1300133 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種檢測裝置，特別是關於一種具有高檢測速度之電極 檢測裝置。 【先前技術】1300133 IX. Description of the Invention: [Technical Field] The present invention relates to a detecting device, and more particularly to an electrode detecting device having a high detecting speed. [Prior Art]
身又的液晶顯示裝置(Liquid Crystal Display，LCD)，主要係利用氧化 銦錫（Indium Tin Oxide，ITO)、或銦辞氧化物(Indium Zinc 〇\此，IZ〇)透 明導電膜作為透明導電物質，即作為電極(ele_de)使用。在生產過程中， 般單-個電極在功能正常的狀態下，其本身會具有一個固定的電阻值， 不會發生斷路(電阻無窮大)的情形；而兩個電極之間在魏正常的狀態下， 必々呈現斷路’不會相互導通發生短路(電關等於零)的情形。然而，在實 際的狀況下’卻會因為製程、環境··等因素造成單—電極的斷路、或兩個 電極^間牆路現象。目此，生產時就必綱肖電極檢錄置來檢查該些 電極疋否發生短路、或斷路的情形，藉以提高生產良率。 第1圖係顯示台灣專利帛1247〇〇號所揭露的一種導體圖案檢查裝置 二（即上述電極檢職置）、以及利職裝置丨_躺個電極U、[2之示 :圖It該圖所示，該導體圖案檢查裝置10包含—第—電壓源v卜一第 顯:1m:1、一第二電壓源v2、以及一第二電流檢測計M2。該圖 丁 ^路的m順制係彻上述賴源與檢測計配合歐姆定律來實現。 計時所預定^別電極疋否短路或斷路時，一般會事先假設第一電極L1在設 却ά加〜、電阻^1==Ι11+Κ2、第二電極[2的電阻RL2=R3+R4、並且假 叹兩個電極u、 1丑攸 電極L1是否 間可能產生的洩漏電阻為RLL。在進行檢測單一個 斷路時’必須利用第一電壓源VI提供一預設電壓vip至電極 1300133 L1上，並利用第-電流檢測計mi 4測在第一電極u上的電流大小議， 再運用歐姆定律計算出電極L1之實際量測電阻的大小， Rre=VlP/Mlt。最後將電極L1之實際量測電阻值如與預定之電極電阻犯 比較’若實際量測Rre之大小等於預定之電極電阻虹丨，則電極^1為正常 電極；然若實際量測電阻Rre之數值大於預定之電極電阻虹丨時，即可判 定出電極L1發生斷路，該電極L1·係屬於不正常的電極。同樣地，測量單 -個電極L2是否發生斷路之方式與·單—個電極u烟，依此類推。 另一方面，在檢測兩個電極LI、L2之間是否發生短路時，首先會假設電 極L1發生的洩漏部位在電阻R1與R2之間的節點A處、電極L2發生洩 漏部位在電阻R3與R4之間的節點B處。因此，如第！圖所示，即^設洩 漏電阻RLL的兩端分別與節點a、b連接。而一般量測之方法可分為以下 三種：一、僅利用電壓源VI與檢測計M2來檢測；二、僅利用電壓源v2 與檢測計Ml來檢測；三、分別應用上述兩種方式檢測出之數值相加後來 計算出結果。以第一種方式而言，係將檢測計]^!與電壓源¥2開路，僅利 用電壓源VI提供電壓vip給電極L1，並利用檢測計M2量測出從電極u 上的電壓源VI、電阻幻，經過洩漏電阻rll到電極L2上的電阻幻、以 及檢測計M2之間的電流M2t大小。之後再運用歐姆定律計算出洩漏電阻 RLL的大小，rll= Vlp/M2t-(R1+R3)。當然，在實際的應用上，若不知道 洩漏部位，即無法計算出(R1+R3)的大小。但是若無洩漏發生時，Vlp/M2t 將會變成非常大之數值(遠大於預定的電阻R1+R3)。因此可判斷出電極U 與電極L2之間沒有發生短路現像，表示兩電極之間係屬於正常狀態。由於 此三種方式的原理均相同因此僅舉出上列第一種方式來說明，不再重複贅 述另外兩種方式。 雖然’導體圖案檢查裝置10可達成檢測電極是否短路或斷路之功效， 1300133 但是無論級查斷路妓短路，該裝置都必須在讀取檢測計之電流值大小 後利用歐姆定律逐-計算出實際量測的電阻值，再判斷該實際量測之電阻 大小與設計之初預定的電阻大小是否相等或過大，藉以達成量測的功效。 如此’在量產時將提高人力與製造成本，且·人力來進行制容易產生 量測誤差；並且在計算每個電極電阻值、以及逐一檢查電極發生賴之部 位時往往花費許多時間，結果將導致所需時程增加、不符合生產線大量快 速^確測姻要求。再者，此電路之控繼置(未圖示)不僅構造複雜、價 才。叩貝且、准修不易。因此，如何提供一種能快速檢測電極之電極檢測裝 置:減少因計算電極電阻值所耗費之時間、節省外部控繼置之成本、藉 以增加整個系統的產能，實為一急需解決的問題。 【發明内容】 針對上述問題，本發明之目的在提供一種快速檢測電極之裝置，減少 阻值所耗費之時間、達成節省外部檢測電路之成本，增加系統產 传用為Ϊ成上述目的，本㈣提供了—種電極檢職置。該雜檢測裝置 單元顯不面板中的複數個電極，並且電極檢測裝置包含一感測 巧们不问電極的任一端，藉以偵測 7 ㈣嶋㈠職。=2=3 感剩電顯-參考籠，並且 絲收並比車父 比較電壓是否大於_預*雷_ “ Μ果產生一比較電屢。接著判斷 ，⑻細料罐的大 本發明之電極檢繼_電極電阻值因短路、斷路所造成的電壓差 1300133 路。而^Γ 正常，虹以運算放Aii取代習知的檢測電 值所2 Γ測量出電極的狀態，減少傳統檢職置計算每個電極電阻 =Γ更_部制電路之絲，提高_㈣速度，進 而增加整個系統的產能。 疋没運 【實施方式】 Z參考圖式詳細制本侧，並且相_元件將以_的符號標示。 發明之-觀極檢職置_電極之示 _以檢測單一個電極是否發生斷路、或多數個(包含兩個） ^之間疋否發生短路的狀態。電極檢測裝置20包含一感測單元21盘一 。該感測單元21接收一參考電編，且感測單元21係用以 刀另連接〜Lm巾任—概η的兩端、_嶋任_不同電極 的任-端，_同_電極Ln、或不同電極LI^LX之間的電阻值 大小，並根據職測出來之電阻值產生一感測龍Vs。其中，m、η、X為 正整數，lSnSm、1加m，且晌。比較單元22接收並比較參考電壓加f 壓vs，且根據比較之結果產生一輸出賴v〇，並利用該輸出電 ^的大小來判斷受測電極是否正常。#然，此處之雜可為氧化銦錫、 或是銦辞氧化物透明導電膜。 第2B、2C圖係顯示本發明電極檢測裝置之一實施例。第 電極檢職置20制單—㈣極“是否發蛾路之示意圖。第2C圖係 顯不電極檢測裝置20檢測兩個電極u與£3之間是否發生短路之示意圖。 〜由第2B、2C圖可知，電極檢測裝置2〇包含一感測單元μ與一比較 早几22。感測單元21包含—電阻器R1與一第一運算放大器咖。該電 阻器R1之一端接地，且如第2B圖所示，在檢測單-個電極Lm是否發生 1300133 斷路時，電阻器R1的另一端遠接 :C ’並且電_ R1之電_頭概::電===—; 2C圖所示，當檢測任兩個不同電極u =值，而㈣The liquid crystal display (LCD) of the body is mainly made of Indium Tin Oxide (ITO) or Indium Zinc (Indium Zinc), which is a transparent conductive material. , that is, used as an electrode (ele_de). In the production process, in the normal state of the single electrode, it will have a fixed resistance value, and there will be no open circuit (resistance infinite); and the two electrodes are in the normal state of Wei. , it is necessary to present a disconnection 'when there is no short circuit between each other (the power is equal to zero). However, under actual conditions, the single-electrode is broken or the two electrodes are in the wall due to factors such as process, environment, and the like. In view of this, in the production, it is necessary to check the electrode electrodes to check whether the electrodes are short-circuited or open, so as to improve the production