotate the ball screw 32 is attached to the frame (pusher frame) 36' of the pusher unit 3 via the bracket 361. Two linear motion guides (hereinafter referred to as "LM guides") 37 in the Z-axis direction are mounted on the pusher body portion that is screwed with the ball screw 32By driving the cymbal cymbal 31, the pusher body 胄33 1-plane is guided by the linear motion guide 37 to move the '-plane toward the up-and-down direction (z-sleeve direction). The suction plate 34 is provided at the lower end portion of the pusher main body portion 33, and is preferably connected to a negative source (not shown) to adsorb and hold the carrier tape 5. The tension sheave 35a is provided on the front side of the pusher body portion 33 (left side in the drawing), and the main sheave 35b is disposed in the rear of the pusher body portion 33.

2192-8560-PF 17 1312870 ^Right side in the figure), the carrier tape 5 is held at the desired tension. As shown in Fig. 2 and Fig. 3, on the back side of the pusher frame 33, push = 4 ># λ ^ and 仟丄忭 frame % are set so as to be placed on the base 38. The top table 48 of the rotary table of the dry table 4 is fixed to the pusher to be placed on the base 4 of the pusher table 4, and is provided with: a motor 41a, a ball screw 42a having a shaft in the axial direction; The motor 41b rotates the ball screw 42b having the shaft in the axial direction, and the servo $= causes the ball screw 42c having the pumping in the Y-sleeve direction to rotate, and the servo motor 41C is located at both ends of the base 40. # is guided by the LM guides 43a, 43a in the X-axis direction and can be turned toward the side of the vehicle: the sliding sliding block - is screwed with the ball screw 42a. In the slider "a, the LM guide 45a in the Y-axis direction mounts the slide plate 46a so as to be slidable toward the 'axis direction." The upper side of the slide plate 46a is fixed to the inside of the rotary member 47a having the rolling ring. The rotary member 47a is freely rotated. Mounted on the top table 48. The slide block 44b guided by the LM guides 43b, 43b in the Y-axis direction and slidable in the γ-axis direction is screwed into the ball screw 42b. In the slider block, the LM through the X-axis direction The guide 45b slides the sliding plate 46b in the axial direction. On the upper side of the sliding plate, the fixed member: the rotating member 47b' of the rotating member 47b is rotatably attached to the top table 48. The LM guide of the Y-axis direction The sliders 44c and 43c, which are guided by the members 43c, 43c and slidable toward the gamma, are screwed together. In the slider 44,

2192-8560-PF 18 1312870 The slide plate 46c is mounted to be slidable in the z-axis direction via the LM guide 45c in the X-axis direction. On the upper side of the slide plate 46c, a rotating member 47c having a rolling ring is fixed inside, and the rotating member 47c is rotatably attached to the top table 48. The pusher table 4 having such a configuration is driven by a servo motor. 41a, and the sliding block 44a, the sliding plate 4, and the sliding plate a. Slides in the X-axis direction to move the top table 48 toward the x-axis direction. Further, by driving the servo motor 41b and the servo motor 41c, the slide block 4, the slide block 44A, and the slide plate 46a are slid in the γ-axis direction, so that the top work can be performed. 48 moves toward the γ-axis direction. Further, by driving the servo motor, the slider 44a is slid in the X-axis direction, and the feed motor is driven and the servo motor 41c' causes the slider 44b and the slider 44c to face each other in the opposite direction to the γ-axis (four), and each The rotating member 47a, still, We can rotate the top table 48 about its vertical axis. According to the operation of the push rod, the pusher unit 3 can be oriented in the X-axis-γ direction (four) and in the vertical direction: As shown in Fig. 1, a probe card table 7 for severing the probe card 8 is provided on the lower side of the pusher unit 3 and measuring ::::. The == card ... 7 is divided into a motor drive mechanism that can control the mover, and only has a full-fledged program, and has a gas-to-have. However, in the present embodiment, a motor drive mechanism is employed. As shown in Fig. 4 and Fig. 5, in the operation of the probe card, a feeding is provided to rotate the earthen seat 1 motor mm bead screw 712 toward the x-axis direction.

