TWI306782B - Suspension for showerhead in process chamber - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention This invention relates to an apparatus and method for suspending a sprinkler head for dispensing gas to the manufacture of flat panel displays, semiconductors, and other electronic components. Vacuum processing room. More specifically, the present invention relates to minimizing stress due to thermal expansion and contraction of the suspension mechanism and the showerhead. [Prior Art]

Electronic components such as flat panel displays and integrated circuits are typically fabricated by a series of process steps that deposit several layers on a substrate and etch the deposited material into a desired pattern. The process steps typically include a plasma enhanced chemical vapor deposition process, a thermochemical (non-plasma) vapor deposition process, and a plasma enhanced etch process. The substrate is typically placed on a suspension (also referred to as a suction cup or workpiece support) in a vacuum processing chamber (referred to as a process chamber). Chemical vapor deposition and etching processes typically require the substrate to be at elevated temperatures to allow the suspension to be heated by certain mechanisms such as electrical resistance or radiant heating. In the plasma process, the plasma supplies additional heat to the substrate and suspension. The process gas mixture is typically dispensed into the process chamber via a gas distribution plate (commonly referred to as a sprinkler or sprinkler with hundreds or thousands of holes or channels through). The sprinkler head typically has a flat or slightly curved lower surface disposed adjacent or parallel to the upper surface of the substrate (and the hanger) and the gas passages are distributed throughout the surface of the sprinkler head for dispensing The process gas of the sprinkler is evenly distributed over the area of the substrate (and the hanger).

5 • 1306782 In a plasma process, electrical or electromagnetic energy can be coupled to the process gas to excite it into a plasma state. Electricity will decouple the gas mixture into ionic species to perform the desired deposition or etching process. In a capacitor-excited plasma processing chamber, the plasma is excited by an RF power source applied between the showerhead (as the anode) and the suspension (as the cathode). An example of a sprinkler head in a plasma processing chamber is disclosed in U.S. Patent No. 4,8,5,2, the entire disclosure of which is incorporated herein by reference.

It is generally desirable that the sprinkler head be maintained at a temperature comparable to that of the suspension so that the sprinkler does not cool the suspension. In the past, the sprinkler head was designed to mount the sprinkler head on the wall of the process chamber with a relatively thick mounting flange, wherein the flange was maintained by the heat of the sprinkler head being directed to the relatively cold chamber wall of the process chamber. Unpleasant low temperature. Conversely, US Patent No. 6,477,980, which was awarded by White et al. on November 12, 2002 and assigned to the assignee of this case, and by Keller et al. on August 10, 2004, was transferred to the case. In the case of U.S. Patent No. 6,7, 2,8, 2, 7, an improved sprinkler head suspension mechanism having a thin suspension wall having a high thermal impedance for the heat absorbed by the sprinkler head is disclosed ( The heated suspension and the plasma are maintained in the sprinkler head so that the sprinkler temperature is comparable to the temperature of the sprinkler. It is further disclosed in the aforementioned U.S. Patent Nos. 6,477,980 and 6,772,827 that the suspension wall is bendable to accommodate thermal expansion of the heated showerhead. For example, the first two patents describe a rectangular aluminum sprinkler head separated by four suspension members (suspension walls), and the four suspension members are respectively attached to the four sides of the sprinkler head, each suspension wall It is a rectangular aluminum foil. Each of the sheets is sufficiently thin to bend so that it can flex rapidly in a direction substantially perpendicular to the surface of the sheet to accommodate the thermal expansion of the sprinkler 6.1306782.

The aforementioned U.S. Patent No. 6,772,827 (Figs. 5-7 and 17) further describes an additional modification in which each of the suspension walls is not rigidly attached to the showerhead but is convex downwardly by the edge of the showerhead. The incoming pins are connected to engage the corresponding slits in the bottom flange of each of the hanging walls. The slits are larger than the pins so that the suspension walls can slide relative to the sprinkler head in a horizontal direction parallel to the plane of the suspension wall (i.e., perpendicular to the direction in which the suspension wall is bent). As described in the patent, such sliding is advantageous for accommodating the rapid thermal contraction of the suspension mechanism when the process chamber cover is open to the atmosphere, as it allows the suspension mechanism to cool the thicker spray head faster. . However, Applicants have found that the stiction of aluminum sometimes prevents the suspension wall from sliding relative to the sprinkler head when the temperature of the bottom flange of the sprinkler head and suspension mechanism exceeds 220 degrees Celsius. Therefore, if the process chamber cover member is opened after the suspension mechanism is still hot, the suspension mechanism may be subjected to thermal shock, causing the suspension mechanism to rapidly cool and contract while the bottom flange remains adhered to the shower head. In addition, even if the pin and the slit can successfully resist the stress between the suspension mechanism and the sprinkler head, the pins and slits cannot block the rapid temperature difference between the upper and lower portions of the suspension wall in the suspension wall. Potentially harmful stresses. Applicants have found that such rapid temperature differences typically occur when the thermal suspension is suddenly cooled. Such rapid cooling can also occur after a high temperature process step (e.g., a thermal vapor deposition or a plasma process step) followed by a low temperature step (e.g., a process chamber clean step). Therefore, there is still a need in the industry for improved designs that reduce thermally induced stresses in the suspension walls. 7 1306782 SUMMARY OF THE INVENTION The present invention includes various embodiments that can be used individually or in combination to improve thermally induced stresses in the suspension wall.

One aspect of the present invention is a gas-tight periphery for enclosing the side of the volume (ie, the intake space), wherein the process gas can enter the sprinkler head through the air inlets in the side of the processing chamber wall. The outlet. Since the gas seal peripheral has a gas enclosing function, the suspending mechanism is preferably disposed outside the volume enclosed by the gas seal periphery so that the gas seal peripheral protection suspension mechanism is not exposed to the process gas. More specifically, the gas seal perimeter is attached to the process chamber wall or sprinkler head, but is not connected to both. The gas seal periphery is not connected to the process chamber wall or the upper or lower end of the sprinkler head can be separated from the process chamber wall or the sprinkler head by a plurality of gaps, wherein the joint area of the gaps is not greater than the surface area outside the gas seal periphery one third. A second aspect of the invention is a suspension mechanism having one or more suspension walls, each suspension wall including one or more openings that collectively occupy at least five percent of the area of the suspension wall. The openings reduce the area of the suspended wall exposed to the gas in the process chamber to reduce stress in the suspension mechanism and thereby reduce the rate of heat transfer between the suspension mechanism and the gas. Such openings are particularly advantageous for reducing stress (thermal shock) within the suspension wall when the process chamber cover is inadvertently opened and the interior of the processing chamber is exposed to the surrounding atmosphere without first cooling the chamber components. These openings reduce the area of cooling air that protrudes into the processing chamber when the suspension wall is exposed to ambient atmospheric pressure. A third aspect of the invention is a suspension having one or more suspension walls 8

1306782 Mechanisms, each of which includes one or more substantially vertically disposed (rifts). The one or more substantially vertically disposed slits may be a substantially vertical single slit, or a plurality of slits of any shape spaced substantially perpendicular to one another. For the purposes of this patent specification and the scope of the patent application, "approximately I means a vertical angle of 45 degrees. The slit may be a slit of any shape, a perforation opening, extending the entire wall through the suspension wall. Alternatively, the breach may not be the entire By means of the grooves or notches of the suspension wall, preferably, the cracks can improve the stress in the suspension wall by means of the wall at the weak crack location, whereby the suspension wall responds to the horizontal bending or deformation of the thermal stress. A fourth aspect of the invention includes replacing at least one of the suspensions with a plurality of suspension walls, wherein the central portions of the plurality of suspension walls are coplanar. One, three or more coplanar suspension walls are substituted The manner of suspending the wall is less than two, three or more times the width of each suspension wall, thereby correspondingly reducing the horizontal component of any thermally induced stress in the hanging wall. [Embodiment] 1. Process chamber overview 1st Figure 2 shows a process chamber including a hairspray sprinkler 20 and a gas seal peripheral 70. Other components of the process chamber will be described in the description of the invention. The process chamber is suitable for chemistry Handling work pieces or substrates 10 The chemical treatment is a series of steps in the steps of manufacturing an electronic component such as a flat panel display or a semiconductor on a workpiece. The workpiece is supported in the processing chamber by a support member 12, which is also referred to as an electrostatic crack. The direction of elongation is straight or the extension is extended by the cutting aid to the wall to reduce the vacuum, (for example, by the suction cup 9 1306782 or the susceptor). The workpiece can be processed in the processing chamber. Common examples include a rectangular glass substrate on which a flat panel display can be fabricated, or a circular semiconductor wafer on which an integrated circuit can be fabricated.

