1305969 九、發明說明： 【發明所屬之技術領域】 電夾轉於供電連接器以及具有該供電連接器之11 【先前技術】 在加工液晶用玻璃基板等電子零件的 作業係在直空中進杆。名兮吉办士 有些 , 八二〒進仃在該真空中進行作業時，例如，會 空室中設置用於電子零件等的裝置。上述裝置，呈備 有·。裝置主體，·以及用以對該袭置主體供給電力之供電連 接器。該供電連接器中設有引線，該引線係被拉出至真空 室外，與外部電源連接。 二 =為前述裝置可例舉：靜電夾盤裝置、蒸鍍裝置、減 要、聚合製程裝置、乾钱刻裝置、化學蒸鍍（CVD)裝 置、表面改質裝置等。 例如靜電夹盤裝置係具有··具備底座及設置於其上之 的裝置主體；以及安裝在該裝置主體之電力端子 供電連接器。 在進订作業時，係由外部的直流高堡電源透過引線將 電力提供至供電連接器，並經由該供電連接器與電極片通 電。藉此，在該電極片的上面產生靜電力。接著，利用該 靜電力，使液晶用玻絲板料吸關^於電㈣上面。 安裝於上述靜電夾盤裝置等在真空中使用的裝置的裝 ，主體的供電連接器，先前，係提出如第6圖所示之供 連接器。 318563 6 -1305969 第6圖之供電連接器，其概略的構成係具備有：形成 有上方呈開口狀之小徑的銷孔41以及與銷孔連通之大 徑的供電孔4 2的連接器主體4 3 ;用以插入供電孔4 2内使 之封閉供電孔42之開口部的蓋罩44;配置於蓋罩44内的 供電銷45; —端連接供電銷45的終端部46，且在另—广 接觸蓋單44底部的狀態下配置於蓋罩料内，而將供電： 5推向上方’使供電鎖45的前端部47得以由連接器主體 43的上面的銷孔41突出的彈簧48。 此外’在彈簧48，由外部的直流高壓電源延伸，通過 罩蓋44底部的孔49導入蓋罩以内的引線24 ’係利用銲 錫等連接’而蓋罩44以及引線24 ’則利用接著劑5〇，分 別固疋在連接$主體43以及蓋罩44 (參照專利文獻 [專利文獻1]曰本專利特開2003-197726號公報 【發明内容】 寻』又馱i中所記载之供電連接器，在構成引 線^4之内料線與被⑽導線之樹脂被覆層之間存在有 些许空隙。因此，長時間在真空狀態下 持穩定的真空狀態，且，在交替巧m古：U維 又替反覆大乳與真空狀態的作 業時’空氣會由該空隙進㈣致供電連接器與裝置主體之 接點部產生真空放電的問題。 此外，專敎獻1中所記載之供電連接器，由於 用接著劑固定於連接器主體43，因 裝置主體進行靜電夾盤片之貼換㈣#時 于 移動導致接著劑容易自連接器主體43剝落。= 318563 7 1305969 著劑50的剝落處，會形成空氣由外部進入的通道，而容易 使空氣進入主體。 此外，由於利用接著劑50將前述蓋罩44固定於連接 盎主體43的操作’係以人工進行，故容易產生接著劑5〇 使用量不均，而無法獲得均一品質等問題。 v 因此’本發明係為了解決上述問題而研創者，目的在 .提供一種'即使裝置長時間在真空下進行作動，亦可維持 2定的真空狀態，且在交替反覆大氣與真空狀態的作業 _時’防止空氣之進出，並防止在供電連接器與裝置主體之 接點部產生真空放電，又可獲得均一品質的供電連接器、 以及具有該供電連接器的靜電夾盤裝置。 本發明人，爲解決上述課題而進行檢討後，完成以下 本發明之供電連接器以及具有該供電連接器之靜電爽盤參 置。 、 酋本發明之第1態樣係一種供電連接器，用以連接具有 藝導線及㈣導線於前端延伸W之方式被覆該導線之被覆 層的引線，係具備有：形成有供前述引線插入之插入孔的 連接器主體；以及安裝於該連接器主體並與前述導線電性 連接的供電鎖、而在前述被覆層的端冑乃至於從該端部延 伸而出之部分導線的所在位置，形成用以充填樹月旨的樹脂 充填部。 此外，在本發明中，前述插入孔内最好在前述引 設墊圈。 ' 此外，在本發明中，前述插入孔係由大徑部以及位於 318563 8 -1305969 最好配設在大徑部内側 更内側的小徑部所形成，前述墊圈 端部。 銷：由供電銷’最好纏繞有使供電 逆钱态主體突出的彈簧構件。 本毛月之第2態樣，係一種具有 電夾盤裝置。 n、电逋接為之靜 下進，係可提供—種：即使裝置長時間在真空 了：仃作動亦可維持穩定的真空狀態 與真空狀Hit彳#_ HP * 乂⑤反覆大虱 連接器鮮氣進出，並防止在供電 以及具有該供電連接器的靜電二 詳細說明本發明H㈣器、及具 ^4、電連接器之靜電夹盤裝置的較佳實施方式。但是， =❹不限㈣下各實施例’例如亦可適當地組:以下 谷貫施例的各個構成要素。 供電連接器 第1圖係顯示連接有引線之本發明供電連接器的一實 施例之側剖面圖。第2圖係顯示第i圖之供電連接器之供 電面側的平面圖。此外，第！圖係沿著第2圖中的Η線 之剖面圖。 '第1圖的供電連接器100,係用以連接具有導線31以 及以該導線31於前端延伸露出之方式被覆該導線之被覆 層32的引線30,係由：形成有供前述引線3〇插入之插入 318563 9 1305969 =13的連接器主體1〇;以及安裝於該連接器主體1〇並與 前述導線31電性連接的供電銷20概略構成。 在仏電連接益100中，連接器主體1〇〇為長方體狀， /、有開口在其一面10a (顯示供電面。以下，為方便說明 而稱之為上面。與上面相對的面稱之為下面，與該兩面正 .父的面稱之為侧Φ。）之大致長方體形狀的凹部9,該凹 -部9’係利用分隔板14,分隔為收納供電銷2〇之供電鎖收 納部11與樹脂充填部。 修在凹部9中，相較於對應供電銷收納部11之位置的底 面9b，係將對應樹脂充填部12之位置的底面9a，配置在 連接器主體Π)的下面1Gc側，樹脂充填部12的深度較供 電鎖收納部11的深度為深。此外，在分隔板14係如第3 圖所示，設有用以插入後述導線31的u字溝14a。此外， 分隔板亦可使用一體成形的連接器主體。 此外，在凹部9的開口部，被覆有長方形板狀的蓋體 • 15 〇 此外，如第2圖所示，在連接器主體1〇的上面i〇a， 於蓋體15的四周設有溝ϊ6,而在該溝16收納有〇型環8〇。 此外，在連接益主體1〇上面1〇a的四個角落，分別各 設置通孔17。將供電連接器伽安裝在作為供 象的裝置主體時，係將螺栓等插通於插通孔】7中。此外， 該安裝部分係以前述之〇型環80密封。此外，該〇型产亦 可配設在供電對象之裝置的主體側。 衣’ 此外’供電鎖20係收納於供電鎖收納部n，並連接 318563 10 1305969 靜電失盤裝置等供電對象裝置主體的電力端子。 在被覆於凹部19之開口部的蓋體15，係於對應供電 銷收納部11的範圍的中心附近設置孔15a，略呈圓柱狀的 供電銷20的前端係由該孔15β突出。此外，供電銷2〇在 其前端側設有環狀突緣20a，該突緣20a係以接觸蓋體15 .的方式配置於蓋體15内侧❶藉此，形成使供電銷2〇的前 -端由孔15a中僅突出預定的長度。 在供電銷收納部U内，突緣2〇a下方（供電銷收納部 • 11的底面9b侧）的供電銷2〇四周纏繞有彈簧構件23。此 外，供電銷收納部的底面9b配置有平板狀的金屬板 25,供電銷20的另一端被插入配置於該金屬板25的孔25& 中，接著，插入具有對應設在該供電銷收納部11之底面 9b之供電銷20外徑大小的凹部lla，以支撐該供電銷2〇。 另外，供電銷20與金屬板25係相互接觸。 此外，該供電銷20，係藉由彈簧構件23推彈至上面 修l〇a (供電面）侧，供電銷2〇的前端，係維持穩定地由連 接器主體10突出之狀。 此外’連接器主體1〇具有用以插入引線3〇之插入孔 13。 該插入孔13’在該例中為圓柱狀。此外，該插入孔13, 係於連接器主體10的侧面1〇b (插入口）開口，而另一端 則在樹脂充填部12的内壁i2a形成開口。 插入孔13係由：連接器主體1〇的側面i〇b (插入口） 側的大徑部13a ;以及位於更内侧（樹脂充填部12側）的 11 11 318563 -1305969 小径部13 b所構成。 此外’大控部13 a與小控部13 b的中心轴一致。另外， 小徑部13b的内徑與引線30的外徑係大致相同。 另一方面，插入於插入孔13的引線3〇具有：導線31 以及以該導線31於前端延伸露出之方式被覆導線的被覆 .層 32。 - 此外’引線30,具有與大徑部13a的内徑大致相同的 直徑，依序穿過裝設有孔18a的螺帽i8、塑膠等所構成的 •環35、以及由橡膠等彈性體所構成的墊圈％，藉由使前述 嫘帽18與刻在大徑部13a内壁的螺紋Uc螺合，使之與連 接器主體10 —體化。_ 此卜，在插入孔13内，塾圈34係如上所述穿過有 述引線30，並設在大徑部13a的内側端部。藉此，不僅 引線30的被覆層32周圍密封，還可防正空My 進入:徑部娜等之空氣的進出，更能夠固定引線加。* 作為墊圈34，隶好使用〇型環等。 此外，在引線30的被覆層32的 山 而出之部份導線31的所在位置，二該端部延伸 脂充填部12。接著，於該樹脂^的樹 藉此’被覆層3 2的端部與由該端部延伸：曰：。 即可以該樹脂60 —體被覆。 』♦踝31’ 其結果，在被覆層32的端部，導線3ι盘被声 之間的些許空隙會被樹月t 6〇填埋。藉此將2層32 接器100之裝置配置於真空室 在將具有供電迷 進行真空操作時，可防 318563 12 1305969 止空氣由前述空隙進入等之空 空狀態’並可防止供電連接器 真空放電。 氣的進出’以維持穩定的真 100與裝置主體之接點部的 此外’由於係在具有一定容積的樹脂充填部12内充填 樹脂60’故可進行一定量、穩定且確實的樹脂6〇充填。、 藉此，可抑制樹脂60充填量的不均，而獲得均一的品質。