TWI393901B - Workpiece handling apparatus - Google Patents

Description

Workpiece handling device

The present invention relates to a versatile tray for accommodating a semiconductor wafer such as an IC, an LSI, a CPU, or the like, and other electronic parts, and a process for performing tests, inspections, and the like on the workpiece, and accommodating at intervals different from the versatile tray. A workpiece transfer device that transfers workpieces between dedicated processing pallets of workpieces, or transports and positions the universal pallets and processing pallets.

In order to apply various processes such as tests or inspections to workpieces such as semiconductor wafers, the workpieces are carried in a plurality of processing steps. In order to carry out the workpiece efficiently, a universal tray that can accommodate a plurality of workpieces at the same time is used.

That is, a plurality of workpieces are accommodated in a state of being arranged in a universal tray, and then sequentially transported to various processing steps, and the workpieces are taken one by one or collected in a plurality of processing steps, and then taken out from the universal tray and predetermined. The process is processed and returned to the universal tray and transported to the next processing step.

Here, in the processing step of performing predetermined processing such as test, inspection, etc., in order to perform the most appropriate processing, the workpiece is transferred to a dedicated processing tray different from the universal tray such as the storage pitch, and the processing is performed. The workpiece that has completed this process is returned to the universal tray and transported to the next processing step.

This dedicated processing tray is formed by accommodating a plurality of workpieces at a receiving pitch different from the storage pitch (interval) of the universal tray. Therefore, an operation of transferring the workpiece occurs between the universal tray and the processing tray.

As described above, a conventional workpiece transport device that transfers a workpiece between a universal tray and a processing tray has a known loading unit that transfers the workpiece from the universal tray to the processing tray. And transferring the workpiece from the processing tray to the two unloading portions of the universal tray, and providing variable mechanisms for changing the interval (pitch) of the rows or columns of the workpieces at the two loading portions, and setting the same in the two unloading portions A workpiece transfer device of a variable mechanism that can change the interval (pitch) of rows or columns (see, for example, Japanese Laid-Open Patent Publication No. 2002-174658).

However, in this apparatus, since the variable mechanism is separately provided in the loading unit and the unloading unit, and the variable mechanism is driven to adjust the interval (pitch) for accommodating the workpiece, the change operation for changing the interval is required. Time is not ideal in terms of speeding up the transfer action. Further, once the variable mechanism becomes complicated, the reliability of the function is lowered. Therefore, it is necessary to confirm whether or not the change is surely changed to a desired interval (housing pitch). Further, since the variable mechanism is provided, the loading portion and the unloading portion are increased in size and weight, and the workpiece is prevented from being caught by the repeated action. In addition, when handling small parts, the accuracy of stopping when loading and placing becomes important, but if there are many mechanisms when transferring parts, the mechanical errors generated in each mechanism will accumulate, so that the parts can be taken out and loaded. The accuracy of the stop position is deteriorated, and there are defects in the removal of the parts or the placement errors.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a simplification of the structure, the refinement of each mechanism, the miniaturization of the entire device, the space saving of the installation area, and the shortening of the time required for the transfer of the workpiece. A workpiece transfer device that can efficiently perform various processes such as testing, inspection, measurement, processing, assembly, and the like on a semiconductor wafer, a substrate, and other electronic components, and can improve productivity.

The configuration of the workpiece handling device of the present invention for achieving the above object includes: a universal tray holding unit having a universal tray platform for holding a universal tray that can accommodate a workpiece, and the universal tray platform facing left and right The drive mechanism for moving in the direction; the processing tray holding unit has a processing tray platform that is disposed adjacent to the universal tray holding unit and arranged in the front-rear direction and that holds the processing tray for loading and transporting the workpiece into the processing area And a drive mechanism for moving the processing tray platform in the left-right direction; and a workpiece transfer unit for transferring the workpiece between the universal tray and the processing tray, and having: the universal tray and the processing tray The guide mechanism that is extended upward in the front-rear direction is supported by the elevating mechanism that is movable in the front-rear direction and is movable up and down in the vertical direction, and a holding head that is provided in the elevating mechanism to hold the workpiece.

According to this configuration, when the unprocessed workpiece is transferred from the versatile tray to the processing tray, or the processed workpiece that has completed the predetermined processing in the processing region is transferred from the processing tray to the versatile tray, the versatile tray holding unit and The processing tray holding unit is appropriately moved in the left-right direction in accordance with a predetermined accommodation interval, and then positioned at a predetermined take-out position and storage position, and the workpiece transfer unit moves in the front-rear direction between the universal tray and the processing tray. The workpiece is conveyed and moved in the vertical direction to take out the workpiece or to accommodate the workpiece, and the workpiece is transferred between the universal tray and the processing tray.

With this configuration, the universal tray holding unit and the processing tray holding unit are appropriately moved in the left-right direction, so that the workpieces to be taken out and stored are often located below the workpiece transfer unit in the left-right direction, and the workpiece transfer unit Moves the workpiece in the up and down direction and the front and rear direction, because This allows the workpiece to move at a high speed and achieves a high speed of the transfer operation. Further, since the universal tray holding unit, the processing tray holding unit, and the workpiece transfer unit are moved by one movement only in one direction (left-right direction Y or front-rear direction X) in the plane, the universal tray is used. When the workpiece is transferred between the processing tray, the mechanical error becomes smaller and the stop position accuracy is improved. As a result, even a small workpiece can be correctly taken out and transferred.

In the above-described apparatus, the universal tray holding unit may include the universal tray between a rear position at which the workpiece is transferred by the workpiece transfer unit and a front position at which the universal tray is supplied or collected. The structure in which the platform can be moved in the front-rear direction and supports the aforementioned universal pallet platform to move freely in the front-rear direction.

According to this configuration, since the processing tray is transferred between the processing tray holding unit and the processing area by the processing tray transfer unit, the processing can be smoothly transferred to the processing step after the workpiece transfer step, and the processed processing can be performed. The workpiece is smoothly returned to the processing tray holding unit, and when the processing area is located at a plurality of locations, the processing tray can be transferred between the appropriately selected processing region and the processing tray holding unit.

In the above-described configuration, the versatile tray holding unit is provided in front of the front and rear direction, and the omnipot tray is supplied to the omni tray holding unit of the versatile tray holding unit, and the recovery has been maintained. a universal tray collecting unit of the universal tray of the universal tray holding unit, between the universal tray supply unit and the universal tray holding unit, and the universal tray holding unit and the universal tray collecting unit In the meantime, a universal tray transfer unit for transferring a universal tray is provided.