The process chamber has a lid or chamber wall 14, 16, 18 that allows the chamber interior to be vacuum sealed. In the illustrated embodiment, the side walls and bottom sill of the processing chamber can also be fabricated as a single wall 14. A hinge member 16 and an intake manifold top wall 18 are provided at the top of the processing chamber wall. The worker can enter and exit the interior of the processing chamber by lifting or removing the cover member 16. Type 0 rings 45, 46, 48 (not shown) provide a vacuum seal between the process chamber side wall and bottom sill 14, the process chamber cover 16 and the intake manifold top wall 18. The process chamber side wall and bottom sill 14 , the process chamber cover member 16 and the intake manifold top wall 18 are all part of the process chamber wall. One or more process gases are dispensed into the processing chamber via the intake manifold during processing of the semiconductor or other electronic components on the workpiece. The intake manifold includes an intake manifold top wall 18, a sprinkler head 20 (also referred to as a diffuser or a gas diffuser), and an intake manifold sidewall (which will be further defined below), which together surround one The volume, referred to herein as the gas inlet plenum 30, constitutes the interior region of the intake manifold. At least one of the intake passages 26 is coupled between an external source of gas (not shown) and the intake space 30. In the embodiment of Figure 1, the intake passage is an opening or tube portion that extends through the top wall 18 of the intake manifold. The gas source can supply a process gas to the intake passage 26, from which the gas flows into the intake space 30, and then flows into the processing chamber from the intake space via the outlet passage 22 in the sprinkler 20. Hundreds or thousands of individual intake passages 2 2 are usually evenly distributed over the sprinkler head

10

The entire area of 1306782. A conventional vacuum pump (not shown) can maintain the processing chamber at a desired level, and discharge the process gas and the reaction processing chamber through the annular exhaust slit 31, and then discharge into the annular exhaust space 3 2, The pump is then accessed through a drain (not shown). The intake manifold sidewall is defined as one or more process chamber components that together provide a gas tightness between the intake manifold top wall 18 and the sprinkler head 20 in the preferred embodiment shown in FIG. A novel gas seal 70 (described in more detail below) can also be used as the intake manifold sidewall. In an alternative embodiment where no gas is present (but the remainder are the same), the suspension mechanism 50 can be ingested into the manifold sidewall. The side wall of the intake manifold should be capable of providing a sufficiently tight gas seal that is sufficient to prevent gas leakage (by flowing through the sprinkler outlet passage 2 2 rather than the gap in the side of the gas manifold) to allow inflow of air into the air Most of the P gas enters the process chamber. The acceptable amount of leakage is taken from the process performed on the work piece, but in most processes the leak should be less than one hundred. That is, only ten percent (tenth) of the oxygen entering the intake space via the intake passage 26 should be leaked through the sidewall of the intake manifold, so that ninety percent of the gas passes through the intake passage 2 2 Assigned to the process chamber. In the case of the gas entering the intake space, there should be no more than 5% of the gas leaking through the sidewalls of the intake manifold. The intake manifold generally includes a gas deflector 28 to prevent gas from being in a straight path from the inlet passage 22 at the center of the nozzle of the intake passage 26 to assist in the spontaneous flow of the spray. , its seal. The peripheral seal is as follows, from J] 3 0 to less than less than 100 worst than forty inlet into the head 11 1306782 The gas flow rate at the heart and the edge is uniformized. In the embodiment of Fig. 1, the intake steering plate 28 is composed of a circular disk having a diameter slightly larger than the diameter of the intake passage 26 and suspended by the column portion (not shown) below the intake passage. In the preferred embodiment, the showerhead 20 is a 3 cm thick aluminum panel. Preferably, the aluminum sheet should be thick enough to not significantly deform when a vacuum is created in the processing chamber at atmospheric pressure.

The sprinkler head 20 is surrounded by a flexible suspension mechanism that includes one or more suspension walls 50. The bending properties of the suspension mechanism accommodate rapid expansion and contraction of the showerhead as the temperature rises and falls. The suspension mechanism will be described in detail below in the heading "2. Flexible suspension mechanism for sprinkler heads". Certain types of work piece manufacturing processes (e.g., thermal chemical vapor deposition) performed in a process chamber are performed without plasma. Many other processes, such as plasma enhanced chemical vapor deposition or plasma etching processes, require plasma. The process chamber suitable for the plasma process is called a plasma processing chamber. In a type of plasma processing chamber, the power source is formed or maintained in the processing chamber by means of a capacitively coupled power source (using a radio frequency power supply (not shown) connected to the electrodes in the processing chamber). In the capacitively coupled plasma processing chamber, the showerhead 20 is typically comprised of a conductive material, preferably aluminum, to serve as an electrode. Therefore, it is important to provide a fully conductive and stable electrical contact to the sprinkler head to handle the high level of RF power (usually in kilowatts). In some plasma processing chamber configurations, the showerhead 20 is directly connected to the electrically grounded chamber walls 14-18. However, in the plasma processing chamber configuration of the illustrated embodiment, the showerhead 20 is electrically connected to the RF power supply.

1306782 Ground output so that the sprinkler head acts as the anode. The process chamber side and bottom dam 14 and the chamber cover 16 are connected to the electrical ground and thus act as a cathode. The suspension or work piece support 12 is also typically electrically grounded, but is selectively connectable to a second RF power supply (commonly referred to as a bias power supply). This is useful whether the sprinkler head is powered by RF. Because the intake manifold top wall 18 and the sprinkler 20 are RF powered, the interposer 3 3, 3 4, 3 5, 3 6 is mounted to the RF powered component and the electrically grounded process chamber cover 16 between. To concentrate the plasma between the workpiece support 12 and the showerhead 20 in the processing chamber, other metal surfaces in the processing chamber adjacent to the workpiece support or sprinkler are typically covered with a dielectric liner. For example, Figure 1 shows a dielectric liner 38 covering the inner surface of the process chamber sidewall 14 from a dielectric liner 37 covering the process chamber cover 16. The cover 19 is typically attached to the top of the process chamber cover 16 to ensure that the operator does not accidentally contact the RF powered top wall 18 or sprinkler head. The function of the cover 1 9 for the other process chamber components described herein is not so important and will not be discussed further below. In the plasma processing chamber, the diameter of the outlet passage 2 in the sprinkler head should be small to the width of the dark region of the plasma to prevent the plasma in the plasma processing chamber from entering the intake space. The width of the dark zone and the optimum diameter of the corresponding exhaust passage are other parameters of the process chamber pressure of the particular semiconductor fabrication process to be performed by the process chamber. Alternatively, in order to carry out the sizing process with a reagent gas which is particularly difficult to decompose, it is generally possible to utilize a channel having a narrow inlet and a wide, horn-like opening, as described in the above-mentioned U.S. Patent No. 4,854,263 to Chang et al. From the device to the electric property as a support case and protect against the air and power out

