TWI386942B - Non-volatile storage with source bias all bit line sensing and the related method therefor - Google Patents
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- G—PHYSICS
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- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/04—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
- G11C16/0483—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells having several storage transistors connected in series
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/26—Sensing or reading circuits; Data output circuits
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- G—PHYSICS
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- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/34—Determination of programming status, e.g. threshold voltage, overprogramming or underprogramming, retention
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- G11C16/3454—Arrangements for verifying correct programming or for detecting overprogrammed cells
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Description
本發明係關於非揮發性記憶體。This invention relates to non-volatile memory.
半導體記憶體已日益風行地用於各種電子裝置中。舉例而言,非揮發性半導體記憶體用於蜂巢式電話、數位相機、個人數位助理、行動計算裝置、非行動計算裝置及其他裝置中。電可擦可程式化唯讀記憶體(EEPROM)及快閃記憶體為最風行之非揮發性半導體記憶體。在快閃記憶體(亦為一類型之EEPROM)的情況下,與傳統之具有全部特徵的EEPROM對比,可在一個步驟中擦除整個記憶體陣列或記憶體之一部分之內容。Semiconductor memory has become increasingly popular in a variety of electronic devices. For example, non-volatile semiconductor memory is used in cellular phones, digital cameras, personal digital assistants, mobile computing devices, non-mobile computing devices, and other devices. Electrically erasable and programmable read only memory (EEPROM) and flash memory are the most popular non-volatile semiconductor memory. In the case of flash memory (also a type of EEPROM), the contents of one portion of the entire memory array or memory can be erased in one step as compared to conventional EEPROMs having all of the features.
傳統EEPROM及快閃記憶體皆利用定位於半導體基板中之通道區域上方且與其絕緣之浮動閘極。浮動閘極定位於源極區域與汲極區域之間。控制閘極提供於浮動閘極上且與其絕緣。如此形成之電晶體之臨限電壓(VTH )由保留於浮動閘極上之電荷量控制。亦即,在接通電晶體以允許電晶體之源極與汲極之間的傳導之前必須施加至控制閘極之電壓的最小量由浮動閘極上之電荷位準控制。Both conventional EEPROM and flash memory utilize floating gates that are positioned above and insulated from the channel regions in the semiconductor substrate. The floating gate is positioned between the source region and the drain region. The control gate is provided on and insulated from the floating gate. The threshold voltage (V TH ) of the thus formed transistor is controlled by the amount of charge remaining on the floating gate. That is, the minimum amount of voltage that must be applied to the control gate before the transistor is turned on to allow conduction between the source and the drain of the transistor is controlled by the charge level on the floating gate.
一些EEPROM及快閃記憶體裝置具有用於儲存兩個電荷範圍的浮動閘極,且因此,記憶體元件可在兩個狀態(例如,擦除狀態與經程式化狀態)之間加以程式化/擦除。因為每一記憶體元件可儲存一資料位元,所以此快閃記憶體裝置有時被稱為二進位快閃記憶體裝置。Some EEPROM and flash memory devices have floating gates for storing two charge ranges, and thus, memory elements can be programmed between two states (eg, erased state and stylized state). Erase. Because each memory element can store a data bit, this flash memory device is sometimes referred to as a binary flash memory device.
多狀態(亦稱為多位準)快閃記憶體裝置係藉由識別多個相異的容許/有效程式化臨限電壓範圍而實施。每一相異臨限電壓範圍對應於記憶體裝置中經編碼之資料位元集合的預定值。舉例而言,當每一記憶體元件可置於對應於四個相異臨限電壓範圍的四個離散電荷帶中之一者中時,該元件可儲存兩個資料位元。A multi-state (also known as multi-level) flash memory device is implemented by identifying a plurality of different allowed/effectively programmed threshold voltage ranges. Each distinct threshold voltage range corresponds to a predetermined value of the encoded set of data bits in the memory device. For example, when each memory element can be placed in one of four discrete charge bands corresponding to four distinct threshold voltage ranges, the element can store two data bits.
通常,在程式化操作期間施加至控制閘極之程式化電壓VPGM 係作為量值隨時間而增加之一系列脈衝而施加。在一可能方法中,脈衝之量值隨著每一連續脈衝增加一預定步長,例如,0.2-0.4 V。VPGM 可施加至快閃記憶體元件之控制閘極。在程式化脈衝之間的時期中,進行驗證操作。亦即,在連續程式化脈衝之間讀取被並行地程式化的一群元件中之每一元件之程式化位準,以判定該程式化位準是等於還是大於元件被程式化至的驗證位準。對於多狀態快閃記憶體元件陣列而言,可針對元件之每一狀態執行驗證步驟,以判定 元件是否已達到其與資料相關聯之驗證位準。舉例而言,能夠以四個狀態儲存資料之多狀態記憶體元件可能需要針對三個比較點執行驗證操作。Typically, the stylized voltage V PGM applied to the control gate during the stylization operation is applied as a series of pulses whose magnitude increases over time. In one possible approach, the magnitude of the pulse is increased by a predetermined step size with each successive pulse, for example, 0.2-0.4 V. V PGM can be applied to the control gate of the flash memory component. During the period between the stylized pulses, a verification operation is performed. That is, the programmed level of each of a group of components that are programmed in parallel is read between successive stylized pulses to determine whether the programmed level is equal to or greater than the verify bit to which the component is programmed. quasi. For a multi-state flash memory device array, a verification step can be performed for each state of the component to determine if the component has reached its verification level associated with the material. For example, a multi-state memory element capable of storing data in four states may need to perform a verify operation for three comparison points.
此外,當程式化EEPROM或快閃記憶體裝置(諸如,NAND串中之NAND快閃記憶體裝置)時,通常將VPGM 施加至控制閘極且將位元線接地,從而使來自單元或記憶體元件(例如,儲存元件)之通道的電子注入至浮動閘極中。當電子累積於浮動閘極中時,浮動閘極變得帶負電荷且記憶體元件之臨限電壓升高,使得記憶體元件被認為處於經程式化狀態。可在標題為"Source Side Self Boosting Technique For Non-Volatile Memory"之美國專利6,859,397及2005年2月3日公開的標題為"Detecting Over Programmed Memory"之美國專利申請公開案2005/0024939中找到關於此程式化的更多資訊;該兩案之全文以引用方式併入本文中。In addition, when programming an EEPROM or flash memory device (such as a NAND flash memory device in a NAND string), V PGM is typically applied to the control gate and the bit line is grounded, thereby enabling the cell or memory. Electrons of the channels of the body elements (eg, storage elements) are injected into the floating gates. When electrons accumulate in the floating gate, the floating gate becomes negatively charged and the threshold voltage of the memory element rises, causing the memory element to be considered to be in a programmed state. This can be found in U.S. Patent No. 6,859,397, entitled "Source Side Self Boosting Technique For Non-Volatile Memory", and U.S. Patent Application Publication No. 2005/0024939, entitled "Detecting Over Programmed Memory", published on Feb. 3, 2005. More information on stylization; the full text of both cases is incorporated herein by reference.
本發明提供一種非揮發性儲存裝置,其具有用於使用全位元線感測來感測非揮發性儲存元件之程式化條件之能力。The present invention provides a non-volatile storage device having the ability to sense stylized conditions of a non-volatile storage element using full bit line sensing.
在一實施例中,一非揮發性儲存系統包括配置成NAND串的非揮發性儲存元件之一集合,其中該等 NAND串中之每一者與一各別位元線、一各別感測組件及一各別放電路徑相關聯。一或多個控制電路與該集合之非揮發性儲存元件通信。該或該等控制電路:(1)在一第一時間段期間:(a)施加一源極電壓至該等NAND串中之每一者之一源極,(b)防止每一各別位元線耦接至該各別感測組件,且(c)耦接每一位元線至該各別放電路徑;且(2)在繼該第一時間段之後的第二時間段期間,(a)繼續施加該源極電壓至該等NAND串中之每一者之源極,允許每一各別位元線耦接至該各別感測組件。In one embodiment, a non-volatile storage system includes a collection of non-volatile storage elements configured as NAND strings, wherein Each of the NAND strings is associated with a respective bit line, a respective sensing component, and a respective discharge path. One or more control circuits are in communication with the set of non-volatile storage elements. The or the control circuit: (1) during a first time period: (a) applying a source voltage to one of the sources of the NAND strings, and (b) preventing each individual bit a line coupled to the respective sensing component, and (c) coupling each bit line to the respective discharge path; and (2) during a second time period subsequent to the first time period, ( a) continuing to apply the source voltage to the source of each of the NAND strings, allowing each individual bit line to be coupled to the respective sensing component.
在另一實施例中,一非揮發性儲存系統包括配置成NAND串的非揮發性儲存元件之一集合,其中該等NAND串中之每一者與一各別位元線、一各別感測組件及一各別放電路徑相關聯。一或多個控制電路與該集合之非揮發性儲存元件通信。該或該等控制電路:(a)施加一源極電壓至該等NAND串中之每一者之一源極,(b)耦接每一位元線至該各別放電路徑,且(c)在該耦接之後,根據每一各別位元線之一電位確定該等NAND串中之每一者中的一選定非揮發性儲存元件之一程式化條件。In another embodiment, a non-volatile storage system includes a set of non-volatile storage elements configured as NAND strings, wherein each of the NAND strings is associated with a respective bit line, a sense of individuality The test component is associated with a separate discharge path. One or more control circuits are in communication with the set of non-volatile storage elements. The control circuit: (a) applying a source voltage to one of the sources of the NAND strings, (b) coupling each bit line to the respective discharge path, and (c) After the coupling, one of the selected non-volatile storage elements in each of the NAND strings is programmed according to a potential of each of the individual bit lines.
在另一實施例中,一非揮發性儲存系統包括:與一第一位元線及一各別放電路徑相關聯之非揮發性儲存元件之一第一集合;與一第二位元線及一各別放電路徑相關聯之非揮發性儲存元件之一第二集合;及與該第一集合及該第二集合之非揮發性儲存元件通信的一或多個控制電路。該或該等控制電路:(a)施加一源極電壓至該第一集合的儲存元件之源極,(b)耦接該第二位元線至該各別放電路徑以使一在施加該源極電壓時自該第一集合之儲存元件電容性地耦合至該第二集合之儲存元件的電位至少部分地放電,且(c)在使該電位至少部分地放電之後,確定該第二集合的儲存元件中之一選定非揮發性儲存元件之一程式化條件。In another embodiment, a non-volatile storage system includes: a first set of non-volatile storage elements associated with a first bit line and a respective discharge path; and a second bit line and a second set of one of the non-volatile storage elements associated with each of the respective discharge paths; and one or more control circuits in communication with the first set and the second set of non-volatile storage elements. The control circuit: (a) applying a source voltage to a source of the first set of storage elements, and (b) coupling the second bit line to the respective discharge paths to enable the application of the The source voltage is at least partially discharged from a potential of the first set of storage elements capacitively coupled to the second set of storage elements, and (c) after the potential is at least partially discharged, the second set is determined One of the storage elements selects one of the non-volatile storage elements to be stylized.
本發明提供一種非揮發性儲存裝置,其具有用於使用全位元線感測來感測非揮發性儲存元件之一程式化條件之能力。The present invention provides a non-volatile storage device having the ability to sense stylized conditions of one of the non-volatile storage elements using full bit line sensing.
適用於實施本發明之記憶體系統之一實例使用NAND快閃記憶體結構,其包括在兩個選擇閘之間串聯地配置多個電晶體。該等串聯之電晶體及該等選擇閘被稱為NAND串。圖1為展示一個NAND串之俯視 圖。圖2為該NAND串之等效電路。圖1及圖2中所描繪之NAND串包括串聯且夾在第一選擇閘120與第二選擇閘122之間的四個電晶體100、102、104及106。選擇閘120閘控NAND串至位元線126之連接。選擇閘122閘控NAND串至源極線128之連接。藉由施加適當電壓至控制閘極120CG來控制選擇閘120。藉由施加適當電壓至控制閘極122CG來控制選擇閘122。電晶體100、102、104及106中之每一者具有一控制閘極及一浮動閘極。電晶體100具有控制閘極100CG及浮動閘極100FG。電晶體102包括控制閘極102CG及浮動閘極102FG。電晶體104包括控制閘極104CG及浮動閘極104FG。電晶體106包括控制閘極106CG及浮動閘極106FG。控制閘極100CG連接至字元線WL3,控制閘極102CG連接至字元線WL2,控制閘極104CG連接至字元線WL1,且控制閘極106CG連接至字元線WL0。該等控制閘極亦可作為字元線之部分而提供。在一實施例中,電晶體100、102、104及106各為儲存元件(亦被稱為記憶體單元)。在其他實施例中,儲存元件可包括多個電晶體或可能不同於圖1及圖2中所描繪之儲存元件。選擇閘120連接至選擇線SGD(汲極選擇閘)。選擇閘122連接至選擇線 SGS(源極選擇閘)。One example of a memory system suitable for use in practicing the present invention uses a NAND flash memory structure that includes a plurality of transistors arranged in series between two select gates. The series connected transistors and the select gates are referred to as NAND strings. Figure 1 shows a NAND string Figure. Figure 2 shows the equivalent circuit of the NAND string. The NAND string depicted in FIGS. 1 and 2 includes four transistors 100, 102, 104, and 106 that are connected in series and sandwiched between a first select gate 120 and a second select gate 122. The gate 120 gate NAND string is connected to the bit line 126. The connection of the gate 122 gated NAND string to the source line 128 is selected. The selection gate 120 is controlled by applying an appropriate voltage to the control gate 120CG. The selection gate 122 is controlled by applying an appropriate voltage to the control gate 122CG. Each of the transistors 100, 102, 104, and 106 has a control gate and a floating gate. The transistor 100 has a control gate 100CG and a floating gate 100FG. The transistor 102 includes a control gate 102CG and a floating gate 102FG. The transistor 104 includes a control gate 104CG and a floating gate 104FG. The transistor 106 includes a control gate 106CG and a floating gate 106FG. The control gate 100CG is connected to the word line WL3, the control gate 102CG is connected to the word line WL2, the control gate 104CG is connected to the word line WL1, and the control gate 106CG is connected to the word line WL0. The control gates can also be provided as part of the word line. In one embodiment, transistors 100, 102, 104, and 106 are each a storage element (also referred to as a memory unit). In other embodiments, the storage element may comprise a plurality of transistors or may be different from the storage elements depicted in Figures 1 and 2. The selection gate 120 is connected to the selection line SGD (drain selection gate). Select gate 122 to connect to the selection line SGS (source selection gate).
圖3為描繪三個NAND串之電路圖。使用NAND結構之快閃記憶體系統之一典型架構將包括若干NAND串。舉例而言,在一具有更多NAND串之記憶體陣列中展示三個NAND串320、340及360。該等NAND串中之每一者包括兩個選擇閘及四個儲存元件。雖然為了簡單起見而說明四個儲存元件,但現代NAND串可具有多達(例如)32或64個儲存元件。Figure 3 is a circuit diagram depicting three NAND strings. A typical architecture of a flash memory system using a NAND structure would include several NAND strings. For example, three NAND strings 320, 340, and 360 are shown in a memory array with more NAND strings. Each of the NAND strings includes two select gates and four storage elements. Although four storage elements are illustrated for simplicity, modern NAND strings can have up to, for example, 32 or 64 storage elements.
舉例而言,NAND串320包括選擇閘322及327以及儲存元件323-326,NAND串340包括選擇閘342及347以及儲存元件343-346,NAND串360包括選擇閘362及367以及儲存元件363-366。每一NAND串藉由其選擇閘(例如,選擇閘327、347或367)而連接至源極線。選擇線SGS用於控制源極側選擇閘。各種NAND串320、340及360藉由選擇閘322、342及362等中之選擇電晶體而連接至各別位元線321、341及361。此等選擇電晶體由汲極選擇線SGD來控制。在其他實施例中,未必需要在NAND串間共同使用選擇線;亦即,可為不同NAND串提供不同選擇線。字元線WL3連接至儲存元件323、343及363之控制閘極。字元線WL2連接至儲存元件324、344及364之控制閘極。字元線WL1連接至儲存元件325、345及365之控制閘極。字元線WL0連接至儲存元件326、346及366之控制閘極。如可見,每一位元線及各別NAND串包含儲存元件之陣列或集合之行。字元線(WL3、WL2、WL1及WL0)包含陣列或集 合之列。每一字元線連接列中的每一儲存元件之控制閘極。或,控制閘極可由字元線本身提供。舉例而言,字元線WL2提供儲存元件324、344及364之控制閘極。實務上,字元線上可存在數千個儲存元件。For example, NAND string 320 includes select gates 322 and 327 and storage elements 323-326, NAND string 340 includes select gates 342 and 347 and storage elements 343-346, and NAND string 360 includes select gates 362 and 367 and storage element 363- 366. Each NAND string is connected to the source line by its select gate (eg, select gate 327, 347, or 367). The selection line SGS is used to control the source side selection gate. The various NAND strings 320, 340, and 360 are connected to the respective bit lines 321, 341, and 361 by selecting a selection transistor among the gates 322, 342, and 362. These selective transistors are controlled by the drain select line SGD. In other embodiments, it may not be necessary to use the select lines together between the NAND strings; that is, different select lines may be provided for different NAND strings. Word line WL3 is coupled to the control gates of storage elements 323, 343, and 363. Word line WL2 is coupled to the control gates of storage elements 324, 344, and 364. Word line WL1 is coupled to the control gates of storage elements 325, 345, and 365. Word line WL0 is coupled to the control gates of storage elements 326, 346, and 366. As can be seen, each bit line and each NAND string contains an array or set of storage elements. Word lines (WL3, WL2, WL1, and WL0) contain arrays or sets Combined column. Each word line connects the control gates of each of the storage elements in the column. Alternatively, the control gate can be provided by the word line itself. For example, word line WL2 provides control gates for storage elements 324, 344, and 364. In practice, there can be thousands of storage elements on a word line.
每一儲存元件可儲存資料。舉例而言,當儲存一位元的數位資料時,將儲存元件之可能臨限電壓(VTH )之範圍分成兩個範圍,其被指派邏輯資料"1"及"0"。在NAND型快閃記憶體之一實例中,VTH 在擦除儲存元件之後為負,且被定義為邏輯"1"。程式化操作之後的VTH 為正且被定義為邏輯"0"。當VTH 為負且試圖進行讀取時,儲存元件將接通以指示邏輯"1"正被儲存。當VTH 為正且試圖進行讀取操作時,儲存元件將不接通,此指示邏輯"0"被儲存。儲存元件亦可儲存多個資訊位準,例如,多個數位資料位元。在此狀況下,將VTH 值之範圍分成資料位準之數目。舉例而言,若儲存四個資訊位準,則將存在四個VTH 範圍,其被指派給資料值"11"、"10"、"01"及"00"。在NAND型記憶體之一實例中,擦除操作之後的VTH 為負且被定義為"11"。正的VTH 值用於狀態"10"、"01"及"00"。被程式化至儲存元件中之資料與元件之臨限電壓範圍之間的特定關係取決於為儲存元件所採用之資料編碼機制。舉例而言,美國專利第6,222,762號及美國專利申請公開案2004/0255090(該兩者之全文以引用方式併入本文中)描述用於多狀態快閃儲存元件之各種資料編碼機制。Each storage element can store data. For example, when storing a one-digit digital data, the range of possible threshold voltages (V TH ) of the storage elements is divided into two ranges, which are assigned logical data "1" and "0". In one example of a NAND type flash memory, the VTH is negative after erasing the storage element and is defined as a logic "1". The V TH after the stylization operation is positive and is defined as a logic "0". When the VTH is negative and an attempt is made to read, the storage element will turn "on" to indicate that the logic "1" is being stored. When the VTH is positive and an attempt is made to perform a read operation, the storage element will not be turned on, indicating that the logic "0" is stored. The storage element can also store multiple information levels, for example, multiple digital data bits. In this case, the range of V TH values is divided into the number of data levels. For example, if four information levels are stored, there will be four VTH ranges assigned to the data values "11", "10", "01", and "00". In one example of a NAND type memory, the VTH after the erase operation is negative and is defined as "11". Positive V TH values are used for states "10", "01", and "00". The particular relationship between the data that is programmed into the storage element and the threshold voltage range of the component depends on the data encoding mechanism employed to store the component. For example, U.S. Patent No. 6,222,762 and U.S. Patent Application Publication No. 2004/0255090, the entireties of each of each of each of each of
美國專利第5,386,422號、第5,522,580號、第5,570,315 號、第5,774,397號、第6,046,935號、第6,456,528及第6,522,580號中提供NAND型快閃記憶體之相關實例及其操作,該等專利中之每一者以引用方式併入本文中。U.S. Patent Nos. 5,386,422, 5,522,580, 5,570,315 Related examples of NAND-type flash memory and operations thereof are provided in U.S. Patent Nos. 5,774,397, 6, 046, 935, 6, 456, 528, and 6, 522, 580, each incorporated herein by reference.
當程式化快閃儲存元件時,將程式化電壓施加至儲存元件之控制閘極且將與儲存元件相關聯之位元線接地。來自通道之電子被注入至浮動閘極中。當電子累積於浮動閘極中時,浮動閘極變得帶負電荷且儲存元件之VTH 升高。為了將程式化電壓施加至正被程式化的儲存元件之控制閘極,將彼程式化電壓施加於適當字元線上。如以上所論述,NAND串中之每一者中的一個儲存元件共用同一字元線。舉例而言,當程式化圖3之儲存元件324時,亦將程式化電壓施加至儲存元件344及364之控制閘極。When the flash storage component is programmed, a programmed voltage is applied to the control gate of the storage component and the bit line associated with the storage component is grounded. Electrons from the channel are injected into the floating gate. When electrons accumulate in the floating gate, the floating gate becomes negatively charged and the VTH of the storage element rises. To apply a programmed voltage to the control gate of the memory element being programmed, the stylized voltage is applied to the appropriate word line. As discussed above, one of the storage elements in each of the NAND strings shares the same word line. For example, when the storage element 324 of FIG. 3 is programmed, a programmed voltage is also applied to the control gates of the storage elements 344 and 364.
