1309294 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種三維形貌量測系統，尤其是關 文投影敦置及光學影像相位分析方法， 罝測大尺寸物體之三_彡_三維雜量測系統。 【先前技術】 條紋投影輪靡術為聿 貌的功效強大檢測技：，測待測物表面三維形 架構簡單、高速量柳、1^^有.非接觸式、系統 一 _ 冋輪廓取樣岔度及低環境干擾。 H ’料條紋投影方法的表 式或絕對模式，比對模式為先量i ^ ^ 里另—表面影像，進而求得兩者的差 =;而=式則需先已知單一表面的縱深值。此 〜週期性條紋圖案投影至待測表面 進而解5周受對應於各縱深的扭曲條紋。當量測大 尺寸物體的三維形翁眭，斟於社冰b 縱深的扭曲條紋則十^困I於精確地解調變對應於各 中華民國專利公告號第養56號中揭示—種物體 表面二維形貌量測方法和系統，提供一種結合干涉條 紋^射法搭配相移干涉術而形成的高精度表面三維形 貌里測方法m其湘線型電荷齡元件（CCD line)相機作為取像元件，待測物體相對條紋投影裝置及 CCD line取像元件移動，利用線掃描得出待測物表面 影像。此種以相對移動的掃描方法無法即時性的得出 6 1309294 • 待測物的三維形貌，且相對移動的定位裝置的定位精 確度亦影響待測物掃描的量測解析度，如量測大尺寸 的待測物’則十分耗時且因掃描方式易產生扭曲的量 測影像。 美國專利公告號第6,564,166號中揭示一種用於加 熱箱中動態量測的疊紋投影方法及裝置，其利用雷射 干射術產生一陰影疊紋投影系統，將條紋投影至待測 物表面上’其待測物及取像元件不動，而條紋投影系 # 統則於待測物表面以線掃描方式掃描待測物，其利用 取像元件的量測影像推得待測物於加熱箱中的熱變 形’進而控制加熱箱的加熱溫度。該系統主係利用加 熱方式使待測物產生熱變形而比對條紋影像的變化 量’而進行動態量測，該系統無法直接獲得物體靜態 三維影像’且以掃描方式量測大尺寸的待測物時，則 十分耗時。 另 Wei-Hung Su, et al.在文獻 Proceeding SPIE (2005)中刊載之 “Projected fringe profilometry using ® holographic techniques for large-scale measurements”技 術研究中揭示一種光柵投影裝置的繞射元件，利用全 像技術將光柵紀錄在平面全像片（Plane Hologram)上， 再利用雷射光重建所紀錄的光栅，提升光栅投影至待 測物表面上的景深，不過由於雷射光的高同調性 (coherence)之特性，由取像元件得到的條紋影像有光斑 雜訊的影響，降低了三維形貌的量測精確度。 7 1309294 【發明内容】 本發明之目的在提供—種三 其是用於量測大尺寸待測4 二里，糸統，尤 待測物的三維形貌。 、 且局解析量測 達到上述目的之三維形貌量 . 考標準片，用於建立參考座 匕括·一參 F置，用於^、㈣ 的相值’―條紋投影 衷置帛於杈射一週期性光學條紋於 上一移動平台，用於軸向移動該參1309294 IX. Description of the invention: [Technical field of the invention] The present invention relates to a three-dimensional topography measuring system, in particular to a Guan Yu projection and an optical image phase analysis method, and a three-dimensional measurement of a large-sized object Miscellaneous measurement system. [Prior Art] Stripe projection rim is a powerful detection technique for measuring the appearance of the fascia: measuring the surface of the object to be measured is simple, high-speed measuring, 1^^. Non-contact, system _ 冋 contour sampling 岔And low environmental interference. H's fringe projection method of the table or absolute mode, the comparison mode is the first amount of i ^ ^ in the other - surface image, and then find the difference between the two =; and = the formula needs to know the depth value of a single surface . This ~ periodic stripe pattern is projected onto the surface to be tested and further resolved by 5 weeks by twisted stripes corresponding to the respective depths. Equivalent measurement of the three-dimensional shape of a large-sized object, the twisted stripe of the depth of the ice of the social ice b, the precise demodulation of the object is corresponding to the surface of the object disclosed in the Republic of China Patent No. 56 The two-dimensional shape measurement method and system provide a high-precision surface three-dimensional shape measurement method formed by combining the interference fringe method with phase shift interferometry, and the CCD line camera is taken as the image capturing method. The component, the object to be tested moves relative to the stripe projection device and the CCD line image capturing component, and the surface image of the object to be tested is obtained by line scanning. Such a relatively moving scanning method