TWI387152B - Measurement platform of thermal wafer combined with fuel cell and its method - Google Patents

Description

Thermal wafer combined with fuel cell measuring platform and method thereof

Refers to the method of measuring a thermal wafer using a Resistance Type Detector, and developed a thermal wafer measuring platform using a fuel cell.

Since the industrial revolution, the use of fossil fuels as an energy industry has driven rapid economic growth. However, in recent years, with the massive exploitation of petrochemical energy, energy shortages and environmental pollution have arisen, especially with the greenhouse effect. The global warming, rising sea levels and the intensification of global climate change will severely reduce the space for human survival.

Therefore, the Kyoto Protocol adopted in 1997 further regulates the future greenhouse gas reduction responsibilities of industrial countries, and derives the development of renewable clean energy, including solar energy, wind power, geothermal energy, hydropower, Biomass energy, tidal energy and magnetic energy, etc.; and electric energy is the mother of industry. Therefore, in recent years, the search for alternative energy sources has been widely studied and discussed by various sectors, and fuel cells are one of the most important alternative energy sources in the future. The basic principle is to convert chemical energy directly into electrical energy.

The type of fuel cell is distinguished by electrolyte. It can be mainly divided into alkaline fuel cell (AFC) and proton exchange membrane fuel cell (Polymer Electrolyte). Membrane Fuel Cells (PEMFC), Phosphoric Acid Fuel Cells (PAFC), Molten Carbonate Fuel Cells (MCFC), Solid Oxide Fuel Cells (SOFC), Direct Methanol Fuel Direct Methanol Fuel Cells (DMFC), etc. If it is distinguished by operating temperature, it can be divided into low temperature fuel cells (operating temperature 50 ° C ~ 200 ° C), common AFC, PEMFC, DMFC; medium temperature fuel cell (operating temperature 160 ° C ~ 220 ° C), common There are PAFC; high temperature fuel cells (operating temperature 600 ° C ~ 1000 ° C), common MCFC, SOFC.

Among them, the DMFC with similar principle but safer and closer to normal temperature operation is evaluated as a potential alternative power source in the 3C industry due to its simple structure, high volumetric energy unit density, low battery operating temperature and easy portability. One. But with the evolution of chip packaging technology, and the heat dissipation problem caused by the increasingly thin wire spacing, how to design an excellent cooling system and monitoring has become an urgent problem in the packaging industry.

Since the wafer junction is covered by the package material during the general packaging, and the temperature at which the junction heats up during the operation of the wafer cannot be directly measured, the thermal resistance of the package is measured before the actual wafer is packaged. Therefore, in order to understand more clearly The temperature change in the package is based on a semiconductor material, and a thermal test chip with heating and temperature extraction function is designed. Please refer to Figure 1 for heat. Schematic diagram of the test wafer, the general thermal test wafer 1 mainly includes a temperature sensing element 11 and a heating resistor 12, the measurement process is divided into a temperature sensitivity coefficient correction, and a natural test environment measurement two parts, In order to simulate and measure the heat generated during the operation of the package, a power input system 2 and a voltage extraction device 3 are respectively input and input a stable voltage load to perform heating test on the thermal test wafer 1.

See Figure 2 for a schematic diagram of the structure of an array of resistive temperature sensors. Alan Claassen and H. Shaukatullah proposed the Resistors Thermal Detector (RTD) 41 and heater in 1997. The package 4 of the 42 (heater) is used to simulate the change of the internal temperature rise of the real package 4. According to the change of the internal resistance of the resistive temperature sensor 41, the change of the internal temperature can be estimated, and whether the fuel cell can be actually For the 3C industry, it is necessary to determine whether various fuel cells will affect the temperature variation inside the package.

In view of the above needs, the inventors have carefully studied and accumulated many years of experience in the business, and finally designed a new "thermal wafer combined fuel cell measurement platform and method".

The main object of the present invention is to provide a measuring platform and a measuring method combining a thermal wafer and a fuel cell for future fuel Development of batteries and heat transfer performance tests for hot wafers.