圖4描繪形成於基板上之NAND串之橫截面圖。該視圖經簡化且不按比例。NAND串400包括形成於基板490上的源極側選擇閘406、汲極側選擇閘424及八個儲存元件408、410、412、414、416、418、420及422。許多源極/汲極區域(其中之一實例為源極/汲極區域430)被提供於每一儲存元件及選擇閘406及424之任一側上。在一方法中,基板490採用三重井技術,其包括在n井區域494內之p井區域492,n井區域494又在p型基板區域496內。NAND串及其非揮發性儲存元件可至少部分地形成於p井區域上。除了具電位VBL 之位元線426之外,提供具電位VSOURCE 之源極供應線404。在一可能方法中,電壓可經由端子402而施加至p井區域492。電壓亦可經由端子403而施加至n井區域 494。4 depicts a cross-sectional view of a NAND string formed on a substrate. This view is simplified and not to scale. The NAND string 400 includes a source side select gate 406, a drain side select gate 424, and eight storage elements 408, 410, 412, 414, 416, 418, 420, and 422 formed on the substrate 490. A number of source/drain regions (one of which is source/drain region 430) are provided on either side of each storage element and select gates 406 and 424. In one method, substrate 490 employs a triple well technique that includes a p-well region 492 in n-well region 494, which in turn is within p-type substrate region 496. The NAND string and its non-volatile storage elements can be formed at least partially on the p-well region. In addition to the bit line 426 having the potential V BL , a source supply line 404 having a potential V SOURCE is provided. In one possible approach, a voltage can be applied to p-well region 492 via terminal 402. Voltage can also be applied to the n-well region 494 via terminal 403.
在讀取或驗證操作(包括擦除-驗證操作)期間(儲存元件之條件(諸如,其臨限電壓)係在此期間確定),在與選定之儲存元件相關聯之選定字元線上提供VCGR 。另外,可回想到儲存元件之控制閘極可作為字元線之一部分而提供。舉例而言,WL0、WL1、WL2、WL3、WL4、WL5、WL6及WL7可分別經由儲存元件408、410、412、414、416、418、420及422之控制閘極而延伸。在一可能升壓機制中,可將讀取通過電壓VREAD 施加至與NAND串400相關聯之未選擇字元線。其他升壓機制將VREAD 施加至一些字元線且將較低電壓施加至其他字元線。分別將VSGS 及VSGD 施加至選擇閘406及424。During a read or verify operation (including an erase-verify operation) (the condition of the storage element, such as its threshold voltage) is determined during this period, V is provided on the selected word line associated with the selected storage element CGR . Additionally, it is recalled that the control gate of the storage element can be provided as part of the word line. For example, WL0, WL1, WL2, WL3, WL4, WL5, WL6, and WL7 may extend via control gates of storage elements 408, 410, 412, 414, 416, 418, 420, and 422, respectively. In a possible boosting mechanism, the read pass voltage V READ can be applied to the unselected word lines associated with NAND string 400. Other boosting mechanisms apply V READ to some word lines and lower voltages to other word lines. V SGS and V SGD are applied to select gates 406 and 424, respectively.
圖5a至圖5d描繪非揮發性儲存元件之程式化。在一可能的程式化技術中,分別在於圖5a、圖5b及圖5c所描繪的三個步驟中程式化下部頁面、中間頁面及上部頁面。當在擦除操作之後程式化資料之下部頁面時,提供兩個VTH 分布510及512。最小分布510表示擦除狀態且具有負的VTH 。接下來,自圖5a之第一VTH 分布510分別獲得圖5b之第一VTH 分布520及第二VTH 分布522,且自圖5a之第二VTH 分布512分別獲得圖5b之第三VTH 分布524及第四VTH 分布526。自圖5b之第一VTH 分布520獲得分別表示最終擦除狀態E及第一經程式化狀態A的圖5c之第一VTH 分布及第二VTH 分布。自圖5b之第二VTH 分布522獲得分別表示第二經程式化狀態B及第三經程式化狀態C的圖5c之第三VTH 分布及第四VTH 分 布。自圖5b之第三VTH 分布524獲得分別表示第四經程式化狀態D及第五經程式化狀態E的圖5c之第五VTH 分布及第六VTH 分布。自圖5b之第四VTH 分布526獲得分別表示第六經程式化狀態F及第七經程式化狀態G的圖5c之第七VTH 分布及第八VTH 分布。另外,碼字111、011、001、101、100、000、010及110可分別與狀態E、A、B、C、D、E、F及G相關聯。Figures 5a through 5d depict the stylization of non-volatile storage elements. In one possible stylization technique, the lower page, the middle page, and the upper page are programmed in the three steps depicted in Figures 5a, 5b, and 5c, respectively. Two VTH distributions 510 and 512 are provided when the lower page of the data is programmed after the erase operation. The minimum distribution 510 represents the erased state and has a negative VTH . Next, the first VTH distribution 520 and the second VTH distribution 522 of FIG. 5b are obtained from the first VTH distribution 510 of FIG. 5a, respectively, and the third VTH distribution 512 of FIG. 5a obtains the third of FIG. 5b, respectively. VTH distribution 524 and fourth VTH distribution 526. The first VTH distribution and the second VTH distribution of FIG. 5c representing the final erased state E and the first programmed state A, respectively, are obtained from the first VTH distribution 520 of FIG. 5b. From the second VTH distribution 522 of Figure 5b, the third VTH distribution and the fourth VTH distribution of Figure 5c representing the second programmed state B and the third programmed state C, respectively, are obtained. From the third VTH distribution 524 of Figure 5b, the fifth VTH distribution and the sixth VTH distribution of Figure 5c representing the fourth programmed state D and the fifth programmed state E, respectively, are obtained. From the fourth VTH distribution 526 of Figure 5b, the seventh VTH distribution and the eighth VTH distribution of Figure 5c representing the sixth programmed state F and the seventh programmed state G, respectively, are obtained. Additionally, code words 111, 011, 001, 101, 100, 000, 010, and 110 may be associated with states E, A, B, C, D, E, F, and G, respectively.
狀態E及A為負臨限電壓狀態之實例。視實施而定,一或多個狀態可為負臨限電壓狀態。States E and A are examples of negative threshold voltage states. Depending on the implementation, one or more states may be a negative threshold voltage state.
圖5c亦描繪用於獲得所指示之分布的驗證電壓。具體言之,驗證電壓VVE 、VVA 、VVB 、VVC 、VVD 、VVE 、VVF 及VVG 分別與分布E、A、B、C、D、E、F及G相關聯。在程式化期間,比較待程式化至給定分布的儲存元件之臨限電壓與相關聯之驗證電壓。儲存元件經由關聯之字元線接收程式化脈衝,直至該等元件之臨限電壓經驗證為已超出關聯之驗證電壓。Figure 5c also depicts a verify voltage for obtaining the indicated distribution. Specifically, the verify voltages V VE , V VA , V VB , V VC , V VD , V VE , V VF , and V VG are associated with the distributions E, A, B, C, D, E, F, and G, respectively. During stylization, the threshold voltage to be programmed to a given distribution of storage elements is compared to the associated verify voltage. The storage element receives the stylized pulses via the associated word line until the threshold voltage of the elements is verified to have exceeded the associated verify voltage.
圖5d描繪用於讀取儲存元件之經程式化狀態的讀取電壓。在儲存元件已被程式化後,其可使用讀取電壓VRA 、VRB 、VRC 、VRD 、VRE 、VRF 及VRG 來隨後讀取。比較通常與共同字元線相關聯之一或多個儲存元件與每一讀取電壓,以判定元件之臨限電壓是否超出讀取電壓。可接著藉由所超出的最高讀取電壓來判定儲存元件之狀態。在相鄰狀態之間提供該等讀取電壓。Figure 5d depicts a read voltage for reading a stylized state of a storage element. After the storage element has been programmed, it can be read using the read voltages V RA , V RB , V RC , V RD , V RE , V RF , and V RG . One or more storage elements and each read voltage are typically associated with a common word line to determine if the threshold voltage of the element exceeds the read voltage. The state of the storage element can then be determined by the highest read voltage that is exceeded. The read voltages are provided between adjacent states.
注意,所描繪之程式化過程為一可能實例,因為其他方 法係可能的。Note that the stylized process depicted is a possible example because other parties The legal system is possible.
在非揮發性儲存裝置(包括使用NAND記憶體設計之非揮發性儲存裝置)中,尚無用來將電流感測用於在讀取或驗證操作期間感測非揮發性儲存元件之負臨限電壓狀態的令人滿意之方法。已使用電壓感測,但已發現,其完成需要較長時間。另外,歸因於位元線至位元線電容耦合及其他效應,電壓感測還不適合於同時對鄰近儲存元件群組執行感測的全位元線感測。一可能解決方法包括:當使用電流感測時,在感測期間將源極電壓及p井壓調節至某一固定的正DC位準;及經由所感測之儲存元件之關聯字元線將該儲存元件之控制閘極連接至一比源極及p井電壓低的電位。元件電壓及p井電壓亦可能不同。藉由此將源極及p井之偏壓組合至某一固定電位之方法,可能使用電流感測感測一或多個負臨限電壓狀態。另外,因為電流感測避免電壓感測之許多缺點,所以其相容於全位元線感測。In non-volatile storage devices, including non-volatile storage devices designed using NAND memory, there is no negative threshold voltage for sensing current sensing non-volatile storage elements during read or verify operations. A satisfactory method of state. Voltage sensing has been used, but it has been found that it takes a long time to complete. In addition, due to bit line to bit line capacitive coupling and other effects, voltage sensing is not yet suitable for full bit line sensing that simultaneously senses adjacent sets of storage elements. A possible solution includes adjusting the source voltage and the p-well pressure to a fixed positive DC level during sensing during current sensing; and via the associated word line of the sensed storage element The control gate of the storage element is connected to a potential lower than the source and p-well voltages. Component voltage and p-well voltage may also be different. By combining the bias of the source and p wells to a fixed potential, it is possible to sense one or more negative threshold voltage states using current sensing. In addition, because current sensing avoids many of the shortcomings of voltage sensing, it is compatible with full bit line sensing.
圖6a描繪NAND串及用於感測之組件之一組態。在一簡化實例中,NAND串612包括四個儲存元件,其分別與字元線WL0、WL1、WL2及WL3通信。實務上,可使用額外儲存元件及字元線。另外,額外NAND串在非揮發性儲存元件之區塊或其他集合中通常係相互鄰近地配置(參見例如圖14)。儲存元件被耦接至基板之p井區域。除了感測組件600之外,描繪一具有電壓VBL 之位元線610。詳言之,將BLS(位元線感測)電晶體606耦接至位元線610。BLS電晶 體606為高電壓電晶體,且在感測操作期間回應於控制(control)608而打開。BLC(位元線控制)電晶體604為低電壓電晶體,其回應於控制608而打開以允許位元線與電流感測模組602通信。在一感測操作(諸如讀取或驗證操作)期間,發生預充電操作,電流感測模組602中之一電容器在該操作中充電。可將BLC電晶體604打開以允許預充電。又,在感測操作期間,對於具有負臨限電壓狀態之儲存元件而言,將一正電壓施加至該操作中所涉及的一或多個儲存元件之字元線。因為不需要負電荷泵來提供負的字元線電壓,所以在感測負臨限電壓之感測操作中將正電壓用於選定字元線係有利的。將負電荷泵併入許多非揮發性儲存系統中可能要求大量的過程研究及修改。Figure 6a depicts a configuration of a NAND string and one of the components for sensing. In a simplified example, NAND string 612 includes four storage elements that are in communication with word lines WL0, WL1, WL2, and WL3, respectively. In practice, additional storage components and word lines can be used. In addition, the additional NAND strings are typically arranged adjacent to each other in blocks or other sets of non-volatile storage elements (see, for example, Figure 14). The storage element is coupled to the p-well region of the substrate. In addition to the sensing component 600, a bit line 610 having a voltage VBL is depicted. In detail, a BLS (bit line sense) transistor 606 is coupled to bit line 610. BLS transistor 606 is a high voltage transistor and is turned on in response to control 608 during a sensing operation. The BLC (bit line control) transistor 604 is a low voltage transistor that is turned on in response to control 608 to allow the bit line to communicate with the current sensing module 602. During a sensing operation, such as a read or verify operation, a precharge operation occurs in which one of the capacitors in current sensing module 602 is charged. The BLC transistor 604 can be turned on to allow for pre-charging. Also, during the sensing operation, for a storage element having a negative threshold voltage state, a positive voltage is applied to the word line of one or more storage elements involved in the operation. Since a negative charge pump is not required to provide a negative word line voltage, it is advantageous to use a positive voltage for the selected word line in sensing operations that sense negative threshold voltages. Incorporating a negative charge pump into many non-volatile storage systems may require extensive process research and modification.
舉例而言,假設選定字元線為WL1。將WL1上之電壓作為控制閘極讀取電壓VCGR 而耦接至該字元線上的儲存元件之控制閘極。另外,可將一正電壓VSOURCE 施加至NAND串630之源極側,且可將一正電壓VP-WELL 施加至p井。在一實施中,VSOURCE 及VP-WELL 大於VCGR 。VSOURCE 與VP-WELL 可相互不同,或其可耦接至同一DC電壓VDC 。另外,VDC >VCGR 。作為一實例,VDC 可在約0.4至1.5 V之範圍內例如,0.8 V。較高之VDC 使得感測更負的臨限電壓狀態。舉例而言,可分別使用VDC =1.5 V及VDC =1.0 V來感測第一負臨限電壓狀態VTH1 =-1.0 V及第二負臨限電壓狀態VTH2 =-0.5 V。可將VDC 設定為一位準,以使得VDC -VTH >0 V。通常,為了感測負臨限電壓,字元線及源極電壓經設定以使得閘 極至源極電壓小於零,亦即,VGS <0 V。若閘極至源極電壓大於儲存元件之臨限電壓(亦即,VGS >VTH ),則選定之儲存元件傳導。為了感測正臨限電壓,可將源極及p井保持為相同電壓,同時調整選定字元線電壓。For example, suppose the selected word line is WL1. The voltage on WL1 is coupled to the control gate of the storage element on the word line as a control gate read voltage V CGR . Additionally, a positive voltage V SOURCE can be applied to the source side of the NAND string 630 and a positive voltage V P-WELL can be applied to the p-well. In one implementation, V SOURCE and V P-WELL are greater than V CGR . V SOURCE and V P-WELL may be different from each other, or they may be coupled to the same DC voltage V DC . In addition, V DC >V CGR . As an example, the V DC can be in the range of about 0.4 to 1.5 V, for example, 0.8 V. The higher V DC causes a more negative threshold voltage state to be sensed. For example, the first negative threshold voltage state V TH1 =−1.0 V and the second negative threshold voltage state V TH2 =−0.5 V can be sensed using V DC =1.5 V and V DC =1.0 V, respectively. The V DC can be set to a level such that V DC -V TH >0 V. Typically, to sense the negative threshold voltage, the word line and source voltages are set such that the gate to source voltage is less than zero, that is, V GS <0 V. If the gate-to-source voltage is greater than the threshold voltage of the storage element (ie, V GS >V TH ), the selected storage element conducts. To sense the positive threshold voltage, the source and p wells can be held at the same voltage while the selected word line voltage is adjusted.
在NAND串630之汲極側,接通BLS電晶體610,例如,使其傳導或打開。另外,將電壓VBLC 施加至BLC電晶體604以使其傳導。電流感測模組602中之預充電電容器經由位元線放電至源極中,使得源極充當電流槽。可將NAND串之汲極處的預充電電容器預充電至一超出源極之電位的電位,使得當選定之儲存元件處於傳導狀態時,電流流經選定的非揮發性儲存元件且沉入源極中。On the drain side of NAND string 630, BLS transistor 610 is turned on, for example, to conduct or turn it on. Additionally, a voltage V BLC is applied to the BLC transistor 604 for conduction. The pre-charge capacitor in current sense module 602 is discharged into the source via a bit line such that the source acts as a current sink. The precharge capacitor at the drain of the NAND string can be precharged to a potential that exceeds the potential of the source such that when the selected storage element is in a conducting state, current flows through the selected non-volatile storage element and sinks into the source .
詳言之,若選定之儲存元件歸因於VCGR 之施加而處於傳導狀態,則一相對較高之電流將流動。若選定之儲存元件處於非傳導狀態,則無電流或相對較小之電流將流動。電流感測模組602可感測單元/儲存元件電流iCELL 。在一可能方法中,電流感測模組確定一電壓降,其藉由關係△V=i.t/C而與一固定電流相聯繫,其中△V為電壓降,i為固定電流,t為預定之放電時間段且C為電流感測模組中之預充電電容器之電容。亦參見圖6d,其描繪不同固定電流線的隨時間之電壓降。較高電壓降表示較高電流。在給定放電週期的最後,因為i及C係固定的,所以可確定給定電流之△V。在一方法中,將p-mos電晶體用於確定△V相對於定界值之位準。在另一可能方法中,單元電流鑑別器藉由判定傳導電流是高於還是低於給定定界電流而充當電流位 準之鑑別器或比較器。In particular, if a selected storage element is in a conducting state due to the application of V CGR , a relatively high current will flow. If the selected storage element is in a non-conducting state, no current or relatively small current will flow. The current sensing module 602 can sense the unit/storage element current i CELL . In one possible method, the current sensing module determines a voltage drop by the relationship ΔV=i. t/C is associated with a fixed current, where ΔV is the voltage drop, i is the fixed current, t is the predetermined discharge period and C is the capacitance of the pre-charge capacitor in the current sense module. See also Figure 6d, which depicts the voltage drop over time for different fixed current lines. A higher voltage drop indicates a higher current. At the end of a given discharge cycle, since i and C are fixed, ΔV of a given current can be determined. In one method, a p-mos transistor is used to determine the level of ΔV relative to a demarcation value. In another possible method, the cell current discriminator acts as a discriminator or comparator for the current level by determining whether the conduction current is above or below a given delimited current.
與之相比,電壓感測不包括感測與固定電流相聯繫之電壓降。替代地,電壓感測包括判定電壓感測模組中之電容器與位元線之電容之間是否發生電荷共用。在感測期間,電流並不固定或恆定。當選定之儲存元件傳導時,很少或不發生電荷共用,在此狀況下,電壓感測模組中之電容器之電壓不顯著下降。當選定之儲存元件不傳導時,發生電荷共用,在此狀況下,電壓感測模組中之電容器之電壓顯著下降。In contrast, voltage sensing does not include sensing the voltage drop associated with a fixed current. Alternatively, the voltage sensing includes determining whether charge sharing occurs between the capacitor in the voltage sensing module and the capacitance of the bit line. The current is not fixed or constant during sensing. When the selected storage element conducts, little or no charge sharing occurs, in which case the voltage of the capacitor in the voltage sensing module does not drop significantly. When the selected storage element is not conducting, charge sharing occurs, in which case the voltage of the capacitor in the voltage sensing module drops significantly.
電流感測模組602因此可藉由電流之位準來判定選定之儲存元件是處於傳導還是非傳導狀態。通常,當選定之儲存元件處於傳導狀態時,較高電流將流動,且當選定之儲存元件儲存於非傳導狀態時,較低電流將流動。當選定之儲存元件處於非傳導狀態或傳導狀態時,其臨限電壓分別高於或低於一比較位準(諸如,驗證位準(參見圖5c)或讀取位準(參見圖5d))。The current sensing module 602 can therefore determine whether the selected storage element is in a conductive or non-conducting state by the level of the current. Typically, a higher current will flow when the selected storage element is in a conducting state, and a lower current will flow when the selected storage element is stored in a non-conducting state. When the selected storage element is in a non-conducting or conducting state, its threshold voltage is above or below a comparison level (such as verifying the level (see Figure 5c) or reading the level (see Figure 5d)).