cannot instantaneously obtain 6 1309294 • the three-dimensional shape of the object to be tested, and the positioning accuracy of the relatively moving positioning device also affects the measurement resolution of the object to be tested, such as measurement The large size of the object to be tested' is very time consuming and is prone to distortion of the measurement image due to the scanning method. U.S. Patent No. 6,564,166, the disclosure of the entire entire entire entire entire entire entire entire entire entire entire The object to be tested and the image capturing component do not move, and the stripe projection system scans the object to be tested in a line scan manner on the surface of the object to be tested, and uses the measurement image of the image capturing component to push the object to be tested in the heating box. The thermal deformation 'in turn controls the heating temperature of the heating box. The main system of the system uses the heating method to thermally deform the object to be measured and dynamically measures the amount of change of the fringe image. The system cannot directly obtain the static 3D image of the object and measures the large size of the object to be tested by scanning. When it is a thing, it is very time consuming. Wei-Hung Su, et al., in the "Projected fringe profilometry using ® holographic techniques for large-scale measurements" published in Proceeding SPIE (2005), reveals a diffraction element of a grating projection device, using holographic technology. The grating is recorded on a Plane Hologram, and the recorded grating is reconstructed by laser light to enhance the depth of field of the grating onto the surface of the object to be tested. However, due to the high coherence of the laser light, The fringe image obtained by the image taking component has the influence of spot noise, which reduces the measurement accuracy of the three-dimensional shape. 7 1309294 SUMMARY OF THE INVENTION The object of the present invention is to provide a three-dimensional shape which is used for measuring a large size to be tested, and the three-dimensional shape of the object to be tested. And the analytical analysis of the three-dimensional topography to achieve the above purpose. Test standard film, used to establish the reference seat, including a reference F, for the phase value of ^, (4) '--strip projection is set to shoot a periodic optical stripe on the previous moving platform for axially moving the parameter
用於接收該參考標準片之;以以及: 相位值”：：：於儲存及計算該參考標準片影像的 相位^其中’由該相位計算單元計算該參考標準片 之翏考座標的相位值後，令—制物置於該移動平台 亡：：由該影像感測元件接收影像並儲存於相位計算 =士再由該相位計算單元計算該待測物的三維 形貌相位值。For receiving the reference standard slice; and: phase value "::: storing and calculating the phase of the reference standard slice image ^ where 'the phase calculation unit calculates the phase value of the reference coordinate of the reference standard slice The object is placed on the mobile platform to die:: the image is received by the image sensing component and stored in the phase calculation = the phase calculation unit calculates the three-dimensional topography phase value of the object to be tested.