1306782 Process chamber components shall consist of components that do not contaminate the semiconductor fabrication process (to be implemented in the process chamber) and that are resistant to process gas corrosion. Aluminum is a preferred material that we consider to be used to treat all components in the room (except 0-rings and dielectric pads 3 3 - 3 6). 2. Flexible suspension mechanism for sprinkler heads Figures 2 and 3 show the suspension mechanism in more detail. The sprinkler head 20 is suspended by a bendable suspension mechanism that includes one or more flexible suspension walls 50. The flexibility of the suspension mechanism accommodates the rapid expansion and contraction of the sprinkler head as the temperature rises and falls. The amount of expansion of the sprinkler 20 is proportional to both the temperature of the sprinkler head and its width. Due to the width, it is important to accommodate the thermal expansion of the sprinkler head without mechanical strain when handling larger sprinkler heads for larger workpieces (e.g., large panel displays). In order to minimize the heat transfer from the workpiece and the suspension to the showerhead, it is generally desirable to maintain the sprinkler temperature at 305 to 4,000 degrees Celsius while performing a chemical vapor deposition process in the processing chamber. At such high temperatures, the aluminum sprinkler will have about one percent (1%) expansion in all dimensions. For example, a sprinkler head with a width of 1 〇 5 cm X 1 2 5 cm will expand by about 12 cm. The edges of the sprinkler head expand outward by half (〇. 5 %) outward relative to the fixed reference point at the center of the sprinkler head. During normal operation of the processing chamber, when the width of the showerhead 20 expands in response to an increase in its temperature, the showerhead pushes the bendable suspension wall 50 outwardly (i.e., along the radial direction of the showerhead, which is approximately The amount of expansion of the sprinkler head perpendicular to the plane of the suspension mechanism. 14

1306782 To support the weight of the sprinkler head, the upper portion of the bendable suspension mechanism 50 is directly or indirectly connected to the treatment chamber wall 14-14, and the suspension mechanism is also directly or indirectly connected to the sprinkler head 20. Intermediate elements such as dielectric pads or mounting flanges may be connected between the upper portion of the "indirect connection" mechanism and the process chamber wall. Similarly, the aforementioned intermediate member can also be between the lower portion of the suspension mechanism and the showerhead. In the present specification, when two elements are described as being connected, it is specifically indicated that otherwise they may be directly or indirectly connected, and two may also be constructed as a single material component, rather than two separate components, for example, suspended. The mechanism 50 and the sprinkler 20 can be machined from a single piece of aluminum. The embodiment shown is for processing a rectangular glass substrate or workpiece 10 on which a flat panel display is to be fabricated. The workpiece support or the crystal holder 1 2, the manifold top wall 18 and the sprinkler head 20 are all rectangular in cross section. The suspension mechanism includes four suspension walls 50 that are respectively connected to the four sides of the showerhead. Each of the four walls is an aluminum sheet having a central planar portion extending between the top wall 18 of the intake manifold and the head. The central plane portion is thin enough to bend to bend in response to thermal expansion and contraction of the showerhead. Each of the four sheets 50 is bent at a right angle near its upper end to form an upper flange 52; and bent at a right angle near its lower end to form a lower portion 54, as shown in Fig. 3. The flanges 5 2 above each of the suspension walls 50 are attached to the intake top wall 18 by bolts 40. Preferably, each of the upper flanges 52 and the top wall of the intake manifold may be reinforced by an aluminum strip 42 having a U-shaped cross section extending the entire width of each edge 52 and located at the bolt head. And between the upper flanges. The part of the department refers to the suspension, and the connection is made unless the component is connected. Searching. The large intake air is at least suspended and sprayed so that it is connected by a flanged manifold.

1306782 The embodiment includes four reinforcing strips 4 2, each of which is fitted with a portion. The flanges 54 4 below each of the suspension walls are slidably mounted in the grooves 6 2 in the sprinkler head 60. The lower flange 5 4 is unavoidably slipped out of the groove 6 2 , and the lower flange has a plurality of mounting holes 5 6 , 5 7 , and each of the mounting holes is fitted with a corresponding pin 6 4 extending downward from the edge of the sprinkler head. As shown in Fig. 2, the sprinkler head includes a cutout adjacent to each pin to provide space for the pin to be inserted. After insertion, the lower ends of the pins can be bent inwardly to engage the sprinkler head. The small edge of the edge is above the protruding portion to prevent the pin from falling in. As shown in Fig. 3, a few of the mountings 56 near the center of each lower flange 504 are circular, the diameter of which is only slightly larger than the diameter of the pin, and the boundary between the spray center and the suspended wall 50 is maintained. Align. The remaining mounting holes 57 are elongated in a direction parallel to the long diameter of the lower flange to allow the sprinkler head and the lower flange to be oriented (i.e., along the horizontal direction of the parallel sprinkler head and the center of the vertical cantilever) The vertical direction of the plane has relative thermal expansion and contraction. The bendable suspension mechanism 50 can support the entire weight of the spray in the first embodiment of Fig. 1. Since the suspension mechanism of this embodiment only supports the sprinkler head adjacent its edge, the center of the sprinkler head will sink over time. In order to avoid centering, it is preferred to add the sprinkler head center support 1 〇 0 -1 0 8 to the suspension mechanism as shown in Fig. 4. The sprinkler head center support 1 00- 1 08 has a tubular gas guide 100 that extends through a central opening in the top wall 18 of the intake manifold. The sprinkler head has a recess at the center of its upper surface that extends the sprinkler head by approximately two-thirds of its depth. The lower end of the gas conduit extends to the recess and mechanically supports the center of the sprinkler by a flange which is extended from the lower end of the gas conduit to the outer radial edge of each of the spouts. The support is 16 1306782 adjacent to the bottom surface of the complementary flange of the sprinkler head (radially extending inwardly over the opening of the recess). Thus, the center support member 100-108 supports a portion of the weight of the sprinkler head, while the flexible suspension mechanism 50 supports the remaining weight.

A plurality of radially extending gas passages 1 0 2 couple the gas conduits 100 to the intake space 30. One or more downwardly extending passages 104 couple the interior of the gas conduit to the space between the bottom of the cavity or gas conduit and the upper end of the sprinkler gas passage 2 2 (below the recess). Therefore, the gas conduit 100 and the gas passages 102, 104 are internally combined to become the intake passage 26. The upper end of the gas conduit 1 0 0 is attached to the process chamber cover 19 by a mounting ring 106 and a brake screw 1〇8 (the gas conduit height can be adjusted). Raising the gas conduit raises the center of the sprinkler 102. Therefore, the height of the gas conduit can be adjusted to avoid sinking the center of the sprinkler or reaching the desired contour of the sprinkler head. The mounting ring 106 extends through the processing chamber cover around a portion of the gas conduit 100. The mounting ring 106 is rigidly attached to the process chamber cover, preferably by means of bolts. The upper end of the gas conduit is attached to the upper end of the mounting ring by a plurality of brake screws so that the height of the gas conduit can be adjusted by rotating the bolt. More specifically, the upper end of the gas conduit has an outwardly extending flange having a plurality of threaded holes for receiving the brake screw. The lower end of each bolt extends to a threaded hole in the mounting ring. The jack screw is a common bolt, and the term "j ack" is only used to describe its function. All of the aspects described below of the present invention are useful for the embodiment of Figure 4 having a sprinkler head center support and the embodiment of Figure 1 without the aforementioned center support.

17 .1306782 3. The problem of the suspension mechanism stress during cooling is to minimize the stress caused by the difference in thermal expansion between the suspension mechanism 50 and the sprinkler head 20, and the suspension mechanism and the sprinkler head are preferably made of the same material. Aluminum is preferred so that it has the same amount of expansion and contraction in response to temperature differences. In addition, the method of slidingly attaching the lower flange of each suspension wall to the sprinkler head (using a plurality of pins that are engaged with the elongated holes) as described above allows for a specific relative movement between the suspension wall and the sprinkler head. The amount to accommodate the difference in thermal expansion that may be caused by the temperature difference between the suspension wall and the showerhead.