圖6b描繪與圖6a相關聯之波形。波形620描繪VSOURCE 及VP-WELL 、VBL 及VBLC 。在感測操作期間在t1將VSOURCE 及VP-WELL 設定為一升高位準。在一方法中,諸如當感測操作包括一負臨限電壓時,VSOURCE 及VP-WELL 超出VCGR 。然而,例如,當感測操作包括一正臨限電壓時,VSOURCE 及VP-WELL 不必超出VCGR 。VBL 在t1與t2之間隨VSOURCE 而增加。在t2,預充電電容器放電,進而使VBL 增加。因此,與選定之非揮發性儲存元件相關聯之汲極電位(例如, VBL )高於與選定之非揮發性儲存元件相關聯之源極電位(例如,VSOURCE )。VBLC 追蹤VBL ,但歸因於BLC電晶體之臨限電壓而稍微較高。實務上,在上升之後,若電流在NAND串中流動,則VBL 將稍微下降(未圖示)。舉例而言,當VBLC =2 V且BLC電晶體之臨限電壓為1 V時,VBL 可上升至1 V。當感測時,若電流流動,則VBL 可自1 V降至(例如)0.9 V。波形622描繪一施加至BLS電晶體之電壓,其指示電晶體在t0與t5之間傳導。波形624描繪一感測信號,其為一指示電容器開始在電流感測模組中放電之後的時間t之控制信號。Figure 6b depicts the waveform associated with Figure 6a. Waveform 620 depicts V SOURCE and V P-WELL , V BL and V BLC . V SOURCE and V P-WELL are set to an elevated level at t1 during the sensing operation. In one method, such as when the sensing operation includes a negative threshold voltage, V SOURCE and V P-WELL exceed V CGR . However, for example, when the sensing operation includes a positive threshold voltage, V SOURCE and V P-WELL do not have to exceed V CGR . V BL increases with V SOURCE between t1 and t2. At t2, the pre-charge capacitor is discharged, which in turn increases VBL . Thus, the drain potential associated with the selected non-volatile storage element (e.g., VBL ) is higher than the source potential (e.g., VSOURCE ) associated with the selected non-volatile storage element. V BLC tracks V BL but is slightly higher due to the threshold voltage of the BLC transistor. In practice, after the rise, if current flows in the NAND string, V BL will drop slightly (not shown). For example, when V BLC = 2 V and the threshold voltage of the BLC transistor is 1 V, V BL can rise to 1 V. When sensing, if current flows, V BL can be reduced from 1 V to, for example, 0.9 V. Waveform 622 depicts a voltage applied to the BLS transistor indicating that the transistor is conducting between t0 and t5. Waveform 624 depicts a sense signal that is a control signal that indicates the time t after the capacitor begins to discharge in the current sense module.
波形626及628描繪選定位元線之感測電壓,其與一固定電流相聯繫。可在t3進行關於該電壓是否超出一定界位準之判定。可得出如下結論:當電壓降至定界位準以下時(例如,線628),選定之儲存元件傳導。若電壓未降至定界位準以下時(例如,線626),選定之儲存元件不傳導。Waveforms 626 and 628 depict the sense voltage of the selected bit line, which is associated with a fixed current. A determination can be made at t3 as to whether the voltage exceeds a certain level. It can be concluded that when the voltage drops below the delimiting level (eg, line 628), the selected storage element conducts. If the voltage does not fall below the demarcation level (eg, line 626), the selected storage element is not conducting.
圖6c描繪與圖6a及圖6b相關聯之感測過程。提供感測過程之概述。在此及其他流程圖中,所描繪之步驟未必作為離散步驟及/或以所描述之順序發生。在步驟640開始諸如讀取或驗證操作之感測操作。步驟642包括打開BLS電晶體及BLC電晶體以使位元線預充電。步驟644包括設定字元線電壓。步驟646包括設定VSOURCE 及VP-WELL 。步驟648包括使用電流感測判定儲存元件是傳導還是非傳導的。若在決策步驟650,要執行另一感測操作,則控制流在步驟640繼續。否則,該過程在步驟652結束。Figure 6c depicts the sensing process associated with Figures 6a and 6b. Provide an overview of the sensing process. In this and other flow charts, the steps depicted are not necessarily taken as discrete steps and/or in the sequence described. A sensing operation such as a read or verify operation is initiated at step 640. Step 642 includes opening the BLS transistor and the BLC transistor to precharge the bit line. Step 644 includes setting the word line voltage. Step 646 includes setting V SOURCE and V P-WELL . Step 648 includes using current sensing to determine whether the storage element is conductive or non-conductive. If at decision step 650, another sensing operation is to be performed, then control flow continues at step 640. Otherwise, the process ends at step 652.
可連續執行多個感測操作,例如,針對每一驗證或讀取位準執行一操作。在一方法中,在每一感測操作中施加相同的源極電壓及p井電壓,但選定之字元線電壓會改變。因此,在一第一感測操作中,可將一第一電壓施加至選定之儲存元件之控制閘極/字元線,將源極電壓施加至源極,且將p井電壓施加至p井。接著在施加第一電壓及源極電壓的同時,使用電流感測進行關於儲存元件是處於傳導狀態還是非傳導狀態之判定。一第二感測操作包括在施加相同的源極電壓及p井電壓的同時,施加一第二電壓至控制閘極。接著進行關於儲存元件是處於傳導狀態還是非傳導狀態之判定。當使用相同的源極電壓及p井電壓時,連續的感測操作可類似地改變選定之字元線電壓。Multiple sensing operations can be performed continuously, for example, performing an operation for each verify or read level. In one method, the same source voltage and p-well voltage are applied in each sensing operation, but the selected word line voltage changes. Thus, in a first sensing operation, a first voltage can be applied to the control gate/word line of the selected storage element, the source voltage is applied to the source, and the p-well voltage is applied to the p-well. . Next, while applying the first voltage and the source voltage, current sensing is used to make a determination as to whether the storage element is in a conductive state or a non-conducting state. A second sensing operation includes applying a second voltage to the control gate while applying the same source voltage and p-well voltage. A determination is then made as to whether the storage element is in a conducting state or a non-conducting state. When the same source voltage and p-well voltage are used, successive sensing operations can similarly change the selected word line voltage.
另外,可對與共同字元線及源極相關聯之多個儲存元件同時執行感測。多個儲存元件可處於鄰近或非鄰近的NAND串中。先前所論述之全位元線感測包括對鄰近NAND串中之儲存元件之同時感測。在此狀況下,感測包括使用電流感測在同時感測操作中判定非揮發性儲存元件中之每一者是處於傳導狀態還是非傳導狀態。Additionally, sensing can be performed simultaneously on a plurality of storage elements associated with a common word line and source. The plurality of storage elements can be in adjacent or non-adjacent NAND strings. The full bit line sensing previously discussed includes simultaneous sensing of storage elements in adjacent NAND strings. In this case, sensing includes determining whether each of the non-volatile storage elements is in a conductive state or a non-conducting state in a simultaneous sensing operation using current sensing.
在非揮發性儲存裝置(包括使用NAND記憶體設計之非揮發性儲存裝置)中,電流感測可用於在讀取或驗證操作期間感測非揮發性儲存元件之臨限電壓狀態。然而,此電流感測已導致源極電壓之變化或"彈跳",尤其在接地電壓下。彈跳之程度視通過儲存元件之電流的位準而定。此 外,彈跳可導致感測誤差。一控制感測期間之單元源極彈跳之方法為使用至少兩個選通進行感測。此可最小化單元源極彈跳之效應。舉例而言,在電流感測之情況下,可於來自控制之每一選通處感測選定之儲存元件之NAND串中的電流。相對較高或另外不準確的彈跳電流可在第一選通處出現,而較低電流在第二選通時出現,其中較低電流更準確地表示儲存元件之感測狀態。然而,使用額外選通以等待電流安定之需要消耗了額外的電流及感測時間。參見圖7a,其描繪歸因於感測操作期間之地電位彈跳的電流及電壓隨時間的變化。In non-volatile storage devices, including non-volatile storage devices designed using NAND memory, current sensing can be used to sense the threshold voltage state of a non-volatile storage element during a read or verify operation. However, this current sensing has caused a change in the source voltage or "bounce", especially at ground voltage. The degree of bounce depends on the level of current through the storage element. this In addition, bounce can cause sensing errors. A method of controlling cell source bounce during sensing is to sense using at least two gates. This minimizes the effect of cell source bounce. For example, in the case of current sensing, the current in the NAND string of the selected storage element can be sensed from each of the gates of the control. A relatively high or otherwise inaccurate bounce current may occur at the first gating, while a lower current occurs at the second gating, wherein the lower current more accurately represents the sensed state of the storage element. However, the use of additional gating to wait for current stability requires additional current and sensing time. See Figure 7a, which depicts changes in current and voltage as a function of time due to ground bounce during sensing operations.
另一技術為將源極耦接至儲存元件之閘極及汲極。然而,此技術係負雜的、需要額外電路且對記憶體晶片之晶粒大小及功率消耗有一定影響。此外,此技術可歸因於自源極至儲存元件之閘極的RC延遲而不能良好地工作。Another technique is to couple the source to the gate and drain of the storage element. However, this technique is cumbersome, requires additional circuitry, and has an impact on the grain size and power consumption of the memory die. Moreover, this technique can not work well due to the RC delay from the source to the gate of the storage element.
一大體避免此等缺點之方法為在感測期間將源極及p井調節至某一固定的正DC位準,而非接地。藉由使源極及p井保持在固定DC位準,避免源極電壓中之彈跳,因此吾人可使用僅一個選通來感測資料。結果,感測時間及功率消耗減少。另外,不需要大量的額外電路,因此晶粒尺寸未受不利影響。亦可能在將源極電壓調節為固定的正DC位準的同時將p井接地。將源極電壓調節至固定的正DC位準可比將源極電壓調節至接地更容易達成,因為調節電路僅需要感測正電壓。電壓調節器通常藉由基於(例如,源極)之監視位準與內部參考電壓之比較來調整其輸出而工 作。若監視位準降至內部參考電壓以下,則電壓調節器可增加其輸出。類似地,若監視位準增加至內部參考電壓以上,則電壓調節器可降低其輸出。舉例而言,電壓調節器可使用運算放大器。然而,若參考電壓為接地,則在監視位準變得大於0 V之情況下,電壓調節器通常不能將其輸出降低至0 V以下。此外,電壓調節器可能不能區分0 V以下之監視位準。因此,將源極電壓調節至固定的正DC位準避免地電位彈跳且可減小電流消耗及感測時間。參見圖7b,其描繪在感測操作期間當源極電壓被調節至固定的正DC位準時的電流及電壓之減小變化。A general approach to avoiding these shortcomings is to adjust the source and p wells to a fixed positive DC level during sensing, rather than ground. By keeping the source and p-wells at a fixed DC level and avoiding bouncing in the source voltage, we can use only one strobe to sense the data. As a result, the sensing time and power consumption are reduced. In addition, a large amount of additional circuitry is not required, so the grain size is not adversely affected. It is also possible to ground the p-well while adjusting the source voltage to a fixed positive DC level. Adjusting the source voltage to a fixed positive DC level is easier to achieve than adjusting the source voltage to ground because the regulation circuit only needs to sense a positive voltage. A voltage regulator typically adjusts its output by comparing its monitoring level based on (eg, source) to an internal reference voltage. Work. If the monitor level falls below the internal reference voltage, the voltage regulator can increase its output. Similarly, if the monitor level is increased above the internal reference voltage, the voltage regulator can reduce its output. For example, a voltage regulator can use an operational amplifier. However, if the reference voltage is grounded, the voltage regulator typically cannot reduce its output below 0 V if the monitor level becomes greater than 0 V. In addition, the voltage regulator may not be able to distinguish between monitoring levels below 0 V. Therefore, adjusting the source voltage to a fixed positive DC level avoids ground bounce and can reduce current consumption and sensing time. Referring to Figure 7b, there is depicted a decrease in current and voltage as the source voltage is adjusted to a fixed positive DC level during the sensing operation.
圖7c描繪NAND串及用於感測之組件之另一組態。除了描繪電壓調節器720外,該組態對應於圖6a中所提供之組態。如所提及,可在感測操作期間將源極電壓及p井電壓調節至固定的正DC位準。Figure 7c depicts another configuration of a NAND string and components for sensing. This configuration corresponds to the configuration provided in Figure 6a, except that the voltage regulator 720 is depicted. As mentioned, the source voltage and the p-well voltage can be adjusted to a fixed positive DC level during the sensing operation.
在儲存元件之感測操作(諸如,讀取或驗證操作)期間,將一電壓施加至該操作中所涉及的一或多個儲存元件之字元線。舉例而言,假設選定字元線為WL1。將此電壓作為控制閘極讀取電壓VCGR 而耦合至該字元線上的儲存元件之控制閘極。另外,可將一固定的DC電壓分別作為源極電壓VSOURCE 及p井電壓VP-WELL 而施加至NAND串612之源極側以及p井。在一實施中,當臨限電壓為負時,VCGR 可為正’且VSOURCE 及VP-WELL 可大於VCGR 。在一實施中,當臨限電壓為正時,VCGR 可大於VSOURCE 及VP-WELL 。VSOURCE 與VP-WELL 可相互不同,或其可耦接至同一DC電壓VDC 。作為 一實例,VDC 可藉由電壓調節器720而調節至在約0.4至1.2 V之範圍內(例如,0.8 V)。如先前所論述,歸因於源極及p井上之恆定電壓,可藉由使用僅一個選通達成精確的感測。另外,可執行全位元線感測(在其中感測與所有位元線相關聯之儲存元件)(參見圖14)。詳言之,電壓調節器720可接收一參考電壓VREF,SOURCE (其用於將VSOURCE 調節至一大於0 V之位準)及一參考電壓VREF,P-WELL (其用於將p井電壓調節至一大於或等於0 V之位準)。During a sensing operation of the storage element, such as a read or verify operation, a voltage is applied to the word line of one or more storage elements involved in the operation. For example, suppose the selected word line is WL1. This voltage is coupled to the control gate of the storage element on the word line as a control gate read voltage V CGR . In addition, a fixed DC voltage can be applied to the source side of the NAND string 612 and the p-well as the source voltage V SOURCE and the p-well voltage V P-WELL , respectively. In one implementation, when the threshold voltage is negative, V CGR may be positive ' and V SOURCE and V P-WELL may be greater than V CGR . In one implementation, when the threshold voltage is positive, V CGR may be greater than V SOURCE and V P-WELL . V SOURCE and V P-WELL may be different from each other, or they may be coupled to the same DC voltage V DC . As an example, the V DC can be adjusted by voltage regulator 720 to be in the range of about 0.4 to 1.2 V (eg, 0.8 V). As discussed previously, due to the constant voltage across the source and p-wells, accurate sensing can be achieved by using only one gate. Additionally, full bit line sensing (where the storage elements associated with all bit lines are sensed) can be performed (see Figure 14). In particular, voltage regulator 720 can receive a reference voltage V REF, SOURCE (which is used to regulate V SOURCE to a level greater than 0 V) and a reference voltage V REF, P-WELL (which is used to p The well voltage is adjusted to a level greater than or equal to 0 V).
圖7d描繪與圖7a至圖7c相關聯之感測過程。在步驟700開始諸如讀取或驗證操作之感測操作。步驟702包括打開BLS電晶體及BLC電晶體及使位元線預充電。步驟704包括設定字元線電壓。步驟706包括將VSOURCE 及VP-WELL 調節至正DC位準。步驟708包括使用電流感測判定選定之儲存元件是傳導還是非傳導的。在決策步驟710中,若存在另一感測操作,則控制流在步驟700繼續。否則,該過程在步驟712結束。Figure 7d depicts the sensing process associated with Figures 7a-7c. A sensing operation such as a read or verify operation is initiated at step 700. Step 702 includes opening the BLS transistor and the BLC transistor and pre-charging the bit line. Step 704 includes setting a word line voltage. Step 706 includes adjusting V SOURCE and V P-WELL to a positive DC level. Step 708 includes using current sensing to determine whether the selected storage element is conductive or non-conductive. In decision step 710, if there is another sensing operation, the control flow continues at step 700. Otherwise, the process ends at step 712.
另外,如先前所論述,可對與共同字元線及源極相關聯之多個儲存元件同時執行感測。多個儲存元件可處於鄰近或非鄰近的NAND串中。在此狀況下,感測包括使用電流感測在同時感測操作中判定非揮發性儲存元件中之每一者是處於傳導狀態還是非傳導狀態。對於每一感測操作,如所論述地調節電壓。Additionally, as previously discussed, sensing can be performed simultaneously on a plurality of storage elements associated with a common word line and source. The plurality of storage elements can be in adjacent or non-adjacent NAND strings. In this case, sensing includes determining whether each of the non-volatile storage elements is in a conductive state or a non-conducting state in a simultaneous sensing operation using current sensing. For each sensing operation, the voltage is adjusted as discussed.
全位元線感測包括對鄰近NAND串中之儲存元件執行感 測操作(參見圖14)。一電位感測方法使用DC儲存元件電流來使感測模組中之固定電容上之電荷在一固定時間段中放電,以將儲存元件之臨限電壓值轉換成數位資料格式。然而,此要求一相對較大之電流沉入NAND串之源極側中。另外,如先前所論述,為了感測負臨限電壓值,可將偏壓施加至使用類比電壓位準之源極及p井兩者,以避免對負字元線電壓及負電荷泵之需要。然而,因為全位元線感測對源極偏壓位準非常敏感,所以保持類比電壓位準需要一相對較大之電壓調節器及源極電壓至陣列中之均勻分布。此可增加所需的裝置面積。Full bit line sensing includes a sense of execution of storage elements in adjacent NAND strings Test operation (see Figure 14). A potential sensing method uses a DC storage element current to discharge a charge on a fixed capacitance in the sensing module for a fixed period of time to convert the threshold voltage value of the storage element into a digital data format. However, this requires a relatively large current sinking into the source side of the NAND string. Additionally, as previously discussed, to sense the negative threshold voltage value, a bias voltage can be applied to both the source and p-wells using analog voltage levels to avoid the need for negative word line voltages and negative charge pumps. . However, because full bit line sensing is very sensitive to source bias levels, maintaining a analog voltage level requires a relatively large voltage regulator and source voltage to be evenly distributed across the array. This can increase the required device area.
如先前所論述,全位元線感測之另一方法使用電壓感測。因為不存在至源極側之DC電流,所以此方法不需要大的電壓調節器。然而,歸因於位元線至位元線耦合雜訊,此方法尚不能同時成功地感測每一位元線。替代地,在給定時間(例如,在奇偶感測中(參見圖14)),僅感測每隔一位元線。因此,從感測時間看,效能還不是最佳的。詳言之,歸因於鄰近NAND串非常接近,全位元感測有問題。可發生電容耦合,尤其是自其中的選定儲存元件傳導之NAND串至其中的選定儲存元件不傳導之NAND串的耦合。其中的選定儲存元件不傳導之NAND串之位元線電壓藉此增加,進而干擾感測操作。此電容耦合藉由一至相鄰位元線之電容813來描繪。相鄰位元線/NAND串可為直接鄰近或非鄰近的。來自鄰近位元線/NAND串之電容耦合為最強的,但亦可發生某一來自非鄰近位元線/NAND串之電 容性耦合。亦描繪一至接地端之電容811。As discussed previously, another method of full bit line sensing uses voltage sensing. Since there is no DC current to the source side, this method does not require a large voltage regulator. However, due to the bit line-to-bit line coupling noise, this method has not been able to successfully sense each bit line at the same time. Alternatively, at a given time (eg, in parity sensing (see Figure 14)), only every other bit line is sensed. Therefore, from the time of sensing, performance is not optimal. In particular, due to the proximity of adjacent NAND strings, full bit sensing is problematic. Capacitive coupling can occur, particularly from the NAND string in which the selected storage element conducts to the NAND string in which the selected storage element is not conducting. The bit line voltage of the NAND string in which the selected storage element is not conducted is thereby increased, thereby interfering with the sensing operation. This capacitive coupling is depicted by a capacitance 813 to an adjacent bit line. Adjacent bit lines/NAND strings can be directly adjacent or non-contiguous. The capacitive coupling from adjacent bit lines/NAND strings is the strongest, but some electricity from non-adjacent bit lines/NAND strings can also occur. Capacitive coupling. A capacitor 811 to the ground terminal is also depicted.
為了克服此等問題,可使用如圖8a中所描繪之機制執行感測。圖8a描繪NAND串及組件之組態,包括電流放電路徑。在一簡化實例中,NAND串812包括四個儲存元件,其分別與字元線WL0、WL1、WL2及WL3通信。實務上,可使用額外的儲存元件及字元線。另外,額外的NAND串在非揮發性儲存元件之區塊或其他集合中通常被相互鄰近地配置。將儲存元件耦接至基板之p井區域。除了感測組件800之外,描繪具有電壓VBL 之位元線810。詳言之,最初打開或傳導之BLS(位元線感測)電晶體806係經由感測節點814耦接至位元線810。BLS電晶體806為高電壓電晶體,且在感測操作期間回應於控制808而變得傳導。最初非傳導之BLC(位元線控制)電晶體804為低電壓電晶體,其回應於控制裝置808而打開以允許位元線與電壓感測模組/電路802通信。在一感測操作(諸如讀取或驗證操作)期間,發生預充電操作,電壓感測模組802中之一電容器在該操作中充電。可將BLC電晶體804打開以允許預充電。To overcome these problems, sensing can be performed using the mechanism as depicted in Figure 8a. Figure 8a depicts the configuration of a NAND string and components, including a current discharge path. In a simplified example, NAND string 812 includes four storage elements that are in communication with word lines WL0, WL1, WL2, and WL3, respectively. In practice, additional storage elements and word lines can be used. Additionally, additional NAND strings are typically disposed adjacent to one another in blocks or other sets of non-volatile storage elements. The storage element is coupled to the p-well region of the substrate. In addition to the sensing component 800, a bit line 810 having a voltage VBL is depicted. In particular, the initially opened or conductive BLS (bit line sense) transistor 806 is coupled to bit line 810 via sense node 814. BLS transistor 806 is a high voltage transistor and becomes conductive in response to control 808 during a sensing operation. The initially non-conducting BLC (bit line control) transistor 804 is a low voltage transistor that is turned on in response to control device 808 to allow the bit line to communicate with voltage sensing module/circuit 802. During a sensing operation, such as a read or verify operation, a pre-charge operation occurs in which one of the capacitors in voltage sensing module 802 is charged. The BLC transistor 804 can be turned on to allow for pre-charging.