According to this configuration, in the case where, for example, two workpiece transfer units are provided, the unprocessed workpiece can be transferred to the processing tray by the one workpiece transfer unit, and the unprocessed workpiece can be transferred to the processing tray. Another job The workpiece transfer unit transfers the processed workpiece from the processing tray to the processing tray for processing. That is, since the transfer of the unprocessed workpiece and the transfer of the processed workpiece can be simultaneously performed, the time required for the overall transfer can be shortened compared to the case where the transfer is performed individually.

In the above-described configuration, the universal tray transfer unit may include a guide frame that is extended in the left-right direction above the universal tray supply unit and the universal tray storage unit, along the guide frame The guide frame is supported by an elevating mechanism that is freely movable in the left-right direction and that is freely movable up and down, and a holding mechanism that is provided in the elevating mechanism and that holds the multi-purpose tray.

According to this configuration, after the predetermined inspection is performed on the workpiece, the processing tray can be transferred from the inspection area to the processing tray holding unit by the processing tray transfer unit, and the workpiece can be separated from the workpiece by the workpiece transfer unit. The processing tray is transferred to the good versatile tray, and the workpiece of the defective product is transferred from the processing tray to the defective versatile tray. As described above, the inspection of the workpiece can be efficiently classified into a good product and a defective product at the same time as the transfer operation, and the overall steps can be simplified.

In the above-described configuration, the processing tray transfer unit that transfers the processing tray between the universal tray holding unit and the processing area may be configured to be erected on the processing tray transfer unit. The elevating mechanism on the susceptor disposed between the processing tray holding unit and the processing region, the elevating member that is vertically movable up and down by the elevating mechanism, and the rotating mechanism provided on the elevating member are provided in the foregoing A slide mechanism that is freely movable in the front-rear direction on the rotation mechanism, and a grip member that moves integrally with the slide mechanism and that can hold the processing tray.

According to this configuration, when the universal tray holding unit is moved to the front position, the universal tray holding unit can supply the universal tray containing the workpiece or the empty tray from the universal tray supply unit to the universal tray holding unit. The tray is used, and the universal tray is recovered from the universal tray holding unit to the universal tray recycling unit. In this way, the supply and recycling of the universal tray can be efficiently performed in a series of consistent operations.

In the above-described apparatus, a plurality of the workpiece transfer units may be disposed in the left-right direction, and the universal tray platform of the universal tray holding unit holds a plurality of universal trays, and the plurality of universal trays include: unprocessed The unused universal tray for the workpiece and the versatile tray for storing the processed workpiece.

According to this configuration, a plurality of universal trays (for example, a universal tray containing unprocessed workpieces and an empty universal tray containing no workpieces) can be simultaneously transferred by the universal tray transfer unit, and at the transfer position. In the meantime, the operation of transferring the universal tray and the operation of receiving the universal tray containing the processed workpiece can be simultaneously performed, and the time required for the overall operation can be shortened, and the supply of the universal tray can be further efficiently performed. And recycling.

In the apparatus having the above configuration, the processing area may include an inspection area for performing a predetermined inspection on the workpiece, and the processing-use universal tray includes: a good versatile tray for accommodating a workpiece that satisfies a predetermined inspection, and a storage unsatisfied The counter for the workpiece to be inspected is a universal tray.

According to this configuration, the universal tray transfer unit is moved in one direction in the left-right direction when the universal tray is supplied, and is moved in the other direction in the left-right direction when the universal tray is recovered, thereby supplying the universal tray. Since it is recycled, the device can be refined while shortening the movement stroke (stroke length).

In the apparatus having the above configuration, a configuration of a universal tray standby area in which the universal tray is temporarily placed in the movement range of the universal tray transfer unit can be employed.

According to this configuration, when the universal tray for accommodating the processed workpiece is not yet full, the universal tray can be temporarily placed in the standby area of the universal tray, and there is an interruption in which different types of workpieces are to be processed. When commanding, the first-purpose universal tray can be temporarily placed in the standby area of the universal tray, and the universal tray supplied to the universal tray holding unit or the universal tray recovered from the universal tray holding unit can be temporarily placed. The standby tray standby area is standby, and the supply timing or recovery timing is adjusted.

In the apparatus having the above configuration, the processing tray transfer unit may be provided with a processing tray supply and recovery unit for supplying or recovering the processing tray.

According to this configuration, when a plurality of processing regions are provided, the processing tray can be supplied with the recovery unit, the required number of processing trays can be supplied, and the processing tray of the portion can be recovered in the processing region where the processing is to be suspended. . In addition, it can be easily taken out when servicing and inspecting the processing tray.

In the apparatus having the above configuration, the workpiece transfer mechanism may be formed by the universal tray holding unit, the processing tray holding unit, and the workpiece transfer unit, and the workpiece transfer mechanism is arranged in the left-right direction and provided with plural One.

According to this configuration, since the plurality of workpiece transfer mechanisms including the universal tray holding unit, the processing tray holding unit, and the workpiece transfer unit are provided, the workpiece can be continuously transferred in a short time. And it can shorten the time required for the overall workpiece processing, and can improve productivity.

Hereinafter, the best mode for carrying out the invention will be described with reference to the accompanying drawings.

As shown in Fig. 1, the workpiece conveying device includes two transfer regions A1 and A2 arranged in the left-right direction Y, and a processing tray transfer region disposed adjacent to the rear of the two transfer regions A1 and A2. A3; a processing area A4 disposed adjacent to the rear of the processing tray transfer area A3; a universal tray supply area A5 disposed adjacent to the front of the transfer area A1; and disposed adjacent to the front of the transfer area A2 The universal pallet storage area A6; and the universal pallet standby area A7 which is disposed between the universal tray supply area A5 and the universal tray collection area A6, and which allows the universal tray to stand by.

Here, the universal tray T1 is for transporting an unprocessed workpiece or a processed workpiece, and as shown in Fig. 4, a plurality of housing portions T1a arranged in a square array at a predetermined pitch are provided. Further, the universal tray T1 includes an unprocessed universal tray T1 for accommodating unprocessed workpieces, a universal tray T1 for storing processed finished workpieces, and an empty 10,000 without receiving workpieces. Use tray T1. Further, the versatile tray T1 for processing includes a good-purpose universal tray T1 for accommodating a workpiece that satisfies a predetermined inspection, and a versatile universal tray T1 that does not satisfy a predetermined inspection.

On the other hand, the processing tray T2 is used to carry in and out the unprocessed workpiece or the processed workpiece to the processing region A4, and as shown in FIG. 4 As shown, a plurality of housing portions T2a arranged in a square array at a predetermined pitch different from the universal tray T1 are provided.