1305969 IX. Description of the Invention: [Technical Field of the Invention] The electric clip is turned to the power supply connector and the power supply connector 11 [Prior Art] The operation of processing electronic components such as a glass substrate for liquid crystal is performed in a straight air. Some of the 兮 兮 办 有些 有些 有些 有些 有些 有些 有些 有些 有些 有些 有些 有些 有些 有些 有些 有些 有些 有些 有些 有些 有些 有些 有些 有些 有些 有些 有些 有些 有些 有些The above device is provided with. The device body, and a power supply connector for supplying power to the attacking body. A lead wire is provided in the power supply connector, and the lead wire is pulled out to the outside of the vacuum to be connected to an external power source. Secondly, the above device can be exemplified by an electrostatic chuck device, an evaporation device, a reduction, a polymerization process device, a dry etching device, a chemical vapor deposition (CVD) device, a surface modification device, and the like. For example, an electrostatic chuck device has a base and a device body provided thereon, and a power terminal power supply connector mounted to the device body. In the binding operation, power is supplied to the power supply connector through the lead through an external DC high-voltage power supply, and is electrically connected to the electrode via the power supply connector. Thereby, an electrostatic force is generated on the surface of the electrode sheet. Then, using this electrostatic force, the liquid crystal glass sheet is sucked off the electricity (four). The power supply connector of the main body, which is mounted on a vacuum chuck device or the like, and the power supply connector of the main body, has previously been proposed as a connector as shown in Fig. 6. 318563 6 -1305969 The power supply connector of Fig. 6 has a schematic configuration including a pin hole 41 having a small diameter which is open at the top, and a connector body having a large diameter power supply hole 4 2 communicating with the pin hole. 4 3; a cover 44 for inserting into the opening of the power supply hole 42 to close the opening of the power supply hole 42; a power supply pin 45 disposed in the cover 44; the end portion 46 of the power supply pin 45 is connected, and the other end - the cover cover is placed in the cover material in the state of the bottom of the contact cover 44, and the power supply: 5 is pushed upwards to make the front end portion 47 of the power supply lock 45 protrude from the upper pin hole 41 of the connector main body 43. . Further, the spring 48 is extended by an external DC high-voltage power source, and the lead 24' introduced into the cover through the hole 49 at the bottom of the cover 44 is connected by solder or the like, and the cover 44 and the lead 24' are made of an adhesive 5'. And the power supply connector described in the Japanese Patent Application No. 2003-197726, the disclosure of which is incorporated herein by reference. There is a slight gap between the inner wire constituting the lead wire 4 and the resin coating layer of the (10) wire. Therefore, a stable vacuum state is maintained in a vacuum state for a long time, and in the alternate state, the U-dimensional is replaced by When the operation of the large milk and the vacuum state is repeated, the air will enter the gap (4), causing a problem of vacuum discharge between the power supply connector and the contact portion of the device body. In addition, the power supply connector described in the special 1 is used. The adhesive agent is fixed to the connector main body 43, and the adhesive body is easily peeled off from the connector main body 43 when the electrostatic chuck film is replaced by the device main body (4)#. 318563 7 1305969 The peeling portion of the agent 50 is formed into an empty space. The air enters the passage from the outside, and the air is easily introduced into the main body. Further, since the operation of fixing the cover 44 to the main body 43 by the adhesive 50 is performed manually, the amount of the adhesive 5 is not easily used. Therefore, the problem of uniform quality and the like cannot be obtained. v Therefore, the present invention has been made in order to solve the above problems, and an object of the present invention is to provide a 'vacuum state even if the apparatus is operated under vacuum for a long time, and In the operation of alternately repeating the atmosphere and the vacuum state, the air is prevented from entering and exiting, and the vacuum discharge is prevented from being generated at the contact portion between the power supply connector and the device body, and a power supply connector of uniform quality is obtained, and the power supply connector is provided. In order to solve the above problems, the inventors of the