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TWI372885B - Electromagnetic wave propagating structure - Google Patents

Electromagnetic wave propagating structure

Info

Publication number
TWI372885B
TWI372885B TW097103559A TW97103559A TWI372885B TW I372885 B TWI372885 B TW I372885B TW 097103559 A TW097103559 A TW 097103559A TW 97103559 A TW97103559 A TW 97103559A TW I372885 B TWI372885 B TW I372885B
Authority
TW
Taiwan
Prior art keywords
electromagnetic wave
wave propagating
propagating structure
electromagnetic
wave
Prior art date
Application number
TW097103559A
Other languages
English (en)
Other versions
TW200848786A (en
Original Assignee
Univ Nat Cheng Kung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Nat Cheng Kung filed Critical Univ Nat Cheng Kung
Priority to TW097103559A priority Critical patent/TWI372885B/zh
Priority to US12/053,896 priority patent/US8126305B2/en
Priority to JP2008076879A priority patent/JP4909307B2/ja
Priority to EP08251051A priority patent/EP2000835B1/en
Priority to KR1020080053270A priority patent/KR100934071B1/ko
Priority to SG200804451-3A priority patent/SG148948A1/en
Publication of TW200848786A publication Critical patent/TW200848786A/zh
Priority to US13/405,589 priority patent/US8755661B2/en
Application granted granted Critical
Publication of TWI372885B publication Critical patent/TWI372885B/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1226—Basic optical elements, e.g. light-guiding paths involving surface plasmon interaction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/008—Surface plasmon devices
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Biophysics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Optical Integrated Circuits (AREA)
  • Hall/Mr Elements (AREA)
TW097103559A 2007-06-06 2008-01-30 Electromagnetic wave propagating structure TWI372885B (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
TW097103559A TWI372885B (en) 2007-06-06 2008-01-30 Electromagnetic wave propagating structure
US12/053,896 US8126305B2 (en) 2007-06-06 2008-03-24 Electromagnetic wave propagating structure
JP2008076879A JP4909307B2 (ja) 2007-06-06 2008-03-24 電磁波伝播構造
EP08251051A EP2000835B1 (en) 2007-06-06 2008-03-25 Electromagnetic wave propogating structure
KR1020080053270A KR100934071B1 (ko) 2007-06-06 2008-06-05 전자기파 전파 구조물, 전자기파 포커싱 방법, 콜리메이트광빔 생성 방법, 광 스폿 생성기 및 광빔 생성기
SG200804451-3A SG148948A1 (en) 2007-06-06 2008-06-05 Electromagnetic wave propagating structure
US13/405,589 US8755661B2 (en) 2007-06-06 2012-02-27 Electromagnetic wave propagating structure

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
TW96120414 2007-06-06
TW097103559A TWI372885B (en) 2007-06-06 2008-01-30 Electromagnetic wave propagating structure

Publications (2)

Publication Number Publication Date
TW200848786A TW200848786A (en) 2008-12-16
TWI372885B true TWI372885B (en) 2012-09-21

Family

ID=39676438

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097103559A TWI372885B (en) 2007-06-06 2008-01-30 Electromagnetic wave propagating structure

Country Status (6)

Country Link
US (2) US8126305B2 (zh)
EP (1) EP2000835B1 (zh)
JP (1) JP4909307B2 (zh)
KR (1) KR100934071B1 (zh)
SG (1) SG148948A1 (zh)
TW (1) TWI372885B (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI372885B (en) * 2007-06-06 2012-09-21 Univ Nat Cheng Kung Electromagnetic wave propagating structure
US20120006981A1 (en) * 2009-03-31 2012-01-12 Imec Waveguide integrated photodetector
US20120289832A1 (en) * 2009-12-22 2012-11-15 Miao Zhang Illumination Methods And Systems For Improving Image Resolution Of Imaging Systems
CN103119498B (zh) 2010-07-22 2015-08-19 匹兹堡高等教育联邦体系大学 纳米光学的折射光学器件
JP6248345B2 (ja) * 2011-03-22 2017-12-20 株式会社ニコン 光学素子、照明装置、測定装置、フォトマスク、露光装置、露光方法、及びデバイス製造方法
KR20210068672A (ko) * 2019-12-02 2021-06-10 에스엘 주식회사 광학 렌즈 및 이를 이용한 조명 장치

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5973316A (en) * 1997-07-08 1999-10-26 Nec Research Institute, Inc. Sub-wavelength aperture arrays with enhanced light transmission
US6040936A (en) * 1998-10-08 2000-03-21 Nec Research Institute, Inc. Optical transmission control apparatus utilizing metal films perforated with subwavelength-diameter holes
US6236033B1 (en) * 1998-12-09 2001-05-22 Nec Research Institute, Inc. Enhanced optical transmission apparatus utilizing metal films having apertures and periodic surface topography
US6285020B1 (en) * 1999-11-05 2001-09-04 Nec Research Institute, Inc. Enhanced optical transmission apparatus with improved inter-surface coupling
US6834027B1 (en) * 2000-02-28 2004-12-21 Nec Laboratories America, Inc. Surface plasmon-enhanced read/write heads for optical data storage media
US6818907B2 (en) 2000-10-17 2004-11-16 The President And Fellows Of Harvard College Surface plasmon enhanced illumination system
EP1318420B1 (en) * 2001-12-07 2005-06-08 ThreeFive Photonics B.V. Optical coupler and arrayed waveguide grating (AWG) comprising the same
TWI266305B (en) 2003-06-26 2006-11-11 Ind Tech Res Inst An optical head which can provide a sub-wavelength-scale light beam
CN100474038C (zh) * 2003-09-18 2009-04-01 日本电气株式会社 光学元件
WO2005057247A2 (en) * 2003-12-05 2005-06-23 University Of Pittsburgh Metallic nano-optic lenses and beam shaping devices
JP4415756B2 (ja) * 2004-05-24 2010-02-17 日本電気株式会社 光学素子並びにその製造方法
JP4877910B2 (ja) * 2005-10-17 2012-02-15 シャープ株式会社 近接場発生装置、及び露光装置
TWI372885B (en) * 2007-06-06 2012-09-21 Univ Nat Cheng Kung Electromagnetic wave propagating structure

Also Published As

Publication number Publication date
KR20080107313A (ko) 2008-12-10
US20120212831A1 (en) 2012-08-23
SG148948A1 (en) 2009-01-29
EP2000835A1 (en) 2008-12-10
US20080304159A1 (en) 2008-12-11
US8755661B2 (en) 2014-06-17
KR100934071B1 (ko) 2009-12-24
EP2000835B1 (en) 2012-11-28
JP4909307B2 (ja) 2012-04-04
JP2009010329A (ja) 2009-01-15
TW200848786A (en) 2008-12-16
US8126305B2 (en) 2012-02-28

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