However, as described in the Background of the Invention, rapid differences in temperature gradients within the suspension wall can cause stress in the suspension wall and eventually deform, rupture or tear the suspension mechanism. In practice, this rapid difference in temperature gradient is usually caused by rapid cooling of the suspension wall during high temperature processing steps (such as thermal chemical vapor deposition or plasma processing steps) in the process sequence. Similarly, if the process chamber cover 16 is inadvertently opened and the suspension wall 50 is exposed to the surrounding atmosphere without rapid cooling of the process chamber components (especially the sprinkler head) to room temperature, the rapid cooling is rapid. Cooling will happen. When the aforementioned rapid cooling occurs, the suspension wall 50 will typically cool faster than the showerhead 20 because it may be thinner (and therefore lower in thermal mass) than the showerhead. The hanging wall tends to be so thin that it can be bent so that it can flex outwardly to accommodate the thermal expansion of the sprinkler head. Conversely, the sprinkler head should be at least thick enough to avoid deformation of the contour of the lower surface when the sprinkler head responds to the temperature gradient, as any of the foregoing variations will result in spatial non-uniformity in the process being performed on the workpiece. For example, in the preferred embodiment, the thickness of the wall is 1 mm and the thickness of the nozzle is 30 mm. 18

• 1306782 When the cooling gas is supplied to the intake space 30, the suspension wall 50 has a lower thermal mass of the suspension wall and is cooled faster than the showerhead 20. In addition, the sprinkler head cools slowly and has a high thermal mass, and the sprinkler head heats the lower part of the suspension wall to avoid the cold upper part of the suspended wall 50 and the heat which is cooled in the lower part. The temperature gradient between the lower sections creates mechanical stress in the suspension wall because the upper part cools faster and the lower part shrinks faster than the lower part. Such a machine caused by a temperature gradient is often referred to as thermal stress or thermal shock. The present invention proposes four solutions that can be used alone or in combination with thermal stresses in the low suspension wall: (1) a gas-tight periphery that assists the suspension wall not directly in contact with the process gas; (2) suspension The opening in the wall reduces the chance of the suspension wall being exposed to process gas or temperature when the process chamber cover is opened; (3) - or a plurality of substantially vertically configured slits located in the wall to assist in horizontal bending of the suspension wall Or curved; (4) the center of each of the plurality of suspension walls is coplanar. 4. Gas Seal Periphery As shown in Figures 1, 2, 4 and 5, one aspect of the present invention is a gas seal periphery 70 which is used to seal the lateral volume of the volume (i.e., the intake space 30). Gas will flow into the air outlet 22 in the head 20 via the volume of the air inlet 26 in the wall of the process chamber. In the conventional suspension sprinkler head described in the background of the invention, the intake air measurement edge is enclosed by a suspension wall. In the aspect of the invention, the gas enclosure function is provided by the gas periphery 70 instead of the suspension wall. Therefore, it will be due to the fact that it will be faster. For each reason, the force is lowered to protect, the surrounding is suspended, and the body is dense, and the seal between the spray booths is 19.1306782. The suspension wall 50 is preferably located at the outer circumference of the gas seal (also That is, the outer side of the intake space 3 0) is such that the gas seal periphery is interposed between the intake space 30 and the suspension wall 50, as shown in the preferred embodiments of Figures 1, 2, 4 and 5. In the preferred embodiment, the gas-tight periphery protects the suspension wall from direct contact with the process gas entering the processing chamber, thereby reducing the sudden supply of cold process gas after the thermal process in the processing chamber. Cooling rate and temperature gradient within the suspension mechanism.

In an alternative embodiment of Fig. 4, the flexible suspension wall 50 is maintained outside of the intake space 30, but the suspension mechanism further includes a sprinkler center support 1 〇 in the intake space. That is, the center support member 1 is not protected from the process gas by the gas seal peripheral portion 70. The embodiment is now placed, and with reference to the general description of the invention, the gas seal peripheral 70 extends between an upper portion adjacent the processing chamber wall 14-1.8 and a lower portion adjacent the sprinkler head 20 . As explained in the following three paragraphs, "adjacent" means "connected to", "abutting" or "separated from by" as defined below. One or more of the gaps defined in the following paragraphs). The gas seal perimeter 70 is attached to the process chamber wall or sprinkler head but is not connected to both. That is, the upper end of the gas-tight outer periphery is connected to the processing chamber wall, that is, the lower end of the gas-sealed periphery is connected to the shower head, but not both. Therefore, unlike the suspension mechanism 50 connected to both the processing chamber wall and the sprinkler head, the gas seal periphery does not support the weight of the sprinkler head, and the gas seal peripheral has more degrees of freedom for expansion and Shrinkage, while 20 '1306782 is not limited by the distance between the sprinkler head and the walls of the chamber. The gas seal perimeter is not connected to the process chamber wall or the upper or lower end of the sprinkler head is referred to as the "unconnected" end of the gas seal.

To identify the noun used in the previous paragraph, if the upper end of the gas-tight periphery 70 is connected to the processing chamber wall 14-1, the lower end of the gas-sealed periphery is the "unconnected end" of the gas-tight periphery, and the element (said one com ρ ο nent)" is the sprinkler head 20. On the other hand, if the lower end of the gas seal periphery is connected to the sprinkler head, the upper end of the gas seal periphery is the "unconnected end" of the gas seal outer periphery, and the "one element" is the process chamber wall. Because the gas seal periphery 70 is not connected to any of the process chamber walls 14-18 or the showerhead 20, the unattached upper or lower end of the gas seal perimeter may be separated from the component by a plurality of gaps, wherein the plurality of gaps The number is greater than or equal to zero. If the number of gaps is zero, it indicates that the unconnected end of the gas seal is adjacent to the one element, as shown in the embodiments of Figures 6 and 7, which will be described in more detail below. Figure 8 (also described below) shows a non-zero aspect of the number of gaps between the periphery of the gas seal and the suspension mechanism. The gas seal periphery is configured to surround the side of the process chamber wall and the area between the shower heads so that the process chamber wall, the sprinkler head, the gas seal periphery, and the aforementioned gap can collectively enclose the intake space 30, That is, the process gas can flow from the intake passage 26 into the outlet passage 22 through the space. (The term "envelope" as used herein refers to the side that surrounds or surrounds the aforementioned area, and does not imply an annular shape). As mentioned above, the gas seal periphery is preferably radially inwardly disposed by the suspension wall 50 so that the gas seal periphery is interposed between the air inlet space and the suspension wall 50 211306802, that is, the suspension The hanging wall 50 is located outside the intake space 30. If the number of gaps is zero as previously defined (ie, if there is no gap between the gas-sealed periphery and the unconnected or between the lower ends of the elements) and the gas-sealed periphery is not connected to the component, the aforementioned component is the process chamber wall 1 4 -1 8 or sprinkler head 20, as explained in the previous section), the gas seal periphery 70 will completely block the process gas from flowing through the inlet space 30 to contact the suspension mechanism.

On the other hand, if the gap exists, a part of the process gas entering the intake space 30 leaks from the gaps and contacts the suspension wall 50, thereby unsatisfactorily cooling the suspension wall. A portion of the process gas leaking through the gaps substantially overlaps the area of the gaps with respect to the area of the inner surface 74 of the gas seal periphery (ie, the surface facing the intake space 30, that is, facing the intake air The proportion of the internal 3 0) of the tube is proportional. In order to allow the gas seal periphery to substantially protect the suspension wall from the cooling of the process gas stream, the present invention also contemplates that the joint area of the gaps should not be greater than one third of the inner surface area of the gas seal periphery, preferably no more than ten. One of the points. In the preferred embodiment in which the intake manifold top wall 18 and the sprinkler head 20 have a rectangular cross section, the gas seal periphery 70 preferably includes four pieces that are respectively connected to the four sides of the intake manifold top wall. And each of the four components is preferably a rectangular aluminum sheet. The lower end of each of the gas seal peripherals 70 is preferably suspended adjacent the edge 60 of the showerhead 20 to minimize the size of the gas seal periphery and any gap between the showerheads. In the preferred embodiment illustrated in Figure 2, the upper surface of the sprinkler head edge 60 includes a groove 66 that is adjacent and parallel to the periphery of the sprinkler head. The lower ends of the sheets of the gas-tight periphery extend into the grooves 66 to extend below the upper surface of the showerhead. When the sprinkler head expands in response to the elevated temperature, the radially inner wall of the groove 6 6 22 1306782 will abut and push outwardly toward the lower end of each of the gas seal peripherals 70. Therefore, any gap between the gas seal periphery and the sprinkler head can be neglected to form a good seal between the gas seal periphery and the sprinkler head.