—光源，用於產 該光源將光波投 一週期性光學條 較佳地，該條紋投影裝置包括： 生一光波，以及一繞射元件；其中， 射於該繞射元件上，以繞射方式產生 紋投影於該待測物表面。 較佳地，該條紋投影裝置可為光纖式光拇投影裝 置’其包括：-光源，用於產生一光波；一光纖，用 於傳導光波’·-透鏡’用以聚焦錢，·以及—繞射元 件，以繞射方式產生一週期性光學條紋；其中，藉由 f透鏡將該光源產生之光波聚焦並耦合入該光纖之一 立而，光波於該光纖中傳導，該繞射元件附著於該光纖 8 1309294 之於另 表面。 端，產生 週期性光學條紋投影於一待測物 ^乜地，該光源可為高同調性光源。 二仏地，該光源可為低同調性光源。 二乜地，該繞射元件可為平面全像片。 =佳地，該繞射元件可為體積全像片。 於該:上期性條紋’使 學條紋於投影週期性光 時，岑与德成、、片軸向移動該參考標準片 條紋ΐΐ像Η凡件得以接收複數個週期性參考光學 抑—步包括另一參考標準片，其中該參 ^ 又有―週期性條紋，使於轴向移動該史考 紋測元件得以接收複數個週期性參 树明功效在於彻低_光源的低同調性 ^，消除先斑影像的影響，且藉由參考座標的預先建 ，待測物置於移動平台上時，可立 f議’尤其是量測大尺寸待測物時，透】大 ，標系的建立’亦可得到即時的待測物三維形 貌，如此一來，改進因掃描方式所導致的耗 解析度不佳等缺點。 本發明之該目的或特徵，將依據後附圖式加以詳 1309294 ' 細說明，惟需明暸的是，後附圖式及所舉之例，祇是 做為說明而非在限制或縮限本發明。 【實施方式】 請參閱第一圖係顯示本發明條紋投影裝置100之 架構示意圖。本發明之條紋投影裝置100包含一光源 110及一繞射元件120，其中該光源110係用以產生一 光波，並投影於該繞射元件120上，以繞射方式產生 • 一週期性光學條紋130投影於一待測物表面（請參考 第九圖）。 請參閱第二圖係顯示本發明另一條紋投影裝置之 架構示意圖。於本實施例中，該條紋投影裝置為一光 纖式光栅投影裝置200,該光纖式光栅投影裝置200包 含一光源210、光纖250、透鏡240及繞射元件220， 其中該光源210產生一光波，經由透鏡240聚焦並耦 合入光纖250之一端，光波傳導至光纖250之另一端 的該繞射元件220上，以繞射方式產生一週期性光學 • 條紋230投影於一待測物表面（請參考第九圖）。光纖 式光柵投影裝置200具有體積小型化的優點，易於整 合於各式量測系統中，且可製作成可攜式條紋投影裝 置或量測系統。 請繼續參閱第一圖並配合參閱第三圖，該第三圖 係顯示本發明三維形貌量測系統的縱向校正之系統架 構圖。本發明三維形貌量測系統，包含一參考標準片 310、前述條紋投影裝置100、移動平台400、影像感 10 測元件500以及一相位計算單元600，其中該光源110 產生一光波投影於繞射元件120上，以繞射方式產生 一週期性光學條紋130投影於移動平台400上的參考 標準片310表面上，並藉由該影像感測元件500(例如 CCD攝影機)接收該參考標準片310之影像，儲存於相 位計算單元600。該移動平台Z向移動參考標準片 310，且每一 Z向位置(Zi)由影像感測元件500紀錄參 考標準片310之影像的相位值，且儲存於相位計算單 元600中。該參考標準片310為一平整表面，當Z向 移動該參考標準片310時，該參考標準片310表面上 的週期性參考光學條紋之影像保持一定而無扭曲，且 該影像感測元件500得以接收複數個週期性參考光學 條紋之影像儲存於相位計算單元600中。 請再爹閱第四圖係顯不第二圖中之影像感測元件 500之一像素點上的縱深一相位關係曲線圖。藉由該移 動平台400往Z向移動參考標準片310,並再由該影像 感測元件500接收及紀錄參考標準片310每一往Z向 移動之影像的相位值而可得之關係曲線，如第四圖所 示，由第四圖可得知縱深值與相位值之間的關係，如 式（1)之多項式所示： Ζ{φ)= Σ〇ηφη (1) η-0 其中，Ζ為深度值；ρ為相位值；Cn為多項式之係 數；π為移動平台400於Z向移動一距離内的間隔數。 若π值越大，亦為一距離内等分的間隔數越大， 1309294 ' 則可提高演算法結果的精確度，故可依使用者的量測 解析度的需求決定一適當間隔數π。 請參閱第五圖係顯示本發明三維形貌量測系統的 侧向校正之系統架構圖。於此實施例中，提供一具有 一週期性光柵圖案321於另一參考標準片320的表面 上，且該光柵圖案321的光柵延伸方向平行於Υ轴方 向，當Ζ向移動該參考標準片320時，該參考標準片 320表面上的週期性光栅圖案321之影像保持一定而無 • 扭曲，且該影像感測元件500得以接收複數個週期性 光栅圖案321之影像儲存於相位計算單元600中。於 測得該光栅圖案321的光栅延伸方向平行於Υ軸方向 之影像的相位值後，再將該參考標準片320轉置90 度’使光拇圖案3 21的光糖延伸方向平行於X轴方向^ 當Ζ向移動該參考標準片320時，該參考標準片320 表面上的週期性光柵圖案321之影像保持一定而無扭 曲，且該影像感測元件500得以接收複數個週期性光 柵圖案321之影像儲存於相位計算單元600中。 • 請再參閱第六圖及第七圖係顯示第五圖中之影像 感測元件500之一像素點上的縱深一水平位置關係曲 線圖及縱味—垂直位置關係曲線圖。猎由該移動平台 400將光柵圖案的光栅延伸方向平行於Υ軸及X轴方 向之參考標準片310往Ζ向移動，並再由該影像感測 元件500接收及紀錄該參考標準片310每一往Ζ向移 動之影像的相位值而可得之關係曲線，如第六圖及第 七圖所示，由第六圖及第七圖可知，在深度位置Ζ展 12 1309294 開的水平相位队及垂直相位外，可得縱深值與相位值 之間的關係，如式(2)及式(3)之多項式所示： γ — — ——- Κχ (2) (3) κ y 其中’ h及幻;為相對應光栅條紋的波數。 該相位計算單元600計算藉由兩參考 八 (310、3=0)建立之參考座標的相位值後，可顯示 圖中的參考座標的三維虛擬格子800。 /請參閱第九圖係顯示本發明之三維形 的糸統架構圖。在本實施例中， 里測糸、，充 計算上述兩參考標準請單元⑼〇 後，令-待測物700置於移動平么的相位值 上，该影像感測元件500取得 ：表面 紋影像，並儲存於相位處理單_ Λ 、表面之條 測物之條紋影像之三維相位即時計算待 虛擬格子_，可得如第十g 於彡考座標的三維 720。 針81中剌物之三維形貌 上述之條紋投影裝置1〇〇 置200,可將三維形貌量測=光纖式光柵投影裝 攜式三維形貌量測系統。4小型化’且可製作成可 其中’條紋投影裝置， 200之光源（110或210)可為裁式光柵投影裳置 或咖光源），該低_光源對繞射的光栅圖案有^ 1309294 • 的空間相干性（spatial coherence)，可提高光柵投影於待 測物的景深，尤其是對於大尺寸待測物的量測；且該 光源（110或210)具有較差的時間相干性（temporal coherence)，可降低影像感測單元取得的條紋影像的 光斑干擾，提高量測的精確度，且該繞射元件（120或 220)可為體積式全像片，其依選用的材料不同而有不 同全像片厚度的設計（例如ΙΟμπι至50μπι)，在一適當厚 度的體積式全像片中，其滿足不完全符合布拉格繞射 • 之條件，該優點為增加繞射的光柵圖案的均勻性，同 時亦減低光斑的發生。 本發明藉由參考座標的預先建立，待測物置於移 動平台上時，可立即得出待測物之三維形貌，尤其是 量測大尺寸待測物時，透過大型的參考座標系的建 立，亦可得到即時的待測物三維形貌，如此一來，改 進因掃描方式所導致的耗時及量測解析度不佳等缺 點；且低同調光源及一適當厚度的體積式全像片的選 用，有效地增加繞射的圖案之均勻性，同時亦減低光 鲁 斑的干擾。 在詳細說明本發明的較佳實施例之後，熟悉該項 技術人士可清楚的暸解，在不脫離下述申請專利範圍 的與精神下進行各種變化與改變，且本發明亦不受限 於說明書中所舉實施例的實施方式，例如本發明之條 紋投影裝置，並不限於使用繞射元件產生一週期性光 學條紋，亦可使用任何可產生週期性光學條紋之元件。 