As shown in FIGS. 1 to 3, the transfer areas A1 and A2 are provided with a universal tray holding unit 10 for holding a universal tray T1 in which a workpiece can be accommodated and movable in the left-right direction Y; The tray holding unit 10 is arranged adjacent to the rear side in the front-rear direction X, and holds the processing tray holding unit 20 for moving the workpiece into and out of the processing tray T2 of the processing area A4 in the left-right direction Y; The workpiece transfer unit 30 is movable between the universal tray T1 and the processing tray T2 so as to be movable in the front-rear direction X and the vertical direction Z.

Further, the universal tray holding unit 10, the processing tray holding unit 20, and the workpiece transfer unit 30 constitute a workpiece transfer mechanism, and the workpiece transfer mechanism is arranged in the transfer direction A1 and A2 in the left-right direction Y, respectively. There are two.

The universal tray holding unit 10 is formed by the following members or the like as shown in Fig. 1 and Figs. 3 to 6, forming a substantially rectangular outline, and holding a plurality of (here, three) versatile thereon. a universal pallet platform 11 of the tray T1; a guide rail 12 that supports the universal pallet platform 11 to be movable in the left-right direction Y; a drive mechanism 13 that moves the universal pallet platform 11 in the left-right direction Y; and a universal pallet platform 11 a slider 14 that moves in the front-rear direction X; and a drive mechanism 15 that drives the slider 14 in the front-rear direction X.

Here, the drive mechanism 13 can use a drive source that can be positionally controlled by a stepping motor or a servo motor, a ball screw (lead screw) that can be rotated by a drive source, and a universal pallet platform 11 a transfer screw mechanism that is screwed into a nut of a ball screw Wait. Similarly to the drive mechanism 13, the drive mechanism 15 can use a drive source that can be position-controlled by a stepping motor or a servo motor, a ball screw (lead screw) that can be rotated by a drive source, and a screw provided on the slider 14. A transfer screw mechanism composed of a nut of a ball screw or a hydraulic or air pressure type telescopic actuator.

In other words, when the workpiece is transferred between the universal tray T1 of the universal tray holding unit 10 and the processing tray T2 held by the processing tray holding unit 20, the universal tray platform 11 is driven by the drive mechanism 13 The direction Y is driven at a predetermined pitch, and the accommodating portion T1a for accommodating the workpiece to be transferred or the workpiece to be transferred is positioned directly below the workpiece transfer unit 30 in the left-right direction Y.

On the other hand, when the universal tray T1 is supplied or recovered, the slider 14 is driven by the drive mechanism 15 in the front-rear direction X, and the workpiece is transferred to the rear position by the workpiece transfer unit 30, and the universal tray is supplied or recovered. Moves between the front positions of T1.

The processing tray holding unit 20 is formed of the following members or the like as follows: a processing tray platform 21 that forms a substantially rectangular outline and holds the processing tray T2 thereon, as shown in FIG. 1 and FIGS. 3 to 6; The processing tray platform 21 supports a guide rail 22 that is freely movable in the left-right direction Y, a drive mechanism 23 that moves the processing tray platform 21 in the left-right direction Y, and a lifting mechanism 24 that moves the processing tray platform 21 in the vertical direction Z. .

Here, the drive mechanism 23 can use a drive source that can be position-controlled by a stepping motor or a servo motor, or a ball screw that can be rotated by a drive source. A rod (lead screw) and a transfer screw mechanism formed by a nut that is provided on the processing tray stage 21 and screwed to the ball screw. The elevating mechanism 24 can use a hydraulic or pneumatic type telescopic actuator that can position the processing tray platform 21 at a desired height in the vertical direction Z.

That is, when the workpiece is transferred between the universal tray T1 of the universal tray holding unit 10 and the processing tray T2 held by the processing tray holding unit 20, the processing tray stage 21 is driven by the driving mechanism 23 The left-right direction Y is driven at a predetermined pitch, and the accommodating portion T2a for accommodating the workpiece to be transferred or the workpiece to be transferred is positioned directly below the workpiece transfer unit 30 in the left-right direction Y.

In addition, when the processing tray transfer unit 40 receives the delivery processing tray T2, the processing tray transfer unit 40 holds the processing tray T2, and the processing tray platform 21 is lowered to a predetermined height by the elevating mechanism 24. On the other hand, when the processing tray transfer unit 40 receives the processing tray T2, the processing tray transfer unit 40 causes the processing tray T2 to be positioned at a predetermined position, and the processing tray platform is moved by the lifting mechanism 24. 21 is raised to a predetermined height and held (taken).

The workpiece transfer unit 30 is provided in the transfer direction A1 and A2 in the left-right direction Y as shown in Figs. 1 to 3 and 7A to 7C, and is provided by the transfer unit 30. The guide mechanism 31 that is extended in the front-rear direction X above the regions A1 and A2 supports the elevating mechanism 32 that is movable in the front-rear direction X and moves up and down in the vertical direction Z, and is provided at the lower end of the elevating mechanism 32. The holding head 33 of the workpiece can be formed.

Here, the guide mechanism 31 can use a drive source capable of position control such as a stepping motor or a servo motor that moves the lift mechanism 32 while moving in the front-rear direction X, and a ball screw that is driven to rotate by a drive source. A screw mechanism and a transfer screw mechanism including a nut that is screwed to the ball screw of the lift mechanism 32, and the lift mechanism 32 can be driven by a drive source that can be position-controlled by a stepping motor or a servo motor. a ball screw (lead screw) that drives the rotation of the source, a transfer screw mechanism that is provided in the lift mechanism 32 and that is screwed into the nut of the ball screw, or a hydraulic or air-pressure type telescopic actuator. The holding head 33 can use an adsorption pad for adsorbing a workpiece or a holding piece for holding a workpiece from both sides.

That is, when the workpiece is transferred between the universal tray T1 and the processing tray T2, the elevating mechanism 32 is appropriately moved in the front-rear direction X by the guiding mechanism 31 to be positioned at a predetermined position, and is lowered at the position. The workpiece is held by the holding head 33, and then raised again, and then positioned by the guiding mechanism 31 directly above the housing portions T2a, T1a of the processing tray T2 or the universal tray T1 to be transferred, and lowered at the position It is accommodated in the accommodating parts T2a and T1a.