, ', 4 guides (1) in the x-axis direction. In that 4itLM

2192-8560-PF 19 1312870 The guide 713 is provided with a rectangular base X that is guided by each LM guide 713 so as to be slidable in the direction of the x-axis. On one side of the cymbal base 72, a screwing portion 721 which is screwed to the ball screw 712 is formed. The X base 72 is provided with a servo motor 722 that rotates the ball screw 723 having an axis toward the γ-axis direction, and two γ-axis direction # guides 724. On the two LM guides 724, a gamma base 73 which is formed by each LM guide m and which is slidable in the Y-axis direction is provided. A screw portion 73 (which is screwed to the ball screw 723) is formed on one side of the γ base.

The Y base 73 is provided with a servo motor 732 that rotates the ball screw 733 having the shaft toward the γ-axis direction, and a port 734 that supports the guard ring 735 to rotate freely. At a portion of the grommet 735, a screw portion 736 that is screwed into the ball screw 733 is formed. The probe card 8 including a plurality of probes 81 is detachably attached to the retaining ring 735 by means of four pins 8 2 . Although not shown in FIGS. 4 and 5, the probes of the probe card 8 are electrically connected via the test head 10 and the tester body. In the probe card stage 7 having such a configuration, The servo motor 711 is driven to move the X base 72, thereby moving the probe card 8 in the x-axis direction, and by driving the servo motor 722, the gamma base 73 can be moved, and the probe card 8 can be moved toward the x-axis direction. Further, by driving the servo motor to rotate the ball screw 733 and moving the screw portion 736, the ring 735 and the probe card 8 can be rotated about its vertical axis. In addition, the TCp processor 2 includes automatic control. The control means for driving the servo motors 711, 722, and 732 can thereby automatically move the probe card 8 in the X-axis direction, the γ-axis direction, and the vertical axis.

2192-8560-PF 1312870 As shown in Fig. 1, the first camera 6a is placed on the front k side of the pusher unit 3 (left side in Fig. 1), and the second camera (photographing device) 6 is set in the test 5 On the lower side of the master 10, the third camera 6c is placed on the rear side of the pusher unit 3 (the right side in Fig. 1). Further, a gap is formed in the test head to form the second camera 6b to capture the probe card 8. The mark punch 26a and the return punch 26b are disposed between the pusher unit 3 and the second camera 6c. The mark punch 26a is based on the test result, and the matching TCP is drilled at the predetermined position! For the number of holes, the return punch _ is the TCP wearer who is judged to be a defective product. Each of the cameras 6a, 6b, and 6c displays the image captured by these cameras on the display device 9 to be visually recognized by the operator. Among the cameras, the first camera 6a and the third camera 6c are used to determine whether or not the position or the number of holes drilled by the marking punch 26a is present on the carrier tape 5. Further, the second camera 6b is configured to acquire positional deviation information between the TCP and the probe card 8, and obtain positional deviation information for a plurality of objects in the field of view. The second camera 6b is mounted on the camera table 61, and the actuators of the camera table 61 are movable toward the vertical and horizontal directions α-axis in the plan view by a YW direction > and the up-down direction (the x-axis direction). By the second camera moving toward the horizontal and horizontal (10) axis - γ axis direction of the plan view, because the second camera 6b can capture the plurality of test pedestals ρ and the probe card 8 of the TCP located away from each other, which are located away from each other. The position probe (4), so the positional deviation of the TCP and probe card δ can be obtained with good precision. Further, the second camera 6b is moved in the up and down direction (squeezing direction), and changing the focus position of the second machine 6b can focus on the test base p of the photographic subject.

2192-8560-PF 21 1312870 or the desired part of the probe 81. This allows you to capture the landscape image and correctly determine the test pedestal. In addition, the second camera 6b itself includes the coordinates of the second wide needle 81 = the focus position of the second camera 6b, and the desired position of the test base p or the probe 81 of the second outer casing. The display device 9 has an image processing unit '· and an image captured by the second camera 6b. Image processing "The image captured by machine 6b and the means of the established = two-phase device. The text is displayed between the monitoring unit 3 and the probe card 8, and the diffusing reflector u is detachably placed. In the form of the inter-adhesive side held by the adsorption plate 34, the diffuse reflection plate U can be oriented, and the axis 2; the moving reflex reflector 11 has fine irregularities formed on the surface thereof, and can be supplied from an illumination source (not shown). The light diffuses and reflects. Therefore, the 'diffusion reflector u: when the tape 5 and the probe card 8 are loaded between, the background of the probe 81 can be set to a light state or a dark state of 2, using the second camera 6b. An image of the contrast of the probe Μ can be obtained. Alternatively, the background of the probe 81 can be made by changing the conditions (irradiation amount, illumination color, and irradiation angle) of the illumination source without providing the diffusion reflection plate. The identification becomes clearer. Next, the method and operation of the TCP processor 2 will be described. In the case of using the TCP processor 2, before the TCP processor 2 is actually operated, it is necessary to perform the initial setting in advance, which is to move the probe card. 8, and the probe 8 of the probe card 8 is all Positioned corresponding to the central position of the test base p words' in the change of TCp type, production lot number or a different test