present invention have completed the power supply connector of the present invention and the electrostatic cooling plate having the power supply connector. The first aspect of the invention is A power supply connector for connecting a lead wire having a conductive layer and (4) a wire covering the front end of the wire Providing a connector body having an insertion hole into which the lead wire is inserted; and a power supply lock attached to the connector body and electrically connected to the wire, and at the end of the coating layer or even from the end portion Further, in the present invention, the insertion hole is preferably provided with a gasket in the above-mentioned insertion hole. In addition, in the present invention, the foregoing The insertion hole is formed by a large diameter portion and a small diameter portion which is preferably disposed on the inner side of the large diameter portion at 318563 8 - 1305 969, and the end portion of the washer. Pin: The power supply pin is preferably wound around to make the power supply counter money The spring member protruding from the main body. The second aspect of the present month is an electric chuck device. n, electric splicing for the static down, can be provided - kind: even if the device is in a vacuum for a long time: 仃 can also maintain a stable vacuum state and vacuum-like Hit 彳 #_ HP * 乂5 over the large 虱 connector The fresh air enters and exits, and prevents the power supply and the static electricity having the power supply connector. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of the H (four) device of the present invention, and the electrostatic chuck device having the electrical connector is described. However, the respective embodiments of the following embodiments may be appropriately set as follows: For example, the respective constituent elements of the following examples may be used. Power Supply Connector Fig. 1 is a side cross-sectional view showing an embodiment of the power supply connector of the present invention to which a lead is connected. Fig. 2 is a plan view showing the power supply side of the power supply connector of Fig. i. Also, the first! The figure is a section along the Η line in Figure 2. The power supply connector 100 of Fig. 1 is for connecting a lead wire 30 having a wire 31 and a coating layer 32 for covering the wire with the wire 31 extending at the front end thereof, and is formed by inserting the lead wire 3 The connector body 1 is inserted into the 318563 9 1305969=13; and the power supply pin 20 attached to the connector body 1b and electrically connected to the wire 31 is roughly configured. In the electric connection 100, the connector body 1 has a rectangular parallelepiped shape, and has an opening 10a on its side (the power supply surface is shown. Hereinafter, it is referred to as the upper surface for convenience of explanation. Hereinafter, the concave portion 9 having a substantially rectangular parallelepiped shape, which is referred to as a side Φ.), is divided into a power supply lock accommodating portion for accommodating the power supply pin 2 by the partition plate 14. 11 and resin filling section. In the recessed portion 9, the bottom surface 9a corresponding to the position of the resin filling portion 12 is disposed on the lower surface 1Gc side of the connector main body Π), and the resin filling portion 12 is formed on the bottom surface 9b corresponding to the position of the power supply pin accommodating portion 11. The depth is deeper than the depth of the power supply lock housing portion 11. Further, as shown in Fig. 3, the partition plate 14 is provided with a U-shaped groove 14a for inserting a wire 31 to be described later. In addition, the partition plate may also use an integrally formed connector body. Further, in the opening portion of the recessed portion 9, a cover plate having a rectangular plate shape is covered. Further, as shown in Fig. 2, a groove is provided on the upper surface of the connector body 1a, i is around the cover body 15. In the case of ϊ6, the 16-shaped ring 8〇 is accommodated in the groove 16. Further, through holes 17 are provided in each of the four corners of the upper side 1〇a of the connection main body 1〇. When the power supply connector is attached to the main body of the apparatus, a bolt or the like is inserted into the insertion hole 