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TWI372083B - Cleaning method for duv optical elements to extend their lifetime - Google Patents

Cleaning method for duv optical elements to extend their lifetime

Info

Publication number
TWI372083B
TWI372083B TW097128545A TW97128545A TWI372083B TW I372083 B TWI372083 B TW I372083B TW 097128545 A TW097128545 A TW 097128545A TW 97128545 A TW97128545 A TW 97128545A TW I372083 B TWI372083 B TW I372083B
Authority
TW
Taiwan
Prior art keywords
lifetime
extend
optical elements
cleaning method
duv optical
Prior art date
Application number
TW097128545A
Other languages
English (en)
Other versions
TW200932384A (en
Inventor
J Cangemi Michael
Feng Jiangwei
J Hayden Cindy
Sabia Robert
Schreiber Horst
Wang Jue
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of TW200932384A publication Critical patent/TW200932384A/zh
Application granted granted Critical
Publication of TWI372083B publication Critical patent/TWI372083B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/02—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by distortion, beating, or vibration of the surface to be cleaned
    • B08B7/026—Using sound waves
    • B08B7/028—Using ultrasounds
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/02—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of crystals, e.g. rock-salt, semi-conductors
    • G02B1/105—
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/14—Protective coatings, e.g. hard coatings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B2203/00—Details of cleaning machines or methods involving the use or presence of liquid or steam
    • B08B2203/005—Details of cleaning machines or methods involving the use or presence of liquid or steam the liquid being ozonated

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Engineering & Computer Science (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning In General (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Overhead Projectors And Projection Screens (AREA)
TW097128545A 2007-07-31 2008-07-25 Cleaning method for duv optical elements to extend their lifetime TWI372083B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US96271807P 2007-07-31 2007-07-31

Publications (2)

Publication Number Publication Date
TW200932384A TW200932384A (en) 2009-08-01
TWI372083B true TWI372083B (en) 2012-09-11

Family

ID=40243893

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097128545A TWI372083B (en) 2007-07-31 2008-07-25 Cleaning method for duv optical elements to extend their lifetime

Country Status (6)

Country Link
US (1) US20090035586A1 (zh)
EP (2) EP2399680A1 (zh)
JP (2) JP5432143B2 (zh)
KR (1) KR101580699B1 (zh)
TW (1) TWI372083B (zh)
WO (1) WO2009017634A2 (zh)

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NL1036526A1 (nl) * 2008-02-14 2009-08-17 Asml Netherlands Bv Use of a coating, an article having the coating and a lithographic apparatus comprising the coating.
KR101172861B1 (ko) * 2010-02-26 2012-08-09 삼성전기주식회사 금속 나노입자의 세정방법
JP5842645B2 (ja) * 2012-02-02 2016-01-13 旭硝子株式会社 ガラス基板の洗浄方法
CN102644052B (zh) * 2012-05-03 2014-02-05 中国科学院光电技术研究所 一种配置紫外光照射清洁功能的真空镀膜机
US9169155B2 (en) * 2012-05-03 2015-10-27 Guardian Industries Corp. Method and apparatus for making vacuum insulated glass (VIG) window unit including cleaning cavity thereof
US9573111B1 (en) 2012-07-09 2017-02-21 Kla-Tencor Corporation High purity ozone generator for optics cleaning and recovery
CN103235353A (zh) * 2013-04-18 2013-08-07 中国科学院长春光学精密机械与物理研究所 一种使深紫外光学薄膜具有光学稳定性的处理方法
CN108604614B (zh) * 2015-12-09 2021-07-13 第一阳光公司 光伏设备和制造方法
CN106216308B (zh) * 2016-08-08 2018-10-23 泉州市三星消防设备有限公司 一种抛光后的光学零件的清洗方法
CN106881308A (zh) * 2017-03-06 2017-06-23 上海巨煌光电科技有限公司 一种镀膜镜片的清洗方法
DE102018221189A1 (de) 2018-12-07 2020-06-10 Carl Zeiss Smt Gmbh Verfahren zum Bilden von Nanostrukturen an einer Oberfläche und optisches Element
DE102019200208A1 (de) 2019-01-10 2020-07-16 Carl Zeiss Smt Gmbh Verfahren zum in situ dynamischen Schutz einer Oberfläche und optische Anordnung
CN111329082B (zh) * 2020-03-20 2021-08-27 陈海峰 一种可以模拟人工清洗的苹果清洗设备
US11715622B2 (en) 2020-08-05 2023-08-01 Kla Corporation Material recovery systems for optical components
CN114371223B (zh) * 2022-03-16 2022-09-20 浙江大学杭州国际科创中心 一种碳化硅晶体生长检测装置、方法及碳化硅晶体生长炉