2192-8560-PF 22 1312870 tcp situation, or change the probe q mutual ^: the case of the needle card 8, in order to make the TCP test base P and probe card 8 probe 81 contact, you need to decide And the reference position of the X-axis position / γ-axis position / θ rotation angle of the probe port 7 is registered (this position is referred to as "printing and paying, and the position of the position"). In addition, the putter table 4 is used for the test execution of the TCP, so the initial setting assumption is still the non-control state. 6A to 6c, the system of the folder 1 1 & _ you do not specify the operation of the initial setting of the TCP processor 2, the first brother "(a) ~ (g) map the Tcp processor The monitor of the initial setting of 2 shows a schematic view of the face. :: When the processor 1 starts the initial setting operation, it moves to the test position (step, the second camera shoots the end of the TCP in the complex test base ^ρ, κ SIS 〇IP) The plurality of test pedestals P (step S02). The TCp processor 2 $ &#老 w, the image processing unit of the earth ware 2, according to the photographed, the first image of the plurality of test pedestals P included in the first image The coordinates of the seat, the bucket (Xpdi, YPdl), and the first madness is displayed on the monitor SQ3, the shirt is like the figure 4 (a). In addition, the *targets are used for each of the coordinates of the action. a coordinate shot on the camera table 61. After the TCP processor 2 uses the phase (4) 6 machine 6b, the second camera moves the first phase.

^ ^ is taken at the other end of the complex test pedestal P where the TCP is located in the image processing section of the landscaping unit 2 (step S〇4). It is similar to the image (second image) of the second image, and the respective seat rods (XPd2, YPd2) of the center portion of the type I base P are obtained. Two shadow cliff mussels, ", the page is not in the i viewer (step S 0 5).

2192-8560-PF 23 1312870 TCP Processor 2 Image Processing Qiu Twisting Tips According to the obtained coordinate data [Xpdl, Ypdl) and (Xpd2, Ypd2), the test base P included in the shirt image is calculated. The position of the center of the coordinates and the second actor-like line of the position of the center of the test pedestal P (the test pedestal p々^ seven soil cliffs P) and the X-axis direction - The angular sound a monthly Θ μ of the straight line (the horizontal line in Fig. 7) (step S06). Then, a first straight line u having the angle 0 pd is generated, and the _I 浙 一直 line L1 and the 苐 衫 像 ( 现在 现在 现在 现在 现在 现在 现在 现在 ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ,,, brother 7 (b) map). Next, the TCP processor 2 inserts the diffusion moon plate 11 into between the carrier tape and the probe card 8 (step S08), and sets the second camera 6b to be moved by the camera table. The full age of the camera, (4) ID camera 6b captures a plurality of complex probes 81 corresponding to the plurality of test pedestals p included in the first image (step S09). The image processing unit having 2 at Tcp obtains the coordinates of 刖黾4 of the plurality of probes 81 枓α ν included in the second shirt image based on the photographed poems $ n A liter J to the image (second image).夂 夂 刀 ra ra, ra, 弟 — as the image is not visible to the monitor (step s10, a, 7 (c)). Here, because the moon view of the pendulum 11 -T ^ is the image of the diffused reflector 2: the probe of the fiber. Therefore, it can be taken with good precision; =: coordinates, and the position of the test probe P of the TCP and the probe 81 of the probe card 8 can be aligned and read. After the TCP processor 2 uses the camera workbench, 'by the second camera 6b, and the younger brother-camera 6b P, 亥 第 - - image contains the plural test pedestal, m, 探针 number probe 81 ( Step su). The Tcp part acquires the respective coordinate data (") of the front end portion of the needle 81 included in the fourth image according to the image of the shadow image of the filming image ("image"), and 2192-8560-Pp 24 1312870 The fourth image is displayed on the monitor (step si2). The image processing unit of the TCP processing benefit 2 calculates a 'T-shaped second shirt' based on the obtained coordinate data (Xpbi, YPbl) and (xpb2, Ypb2). The line of the probe 81 included in the end position = the position coordinate and the position coordinate of the tip end of the probe 第四 included in the fourth image (the arrangement of the probe 81) and the straight line in the χ axis direction (Fig. 7) The angle of the horizontal line is 0pb (step (10). Then, the second line L2 having the angle Θ Pb is generated, and the first line u and the second line L2 and the fourth image (now image) are superimposed and displayed on the monitor. In step S14, reference is made to Fig. 7(d). Thus, by displaying the first straight line u and the second straight line L2 on the monitor, it is possible to visually confirm the amount of positional deviation around the vertical axis. Next, TCP The processor 2 calculates the θΡ〇 and the second straight of the first straight line L1 obtained in steps S6 and S13. [Differential value of Θμ step S15) ° Then, in the case where the absolute value of the obtained difference value Δ 0 is larger than the predetermined value ( (YES in step S16), the TCP processor 2 makes a probe based on the difference value Δ Θ The needle card table 7 is rotated (step S17); and when the absolute value of the difference value Αβ is smaller than the predetermined value D (YES in step S18), the rotation of the probe card table 7 is stopped (step s19), and the change is made. The color of the two straight line L2 (refer to Fig. 7(e) in step S20). On the other hand, in step 16, when the absolute value of the difference value Δ 0 is equal to or less than the predetermined value D (step No. 6, No), the probe is not detected. The needle card table 7 is rotated, and thus, by changing the color ' of the second straight line L2, it is possible to visually confirm that the positional deviation amount of the test base P and the probe 81 about the vertical axis has been corrected on the monitor. The TCP processor 2 uses the camera table 61 to move the second phase