另外,介紹一相對較弱之電流下拉裝置。詳言之,將路徑816(其為NAND串812之電流放電路徑之部分)耦接至感測節點814(其又被耦接至位元線810)。提供一處於傳導狀態的電晶體(其被稱為GRS電晶體818),使得路徑816被耦接至亦為電流放電路徑之部分的路徑820。平行於路徑816、820提供一提供電流iREF 之電流源825(例如,電流鏡),以將該等路徑上之電流iCELL 下拉至接地。在一實例 中,提供一具有約150 nA之iREF 的相對較弱下拉。然而,電流源825之強度可根據特定實施而改變。In addition, a relatively weak current pull-down device is introduced. In particular, path 816, which is part of the current discharge path of NAND string 812, is coupled to sense node 814 (which is in turn coupled to bit line 810). A transistor in a conducting state (referred to as a GRS transistor 818) is provided such that path 816 is coupled to path 820 which is also part of the current discharge path. A current source 825 (eg, a current mirror) that provides current i REF is provided parallel to paths 816, 820 to pull the current i CELL on the paths down to ground. In one example, a relatively weak pulldown having an i REF of about 150 nA is provided. However, the strength of current source 825 can vary depending on the particular implementation.
在一可能組態中,電流源825為多個位元線及NAND串所共有。在此狀況下,電晶體824將電流源825耦接至不同的NAND串。路徑822載運一用於GRS電晶體818之控制信號,其對特定位元線及NAND串而言係區域的,同時路徑826為多個位元線之共同接地路徑。In a possible configuration, current source 825 is common to multiple bit lines and NAND strings. In this case, transistor 824 couples current source 825 to a different NAND string. Path 822 carries a control signal for GRS transistor 818 that is region-specific for a particular bit line and NAND string, while path 826 is a common ground path for a plurality of bit lines.
在感測期間,位元線將充電至一基於選定儲存元件之臨限電壓及體效應之位準。在負Vti之情況下,即使VGCR =0 V,儲存元件仍將傳導。可將VP-WELL 設定至0 V。During sensing, the bit line will be charged to a level based on the threshold voltage and body effect of the selected storage element. In the case of negative Vti, the storage element will conduct even if V GCR = 0 V. V P-WELL can be set to 0 V.
使電晶體818及824作成傳導以形成用來使任何電荷放電之電流放電路徑及下拉裝置,電荷歸因於至相鄰位元線之電容813而自一或多個相鄰NAND串耦合至NAND串812。因此,藉由相鄰位元線之耦合雜訊而產生之任何額外電荷最終將消失。在某一時間量之後,所有位元線達到其DC位準,且BLC電晶體804接通以允許電壓感測模組802與感測節點814之間的電荷共用,使得對選定之儲存元件之臨限電壓之電壓感測可發生。舉例而言,電壓感測模組802可將電壓感測作為讀取或驗證操作之部分來執行。The transistors 818 and 824 are made conductive to form a current discharge path and pull-down means for discharging any charge, the charge being coupled to the NAND from one or more adjacent NAND strings due to the capacitance 813 to the adjacent bit line String 812. Therefore, any extra charge generated by the coupling noise of adjacent bit lines will eventually disappear. After a certain amount of time, all of the bit lines reach their DC level, and BLC transistor 804 is turned "on" to allow charge sharing between voltage sensing module 802 and sense node 814, such that for selected storage elements Voltage sensing of the threshold voltage can occur. For example, voltage sensing module 802 can perform voltage sensing as part of a read or verify operation.
圖8b描繪當電壓感測發生時的圖8a之NAND串及組件之組態。此處,BLC電晶體804打開,使得除了自NAND串812放出的電流之外,電流自電壓感測模組802流向放電路徑。因此,GRS電晶體保持於傳導狀態下,使得放電在電壓感測期間繼續。 圖8c描繪與圖8a及圖8b相關聯之波形。在波形830處描繪VSOURCE ,且且分別在波形832、834及836處描繪三個鄰近位元線BL0、BL1及BL2上之電壓。在波形838處描繪BLS電晶體上之電壓VBLS ,且在波形840處描繪BLC電晶體上之電壓VBLC ,且在波形842處描繪GRS電晶體上之電壓VGRS 。在波形844處描繪BL0及BL2上之所感測電壓。在波形846處描繪當BL1上之選定儲存元件傳導時的BL1上之所感測電壓,且在波形848處描繪當BL1上之選定儲存元件不傳導時的BL1上之所感測電壓。如所提及,在電壓感測期間,當選定之儲存元件不傳導時,發生電壓感測模組與位元線之間的電荷共用。此電荷共用降低電壓感測模組處之所感測電壓。當選定之儲存元件傳導時,很少或不發生電壓感測模組與位元線之間的電荷共用,使得電壓感測模組處之所感測電壓保持為高。由於感測未發生,故未描繪其他時間的所感測電壓。Figure 8b depicts the configuration of the NAND string and components of Figure 8a when voltage sensing occurs. Here, the BLC transistor 804 is turned on such that current flows from the voltage sensing module 802 to the discharge path in addition to the current discharged from the NAND string 812. Therefore, the GRS transistor remains in a conducting state such that the discharge continues during voltage sensing. Figure 8c depicts the waveforms associated with Figures 8a and 8b. V SOURCE is depicted at waveform 830 and the voltages on three adjacent bit lines BL0, BL1, and BL2 are depicted at waveforms 832, 834, and 836, respectively. The voltage V BLS on the BLS transistor is depicted at waveform 838 and the voltage V BLC on the BLC transistor is depicted at waveform 840 and the voltage V GRS on the GRS transistor is depicted at waveform 842. The sensed voltages on BL0 and BL2 are depicted at waveform 844. The sensed voltage on BL1 when the selected storage element on BL1 is conducting is depicted at waveform 846, and the sensed voltage on BL1 when the selected storage element on BL1 is not conducting is depicted at waveform 848. As mentioned, charge sharing between the voltage sensing module and the bit line occurs when the selected storage element is not conducting during voltage sensing. This charge sharing reduces the sensed voltage at the voltage sensing module. When the selected storage element conducts, little or no charge sharing between the voltage sensing module and the bit line occurs, so that the sensed voltage at the voltage sensing module remains high. Since the sensing did not occur, the sensed voltage at other times was not depicted.
在t0,VBLS 增加,使得BLS電晶體傳導。在t1,施加VSOURCE 作為NAND串之一集合之共同源極電壓。在此實例中,吾人假設:當與BL0及BL2相關聯之選定儲存元件傳導時,與BL1相關聯之選定儲存元件不傳導。BL0在一側鄰近於BL1,且BL2在另一側鄰近於BL1(參見圖14)。當VSOURCE 在t1增加時,VBL0 及VBL2 將分別如波形832及836所描繪地上升,從而導致至BL1之電容耦合,如VBL1 中之瞬時增加所描繪。到t2時,此耦合將實質上消失。如所論述,BL1之GRS電晶體在t1與t5期間保持傳導以允許位元線 使經耦合電荷放電。At t0, V BLS is increased, causing the BLS transistor to conduct. At t1, V SOURCE is applied as the common source voltage of one of the NAND strings. In this example, we assume that the selected storage elements associated with BL1 are not conducting when the selected storage elements associated with BL0 and BL2 are conducting. BL0 is adjacent to BL1 on one side, and BL2 is adjacent to BL1 on the other side (see FIG. 14). As V SOURCE increases at t1, V BL0 and V BL2 will rise as depicted by waveforms 832 and 836, respectively, resulting in capacitive coupling to BL1, as depicted by the transient increase in V BL1 . By t2, this coupling will essentially disappear. As discussed, the GRS transistor of BL1 remains conductive during t1 and t5 to allow the bit line to discharge the coupled charge.
在t3,藉由使VBLC 如波形840所描繪地增加而打開BLC電晶體,藉此允許對於BL1上之選定儲存元件的感測發生。注意,可類似地控制與BL0、BL2及其他位元線相關聯之對應組件,以允許在彼等其他位元線上同時發生感測。對於BL1,若選定之儲存元件不傳導,則電壓感測模組處之經感測電壓將如波形846所描繪地下降。另一方面,若選定之儲存元件傳導,則感測電壓將如波形844所描繪地大體保持為高。該等電壓感測組件可在規定的感測時間t4使用電壓斷點來判定選定之儲存元件是傳導還是非傳導的。如所提及,若經感測電壓超出斷點,則此指示儲存元件打開,而若經感測電壓降至斷點以下,則此指示儲存元件不傳導。VSOURCE 在t5降低且BLS電晶體在t6不傳導,進而指示感測操作結束。在一可能方法中,可在感測期間將VP-WELL 設定為0 V。根據特定感測機制,選定字元線接收VCGR ,同時未選擇字元線可接收讀取通過電壓。At t3, the BLC transistor is turned on by increasing the V BLC as depicted by waveform 840, thereby allowing sensing for the selected storage element on BL1 to occur. Note that the corresponding components associated with BL0, BL2, and other bit lines can be similarly controlled to allow simultaneous sensing on their other bit lines. For BL1, if the selected storage element is not conducting, the sensed voltage at the voltage sensing module will drop as depicted by waveform 846. On the other hand, if the selected storage element conducts, the sense voltage will remain substantially high as depicted by waveform 844. The voltage sensing components can use voltage breakpoints at a specified sensing time t4 to determine whether the selected storage element is conductive or non-conductive. As mentioned, if the sensed voltage exceeds the breakpoint, this indicates that the storage element is open, and if the sensed voltage drops below the breakpoint, this indicates that the storage element is not conducting. V SOURCE decreases at t5 and the BLS transistor does not conduct at t6, indicating the end of the sensing operation. In one possible approach, V P-WELL can be set to 0 V during sensing. Depending on the particular sensing mechanism, the selected word line receives V CGR while the unselected word line can receive the read pass voltage.
因此,在於t1施加源極電壓之後,設定一預定的持續時間為t3-t1的延遲,以允許自相鄰位元線之電容耦合有足夠時間充分或至少部分地放電。可基於理論及/或實驗測試,如特定實施所需地設定適當延遲。在延遲之後,發生電壓感測。在規定的時間t4,進行關於儲存元件是處於傳導狀態還是非傳導狀態且因此具有一分別高於驗證或讀取比較位準之臨限電壓之判定。Therefore, after the source voltage is applied by t1, a predetermined delay of t3-t1 is set to allow sufficient time or at least partial discharge of the capacitive coupling from adjacent bit lines. The appropriate delay can be set as desired for a particular implementation based on theoretical and/or experimental testing. After the delay, voltage sensing occurs. At a specified time t4, a determination is made as to whether the storage element is in a conducting state or a non-conducting state and thus has a threshold voltage that is higher than the verify or read comparison level, respectively.
圖8d描繪與圖8a至圖8c相關聯之感測過程。在步驟 850,開始感測操作。在步驟852,打開BLS電晶體,同時BLC電晶體保持非傳導,且使位元線預充電。在步驟854,設定字元線電壓。在步驟856,設定VSOURCE 及VP-WELL (VP-WELL =0 V)。在步驟858,位元線放電。在步驟860,使BLC電晶體傳導以允許感測發生。在步驟862,使用電壓感測進行關於選定之儲存元件是傳導還是非傳導之判定。在決策步驟864中,若存在另一感測操作,則控制流在步驟850繼續。否則,該過程在步驟868結束。Figure 8d depicts the sensing process associated with Figures 8a-8c. At step 850, a sensing operation is initiated. At step 852, the BLS transistor is turned on while the BLC transistor remains non-conducting and the bit line is precharged. At step 854, the word line voltage is set. At step 856, V SOURCE and V P-WELL (V P-WELL =0 V) are set. At step 858, the bit line is discharged. At step 860, the BLC transistor is conducted to allow sensing to occur. At step 862, voltage sensing is used to make a determination as to whether the selected storage element is conductive or non-conductive. In decision step 864, if there is another sensing operation, then control flow continues at step 850. Otherwise, the process ends at step 868.
另外,如先前所論述,可對與共同字元線及源極相關聯之多個儲存元件同時執行感測。多個儲存元件可處於鄰近或非鄰近的NAND串中。在此狀況下,感測包括使用電流感測在同時感測操作中判定非揮發性儲存元件中之每一者是處於傳導狀態還是非傳導狀態。可針對每一NAND串設定BLC電晶體打開之前的延遲,使得NAND串可在感測發生之前按需要放電。Additionally, as previously discussed, sensing can be performed simultaneously on a plurality of storage elements associated with a common word line and source. The plurality of storage elements can be in adjacent or non-adjacent NAND strings. In this case, sensing includes determining whether each of the non-volatile storage elements is in a conductive state or a non-conducting state in a simultaneous sensing operation using current sensing. The delay before the BLC transistor is turned on can be set for each NAND string such that the NAND string can be discharged as needed before sensing occurs.
在本發明之非揮發性儲存裝置(諸如NAND快閃記憶體裝置)中,溫度變化在讀取及寫入資料過程中造成各種問題。記憶體裝置基於其所處的環境而經受變化之溫度。舉例而言,一些電流記憶體裝置被額定為在-40℃與+85℃之間使用。工業、軍事及甚至消費應用中之裝置可經歷顯著的溫度變化。溫度影響許多電晶體參數,其中最重要的是臨限電壓。詳言之,溫度變化可導致讀取誤差且使非揮發性儲存元件之不同狀態的臨限電壓分布變寬。下文將論述 一用於解決非揮發性儲存裝置中之溫度效應之改良技術。In the non-volatile storage device of the present invention, such as a NAND flash memory device, temperature changes cause various problems in reading and writing data. The memory device is subject to varying temperatures based on the environment in which it is located. For example, some current memory devices are rated for use between -40 ° C and +85 ° C. Devices in industrial, military, and even consumer applications can experience significant temperature changes. Temperature affects many transistor parameters, the most important of which is the threshold voltage. In particular, temperature changes can cause read errors and widen the threshold voltage distribution of different states of the non-volatile storage element. Will be discussed below An improved technique for addressing the temperature effects in non-volatile storage devices.
圖9a描繪NAND串及用於溫度補償感測之組件。相同編號之組件對應於圖8a中所提供之組件。此處未描繪圖8a之電流放電路徑。然而,圖8a之組態可能與圖9a或本文中所提供之其他圖式中之一些圖的組態組合。另外,提供一溫度相依電路900作為控制808之部分,以提供溫度補償電壓至BLC電晶體804。BLC電晶體804具有一個耦接至電壓感測模組802之節點,及耦接至與NAND串812或非揮發性儲存元件之其他集合相關聯之汲極或位元線的另一節點。Figure 9a depicts a NAND string and components for temperature compensated sensing. Components of the same number correspond to the components provided in Figure 8a. The current discharge path of Figure 8a is not depicted here. However, the configuration of Figure 8a may be combined with the configuration of some of Figure 9a or other figures provided herein. Additionally, a temperature dependent circuit 900 is provided as part of control 808 to provide a temperature compensated voltage to BLC transistor 804. BLC transistor 804 has a node coupled to voltage sensing module 802 and another node coupled to a NAND string 812 or a drain or bit line associated with other sets of non-volatile storage elements.
在一感測操作期間,將一電壓VBLC 施加至BLC電晶體804,該電晶體將NAND串812之位元線或汲極側耦接至電壓感測模組802。根據本文中之方法,基於溫度設定VBLC 以抵銷或補償VBL 隨溫度之變化。具體言之,VBLC =VBL +VTH (獨立於溫度)+△V,其中△V為歸因於溫度之電壓變化。歸因於溫度,VBL 亦改變△V。因此,可控制VBLC ,使得其根據VBL 之變化而隨溫度改變。詳言之,藉由使用溫度相依電路900可使位元線上之△V匹配VBLC 之△V。電流iCELL 在NAND串812中流動。虛線指示電荷共用。During a sensing operation, a voltage V BLC is applied to the BLC transistor 804, which couples the bit line or drain side of the NAND string 812 to the voltage sensing module 802. According to the method herein, V BLC is set based on the temperature to offset or compensate for the change in V BL with temperature. Specifically, V BLC = V BL + V TH (independent of temperature) + ΔV, where ΔV is a voltage change due to temperature. V BL also changes ΔV due to temperature. Therefore, V BLC can be controlled such that it changes with temperature according to the change of V BL . In particular, by using the temperature dependent circuit 900, ΔV on the bit line can be matched to ΔV of V BLC . Current i CELL flows in NAND string 812. The dotted line indicates charge sharing.
圖9b說明隨溫度之臨限電壓變化,例如,△VTH /℃。通常,非揮發性儲存元件之臨限電壓隨溫度增加而減小。電壓相對於溫度變化之變化可用通常為約-2 mV/℃之溫度係數來表示。溫度係數視記憶體裝置之各種特性而定,諸如摻雜、布局等。此外,希望溫度係數之量值隨記憶體尺寸 減小而增加。Figure 9b illustrates the threshold voltage variation with temperature, for example, ΔV TH / °C. Typically, the threshold voltage of a non-volatile storage element decreases with increasing temperature. The change in voltage with respect to temperature can be expressed by a temperature coefficient of typically about -2 mV/°C. The temperature coefficient depends on various characteristics of the memory device, such as doping, layout, and the like. In addition, it is desirable that the magnitude of the temperature coefficient increases as the size of the memory decreases.
通常,用於提供溫度補償信號之各種技術係已知的。舉例而言,可將此等技術中之一或多個用於溫度相依電路900中。此等技術之大部分不依靠獲得實際溫度量測,雖然此方法亦為可能的。舉例而言,以引用方式併入本文中的標題為"Voltage Generation Circuitry Having Temperature Compensation"之美國專利第6,801,454號描述一電壓產生電路,其基於溫度係數輸出讀取電壓至非揮發性記憶體。該電路使用包括一溫度無關部分及一隨溫度增加而增加的溫度相依部分之帶隙電流。以引用方式併入本文中的標題為"Non-Volatile Memory With Temperature-Compensated Data Read"之美國專利第6,560,152號使用一偏壓產生器電路,其使一施加至資料儲存元件之源極或汲極之電壓偏壓。以引用方式併入本文中的標題為"Multi-State EEPROM Read and Write Circuits and Techniques"之美國專利第5,172,338號描繪一溫度補償技術,其使用以與資料儲存單元相同之方式形成且形成於同一積體電路晶片上之參考儲存單元。該等參考儲存單元提供參考位準,比較選定單元之量測電流或電壓與該等參考位準。因為參考位準以與自資料儲存單元讀取之值相同的方式受溫度影響,所以提供溫度補償。此等技術中之任一者以及任何其他已知技術可用於提供溫度補償電壓至位元線控制線,如本文中所描述。In general, various techniques for providing temperature compensated signals are known. For example, one or more of these techniques can be used in temperature dependent circuit 900. Most of these technologies do not rely on obtaining actual temperature measurements, although this approach is also possible. For example, US Patent No. 6,801,454, entitled "Voltage Generation Circuitry Having Temperature Compensation", which is incorporated herein by reference, discloses a voltage generating circuit that outputs a read voltage to a non-volatile memory based on a temperature coefficient. The circuit uses a bandgap current comprising a temperature independent portion and a temperature dependent portion that increases with increasing temperature. U.S. Patent No. 6,560,152, entitled "Non-Volatile Memory With Temperature-Compensated Data Read," which is incorporated herein by reference, uses a bias generator circuit that applies a source or drain to a data storage element. The voltage is biased. U.S. Patent No. 5,172,338, the disclosure of which is incorporated herein by reference in its entirety in its entirety, in its entirety, in its entirety, in its entirety, in the same extent as the data storage unit. Reference storage unit on the bulk circuit die. The reference storage units provide reference levels and compare the measured current or voltage of the selected unit to the reference levels. Temperature compensation is provided because the reference level is affected by temperature in the same manner as the value read from the data storage unit. Any of these techniques, as well as any other known techniques, can be used to provide a temperature compensated voltage to the bit line control line, as described herein.
如所論述,VBLC 為控制信號之電壓或提供至BLC電晶體 804的電壓,其允許感測組件感測正經受擦除-驗證或其他感測操作之選定儲存元件之VTH 。感測經由選定儲存元件所位於的NAND串之位元線而發生。在一實例實施中,VBLC =VBL +VTH (BLC電晶體)。因此,該控制經組態以使VBLC 隨增加之溫度而增加以追蹤VBL 之增加。對於儲存元件之給定VTH ,VBL 將隨溫度增加。As discussed, V BLC is the voltage of the control signal or the voltage provided to BLC transistor 804, which allows the sensing component to sense the VTH of the selected storage element that is undergoing an erase-verify or other sensing operation. Sensing occurs via the bit line of the NAND string in which the selected storage element is located. In an example implementation, V BLC = V BL + V TH (BLC transistor). Therefore, the control is configured to increase V BLC with increasing temperature to track the increase in V BL . For a given VTH of the storage element, VBL will increase with temperature.
圖9e說明VBLC 及VBL 隨溫度之變化。圖式描繪VBLC 如何隨溫度而增加以追蹤VBL 之增加。可基於理論及實驗結果,根據特定實施將提供VBLC 對溫度之特定變化之控制曲線程式化至控制808中。通常,當儲存元件之VTH 隨較高溫度減小時,位元線電壓增加。此意謂著VBLC 應較高以使電壓感測模組802感測較高之VBL 。注意,儲存元件之VTH 支配VBL 。然而,變化的VBLC 改變電壓感測模組感測之電壓,使得電壓經溫度補償。另外,注意,可藉由在溫度相依電路900中提供一類似於BLC電晶體804的隨溫度變化之電晶體來抵銷BLC電晶體804之VTH 之變化。Figure 9e illustrates the variation of V BLC and V BL with temperature. The figure depicts how V BLC increases with temperature to track the increase in V BL . A control curve that provides a specific change in temperature for V BLC to temperature 808 can be programmed into control 808 based on theoretical and experimental results. Typically, the bit line voltage increases as the VTH of the storage element decreases with higher temperatures. This means that the V BLC should be higher to allow the voltage sensing module 802 to sense a higher V BL . Note that the V TH of the storage component dominates V BL . However, the varying V BLC changes the voltage sensed by the voltage sensing module such that the voltage is temperature compensated. Additionally, it is noted that variations in the VTH of the BLC transistor 804 can be counteracted by providing a temperature dependent transistor similar to the BLC transistor 804 in the temperature dependent circuit 900.