7. Further, the mounting portion is sealed with the aforementioned 〇-shaped ring 80. In addition, the 〇 type can also be disposed on the main body side of the device to be powered. In addition, the power supply lock 20 is housed in the power supply lock housing portion n, and is connected to a power terminal of a power supply target device main body such as an electrostatic loss device such as 318563 10 1305969. In the lid body 15 covered with the opening portion of the concave portion 19, a hole 15a is provided in the vicinity of the center of the range corresponding to the power supply pin housing portion 11, and the tip end of the substantially cylindrical power supply pin 20 protrudes from the hole 15?. Further, the power supply pin 2 is provided with an annular flange 20a on the front end side thereof, and the flange 20a is disposed inside the cover 15 so as to contact the cover 15, thereby forming the front of the power supply pin 2 - The end is only protruded by the predetermined length from the hole 15a. In the feed pin housing portion U, a spring member 23 is wound around the feed pin 2b under the flange 2〇a (on the bottom surface 9b side of the feed pin housing portion 11). Further, a flat metal plate 25 is disposed on the bottom surface 9b of the power supply pin accommodating portion, and the other end of the power supply pin 20 is inserted into the hole 25' of the metal plate 25, and then inserted into the power supply pin accommodating portion. A recessed portion 11a having an outer diameter of the power supply pin 20 of the bottom surface 9b of the bottom surface 9b supports the power supply pin 2''. Further, the power supply pin 20 and the metal plate 25 are in contact with each other. Further, the power supply pin 20 is pushed by the spring member 23 to the upper side of the upper surface of the power supply pin 2, and the front end of the power supply pin 2'''''''''' Further, the connector body 1 has an insertion hole 13 for inserting the lead wires 3 . This insertion hole 13' is cylindrical in this example. Further, the insertion hole 13 is formed in the side surface 1b (insertion opening) of the connector main body 10, and the other end is formed in the inner wall i2a of the resin filling portion 12. The insertion hole 13 is composed of a large-diameter portion 13a on the side of the side surface i〇b (insertion port) of the connector main body 1 and a small-diameter portion 13 b on the inner side (on the side of the resin filling portion 12) 11 11 318563 - 1305969 . Further, the large control unit 13a coincides with the central axis of the small control unit 13b. Further, the inner diameter of the small diameter portion 13b is substantially the same as the outer diameter of the lead wire 30. On the other hand, the lead wire 3 inserted into the insertion hole 13 has a wire 31 and a coating layer covering the wire so that the wire 31 is extended at the front end. Further, the 'lead 30' has a diameter substantially the same as the inner diameter of the large-diameter portion 13a, and sequentially passes through the nut i8 provided with the hole 18a, the plastic ring, and the like, and the elastic body such as rubber. The spacer % is constituted by screwing the cap 18 to the screw Uc engraved on the inner wall of the large-diameter portion 13a to be integrated with the connector main body 10. In the insertion hole 13, the collar 34 passes through the lead wire 30 as described above, and is provided at the inner end portion of the large diameter portion 13a. Thereby, not only the periphery of the coating layer 32 of the lead wire 30 is sealed, but also the air can be prevented from entering and exiting the air such as the diameter portion Na, and the lead wire can be fixed. * As the washer 34, the 〇-ring is used. Further, at a position where a part of the wire 31 of the lead layer 32 of the lead 30 is located, the end portion extends the grease filling portion 12. Next, in the tree of the resin, the end portion of the coating layer 3 2 is extended by the end portion: 曰:. That is, the resin 60 can be coated. 』 踝 ’ 31' As a result, at the end of the covering layer 32, a slight gap between the sounds of the wires 3 iv is filled by the tree moon t 6 。. By arranging the device of the two-layer 32-connector 100 in the vacuum chamber, it is possible to prevent the 318563 12 1305969 from entering the empty state of the space by the aforementioned gap when the vacuum operation is performed by the power supply fan, and to prevent the power supply connector from being vacuum-discharged. In order to maintain the stability of the gas and the contact portion of the main body of the device, the resin 100 is filled in the resin filling portion 12 having a certain volume, so that a certain amount of stable and reliable resin filling can be performed. . Thereby, unevenness in the amount of filling of the resin 60 can be suppressed, and uniform quality can be obtained.