yield. Fig. 1 shows a conductor pattern inspection device 2 (i.e., the above-mentioned electrode inspection position) disclosed in Taiwan Patent No. 1247, and a profit-making device 躺 _ an electrode U, [2: Figure It As shown, the conductor pattern inspection device 10 includes a first voltage source V1, a first voltage source v2, and a second current detector M2. The m-sequence of the graph is implemented by the above-mentioned Laiyuan and the detector combined with Ohm's law. When the timer is scheduled to be short-circuited or disconnected, it is generally assumed that the first electrode L1 is set to 〜, the resistance ^1==Ι11+Κ2, and the second electrode [2 is RL2=R3+R4, And sigh whether the leakage resistance of the two electrodes u, 1 ugly electrode L1 may be RLL. When detecting a single open circuit, 'the first voltage source VI must be used to provide a preset voltage vip to the electrode 1300133 L1, and the current on the first electrode u is measured by the first current detector mi 4, and then applied. Ohm's law calculates the actual measured resistance of the electrode L1, Rre = VlP / Mlt. Finally, the actual measured resistance value of the electrode L1 is compared with a predetermined electrode resistance. If the actual measurement Rre is equal to the predetermined electrode resistance rainbow, the electrode ^1 is a normal electrode; however, if the actual measurement resistance Rre is When the value is larger than the predetermined electrode resistance rainbow, it can be determined that the electrode L1 is broken, and the electrode L1· belongs to an abnormal electrode. Similarly, the method of measuring whether or not the single electrode L2 is broken is combined with the single-electrode u-smoke, and so on. On the other hand, when detecting whether a short circuit occurs between the two electrodes L1, L2, it is first assumed that the leakage portion of the electrode L1 is at the node A between the resistors R1 and R2, and the leakage portion of the electrode L2 is at the resistors R3 and R4. Between node B. So, like the first! As shown in the figure, both ends of the leakage resistor RLL are connected to the nodes a and b, respectively. The general measurement method can be divided into the following three types: one, using only the voltage source VI and the detector M2 to detect; second, using only the voltage source v2 and the detector M1 to detect; third, respectively using the above two methods to detect The values are added and the results are calculated. In the first way, the test meter ^^! and the voltage source ¥2 are opened, only the voltage source VI is used to supply the voltage vip to the electrode L1, and the voltage source VI on the slave electrode u is measured by the detector M2. , the resistance illusion, the resistance illusion through the leakage resistor r11 to the electrode L2, and the magnitude of the current M2t between the detector M2. Then use Ohm's law to calculate the magnitude of the leakage resistance RLL, rll = Vlp / M2t - (R1 + R3). Of course, in practical applications, if you do not know the leak, you cannot calculate the size of (R1+R3). However, if no leakage occurs, Vlp/M2t will become a very large value (much larger than the predetermined resistance R1+R3). Therefore, it can be judged that there is no short-circuit phenomenon between the electrode U and the electrode L2, indicating that the two electrodes are in a normal state. Since the principles of the three methods are the same, only the first method is listed above, and the other two methods are not repeated. Although the conductor pattern inspection device 10 can achieve the effect of detecting whether the electrode is short-circuited or broken, 1300133, however, regardless of the level of the circuit breaker, the device must calculate the actual amount by Ohm's law after reading the current value of the detector. The measured