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US5990060A (en) * 1997-02-25 1999-11-23 Tadahiro Ohmi Cleaning liquid and cleaning method
JPH11305002A (ja) * 1998-04-20 1999-11-05 Canon Inc レンズ洗浄方法及び装置
US6868106B1 (en) * 1998-06-04 2005-03-15 Lambda Physik Ag Resonator optics for high power UV lasers
US6345065B1 (en) * 1998-06-04 2002-02-05 Lambda Physik Ag F2-laser with line selection
IL141595A0 (en) * 1998-08-27 2002-03-10 Anon Inc Method of removing organic materials from substrates
US6242361B1 (en) * 1999-12-13 2001-06-05 Industrial Technology Research Institute Plasma treatment to improve DUV photoresist process
US6466365B1 (en) 2000-04-07 2002-10-15 Corning Incorporated Film coated optical lithography elements and method of making
US6984334B2 (en) * 2000-06-08 2006-01-10 Canon Kabushiki Kaisha Method of manufacturing optical element
JP2002177908A (ja) * 2000-12-15 2002-06-25 Olympus Optical Co Ltd 光学部品の洗浄方法
US6855380B2 (en) * 2001-05-18 2005-02-15 Carl Zeiss Smt Ag Method for the production of optical components with increased stability, components obtained thereby and their use
DE10142649A1 (de) * 2001-08-31 2003-04-24 Schott Glas Verfahren zur Herstellung bruchfester Calciumfluorid-Einkristalle sowie deren Verwendung
US6848455B1 (en) * 2002-04-22 2005-02-01 Novellus Systems, Inc. Method and apparatus for removing photoresist and post-etch residue from semiconductor substrates by in-situ generation of oxidizing species
JP2004020710A (ja) * 2002-06-13 2004-01-22 Canon Inc 光学素子の製造方法
JP2004325794A (ja) * 2003-04-24 2004-11-18 Showa Denko Kk フッ化物光学素子の製造方法およびフッ化物光学素子
US6872479B2 (en) * 2003-04-11 2005-03-29 Corning Incorporated Coated optics to improve durability
EP1486827B1 (en) * 2003-06-11 2011-11-02 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method
JP2005040736A (ja) * 2003-07-24 2005-02-17 Canon Inc 光学部品の洗浄方法及び装置
JP2005175139A (ja) * 2003-12-10 2005-06-30 Nikon Corp フッ素洗浄装置及びフッ素エッチング装置
DE102004030803A1 (de) * 2004-06-25 2006-01-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Hochreflektiv beschichteter mikromechanischer Spiegel, Verfahren zu dessen Herstellung sowie dessen Verwendung
US7128984B2 (en) * 2004-08-31 2006-10-31 Corning Incorporated Surfacing of metal fluoride excimer optics
DE102005024682A1 (de) * 2005-05-30 2006-12-14 Schott Ag Optisches Material aus kristallisiertem Erdalkalimetallfluorid mit erhöhtem Brechungsindex
US7242843B2 (en) * 2005-06-30 2007-07-10 Corning Incorporated Extended lifetime excimer laser optics
DE102005044697B4 (de) * 2005-09-19 2011-07-21 Hellma Materials GmbH & Co. KG, 07745 Verfahren zur Herstellung von CAF2-Einkristalle mit erhöhter Laserstabilität, CAF2-Einkristalle mit erhöhter Laserstabilität und ihre Verwendung

Also Published As

Publication number Publication date
US20090035586A1 (en) 2009-02-05
JP5728050B2 (ja) 2015-06-03
KR20100065314A (ko) 2010-06-16
EP2185298B1 (en) 2012-07-04
JP5432143B2 (ja) 2014-03-05
JP2013257571A (ja) 2013-12-26
EP2185298A2 (en) 2010-05-19
KR101580699B1 (ko) 2015-12-28
WO2009017634A2 (en) 2009-02-05
JP2010535099A (ja) 2010-11-18
WO2009017634A3 (en) 2010-03-04
EP2399680A1 (en) 2011-12-28
TW200932384A (en) 2009-08-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees