TWI372081B - Showerhead - Google Patents

Showerhead

Info

Publication number: TWI372081B
Authority: TW; Taiwan
Prior art keywords: showerhead
Prior art date: 2010-02-02

Application number

TW099102945A

Other languages

English (en)

Other versions

TW201127494A (en

Inventor

Chien Ping Huang

Tsan Hua Huang

Original Assignee

Hermes Epitek Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2010-02-02

Filing date

2010-02-02

Publication date

2012-09-11

2010-02-02 Application filed by Hermes Epitek Corp filed Critical Hermes Epitek Corp

2010-02-02 Priority to TW099102945A priority Critical patent/TWI372081B/zh

2010-04-09 Priority to US12/757,932 priority patent/US8484847B2/en

2011-08-16 Publication of TW201127494A publication Critical patent/TW201127494A/zh

2012-09-11 Application granted granted Critical

2012-09-11 Publication of TWI372081B publication Critical patent/TWI372081B/zh

2013-06-18 Priority to US13/920,744 priority patent/US9126214B2/en

Classifications

- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45565—Shower nozzles
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/14—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening
- B05B1/18—Roses; Shower heads
- B05B1/185—Roses; Shower heads characterised by their outlet element; Mounting arrangements therefor
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
- B23P15/16—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass plates with holes of very small diameter, e.g. for spinning or burner nozzles
- H10P50/20—
- H10P52/00—
- H10P95/00—
- H10P95/70—
- H10P50/28—
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49428—Gas and water specific plumbing component making
- Y10T29/49432—Nozzle making
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49428—Gas and water specific plumbing component making
- Y10T29/49432—Nozzle making
- Y10T29/49433—Sprayer

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Chemical & Material Sciences (AREA)
Chemical Kinetics & Catalysis (AREA)
Materials Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Chemical Vapour Deposition (AREA)
Physics & Mathematics (AREA)
Condensed Matter Physics & Semiconductors (AREA)
General Physics & Mathematics (AREA)
Manufacturing & Machinery (AREA)
Computer Hardware Design (AREA)
Microelectronics & Electronic Packaging (AREA)
Power Engineering (AREA)

TW099102945A 2010-02-02 2010-02-02 Showerhead TWI372081B (en)

Priority Applications (3)

Application Number	Priority Date	Filing Date	Title
TW099102945A TWI372081B (en)	2010-02-02	2010-02-02	Showerhead
US12/757,932 US8484847B2 (en)	2010-02-02	2010-04-09	Method for making a showerhead
US13/920,744 US9126214B2 (en)	2010-02-02	2013-06-18	Showerhead

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
TW099102945A TWI372081B (en)	2010-02-02	2010-02-02	Showerhead

Publications (2)

Publication Number	Publication Date
TW201127494A TW201127494A (en)	2011-08-16
TWI372081B true TWI372081B (en)	2012-09-11

Family

ID=44340600

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
TW099102945A TWI372081B (en)	2010-02-02	2010-02-02	Showerhead

Country Status (2)

Country	Link
US (2)	US8484847B2 (zh)
TW (1)	TWI372081B (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
WO2011044451A2 (en) *	2009-10-09	2011-04-14	Applied Materials, Inc.	Multi-gas centrally cooled showerhead design
US9982340B2 (en)	2012-04-04	2018-05-29	Taiwan Semiconductor Manufacturing Co. Ltd.	Shower head apparatus and method for controlling plasma or gas distribution
US9328420B2 (en) *	2013-03-14	2016-05-03	Sunedison Semiconductor Limited (Uen201334164H)	Gas distribution plate for chemical vapor deposition systems and methods of using same
US10378108B2 (en) *	2015-10-08	2019-08-13	Applied Materials, Inc.	Showerhead with reduced backside plasma ignition
US10403476B2 (en)	2016-11-09	2019-09-03	Lam Research Corporation	Active showerhead
KR102576220B1 (ko) *	2018-06-22	2023-09-07	삼성디스플레이 주식회사	박막 처리 장치 및 박막 처리 방법
JP7577670B2 (ja) *	2019-02-01	2024-11-05	ラムリサーチコーポレーション	複数のプレナムおよびガス分配室を有する堆積ツール用のシャワーヘッド

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
SE510977C2 (sv) *	1995-11-13	1999-07-19	Nils Larsson	Sätt att framställa stråldiffusor
EP1068816A4 (en) *	1998-03-31	2005-04-06	Ricoh Elemex Corp	HEAD / FACE WASHING MACHINE, SHOWER HEAD WITH HOOD, WASHING MACHINE IN THE FORM OF A COMB AND SHOWER BRUSH FOR WASHING THE HEAD
DE10007059A1 (de) *	2000-02-16	2001-08-23	Aixtron Ag	Verfahren und Vorrichtung zur Herstellung von beschichteten Substraten mittels Kondensationsbeschichtung
US6533867B2 (en) *	2000-11-20	2003-03-18	Applied Epi Inc	Surface sealing showerhead for vapor deposition reactor having integrated flow diverters
KR100413482B1 (ko) *	2001-06-12	2003-12-31	주식회사 하이닉스반도체	화학적 강화제(ｃｅ) 처리 챔버
NZ525880A (en) *	2003-05-14	2005-11-25	Methven Ltd	Method and apparatus for producing droplet spray
WO2004109761A2 (en) *	2003-05-30	2004-12-16	Aviza Technology Inc.	Gas distribution system
JP2005340251A (ja) *	2004-05-24	2005-12-08	Shin Etsu Chem Co Ltd	プラズマ処理装置用のシャワープレート及びプラズマ処理装置
KR101153161B1 (ko) *	2005-04-01	2012-06-18	주성엔지니어링(주)	가스분사장치 및 이를 포함하는 액정표시소자의 제조장치
TWM293005U (en) *	2006-02-27	2006-07-01	Wu-Ting Hsiao	Improved structure of patterned shower head
US7694897B2 (en)	2006-04-20	2010-04-13	Moen Incorporated	Integrated multi-function showerhead
US20090211707A1 (en) *	2008-02-22	2009-08-27	Hermes Systems Inc.	Apparatus for gas distribution and its applications
KR101004927B1 (ko) *	2008-04-24	2010-12-29	삼성엘이디 주식회사	Ｃｖｄ용 샤워 헤드 및 이를 구비하는 화학 기상 증착 장치
US20110048325A1 (en) *	2009-03-03	2011-03-03	Sun Hong Choi	Gas Distribution Apparatus and Substrate Processing Apparatus Having the Same
JP5463224B2 (ja) *	2010-07-09	2014-04-09	日本発條株式会社	流路付きプレートの製造方法、流路付きプレート、温度調節プレート、コールドプレート、及びシャワープレート
US20120085747A1 (en) *	2010-10-07	2012-04-12	Benson Chao	Heater assembly and wafer processing apparatus using the same

2010
- 2010-02-02 TW TW099102945A patent/TWI372081B/zh not_active IP Right Cessation
- 2010-04-09 US US12/757,932 patent/US8484847B2/en not_active Expired - Fee Related
2013
- 2013-06-18 US US13/920,744 patent/US9126214B2/en not_active Expired - Fee Related

Also Published As

Publication number	Publication date
US8484847B2 (en)	2013-07-16
US9126214B2 (en)	2015-09-08
US20110186228A1 (en)	2011-08-04
US20130277459A1 (en)	2013-10-24
TW201127494A (en)	2011-08-16

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DK3342786T3 (en)	2021-09-27	Anti-dll3-antistof
AP3107A (en)	2015-01-31	5-Alkynyl-pyrimidines
EP2566479A4 (en)	2013-10-23	AZA-INDAZOLES
EP2640189A4 (en)	2014-03-19	3-deutero-pomalidomide
DK3466977T3 (en)	2022-04-11	Anti-vla-4-antistoffer
EP2641891A4 (en)	2014-07-23	PKC ACTIVATOR-
TWI372081B (en)	2012-09-11	Showerhead
GB201001760D0 (en)	2010-03-24	Dipenser
GB201001385D0 (en)	2010-03-17	Cable-tidies
GB201001546D0 (en)	2010-03-17	Knocktop
AU4932P (en)	2014-10-21	FlatwaxpinkGL Chamelaucium uncinatum
AU4937P (en)	2014-10-21	FlatinsulGL Myoporum insulare
AU4931P (en)	2014-10-21	FlatwaxDarkGL Chamelaucium uncinatum
AU4822P (en)	2014-06-11	FlatwaxwhiteGL Chamelaucium uncinatum
AU4536P (en)	2013-04-30	TB01 Tibouchina urvilleana
GB201005605D0 (en)	2010-05-19	Shower aid
GB201000706D0 (en)	2010-03-03	Kilthanger
AU2010194V (en)	2010-11-23	CalpenGL Calothamnus quadrifidus
GB201000203D0 (en)	2010-02-24	Formits
GB201000246D0 (en)	2010-02-24	Head-kase
GB201000262D0 (en)	2010-02-24	Flexishaft
GB201000426D0 (en)	2010-02-24	Earbling
GB201000547D0 (en)	2010-03-03	Jurasic
GB201000066D0 (en)	2010-02-17	1Velcrose
GB201000765D0 (en)	2010-03-03	Koolkilt

Legal Events

Date	Code	Title	Description
2023-06-11	MM4A	Annulment or lapse of patent due to non-payment of fees