樹腊充填部12，係利用分隔板U與供電銷收納部U 分隔，並利用樹脂充填部12的内壁12a與插人孔13進行 分隔’故可穩定地充填樹脂6G。此外，由於係被底面知、 =板U、内壁12a所包圍，故可穩定地進行樹脂 充填。 只要是至少形成於供電銷收卸 心與插入孔13之間，並收納被覆層32之端部乃至㈣ 端部延伸而出之部分導線31，且充填樹腊6〇即可，其形 狀、大小、型態並無特別之限制。 電銷Si，中所謂的「分隔」，係指只要為能分隔供 部11與樹脂充填部12;樹脂充填部12與插入孔 13 =者。例如，即使未被覆蓋體15，上面他側形成開 =可。但，如該例所示，樹腊充填部12，由分隔板Η、 工ΓΛ及構成樹脂充填部12的内壁所包圍，係有助於 私疋進行樹脂60充填故較佳。 —此外，樹脂6〇的充填量，最好設定㈣脂充填部12 之谷積的2/3至3/4左右的量。 此外’構成引線30的前端3〇a的導線3卜通過分隔 318563 13 1305969 板14的II字溝14a，配置於供電銷收納部n。 此外，該前端30a係使用銲錫7〇連接金屬板25。由 於金屬板25與供電銷20連接，因此當從引線3〇開始進行 電力供給時，電力會由構成前端咖的導線Μ經由金屬板 Μ提供至供電銷2〇,並由該前端將電力供給至設在靜電失 - 盤等之裝置主體的電力端子。 - 此夕卜引線30 ’只、要可與供電銷20進行電性連接即 可’而導線31，只要可藉由銲錫70等直接與供電銷20連 接即可。但是，如上例所示，若使用金屬板25，將有助於 提升作業性，並提高連接部分的機械強度。 在該例中，連接主體10的大小25χ5()χ18(_)。 此外，供電銷收納部U的大小，約為9χΐ3.66χ9 2 (随），樹脂充填部12的大小約為，9χ3χ112(_)。 大控部13a的内後約1〇(随）長度約12(丽）。此外， 小徑部m的内徑約5(mm)長度約μ—)。 的深度約5.5(職）直徑約23(随)。 引線30的外徑約5(mm)，導線31的外徑約 ，外’由被覆層32的端部延伸出之導線31的長度約5 (mm) ° 供電銷2 0的大小，|吉挪的 丄 '、直仅約4 ( mm )，厚度約1 ( mm )， 並設在距離供電銷20前端 連接器主體!。的二的位置。 膠-陶究等。其中，義言；'特別限制’例如可例舉塑 土於仏電連接器1〇〇輕量化後，較容 318563 14 1305969 易與靜電夾盤裝置等裝置主體進行拆裝、以及容易加工等 各點的考量’最好選擇塑膠的材質。 作為上述塑膠材質可例舉：聚苯醚硫化物（pps)、聚 醚醚酮（PEEK)、聚醯胺、聚酯、聚縮醛樹脂、氟系樹脂、 丙烯酸系樹脂、聚對苯二甲酸丁二酯（pBT)、聚醚颯等。 其中以聚醚醚酮（PEEK)、聚縮醛樹脂、氟系樹脂較佳。 作為蓋體15的材質，可使用與連接器主體1〇相同的 材質。 作為供電鎖2G的材質，只要是由導電性材質所構成者 即可’其他並無特職制，㈣性材質可例舉：銅、銅合 金、鐵、銘、不繡鋼、銀、金等。其中，以銅合金較佳。 黃銅更為理想， 作為金屬板25的材質，可使用與供電銷2〇相同的材 :為彈著23的材質，只要是金屬製，且具有彈簧彈括 的材質即可:其中，以使用不鏽鋼（sus)較為理想。 作為塾圈3 4的材質，可你丨與.μ ^ 了例舉·絕緣性彈性體、絕緣怡 塑膠、陶瓷、玻璃、金屬氧化物 ^ , 蜀乳化物專。其中，基於利用彈性 變形使引線30之被覆層32的周圊 邱夕鬥太“ 與大徑部13a的内側端 1中封性的考量，最好選擇絕緣性彈性體， M ,, ,, ,, . ^ 心知'別疋從電絕緣性、耐 的觀點來考量的話’以選擇矽膠較為理相。 脂6。’並無特別之限制，例如，可傀用環 ㈣月曰、丁二細丙稀猜共聚物、缚烴系共聚物、聚苯 318563 15 ' 1305969 料=聚物、聚S旨樹脂、聚醯亞胺樹脂、聚醯胺樹脂、石夕 s、曰’。其中，以環氧樹脂較為理想。 本發明之供電連接器_的組裝方法，並無特別之限 1、歹,如’連接有第1圖所示之引線3〇的供電連接器⑽， 可以下述方式來紐裝。 • 百先，使螺絲18、環35以及墊圈34依序通過引線30, 而將該引線30由連接器主體1 〇的側面1 Ob (插入口）導 入0 籲接者，利用銲錫7〇將引線3〇前端1連接在金屬板 ZO 0 “接著，在連接器主體10的凹部9設置分隔板14形成 供電鐵收納部11與樹脂充填部12，並在該供電銷收納部 11的底面9b，配置引線30前端3〇a銲接有銲錫之上述金 屬板2 5。此時，係以使引線3 〇的被覆層3 2的端部乃至由 該端部延伸而出的部份導線3丨位於樹脂充填部丨2内的方 Φ式配置。 之後，將樹脂60充填於樹脂充填部12。藉此，導線 31與被覆層32之間的空隙即被樹脂6〇所充填。 。接著，使螺絲18與螺紋13c螺合，使引線3〇與連接 器主體10 一體化。藉此，固定引線30。 接著，將彈簧構件23圍繞在供電銷2〇，並將與設有 該供電銷20之突緣20a的前端為相反的前端插入設'在金屬 板25的孔25a’接著再插入設在供電銷收納部u底面扑 的凹部1 la以支撐供電銷2〇。 318563 16 1305969 接著，將蓋體15，被覆在供電鎖收納部u與樹脂充 填部12的開口部分，俾使收納於供電銷收納部Η之供電 銷20之設有突緣20a之側的前端，通過位於蓋體之中 心附近的孔15a並由連接器主體1 〇突出。 、之後，將0型環接著於溝16。藉由上述方式，即完成 連接有引線30的供電連接器1〇〇。 靜電夾盤裝置The tree wax filling portion 12 is partitioned from the power supply pin housing portion U by the partition plate U, and is separated from the insertion hole 13 by the inner wall 12a of the resin filling portion 12, so that the resin 6G can be stably filled. Further, since it is surrounded by the bottom surface, the plate U, and the inner wall 12a, the resin can be stably filled. As long as it is formed at least between the power supply pin receiving and unloading core and the insertion hole 13, and a part of the wire 31 extending from the end portion or the (4) end portion of the covering layer 32, and filling the tree wax, the shape and size thereof are filled. There are no special restrictions on the type. The so-called "separation" in the electric pin Si means that the supply portion 11 and the resin filling portion 12 are separated, and the resin filling portion 12 and the insertion hole 13 are replaced. For example, even if it is not covered, the upper side is formed to be open = OK. However, as shown in this example, the tree wax filling portion 12 is preferably surrounded by the partitioning plate, the workpiece, and the inner wall constituting the resin filling portion 12, which facilitates the filling of the resin 60 in a private manner. Further, it is preferable to set the amount of the resin 6 充 to be about 2/3 to 3/4 of the grain product of the (4) fat filling portion 12. Further, the wire 3 constituting the leading end 3〇a of the lead wire 30 is disposed in the power supply pin housing portion n by the