As previously explained in the heading "2. Flexible suspension mechanism for sprinkler heads", the sheets of the gas seal periphery 70 should preferably be thin enough to bend. In the preferred embodiment, each of the sheets is 1 m thick. Because the periphery of the gas seal is bendable, when the sprinkler is heated and radially expanded during operation of the processing chamber, the edge of the sprinkler is pushed radially outwardly and abuts against the lower end of each of the flexible sheets 70 at the periphery of the gas seal so that The gas seal is still in contact with the sprinkler head. Therefore, any gap between the gas seal periphery and the showerhead during the processing chamber operation is negligible at all temperatures. As explained in the second paragraph of the previous heading "2. Flexible suspension mechanism for sprinkler heads", at the normal operating temperature of the plasma processing chamber, the sides of the aluminum sprinkler 20 will be relative to the center thereof. The expansion is about 0.5%. Therefore, the sheets of the periphery of the gas seal may be bent to be sufficiently bent toward the outer diameter (i.e., perpendicular to the plane of the sheet) to be at least 〇 5 % of the horizontal width of one side of the gas seal periphery. The upper ends of the rectangular aluminum sheets of the gas seal periphery 70 may be bent, preferably at right angles, to form an upper flange 724 connectable to the chamber walls 14-14. That is, the upper end of each of the four aluminum sheets is used as the upper flange 72, and the remaining portion of each of the sheets extending downward from the upper flange serves as a gas-sealed periphery 70, and the upper flange 72 can supply gas. Sealed periphery 70 is coupled to process chamber walls 14-18. Preferably, each of the four upper flanges 72 is slid into the same by the same bolt 40 (to smash the flange 5 of the four suspension walls 50 into the top wall of the intake manifold 18). The top wall of the gas manifold is 18. The upper flange 7 2 of the gas seal periphery is preferably 23 • 1306782 extending radially inward from the bolt by a large distance from the flange 52 of the suspension mechanism to allow the gas to seal the periphery 70 and the suspension wall 50 Radially inwardly spaced apart. The radial spacing between the periphery of the gas seal and the wall of the suspension should be large enough to avoid contact with each other when subjected to thermal expansion and contraction. In the preferred embodiment, the radial spacing at room temperature is about 5 mm. Figures 6, 7 and 8 show an alternative design of the portion 60 of the sprinkler head adjacent or adjacent to the lower end of the gas-sealed periphery 70.

In the embodiment of Figure 6, the sheets of the periphery of the gas seal extend below the upper surface of the sprinkler head to radially abut the outer surface of the sprinkler head edge 60. In this embodiment, the plates of the periphery of the gas seal are preferably connected to a position of the wall of the processing chamber such that the upper end of the vertically extending sheet of the gas-sealed periphery is cooled by the showerhead (ie, at room temperature). The circumference of the edge of the sprinkler is slightly radially inward. That is, the lower end of the periphery of the gas seal is outwardly deflected relative to the upper end so that a certain tension can be maintained at all temperatures between the edge of the sprinkler head and the lower end of the gas seal to ensure a gas seal between the periphery and the sprinkler head. Any gap can be ignored at all temperatures. In the embodiment of Fig. 7, the lowermost end of the gas seal periphery is slightly above the upper surface of the shower head 20. The upper surface of the sprinkler head edge 60 includes an upwardly projecting projection or body 6 8 having a radially outer surface that abuts against a radially inner surface of the lower end of each of the sheets of the gas seal periphery. The projections 68 extend parallel to the entire width of each of the sheets surrounding the gas seal to the edge of the showerhead so that any gap between the panel and the periphery of the gas seal is negligible. As shown in Fig. 6, in the embodiment, the sheets of the periphery of the gas seal are preferably connected to a position of the wall of the processing chamber so that the upper end of the vertically extending sheet of the gas seal is sprayed.

1306782 When the head is cooled, the outer surface of the projection 68 from the edge of the sprinkler head is slightly radial toward P. In the embodiment of Fig. 8, the gas seal periphery is not adjacent to any part of the spray 20, but the gas seal is the outermost The lower end is located adjacent the surface of the nozzle edge 60. The area of the gap between the gas seal and the sprinkler should not be larger than the maximum area defined above. Although the unconnected end of the gas seal periphery is the bottom end in the illustrated embodiment, the present invention also contemplates that the unconnected end of the gas seal periphery is a tip end, and the bottom end of the gas seal periphery is connected to the sprinkler head. 5. Openings for reducing the surface area of the suspension wall In order to improve or avoid the aforementioned "3. Problem of the stress of the suspension mechanism during cooling", the second aspect of the present invention is provided in each of the suspension walls 50 to provide a plurality of ports 80. The aforementioned opening reduces the surface area of the suspension wall exposed to the gas in the process chamber and thereby reduces heat transfer between the suspension wall and the gas. Therefore, when the process chamber cover member is opened to allow cold air under ambient pressure to protrude into the treatment, the openings can slow down the cooling rate of the suspension wall, thereby reducing the stress (thermal shock) in the suspension. In order to substantially reduce the heat transfer between the indoor suspension wall 50 and the gas in the process, the openings 80 in each suspension wall should collectively occupy the suspension wall exposed to the gas portion (ie, vertically extending from the processing chamber wall 14-14) and At least five percent, and preferably at least one quarter of the total area of the sprinkler heads. The “total area” referred to above includes the area of the solid part of the suspension wall and the area of the opening. Alternatively, in a stricter aspect of the invention, the openings 80 in each of the suspension walls should share at least five percent of the area of the suspension wall, and preferably the head gentleman, *, 〇 〇 open body The first 80 of the J room wall is less than a quarter of 130 1306782. The total area of the openings 80 does not include the area occupied by or covered by bolts or other fasteners that pass through either opening.

In the preferred embodiment shown in Fig. 9, the openings 80 occupy approximately two-thirds of the area of the vertically extending portions of each of the suspension walls 50. Each of the four suspension walls is vertically elongated such that each opening 80 extends almost the entire vertical height of the suspension wall. In the preferred embodiment, the lateral spacing between the openings is about one-half of the width of each opening such that the openings occupy two-thirds of the area of the vertical portions of each of the suspension walls. In an alternative embodiment shown in Fig. 10, the openings 80 are all extended to the end of the processing chamber wall 1 4 -1 8 or the shower head 20 that is not attached to the suspension mechanism. In the illustrated embodiment, the unattached end of the suspension mechanism is the lower flange 54 at the bottom end of each of the suspension walls 50, so that each of the openings 80 will extend radially through the lower flange so as to be adjacent to the opening 80. Radially extending "fingers" are formed in the lower flanges. In this alternative embodiment, the lower end of each finger includes one of a plurality of mounting holes 56, 57 to fit the corresponding pin 64 in the edge of the sprinkler head such that the lower flange of the suspension mechanism The number of the middle openings 80 is less than the number of the mounting holes 56, 57. Compared with the preferred embodiment of Fig. 9, the alternative embodiment of Fig. 10 has the following advantages: (1) when the suspension wall expands and contracts in the direction of arrow 8 2 (i.e., horizontally in the plane of the suspension wall) The stresses in each of the suspension walls can be further reduced; and (2) the fingers are allowed to twist to accommodate thermal expansion between the sprinkler head and the suspension mechanism. However, the alternative embodiment of Figure 1 has two possible potential drawbacks: (1) The alternative embodiment of Figure 10 may be more difficult to mount the mounting hole in the lower flange 5 4 than the embodiment of Figure 9. 5 6 , 5 7 are aligned with the corresponding pin 6 4 in the garden of the sprinkler head 26 1306782; and (2) the "finger" of the lower flange is susceptible to inadvertent bending when the worker sprinkler head is attached to the suspension mechanism The effect of the discount. Fig. 1 shows a variation of the embodiment of Fig. 9, wherein each opening 80 is not completely cut out by the side wall 50 of the suspension mechanism, but is formed by cutting only around the circumference of the opening, leaving a complete edge (ie, There are edges left in the illustrated embodiment). The full edge can serve as a hinge to allow the suspension mechanism side wall portion 81 in the circumference of the opening to be pushed outwardly to form an opening.