圖9d描繪與圖9a至圖9c相關聯之波形。波形910描繪VSOURCE 及VP-WELL ,其在感測操作期間於t1設定為一升高位準。波形912及914描繪歸因於VSOURCE 及VP-WELL 之施加的VBL 之增加。與波形914相比,波形912描繪較高溫度下的VBL 之較高位準。實務上,在上升之後,當電流在NAND串中流動時,VBL 可稍微下降(未圖示)。波形916描繪施加至電晶體BLS之電壓,其指示電晶體在t0接通。波形918及920分別描繪在較高及較低溫度下施加至電晶體 BLC之電壓。注意,所提供之波形係針對與圖8a至圖8d之機制組合的溫度補償機制,其中延遲BLC電晶體之打開以允許放電在感測之前發生。然而,不要求以此方式使用溫度補償機制,且其可用於不涉及放電路徑及/或感測中的延遲的其他實施中。Figure 9d depicts the waveforms associated with Figures 9a through 9c. Waveform 910 depicts V SOURCE and V P-WELL , which are set to an elevated level at t1 during the sensing operation. Waveforms 912 and 914 depict the increase in VBL due to the application of VSOURCE and Vp -WELL . Waveform 912 depicts a higher level of VBL at a higher temperature than waveform 914. In practice, after the rise, when the current flows in the NAND string, V BL may drop slightly (not shown). Waveform 916 depicts the voltage applied to transistor BLS, which indicates that the transistor is turned "on" at t0. Waveforms 918 and 920 depict the voltage applied to transistor BLC at higher and lower temperatures, respectively. Note that the waveforms provided are for a temperature compensation mechanism combined with the mechanisms of Figures 8a through 8d, where the opening of the BLC transistor is delayed to allow the discharge to occur prior to sensing. However, the temperature compensation mechanism is not required to be used in this manner, and it can be used in other implementations that do not involve delays in the discharge path and/or sensing.
波形922描繪當選定儲存元件打開時選定位元線的電壓感測模組中之所感測電壓,而波形924描繪當選定儲存元件不傳導時的所感測電壓。在t2進行關於所感測電壓是否超出斷點之判定。可得出如下結論:當所感測電壓超出斷點時,選定之儲存元件傳導,而當感測電壓降至斷點以下時,選定之儲存元件不傳導。Waveform 922 depicts the sensed voltage in the voltage sensing module that selects the location line when the selected storage element is turned on, while waveform 924 depicts the sensed voltage when the selected storage element is not conducting. A determination is made at t2 as to whether the sensed voltage exceeds a breakpoint. It can be concluded that the selected storage element conducts when the sensed voltage exceeds the breakpoint, and the selected storage element does not conduct when the sensed voltage drops below the breakpoint.
圖9e描繪與圖9a至圖9d相關聯之感測過程。在步驟930開始感測操作,諸如讀取或驗證操作。步驟932包括使BLS電晶體及BLC電晶體傳導、使位元線預充電且設定溫度相依VBLC 。步驟934包括設定字元線電壓,其視情況為溫度相依性的。在一方法中,僅選定字元線電壓為溫度相依性的,而在其他方法中,字元線電壓之一些或全部為溫度相依性的。該等字元線電壓可根據VTH 之減小(參見圖9b)隨溫度增加而減小。步驟936包括設定VSOURCE 及VP-WELL 。步驟938包括使用電壓感測判定選定儲存元件是傳導還是非傳導的。若在決策步驟940判定將執行另一感測操作,則控制流在步驟930繼續。否則,該過程在步驟942結束。Figure 9e depicts the sensing process associated with Figures 9a through 9d. A sensing operation, such as a read or verify operation, is initiated at step 930. Step 932 includes conducting the BLS transistor and the BLC transistor, precharging the bit line, and setting the temperature dependent V BLC . Step 934 includes setting the word line voltage, which is temperature dependent as appropriate. In one method, only the selected word line voltage is temperature dependent, while in other methods, some or all of the word line voltage is temperature dependent. The word line voltage can be reduced as the temperature decreases as the VTH decreases (see Figure 9b). Step 936 includes setting V SOURCE and V P-WELL . Step 938 includes using voltage sensing to determine whether the selected storage element is conductive or non-conductive. If it is determined at decision step 940 that another sensing operation will be performed, then control flow continues at step 930. Otherwise, the process ends at step 942.
注意,因為選定儲存元件之汲極側上的儲存元件歸因於關聯字元線上之足夠高電壓而處於傳導狀態,所以NAND 串之汲極或位元線與選定儲存元件之汲極連通。類似地,因為選定儲存元件之源極側上的儲存元件歸因於關聯字元線上之足夠高電壓而處於傳導狀態,所以NAND串之源極與選定儲存元件之源極連通。因此,NAND串之汲極或位元線之電壓基本上亦為選定儲存元件之汲極之電壓,且NAND串之源極之電壓基本上亦為選定儲存元件之源極之電壓。又,由於本文中所描述之技術可用於單一儲存元件,故被感測之儲存元件未必在NAND串或儲存元件之其他集合中。Note that NAND is present because the storage elements on the drain side of the selected storage element are in a conducting state due to a sufficiently high voltage on the associated word line. The drain or bit line of the string is in communication with the drain of the selected storage element. Similarly, since the storage element on the source side of the selected storage element is in a conducting state due to a sufficiently high voltage on the associated word line, the source of the NAND string is in communication with the source of the selected storage element. Therefore, the voltage of the drain or bit line of the NAND string is also substantially the voltage of the drain of the selected storage element, and the voltage of the source of the NAND string is also substantially the voltage of the source of the selected storage element. Also, since the techniques described herein can be used with a single storage element, the sensed storage elements are not necessarily in other sets of NAND strings or storage elements.
另外,如先前所論述,可對與共同字元線及源極相關聯之多個儲存元件同時執行感測。Additionally, as previously discussed, sensing can be performed simultaneously on a plurality of storage elements associated with a common word line and source.
此外,自控制808方面看,感測過程包括自溫度相依電路900接收資訊,及回應於該資訊提供溫度補償電壓至BLC電晶體之控制閘極,BLC電晶體將NAND串或非揮發性儲存元件之其他集合耦接至感測電路。控制亦可設定字元線、源極及p井電壓,以及自電壓感測模組802接收有關選定儲存元件之經感測程式化條件之資訊。Moreover, from the perspective of control 808, the sensing process includes receiving information from the temperature dependent circuit 900 and providing a temperature compensated voltage to the control gate of the BLC transistor in response to the information, the BLC transistor NAND string or non-volatile storage element The other sets are coupled to the sensing circuit. Control may also set the word line, source and p-well voltages, and receive information from the voltage sensing module 802 regarding the sensed stylized conditions of the selected storage element.
圖9f描繪擦除-驗證過程。步驟950包括擦除儲存元件之一集合。步驟952包括開始將該等儲存元件中之一或多個軟程式化至(例如)一所要擦除狀態。軟程式化通常包括將電壓脈衝施加至選定字元線以使選定字元線上的儲存元件中之一或多者之臨限電壓升高。電壓脈衝可為軟程式化脈衝,其在振幅上小於用於程式化至較高狀態的脈衝(步驟954)。例如,當儲存元件經受深擦除以確保其臨限電壓全 部在所要擦除狀態之臨限電壓以下時,可使用此類型之程式化。步驟956包括(例如,相對於所要擦除狀態)驗證儲存元件之程式化條件。舉例而言,此驗證可包括執行如上文所論述的圖9e之步驟932-938。在決策步驟958,若軟程式化要繼續(例如,當儲存元件未達到所要擦除狀態時),則控制流在步驟954繼續。否則,該過程在步驟960結束。Figure 9f depicts an erase-verify process. Step 950 includes erasing a collection of storage elements. Step 952 includes initiating the softening of one or more of the storage elements to, for example, an erased state. Soft programming typically involves applying a voltage pulse to the selected word line to raise the threshold voltage of one or more of the storage elements on the selected word line. The voltage pulse can be a soft stylized pulse that is less in amplitude than the pulse used to program to a higher state (step 954). For example, when the storage element is subjected to deep erase to ensure its full threshold voltage This type of stylization can be used when the part is below the threshold voltage of the state to be erased. Step 956 includes verifying the stylized condition of the storage element (e.g., relative to the state to be erased). For example, such verification can include performing steps 932-938 of Figure 9e as discussed above. At decision step 958, if the soft programming is to continue (e.g., when the storage element has not reached the desired erase state), then control flow continues at step 954. Otherwise, the process ends at step 960.
另外,可對與共同字元線及源極相關聯之多個儲存元件同時執行擦除-驗證操作。Additionally, an erase-verify operation can be performed simultaneously on a plurality of storage elements associated with a common word line and source.
圖10a說明VSOURCE 隨溫度之變化。在另一方法中,VSOURCE 經溫度補償,例如,使得其隨著溫度增加。通常,VWL =VSOURCE +VTH (選定儲存元件),其中VWL 為施加至選定字元線之電壓。如所論述,VTH 隨溫度減小。因此,在VWL 固定的情況下,可將VSOURCE 設定為隨溫度增加以避免感測期間的溫度偏壓。另外,在一可能實施中,可設置約束,使得VSOURCE 僅增加至正值。舉例而言,若在基線溫度下VSOURCE =0 V,且溫度增加,則VSOURCE 保持為0 V。若溫度降低,則VSOURCE 根據溫度係數而增加。另一方面,若在基線溫度下VSOURCE >0 V,且溫度增加,則VSOURCE 可減小至一大於或等於0 V之值(亦即,非負值)。若溫度降低,則VSOURCE 根據溫度係數而增加。Figure 10a illustrates the change in V SOURCE with temperature. In another method, V SOURCE is temperature compensated, for example, such that it increases with temperature. Typically, V WL = V SOURCE + V TH (selected storage element), where V WL is the voltage applied to the selected word line. As discussed, the VTH decreases with temperature. Therefore, with V WL fixed, V SOURCE can be set to increase with temperature to avoid temperature bias during sensing. Additionally, in a possible implementation, constraints can be set such that V SOURCE only increases to a positive value. For example, if V SOURCE =0 V at baseline temperature and the temperature increases, V SOURCE remains at 0 V. If the temperature is lowered, V SOURCE increases according to the temperature coefficient. On the other hand, if V SOURCE >0 V at baseline temperature and the temperature increases, V SOURCE can be reduced to a value greater than or equal to 0 V (ie, non-negative). If the temperature is lowered, V SOURCE increases according to the temperature coefficient.
圖10b描繪包括NAND串之不同集合的儲存元件陣列之實例。沿記憶體陣列1000之每一行,位元線1006耦接至NAND串1050之汲極選擇閘之汲極端子1026。沿NAND串之每一列,源極線1004可連接NAND串之源極選擇閘之所 有源極端子1028。在美國專利第5,570,315號、第5,774,397號及第6,046,935號中找到作為記憶體系統之部分的NAND架構陣列之實例及其操作。Figure 10b depicts an example of a storage element array that includes different sets of NAND strings. Along the each row of the memory array 1000, the bit line 1006 is coupled to the drain terminal 1026 of the drain select gate of the NAND string 1050. Along the NAND string, the source line 1004 can be connected to the source selection gate of the NAND string. Active terminal 1028. Examples of NAND architecture arrays and their operation as part of a memory system are found in U.S. Patent Nos. 5,570,315, 5,774,397, and 6,046,935.
將儲存元件陣列分成大量的儲存元件區塊。如對於快閃EEPROM系統而言係共同的,區塊為擦除之單元。亦即,每一區塊含有被一起擦除之最小數目的儲存元件。通常將每一區塊分成許多頁面。頁面為程式化之單元。在一實施例中,可將個別頁面分成段,且該等段可含有隨基本程式化操作而被一次寫入之最少數目的儲存元件。一或多個資料頁面通常儲存於一儲存元件列中。一頁面可儲存一或多個區段。一區段包括使用者資料及附加項資料。附加項資料通常包括已自區段之使用者資料計算出的錯誤校正碼(ECC)。控制器之一部分(下文所述)在將資料程式化至陣列中時計算ECC,且亦在自陣列讀取資料時檢查ECC。或者,將ECC及/或其他附加項資料儲存於不同於其所屬的使用者資料之頁面或甚至不同區塊中。The array of storage elements is divided into a plurality of storage element blocks. As is common to flash EEPROM systems, the block is the unit of erasure. That is, each block contains a minimum number of storage elements that are erased together. Each block is usually divided into a number of pages. The page is a stylized unit. In an embodiment, individual pages may be divided into segments, and the segments may contain a minimum number of storage elements that are written once with a basic stylized operation. One or more data pages are typically stored in a storage element column. One page can store one or more sections. A section includes user data and additional item information. The additional item data usually includes an error correction code (ECC) that has been calculated from the user data of the segment. One portion of the controller (described below) calculates the ECC when the data is programmed into the array, and also checks the ECC when reading data from the array. Alternatively, the ECC and/or other additional items may be stored on a different page than the user profile to which they belong or even in different blocks.
使用者資料之一區段通常為512個位元組,此對應於磁碟機中之一區段之大小。附加項資料通常為額外16-20個位元組。大量頁面形成一區塊,自(例如)8個頁面直至32、64、128個或更多頁面之間的任何數目。在一些實施例中,一列NAND串組成一區塊。One of the sections of user data is typically 512 bytes, which corresponds to the size of one of the segments in the drive. The additional item data is usually an additional 16-20 bytes. A large number of pages form a block from, for example, 8 pages up to any number between 32, 64, 128 or more pages. In some embodiments, a column of NAND strings constitutes a block.
在一實施例中,藉由在使源極線及位元線浮動的同時使p井升高至擦除電壓(例如,20 V)達足夠之時間段且將選定區塊之字元線接地來擦除記憶體儲存元件。歸因於電容耦 合,未選擇字元線、位元線、選擇線及共同源極(c-source)亦升高至擦除電壓之顯著部分。因此將強電場施加至選定儲存元件之隧道氧化物層,且選定之儲存元件之資料隨著浮動閘極之電子發射至基板側而被擦除(通常藉由佛勒-諾爾德哈姆(Fowler-Nordheim)穿隧機制)。隨著電子自浮動閘極轉移至p井區域,選定之儲存元件之臨限電壓降低。可對整個記憶體陣列、單獨區塊或儲存元件之另一單元執行擦除。In one embodiment, the p-well is raised to an erase voltage (eg, 20 V) for a sufficient period of time while the source line and the bit line are floated, and the word line of the selected block is grounded To erase the memory storage element. Attributable to capacitive coupling The unselected word line, bit line, select line, and common source (c-source) are also raised to a significant portion of the erase voltage. A strong electric field is thus applied to the tunnel oxide layer of the selected storage element, and the data of the selected storage element is erased as the electrons of the floating gate are emitted to the substrate side (usually by Fowler -Nordheim) tunneling mechanism). As the electron self-floating gate is transferred to the p-well region, the threshold voltage of the selected storage element is reduced. Erasing can be performed on the entire memory array, on a separate block, or on another element of the storage element.
圖11為使用單列/行解碼器及讀取/寫入電路之非揮發性記憶體系統之方塊圖。該圖說明根據本發明之一實施例之記憶體裝置1196,其具有用於並行地讀取及程式化一頁面的儲存元件之讀取/寫入電路。記憶體裝置1196可包括一或多個記憶體晶粒1198。記憶體晶粒1198包括二維儲存元件陣列1000、控制電路1110及讀取/寫入電路1165。在一些實施例中,儲存元件陣列可為三維的。記憶體陣列1000可經由列解碼器1130而藉由字元線及經由行解碼器1160而藉由位元線定址。讀取/寫入電路1165包括多個感測區塊1100且允許並行地讀取或程式化一儲存元件頁面。通常,控制器1150包括於與該或該等記憶體晶粒1198相同的記憶體裝置1196(例如,抽取式儲存卡)中。命令及資料經由線1120而在主機與控制器1150之間轉移,且經由線1118而在該控制器與該或該等記憶體晶粒1198之間轉移。Figure 11 is a block diagram of a non-volatile memory system using a single column/row decoder and a read/write circuit. The figure illustrates a memory device 1196 having read/write circuits for reading and programming a page of storage elements in parallel, in accordance with an embodiment of the present invention. Memory device 1196 can include one or more memory dies 1198. The memory die 1198 includes a two-dimensional storage element array 1000, a control circuit 1110, and a read/write circuit 1165. In some embodiments, the array of storage elements can be three dimensional. The memory array 1000 can be addressed by the column decoder via the word line and via the row decoder 1160 via the bit line. The read/write circuit 1165 includes a plurality of sensing blocks 1100 and allows a storage element page to be read or programmed in parallel. Typically, controller 1150 is included in the same memory device 1196 (e.g., a removable memory card) as the memory die 1198. Commands and data are transferred between the host and controller 1150 via line 1120 and transferred between the controller and the memory die 1198 via line 1118.
控制電路1110與讀取/寫入電路1165協作以對記憶體陣列1000執行記憶體操作。控制電路1110包括狀態機1112、 晶片上位址解碼器1114及功率控制模組1116。狀態機1112提供對記憶體操作之晶片級控制。晶片上位址解碼器1114提供由主機或記憶體控制器使用之位址至由解碼器1130及1160使用之硬體位址之間的位址介面。功率控制模組1116控制在記憶體操作期間供應至字元線及位元線之功率及電壓。Control circuit 1110 cooperates with read/write circuit 1165 to perform a memory operation on memory array 1000. Control circuit 1110 includes state machine 1112 On-wafer address decoder 1114 and power control module 1116. State machine 1112 provides wafer level control of memory operations. The on-wafer address decoder 1114 provides an address interface between the address used by the host or memory controller to the hardware address used by the decoders 1130 and 1160. Power control module 1116 controls the power and voltage supplied to the word lines and bit lines during memory operation.
在一些實施中,可組合圖11之某些組件。在各種設計中,可將該等組件(儲存元件陣列1000除外)中之一或多個(單獨地或組合地)看作管理或控制電路。舉例而言,一或多個管理或控制電路可包括控制電路1110、狀態機1112、解碼器1114/1160、功率控制1116、感測區塊1100、讀取/寫入電路1165、控制器1150等中之任一者或其組合。In some implementations, certain components of FIG. 11 can be combined. In various designs, one or more of these components (except storage element array 1000) may be considered as management or control circuitry. For example, one or more management or control circuits can include control circuit 1110, state machine 1112, decoder 1114/1160, power control 1116, sensing block 1100, read/write circuit 1165, controller 1150, and the like. Any one or a combination thereof.
圖12為使用雙列/行解碼器及讀取/寫入電路之非揮發性記憶體系統之方塊圖。此處,提供圖11中所示之記憶體裝置1196之另一配置。以對稱方式而在陣列之相反側上實施藉由各種周邊電路對記憶體陣列1000之存取,使得每一側上之存取線及電路之密度減小一半。因此,列解碼器被分為列解碼器1130A及1130B,且行解碼器被分為行解碼器1160A及1160B。類似地,讀取/寫入電路被分為自陣列1000之底部連接至位元線之讀取/寫入電路1165A,及自陣列1000之頂部連接至位元線之讀取/寫入電路1165B。以此方式,讀取/寫入模組之密度基本上減小一半。圖12之裝置亦可包括如上文對於圖11之裝置所述之控制器。Figure 12 is a block diagram of a non-volatile memory system using a dual column/row decoder and a read/write circuit. Here, another configuration of the memory device 1196 shown in FIG. 11 is provided. Access to the memory array 1000 by various peripheral circuits is performed symmetrically on the opposite side of the array such that the density of access lines and circuitry on each side is reduced by half. Therefore, the column decoder is divided into column decoders 1130A and 1130B, and the row decoder is divided into row decoders 1160A and 1160B. Similarly, the read/write circuit is divided into a read/write circuit 1165A connected from the bottom of the array 1000 to the bit line, and a read/write circuit 1165B connected from the top of the array 1000 to the bit line. . In this way, the density of the read/write modules is substantially reduced by half. The device of Figure 12 may also include a controller as described above for the device of Figure 11.
圖13為描繪感測區塊之一實施例之方塊圖。將個別感測 區塊1100分割成一核心部分(被稱為感測模組1180)及一共同部分1190。在一實施例中,將存在用於每一位元線之單獨感測模組1180及一個用於多個感測模組1180之集合之共同部分1190。在一實例中,感測區塊將包括一個共同部分1190及八個感測模組1180。一群中之感測模組中之每一者將經由資料匯流排1172與關聯之共同部分通信。要獲得其他細節,參考2006年6月29日公開的標題為"Non-Volatile Memory and Method with Shared Processing for an Aggregate of Sense Amplifiers"之美國專利申請公開案第2006/0140007號,且該案之全文以引用方式併入本文中。Figure 13 is a block diagram depicting one embodiment of a sensing block. Individual sensing The block 1100 is divided into a core portion (referred to as a sensing module 1180) and a common portion 1190. In one embodiment, there will be a separate sensing module 1180 for each bit line and a common portion 1190 for a collection of multiple sensing modules 1180. In one example, the sensing block will include a common portion 1190 and eight sensing modules 1180. Each of the sensing modules in the group will communicate with the associated common portion via the data bus 1172. For additional details, refer to U.S. Patent Application Publication No. 2006/0140007, entitled "Non-Volatile Memory and Method with Shared Processing for an Aggregate of Sense Amplifiers", published on Jun. 29, 2006, and the entire contents of which is hereby incorporated by reference. This is incorporated herein by reference.