II groove 14a partitioning the plate 318563 13 1305969. Further, the front end 30a is connected to the metal plate 25 by soldering. Since the metal plate 25 is connected to the power supply pin 20, when power supply is started from the lead wire 3, power is supplied from the wire 构成 constituting the front end coffee to the power supply pin 2 through the metal plate, and power is supplied from the front end to the power supply pin 2 The power terminal of the main body of the device such as an electrostatic loss-disc. - The lead wire 30' can be electrically connected to the power supply pin 20, and the wire 31 can be directly connected to the power supply pin 20 by solder 70 or the like. However, as shown in the above example, if the metal plate 25 is used, it contributes to workability and improves the mechanical strength of the joint portion. In this example, the size of the connecting body 10 is 25 χ 5 () χ 18 (_). Further, the size of the power supply pin housing portion U is approximately 9 χΐ 3.66 χ 9 2 (s), and the size of the resin filling portion 12 is approximately 9 χ 3 χ 112 (_). The inside of the large control unit 13a is about 1 inch (in) and has a length of about 12 (L). Further, the small diameter portion m has an inner diameter of about 5 (mm) and a length of about μ -). The depth is about 5.5 (job) and the diameter is about 23 (s). The outer diameter of the lead wire 30 is about 5 (mm), the outer diameter of the wire 31 is about, and the length of the wire 31 extending from the end of the covering layer 32 is about 5 (mm) ° the size of the power supply pin 20, | The 丄', straight is only about 4 (mm), the thickness is about 1 (mm), and is located at the front end of the power supply pin 20 connector body!! The location of the second. Glue - ceramics and so on. Among them, the meaning of the term "special restrictions" can be exemplified by the fact that the plastic soil is lightweight in the 连接 electrical connector, and the 318563 14 1305969 is easy to disassemble and assemble the main body of the electrostatic chuck device, and is easy to process. The point of consideration is best to choose the material of the plastic. The plastic material may, for example, be polyphenylene ether sulfide (pps), polyetheretherketone (PEEK), polyamine, polyester, polyacetal resin, fluorine resin, acrylic resin or polyterephthalic acid. Butane diester (pBT), polyether oxime, and the like. Among them, polyetheretherketone (PEEK), polyacetal resin, and fluorine-based resin are preferred. As the material of the lid body 15, the same material as that of the connector body 1A can be used. As the material of the power supply lock 2G, any material may be used as long as it is composed of a conductive material. Other materials include copper, copper alloy, iron, iron, silver, silver, gold, and the like. Among them, a copper alloy is preferred. Brass is more desirable. As the material of the metal plate 25, the same material as the power supply pin 2 can be used: the material of the elastic 23 can be used as long as it is made of metal and has a spring-loaded material: Stainless steel (sus) is ideal. As the material of the ring 3 4, you can use the μ 了 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 Among them, it is preferable to select an insulating elastic body, M, , , , , based on the elastic deformation of the coating layer 32 of the lead wire 30 and the inner end 1 of the large diameter portion 13a. , ^ ^ Do not know from the point of view of electrical insulation, resistance, 'to choose the silicone is more reasonable. Grease 6. 'There is no special restrictions, for example, can use the ring (four) month 曰, 丁二细Acrylic copolymer, hydrocarbon-based copolymer, polyphenyl 318563 15 ' 1305969 material = polymer, poly S resin, polyimine resin, polyamine resin, Shi Xi s, 曰 '. The oxygen resin is preferable. The method of assembling the power supply connector of the present invention is not particularly limited to 1. For example, the power supply connector (10) to which the lead wire 3 shown in Fig. 1 is connected can be connected in the following manner. • First, the screw 18, the ring 35 and the washer 34 are sequentially passed through the lead 30, and the lead 30 is introduced into the 0 side of the connector body 1 Ob (insertion port), and the solder is used. Connecting the leading end 1 of the lead 3 to the metal