6. or a plurality of vertically disposed slits are heat-induced stresses of the suspension wall described in the above-mentioned heading "3. Problems of stress of the suspension mechanism during cooling", and the third aspect of the present invention is included in each of the suspension walls One or more splits in at least one substantially vertical configuration are provided in the 50. The splits can improve the stress in the suspension wall by weakening the location of the breaching wall to assist in horizontal bending or bending of the wall in response to thermal stress. The aforementioned bending or bending relieves stress to reduce the risk of recurring stresses that ultimately result in deformation, cracking or tearing of the suspension wall. The split can be formed in the suspension wall in a number of ways, such as by cutting, piercing or embossing. In addition, the split can be of any shape and does not need to extend completely through the suspension wall. For example, the slit can be any shape of slit, perforation or opening to extend all the way through the suspension wall. Such a slit may be formed, for example, by cutting or piercing the hanging wall to form a slit without removing any material from the hanging wall, or may form a slit by removing material from the hanging wall to form an opening. Alternatively, the split may be a groove or notch that does not extend entirely through the suspension wall. However, the split does not include bolts or other fixtures (to stabilize the suspension wall 27

The opening occupied by 1306782 attached to other objects, because such a fixed opening cannot perform the function of assisting bending or bending the hanging wall. The one or more substantially vertically disposed slits may be substantially perpendicular to the split (Fig. 12), or a plurality of slits of any shape and substantially vertically spaced (Fig. 13). Figure 12 illustrates a plurality of slits 84 having a plurality of slits 84 in which the vertically elongated slits 84 are vertically oriented so as not to remove the wall material. Figure 1 3 illustrates the sling of a plurality of vertically elongated slits 84, each of which has a vertically elongated slit formed by a plurality of vertically spaced circular openings 86. For the purposes of this patent specification and the scope of the patent application, "substantially vertical" means vertical within 45 degrees. In the embodiment in which the slits of the plurality of shapes are spaced apart in the substantially vertical direction, a plurality of slits are not required to be collinear, and it is only necessary to make the plurality of slits in the direction of the vertical direction within 45 degrees. In order to achieve optimum stress reduction, it is important to have one or more of the suspension walls in a substantially vertical (rather than horizontal) direction. More specifically, the substantially vertical configuration of the split in the suspension wall facilitates bending or bending of the suspension wall in the horizontal direction (arrow 8 2) to relieve the component stress. The vertical stress in the suspension wall can usually be released by bending the suspension wall outward. However, if the slit is not disposed in accordance with the substantially vertical direction, the stress in the horizontal direction is generally not released because the upper portion of each of the suspension walls (for example, 5 2 in FIG. 3) is usually firmly attached in the width direction thereof. At a number of walls of the processing chamber, and the lower portion of each of the suspension walls (for example, the lower projection in FIG. 3 forces a long unidirectionally elongated slit E 50 with 84 lines perpendicular to any slit and When the elongation of the slit is clear and its plane is horizontal or toward the invention to be immediately applied to the upper flange -18: 54) pass 28 1306782 is often firmly connected to the edge 60 of the sprinkler head 20, otherwise its horizontal expansion It will be limited by the width of the elongated mounting hole 57. 7. The coplanar suspension wall is a thermally induced stress in the suspension wall in the above-mentioned "3. Problems of the suspension mechanism stress during cooling", and the fourth aspect of the invention includes at least one suspension wall 50 Replaced by a number of coplanar suspension walls 50, as shown in Figure 14.

More specifically, the suspension wall 50 described herein is coplanar and in fact only its central portions are coplanar. Each of the foregoing suspension walls has a central portion between the upper portion and the lower portion, wherein the upper portion is coupled to the process chamber walls 14-18 and the lower portion is coupled to the showerhead 20. The upper and lower portions may include flanges 52, 54 that are not coplanar. However, there will be at least two suspension walls with a central portion of the coplanar. Preferably, the coplanar center portions of the two suspension walls are horizontally separated by a plurality of vertical gaps 88. If several coplanar suspension walls are represented by a variable Ν, the width of each coplanar suspension wall will be reduced by a factor of 比较 when compared to the width when replaced by a single suspension wall. When the gap 8 8 between the coplanar walls is at least a portion of the width of each coplanar wall, the width of each coplanar wall may even be reduced by a larger factor. Comparing the invention embodiment shown in FIG. 14 with the conventional design shown in FIG. 3, the two long suspension walls 50 in FIG. 3 are three widths of about three-thirds in FIG. A wall (Ν = 3) is substituted. The two short suspension walls in Fig. 3 are replaced in Fig. 14 by two walls (Ν = 2) of about one-half the width. Reducing the width of the suspension wall is equivalent to reducing the horizontal component of any thermally induced stress in the suspension wall! : 29 1306782. Accordingly, the present invention should reduce the risk of the cantilever wall eventually deforming, breaking or tearing in response to the aforementioned stresses. When the sprinkler head 20 is rectangular as shown in Fig. 14, the suspending walls connected to the particular one of the four lateral sides of the sprinkler head should be coplanar and simultaneously connected to the adjacent sides of the sprinkler head, respectively. The suspension wall should be vertical. Although the invention has been described in detail with reference to the preferred embodiments thereof, it is understood that the invention may be modified or modified without departing from the spirit and scope of the invention.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a partial cross-sectional, schematic side view of a plasma processing chamber including a gas-sealed periphery of the present invention. Figure 2 is a vertical cross-sectional view of the suspension mechanism, sprinkler head, and gas seal periphery. Figure 3 is a plan view of the suspension mechanism showing features of a preferred embodiment of the present invention having a conventional design. Figure 4 is a partial cross-sectional schematic view of the plasma processing chamber of Figure 1, which further includes a central support for the showerhead. Figure 5 is a schematic view of the periphery of the gas seal of Figures 1, 2 and 4. Figures 6, 7 and 8 are vertical cross-sectional views of the suspension mechanism, sprinkler head and gas seal periphery of Fig. 2, but showing an alternative embodiment of the edge portion of the sprinkler adjacent the lower end of the gas seal periphery. Figure 9 is a side elevational view of one of the walls of the suspension mechanism having an elongated opening extending vertically in a second embodiment of the present invention. Figure 10 is a side view of an alternative embodiment of a wall of a suspension mechanism, which opens 30 1306782

σ is extended to the edge of the bottom of the t-frame of the suspension machine. Fig. 1 is a side view of a second embodiment of the wall of the suspension mechanism, wherein each opening σ is formed only around the opening, and the peripheral portion is formed by cutting the ridge, but leaving an edge intact. Fig. 12 is a suspension mechanism - a side view of a wall having one or more of the third embodiment of the present invention, the vertical extension slit π ° Figure 13 is a side view of an alternative embodiment of the wall of the suspension mechanism, having - or more a vertically disposed split, wherein each vertical configuration split includes at least a plurality of splits spaced in a substantially vertical direction. Figure 14 is a plan view of the suspension mechanism having a plurality of vertical gaps in accordance with a fourth embodiment of the present invention. Coplanar suspension wall. [Main component symbol, clearly] 10 working piece 12 working piece support, suction cup, wafer holder 14 -1 8 processing chamber wall 14 processing chamber side wall and top wall 16 cover member 18 top wall, intake manifold 19 cover (non-functional) 20 sprinkler head / diffuser. 22 outlet passage 26 intake passage 28 intake steering plate 30 intake space (internal area of the intake manifold) 3 1 exhaust slit 32 exhaust space 33 -38 Dielectric gasket 40 Bolt 42 U-bar 45 -48 0-ring 50 Suspension wall 52 Upper flange 54 Lower flange 56 Mounting hole 31 Mounting hole 60 Sprinkler edge groove 64 Pin groove 68 Protruding gas Sealed periphery 72 Upper flange inner surface 80 Open side wall portion 82 Arrow split 86 Open center branch member 102 Lateral gas passage lower gas passage 106 Mounting ring brake screw 32