14 ^309294 【圖式簡單說明】 圖第一圖係顯示本發明條紋投影裝置之架構示意 第一圖係顯示本發明光光栅投影裝置 不意圖； 傅 第二圖係顯示本發明三維形貌量測系統的縱 正之系統架構圖； ~a light source for producing the light source for casting a periodic optical strip. Preferably, the stripe projection device comprises: generating a light wave, and a diffractive element; wherein, the diffraction element is incident on the diffractive element in a diffraction manner A generated pattern is projected on the surface of the object to be tested. Preferably, the stripe projection device may be a fiber-optic optical thumb projection device that includes: - a light source for generating a light wave; an optical fiber for conducting a light wave '·- lens' for focusing money, and - winding a radiating element that generates a periodic optical stripe in a diffraction manner; wherein the light wave generated by the light source is focused and coupled into one of the optical fibers by an f lens, and the light wave is conducted in the optical fiber, and the diffractive element is attached to The fiber 8 1309294 is on the other surface. At the end, the periodic optical fringes are generated and projected onto a test object, and the light source can be a high homology light source. Secondly, the light source can be a low coherence light source. Secondly, the diffractive element can be a planar full picture. = Preferably, the diffractive element can be a full volume photo. In the above: the last stripe' makes the learning fringe to project the periodic light, the 岑 and 得, the sheet moves axially, the reference standard stripe ΐΐ Η 得以 得以 得以 得以 得以 得以 得以 得以 得以 得以 得以 得以 得以 得以 得以 得以 得以 得以 得以a reference standard sheet, wherein the parameter has a "periodic stripe", so that the axial movement of the tracer element to receive a plurality of periodic parameters is effective in low low-homology of the light source, eliminating the first The influence of the plaque image, and by the pre-construction of the reference coordinates, when the object to be tested is placed on the mobile platform, it can be discussed, especially when measuring large-sized objects to be tested, and the establishment of the standard system is also The instant three-dimensional shape of the object to be tested is obtained, and thus, the disadvantages such as poor resolution caused by the scanning method are improved. The object or the features of the present invention will be described in detail with reference to the accompanying drawings. . [Embodiment] Please refer to the first figure for a schematic diagram showing the architecture of the stripe projection apparatus 100 of the present invention. The stripe projection device 100 of the present invention comprises a light source 110 and a diffractive element 120, wherein the light source 110 is used to generate a light wave and is projected onto the diffractive element 120 to generate a diffraction pattern. 130 is projected on the surface of a test object (please refer to the ninth figure). Please refer to the second figure for a schematic diagram showing the architecture of another stripe projection device of the present invention. In this embodiment, the stripe projection device is a fiber grating projection device 200. The fiber grating projection device 200 includes a light source 210, an optical fiber 250, a lens 240, and a diffractive element 220. The light source 210 generates a light wave. Focused through lens 240 and coupled into one end of optical fiber 250, the light wave is conducted to the diffractive element 220 at the other end of the optical fiber 250 to generate a periodic optical fringe 230 to be projected onto a surface of the object to be tested (refer to Figure IX). The fiber-optic grating projection apparatus 200 has the advantage of being compact in size, is easy to integrate into various measurement