resistance value is determined whether the resistance of the actual measurement is equal to or larger than the predetermined resistance at the beginning of the design, thereby achieving the effect of the measurement. In this way, 'manufacturing and manufacturing costs will be increased in mass production, and manpower is easy to produce measurement errors; and it takes a lot of time to calculate the resistance value of each electrode and check the parts where the electrodes occur one by one. This leads to an increase in the required time course and does not meet the requirements of a large number of rapid and accurate testing of the production line. Moreover, the control relay (not shown) of this circuit is not only complicated in construction but also expensive. Mussels are not easy to repair. Therefore, how to provide an electrode detecting device capable of quickly detecting an electrode: reducing the time taken to calculate the electrode resistance value, saving the cost of the external control relay, and increasing the throughput of the entire system is an urgent problem to be solved. SUMMARY OF THE INVENTION In view of the above problems, an object of the present invention is to provide a device for quickly detecting an electrode, reducing the time taken for the resistance value, achieving the cost of saving the external detection circuit, and increasing the system production and delivery for the above purpose. An electrode inspection position is provided. The multi-detection device unit displays a plurality of electrodes in the panel, and the electrode detecting device includes a sensor that does not ask for any end of the electrode, thereby detecting 7 (four) 嶋 (1). =2=3 Sense of residual power - reference cage, and the wire is compared with the car father to see if the voltage is greater than _ pre*Ray _ "The result is a comparison of electricity. Then judge, (8) the electrode of the large invention tank Measured _ electrode resistance value due to short circuit, open circuit caused by the voltage difference of 1300,133. And ^ Γ normal, the rainbow to calculate the Aii instead of the conventional detection of electrical values 2 Γ measured the state of the electrode, reducing the traditional inspection position calculation Each electrode resistance = Γ _ part of the circuit wire, improve the _ (four) speed, and thus increase the capacity of the entire system. 疋 No transport [embodiment] Z reference drawing detailed system side, and phase _ components will be _ The symbol is marked. The invention detects the position of the electrode _ electrode to detect whether a single electrode is broken, or a state in which a plurality of (including two) ^ are short-circuited. The electrode detecting device 20 includes a sense. The measuring unit 21 receives the reference electric circuit, and the sensing unit 21 is used for connecting the two ends of the Lm towel, the two ends of the η, the _ _ _ different electrodes, _ Same as _ electrode Ln, or the magnitude of the resistance between different electrodes LI^LX, and root The sensed resistance value produces a sensed dragon Vs, where m, η, and X are positive integers, lSnSm, 1 plus m, and 晌. Comparison unit 22 receives and compares the reference voltage plus f voltage vs, and compares As a result, an output 〇v〇 is generated, and the size of the output electrode is used to determine whether the electrode to be tested is normal. #然, the impurity here may be an indium tin oxide or an indium oxide transparent conductive film. The 2C diagram shows an embodiment of the electrode detecting device of the present invention. The first electrode inspection device is provided with a schematic diagram of whether or not a moth road is formed. Fig. 2C shows a schematic diagram of the presence or absence of a short circuit between the two electrodes u and £3. ~ It can be seen from the 2B and 2C diagrams that the electrode detecting means 2 includes a sensing unit μ which is 22 earlier than one. The sensing unit 21 includes a resistor R1 and a first operational amplifier. One end of the resistor R1 is grounded, and as shown in FIG. 2B, when detecting whether the single-electrode Lm is 1300133 open, the other end of the resistor R1 is remotely connected: C' and the electric_head of the electric_R1: :Electric ===-; 2C diagram, when detecting any two different electrodes u = value, and (4)