Claims (1)

Patent No. 1306782 10. Patent application scope: 1. An intake manifold for a process chamber, comprising at least: a processing chamber wall comprising at least a processing chamber top wall and a processing chamber sidewall, wherein the processing chamber wall comprises a Or a plurality of intake passages; a sprinkler head having a plurality of outlet passages; a suspension mechanism coupled between the wall of the chamber and the sprinkler head to suspend the sprinkler head from the top wall a lower distance; and a gas-tight periphery extending between an upper portion adjacent to the processing chamber wall and a lower portion adjacent the sprinkler head; wherein the gas-tight periphery is connected to the processing chamber wall or The sprinkler head, but not the two; wherein the gas seal periphery is separated from the process chamber wall or the sprinkler by a plurality of gaps having a distance of no more than an inner surface area of the gas seal periphery a combined area, wherein the number of the gaps is greater than or equal to zero; and wherein the processing chamber wall, the sprinkler head, the gas seal periphery, and the gaps collectively enclose a volume from which gas can be drawn Volume flow through the outlet passage to these. 2. The intake manifold of claim 1, wherein the suspension mechanism is located outside of the volume. 3. The intake manifold of claim 1, wherein: 33 1306782 ? / year 丨丨 卜 修 修 (more) replacement page, the sprinkler head has a rectangular shape with four sides; and the gas The periphery of the seal contains at least four sheets adjacent to each of the four sides of the sprinkler head. 4. The intake manifold of claim 1, wherein: the suspension mechanism and the sprinkler head are a single piece of material. 5. An intake manifold for a process chamber, comprising: at least one process chamber wall comprising at least one process chamber top wall and a process chamber sidewall, wherein the process chamber wall includes one or more intake passages a sprinkler head comprising: (i) an upper surface and a lower surface; (ii) a plurality of gas outlet passages extending between the upper surface and the lower surface; and (iii) one or more a groove in the upwardly facing surface, wherein the grooves are located between the gas outlet passage and the periphery of the upper surface; a suspension mechanism is coupled between the processing chamber wall and the shower head to a sprinkler head suspended below the top wall - a distance; and a gas-tight periphery comprising: (i) an upper portion connected to the processing chamber wall and (ii) a lower portion extending to the grooves One or more of them are not connected to the sprinkler head; 34: 1306782 P-year-old repair (吏) is replacing the page: wherein the treatment chamber wall, the sprinkler head and the gas-sealed periphery are sealed together Volume, gas can be from these inlet channels Volume flow through the outlet passage to these. 6. The intake manifold of claim 5, wherein the suspension mechanism is located outside the volume. 7. An intake manifold for a process chamber, comprising: at least one process chamber wall comprising at least one process chamber top wall and a process chamber sidewall, wherein the process chamber wall includes one or more intake ports a sprinkler head having a plurality of air outlet passages; a suspension mechanism coupled between the processing chamber wall and the sprinkler head to suspend the sprinkler head at a distance below the top wall; and a gas a sealing periphery having an upper portion connected to the processing chamber wall and a lower portion adjacent to but not connected to the sprinkler head; wherein the processing chamber wall, the sprinkler head and the gas sealing periphery are sealed together The volume through which the gas can flow from the intake passages to the outlet passages. 8. The intake manifold of claim 7, wherein the suspension mechanism is located outside the volume. 9. The intake manifold of claim 7, wherein the gas is densely 35 I3Q6782 The outer periphery of the seal is adjacent to the periphery of the shower head. The intake manifold of claim 7, wherein: the sprinkler head includes at least one upwardly projecting protrusion; and the gas seal periphery abuts against the radially outer surface of the at least one protrusion. 11. An intake manifold for a process chamber, comprising: a process chamber wall including at least a process chamber top wall and a process chamber sidewall, wherein the process chamber wall includes one or more intake passages a sprinkler head having a plurality of air outlet passages; a suspension mechanism coupled between the processing chamber wall and the sprinkler head to suspend the sprinkler head at a distance below the top wall; and a gas a sealing periphery having an upper portion connected to the processing chamber wall and a lower portion extending toward the sprinkler head but not connected to separate the gas sealing periphery from the sprinkler head, the gap having a gap a bonding area greater than one third of an inner surface area of the gas seal periphery, wherein the number of gaps is greater than or equal to zero; wherein the processing chamber wall, the shower head, the gas seal periphery, and the gaps collectively enclose a volume Gas may flow from the intake passages through the volume to the outlet passages. 1 2. The intake manifold of claim 11, wherein the suspension mechanism is located outside the volume. 36 1306782 The intake manifold of claim 11, wherein: the lower portion of the gas seal periphery contacts the shower head such that the number of the gaps is zero. The intake manifold of claim 11, wherein: the lower portion of the gas seal periphery contacts the sprinkler head such that the combined area of the gaps is zero. The intake manifold of claim 11, wherein: the suspension mechanism is coupled to a side of the showerhead. The intake manifold of claim 11, wherein: the suspension mechanism comprises at least four sheets respectively connected to each of the four sides of the sprinkler head. 17. The intake manifold of claim 11, wherein: the suspension mechanism and the sprinkler head are a single piece of material. 18. An apparatus for suspending a sprinkler head, comprising: at least: a sprinkler head having a plurality of air outlet passages; and a suspension mechanism comprising at least one or more suspension walls, wherein each suspension wall Includes an upper part and a lower part; 37 1306782 Wherein the lower portion of each of the suspension walls is coupled to the sprinkler head such that the suspension mechanism can suspend the sprinkler head below the upper portion of the suspension wall; and wherein each of the suspension walls includes one or more openings, Together occupy at least five percent of the area of the suspension wall. The apparatus of claim 18, further comprising: a processing chamber wall including at least one processing chamber top wall and a processing chamber sidewall, wherein the processing chamber wall includes one or more intake air a channel; and an upper portion of each of the suspension walls is coupled to the processing chamber wall. The apparatus of claim 18, wherein: each of the suspension walls includes a bendable portion between the upper portion and the lower portion of the suspension wall; and each of the suspension walls Each of the openings in the suspension wall is located in a bendable portion of the suspension wall. 2 1. The apparatus of claim 18, wherein: each of the openings is vertically elongated. 22. The apparatus of claim 18, wherein: for each of the suspension walls, each of the openings in the suspension wall extends to a lowermost end of the suspension wall. 38 1306782 广一___ ' 『年"0 FH 2 3. The equipment of claim 22, wherein for each suspension wall: the lower part of the suspension wall is connected at several areas And the device is separated by one or more of the openings in the suspension wall. 24. The device of claim 18, wherein: the showerhead has four a side of the rectangle; and the suspension wall comprises at least four suspension walls, each connected to each of the four sides of the showerhead. 2 5. The apparatus of claim 18, wherein: the suspension The apparatus and the sprinkler head are a single piece of material. 26. The apparatus of claim 18, wherein: the one or more openings in each of the suspension walls collectively occupy at least four points of the area of the suspension wall 27. An apparatus for suspending a sprinkler head in a process chamber, the method comprising: at least: a sprinkler head having a plurality of air outlet passages; and a suspension mechanism comprising at least one or more Suspended wall, each of which is suspended 39 1306782 ((7)/日修(more) 正换换- The hanging wall comprises (i) an upper part; (Π) - a lower part connected to the sprinkler head so that the suspension mechanism can suspend the sprinkler head And (iii) a central portion extending vertically between the upper portion and the lower portion; wherein the central portion of each of the suspension walls includes one or more substantially vertically disposed slits in the suspension The apparatus of claim 27, wherein the one or more substantially vertically disposed slits are comprised of: a substantially vertical slit located in the suspended wall In the center of each of the two. 2 9. The apparatus of claim 27, wherein the one or more substantially vertically disposed slits are comprised of: a substantially vertically elongated opening The apparatus of claim 27, wherein the one or more substantially vertically disposed slits are comprised of: Grooves that extend substantially vertically are located in the center of each of the suspension walls. 