In order to achieve the above object, the present invention relates to a "thermal wafer combined fuel cell measuring platform and method thereof", and the measuring platform mainly comprises a fuel cell stack, a variable resistor, a power platform, a hot wafer test module, A DC load machine and a data capture device, wherein the fuel cell stack is electrically connected to a variable resistor to control the power output of the fuel cell stack, and the variable resistor is electrically connected to the power platform to transfer the electric energy The output is connected to the power platform, and the power platform and the DC loader are electrically connected to the test chip test module, and the data capture device is connected to the power platform for information. When measuring with its measurement platform, the following steps are taken:

The first step, the power supply test, will be formulated with a suitable concentration of fuel solution (take methanol solution as an example), placed in a constant temperature water tank and heated to the working temperature (about 55 ° C), and with a plurality of fuel cells (direct methanol fuel The battery, DMFC) forms a cyclic connection to generate electrical energy, and gives an appropriate load voltage, measures the amount of current outputted to confirm the quality of the fuel cell stack; the second step, temperature control, and its thermal wafer test module Placed in a constant temperature control box or constant temperature water (oil) tank for uniform temperature control of the thermal wafer; in the third step, the DC load is input, and the DC loader is given the appropriate load current to the thermal wafer until the thermal wafer becomes Steady state; the fourth step, connecting the power supply, electrically connecting the fuel cell stack and the variable resistor to the power platform, so that the power platform can test the hot wafer The module performs heating; the fifth step switches different output powers, and the different resistance values are switched by the variable resistors to change the output power of the fuel cell stack, and the fuel cell is heated when the data extraction device draws different output powers. The measurement result of the wafer test module heating.

Accordingly, the measurement platform can be used to change the output power of the fuel cell application to the wafer, as an important basis for the fuel cell to be applied to the 3C product, and simultaneously test the heat transfer performance of the thermal wafer, and as an important basis for wafer packaging. And will be able to test when using the integrated application of the fuel cell control system.

In order for your review board to have a clear understanding of the contents of the present invention, please refer to the following description only.

Please refer to FIGS. 3 and 4 , which are a hardware block diagram and a schematic structural diagram of a measurement platform according to a preferred embodiment of the present invention. The thermal wafer combined with the fuel cell measurement platform 5 mainly includes:

A fuel cell stack 51 is provided with a constant temperature water tank 511, a fuel solution 512 and a plurality of fuel cells 513. The fuel solution 512 is placed in the constant temperature water tank 511 to be heated by water, and the fuel solution 512 is connected to each fuel cell 513. In order to make the fuel solution 512 form a cyclic connection with each of the fuel cells 513, the fuel solution 512 can be circulated to generate electric energy in each of the fuel cells 513; and each of the fuel cells 513 is disposed in series.

a variable resistor 52 electrically connected to the battery fuel group 51, The variable resistor 52 is provided with a resistor 521 of a complex array of different resistance values and a switch 522 for changing the power output power of the fuel cell stack 51 thereof.

A power platform 53 electrically connected to the variable resistor 52 is connected to a circuit board 531 and has a plurality of power input terminals 532, a plurality of power output terminals 533 and a signal output terminal 534, which are converted by a variable resistor 52. The power can be input from the power input terminal 532. The power output terminal 533 is electrically connected to the thermal chip test module 54, and the signal input terminal 534 is connected to the data capture device.

A thermal chip test module 54 is electrically connected to the power platform 53. The circuit board 541 is provided with a plurality of bus bars 542 and a thermal chip 543. The bus bar 542 can be electrically connected to the power platform 53. The thermal chip 543 is connected to a data capture device for information.

A DC loader 55 electrically coupled to the thermal wafer test module 54 provides the DC current load required by the thermal wafer test module 54.

A data capture device 56 coupled to the power platform 53 and the thermal chip test module 54 for data connection, and the data capture device 56 is coupled to the power platform 53 for transmitting output power, DC current load, and heat transfer performance signals. Furthermore, a connection board 57 is disposed between the power platform 53, the thermal chip test module 54 and the DC loader 55, and the connection board 57 is provided with a plurality of opposite bus bars 571, The plurality of power input terminals 572, the plurality of sensors 573, and the plurality of signal output terminals 574, the power input terminals 572 are electrically connected to the opposite bus bars 571, and the sensors 573 and the signal output terminals 574 are used for information. The power output end 533 of the power platform 53 is electrically connected to the power input end 572 of the connection board 57 to send the power exchanged power to the thermal chip test module 54 via the opposite bus bar 571; Between the thermal chip test module 54 and the data acquisition device 56, a digital analog converter 58 is provided to transmit the heat transfer performance data of the thermal wafer 543 to the data acquisition device 56 for recording.