感測模組1180包含感測電路1170,其判定所連接之位元線中之傳導電流是高於還是低於一預定臨限位準。感測模組1180亦包括位元線鎖存器1182,其用於設定所連接之位元線上之電壓條件。舉例而言,鎖存於位元線鎖存器1182中之預定狀態將導致所連接之位元線被拉至表示程式化抑制之狀態(例如,VDD )。The sensing module 1180 includes a sensing circuit 1170 that determines whether the conduction current in the connected bit line is above or below a predetermined threshold level. The sensing module 1180 also includes a bit line latch 1182 for setting voltage conditions on the connected bit lines. For example, a predetermined state latched in bit line latch 1182 will cause the connected bit line to be pulled to a state indicative of stylization suppression (eg, V DD ).
共同部分1190包含一處理器1192、資料鎖存器1194之一集合,及一耦接於資料鎖存器1194集合與資料匯流排1120之間的輸入/輸出(I/O)介面1196。處理器1192執行計算。舉例而言,其功能中之一者為判定儲存於所感測之儲存元件中之資料及將所判定之資料儲存於資料鎖存器集合中。資料鎖存器1194之集合用於儲存在讀取操作期間由處理器1192所判定之資料位元。其亦用於儲存在程式化操作期間自資料匯流排1120所匯入之資料位元。所匯入之資料位元 表示意欲被程式化至記憶體中之寫入資料。I/O介面1196提供資料鎖存器1194與資料匯流排1120之間的介面。The common portion 1190 includes a processor 1192, a set of data latches 1194, and an input/output (I/O) interface 1196 coupled between the data latch 1194 set and the data bus 1120. The processor 1192 performs calculations. For example, one of its functions is to determine the data stored in the sensed storage element and store the determined data in a set of data latches. The set of data latches 1194 is used to store the data bits determined by processor 1192 during the read operation. It is also used to store data bits imported from the data bus 1120 during the stylization operation. Data bit Represents written data that is intended to be stylized into memory. The I/O interface 1196 provides an interface between the data latch 1194 and the data bus 1120.
在讀取或感測期間,系統之操作受狀態機1112的控制,狀態機1112控制不同控制閘極電壓至已定址儲存元件之供應。隨著其步進通過對應於由記憶體支援的各種記憶體狀態之各種預定義控制閘極電壓,感測模組1180可在此等電壓中之一者處解扣,且輸出將經由匯流排1172自感測模組1180提供至處理器1192。此時,處理器1192藉由考慮感測模組之解扣事件及關於經由輸入線1193自狀態機所施加之控制閘極電壓之資訊來判定所得記憶體狀態。處理器接著計算用於記憶體狀態之二進位編碼且將所得資料位元儲存至資料鎖存器1194中。在核心部分之另一實施例中,位元線鎖存器1182充當雙重用途,既用作用於鎖存感測模組1180之輸出之鎖存器,又用作上文所述之位元線鎖存器。During reading or sensing, the operation of the system is controlled by state machine 1112, which controls the supply of different control gate voltages to the addressed storage elements. As it steps through various predefined control gate voltages corresponding to various memory states supported by the memory, the sensing module 1180 can trip at one of the voltages and the output will be via the bus The 1172 self-sensing module 1180 is provided to the processor 1192. At this time, the processor 1192 determines the obtained memory state by considering the tripping event of the sensing module and the information about the control gate voltage applied from the state machine via the input line 1193. The processor then calculates the binary encoding for the memory state and stores the resulting data bits into the data latch 1194. In another embodiment of the core portion, the bit line latch 1182 serves a dual purpose, both as a latch for latching the output of the sense module 1180 and as a bit line as described above. Latches.
一些實施可包括多個處理器1192。在一實施例中,每一處理器1192將包括一輸出線(未描繪),使得該等輸出線中之每一者被一起硬連線地進行邏輯或運算(wired-OR)。在一些實施例中,輸出線在連接至硬連線邏輯或線之前被反向。此組態使得能夠在程式化過程已完成時的程式化驗證過程期間進行快速判定,因為接收硬連線邏輯或的狀態機可判定正被程式化的所有位元何時已達到所要位準。舉例而言,當每一位元已達到其所要位準時,該位元之邏輯零將被發送至硬連線邏輯或線(或資料1被反向)。當所有位元輸出資料0(或所反向之資料1)時,狀態機就知道終止程式 化過程。因為每一處理器與八個感測模組通信,所以狀態機需要將硬連線邏輯或線讀取八次,或將邏輯加至處理器1192以累積關聯位元線之結果,使得狀態機僅需要將硬連線邏輯或線讀取一次。類似地,藉由正確地選擇邏輯位準,全域狀態機可偵測第一位元何時改變其狀態且相應地改變演算法。Some implementations may include multiple processors 1192. In one embodiment, each processor 1192 will include an output line (not depicted) such that each of the output lines is hardwired together for a wired-OR. In some embodiments, the output line is inverted before being connected to the hardwired logic or line. This configuration enables a quick decision during the stylized verification process when the stylization process has completed, because the state machine receiving the hardwired logic OR can determine when all of the bits being programmed have reached the desired level. For example, when each bit has reached its desired level, the logical zero of that bit will be sent to the hardwired logic or line (or data 1 is inverted). When all bits output data 0 (or reversed data 1), the state machine knows to terminate the program. Process. Because each processor communicates with eight sensing modules, the state machine needs to read the hardwired logic or line eight times, or add logic to processor 1192 to accumulate the result of the associated bit line, making the state machine Only hardwired logic or lines need to be read once. Similarly, by properly selecting the logical level, the global state machine can detect when the first bit changes its state and change the algorithm accordingly.
在程式化或驗證期間,待程式化之資料係自資料匯流排1120儲存於資料鎖存器1194之集合中。受狀態機控制的程式化操作包含施加至已定址儲存元件之控制閘極的一系列程式化電壓脈衝。每一程式化脈衝繼之以一回讀(驗證)以判定儲存元件是否已被程式化至所要記憶體狀態。處理器1192相對於所要記憶體狀態監視回讀記憶體狀態。當兩個狀態一致時,處理器1192設定位元線鎖存器1182,以便使位元線被拉至表示程式化抑制之狀態。即使程式化脈衝出現在儲存元件之控制閘極上,此亦抑制耦接至位元線之儲存元件進一步程式化。在其他實施例中,處理器最初載入位元線鎖存器1182,且感測電路在驗證過程期間將其設定至抑制值。During stylization or verification, the data to be programmed is stored in the collection of data latches 1194 from data bus 1120. The stylized operation controlled by the state machine includes a series of stylized voltage pulses applied to the control gates of the addressed storage elements. Each stylized pulse is followed by a readback (verification) to determine if the storage element has been programmed to the desired memory state. The processor 1192 monitors the read back memory state with respect to the desired memory state. When the two states coincide, the processor 1192 sets the bit line latch 1182 to cause the bit line to be pulled to indicate the state of stylization suppression. Even if a stylized pulse appears on the control gate of the storage element, this inhibits further storage of the storage element coupled to the bit line. In other embodiments, the processor initially loads the bit line latch 1182 and the sensing circuit sets it to a suppressed value during the verification process.
資料鎖存器堆疊1194含有對應於感測模組之資料鎖存器堆疊。在一實施例中,每個感測模組1180存在三個資料鎖存器。在一些實施中(但並非所需的),將資料鎖存器實施為移位暫存器,使得儲存於其中之並行資料被轉換為用於資料匯流排1120之串行資料,且反之亦然。在較佳實施例中,對應於m個儲存元件之讀取/寫入區塊之所有資料鎖存 器可鏈接在一起以形成一區塊移位暫存器,使得可藉由串行轉移來輸入或輸出一資料區塊。詳言之,採用r個讀取/寫入模組之組,使得其資料鎖存器集合中之每一資料鎖存器按順序將資料移位至資料匯流排中或移出資料匯流排,就如同該等資料鎖存器為用於整個讀取/寫入區塊之移位暫存器之部分一樣。The data latch stack 1194 contains a data latch stack corresponding to the sense module. In one embodiment, there are three data latches per sensing module 1180. In some implementations (but not required), the data latch is implemented as a shift register such that parallel data stored therein is converted to serial data for data bus 1120, and vice versa . In the preferred embodiment, all data latches corresponding to the read/write blocks of the m storage elements The devices can be linked together to form a block shift register such that a data block can be input or output by serial transfer. In particular, a set of r read/write modules is used such that each data latch in its data latch set sequentially shifts data into or out of the data bus, As with the data latches being part of the shift register for the entire read/write block.
可在以下文獻中找到關於非揮發性儲存裝置之各種實施例之結構及/或操作的額外資訊:(1)2007年3月27日頒予的標題為"Non-Volatile Memory And Method With Reduced Source Line Bias Errors"之美國專利第7,196,931號;(2)2006年4月4日頒予的標題為"Non-Volatile Memory And Method with Improved Sensing"之美國專利第7,023,736號;(3)2006年5月16日頒予的標題為"Memory Sensing Circuit And Method For Low Voltage Operation"之美國專利第7,046,568號;(4)2006年10月5日公開的標題為"Compensating for Coupling During Read Operations of Non-Volatile Memory"之美國專利申請公開案第2006/0221692號;及(5)2006年7月20日公開的標題為"Reference Sense Amplifier For Non-Volatile Memory"之美國專利申請公開案第2006/0158947號。所有五個上文列出之專利文獻之全文以引用方式併入本文中。Additional information regarding the structure and/or operation of various embodiments of non-volatile storage devices can be found in (1) entitled "Non-Volatile Memory And Method With Reduced Source" dated March 27, 2007. U.S. Patent No. 7,196,931 to Line Bias Errors; (2) U.S. Patent No. 7,023,736 entitled "Non-Volatile Memory And Method with Improved Sensing", issued April 4, 2006; (3) May 2006 U.S. Patent No. 7,046,568 entitled "Memory Sensing Circuit And Method For Low Voltage Operation", entitled "Compensating for Coupling During Read Operations of Non-Volatile Memory", published on October 5, 2006. U.S. Patent Application Publication No. 2006/0221692; and (5) U.S. Patent Application Publication No. 2006/0158947, entitled "Reference Sense Amplifier For Non-Volatile Memory", issued July 20, 2006. All of the above five patent documents listed above are hereby incorporated by reference in their entirety.
圖14說明用於全位元線記憶體架構或用於奇偶記憶體架構的將記憶體陣列組織為區塊之實例。描述記憶體陣列1400之例示性結構。作為一實例,描述一被分割成1,024 個區塊之NAND快閃EEPROM。可同時擦除儲存於每一區塊中之資料。在一實施例中,區塊為同時被擦除之儲存元件之最小單元。在此實例中,在每一區塊中存在對應於位元線BL0、BL1、…、BL8511之8,512個行。在一被稱為全位元線(ABL)架構(架構1410)之實施例中,可在讀取及程式化操作期間同時選擇一區塊之所有位元線。可同時程式化沿共同字元線且連接至任一位元線之儲存元件。Figure 14 illustrates an example of organizing memory arrays into blocks for a full bit line memory architecture or for a parity memory architecture. An illustrative structure of memory array 1400 is depicted. As an example, the description one is divided into 1,024 Block NAND flash EEPROM. The data stored in each block can be erased at the same time. In one embodiment, the block is the smallest unit of storage elements that are simultaneously erased. In this example, there are 8,512 rows corresponding to bit lines BL0, BL1, ..., BL8511 in each block. In an embodiment referred to as an All Bit Line (ABL) architecture (Architecture 1410), all of the bit lines of a block can be selected simultaneously during read and program operations. Storage elements along a common word line and connected to any bit line can be programmed simultaneously.
在所提供之實例中,64個儲存元件及兩個虛設儲存元件經串聯連接以形成一NAND串。存在64個資料字元線及兩個虛設字元線WL_d0及WL_d1,其中每一NAND串包括64個資料儲存元件及兩個虛設儲存元件。在其他實施例中,NAND串可具有多於或少於64個資料儲存元件及兩個虛設儲存元件。資料記憶體單元可儲存使用者或系統資料。虛設記憶體單元通常不用於儲存使用者資料或系統資料。In the example provided, 64 storage elements and two dummy storage elements are connected in series to form a NAND string. There are 64 data word lines and two dummy word lines WL_d0 and WL_d1, wherein each NAND string includes 64 data storage elements and two dummy storage elements. In other embodiments, the NAND string can have more or less than 64 data storage elements and two dummy storage elements. The data memory unit stores user or system data. A dummy memory unit is usually not used to store user data or system data.
NAND串的一個端子經由汲極選擇閘(連接至選擇閘汲極線SGD)而連接至對應位元線,且另一端子經由源極選擇閘(連接至選擇閘源極線SGS)而連接至共同源極。One terminal of the NAND string is connected to the corresponding bit line via a drain select gate (connected to the select gate drain line SGD), and the other terminal is connected to the other via a source select gate (connected to the select gate source line SGS) Common source.
在一被稱為奇偶架構(架構1400)之實施例中,將位元線分成偶數位元線(BLe)及奇數位元線(BLo)。在此狀況下,在一時間程式化沿共同字元線且連接至奇數位元線之儲存元件,而在另一時間程式化沿共同字元線且連接至偶數位元線之儲存元件。可同時將資料程式化至不同區塊中及自不同區塊讀取資料。在此實例中,在每一區塊中存在8,512個行,其被分成偶數行及奇數行。In an embodiment referred to as an odd-even architecture (architecture 1400), the bit lines are divided into even bit lines (BLe) and odd bit lines (BLo). In this case, the storage elements along the common word line and connected to the odd bit lines are programmed at one time, while the storage elements along the common word line and connected to the even bit lines are stylized at another time. The data can be programmed into different blocks and read from different blocks at the same time. In this example, there are 8,512 rows in each block, which are divided into even rows and odd rows.
在讀取及程式化操作之一組態中,同時選擇4,256個儲存元件。所選之儲存元件具有相同字元線及相同類別之位元線(例如,偶數或奇數)。因此,可同時讀取或程式化形成一邏輯頁面的532個資料位元組,且記憶體之一區塊可儲存至少八個邏輯頁面(四個字元線,每一者具有奇數頁面及偶數頁面)。對於多狀態儲存元件而言,當每一儲存元件儲存兩個資料位元時(其中此等兩個位元中之每一者儲存於不同頁面中),一區塊儲存十六個邏輯頁面。亦可使用其他大小之區塊及頁面。In one of the configuration of reading and stylizing operations, 4,256 storage elements are selected simultaneously. The selected storage elements have the same word line and the same type of bit line (eg, even or odd). Therefore, 532 data bytes of a logical page can be simultaneously read or programmed, and one block of memory can store at least eight logical pages (four word lines, each having odd pages and even numbers) page). For multi-state storage elements, when each storage element stores two data bits (where each of the two bits is stored in a different page), one block stores sixteen logical pages. Blocks and pages of other sizes can also be used.
對於ABL或奇偶架構而言,可藉由使p井升高至擦除電壓(例如,20 V)及將選定區塊之字元線接地來擦除儲存元件。源極線及位元線係浮動的。可對整個記憶體陣列、單獨區塊或為記憶體裝置之一部分的儲存元件之另一單元執行擦除。電子自儲存元件之浮動閘極轉移至p井區域,使得儲存元件之VTH 變為負。For an ABL or parity architecture, the storage element can be erased by raising the p-well to an erase voltage (eg, 20 V) and grounding the word lines of the selected block. The source line and the bit line are floating. Erasing can be performed on the entire memory array, in a separate block, or on another cell of a storage element that is part of a memory device. The floating gate of the electron self-storage element is transferred to the p-well region such that the VTH of the storage element becomes negative.
圖15描繪臨限電壓分布之一實例集合。針對每一儲存元件儲存兩個資料位元之狀況提供儲存元件陣列之實例VTH 分布。針對擦除儲存元件提供第一臨限電壓分布E。亦描繪針對經程式化儲存元件的三個臨限電壓分布A、B及C。在一實施例中,E分布中之臨限電壓為負,且A、B及C分布中之臨限電壓為正。Figure 15 depicts an example set of threshold voltage distributions. An example VTH distribution of the array of storage elements is provided for the condition that two data bits are stored for each storage element. A first threshold voltage distribution E is provided for the erase storage element. Three threshold voltage distributions A, B, and C for the stylized storage elements are also depicted. In one embodiment, the threshold voltage in the E distribution is negative and the threshold voltage in the A, B, and C distributions is positive.
每一相異臨限電壓範圍對應於資料位元集合之預定值。被程式化至儲存元件中之資料與儲存元件之臨限電壓位準之間的特定關係取決於為儲存元件採用之資料編碼機制。 舉例而言,全文以引用方式併入本文中之2004年12月16日公開的美國專利第6,222,762號及美國專利申請公開案第2004/0255090號描述用於多狀態快閃儲存元件之各種資料編碼機制。在一實施例中,使用格雷碼指派(Gray code assignment)將資料值指派給臨限電壓範圍,使得若浮動閘極之臨限電壓錯誤地移位至其相鄰實體狀態,則僅一個位元將受影響。一實例將"11"指派給臨限電壓範圍E(狀態E),將"10"指派給臨限電壓範圍A(狀態A),將"00"指派給臨限電壓範圍B(狀態B),且將"01"指派給臨限電壓範圍C(狀態C)。然而,在其他實施例中,不使用格雷碼。雖然展示四個狀態,但本發明亦可用於其他多狀態結構,包括彼等包括多於或少於四個狀態之結構。Each distinct threshold voltage range corresponds to a predetermined value of the set of data bits. The particular relationship between the data that is programmed into the storage element and the threshold voltage level of the storage element depends on the data encoding mechanism employed for the storage element. For example, U.S. Patent No. 6,222,762, issued toK.S. mechanism. In one embodiment, the data value is assigned to the threshold voltage range using a Gray code assignment such that if the threshold voltage of the floating gate is erroneously shifted to its neighboring entity state, then only one bit Will be affected. An example assigns "11" to the threshold voltage range E (state E), "10" to the threshold voltage range A (state A), and "00" to the threshold voltage range B (state B), And assign "01" to the threshold voltage range C (state C). However, in other embodiments, the Gray code is not used. Although four states are shown, the invention is also applicable to other multi-state structures, including those that include more or less than four states.
亦提供三個讀取參考電壓Vra、Vrb及Vrc以用於自儲存元件讀取資料。藉由測試給定儲存元件之臨限電壓是高於還是低於Vra、Vrb及Vrc,系統可判定儲存元件所處的狀態(例如,程式化條件)。Three read reference voltages Vra, Vrb, and Vrc are also provided for reading data from the storage element. By testing whether the threshold voltage of a given storage element is above or below Vra, Vrb, and Vrc, the system can determine the state in which the storage element is located (eg, stylized conditions).
另外,提供三個驗證參考電壓Vva、Vvb及Vvc。當儲存元件儲存額外狀態時,可使用額外的讀取及參考值。當將儲存元件程式化至狀態A時,系統將測試彼等儲存元件是否具有大於或等於Vva之臨限電壓。當將儲存元件程式化至狀態B時,系統將測試儲存元件是否具有大於或等於Vvb之臨限電壓。當將儲存元件程式化至狀態C時,系統將判定儲存元件是否具有大於或等於Vvc之臨限電壓。In addition, three verification reference voltages Vva, Vvb, and Vvc are provided. Additional reading and reference values can be used when the storage element stores additional status. When the storage elements are programmed to state A, the system will test whether their storage elements have a threshold voltage greater than or equal to Vva. When the storage element is programmed to state B, the system will test whether the storage element has a threshold voltage greater than or equal to Vvb. When the storage element is programmed to state C, the system will determine if the storage element has a threshold voltage greater than or equal to Vvc.
在一被稱為全序列程式化之實施例中,儲存元件可自擦 除狀態E直接程式化至經程式化狀態A、B或C中之任一者。舉例而言,可首先擦除待程式化之儲存元件群體,使得該群體中之所有儲存元件處於擦除狀態E。接著將諸如由圖19之控制閘極電壓序列所描繪的一系列程式化脈衝用於將儲存元件直接程式化至狀態A、B或C。當一些儲存元件正自狀態E程式化至狀態A時,其他儲存元件正自狀態E程式化至狀態B及/或正自狀態E程式化至狀態C。當在選定字元線WLi上自狀態E程式化至狀態C時,因為與自狀態E程式化至狀態A或自狀態E程式化至狀態B時的電壓變化相比,WLi下方之浮動閘極上的電荷量變化最大,所以至WLi-1下方之鄰近浮動閘極之寄生耦合量被最大化。當自狀態E程式化至狀態B時,至鄰近浮動閘極之耦合量減小,但仍顯著。當自狀態E程式化至狀態A時,耦合量甚至進一步減小。因此,為隨後讀取WLi-1之每一狀態所需之校正量將視WLn上之鄰近儲存元件之狀態而改變。In an embodiment referred to as full sequence stylization, the storage element can be self-erased The state E is directly programmed to any of the stylized states A, B, or C. For example, the population of storage elements to be programmed may be erased first such that all of the storage elements in the population are in an erased state E. A series of stylized pulses, such as those depicted by the control gate voltage sequence of Figure 19, are then used to program the storage elements directly to state A, B or C. When some storage elements are being programmed from state E to state A, the other storage elements are programmed from state E to state B and/or from state E to state C. When staging from state E to state C on selected word line WLi, the floating gate below WLi is compared to the voltage change from state E to state A or from state E to state B. The amount of charge changes the most, so the amount of parasitic coupling to the adjacent floating gate below WLi-1 is maximized. When staging from state E to state B, the amount of coupling to the adjacent floating gate is reduced, but still significant. When staging from state E to state A, the amount of coupling is even further reduced. Therefore, the amount of correction required to subsequently read each state of WLi-1 will vary depending on the state of the adjacent storage elements on WLn.