Rl之另一端與電扣之—端連接，且亦形成同 阻值則必_大於_ L1與L3姊之電略:c T 2電 非反向輸入端接收參考輕Vref， V大益0PA1之 輪入端的電歷V2均等於參考電歷加，==的電㈣與反卢 OPAi的反向輸入端係連接節點c。且如第2B ，二而，异放大iThe other end of Rl is connected to the end of the electric buckle, and the same resistance value is formed. It must be greater than _ L1 and L3 电: c T 2 electric non-inverting input receiving reference light Vref, V big benefit 0PA1 The electrical calendar V2 of the wheel-in terminal is equal to the reference electrical calendar plus, the electrical input of the == (four) and the reverse input of the anti-Louis OPAi are connected to the node c. And as in 2B, two, different magnification i
Lm是否發生斷路時，運算放 · m不’在檢測單-個電拐 接之電極Lm的另1 如第之輸出端連接至與電阻器R1相達 L3之間是否短路時n 回所不’當檢測任兩個不同電極L1與 相連之電極L3的一山异、^ 〇PA1之輸出端則連接至與電阻器R1不 ° 、壬端’並且由其輸出端輸出感測電摩Vs。 比較單元22包含一第二土軍曾^^ 、靈曾抑 斤 态0ΡΑ2與一齊納二極體Zr。該第二 ^大θ OPA2之非反向輸人端接收感測 — 參考輕Vref。因此，運算放大器 〃反向輸入知接收 %;而其反向輸入端之電壓¥4等於Vref之非反向輸入端的電壓-等於 與電大器〇PA2在運作時，會比姻V3_】電厂堅叫 藉以產生比較電壓^Vre^大小，即將感測電壓^與參考電壓^相減， 哭〇PA2之^^ 之正端接地、負端與第二運算放大 _壓^=+該齊納二極體在接收比較電壓％後，係利用本身 ^特縣耻較龍Ve進行觀處理，以產生輸出電壓Vo。 在比k料22细齊納二極體&進行穩辦 ：：：r;~ -—- 〇 又生_、或塌兩嫌L1與L3微有·姆時，運算放大器 1300133 OPA2產生的比較電壓Vc將大於預設電壓Vz。由於此時比較電壓％大於 預設電壓Vz，因此將造成齊納二極體Zr產生崩潰現象，使得輸出電壓％ 等於齊納f壓Vz。所以，比較單元22即可彻齊納二鋪&的穩壓特性 將輸出電壓V。的大小設定為該預設電壓Vz的大小。最後，再經過一快速 類比數位轉換器(Analog to Digital Converter，ADC)(未圖示），將類比的輸出 電壓V。轉換為數位資料而取得檢測數據。另—方面，當受測的單一個電 極Lm沒有發生斷路、或受測的兩個電極u與[3之間發生短路時，運管 放大器OPA2產生的比較電壓Vc將小於預設電壓vz。由於比較電壓= 小於預設《 Vz，並料造成齊納二極體產生歸魏。因此，輸出 電壓V。的大小料槪較電壓Ve。最後，再_—快速類比數位轉 換益(未_，賴龍VQ無為麻聽來取躲繼據。坪 上所述，當處理純取得檢測數據後，即可根據該些檢測數據來判斷受測 的單-個電極Lm、與電極L1、L3之間是否發生短路、或斷路的問題。 以下舉例說明電極檢測裝置2〇如何檢測單一個電極^、以及如何檢 測任兩個錄Ln與Lx。並且假設、雜u〜Lm中的每個條^的電阻 =1 RLm均為9ΚΩ(歐姆)、參考賴Vref為5v(伏特）、預設電壓 電壓倾W。須注意者，在檢测單—個電極Ln時，電阻器則 必須大於該受測電極Ln之電阻值心；而檢測任兩個電極Ln與Lx時， =R1的姆嶋糊佩續u娜规錢χ。因此， 檢測早一個電極Ln時電阻+ 4is^t ifei ± °之電阻值在此假設為1〇ΚΩ ;而檢測任兩 個電極Ln與Lx時，電阻器R1之電阻值則必須假設為細。 運作方彳2G何如檢醇—個雜Ln妓發生斷路的 所示’當電極檢職置20利用感測單元21之節點C j-運減大續A1之輸出端來分別連接電極Lm__、藉以 1300133 檢測電極Lm是否斷路時，可由該圖之電路推導出下列等式·When Lm is disconnected, the operation of the output m does not 'never' when the other one of the electrodes Lm of the single-turner is connected to the output terminal of the resistor R1 and L3 is short-circuited. When detecting the difference between any two different electrodes L1 and the connected electrode L3, the output terminal of the PA1 is connected to the resistor R1, and the output terminal outputs the sensing electric motor Vs. The comparison unit 22 includes a second earthen army, a lingering state, and a Zener diode Zr. The non-inverting input of the second ^large θ OPA2 receives the sensing - reference light Vref. Therefore, the operational amplifier 〃 reverse input knows the receiving %; and the voltage of its inverting input terminal ¥4 is equal to the voltage of the non-inverting input terminal of Vref - equal to the power plant 〇 PA2 when operating, it will be better than the V3_] power plant The screaming is used to generate the comparison voltage ^Vre^, that is, the sensing voltage ^ is subtracted from the reference voltage ^, and the positive terminal of the ^2 of the PA2 is grounded, the negative terminal and the second operation are amplified _pressure ^=+ the Zener II After receiving the comparison voltage %, the polar body is processed by itself, and the output voltage Vo is generated. In the case of t-battery 22, the fine-tuned diodes &steadily:::r;~ --- 〇 〇, or collapsed L1 and L3 slightly have a ohm, the comparison of the operational amplifier 1300133 OPA2 The