systems, and can be fabricated into a portable stripe projection device or measurement system. Please refer to the first figure and with reference to the third figure, which is a system architecture diagram showing the longitudinal correction of the three-dimensional topography measuring system of the present invention. The three-dimensional topography measuring system of the present invention comprises a reference standard sheet 310, the stripe projection device 100, a moving platform 400, an image sensing component 500, and a phase calculating unit 600, wherein the light source 110 generates a light wave projection on the diffraction On the component 120, a periodic optical strip 130 is projected on the surface of the reference standard sheet 310 on the moving platform 400 in a diffractive manner, and the reference standard sheet 310 is received by the image sensing component 500 (for example, a CCD camera). The image is stored in the phase calculation unit 600. The mobile platform Z moves the reference standard slice 310, and the phase value of the image of the reference standard slice 310 is recorded by the image sensing component 500 for each Z-direction position (Zi), and is stored in the phase calculation unit 600. The reference standard sheet 310 is a flat surface. When the reference standard sheet 310 is moved in the Z direction, the image of the periodic reference optical stripe on the surface of the reference standard sheet 310 is kept constant without distortion, and the image sensing element 500 is enabled. The image receiving the plurality of periodic reference optical stripes is stored in the phase calculation unit 600. Please refer to the fourth figure to show the depth-phase relationship diagram at one pixel of the image sensing element 500 in the second figure. The mobile platform 400 moves the reference standard slice 310 to the Z direction, and then receives and records the phase value of the image of the reference standard slice 310 moving in the Z direction by the image sensing component 500, such as As shown in the fourth figure, the relationship between the depth value and the phase value can be known from the fourth graph, as shown by the polynomial of equation (1): Ζ{φ)= Σ〇ηφη (1) η-0 where Ζ The depth value; ρ is the phase value; Cn is the coefficient of the polynomial; π is the number of intervals in which the mobile platform 400 moves within a distance of the Z direction. If the value of π is larger, the larger the interval is equally divided within one distance, the 1309294 ' can improve the accuracy of the algorithm result, so the appropriate interval number π can be determined according to the user's demand for the resolution. Please refer to the fifth figure for a system architecture diagram showing the lateral correction of the three-dimensional topography measurement system of the present invention. In this embodiment, a periodic grating pattern 321 is provided on the surface of the other reference standard sheet 320, and the grating extending direction of the grating pattern 321 is parallel to the x-axis direction, and the reference standard sheet 320 is moved in the lateral direction. The image of the periodic grating pattern 321 on the surface of the reference standard sheet 320 is kept constant without distortion, and the image sensing element 500 receives the image of the plurality of periodic grating patterns 321 and stores it in the phase calculating unit 600. After measuring the phase value of the image in which the grating extending direction of the grating pattern 321 is parallel to the axis direction, the