圖16說明程式化多狀態儲存元件之二遍式(two-pass)技術的一實例,其儲存用於兩個不同頁面的資料:下部頁面及上部頁面。描繪四個狀態:狀態E(11)、狀態A(10)、狀態B(00)及狀態C(01)。對於狀態E而言,兩個頁面均儲存"1"。對於狀態A而言,下部頁面儲存"0"而上部頁面儲存"1"。對於狀態B而言,兩個頁面均儲存"0"。對於狀態C而言,下部頁面儲存"1"而上部頁面儲存"0"。注意,雖然已將特定位元型樣指派給該等狀態中之每一者,但亦可指派不同位元型樣。Figure 16 illustrates an example of a two-pass technique for a stylized multi-state storage element that stores data for two different pages: a lower page and an upper page. Four states are depicted: state E (11), state A (10), state B (00), and state C (01). For state E, both pages store "1". For state A, the lower page stores "0" and the upper page stores "1". For state B, both pages store "0". For state C, the lower page stores "1" and the upper page stores "0". Note that although a particular bit pattern has been assigned to each of these states, different bit patterns can also be assigned.
在第一遍程式化中,根據待程式化至下部邏輯頁面中之位元來設定儲存元件之臨限電壓位準。若彼位元為邏輯"1",則不改變臨限電壓,因為其由於早先已被擦除而處於適當狀態。然而,如由箭頭1600所示,若待程式化之位元為邏輯"0",則將儲存元件之臨限位準增加至狀態A。此結束第一遍程式化。In the first pass of the stylization, the threshold voltage level of the storage element is set according to the bit to be programmed into the lower logical page. If the bit is a logic "1", the threshold voltage is not changed because it is in an appropriate state because it has been erased earlier. However, as indicated by arrow 1600, if the bit to be programmed is a logic "0", the threshold level of the storage element is increased to state A. This ends the first stylization.
在第二遍程式化中,根據待程式化至上部邏輯頁面中之位元來設定儲存元件之臨限電壓位準。若上部邏輯頁面位元將儲存邏輯"1",則不發生程式化,因為視下部頁面位元之程式化而定,儲存元件處於狀態E或A中之一者,兩個狀態皆載運上部頁面位元"1"。若上部頁面位元將為邏輯"0",則使臨限電壓移位。若第一遍導致儲存元件保持處於擦除狀態E,則如箭頭1620所描繪,在第二階段中程式化儲存元件,使得臨限電壓增加至在狀態C內。若儲存元件由於第一遍程式化而已被程式化至狀態A,則如箭頭1610所描繪,在第二遍中進一步程式化儲存元件,使得臨限電壓增加至在狀態B內。第二遍之結果為將儲存元件程式化至所表示之狀態以儲存上部頁面之邏輯"0",而不改變下部頁面之資料。在圖15及圖16兩者中,鄰近字元線上的至浮動閘極之耦合量取決於最終狀態。In the second pass of the stylization, the threshold voltage level of the storage element is set according to the bit to be programmed into the upper logical page. If the upper logical page bit will store a logic "1", no stylization will occur, because depending on the stylization of the lower page bit, the storage element is in one of the states E or A, both of which carry the upper page. Bit "1". If the upper page bit will be a logic "0", the threshold voltage is shifted. If the first pass causes the storage element to remain in the erased state E, then as depicted by arrow 1620, the storage element is programmed in the second phase such that the threshold voltage is increased to state C. If the storage element has been programmed to state A due to the first pass stylization, as depicted by arrow 1610, the storage element is further programmed in the second pass such that the threshold voltage is increased to state B. The result of the second pass is to program the storage element to the indicated state to store the logical "0" of the upper page without changing the data of the lower page. In both Figures 15 and 16, the amount of coupling to the floating gate on the adjacent word line depends on the final state.
在一實施例中,系統可經設置以在足夠資料經寫入以填滿整個頁面時執行全序列寫入。若寫入的資料不足一個整頁面,則程式化過程可程式化以所接收之資料而程式化之下部頁面。當接收到後續資料時,系統將接著程式化上部 頁面。在又一實施例中,系統可在程式化下部頁面之模式中開始寫入,且若隨後接收到足以填滿整個字元線之儲存元件(或大部分)的資料,則系統可轉換至全序列程式化模式。在2006年6月15日公開的標題為"Pipelined Programming of Non-Volatile Memories Using Early Data"之美國專利申請公開案第2006/0126390號中揭示此實施例之更多細節,該案之全文以引用之方式併入本文中。In an embodiment, the system can be configured to perform a full sequence of writes when sufficient data is written to fill the entire page. If the data written is less than one full page, the stylization process can be programmed to program the lower page with the received data. When the follow-up data is received, the system will then be programmed to the upper part. page. In yet another embodiment, the system can begin writing in the mode of the programmed lower page, and if it subsequently receives enough data to store the (or most) of the entire character line, the system can switch to full Sequence stylized mode. Further details of this embodiment are disclosed in U.S. Patent Application Publication No. 2006/0126390, the entire disclosure of which is hereby incorporated by reference. The manner is incorporated herein.
圖17a至圖17c揭示用於程式化非揮發性記憶體之另一過程,其藉由針對任何特定儲存元件而在寫入至先前頁面的鄰近儲存元件之後關於一特定頁面而寫入至該特定儲存元件來減少浮動閘極至浮動閘極之耦合效應。在一實例實施中,非揮發性儲存元件使用四個資料狀態而在每個儲存元件儲存兩個資料位元。舉例而言,假設狀態E為擦除狀態且狀態A、B及C為經程式化狀態。狀態E儲存資料11。狀態A儲存資料01。狀態B儲存資料10。狀態C儲存資料00。因為兩個位元在鄰近狀態A與B之間改變,所以此為非格雷編碼之一實例。亦可使用資料至實體資料狀態之其他編碼。每一儲存元件儲存兩個資料頁面。出於參考之目的,將此等資料頁面稱作上部頁面及下部頁面;然而,該等頁面可被給予其他標記。參考狀態A,上部頁面儲存位元0且下部頁面儲存位元1。參考狀態B,上部頁面儲存位元1且下部頁面儲存位元0。參考狀態C,兩個頁面皆儲存位元資料0。17a-17c illustrate another process for programming non-volatile memory that is written to a particular page after being written to a neighboring storage element of a previous page for any particular storage element. The components are stored to reduce the coupling effect of the floating gate to the floating gate. In an example implementation, the non-volatile storage element uses four data states to store two data bits in each storage element. For example, assume that state E is an erased state and states A, B, and C are programmed. State E stores data 11. State A stores data 01. State B stores data 10. State C stores data 00. This is an example of non-Gray coding because the two bits change between adjacent states A and B. You can also use the data to other codes of the entity data status. Each storage element stores two data pages. For the purposes of this reference, such material pages are referred to as upper and lower pages; however, such pages may be given other indicia. Referring to state A, the upper page stores bit 0 and the lower page stores bit 1. Referring to state B, the upper page stores bit 1 and the lower page stores bit 0. Referring to state C, both pages store bit data 0.
程式化過程為兩步驟過程。在第一步驟中,程式化下部 頁面。若下部頁面保持資料1,則儲存元件狀態保持為狀態E。若資料被程式化至0,則儲存元件之電壓臨限值升高,使得儲存元件被程式化至狀態B'。圖17a因此展示儲存元件自狀態E至狀態B'之程式化。狀態B'為過渡狀態B;因此,驗證點被描繪為Vvb',其低於Vvb。The stylization process is a two-step process. In the first step, the stylized lower part page. If the lower page holds data 1, the storage element state remains in state E. If the data is programmed to zero, the voltage threshold of the storage element rises, causing the storage element to be programmed to state B'. Figure 17a thus shows the stylization of the storage element from state E to state B'. State B' is transition state B; therefore, the verification point is depicted as Vvb', which is lower than Vvb.
在一實施例中,在儲存元件被自狀態E程式化至狀態B'之後,將接著關於儲存元件之下部頁面來程式化其在NAND串中的相鄰儲存元件(WLn+1)。舉例而言,返回參看圖2,在程式化儲存元件106之下部頁面之後,將程式化儲存元件104之下部頁面。在程式化儲存元件104之後,若儲存元件104具有自狀態E升高至狀態B'之臨限電壓,則浮動閘極至浮動閘極之耦合效應將使儲存元件106之表觀臨限電壓升高。此將具有使狀態B'之臨限電壓分布加寬至被描述為圖17b之臨限電壓分布1750之分布的效應。臨限電壓分布之此表觀加寬將在程式化上部頁面時被矯正。In one embodiment, after the storage element is programmed from state E to state B', its neighboring storage elements (WLn+1) in the NAND string will then be programmed with respect to the lower page of the storage element. For example, referring back to FIG. 2, after the page below the stylized storage element 106, the page below the storage element 104 will be stylized. After staging the storage element 104, if the storage element 104 has a threshold voltage that rises from state E to state B', the coupling effect of the floating gate to the floating gate will cause the apparent threshold voltage of the storage element 106 to rise. high. This will have the effect of widening the threshold voltage distribution of state B' to the distribution described as the threshold voltage distribution 1750 of Figure 17b. This apparent broadening of the threshold voltage distribution will be corrected when the upper page is programmed.
圖17c描繪程式化上部頁面之過程。若儲存元件處於擦除狀態E且上部頁面保持為1,則儲存元件將保持處於狀態E。若儲存元件處於狀態E且其上部頁面資料將被程式化至0,則儲存元件之臨限電壓將升高,使得儲存元件處於狀態A。若儲存元件處於中間臨限電壓分布1750且上部頁面資料將保持為1,則儲存元件將被程式化至最終狀態B。若儲存元件處於中間臨限電壓分布1750且上部頁面資料將變為資料0,則儲存元件之臨限電壓將升高,使得儲存元件處於狀態C。圖17a至圖17c所描繪之過程減少浮動閘極至 浮動閘極之耦合效應,因為僅相鄰儲存元件之上部頁面程式化將對給定儲存元件之表觀臨限電壓有影響。替代狀態編碼之一實例為:當上部頁面資料為1時,自分布1750移至狀態C,且當上部頁面資料為0時,移至狀態B。Figure 17c depicts the process of stylizing the upper page. If the storage element is in the erased state E and the upper page remains at 1, the storage element will remain in state E. If the storage element is in state E and its upper page data is to be programmed to zero, the threshold voltage of the storage element will rise so that the storage element is in state A. If the storage element is at the intermediate threshold voltage distribution 1750 and the upper page data will remain at 1, the storage element will be programmed to final state B. If the storage element is at the intermediate threshold voltage distribution 1750 and the upper page data will become data 0, then the threshold voltage of the storage element will rise such that the storage element is in state C. The process depicted in Figures 17a through 17c reduces the floating gate to The coupling effect of the floating gates, because only page programming on top of adjacent storage elements will have an effect on the apparent threshold voltage of a given storage element. An example of an alternate status code is: when the upper page data is 1, move from distribution 1750 to state C, and when the upper page data is 0, move to state B.
雖然圖17a至圖17c提供關於四個資料狀態及兩個資料頁面之實例,但所教示之概念可應用於具有多於或少於四個狀態及不同於兩個頁面之其他實施。舉例而言,圖5a至圖5d論述具三個頁面:下部頁面、中間頁面及上部頁面之實施例。Although FIGS. 17a-17c provide examples of four data states and two material pages, the concepts taught can be applied to other implementations having more or less than four states and different from two pages. For example, Figures 5a through 5d discuss embodiments having three pages: a lower page, an intermediate page, and an upper page.
圖18為描述用於程式化非揮發性記憶體之方法之一實施例的流程圖。在一實施中,在程式化之前(以區塊或其他單元)擦除儲存元件。在步驟1800中,由控制器發布"資料載入"命令且由控制電路1110接收該命令。在步驟1805中,將表示頁面位址之位址資料自控制器或主機輸入至解碼器1114。在步驟1810中,將已定址頁面的一程式化資料頁面輸入至一資料緩衝器以用於程式化。將該資料鎖存於適當的鎖存器集合中。在步驟1815中,由控制器將"程式化"命令發布至狀態機1112。18 is a flow chart depicting one embodiment of a method for staging non-volatile memory. In one implementation, the storage elements are erased (in blocks or other units) prior to programming. In step 1800, a "data load" command is issued by the controller and received by control circuit 1110. In step 1805, the address data representing the page address is input from the controller or host to the decoder 1114. In step 1810, a stylized data page of the addressed page is entered into a data buffer for stylization. The data is latched into the appropriate set of latches. In step 1815, the "stylized" command is issued by the controller to state machine 1112.
藉由"程式化"命令而觸發,將使用施加至適當選定字元線之圖19的脈衝串1900之步進式程式化脈衝而將在步驟1810中鎖存之資料程式化至由狀態機1112控制的選定之儲存元件中。在步驟1820中,將程式化電壓VPGM 初始化至起始脈衝(例如,12 V或其他值)且將由狀態機1112維持的程式化計數器(PC)初始化為0。在步驟1830中,將第一VPGM 脈衝施加至選定字元線以開始程式化與選定字元線相關聯之儲存元件。若邏輯"0"儲存於指示對應儲存元件應被程式化之特定資料鎖存器中,則將對應位元線接地。另一方面,若邏輯"1"儲存於指示對應儲存元件應保持於其當前資料狀態之特定鎖存器中,則將對應位元線連接至Vdd 以抑制程式化。Triggered by a "stylized" command, the data latched in step 1810 is programmed to state machine 1112 using a stepwise stylized pulse of burst 1900 of FIG. 19 applied to the appropriate selected word line. Controlled in selected storage elements. In step 1820, the programmed voltage V PGM is initialized to a start pulse (eg, 12 V or other value) and the programmed counter (PC) maintained by state machine 1112 is initialized to zero. In step 1830, a first V PGM pulse is applied to the selected word line to begin programming the storage elements associated with the selected word line. If the logic "0" is stored in a specific data latch indicating that the corresponding storage element should be programmed, the corresponding bit line is grounded. On the other hand, if a logic "1" is stored in a particular latch indicating that the corresponding storage element should remain in its current data state, the corresponding bit line is connected to V dd to suppress stylization.
在步驟1835中,驗證選定儲存元件之狀態。若偵測到選定儲存元件之目標臨限電壓已達到適當位準,則將儲存於對應資料鎖存器中之資料改變至邏輯"1"。若偵測到臨限電壓尚未達到適當位準,則不改變儲存於對應資料鎖存器中之資料。以此方式,不需要程式化具有儲存於位元線之對應資料鎖存器中之邏輯"1"的位元線。當所有資料鎖存器均儲存邏輯"1"時,狀態機(經由上文所述之硬連線邏輯或型機制)知道所有選定儲存元件已被程式化。在步驟1840中,進行關於是否所有資料鎖存器皆儲存邏輯"1"的檢查。若所有資料鎖存器皆儲存邏輯"1",則程式化過程完成且成功,因為所有選定儲存元件皆被程式化且經驗證。在步驟1845中報告"通過"狀態。In step 1835, the status of the selected storage element is verified. If it is detected that the target threshold voltage of the selected storage element has reached the appropriate level, the data stored in the corresponding data latch is changed to logic "1". If it is detected that the threshold voltage has not reached the appropriate level, the data stored in the corresponding data latch is not changed. In this way, there is no need to program a bit line having a logical "1" stored in the corresponding data latch of the bit line. When all data latches store a logic "1", the state machine (via the hardwired logic or type mechanism described above) knows that all selected storage elements have been programmed. In step 1840, a check is made as to whether all of the data latches store a logic "1". If all data latches store a logic "1", the stylization process is complete and successful because all selected storage elements are programmed and verified. The "pass" status is reported in step 1845.
若在步驟1840中判定並非所有資料鎖存器皆儲存邏輯"1",則繼續程式化過程。在步驟1850中,對照程式化極限值PCmax來檢查程式化計數器PC。程式化極限值之一實例為20;然而,亦可使用其他數字。若程式化計數器PC不小於PCmax,則程式化過程失敗且在步驟1855中報告"失敗"狀態。若程式化計數器PC小於PCmax,則在步驟1860 中使VPGM 增加步長且使程式化計數器PC遞增。該過程接著返回至步驟1830以施加下一VPGM 脈衝。If it is determined in step 1840 that not all of the data latches store a logic "1", then the stylization process continues. In step 1850, the stylized counter PC is checked against the stylized limit value PCmax. An example of one of the stylized limits is 20; however, other numbers can also be used. If the stylized counter PC is not less than PCmax, the stylization process fails and a "failed" status is reported in step 1855. If the stylized counter PC is less than PCmax, then in step 1860 V PGM is incremented by a step size and the stylized counter PC is incremented. The process then returns to step 1830 to apply the next V PGM pulse.
圖19描繪在程式化期間施加至非揮發性儲存元件之控制閘極的實例脈衝串1900,及在脈衝串期間發生的升壓模式之切換。脈衝串1900包括施加至經選擇以用於程式化之字元線的一系列程式化脈衝1905、1910、1915、1920、1925、1930、1935、1940、1945、1950等。在一實施例中,程式化脈衝具有電壓VPGM ,其自12 V開始且針對每一連續程式化脈衝而以增量(例如,0.5 V)增加,直至達到20 V的最大值為止。在程式化脈衝之間的是驗證脈衝。舉例而言,驗證脈衝集合1906包括三個驗證脈衝。在一些實施例中,可存在用於資料被程式化至的每一狀態(例如,狀態A、B及C)之一驗證脈衝。在其他實施例中,可存在更多或更少的驗證脈衝。每一集合中之驗證脈衝可具有(例如)Vva、Vvb及Vvc(圖16)或Vvb'(圖17a)之振幅。Figure 19 depicts an example pulse train 1900 applied to the control gate of the non-volatile storage element during stylization, and switching of the boost mode that occurs during the burst. Burst 1900 includes a series of stylized pulses 1905, 1910, 1915, 1920, 1925, 1930, 1935, 1940, 1945, 1950, etc. that are applied to the word lines selected for stylization. In one embodiment, the stylized pulses have a voltage V PGM that begins at 12 V and increases in increments (eg, 0.5 V) for each successive stylized pulse until a maximum of 20 V is reached. Between the stylized pulses is a verify pulse. For example, the set of verification pulses 1906 includes three verification pulses. In some embodiments, there may be one of the verification pulses for each state (eg, states A, B, and C) to which the material is programmed. In other embodiments, there may be more or fewer verification pulses. The verify pulses in each set may have amplitudes of, for example, Vva, Vvb, and Vvc (Fig. 16) or Vvb' (Fig. 17a).
如所提及,施加至字元線以實施升壓模式之電壓係在程式化發生時(例如,在程式化脈衝之前及在程式化脈衝期間)施加。實務上,可在每一程式化脈衝之前稍微起始升壓模式之升壓電壓且在每一程式化脈衝之後加以移除。另一方面,在(例如)在程式化脈衝之間發生的驗證過程期間,不施加升壓電壓。替代地,將通常小於升壓電壓之讀取電壓施加至未選擇字元線。當將目前被程式化的儲存元件之臨限電壓與驗證位準進行比較時,讀取電壓具有一足以使NAND串中之先前被程式化的儲存元件保持開啟之振 幅。As mentioned, the voltage applied to the word line to implement the boost mode is applied when stylization occurs (eg, before the stylized pulse and during the stylized pulse). In practice, the boost voltage of the boost mode can be initiated slightly before each stylized pulse and removed after each stylized pulse. On the other hand, the boost voltage is not applied during the verification process that occurs, for example, between stylized pulses. Alternatively, a read voltage that is typically less than the boost voltage is applied to the unselected word line. When comparing the threshold voltage of the currently programmed storage element to the verify level, the read voltage has a sufficient amplitude to keep the previously programmed storage elements in the NAND string turned on. Width.
為了說明及描述之目的,已呈現本發明之前述詳細描述。其不欲為詳盡的或將本發明限於所揭示之精確形式。鑒於以上教示,能夠進行許多修改及變化。選擇所描述之實施例,以便最佳地解釋本發明之原理及其實踐應用,以藉此使熟習此項技術者能夠在各種實施例中且以適於所預期之特別用途的各種修改來最佳地利用本發明。意欲由此處隨附之申請專利範圍來界定本發明之範疇。The foregoing detailed description of the invention has been presented for purposes of illustration It is not intended to be exhaustive or to limit the invention. Many modifications and variations are possible in light of the above teachings. The embodiments described are chosen to best explain the principles of the invention and the practice of the application in the The present invention is preferably utilized. The scope of the invention is intended to be defined by the scope of the appended claims.