Please refer to FIG. 4 and FIG. 5 for a flow chart of the steps of the preferred embodiment of the present invention. The measurement platform 5, the thermal wafer combined with the fuel cell measurement method, and the direct methanol fuel cell are taken as an example, including the following step:

In a first step 601, a power supply test is performed, and a fuel solution 512 (methanol solution) of a proper concentration is prepared, placed in a constant temperature water tank 511, heated to a working temperature (55 ° C to 90 ° C), and combined with a plurality of fuel cells 513 A loop connection is formed to generate electric energy, and an appropriate load voltage is given, and the amount of current outputted therefrom is measured to confirm whether the fuel cell stack 51 is good or bad.

In a second step 602, temperature control, a thermal wafer test module 54 is placed in a thermostatic control box or a constant temperature water (oil) tank for uniform temperature control of the thermal wafer test module 54.

In a third step 603, a DC load is input by using a DC load. The machine 55 gives the load current set by the thermal wafer test module 54 until the thermal wafer test module 54 is in a stable state.

In the fourth step 604, the power supply is connected, and a fuel cell stack 51 and a variable resistor 52 are electrically connected to a power platform 53 to transmit power to the power platform 53 and then to the thermal wafer test module 54 via the power platform 53. Heat up.

In a fifth step 605, different output powers are switched, and different resistance values are switched by the variable resistor 52 to change the output power of the fuel cell stack 51, and when the data extraction device 56 draws different output powers, the fuel cell 513 is hot. The measurement result of the heating of the wafer test module 54.

After the repeated experiments, when the supply power of the thermal wafer test module 54 is replaced by the stable power supply and the fuel cell 513, since the power supply and the fuel cell 513 are different power sources, the fuel cell 513 is electrified. The characteristics of the reaction, different current output at different voltages; or different voltage output at different currents. Therefore, the wafer set applied to the 3C product of the fuel cell 513 is used as a power source, and the measuring platform and the measuring method of the present invention are closely integrated with the integrated application of the hot chip 543 and the fuel cell 513, and are closely integrated. As an important basis for the fuel cell 513 to be applied to the 3C product, and simultaneously testing the heat transfer performance of the thermal chip 543, it is an important basis for wafer packaging, and can be used for testing the integrated application of the fuel cell 513 control system.

As described above, the "measurement platform and method for the thermal wafer-bonded fuel cell" of the present invention (hereinafter referred to as the present case), please refer to FIG. 4, the "measurement platform and method for the combination of a thermal wafer and a fuel cell" in the present invention, Using a fuel cell as its power source, combined with a resistance temperature sensor to measure the thermal chip, to achieve simultaneous measurement of fuel cell efficiency, and thermal wafer heat transfer efficiency, the integration of two different measurements into Integral, it can be used not only as an important basis for fuel cell applications in 3C products, but also as an important basis for chip package design.

The above description is only the preferred embodiment of the present invention, and is not intended to limit the scope of the present invention; any changes and modifications made by those skilled in the art without departing from the spirit and scope of the invention All should be covered by the patent of the present invention.

In summary, the "thermal wafer-integrated fuel cell measurement platform and method thereof" of the present invention has the patent creativity and the use value to the industry; the applicant filed an invention with the bureau according to the provisions of the patent law. Patent application.

1‧‧‧Hot test wafer

11‧‧‧Temperature sensing element

12‧‧‧resistance

2‧‧‧Power input system

3‧‧‧Voltage extraction device

4‧‧‧Package

41‧‧‧Resistive temperature sensor

42‧‧‧heater

5‧‧‧Measurement platform

51‧‧‧ fuel cell stack

511‧‧‧Constant water tank

512‧‧‧fuel solution

513‧‧‧ fuel cell

52‧‧‧Variable resistor

521‧‧‧resistance

522‧‧‧Switch

53‧‧‧Power platform

531‧‧‧ circuit board

532‧‧‧Power input

533‧‧‧Power output

534‧‧‧ signal output

54‧‧‧hot wafer test module

541‧‧‧ circuit board

542‧‧ ‧ busbar

543‧‧‧hot wafer

55‧‧‧DC loader

56‧‧‧Information acquisition device

57‧‧‧Connecting plate

571‧‧‧relative busbar

572‧‧‧Power input

573‧‧‧ sensor

574‧‧‧ signal output

58‧‧‧Digital Analog Converter

601‧‧‧First steps

602‧‧‧ second step

603‧‧‧ third step

604‧‧‧ fourth step

605‧‧‧ fifth step

Figure 1 is a schematic diagram of the principle of a thermal test wafer.