As described above, when the unprocessed workpiece is transferred from the versatile tray T1 to the processing tray T2, or when the processed workpiece that has completed the predetermined processing is transferred from the processing tray T2 to the versatile tray T1 in the processing area A4, The tray holding unit 10 and the processing tray holding unit 20 are appropriately moved in the left-right direction Y in accordance with a predetermined storage pitch, and then positioned at a predetermined take-out position and storage position, and the workpiece transfer unit 30 is moved in the front-rear direction X. The workpiece is conveyed between the universal tray T1 and the processing tray T2, and moved in the vertical direction Z to take out the workpiece or accommodate the workpiece, and the workpiece can be transferred between the universal tray T1 and the processing tray T2. As described above, since the universal tray holding unit 10 and the processing tray holding unit 20 are appropriately moved in the left-right direction Y, the workpiece as the object to be taken out or stored is often located below the workpiece transfer unit 30 in the left-right direction Y, and Since the workpiece transfer unit 30 moves in the vertical direction Z and the front-rear direction X to transfer the workpiece, the workpieces taken out from the housing portions T1a and T2a of the trays T1 and T2 move only in the XZ plane, so that the workpiece can be moved at a high speed. Moreover, the speed of the transfer operation can be achieved. Further, since the universal tray holding unit 10, the processing tray holding unit 20, and the workpiece transfer unit 30 are each a moving mechanism that moves only in one direction (the left-right direction Y or the front-rear direction X) in the plane, The mechanical error is reduced, and high-precision positioning is achieved. As a result, when the workpiece is transferred between the universal tray holding unit 10 and the processing tray holding unit 20, it is possible to prevent the occurrence of a mistake or a storage error during the removal or storage of the workpiece, and the workpiece can be accurately transferred.

Further, since the two workpiece transfer units 30 are provided in the transfer areas A1 and A2, respectively, arranged in the left-right direction Y, the universal tray holding unit 10 holds the unprocessed multipurpose for housing the unprocessed workpiece. When the tray T1 and the universal tray T1 for processing the processed workpiece are accommodated, the unprocessed workpiece can be transferred from the unused universal tray T1 to the processing tray T2 by one workpiece transfer unit 30, and at the same time The processed workpiece is transferred from the processing tray T2 to the processing tray T1 for processing by the other workpiece transfer unit 30. That is, the transfer of the unprocessed workpiece and the transfer of the processed workpiece can be performed at the same time, so that the time required for the entire transfer can be shortened compared to the case where the transfer is performed individually.

In the processing tray transfer area A3, as shown in FIG. 1 and FIG. 3, the processing tray transfer unit 40 is disposed.

As shown in FIG. 8A, FIG. 8B, and FIG. 9, the processing tray transfer unit 40 is formed of the following members: a guide rail 41 that is elongated in the left-right direction Y, and a movable base 42 that is freely movable on the guide rail 41. An elevating mechanism 43 that is erected on the movable base 42; an elevating member 44 that moves up and down in the up-down direction Z by the elevating mechanism 43; a rotating mechanism 45 that is provided on the elevating member 44; and a gantry 46 that is provided on the rotating mechanism 45. A pair of guide frames 47 provided on the gantry 46; a slide mechanism 48 provided on the gantry 46; and a grip member 49 for holding the processing tray T2.

Here, the movable base 42 is moved in the left-right direction Y along the guide rail 41 by the built-in drive mechanism, and the held processing tray T2 or the gantry 46 on which the processing tray T2 is not held is positioned in the transfer area. A1 or the transfer area A2. Further, when the processing area A4 includes a plurality of processing areas, it is positioned in the corresponding processing area.

The elevating mechanism 43 is a mechanism for positioning the elevating member 44 at a desired height in the vertical direction Z so that the processing tray T2 is at a desired height, and a hydraulic or pneumatic type telescopic actuator and a transfer screw mechanism can be used. Wait. The rotating mechanism 45 is a mechanism for adjusting the direction of the processing tray T2 in the horizontal plane (XY plane), and a motor, a gear mechanism, or the like can be used. The pair of guide frames 47 are for holding the processing tray T2, and are sandwiched from both sides to be restricted and positioned. The slide mechanism 48 is an area that can slide (elongate) to the transfer area A1, A2 (processing tray holding unit 20) or the processing area A4 in order to convey and receive the processing tray T2. The grip member 49 is an edge portion that moves integrally with the slide mechanism 48 and holds and holds the processing tray T2.

In other words, since the processing tray transfer unit 40 transfers the processing tray T2 between the processing tray holding unit 20 and the processing area A4, it can be smoothly transferred to the processing step after the workpiece transfer step, and the processing can be completed. The workpiece is smoothly returned to the processing tray holding unit 20. Further, when the processing area A4 is located at a plurality of parts, the processing tray T2 can be smoothly transferred between the appropriately selected processing area and the processing tray holding unit 20.

In the processing area A4, the inspection areas A4' and A4" which are a plurality of processing areas for performing predetermined inspection on the workpiece accommodated in the processing tray T2 are arranged in the left-right direction Y. In the inspection areas A4', A4", If the workpiece is a semiconductor wafer, various inspection units for performing conduction inspection, operation inspection, and the like can be configured.

In the universal tray supply area A5, as shown in FIGS. 1 to 3, a plurality of (here, three) universal tray supply units 50 are disposed.

As shown in FIGS. 10A to 10C, the versatile tray supply unit 50 is formed of the following members: a platform 51 for placing the universal tray T1; and a lifting mechanism 52 for moving the platform 51 up and down in the vertical direction Z; The holding mechanism 53 of the holding piece 53a held in the upper supply position by sandwiching the universal tray T1.

Further, in order to carry in the universal tray T1, the universal tray supply unit 50 pulls in the transport belt C in the horizontal direction above the lowermost stage 51.

Here, the elevating mechanism 52 is configured to appropriately raise and lower the platform 51 at a predetermined height position, and the position is, for example, a supply position for supplying the universal tray T1 to a later-described universal tray transfer unit 80, and a supply slightly lower than the supply position. A hydraulic-type or air-pressure type telescopic actuator, a transfer screw mechanism, or the like can be used as the standby position, the retracted position that is slightly lower than the conveyor belt C, and which is retracted for carrying in. The holding mechanism 53 is a universal tray T1 in which the holding piece 53a is held at the supply position by the platform 51 and the lifting mechanism 52, and the lowering of the platform 51 can be realized (the uppermost section of the universal tray T1 of the platform 51 is held. With the tray T1 off).

In other words, when the platform 51 is in the retracted position, when the conveyor C is loaded into the overlapping multi-purpose tray T1, the elevating mechanism 52 operates, and the platform 51 holds the universal tray T1 and rises, so that the uppermost unit is used. The tray T1 is positioned at the supply position.