voltage Vc will be greater than the preset voltage Vz. Since the comparison voltage % is greater than the preset voltage Vz at this time, the Zener diode Zr is caused to collapse, so that the output voltage % is equal to the Zener f voltage Vz. Therefore, the comparison unit 22 can output the voltage V at the voltage-suppressing characteristic of the second shop & The size is set to the size of the preset voltage Vz. Finally, an analog output voltage V is analogized by a fast analog to digital converter (ADC) (not shown). Convert to digital data and obtain test data. On the other hand, when the single electrode Lm to be tested does not open, or when a short circuit occurs between the two electrodes u and [3] to be tested, the comparison voltage Vc generated by the operation amplifier OPA2 will be smaller than the preset voltage vz. Since the comparison voltage = less than the preset "Vz, the Zener diode is caused to produce Wei. Therefore, the output voltage V. The size is larger than the voltage Ve. Finally, _-fast analogy digital conversion benefits (not _, Lai Long VQ is not for the listener to take the escape. According to Ping, when the processing purely obtain the test data, the test data can be judged according to the test data. The problem of whether a short circuit or an open circuit occurs between the single electrode Lm and the electrodes L1 and L3. The following describes an example of how the electrode detecting device 2 detects a single electrode and how to detect any two records Ln and Lx. Assume that the resistance of each strip in the mixed u~Lm is =1 RLm is 9ΚΩ (ohm), the reference VVref is 5v (volts), and the preset voltage is tilted W. Note that in the test list When the electrode Ln is used, the resistor must be larger than the resistance value of the test electrode Ln; and when any two electrodes Ln and Lx are detected, the =R1 is continued. Therefore, the early electrode is detected. The resistance value of Ln resistance + 4is^t ifei ± ° is assumed to be 1〇ΚΩ here; and when any two electrodes Ln and Lx are detected, the resistance value of resistor R1 must be assumed to be fine. Alcohol - a miscellaneous Ln 妓 occurs as shown in the 'when the electrode inspection position 20 utilizes the node C of the sensing unit 21 J-transmission and reduction of the output terminal of A1 to connect the electrode Lm__, respectively, and if the detection electrode Lm is open circuited by 1300133, the following equation can be derived from the circuit of the figure.
Vl=V2=V4=Vref (1) V3=Vs=(l+(RLm/Rl))xVl (2) 因此V1=V2=V4=5V，且在該電極Lm為正常時， V3=Vs=(1+_)X5=9.5V。而比較單元22接收_健9 5v縣考賴 5V後，將感測電壓與參考電壓相減而求得-比較龍Vc=9 5_x5v。由 於比較M 4.5V小於預設電壓5V，因此齊納二極體不作用，使得輸出電 塵V。等於4.5V。最後再利用一 12位元快速類比數位轉換器(未圖示細 比的輸出電壓4.5V轉換為數位f料遍。然而，#受_電極α發生斷 ，時，電極Lm之電阻值心變為約等於無窮大㈣，因此第一運算放大 器OPA1之輸出感測電壓Vs=V3=(1+(q〇/1〇)x5=〇〇v，所以第二運算放大器 OPA2在比較感測電壓Vs與參考電壓Vref後，輸出之比較電壓^亦歧 於5V。由於比較電壓Ve大於齊納電壓Vz，所以比較單元22輸出一等於 5伏特的輸出賴VG。結果，經過—12位元快速航數位轉換未圖示 將輸出電壓W轉換後，可得到―個侧咖_。由此可知，電極檢 在檢測單—個電極Ln日^_壓％小於w(數位資料小於 等於5^/了判斷出錢測電極Ln為正常，可繼續使用；當輸出電壓Vo Μ (數位㈣等於娜)時，即可觸㈣受職極^為斷路，必須 斷路之^方式，本發日狀f極檢戦置2G可以賴觸單-個電極是否 發生檢^置2G如何檢測任兩個電極Ln與Lx之間是否 且當兩電極Ln心 雜兩電極Ln與LX之_賴電阻為虹L， 與Lx短路時耻等^沒有短路時虹等於無窮大㈣；—極Ln L丰於零(〇)。如第％圖所示，當電極檢測裝置2〇利用感 12 1300133 測單元21之節點c與第-運算放大器·之輸出端來分別連接電極 L1(9KQ)之-端與電極ί3(9ΚΩ)之—端、藉以檢測電極u與u之間是否 短路時，可由該圖之電路推導出以下等式： V3=V s=( 1 +((RLn+RLx+RLL)/Rl ))xy j (3) 因此’在兩電極L1與L3之間正常沒有發生短路時，感測電壓 :勢(1+((9+9+①卿x5=峰所以在第二運算放大器〇pA2 症Vs與參考電壓Vref後，輸出之比較電壓Vc將遠大於π。由於比較電 壓Vc大於齊納電壓Vz，所以比較單元22輸出一等於5伏特的輸出電壓 V。。結果，經過-12位元快速類比數位轉換器(未圖示)將輸出賴 換後，可得到-個4095的數位資料。然而，當受測的兩電極&盘&之 間發生短路時，感測電壓Vs=V3=(1+((9+9+夠)χ5=9·5ν。所以 U在比較感測電壓9.5V與參考電壓5V冑，求得一比較電壓 Vc-9.5-5=4.5V。由概較電壓4·5ν小於預設電壓5v，因此齊納二 作用，使得輸出電壓Vo等於4_5V。最後再利用一 旦 :器(補示)將類比的輸出電壓4·5ν轉換為數位資料3:。、由 =測裝置20她_健極Ln與u之間枝發生 m於5V(触倾料侧），即可_細做測驗Lnt! 即可判斷__二:==於5V(_料'—， 發明之雷U之間為紐路，必須淘汰。依此方式，本 效。