2192-8560-PF 25 * 1312870 After the machine 6b', the second camera 6b retakes the complex probe 81 corresponding to the complex test pedestal P included in the first image (step s2i, refer to the seventh Step S17, the probe card 8 is rotated about the vertical axis, and even if the target probe 81 is deviated from the field of view of the second camera ,, the image can be taken again. The image processing unit of the TCP processor 2 is based on the captured image and image) Obtaining the coordinate data HO' of each of the first (four) of the plurality of probes 81 included in the fifth image and indicating the generation of the first image

The mark of the position of the test base and the mark of the position of the tip end portion of the probe 81 generated by the fifth image are superimposed and displayed on the monitor (step S22). Similarly, TCP handles writing 9 to 丨丨EB J·. After the camera 6 is moved by the camera table 61, the second camera 讪 retakes the complex material 81 corresponding to the plurality of test pedestals P included in the second image ((4) S23, reference map) TCP processing The image processing unit of the device 2 acquires the coordinate data Hb4) of the front end portion of the plurality of probes 81 included in the (four) six images based on the captured image (the sixth image), and represents the second image The symbol of the position of the test pedestal P and the mark of the position of the front end portion of the 81 generated by the sixth image are superimposed and displayed on the monitor (step following, the coordinate data CXpdi of the tcp processor 2 from the test pedestal 2) , YPdi) and (XPd2, YPd2), and the coordinate data of the probe 81 α Υ ^ry V λ at 2, γ^) and (χΡ"'Υρ"), calculate the test pedestal ρ and probe μ The difference value Δ[ Μ of the component and the Υ component (step S25). Then, when the absolute value of the difference value is larger than the predetermined value p (YES at step S26), the TCP processor, 2 is based on the difference The value Δχ, ^ causes (4) the card table "moves to the X-axis direction and or the γ-axis direction (step S27).

2192-8560-PF 1312870 and when the absolute value of the difference value ΔΧ' ΔΥ is smaller than the predetermined value p (YES at step = 28), the movement of the probe card table 7 is stopped (step (10), refer to section 7 (& )) and registering the position of the probe card table 7 (step and on the other hand, in step S26, the absolute value of the difference value is smaller than the predetermined value Pm (in step S26, ie, the probe card table 7 is not moved) And registering the position (step S3〇). After taking the 'TCP processor 2, the diffusion reflection plate u is ejected between the carrier tape 5 and the probe card 8 (step S31), and the initial setting is ended. According to the TCP processor 2 of the present embodiment, the position of the probe of the test pedestal P and the probe card 8 is automatically performed two times: the alignment can be performed correctly and easily. "The fine alignment of the position of the vertical axis to the axial direction and the Y-axis direction is performed sequentially, and the position of the test base p of the Tcp and the probe 81 of the probe card 8 can be more correctly performed. As a further embodiment of the present invention, it is described as a manual fall for KP. The TCP processor of the initial setting of the alignment of the test pedestal P and the probe card 8 in the position of the stylus 81. The TCP processor of the present embodiment has substantially the same structure as the above-described Tc", but is probed. The servo motor 711, 722, 732 at the needle card table is also 驱动τ total ° drive source or the servo motor 711 driver may be omitted, by operating the operating lever, etc., and the probe card table 7 is in the present The start of the TCP processor of the embodiment is performed in the same manner as the step SOb S15. The _ port is again made, and the first line is calculated on the TCP processor.