Next, the gripping mechanism 53 holds the uppermost multi-purpose tray T1 with the grip piece 53a and is held at the supply position. Then, the elevating mechanism 52 operates, and the platform 51 stands by in the state in which the remaining multi-purpose tray T1 is held down to the supply standby position.

Next, when the versatile tray transfer unit 80 described later receives the versatile tray T1 held at the supply position, the elevating mechanism 52 operates, and the platform 51 rises to position the uppermost multi-purpose tray T1 among the overlapping versatile trays T1. In the supply location.

Then, the gripping mechanism 53 holds and holds the uppermost multi-purpose tray T1, and the platform 51 stands by again in the state in which the remaining multi-purpose tray T1 is held down to the supply standby position. The above operation is repeated in the universal tray supply unit 50.

In this multi-purpose tray supply area A5, three universal tray supply units 50 are disposed. Therefore, for example, the universal tray T1 containing the unprocessed workpieces is supplied from the two universal tray supply units 50, and one universal tray supply unit 50 is provided. In order to transfer the processed workpiece, an empty universal tray T1 in which the workpiece is not stored is supplied.

Further, the universal tray supply unit 50 can be increased or decreased depending on the processing. For example, if the replacement processing of the workpiece is increased, the universal tray supply unit 50 can be increased to three or more. On the other hand, when the replacement processing of the workpiece is reduced or the universal tray supply unit 50 is faulty, it can also be used from the universal. The tray supply area A5 is cut away, and the number of the universal tray supply units 50 is reduced. Here, the increase or decrease of the universal tray supply unit 50 can be performed in accordance with an instruction such as a switch (not shown).

In the universal tray collection area A6, as shown in Figs. 1 to 3, a plurality of (here, four) universal tray collecting units 60 are disposed.

The versatile tray recovery unit 60 is formed in the same manner as the above-described versatile tray supply unit 50 as shown in FIGS. 10A to 10C, and is formed of the following members or the like: the versatile tray T1 is placed. The platform 61; the elevating mechanism 62 that elevates and lowers the stage 61 in the up-down direction Z; and the holding mechanism 63 of the holding piece 63a which hold|maintains the holding tray T1 in the upper collection position.

Further, in the universal tray collecting unit 60, in order to carry out the stacked multi-purpose tray T1, the conveyor belt C is pulled in the horizontal direction at a position higher than the lowermost stage 61.

Here, the elevating mechanism 62 is positioned such that the platform 61 is appropriately raised and lowered and positioned at a predetermined height position. This position is, for example, a recovery position in which the universal tray T1 is collected from the multi-purpose tray transfer unit 80 described later, and is slightly lowered in comparison with the recovery position. A hydraulic-type or air-pressure type telescopic actuator, a transfer screw mechanism, or the like can be used as the standby position, the retracted position that is lower than the conveyor belt C, and which is retracted for carrying out. The holding mechanism 63 is a universal tray T1 in which the holding piece 63a is held at the recovery position by the platform 61 and the elevating mechanism 62, so that the rise of the stage 61 can be achieved (the uppermost section of the universal tray T1 held by the platform 61) Engaged with the tray T1).

That is, when the universal tray transfer unit 80 described later positions the universal tray T1 at the collection position, the grip mechanism 63 receives and holds the universal tray T1.

Then, the elevating mechanism 62 is operated, the platform 61 is raised, and the uppermost universal tray T1 of the overlapped universal tray T1 is joined to the universal tray T1 held in the recovery position, and is held by the holding mechanism. The grip state of 63.

Next, the elevating mechanism 62 operates, and the platform 61 stands by in the state in which the universal tray T1 is held down to the recovery standby position.

Then, when the universal tray T1 is again handed over from the later-described universal tray transfer unit 80 to the grip mechanism 63, the platform 61 is raised to hold the held universal tray T1, and the grip by the grip mechanism 63 is released. In the holding state, the platform 61 will stand by again in the state in which the universal tray T1 is held down to the recovery standby position. The above operation is repeated in the universal tray recovery unit 60.

Next, when the universal tray T1 is overlapped to a predetermined number, the platform 6 is lowered to the retracted position, and the held universal tray T1 is delivered to the conveyor belt C, and the conveyor belt C is carried out of the universal tray T1.

In the versatile tray collecting area A6, four versatile tray collecting units 60 are disposed. Therefore, for example, the two versatile tray collecting unit 60 collects the versatile tray T1 in which the good workpieces satisfying the predetermined inspection among the processed workpieces are stored. The other two universal tray collecting units 60 are configured to collect a universal tray T1 in which a defective workpiece that does not satisfy the predetermined inspection among the processed workpieces is stored. Further, the universal tray collecting unit 60 may be increased or decreased depending on the processing, and the operation of increasing or decreasing may be performed in accordance with an instruction such as a switch (not shown).

In the universal tray standby area A7, as shown in FIGS. 1 and 2, a mounting platform 70 is disposed.

The mounting platform 70 is disposed between the universal tray supply unit 50 and the universal tray collecting unit 60 in the left-right direction Y, and can mount a plurality of (here, three) universal trays T1 to stand by .

As described above, by providing the universal tray standby area A7, the universal tray T1 can be temporarily placed when the universal tray T1 for accommodating the processed workpiece (good or defective workpiece) has not been filled by the workpiece. The platform 70 is placed on the table to stand by. Further, when there is an interrupt command or the like to process different types of workpieces, the first-purpose universal tray T1 can be temporarily placed on the mounting platform 70 to be placed on standby, and further supplied to the universal tray holding unit 10 The universal tray T1 or the universal tray T1 recovered from the universal tray holding unit 10 is temporarily placed on the mounting platform 70 to stand by, and the supply timing or recovery timing is adjusted.

In the universal tray supply area A5, the universal tray standby area A7, and the universal tray collection area A6, as shown in FIGS. 1 and 2, the universal tray T1 is moved in the vertical direction Z and the left-right direction Y. Universal pallet transfer unit 80.

The universal tray transfer unit 80 is used to make the universal tray supply area A5, the universal tray standby area A7, and the universal tray recovery area A6 face the left and right direction as shown in FIGS. 11A to 11C. The elongated guide frame 81, the slide mechanism 82 that moves in the left-right direction Y along the guide frame 81, the two lift mechanisms 83 that are held up and down in the vertical direction Z by the slide mechanism 82, and the lift mechanism 83 are moved up and down by the respective lift mechanisms 83. The direction Z is raised and lowered and has a holding mechanism 84 or the like for holding the holding piece 84a of the universal tray T1.