100‧‧‧電晶體100‧‧‧Optoelectronics
100CG‧‧‧控制閘極100CG‧‧‧Control gate
100FG‧‧‧浮動閘極100FG‧‧‧ floating gate
102‧‧‧電晶體102‧‧‧Optoelectronics
102CG‧‧‧控制閘極102CG‧‧‧Control gate
102FG‧‧‧浮動閘極102FG‧‧‧ Floating Gate
104‧‧‧電晶體104‧‧‧Optoelectronics
104CG‧‧‧控制閘極104CG‧‧‧Control gate
104FG‧‧‧浮動閘極104FG‧‧‧Floating gate
106‧‧‧電晶體106‧‧‧Optoelectronics
106CG‧‧‧控制閘極106CG‧‧‧Control gate
106FG‧‧‧浮動閘極106FG‧‧‧ Floating Gate
120‧‧‧第一選擇閘120‧‧‧First choice gate
120CG‧‧‧控制閘極120CG‧‧‧Control gate
122‧‧‧第二選擇閘122‧‧‧Second selection gate
122CG‧‧‧控制閘極122CG‧‧‧Control gate
126位元線126 bit line
128‧‧‧源極線128‧‧‧ source line
320‧‧‧NAND串320‧‧‧NAND strings
321‧‧‧位元線321‧‧‧ bit line
322‧‧‧選擇閘322‧‧‧Selection gate
323‧‧‧儲存元件323‧‧‧Storage components
324‧‧‧儲存元件324‧‧‧Storage components
325‧‧‧儲存元件325‧‧‧Storage components
326‧‧‧儲存元件326‧‧‧Storage components
327‧‧‧選擇閘327‧‧‧Selection gate
340‧‧‧NAND串340‧‧‧NAND string
341‧‧‧位元線341‧‧‧ bit line
342‧‧‧選擇閘342‧‧‧Select gate
343‧‧‧儲存元件343‧‧‧Storage components
344‧‧‧儲存元件344‧‧‧Storage components
345‧‧‧儲存元件345‧‧‧Storage components
346‧‧‧儲存元件346‧‧‧Storage components
347‧‧‧選擇閘347‧‧‧Selection gate
360‧‧‧NAND串360‧‧‧NAND string
361‧‧‧位元線361‧‧‧ bit line
362‧‧‧選擇閘362‧‧‧Select brake
363‧‧‧儲存元件363‧‧‧Storage components
364‧‧‧儲存元件364‧‧‧Storage components
365‧‧‧儲存元件365‧‧‧Storage components
366‧‧‧儲存元件366‧‧‧Storage components
367‧‧‧選擇閘367‧‧‧Select brake
400‧‧‧NAND串400‧‧‧NAND strings
402‧‧‧端子402‧‧‧terminal
403‧‧‧端子403‧‧‧terminal
404‧‧‧源極供應線404‧‧‧Source supply line
406‧‧‧源極側選擇閘406‧‧‧Source side selection gate
408‧‧‧儲存元件408‧‧‧Storage components
410‧‧‧儲存元件410‧‧‧Storage components
412‧‧‧儲存元件412‧‧‧Storage components
414‧‧‧儲存元件414‧‧‧Storage components
416‧‧‧儲存元件416‧‧‧Storage components
418‧‧‧儲存元件418‧‧‧Storage components
420‧‧‧儲存元件420‧‧‧Storage components
422‧‧‧儲存元件422‧‧‧Storage components
424‧‧‧汲極側選擇閘424‧‧‧汲polar selection gate
426‧‧‧位元線426‧‧‧ bit line
430‧‧‧源極/汲極區域430‧‧‧Source/bungee area
490‧‧‧基板490‧‧‧Substrate
492‧‧‧p井區域492‧‧‧p well area
494‧‧‧n井區域494‧‧‧n well area
496‧‧‧p型基板區域496‧‧‧p-type substrate area
510‧‧‧VTH 分布510‧‧‧V TH distribution
512‧‧‧VTH 分布512‧‧‧V TH distribution
520‧‧‧第一VTH 分布520‧‧‧First V TH distribution
522‧‧‧第二VTH 分布522‧‧‧Second V TH distribution
524‧‧‧第三VTH 分布524‧‧‧ Third V TH distribution
526‧‧‧第四VTH 分布526‧‧‧Four V TH distribution
600‧‧‧感測組件600‧‧‧Sensing components
602‧‧‧電流感測模組602‧‧‧ Current Sensing Module
604‧‧‧BLC(位元線控制)電晶體604‧‧‧BLC (bit line control) transistor
606‧‧‧BLS(位元線感測)電晶體606‧‧‧BLS (bit line sensing) transistor
608‧‧‧控制裝置608‧‧‧Control device
610‧‧‧位元線610‧‧‧ bit line
612‧‧‧NAND串612‧‧‧NAND string
620‧‧‧波形620‧‧‧ waveform
622‧‧‧波形622‧‧‧ waveform
624‧‧‧波形624‧‧‧ waveform
626‧‧‧波形626‧‧‧ waveform
628‧‧‧波形628‧‧‧ waveform
720‧‧‧電壓調節器720‧‧‧Voltage regulator
800‧‧‧感測組件800‧‧‧Sensing components
802‧‧‧電壓感測模組/電路802‧‧‧Voltage Sensing Module/Circuit
804‧‧‧BLC(位元線控制)電晶體804‧‧‧BLC (bit line control) transistor
806‧‧‧BLS(位元線感測)電晶體806‧‧‧BLS (bit line sensing) transistor
808‧‧‧控制裝置808‧‧‧Control device
810‧‧‧位元線810‧‧‧ bit line
811‧‧‧至接地之電容811‧‧‧ to grounded capacitor
812‧‧‧NAND串812‧‧‧NAND string
813‧‧‧至相鄰位元線之電容813‧‧‧ to the capacitance of the adjacent bit line
814‧‧‧感測節點814‧‧‧Sensor node
816‧‧‧路徑816‧‧‧ Path
818‧‧‧GRS電晶體818‧‧‧GRS transistor
820‧‧‧路徑820‧‧‧ Path
822‧‧‧路徑822‧‧‧ Path
824‧‧‧電晶體824‧‧‧Optoelectronics
825‧‧‧電流源825‧‧‧current source
826‧‧‧路徑826‧‧‧ Path
830‧‧‧波形830‧‧‧ waveform
832‧‧‧波形832‧‧‧ waveform
834‧‧‧波形834‧‧‧ Waveform
836‧‧‧波形836‧‧‧ waveform
838‧‧‧波形838‧‧‧ waveform
840‧‧‧波形840‧‧‧ waveform
842‧‧‧波形842‧‧‧ waveform
844‧‧‧波形844‧‧‧ waveform
846‧‧‧波形846‧‧‧ waveform
900‧‧‧溫度相依電路900‧‧‧temperature dependent circuit
910‧‧‧波形910‧‧‧ waveform
912‧‧‧波形912‧‧‧ waveform
914‧‧‧波形914‧‧‧ waveform
916‧‧‧波形916‧‧‧ waveform
918‧‧‧波形918‧‧‧ waveform
922‧‧‧波形922‧‧‧ waveform
924‧‧‧波形924‧‧‧ waveform
1000‧‧‧記憶體陣列1000‧‧‧ memory array
1004‧‧‧源極線1004‧‧‧ source line
1006‧‧‧位元線1006‧‧‧ bit line
1026‧‧‧汲極端子1026‧‧‧汲 Extreme
1028‧‧‧源極端子1028‧‧‧ source terminal
1050‧‧‧NAND串1050‧‧‧NAND string
1100‧‧‧感測區塊1100‧‧‧Sensing block
1110‧‧‧控制電路1110‧‧‧Control circuit
1112‧‧‧狀態機1112‧‧‧ state machine
1114‧‧‧晶片上位址解碼器1114‧‧‧ on-chip address decoder
1116‧‧‧功率控制模組1116‧‧‧Power Control Module
1118‧‧‧線Line 1118‧‧
1120‧‧‧線/資料匯流排1120‧‧‧Line/data bus
1130‧‧‧列解碼器1130‧‧‧ column decoder
1130A‧‧‧列解碼器1130A‧‧‧ column decoder
1130B‧‧‧列解碼器1130B‧‧‧ column decoder
1150‧‧‧控制器1150‧‧‧ Controller
1160‧‧‧行解碼器1160‧‧ ‧ row decoder
1160A‧‧‧行解碼器1160A‧‧ ‧ decoder
1160B‧‧‧行解碼器1160B‧‧ line decoder
1165‧‧‧讀取/寫入電路1165‧‧‧Read/Write Circuit
1165A‧‧‧讀取/寫入電路1165A‧‧‧Read/Write Circuit
1165B‧‧‧讀取/寫入電路1165B‧‧‧Read/Write Circuit
1170‧‧‧感測電路1170‧‧‧Sensor circuit
1172‧‧‧資料匯流排1172‧‧‧ data bus
1180‧‧‧感測模組1180‧‧‧Sense Module
1182‧‧‧位元線鎖存器1182‧‧‧ bit line latch
1190‧‧‧共同部分1190‧‧‧Common part
1192‧‧‧處理器1192‧‧‧ processor
1193‧‧‧輸入線1193‧‧‧Input line
1194‧‧‧資料鎖存器1194‧‧‧ Data Latches
1196‧‧‧記憶體裝置/I/O介面1196‧‧‧Memory device/I/O interface
1198‧‧‧記憶體晶粒1198‧‧‧ memory grain
1400‧‧‧奇偶架構1400‧‧‧ parity structure
1410‧‧‧全位元線(ABL)架構1410‧‧‧ Full Bit Line (ABL) Architecture
1750‧‧‧臨限電壓分布1750‧‧‧ threshold voltage distribution
1900‧‧‧脈衝串1900‧‧‧pulse
1905‧‧‧程式化脈衝1905‧‧‧Stylized Pulse
1910‧‧‧程式化脈衝1910‧‧‧Stylized Pulse
1915‧‧‧程式化脈衝1915‧‧‧Stylized Pulse
1920‧‧‧程式化脈衝1920‧‧‧Stylized Pulse
1925‧‧‧程式化脈衝1925‧‧‧Stylized Pulse
1930‧‧‧程式化脈衝1930‧‧‧Stylized Pulse
1935‧‧‧程式化脈衝1935‧‧‧Stylized Pulse
1940‧‧‧程式化脈衝1940‧‧‧ Stylized Pulse
1945‧‧‧程式化脈衝1945‧‧‧Stylized Pulse
1950‧‧‧程式化脈衝1950‧‧‧Stylized Pulse
1906‧‧‧驗證脈衝集合1906‧‧‧Verification pulse set
BL0,BL1,BL2,BL3,BL4,BL5,BL8511‧‧‧ 位元線BL0, BL1, BL2, BL3, BL4, BL5, BL8511‧‧ Bit line
BLe0,BLe1,BLe2,BLe4255‧‧‧ 偶數位元線BLe0, BLe1, BLe2, BLe4255‧‧ Even bit line
BLo0,BLo1,BLo2,BLo4255‧‧‧ 奇數位元線BLo0, BLo1, BLo2, BLo4255‧‧ Odd bit line
SGD‧‧‧汲極選擇線SGD‧‧‧Bungee selection line
SGS‧‧‧源極選擇線SGS‧‧‧Source selection line
Vra,Vrb,Vrc‧‧‧讀取參考電壓Vra, Vrb, Vrc‧‧ ‧ read reference voltage
Vva,Vvb,Vvc‧‧‧驗證參考電壓Vva, Vvb, Vvc‧‧‧Verification reference voltage
WL_d0,WL_d1‧‧‧虛設字元線WL_d0, WL_d1‧‧‧Dummy word line
WL0‧‧‧字元線WL0‧‧‧ character line
WL1‧‧‧字元線WL1‧‧‧ character line
WL2‧‧‧字元線WL2‧‧‧ character line
WL3‧‧‧字元線WL3‧‧‧ character line
圖1為NAND串之俯視圖。Figure 1 is a top plan view of a NAND string.
圖2為圖1之NAND串之等效電路圖。2 is an equivalent circuit diagram of the NAND string of FIG. 1.
圖3為NAND快閃儲存元件陣列之方塊圖。3 is a block diagram of an array of NAND flash memory elements.
圖4描繪形成於基板上之NAND串之橫截面圖。4 depicts a cross-sectional view of a NAND string formed on a substrate.
圖5a至圖5d描繪非揮發性儲存元件之程式化。Figures 5a through 5d depict the stylization of non-volatile storage elements.
圖6a描繪NAND串及用於感測之組件之一組態。Figure 6a depicts a configuration of a NAND string and one of the components for sensing.
圖6b描繪與圖6a相關聯之波形。Figure 6b depicts the waveform associated with Figure 6a.
圖6c描繪與圖6a及圖6b相關聯之感測過程。Figure 6c depicts the sensing process associated with Figures 6a and 6b.
圖6d描繪基於電壓變化之電流感測。Figure 6d depicts current sensing based on voltage changes.
圖7a描繪歸因於感測操作期間之地電位彈跳的電流及電壓隨時間的變化。Figure 7a depicts the current and voltage as a function of time due to ground bounce during a sensing operation.
圖7b描繪在感測操作期間當源極電壓被調節至固定的正DC位準時的電流及電壓之減小的變化。Figure 7b depicts the change in current and voltage as the source voltage is adjusted to a fixed positive DC level during the sensing operation.
圖7c描繪NAND串及用於感測之組件之另一組態。Figure 7c depicts another configuration of a NAND string and components for sensing.
圖7d描繪與圖7a至圖7c相關聯之感測過程。Figure 7d depicts the sensing process associated with Figures 7a-7c.
圖8a描繪NAND串及組件之一組態,包括電流放電路徑。Figure 8a depicts one configuration of a NAND string and components, including a current discharge path.
圖8b描繪電壓感測發生時的圖8a之NAND串及組件之組態。Figure 8b depicts the configuration of the NAND string and components of Figure 8a when voltage sensing occurs.
圖8c描繪與圖8a及圖8b相關聯之波形。Figure 8c depicts the waveforms associated with Figures 8a and 8b.
圖8d描繪與圖8a至圖8c相關聯之感測過程。Figure 8d depicts the sensing process associated with Figures 8a-8c.
圖9a描繪NAND串及用於溫度補償感測之組件。Figure 9a depicts a NAND string and components for temperature compensated sensing.
圖9b說明臨限電壓隨溫度之變化。Figure 9b illustrates the variation of the threshold voltage with temperature.
圖9c說明VBLC 及VBL 隨溫度之變化。Figure 9c illustrates the variation of V BLC and V BL with temperature.
圖9d描繪與圖9a至圖9c相關聯之波形Figure 9d depicts the waveform associated with Figures 9a through 9c
圖9e描繪與圖9a至圖9d相關聯之感測過程。Figure 9e depicts the sensing process associated with Figures 9a through 9d.
圖9f描繪擦除-驗證過程。Figure 9f depicts an erase-verify process.
圖10a說明VSOURCE 隨溫度之變化。Figure 10a illustrates the change in V SOURCE with temperature.
圖10b描繪包括NAND串之不同集合的儲存元件陣列之實例。Figure 10b depicts an example of a storage element array that includes different sets of NAND strings.
圖11為使用單列解碼器/行解碼器及讀取/寫入電路之非揮發性記憶體系統的方塊圖。11 is a block diagram of a non-volatile memory system using a single column decoder/row decoder and read/write circuits.
圖12為使用雙列解碼器/行解碼器及讀取/寫入電路之非揮發性記憶體系統的方塊圖。Figure 12 is a block diagram of a non-volatile memory system using a dual column decoder/row decoder and a read/write circuit.
圖13為描繪感測區塊之一實施例的方塊圖。Figure 13 is a block diagram depicting one embodiment of a sensing block.
圖14描繪用於奇偶及全位元線記憶體架構的將記憶體陣列組織為區塊之實例。Figure 14 depicts an example of organizing memory arrays into blocks for parity and full bit line memory architecture.
圖15描繪單遍程式化的臨限電壓分布之一實例集合。Figure 15 depicts a collection of examples of a single pass stylized threshold voltage distribution.
圖16描繪多遍程式化的臨限電壓分布之一實例集合。Figure 16 depicts a collection of examples of a multi-pass stylized threshold voltage distribution.
圖17a至圖17c展示各種臨限電壓分布且描述用於程式化非揮發性記憶體之過程。Figures 17a through 17c show various threshold voltage distributions and describe the process for programming non-volatile memory.
圖18為描述用於程式化非揮發性記憶體之過程之一實施例的流程圖。18 is a flow chart depicting one embodiment of a process for programming non-volatile memory.
圖19描繪在程式化期間施加至非揮發性儲存元件之控制閘極之實例脈衝串。Figure 19 depicts an example pulse train applied to a control gate of a non-volatile storage element during stylization.
800‧‧‧感測組件800‧‧‧Sensing components
802‧‧‧電壓感測模組/電路802‧‧‧Voltage Sensing Module/Circuit
804‧‧‧BLC(位元線控制)電晶體804‧‧‧BLC (bit line control) transistor
806‧‧‧BLS(位元線感測)電晶體806‧‧‧BLS (bit line sensing) transistor
808‧‧‧控制裝置808‧‧‧Control device
810‧‧‧位元線810‧‧‧ bit line
811‧‧‧至接地之電容811‧‧‧ to grounded capacitor
812‧‧‧NAND串812‧‧‧NAND string
813‧‧‧至相鄰位元線之電容813‧‧‧ to the capacitance of the adjacent bit line
814‧‧‧感測節點814‧‧‧Sensor node
816‧‧‧路徑816‧‧‧ Path
818‧‧‧GRS電晶體818‧‧‧GRS transistor
820‧‧‧路徑820‧‧‧ Path
822‧‧‧路徑822‧‧‧ Path
824‧‧‧電晶體824‧‧‧Optoelectronics
825‧‧‧電流源825‧‧‧current source
826‧‧‧路徑826‧‧‧ Path
SGD‧‧‧汲極選擇線SGD‧‧‧Bungee selection line
SGS‧‧‧源極選擇線SGS‧‧‧Source selection line
WL0‧‧‧字元線WL0‧‧‧ character line
WL1‧‧‧字元線WL1‧‧‧ character line
WL2‧‧‧字元線WL2‧‧‧ character line
WL3‧‧‧字元線WL3‧‧‧ character line
Claims (16)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/772,002 US7471567B1 (en) | 2007-06-29 | 2007-06-29 | Method for source bias all bit line sensing in non-volatile storage |
| US11/772,009 US7545678B2 (en) | 2007-06-29 | 2007-06-29 | Non-volatile storage with source bias all bit line sensing |
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| TWI386942B true TWI386942B (en) | 2013-02-21 |
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| US8947939B2 (en) * | 2010-09-30 | 2015-02-03 | Macronix International Co., Ltd. | Low voltage programming in NAND flash |
| DE102011056141A1 (en) | 2010-12-20 | 2012-06-21 | Samsung Electronics Co., Ltd. | A negative voltage generator, decoder, non-volatile memory device and memory system using a negative voltage |
| US8526233B2 (en) * | 2011-05-23 | 2013-09-03 | Sandisk Technologies Inc. | Ramping pass voltage to enhance channel boost in memory device, with optional temperature compensation |
| CN103106920B (en) * | 2011-11-15 | 2016-01-20 | 旺宏电子股份有限公司 | Memory access method and flash memory using the method |
| US8730723B2 (en) * | 2012-03-12 | 2014-05-20 | Flashsilicon Incorporation | Structures and methods of high efficient bit conversion for multi-level cell non-volatile memories |
| US9336872B2 (en) * | 2014-03-11 | 2016-05-10 | Everspin Technologies, Inc. | Nonvolatile logic and security circuits |
| KR20150127419A (en) | 2014-05-07 | 2015-11-17 | 에스케이하이닉스 주식회사 | Semiconductor memory device and reading method thereof |
| CN106251817B (en) * | 2016-08-31 | 2019-01-18 | 深圳市华星光电技术有限公司 | A kind of GOA driving circuit |
| US9881676B1 (en) * | 2016-10-11 | 2018-01-30 | Sandisk Technologies Llc | Sense amplifier with program biasing and fast sensing |
| KR102660729B1 (en) * | 2016-10-28 | 2024-04-26 | 삼성전자주식회사 | Nonvolatile memory device detecting power noise and operation method thereof |
| CN106898377B (en) * | 2017-02-08 | 2020-06-09 | 上海华虹宏力半导体制造有限公司 | Adjustable control circuit applied to NVM high-voltage discharge path |
| CN107170484B (en) * | 2017-03-17 | 2020-01-24 | 北京兆易创新科技股份有限公司 | NAND Flash voltage automatic compensation method and device |
| CN107170481B (en) * | 2017-05-16 | 2020-03-31 | 中国科学院微电子研究所 | Adaptive operating device and method for three-dimensional memory |
| CN110782937B (en) * | 2018-07-31 | 2024-07-30 | 三星电子株式会社 | Nonvolatile memory device and program method thereof |
| US10755790B2 (en) * | 2019-01-23 | 2020-08-25 | Macronix International Co., Ltd. | Boosted voltage driver for bit lines and other circuit nodes |
| US10818363B1 (en) * | 2019-05-17 | 2020-10-27 | Micron Technolgy, Inc. | Apparatus and methods for calibrating sensing of memory cell data states |
| US11397561B2 (en) * | 2019-09-05 | 2022-07-26 | SK Hynix Inc. | Nonvolatile memory device performing a multiplicaiton and accumulation operation |
| CN114464232B (en) * | 2020-11-09 | 2025-03-25 | 桑迪士克科技股份有限公司 | Full bit line sensing to determine word line to memory hole shorts |
| US12176022B2 (en) | 2022-08-01 | 2024-12-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | Programming and reading circuit for dynamic random access memory |
| US20250080131A1 (en) * | 2023-08-28 | 2025-03-06 | Macronix International Co., Ltd. | Analog digital conversion sensing by dynamically varying charging capacitor values |
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| CN101796590A (en) | 2010-08-04 |
| KR20100044802A (en) | 2010-04-30 |
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