2192-8560-PF 27 !312870

Between the angle L1 and the difference value Ag of the 0Pb of the second straight line L2 (step S15), the operator looks at the first straight line L1 and the first straight line L2 (see the seventh (d) figure) displayed on the monitor. The operation causes the probe card table 7 to rotate. Then, when the absolute value of the difference value Δβ is smaller than the predetermined value D (YES in step S101), the color of the second straight line L2 is changed (step 〇2, refer to Fig. 7(e)). After the operator confirms, the rotation of the probe card table 7 is stopped. After the step S102, the TCP processor exits the diffusion board between the carrier tape 5 and the probe card 8 (step § 103). As described above, since the operator can view the first line L1 and the second line L2 displayed on the monitor while rotating the probe card 8 around the vertical axis according to the desired angle, and according to the second line L2 It is confirmed that the correction of the positional deviation of the probe card 8 about the vertical axis has been completed by the change of the color, so that the test base p of the TCP and the probe 81 of the probe card 8 around the vertical axis can be correctly and easily and quickly performed. Positioning. The positional deviation in the X-axis direction and/or the γ-axis direction by manual operation can be corrected in the same manner as in the past. Specifically, moving the pusher unit 3 to the position where the Tcp and the probe 8 are clearly recognized by the second camera 6b can be clearly recognized. The operator looks at the monitor showing the test pedestal P and the probe 81 while moving the probe card table 7 by manual operation toward the X-axis direction and/or γ舳古&4 4°° 4 ϊ glaze direction, and It is confirmed that all of the test pedestals pa and 丞1 P of the TCP can be in contact with the probe 81 of the probe card 8. After the registration of the probe card table 7 (step S1 04) in accordance with the above method, the initial setting is ended. The embodiment described above is for the purpose of understanding the present invention and is not limited to the inventors of the present invention. Therefore, the various features of the above-described embodiments are intended to cover all modifications and equivalents of the embodiments of the invention. For example, in the above-described embodiment, in steps S14 to S20 or S102, the first straight " angle 0 Pd and the angle θ pb of the second straight line L2 may be used instead of or instead of the first straight line and the second straight line L2. The numerical value is displayed in the monitor as ' or the numerical value shows the relative angle between the two straight lines (for example, the angle of the second straight line L2 with respect to the first straight line L1 based on the first straight line) (refer to the first). Doing so can visually confirm the amount of positional deviation of the TCP and probe card 8 based on the value. ^In order to perform the TCP alignment of the test base p and the probe 81 of the probe card 8 by manual operation, the angle Θ pd of the first straight line L1 and the angle 0 pb of the second straight line L2 are displayed as numerical values in the monitoring. In the case of the device, the angle j# / Q ly of the second straight line L2 is closer to the angle 0 of the first straight line, so that the probe card # is moved, and the relative between the two straight lines is displayed by numerical value. In other words, the probe card table 7 can be rotated and moved in such a manner that the angle value is close to 〇 (degrees). In addition, in steps S14 to S20 or S102, the coordinate values of the first straight line L1 and the second straight line L2, yh, and the central portion or both end portions may be displayed as values in the monitoring benefit, or may be a face, a 'straight line. The relative coordinate value (for example, the central portion or both end portions of the first tooth-to-one line L2 when the first straight line L1 is used as a reference to the center of the first acre line L1, the coordinates of the 卩 or the two & Value) is displayed as a numerical value on the monitor. In doing so, the root can be healed, and the numerical value visually confirms the positional deviation of the TCP and the probe card 8.