Here, the slide mechanism 82 is a desired position for moving the elevating mechanism 83 along the guide frame 81 to the left-right direction Y, and a hydraulic or air-pressure type telescopic actuator, a transfer screw mechanism, or the like can be used. The elevating mechanism 83 is a desired position for moving the holding mechanism 84 to the vertical direction Z, and a hydraulic or pneumatic type telescopic actuator, a transfer screw mechanism, or the like can be used. The holding mechanism 84 grips the universal tray T1 from both sides by its four holding pieces 84a.

That is, when the universal tray T1 is transferred from the universal tray supply unit 50 to the universal tray holding unit 10, when the universal tray T1 is transferred from the universal tray holding unit 10 to the universal tray collecting unit 60, When the universal tray T1 temporarily waits in the universal tray standby area A7 from the universal tray supply unit 50 and temporarily stops the universal tray T1 from the universal tray holding unit 10 in the universal tray standby area A7, the universal tray is transferred. The unit 80 is raised by the holding mechanism 84 to hold the universal tray T, and is lowered after moving to a predetermined position in the left-right direction Y, and then the holding mechanism 84 is released in the position to be transferred to transfer the universal tray T1.

As described above, since the universal tray transfer unit 80 moves in the YZ plane in the left-right direction Y and the vertical direction Z to move the universal tray T1, the movement stroke (stroke length) of the universal tray T1 can be supplied or The recovered moving stroke (length of the road) is shortened, so that the device can be refined.

Further, the take-out position of the universal tray T1 in the universal tray supply unit 50, the placement position in the universal tray holding unit 10 (the universal tray platform 11 is moved to the front front position), and the universal tray collecting unit 60 The collection position of the universal tray T1 and the standby position in the standby stage 70 in which the universal tray T1 is temporarily waiting are arranged in a substantially straight line in the left-right direction Y.

Therefore, the moving mechanism for moving the universal tray transfer unit 80 in the plane is only required to provide a moving mechanism that moves only in the left-right direction Y, so that the mechanical error of the moving mechanism can be reduced. Therefore, the universal tray transfer unit 80 can be stopped with high accuracy and surely at a predetermined position, and the universal tray T1 can be taken out from the predetermined position and surely placed at a predetermined position to be transferred.

When the overall operation of the above-described workpiece conveying device is described, first, when the universal tray supply unit 50 supplies the universal tray T1 containing the unprocessed workpiece and the universal tray T1 in which the workpiece is not stored, the universal tray is moved. The loading unit 80 holds the universal tray T1 and then transfers it to the universal tray holding unit 10 that has moved to the front position.

Next, the universal tray holding unit 10 moves to the rear position where the workpiece transfer unit 30 performs the transfer. Further, the processing tray holding unit 20 holds the processing tray T2 in which the workpiece processed in the previous step is stored.

Next, one workpiece transfer unit 30 transfers the workpiece processed in the processing area A4 from the processing tray T2 to the universal tray T1, while the other workpiece transfer unit 30 transfers the unprocessed workpiece from the universal tray T1 to Processing tray T2.

Here, when the processed workpiece is transferred to the universal tray T1, the good products that satisfy the inspection are classified into the good universal tray T1, and the defective products that are not inspected are classified into the defective universal tray T1. Containment.

In the above-described transfer operation, the universal tray holding unit 10 and the processing tray holding unit 20 are appropriately moved in the left-right direction Y in accordance with each predetermined storage pitch, so that the workpieces to be taken out and stored are often in the left-right direction Y. Located below the workpiece transfer unit 30, the workpiece transfer unit 30 moves in the vertical direction Z and the front-rear direction X to transfer the workpiece. Therefore, the workpiece can be moved at a high speed, and the speed of the transfer operation can be increased.

When the transfer of the unprocessed workpiece is completed by the workpiece transfer unit 30, the processing tray transfer unit 40 transfers the processing tray T2 on the processing tray holding unit 20 to the processing area A4 (inspection area A4' or inspection area A4) ).

Then, when the processing area A4 ends the predetermined inspection, the processing tray transfer unit 40 holds the processing tray T2 for accommodating the processed workpiece and transfers it to the processing holding unit 20.

When the processed workpiece is transferred to the universal tray T1 by the workpiece transfer unit 30, the universal tray holding unit 10 moves to the front position, and the universal tray transfer unit 80 holds the universal tray T1 and then transfers it to Universal pallet recovery unit 60.

The universal tray collecting unit 60 is carried out via the conveyor belt C when the universal tray T1 in which the processed workpiece is stored is superimposed to a predetermined amount.

Here, the universal tray T1 that has not been filled with the processed workpiece may be temporarily placed in the universal tray standby area A7 before being transferred to the universal tray recovery unit 60, and then transferred to the universal tray holding unit 10 again. Then, it is transferred to the universal tray recycling unit 60 after being completely filled with the workpiece.

Further, when there is an interrupt command for processing different types of workpieces, the other processing trays T2 are supplied to the processing tray holding unit 20, and the existing multi-purpose tray T1 located on the universal tray holding unit 10 is temporarily placed. The universal tray standby area A7 stands by. Next, the universal tray T1 containing the workpiece corresponding to the type of the command or the new empty universal tray T1 not containing the workpiece is supplied to the universal tray holding unit 10, and then the same transfer and deal with. Further, it is also possible to stand by in the standby area A7 only by using the universal tray T1 for accommodating the processed workpiece.

As described above, when the universal tray T1 for accommodating the processed workpiece is not yet full, the universal tray T1 can be temporarily placed in the universal tray standby area A7, and when there is an interrupt command for processing different types of workpieces, The versatile tray T1 that is to be carried out can be temporarily placed in the universal tray standby area A7, and the versatile tray T1 supplied to the omni tray holding unit 10 or the versatile tray holding unit 10 can be reused. The tray T1 temporarily stands by in the universal tray standby area A7, and adjusts the supply timing or the recovery timing.

Further, in the above-described workpiece transporting apparatus, the workpiece transfer mechanism including the universal tray holding unit 10, the processing tray holding unit 20, and the two workpiece transfer units 30 is arranged in the left-right direction Y. Therefore, the transfer of the workpiece can be continuously performed in a shorter time, and the time required for the overall workpiece processing can be shortened, and the productivity can be improved.