plate ZO 0 "Next, a partition plate 14 is provided in the recess 9 of the connector main body 10. Iron power supply portion 11 and the resin filling the housing portion 12 and housing bottom surface of the supply portion 11 of the pin 9b, the lead 30 disposed above the front end 3〇a welded metal sheet 25 of solder. At this time, the end portion of the covering layer 3 2 of the lead 3 乃 or the portion of the lead wire 3 extending from the end portion is disposed in the Φ type of the resin filling portion 丨 2 . Thereafter, the resin 60 is filled in the resin filling portion 12. Thereby, the gap between the wire 31 and the coating layer 32 is filled with the resin 6?. . Next, the screw 18 is screwed to the screw 13c to integrate the lead wire 3 with the connector body 10. Thereby, the lead wire 30 is fixed. Next, the spring member 23 is surrounded by the power supply pin 2, and the front end opposite to the front end of the flange 20a provided with the power supply pin 20 is inserted into the hole 25a' of the metal plate 25 and then inserted into the power supply pin. The recessed portion 1 la of the bottom surface of the accommodating portion u supports the power supply pin 2 〇. 318563 16 1305969 Next, the lid body 15 is covered in the opening portion of the power supply lock housing portion u and the resin filling portion 12, and is placed at the front end of the power supply pin 20 of the power supply pin housing portion 520 on the side where the flange 20a is provided. It is protruded by the connector body 1 by a hole 15a located near the center of the cover. After that, the 0-ring is followed by the groove 16. By the above means, the power supply connector 1 to which the lead 30 is connected is completed. Electrostatic chuck device
本發明之靜電夾盤裝置，係一 器與靜電夾盤裝置主體之裝置。 具有本發明之供電連接 第4圖係顯示靜電夾盤裝置主體的一實施形態例。 靜電夾盤裝置主體200，只要是可用以安裝例如前述 供電連接器1GG的裝置即可，其他並無特別之限制。 該圖之靜電夾盤裝置主體2〇〇具有：底座95;以及設 在該底座之上的電極片9〇。 ^電極片90，具有設於樹脂片中的導電層。電極片9〇 部形成舌狀的供電部91 (電力端子），在該供電 =(電力端子）的中央附近，形成有導電層的露出部92。 =卜’，部91 (電力端子)的周緣附近，設有螺孔93 σ用於文裝或拆除供電連接器100。 置主之6靜電夾盤裝置’如第5圖所示，靜電夹盤裝 , ，女裝有本發明之供電連接器100。此外，在第 I，供電連接器100連接有引線30。 ion、電連接s⑽係藉由：使螺栓穿過s在供電連接器 連接器主體1〇之四個角落的插通孔，再使該螺栓螺 318563 17 1305969 螺孔93^爽盤裝置主體2〇0之供電部91 (電力端子）的 ，而女裝在靜電夾盤裝置主體2〇〇。 4匕時’由供電連接器的供 之供電銷na 電（痛略圖示）突出 之導電^1)的前端’與靜電夾盤裝置主體200 電源等：二Γ:92接觸。藉此，電力從外部的直流高壓 給至連接器主體10，並經由該連接 體10對靜電夾盤裝置主體200進行供電。 根據本發明，係提供一種：即使，晋4主Μ + # 進行作動：使裝置長時間在真空下 鱼真4έ 的真m在進行交替反覆大氣 接哭之作業時可防止空氣的進出，並防止在供電連 :一 〃裝置主體之接點部產生真空放電，且可獲 質的供電連接器㈣以及具備該供電連接器1〇〇 的静電夾盤裝置。 此外’根據本發明，由於在充填樹脂6〇時，只 脂60充填於具有一定容量的樹脂充填部12 ^，因此不 籲僅可抑制樹脂60充填量的不均，亦可提昇作業效率。 此外’具有本發明之供電連接器1〇〇的靜電夹盤裝 置，可輕易拆除供電連接器〗00，在發生故障時，可以僅 更換供電連接器100或靜電夹盤裝置主體2〇 〇。 此外，本發明不限於使用在靜電夾盤裝置，亦可利用 在蒸鍍裝置、濺鍍裝置、聚合製程裝置、乾蝕刻裝置、化 學蒸鑛（C V D )裝置、表面改f裝置等在真空作業時使用的 產業上之可利用性 318563 18 1305969 根據本發明，传一 進行作動亦可維持穩定的狀：使;置長時間在真空下 與真空狀態之作業時可防止：氣：進進:=覆大氣 質的供電連接考.v R /、二放電，且可獲得均一品 、 連接盗，以及具備該供電連接 【圖式簡單㈣】 電連接盜的靜電爽盤I置。 第1圖係顯示連接有引線之本發明 施例的側剖面圖，俜沪荖坌？阁击认A 只 固係/口者第2圖中的A_A線的剖面圖。- 圖係顯示第1圖之供電連接器的供電面側平面圖。 第3圖係顯示分隔板的一實施例的平面圖。The electrostatic chuck device of the present invention is a device for the main body of the electrostatic chuck device. Power Supply Connection Having the Invention FIG. 4 is a view showing an embodiment of the main body of the electrostatic chuck device. The electrostatic chuck device main body 200 is not particularly limited as long as it can be used to mount, for example, the above-described power supply connector 1GG. The electrostatic chuck device body 2 of the figure has a base 95 and an electrode tab 9 设 disposed on the base. The electrode sheet 90 has a conductive layer provided in the resin sheet. The electrode sheet 9 has a tongue-shaped power supply portion 91 (electric power terminal), and an exposed portion 92 of the conductive layer is formed in the vicinity of the center of the power supply = (power terminal). In the vicinity of the periphery of the portion 91 (power terminal), a screw hole 93 σ is provided for the document mounting or the power supply connector 100 is removed. As shown in Fig. 5, the electrostatic chuck device of the main unit has a power supply connector 100 of the present invention. Further, at the first point, the power supply connector 100 is connected with the lead wires 30. The ion and electrical connection s (10) is obtained by: passing the bolt through the insertion hole of the s in the four corners of the power connector body 1 , and then making the bolt 318563 17 1305969 screw hole 