4 '置2G可以達成判斷任兩個電極之暇否發生短路之功 缺ίΓ之電極檢職置2()_°__裝置_較之下，雷Vl=V2=V4=Vref (1) V3=Vs=(l+(RLm/Rl))xVl (2) Therefore V1=V2=V4=5V, and when the electrode Lm is normal, V3=Vs=(1) +_) X5 = 9.5V. On the other hand, after the comparison unit 22 receives the 5V of the _9vv county, the sensing voltage is subtracted from the reference voltage to obtain a comparison - the dragon Vc = 9 5_x5v. Since the comparison M 4.5V is less than the preset voltage of 5V, the Zener diode does not function, so that the dust V is output. Equal to 4.5V. Finally, a 12-bit fast analog-to-digital converter is used (the output voltage of 4.5V is not shown to be converted into a digital f-pass. However, when #__electrode α is broken, the resistance value of the electrode Lm becomes Is approximately equal to infinity (four), so the output sense voltage of the first operational amplifier OPA1 is Vs=V3=(1+(q〇/1〇)x5=〇〇v, so the second operational amplifier OPA2 compares the sensed voltage Vs with the reference After the voltage Vref, the output comparison voltage ^ is also different from 5 V. Since the comparison voltage Ve is larger than the Zener voltage Vz, the comparison unit 22 outputs an output VL equal to 5 volts. As a result, the -12-bit fast navigation bit conversion is not performed. After the conversion of the output voltage W, the figure can be obtained as a side coffee _. It can be seen that the electrode inspection is in the detection of a single electrode Ln. The pressure % is less than w (the digital data is less than or equal to 5^/) The electrode Ln is normal and can be used continuously; when the output voltage Vo Μ (digit (four) is equal to Na), it can be touched (four) the working pole is broken, the way must be broken, the current day f-pole detection can be set 2G Depending on whether a single electrode or a single electrode is detected, how to detect 2G between any two electrodes Ln and Lx Whether and when the two electrodes Ln core two electrodes Ln and LX _ 赖 resistance is rainbow L, short circuit with Lx, shame, etc., when there is no short circuit, rainbow is equal to infinity (four); - pole Ln L is richer than zero (〇). As shown in the figure, when the electrode detecting device 2 is connected to the end of the electrode L1 (9KQ) and the end of the electrode ί3 (9 Κ Ω) by using the node c of the measuring unit 12 and the output terminal of the first operational amplifier. By detecting whether there is a short circuit between the electrodes u and u, the following equation can be derived from the circuit of the figure: V3=V s=( 1 +((RLn+RLx+RLL)/Rl ))xy j (3) Therefore' When there is no short circuit between the two electrodes L1 and L3 normally, the voltage is sensed: potential (1+((9+9+1qingx5=peak, so after the second operational amplifier 〇pA2 syndrome Vs and the reference voltage Vref, the output The comparison voltage Vc will be much larger than π. Since the comparison voltage Vc is greater than the Zener voltage Vz, the comparison unit 22 outputs an output voltage V equal to 5 volts. As a result, a -12-bit fast analog digital converter (not shown) After the output is replaced, a digital data of 4095 can be obtained. However, when a short circuit occurs between the two electrodes & disk & Vs=V3=(1+((9+9+enable)χ5=9·5ν. Therefore, U compares the sense voltage 9.5V with the reference voltage 5V胄, and finds a comparison voltage Vc-9.5-5=4.5V. The approximate voltage 4·5ν is less than the preset voltage 5v, so the Zener acts to make the output voltage Vo equal to 4_5V. Finally, once the device (replacement) converts the analog output voltage 4·5ν into digital data 3: From the = test device 20 her _ Jianji Ln and u between the branch occurs m at 5V (touching the side), you can _ fine test Lnt! You can judge __ two: == at 5V (_ material '-, the invention of the mine between the U is a road, must be eliminated. In this way, the effect. 4 'Set 2G can reach the judgment whether any two electrodes are short-circuited. The electrode inspection position is 2 () _ °__ device _ lower, Lei
Ln本身是否斷Γ:1與比較單元22來直接侧出單-個電極 否斷路”戈任兩個電極“與以之間是否發生短路，而不必如習 13 1300133 知技術般繁複地使用歐姆定律以人工的方式計算實際量測電阻的大小、並 根據電阻的差異來比較出受測電極良好與否。再者，f知導體圖案檢查裝 置ίο在檢測時還必須逐-檢查每-電極L1〜Lm發生電㈣漏的地方^ 檢查不妹則無法進行侧，非常地耗時、且射生事倍功半的後果。 因此’本發日月之電極檢測裝置20可達成快速檢測電極Ln之功效，藉⑽ 加生產效率、降低生產成本。 9 " 第2D圖係顯示本發明電極檢測裝置之另一實施例。該電極檢測麥置 20,與第2B圖之電極檢測裝置20的架構與運作方式大致相同，差異祕電 極檢測裝置20’在劇單元21巾增加了 —第—侧關純與—第二侦 測開關Sw2b。第一_開M Sw2a之一端與感測單元21之節點c連接，、 而另-端係可選擇性地電性連接L1〜Lm中任-電極Ln的—端。第二偵測 開關Sw2b之-端係連接第一運算放大器〇pA1之輸出端，而另一端财 選擇性地躲連接該第，關Sw2a連接之同_個 ι^另1、 或電性連接不與該第-债測開關純連接之任一電極(u〜Lm，且不為: 的任一端。例如’當第一_開關純與電極u之一端連接時，若^ 測電極L3是否_，卿二__ _料接至電極u的另—/ 若要檢測賴U與電極L1之暇倾路，_二制_娜將^妾 至電極Li雜-端。在運作時可配合控懈元(未圖示)來加啸制 偵測開關滅與-第二偵測開關謹，快速地舰極u〜電極w 掃瞒。依此方式，可在短時間内針對多個電極進行斷路與短路的檢測I 此可更快速地檢測電極、並達成生產線大量且快速測試的要求。、 第2E圖係顯示本發明電極檢測裝置之另—實施例。 2〇”與第2D圖之電極檢測裝置2〇,的架構與運作方式大致相同 電極檢測裝置2〇’，在感測單元21中增加了多數個電阻器幻 14 1300133 數。且η大於1)以及-電阻器選擇開關Swl。該些電阻器r卜此中的每 —電阻器Μ...Κη之-端相互連接形成節點c。該節點c連接至第一侧 開關SW2a之-端。而電阻器選擇開關_之一端接地，另一端用以選擇 Rl .Rn巾的任-電阻器。在檢測任—電極Ln時，可利用控制單元(未圖示) 來控制電阻器選擇開關Swl的選擇，電阻器麵開關Swl所選擇的電阻 值必須大於目前受測電極Ln之電阻值；相對地，在檢測任兩個電極^、 Lx時’電阻器選擇開關Swl所選擇的電阻值必須大於該兩個受測電極Ln、 Lx電阻值相加之總和。本發明電極檢職置2Q，，利用冑阻器選擇開關^ 來選擇電阻大小，將可更方便並快速地選擇_於目前受職極以的電 阻’進而增進生產效能。 須注意者，在上述實施例中，每一實施例之比較單元22中的第二運算 放大器OPA2所接收的參考電壓Vref均係直接由外部接收；當然，該參: 電壓Vref亦可由感測單元22來提供。如第2F圖所示之另一電極檢測裝置 20，2F該圖中第二運算放大器〇PA2之反向輸入端係與感測單元21之 節點C連接，_該第-運算放大器〇pA1之虛鱗(π—的特性 將參考電壓Vref提供至節點〇最後再透過節點c傳送參考電壓w給第 二運算放大H OPA2之反向輸人端。藉此，可同樣達成接收參考電壓w 之功效。 以上雖以實施例說明本發明，但並不因此限定本發明之範圍，若該行 業者進行各種變形或變更，只要不脫離本發明之要旨，亦不脫離本發明之 申請專利範圍。 【圖式簡單說明】 第1圖顯示一種習知導體圖案檢查裝置之示意圖。 15 1300133 第2A圖顯示本發明之一種電極檢測裝置之示意圖。 第2B圖顯示本發明之電極檢測裝置之一實施例。 第2C圖顯示第2B圖之電極檢測裝置之另一實施方式。 第2D圖顯示本發明之電極檢測裝置之另一實施例。 第2E圖顯示本發明之電極檢測裝置之另一實施例。 第2F圖顯示本發明之電極檢測裝置之另一實施例。 【主要元件符號說明】 10導體圖案檢查裝置 20、20’、20”、20’” 電極檢測裝置 21感測單元 22比較單元 L1〜Lm電極 IU、R2、R3、R4、RLL 電阻 ΟΡΑ1、ΟΡΑ2運算放大器 Zr 齊納二極體 Ml、M2檢測計 V1、V2 電壓源 Sw2a、Sw2b 開關 16Whether Ln itself is broken: 1 and the comparison unit 22 directly side out the single-electrode is not broken. "Gereng two electrodes" and whether there is a short circuit between them, without having to use Ohm's law as complicated by the technique of 13 13 1300133 The actual measurement resistance is calculated manually, and the measured electrode is compared according to the difference in resistance. Furthermore, the conductor pattern inspection device ί must also check the place where the electric (four) leakage occurs every electrode L1 to Lm at the time of detection. ^ If the inspection is not performed, the side cannot be performed, which is very time consuming and the result of shooting half the effort. . Therefore, the electrode detecting device 20 of the present day can achieve the effect of quickly detecting the electrode Ln, and (10) increase production efficiency and reduce production cost. 9 " Fig. 2D shows another embodiment of the electrode detecting device of the present invention. The electrode detection device 20 is substantially the same as the structure and operation mode of the electrode detecting device 20 of FIG. 2B, and the differential electrode detecting device 20' is added in the drama unit 21 - the first side is pure and the second is detected. Switch Sw2b. One end of the first_open M Sw2a is connected to the node c of the sensing unit 21, and the other end is selectively electrically connected to the end of the any-electrode Ln of L1 to Lm. The end of the second detecting switch Sw2b is connected to the output end of the first operational amplifier 〇pA1, and the other end is selectively connected to the first, and the Sw2a connection is the same as the other, or the electrical connection is not Any electrode (u~Lm, which is purely connected to the first-debatch test switch, and is not either end of: For example, when the first_switch is purely connected to one end of the electrode u, if the electrode L3 is _, Qing __ _ material connected to the electrode u another - / To detect the 暇 U and the electrode L1 暇 暇 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , (not shown) to add the whistle detection switch off and - the second detection switch, fast ship u ~ electrode w broom. In this way, can open and short circuit for multiple electrodes in a short time The detection I can detect the electrode more quickly and achieve the requirement of a large number of rapid testing of the production line. Fig. 2E shows another embodiment of the electrode detecting device of the present invention. The electrode detecting device 2 of Fig. 2D and Fig. 2D 〇, the structure and operation mode are substantially the same as the electrode detecting device 2〇', and a plurality of resistors are added to the sensing unit 21 14 1 300133. And η is greater than 1) and - resistor selection switch Swl. Each of the resistors r - 之 - 相互 相互 相互 相互 相互 相互 相互 相互 相互 相互 相互 相互 端 端 端 端 端 端 端 端 端 端 端 端 端 端 端 端 。 The end of the side switch SW2a, and one end of the resistor selection switch _ is grounded, and the other end is used to select any resistor of the R1.Rn towel. When detecting the any electrode Ln, the control unit (not shown) can be used Control resistor selection switch Swl selection, resistor surface switch Swl selected resistance value must be greater than the current measured electrode Ln resistance value; relatively, when detecting any two electrodes ^, Lx 'resistor selection switch Swl The selected resistance value must be greater than the sum of the resistance values of the two tested electrodes Ln and Lx. The electrode inspection position of the present invention is set to 2Q, and the resistor size can be selected by using the resistor selection switch ^, which is more convenient and rapid. Selecting the current resistance of the current operating pole to further improve the production efficiency. It should be noted that in the above embodiment, the reference voltage Vref received by the second operational amplifier OPA2 in the comparison unit 22 of each embodiment is directly Received externally; of course, The reference voltage: Vref can also be provided by the sensing unit 22. Another electrode detecting device 20, 2F as shown in Fig. 2F is the reverse input terminal of the second operational amplifier 〇PA2 and the sensing unit 21 Node C is connected, _ the virtual scale of the first operational amplifier 〇pA1 (the characteristic of π- provides the reference voltage Vref to the node, and finally transmits the reference voltage w through the node c to the reverse input of the second operational amplification H OPA2 In this way, the effect of receiving the reference voltage w can be similarly achieved. The present invention has been described above by way of examples, but the scope of the present invention is not limited thereto, and various modifications and changes may be made by those skilled in the art without departing from the gist of the present invention. And does not depart from the scope of the patent application of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 shows a schematic view of a conventional conductor pattern inspection device. 15 1300133 Figure 2A shows a schematic view of an electrode detecting device of the present invention. Fig. 2B shows an embodiment of the electrode detecting device of the present invention. Fig. 2C shows another embodiment of the electrode detecting device of Fig. 2B. Fig. 2D shows another embodiment of the electrode detecting device of the present invention. Fig. 2E shows another embodiment of the electrode detecting device of the present invention. Fig. 2F shows another embodiment of the electrode detecting device of the present invention. [Main component symbol description] 10 conductor pattern inspection device 20, 20', 20", 20'" electrode detection device 21 sensing unit 22 comparison unit L1 to Lm electrode IU, R2, R3, R4, RLL resistance ΟΡΑ 1, ΟΡΑ 2 operation Amplifier Zr Zener diode Ml, M2 detector V1, V2 voltage source Sw2a, Sw2b switch 16