Further, according to the above configuration, when the predetermined process ends halfway, the unfinished universal tray T1 in which the workpiece is not completely accommodated or not completely transferred is generated in each of the two workpiece transfer mechanisms. At this time, the unfinished universal tray T1 held by one workpiece transfer mechanism is transferred to another workpiece transfer mechanism, and the workpiece is housed (transferred) to a universal tray T1. At this time, the multi-purpose tray T1 other than one of the versatile trays T1 to be stored is temporarily moved to the standby area A7.

Specifically, for example, in the case of two workpiece transfer mechanisms, an unfinished universal tray T1 for accommodating a good workpiece and an unfinished universal tray T1 for accommodating a defective workpiece are described. First, Each of the universal tray holding units 10 is moved to a position in front of the supply or collection of the universal tray T1.

Next, the universal tray transfer unit 80 takes out the unfinished universal tray T1 for accommodating the defective workpiece held by the one-purpose tray holding unit 10, and then transfers it to the standby area A7 (the mounting stage 70).

Then, the universal tray transfer unit 80 takes out the unfinished universal tray T1 for accommodating the good workpiece held by the other universal tray holding unit 10, and then transfers it to the loading of one of the universal tray holding units 10. Position (the position of the unfinished universal tray T1 for holding the workpiece is held). Therefore, in the one-purpose tray holding unit 10, two unfinished universal trays T1 for accommodating good workpieces will be held. In this state, a universal tray holding unit 10 is moved to the rear position, whereby the workpiece can be transferred from one universal tray T1 to another by the interlocking operation of the universal tray holding unit 10 and the workpiece transfer unit 30. An empty housing portion T1a of the universal tray T1. Then, when the other universal tray T1 is completely filled with the good workpiece, the transfer operation is ended. Further, the transfer of the workpiece to the unfinished universal tray T1 is completed when either of the unfinished universal trays T1 is completely filled by the workpiece or when there is no workpiece to be transferred.

When the transfer is completed, a universal tray holding unit 10 moves the universal tray T1 filled with the workpiece to the front position, and the universal tray transfer unit 80 transfers the universal tray T1 to the universal tray recovery unit. 60.

On the other hand, the unfinished universal tray T1 for accommodating the defective workpiece which is placed in the standby area A7 is taken out from the standby area A7 by the universal tray transfer unit 80, and then transferred to another universal tray. The holding position of the holding unit 10 (the position of the unfinished universal tray T1 for accommodating the good workpiece is held). Therefore, the other universal tray holding unit 10 will hold two unfinished universal trays T1 for accommodating the workpieces. In this state, the other universal tray holding unit 10 is moved to the rear position, whereby the workpiece can be transferred from a universal tray T1 by the interlocking action of the other universal tray holding unit 10 and the workpiece transfer unit 30. The accommodating portion T1a to the empty of the other universal tray T1. Since the subsequent operation is the same as the case of transferring the good workpiece, the description thereof will be omitted.

As described above, the unfinished universal tray T1 that has not completely accommodated the workpiece is collectively placed on each of the universal tray holding units 10, and the workpiece is transferred by the interlocking operation with the respective workpiece transfer units 30. The unfinished universal tray T1 can be formed into one and can be processed efficiently.

In addition, this is a case where the universal tray T1 that is not to be processed is temporarily moved to the standby area A7 and is in standby. However, the present invention is not limited to this method, and the universal tray transfer unit 80 is provided with two holding mechanisms 84. Therefore, instead of the standby area A7, the one holding tray 84 temporarily holds the universal tray T1 which is not the processing target and stands by. Further, by operating the two transfer areas A1 and A2 at substantially the same time without using the standby area A7, for example, an unfinished good multi-purpose tray that has not been filled with the processed workpiece in one transfer area A1 is performed. When T1 is transferred to each other, in the other transfer area A2, the unfinished defective goods trays T1 that have not been filled by the processed workpieces are transferred to each other, and the time for transferring the workpieces to one of the universal trays T1 can be shortened. And can be processed efficiently.

Fig. 12 is a plan view showing another embodiment of the workpiece conveying device of the present invention. In this embodiment, as shown in FIG. 12, a processing tray supply and collection unit 90 that supplies or collects the processing tray T2 to the processing tray transfer unit 40 is provided.

Therefore, when the processing area A4 is composed of a plurality of processing areas (inspection areas A4', A4"), only the required number of processing trays T2 can be supplied by the processing tray supply recovery unit 90. In the case of the suspended processing area (inspection area A4' or inspection area A4"), only the processing tray T2 of this part can be recovered, and it can be easily taken out while maintaining and inspecting the processing tray T2.

As described above, according to the workpiece transfer device of the present invention, it is possible to achieve simplification of the structure, refinement of each mechanism, miniaturization of the entire apparatus, space saving of the installation area, and shortening of the time required for the transfer of the workpiece, and the like. Various processes such as testing, inspection, measurement, processing, and assembly can be efficiently applied to workpieces such as semiconductor wafers, substrates, and other electronic components, and productivity can be improved.

[Industry use possibility]

As described above, the workpiece transporting apparatus of the present invention is required to perform the transfer of the workpiece between the universal tray T1 and the processing tray T2 when various processes are applied to the workpiece, and the field of semiconductor manufacturing is self-evident. Automotive or its parts production lines, electronic machines or their parts production lines, and other mechanical or electronic parts are also very useful.

10‧‧‧ million pallet holding unit

11‧‧‧ universal pallet platform

12‧‧‧ rails

13‧‧‧Drive mechanism

14‧‧‧Sliding parts

15‧‧‧Drive mechanism

20‧‧‧Processing tray holding unit

21‧‧‧Processing pallet platform

22‧‧‧ rails

23‧‧‧ drive mechanism

24‧‧‧ Lifting mechanism

30‧‧‧Workpiece transfer unit

31‧‧‧Guiding agency

32‧‧‧ Lifting mechanism

33‧‧‧ Keep head

40‧‧‧Processing tray transfer unit

41‧‧‧rails

42‧‧‧ movable base

43. . . Lifting mechanism

44. . . Lifting member

45. . . Rotating mechanism

46. . . shelf

47. . . Guide frame

48. . . Sliding mechanism

49. . . Grip member

50. . . Universal tray supply unit

51. . . platform

52. . . Lifting mechanism

53. . . Holding mechanism

53a. . . Hold piece

60. . . Universal pallet recycling unit

61. . . platform

62. . . Lifting mechanism

63. . . Holding mechanism

63a. . . Hold piece

70. . . Loading platform

80. . . Universal pallet transfer unit

81. . . Guide frame

82. . . Sliding mechanism

83. . . Lifting mechanism

84. . . Holding mechanism

84a. . . Hold piece

90. . . Processing tray supply recycling unit

A1. . . Transfer area

A2. . . Transfer area

A3. . . Processing tray transfer area

A4. . . Processing area

A4’. . . Inspection area

A4"... inspection area

A5. . . Universal tray supply area

A6. . . Universal pallet recycling area

A7. . . Universal pallet standby area

C. . . conveyor

T1. . . Universal tray

T1a. . . Containment department

T2. . . Processing tray

T2a. . . Containment department

Fig. 1 is a plan view showing an embodiment of a workpiece conveying device of the present invention.