2192-8560-PF 29 1312870 The conversion step S1 of the table 7 or the manual operation of the probe card 2 line μΛ, because of the angle of the first line U and the first

The magnitude of the difference value 角度 of the angle of the punching gate P, which produces a pulse of a predetermined pulse interval, a sound of μ & μ + J color 或 frequency or sequentially changed to a predetermined sound 曰 'to make it easy for the operator to use the hearing The identification position is aligned. The angle is ancient in step S20 or _, when the value of the first line ^ is A, the angle A of the line L2 "the difference value ΔΘ is smaller than the predetermined indication... see ί: the end of the alignment of the vertical axis is known, the message is displayed Up, benefit, or set the external lighting device to the TCP processor 2 knees the external lighting device point ^ _ °; the point is not displayed. So by issuing an alarm, it can be confirmed by the vertical axis Position alignment has ended. ^,, Probe: The embodiment described above is used for the positional alignment of the TCP and the vertical vehicle and the alignment of the plane direction as the component is opened, and the preparation month is not limited to this. Both concrete and ancient, according to the coordinate data (Pd, Ypd〇 and coordinate data (H) of the pedestal in step S03, S05 σ α ν 仵 4, and the mouth of the step, 9 = coordinate data (Xpb "bl) and coordinate data " = position deviation amount and position deviation χ' of the x-axis direction and the ¥ axis direction and according to those position deviation amounts, the probe card table 7 is oriented toward the straight axis / X axis The direction of the direction/axis is moved, and the position of the test pin 81 is aligned. Thereby, the difference is shortened. _ Positive feed industry. Biasing the needle card position 8 [Industrial Applicability] The present invention is based on TCP initial setting processing such as Xi ~ # 4 Picnic opposite of 'to be correct and

2192-8560-PF 30 1312870 The position of the external terminal of TCP is easily used for the connection terminal and the quasi-operation pole of the contact part. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a front elevational view showing a test apparatus for TCP using the present invention. Fig. 2 is a view of this embodiment. One embodiment of the TCP processor side of the pusher unit of the TCP processor

Fig. 3 is a plan view showing the TCP at the embodiment. Pusher table

The first picture of Figure 4 is a plan view of the probe card table of the TCP processor. Figure 5 is a front view of the probe card table of the TCP processor. 6(A) is a flowchart (1) showing the initial setting operation of the Tcp processor of the embodiment.

Fig. 6(B) is a flow chart (2) showing the operation at the time of initial setting of the TCp processor of the embodiment. Fig. 6(C) is a flowchart (3) showing the operation at the time of initial setting of the TCP processor of the embodiment. The seventh (a) to (e) and (g) diagrams are schematic diagrams of the monitor display screen of the start setting of the TCP processor of the embodiment, and Fig. 7(f) is a schematic diagram of the photographic image of the camera. [Main component symbol description] 1 TCP test device

2192-8560-PF 31 1312870 2 TCP processor 3 pusher unit 4 pusher table - 5 carrying tape. 6b second camera (photographic device) 7 probe card table 8 probe card 81 probe (contact terminal ) © 9 display device 10 test head 11 diffuse reflection plate 21 unwinding reel 22 winding reel P TCP test pedestal (external terminal) 2192-8560-PF 32

Claims (1)