reference standard sheet 320 is rotated by 90 degrees to make the light sugar extending direction of the light thumb pattern 3 21 parallel to the X axis. Direction ^ When the reference standard sheet 320 is moved, the image of the periodic grating pattern 321 on the surface of the reference standard sheet 320 is kept constant without distortion, and the image sensing element 500 is capable of receiving a plurality of periodic grating patterns 321 The image is stored in the phase calculation unit 600. • Please refer to the sixth and seventh figures for the depth-to-horizontal positional relationship diagram and the vertical-vertical position relationship diagram at one pixel of the image sensing element 500 in the fifth figure. The mobile platform 400 moves the grating extending direction of the grating pattern parallel to the reference axis 310 of the x-axis and the X-axis direction, and then receives and records the reference standard sheet 310 by the image sensing component 500. The relationship between the phase values of the images moving toward the camera, as shown in the sixth and seventh figures, can be seen from the sixth and seventh figures, and the horizontal phase team opened at 12 1309294 in the depth position. Outside the vertical phase, the relationship between the depth value and the phase value can be obtained, as shown by the polynomial of equations (2) and (3): γ — — ———— Κχ (2) (3) κ y where 'h and Magic; the number of waves corresponding to the grating stripe. The phase calculation unit 600 calculates the phase value of the reference coordinate established by the two reference eights (310, 3 = 0), and displays the three-dimensional virtual lattice 800 of the reference coordinate in the figure. / Please refer to the ninth diagram showing the three-dimensional structure of the present invention. In this embodiment, after the measurement of the two reference standards, the unit (9) is calculated, and then the object to be tested 700 is placed on the phase value of the moving flat. The image sensing element 500 obtains: the surface texture image. And stored in the phase processing sheet _ Λ, the surface of the stripe image of the stripe image of the three-dimensional phase of the real-time calculation of the virtual grid _, can be obtained as the tenth g 彡 座 coordinates of the three-dimensional 720. The three-dimensional shape of the object in the needle 81 The above-mentioned stripe projection device 1 is set to 200, and the three-dimensional shape measurement = fiber grating projection type three-dimensional topography measurement system can be performed. 4 miniaturized 'and can be made into a 'striped projection device, 200 light source (110 or 210) can be a cropped grating projection skirt or coffee source), the low-source pair of diffraction grating pattern ^ 1309294 • Spatial coherence, which can improve the depth of field of the grating projection on the object to be tested, especially for the measurement of large-sized objects; and the source (110 or 210) has poor temporal coherence. The speckle interference of the fringe image obtained by the image sensing unit can be reduced, and the accuracy of the measurement can be improved, and the diffractive component (120 or 220) can be a volumetric full-image, which is different according to different materials selected. The design of the film thickness (for example, ΙΟμπι to 50μπι), in a volumetric hologram of appropriate thickness, satisfies the condition of not fully conforming to the Bragg diffraction, which is to increase the uniformity of the diffraction grating pattern