Fig. 2 is a front elevational view of the workpiece handling device of Fig. 1.

Fig. 3 is a side view of the workpiece handling device of Fig. 1.

Fig. 4 is a plan view showing a universal tray holding unit and a processing tray holding unit which constitute one part of the workpiece conveying device of Fig. 1.

Fig. 5 is a front elevational view showing a universal tray holding unit and a processing tray holding unit which constitute one part of the workpiece conveying device of Fig. 1.

Fig. 6 is a side view showing a universal tray holding unit and a processing tray holding unit which constitute one part of the workpiece conveying device of Fig. 1.

7A, 7B, and 7C are a plan view, a side view, and a front view, respectively, of a workpiece transfer unit constituting one of the workpiece transfer devices of Fig. 1.

8A and 8B are a plan view and a front view, respectively, of the processing tray transfer unit constituting one of the workpiece conveying devices of Fig. 1.

Fig. 9 is a side view showing a processing tray transfer unit constituting one of the workpiece conveying devices of Fig. 1.

10A, 10B, and 10C are a side view, a front view, and a plan view, respectively, of a universal tray supply unit and a universal tray collecting unit that constitute one of the workpiece conveying devices of Fig. 1.

11A, 11B, and 11C are a side view, a front view, and a plan view, respectively, of a universal tray transfer unit constituting one of the workpiece transfer devices of Fig. 1.

Fig. 12 is a plan view showing another embodiment of the workpiece conveying device of the present invention.

10. . . Universal tray holding unit

20. . . Processing tray holding unit

30. . . Workpiece transfer unit

31. . . Guiding mechanism

32. . . Lifting mechanism

40. . . Processing tray transfer unit

42. . . Movable base

43. . . Lifting mechanism

46. . . shelf

47. . . Guide frame

49. . . Grip member

50. . . Universal tray supply unit

60. . . Universal pallet recycling unit

80. . . Universal pallet transfer unit

81. . . Guide frame

82. . . Sliding mechanism

83. . . Lifting mechanism

84. . . Holding mechanism

A1. . . Transfer area

A2. . . Transfer area

A3. . . Processing tray transfer area

A4. . . Processing area

A4’. . . Inspection area

A4"... inspection area

A5. . . Universal tray supply area

A6. . . Universal pallet recycling area

A7. . . Universal pallet standby area

T1. . . Universal tray

T2. . . Processing tray

Claims (10)

A workpiece handling device comprising: a universal tray holding unit having: a universal tray platform for holding a universal tray that can accommodate a workpiece; and a driving mechanism for moving the universal tray platform in a left-right direction; The tray holding unit includes a processing tray platform that is disposed adjacent to the universal tray holding unit and that is arranged rearward in the front-rear direction and that holds the processing tray for loading and unloading the workpiece into the processing area, and the processing tray a drive mechanism for moving the tray platform in the left-right direction; and a workpiece transfer unit for transferring the workpiece between the universal tray and the processing tray, and having a front-back direction above the universal tray and the processing tray The guide mechanism that is extended and supported by the guide mechanism is supported by an elevating mechanism that is movable in the front-rear direction and is movable up and down in the vertical direction, and a holding head that is provided in the elevating mechanism to hold the workpiece. The workpiece handling device of claim 1, wherein the universal tray holding unit has a rear position between the workpiece transfer unit by the workpiece transfer unit and a front position of the supply or recovery universal tray. A sliding member that supports the universal pallet platform so as to be movable in the front-rear direction in such a manner that the universal pallet platform can be moved in the front-rear direction. The workpiece handling device according to the second aspect of the invention, wherein the universal tray holding unit is disposed in front of the front and rear direction: a universal tray supply unit for supplying the tray to the universal tray holding unit, and a universal tray recovery unit for recovering the universal tray held by the universal tray holding unit, in the universal tray supply unit and the universal tray A universal tray transfer unit that transfers the universal tray is provided between the holding units and between the universal tray holding unit and the universal tray collecting unit. The workpiece transfer device according to the third aspect of the invention, wherein the universal tray transfer unit includes a guide frame that is extended in a horizontal direction above the universal tray supply unit and the universal tray storage unit, along the guide frame The elevating mechanism that is freely movable in the left-right direction and freely moves up and down in the vertical direction by the guide frame, and a holding mechanism that is provided in the elevating mechanism and that holds the multi-purpose tray. The workpiece transfer device according to the first aspect of the invention, further comprising: a processing tray transfer unit that transfers the processing tray between the universal tray holding unit and the processing area, wherein the processing tray transfer unit has: a lifting mechanism provided on the base disposed between the processing tray holding unit and the processing region, a lifting member that is vertically movable up and down by the lifting mechanism, a rotating mechanism provided on the lifting member, and a rotating mechanism A slide mechanism that is provided on the rotation mechanism and that is free to move in the front-rear direction, and a grip member that moves integrally with the slide mechanism and that can hold the processing tray. For example, the workpiece handling device of claim 1 of the patent scope, wherein a plurality of the workpiece transfer units are disposed in a direction, and the universal tray platform of the universal tray holding unit holds a plurality of universal trays, wherein the plurality of universal trays comprise: an unprocessed universal tray for storing unprocessed workpieces, and The universal tray can be stored for the processing of the finished workpiece. The workpiece handling device according to claim 6, wherein the processing area includes an inspection area for performing a predetermined inspection on the workpiece, and the processing completed universal tray includes: a good universal tray for accommodating a workpiece that satisfies a predetermined inspection, and A universal tray for defective products that does not satisfy the predetermined inspection. The workpiece transfer device according to claim 3, wherein a universal tray standby area for temporarily waiting for the universal tray is provided in a movement range of the universal tray transfer unit. The workpiece handling device according to claim 5, wherein the processing tray transfer unit is provided with a processing tray supply and recovery unit for performing supply or recovery of the processing tray. The workpiece transfer device according to claim 1, wherein the workpiece transfer unit, the processing tray holding unit, and the workpiece transfer unit form a workpiece transfer mechanism, and the workpiece transfer mechanism is arranged in the left-right direction. There are multiple.