3 1 The apparatus of claim 27, wherein the one or more splits of the substantially vertical configuration comprise at least: 40 1306782 a plurality of perforations substantially vertically spaced, located in one of the suspended walls The apparatus of claim 27, wherein the one or more substantially vertically disposed slits comprise at least: a plurality of openings substantially vertically spaced apart from the suspended walls The apparatus of claim 27, wherein the one or more substantially vertically disposed slits comprise at least: a plurality of notches substantially vertically spaced, located in the And a device for suspending a sprinkler head, comprising at least: a sprinkler head having a plurality of air outlet passages; and a suspension mechanism including at least a plurality of suspension walls, the suspension wall comprising a first suspension wall and a second suspension wall, wherein each suspension wall comprises an upper portion and a lower portion; wherein the lower portion of each suspension wall is connected To the sprinkler head to make the The suspension mechanism can suspend the sprinkler head below the upper portion of the suspension wall; and wherein the first and second suspension walls are coplanar. 41 1306782 I --- one-one p-order '丨The apparatus of claim 3, wherein a vertical gap may center one of the first suspension wall and one of the second suspension wall The apparatus of claim 3, wherein the plurality of suspension walls further comprise a third suspension wall perpendicular to the first and second suspension walls. The apparatus of claim 34, wherein: the suspension mechanism and the sprinkler head are a single piece of material. 3. The apparatus of claim 27, wherein: the suspension mechanism and the sprinkler head are a single piece of material. 39. A method for enclosing an air intake space of a process chamber, comprising at least the steps of: providing a process chamber wall to include less than a process chamber top wall and a process chamber sidewall, wherein The treatment chamber wall includes one or more intake passages; a sprinkler head having a plurality of outlet passages; and a suspension mechanism connected between the treatment chamber wall and the sprinkler head to suspend the sprinkler head a distance below the top wall; and connecting a gas-tight periphery to the processing chamber wall or the sprinkler head, but not to both; and 42 1306782 I you "month n repair (more) positive replacement page setting The gas seals the periphery so that: (i) the gas seal periphery extends between an upper portion adjacent the processing chamber wall and a lower portion adjacent the sprinkler head; (ii) the gas seal periphery is separated by a plurality of gaps Separating from the chamber wall or the sprinkler head, wherein the gaps have a joint area that is no greater than one third of the inner surface area of the gas seal periphery, wherein the number of the gaps is greater than or equal to zero; and (iii) the Processing chamber wall, the The sprinkler head, the periphery of the gas seal seal, and the gaps collectively enclose an air intake space through which gas can flow to the air outlet passage. 40. The method of claim 39, further comprising the step of: supplying gas to the intake space via the intake passages. 4. The method of claim 39, wherein the step of attaching the suspension mechanism further comprises: providing the suspension mechanism outside the air intake space. 4. The method of claim 39, wherein: the sprinkler head has a rectangular shape with four sides; and the gas seal periphery comprises at least four sheets adjacent to each of the four sides of the sprinkler head. 43 1306782 4 3. The method of claim 39, wherein: the suspension mechanism and the sprinkler head are a single piece of material. 44. A method of enclosing an air intake space of a process chamber, comprising at least the steps of: providing a process chamber wall having a process chamber top wall and a process chamber sidewall, wherein the process chamber wall includes one or more An air inlet passage; providing a sprinkler head comprising: (i) an upper surface and a lower surface; (ii) a plurality of air outlet passages extending between the upper surface and the lower surface; and Iii) one or more grooves in the upwardly facing surface, wherein the grooves are located between the outlet passage and the periphery of the upper facing surface; attaching a suspension mechanism to the processing chamber wall and the showerhead Between the nozzles being suspended at a distance below the top wall; a gas seal periphery is disposed, so that the processing chamber wall, the sprinkler head and the gas sealing periphery jointly enclose an air inlet space. Gas flowing from the inlet passage through the space to the outlet passage; connecting an upper portion of the gas seal periphery to the processing chamber wall; and providing a lower portion of the gas seal periphery to extend to the same One or more of a groove, and not connected to the sprinkler head. 44 1306782 h / / / month you repair (more, uLf for i 45. - a method of enclosing an air intake space of a process chamber, which at least comprises the following steps: providing a treatment chamber wall, which contains at least one treatment a chamber top wall and a processing chamber side wall, wherein the processing chamber wall includes one or more intake passages; a sprinkler head having a plurality of air outlet passages; a suspension mechanism coupled to the processing chamber wall and the spraying Between the heads, the sprinkler head is suspended at a distance below the top wall; a gas seal periphery is disposed, so that the process chamber wall, the sprinkler head and the gas seal periphery jointly enclose an air intake space. a gas flows from the intake passage through the space to the outlet passage; an upper portion of the gas seal periphery is connected to the processing chamber wall; and a lower portion of the gas seal periphery is disposed so as to be adjacent thereto, but not The method of claim 45, wherein: the sprinkler head includes at least one upwardly projecting protrusion; and a radially outer surface of the gas seal adjacent to the at least one protrusion 47. A method of suspending a sprinkler head, comprising at least the steps of: providing a sprinkler head having a plurality of gas outlet passages; and providing a suspension mechanism comprising at least one or more suspension walls , the 45 1306782 p bucket "month<############################################################################################# The mechanism suspends the sprinkler head below the upper portion of the suspension wall; wherein the step of providing the suspension mechanism further comprises forming one or more openings in each of the suspension walls, which together occupy the suspension wall area 48. The method of claim 47, wherein: the suspension mechanism and the sprinkler head are a single piece of material. 4 9. A method of suspending a sprinkler head, At least comprising the steps of: providing a sprinkler head having a plurality of air outlet passages; providing a suspension mechanism comprising at least one or more suspension walls, wherein each suspension wall comprises (i) an upper portion; a lower part; and (iii) a central part, vertical Extending between the upper portion and the lower portion; and connecting the lower portion of each of the suspension walls to the sprinkler head such that the suspension mechanism can suspend the sprinkler head above the suspension wall The method of providing the suspension mechanism further includes forming one or more substantially vertically disposed slits in a central portion of each of the suspension walls. 50. The method of claim 49, wherein The one or more substantially vertically disposed slits are comprised of: a substantially vertical slit located in the center of each of the suspended walls 46 1306782 in the center of the year/day/day repair: 5. The method of claim 49, wherein the one or more substantially vertically disposed slits are comprised of: a substantially vertical elongated opening located in the suspended wall In the center of each of them. The method of claim 49, wherein the one or more substantially vertically disposed slits are comprised of: a substantially vertical elongated groove located in each of the suspended walls In the center of the person. The method of claim 49, wherein the one or more substantially vertically disposed splits comprise at least: a plurality of substantially vertically spaced perforations located at a center of each of the suspended walls In the ministry. 54. The method of claim 49, wherein the one or more substantially vertically disposed slits comprise at least: a plurality of openings substantially vertically spaced apart at a center of each of the suspended walls In the ministry. 5 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 A plurality of notches are located in the central portion of each of the suspension walls. 56. The method of claim 49, wherein: the suspension mechanism and the sprinkler head are a single piece of material. 57. A method of suspending a sprinkler head comprising at least the following steps: providing a sprinkler head having a plurality of gas outlet passages; and providing a suspension mechanism comprising at least a plurality of suspension walls, The first suspension wall and the second suspension wall are included, wherein each suspension wall includes an upper portion and a lower portion; the lower portion of each suspension wall is connected to the shower head so that the suspension mechanism will The sprinkler head is suspended below the upper portion of the suspension wall and the first and second suspension walls are coplanar. The method of claim 57, wherein the connecting step comprises at least: connecting the first and second suspension walls to the shower head such that a vertical gap can be the first A central portion of the suspension wall is spaced apart from a central portion of the second suspension wall. 5. The method of claim 5, wherein: the method of providing the suspension mechanism further comprises providing a third suspension wall; and the connecting step further comprises the third suspension wall Connected to the sprinkler head such that the third suspension wall is perpendicular to the first and second suspension walls. The method of claim 57, wherein: the suspension mechanism and the sprinkler head are a single piece of material. 49