1312870 卞, A, please find the scope of profit: 1. - A kind of TCP processing device, the handling has formed a multiplex belt, and the rubber is connected to the contact part 2 that is electrically connected with the test head:: dust-loaded tape 'by making - The external terminal and the connection:::: are connected, and the multiple TCPs can be delivered to the test in turn, which is characterized by: a moving device capable of moving the contact portion having the plurality of connection terminals = about a vertical axis, and a photographing device capable of photographing the tested Tc = portion tweezers and the connection terminal; photographing the tested TC with the photographing device The coordinates of the coordinates, and the connection of the second connection::: coordinate information of the connection terminal; Wei Shi, 3 Hai, the material of the material (4) and the coordinates of the material receiving material, the position of the external terminal and the connection terminal The deviation amount; and, according to the position deviation amount, the moving portion is used to move the contact portion, and the connection terminal is inserted to align the position of the external terminal of the tested TCP. 2/ The TCP processing device of claim 1, wherein: the first 'obtaining the coordinate data of the external terminal and the coordinate data of the connection terminal: and obtaining the position of the external terminal and the connection terminal about a vertical axis The deviation amount ' is further rotated by the moving device according to the position deviation amount 1 around the vertical axis by the moving device; and * second, the coordinate data of the connection terminal is obtained, and the external terminal and the connection are obtained. The amount of positional deviation of the terminal in the planar direction is further shifted by the moving means toward the flat 2192-8560-PF 33 1312870 by the positional deviation amount in the plane direction. 3. If you apply for a patent range! The TCP processing device, the positional deviation of the basin terminal and the connecting terminal around the vertical axis, is the coordinate data from the two positions of the external tweezers or more, and the angle of the line is straight. 'From the connection terminal, the difference between the angles of the two straight lines obtained from the coordinate data of two or more positions is obtained. 4. The T c p processing device of claim 3, wherein the τ c p processing device further comprises a display device; μ can display the 帛Ι 帛Ι line and/or the second line to the display device. 5. The Tcp processing apparatus according to claim 4, wherein the straight line and the image of the external end ί captured by the photographing device are overlapped and displayed on the display device in an overlapping manner. 6. If you apply for the TCP processing device in item 4 of the patent scope, which can be? Two straight lines: the images of the connection terminals captured by the photographing device are superimposed and superimposed and displayed on the display device. 7. The TCP processing apparatus of claim 4, wherein the difference between the angle of the first straight line and the angle of the second straight line is displayed on the display device. 8. The Tcp processing apparatus according to claim 4, wherein the contact portion is rotated about a vertical axis such that a difference between an angle of the first straight line and an angle of the second straight line becomes smaller than a predetermined value, and is changed. The color of the first line and/or the second line displayed on the display device. 9. The Tcp processing apparatus of claim 4, wherein the difference between the angle of the first straight line and the angle of the second 2192-8560-PF 34 1312870 straight line is made to rotate the contact portion about a vertical axis When the set value is smaller, a notification sounds. 10. The TCP processing device of claim 3, wherein the processing device further comprises a camera device (4) for moving the camera device, and the device is moved by the camera device and photographed. 2 Two positions of the external terminal and two or more positions of the connection terminal, and the processing device of the first item of the second patent range, wherein the ΊΧΡ processing flat includes a movable diffusing reflection plate; 'Insert and diffuse the diffusing reflector between the tweezers and the carrier tape. With: - a type of TCP processing device, carrying a carrier that has formed a plurality of Tcp "1 cut the electrical connection of the contact portion of the plurality of connection terminals push the carrier tape, 蕤, is the external terminal of the squirrel The connection terminal is connected, and the plurality of TCPs can be sequentially delivered for testing, and then the connection is characterized in that: the camera and the display device capable of photographing the tested Tcp are included; and the photo of the connection terminal has the contact of the plurality of connection terminals The vertical axis moves; toward the direction of the thousand faces and around two: = Photograph: The device takes a line of the external terminal of the tested TCP and/or uses the: the coordinates of the external data of the #海 external terminal to obtain the tandem connection The second line of the photographing terminal (1) is displayed on the display device "the coordinate data of the sub-paragraph is displayed at 2192-8560-PF 35 1312870. 13. Please refer to the τ of the patent range 12th. The camera device can be overlapped and overlapped, and then the external terminal is in the shadow of the display device. 14_Tcp processing in the 12th item of the patent garden, the second straight line and the use of the # 'one image can be repudiated' and displayed on the display device in an overlapping manner. i: If the Tcp treatment of the agricultural product in the 12th paragraph of the patent application, "may: " two T or the inclination angle of the second line and / or the established point of the agricultural display value is not displayed 16. The Tcp processing device according to claim 12, wherein the angle of the first line and the angle of the second line are displayed. ' ^ Π · Tcp processing as claimed in item 12 of the patent application And rotating the contact portion around the vertical axis, so that (4) - the angle of the line ^ the difference between the angles of the second line becomes smaller than the predetermined value, t is more displayed on the first line of the display device and / The color of the second straight line. 18. The Tcp processing apparatus of claim 12, wherein the difference between the angle of the first straight line and the angle of the second straight line is made to be different when the contact portion is rotated about a vertical axis 19. The TCP processing device of claim 12, wherein the TCP processing device further includes a photographic mobile device that can move the photographic device; the photographic device utilizes the photographic device Mobile device Move and shoot two or more positions of the external terminal and two or more positions of the connection terminal. 