while It also reduces the occurrence of light spots. The invention is pre-established by reference coordinates, and when the object to be tested is placed on the mobile platform, the three-dimensional shape of the object to be tested can be immediately obtained, especially when measuring the large-sized object to be tested, through the establishment of a large reference coordinate system. It can also obtain the instant three-dimensional shape of the object to be tested, so as to improve the time-consuming and poor measurement resolution caused by the scanning method; and the low-coherence light source and a volumetric full-length film of appropriate thickness The selection effectively increases the uniformity of the diffraction pattern and also reduces the interference of the light spot. Various changes and modifications can be made without departing from the spirit and scope of the invention, and the invention is not limited by the description. Embodiments of the illustrated embodiment, such as the stripe projection device of the present invention, are not limited to the use of diffractive elements to produce a periodic optical stripe, and any element that produces periodic optical striping may be used. 14 ^ 309294 BRIEF DESCRIPTION OF THE DRAWINGS The first diagram shows the architecture of the stripe projection apparatus of the present invention. The first diagram shows the optical grating projection apparatus of the present invention. The second diagram shows the three-dimensional topography measurement of the present invention. Systematic vertical system architecture diagram; ~
第四圖係顯示第三圖中之影像感測元件之 點上的縱深一相位關係曲線圖； ’、 第五圖係顯示本發明三維形貌量測系統 正之系統架構圖； D仅 第六圖係顯示第五圖中之影像感測元件之— 點上的縱深—水平位置關係曲線圖； ” 第七圖係顯示第五圖中之影像感測元件之— 點上的縱深一垂直位置關係曲線圖； ’、The fourth figure shows the depth-phase relationship diagram at the point of the image sensing element in the third figure; ', the fifth figure shows the system architecture diagram of the three-dimensional topography measurement system of the present invention; D is only the sixth figure The figure shows the depth-horizontal position relationship of the image sensing element in the fifth figure; ” The seventh figure shows the depth-to-vertical position curve of the image sensing element in the fifth figure. Figure; ',
第八圖係顯示本發明參考座標的三維虛 意圖； 〜卞不 第九圖係顯示本發明三維形貌量測系統的系統尹 構圖；及 、木 第十圖係顯示本發明待測物之三維形貌之厂立 圖。 不思 【主要元件符號說明】 100 條紋投影裝置 110 光源 120 繞射元件 15 1309294The eighth figure shows the three-dimensional virtual intention of the reference coordinate of the present invention; the ninth figure shows the system Yin composition of the three-dimensional topography measuring system of the present invention; and the tenth figure shows the three-dimensional image of the object to be tested of the present invention. The factory image of the shape. Do not think [Main component symbol description] 100 stripe projection device 110 Light source 120 Diffractive element 15 1309294
130 週期性光學條紋 200 光纖式光栅投影裝置 210 光源 220 繞射元件 230 週期性光學條紋 240 透鏡 250 光纖 310 參考標準片 320 參考標準片 321 週期性光栅圖案 400 移動平台 500 影像感測元件 600 相位處理單元 610 顯示器 700 待測物 720 待測物之三維形貌 800 參考座標的三維虛擬格子130 Periodic Optical Stripe 200 Fiber Optic Grating Projector 210 Light Source 220 Diffraction Element 230 Periodic Optical Stripe 240 Lens 250 Fiber 310 Reference Standard 320 Reference Standard Sheet 321 Periodic Grating Pattern 400 Mobile Platform 500 Image Sensing Element 600 Phase Processing Unit 610 Display 700 Object to be tested 720 Three-dimensional topography of the object to be tested 800 Three-dimensional virtual grid of reference coordinates
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