93 ^ the device body 2 〇 0 of the power supply part 91 (electrical terminal), and the women's clothing in the electrostatic chuck device body 2〇〇. At the time of 4 ’, the front end of the conductive member 1) protruding from the power supply pin of the power supply connector is electrically connected to the power supply device 200 of the electrostatic chuck device main body: 92: 92. Thereby, electric power is supplied from the external DC high voltage to the connector main body 10, and the electrostatic chuck device main body 200 is supplied with power via the connecting body 10. According to the present invention, there is provided a method of preventing air from entering and exiting, and preventing air from entering and exiting, even when the device is operated under a vacuum for a long time under the vacuum. In the power supply connection: a vacuum discharge is generated at a contact portion of the device body, and a power supply connector (4) is obtained, and an electrostatic chuck device having the power supply connector 1〇〇 is provided. Further, according to the present invention, since only the grease 60 is filled in the resin filling portion 12^ having a certain capacity when the resin is filled, it is possible to suppress the unevenness of the filling amount of the resin 60 and to improve the work efficiency. Further, the electrostatic chuck device having the power supply connector 1 of the present invention can easily remove the power supply connector 00, and in the event of a failure, only the power supply connector 100 or the electrostatic chuck device main body 2 can be replaced. In addition, the present invention is not limited to use in an electrostatic chuck device, and may also be used in a vacuum operation, such as a vapor deposition device, a sputtering device, a polymerization process device, a dry etching device, a chemical vapor deposition (CVD) device, a surface modification device, and the like. Industrial Applicability for Use 318563 18 1305969 According to the present invention, it is possible to maintain a stable state by performing an operation: it can be prevented from being placed under vacuum and in a vacuum state for a long time: gas: advance: = Atmospheric power supply connection test .v R /, two discharge, and can obtain uniform products, connection stolen, and the power supply connection [simple (4)] electrostatic connection stolen electrostatic cooling I. Fig. 1 is a side sectional view showing the embodiment of the present invention to which a lead wire is connected, 俜 荖坌? The cabinet hits the section A of the A_A line in Figure 2 of the solid/mouth. - The figure shows the side view of the power supply side of the power supply connector of Figure 1. Figure 3 is a plan view showing an embodiment of a partitioning plate.
第4圖係顯示本發明靜電夾盤裝置主體之一實施 斜視圖。 V 第5圖係顯示具有本發明供電連接器之靜電夾盤裝置 之一實施例的斜視圖。 、 第6圖係顯示習知之供電連接器之一例的要部放大剖 面圖。 【主要元件符號說明】 9, 19 凹部 9a 底面 9b 底面 10 連接器主體 10a 上面 10b 侧面 10c 下面 11 供電銷收納部 11a 凹部 12 樹脂充填部 12a 内壁 13 插_入孔 13a 大徑部 13b 小徑部 318563 19 * 1305969 13c 螺紋 14 分隔板 14aU 字溝 15 蓋體 15a 子L 16 溝 18a 孔 18 螺帽 20 供電銷 20a 突緣 23 彈簧構件 25 金屬板 25a 孔 30 引線 30a 引線前端 31 導線 32 被覆層 35 環 34 墊圈 60 充填樹脂 70 鲜錫 80 0型環 90 電極片 91 供電部 92 露出部 93 螺孔 95 底座 100 供電連接器 200 靜電夾盤裝置主體 20 318563Fig. 4 is a perspective view showing one embodiment of the main body of the electrostatic chuck device of the present invention. V Fig. 5 is a perspective view showing an embodiment of an electrostatic chuck device having the power supply connector of the present invention. Fig. 6 is an enlarged cross-sectional view showing an essential part of a conventional power supply connector. [Main component symbol description] 9, 19 recessed portion 9a bottom surface 9b bottom surface 10 connector body 10a upper surface 10b side surface 10c lower surface 11 power supply pin housing portion 11a concave portion 12 resin filling portion 12a inner wall 13 insertion hole 13a large diameter portion 13b small diameter portion 318563 19 * 1305969 13c Thread 14 Separator 14aU Groove 15 Cover 15a Sub L 16 Groove 18a Hole 18 Nut 20 Power supply pin 20a Flange 23 Spring member 25 Metal plate 25a Hole 30 Lead 30a Lead front 31 Conductor 32 Cover 35 Ring 34 Washer 60 Filling resin 70 Fresh tin 80 0 ring 90 Electrode piece 91 Power supply part 92 Exposed part 93 Screw hole 95 Base 100 Power supply connector 200 Electrostatic chuck device body 20 318563