2192-8560-PF 36 1312870 TCP: Please request the TCP processing of the 12th patent range, wherein the tcp processing device The movable diffusing reflector is included; when the connecting terminal of the contact portion is photographed, the diffusing reflection plate is inserted between the '-connecting pair and the carrying tape. 21. The position of the connecting terminal of the connecting terminal The quasi-:p processing device reports the η alignment method, and the TCP processing device carries the carrier tape that has been contacted with the text Tcp, and pushes the carrier tape to the plurality of connection terminals that are electrically connected to the test head. The tape can be successively delivered to the test by connecting the external IC of the TCP and the connection terminal i π , and is characterized in that: 2 the coordinate data of the external terminal and the material of the connection terminal are The position of the material is rotated about the vertical axis of the vertical axis; and the positional deviation of the axis is such that the contact portion 2, the coordinates of the (4) connection terminal are taken, and the positional deviation of the external terminal in the planar direction is obtained. , According to the position deviation amount of the flat, the contact portion is moved in the planar direction. 22. A method for aligning the connection terminals is a method of connecting the terminals of the TGP processing device to the Bi Tai, and the TCP The processing device transports the tape that has been contacted with fTCP, and pushes the tape to the mountain connected to the test head by the electrical connection terminal, by making the external terminal of the TCP and the connection terminal + The fish tweezers are connected, and the plurality of TCPs can be sequentially delivered for testing. The feature is: obtaining the coordinate data of the external terminal and the coordinate of the connection terminal 2192-8560-PF 37 1312870 and obtaining the external terminal and the The amount of positional deviation of the connecting terminal about the vertical axis and the amount of positional deviation in the planar direction are moved by the contact portion about the vertical axis and/or in the planar direction according to the amount of positional deviation. 23. The method of aligning the connection terminals of claim 21 or 22, wherein the position deviation of the external terminal and the connection terminal about the vertical axis is a coordinate from two or more positions of the external terminal The angle of the first straight line to which the data is applied is obtained from the difference between the angles of the second straight lines obtained from the two or more positions of the connecting terminal. 24. The method of aligning a connection terminal according to claim 23, wherein a difference between an angle of the first straight line and an angle of the second straight line is displayed on the display device. 5. The method of aligning a connection terminal according to claim 23, wherein the first straight line and the second straight line are displayed on the display device, and the contact portion is rotated about a vertical axis. The difference between the angle of the first straight line and the angle of the X-th straight line becomes smaller than a predetermined value, and the color of the first straight line and/or the second straight line displayed on the display device is changed. 26) The alignment of the connecting terminal of the 23rd item of the patent application is as follows: Γ吏 The contact portion is rotated about the vertical axis to make the first-line notification sound. "The ratio is smaller than the devaluation, and the method of issuing the connection terminal of the 21st or 22nd part of the patent specification (4) is issued, wherein the connection end plate of the contact portion is inserted between the connection terminal and the carrier tape. K scattered reflection condition - the method of aligning the connection terminals is based on (10) "Positioning method of device 2192-8560-PF 38 1312870, "CP processing device is handling contact: P carrying tape, and The test head pushes (4) the tape with the electrically connected terminal, and the plurality of Tcp can be successively delivered to the test by connecting the outer and the second, which are characterized in that:, the outside of the tested TCp is photographed by the photographing device. The two positions of the terminal are displayed on the display device by the first line obtained from the coordinate data of the external terminal taken; the two positions of the connection terminal are photographed by the photographing device, and the coordinates of the connected terminal are obtained The second straight line obtained by the data is displayed on the display device together with the first straight line; therefore, the 'job can be seen on the first straight line and the second straight line displayed on the display device The contacting portion rotatable about a vertical axis. 29. The method of aligning a connection terminal of claim 28, wherein a difference between an angle of the first straight line and an angle of the second straight line is displayed on the display device. 30. The method of aligning a connection terminal according to claim 28, wherein the contact portion is rotated about a vertical axis such that a difference between an angle of the first straight line and an angle of the second straight line becomes a predetermined value Smaller, the change is not visible to the color of the first line and/or the second line of the display device. 31. The method of aligning a connection terminal of claim 28, wherein the contact portion is rotated about a vertical axis such that a difference between an angle of the first straight line and an angle of the second straight line becomes a predetermined value More hours, a notification sounds. 2192-8560-PF 39 1312870 32. The method of aligning a connection terminal according to claim 28, wherein when the connection terminal of the contact portion is photographed, the diffusion reflection plate is inserted into the connection terminal and the carrier tape between. 2192-8560-PF 40