Figure 2 is a schematic view showing the structure of an array type resistive temperature sensor.

Figure 3 is a hardware block diagram of a measurement platform in accordance with a preferred embodiment of the present invention.

4 is a schematic structural view of a measurement platform in a preferred embodiment of the present invention.

Figure 5 is a flow chart showing the steps of a preferred embodiment of the present invention.

5‧‧‧Measurement platform

51‧‧‧ fuel cell stack

52‧‧‧Variable resistor

53‧‧‧Power platform

54‧‧‧hot wafer test module

55‧‧‧DC loader

56‧‧‧Information acquisition device

Claims (10)

A measuring platform for a thermal wafer combined with a fuel cell, comprising: a fuel cell stack, a constant temperature water tank, a fuel solution and a plurality of fuel cells, wherein the fuel solution is placed in the constant temperature water tank for water heating, the fuel The solution is connected to each fuel cell in a cyclical connection, so that each fuel cell generates electric energy; a variable resistor electrically connected to the battery fuel pack, the variable resistor is provided with a plurality of resistors and a switch having different resistance values The power platform electrically connected to the variable resistor is connected to a plurality of power input ends, a plurality of power output ends, and a signal output end on a circuit board. A thermal chip test module electrically connected to the power platform is provided with a plurality of bus bars and a thermal chip on a circuit board; and a DC load machine electrically connected to the thermal chip test module Providing a DC current load required for the thermal chip test module; a data capture device coupled to the power platform and the thermal chip test module for transmitting output power The signal direct current load and heat transfer efficiency. The measuring platform of the thermal wafer combined with the fuel cell according to claim 1, wherein the fuel cells are connected in series Set. The measuring platform of the thermal wafer combined with the fuel cell of claim 1, wherein the power platform, the thermal chip testing module and the DC loader are provided with a connecting plate, and the connecting plate is arranged There are a plurality of opposite bus bars, a plurality of power input terminals, a plurality of sensors, and a plurality of signal output terminals, wherein the power input terminals are electrically connected to the opposite bus bars, and the sensors are connected to the signals The output is for information link. The measuring platform of the thermal wafer combined with the fuel cell according to claim 1, wherein the data extracting device is connected to the power platform. The measuring platform of the thermal wafer combined with the fuel cell according to the first aspect of the invention, wherein the thermal chip testing module and the data capturing device are provided with a digital analog converter. A method for measuring a thermal wafer combined with a fuel cell comprises the following steps: a first step, a power supply test, a fuel solution of a suitable concentration is placed, placed in a constant temperature water tank, heated to a working temperature by water, and combined with a plurality of fuels The battery forms a cyclic connection to generate electrical energy, and gives an appropriate load voltage, and measures the amount of current outputted to confirm the quality of the fuel cell stack; the second step, temperature control, places a hot wafer test module on a thermostatic control box for uniform temperature control of the thermal wafer test module; In the third step, the DC load is input, and the load current set by the hot chip test module is given by the DC loader until the hot chip test module becomes stable; the fourth step is to connect the power supply, and a fuel cell stack, The variable resistor is electrically connected to a power platform, so that the power platform can heat the hot chip test module; the fifth step is to switch different output powers, and the variable resistors switch different resistance values to change the fuel cell. The output of the group, and the measurement results of the heating of the fuel cell to the thermal chip test module when the data extraction device draws different output powers. The method for measuring a thermal wafer bonded fuel cell according to claim 6, wherein the fuel cell is a direct methanol fuel cell, and the fuel solution is a methanol solution. The method for measuring a thermal wafer bonded fuel cell according to claim 6, wherein the constant temperature water tank is heated to 55 ° C to 90 ° C. In the second step, the hot wafer test module is placed in a constant temperature water tank to unify the hot wafer test module. Temperature control. In the second step, the hot wafer test module is placed in a constant temperature oil bath to unify the hot wafer test module, as described in the sixth aspect of the invention. Temperature control.