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TWI370798B - Apparatus for transferring base plate - Google Patents

Apparatus for transferring base plate

Info

Publication number
TWI370798B
TWI370798B TW098123225A TW98123225A TWI370798B TW I370798 B TWI370798 B TW I370798B TW 098123225 A TW098123225 A TW 098123225A TW 98123225 A TW98123225 A TW 98123225A TW I370798 B TWI370798 B TW I370798B
Authority
TW
Taiwan
Prior art keywords
base plate
transferring base
transferring
plate
base
Prior art date
Application number
TW098123225A
Other languages
Chinese (zh)
Other versions
TW201006748A (en
Inventor
Dong-Hyuk Shin
Original Assignee
Inatech Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inatech Co Ltd filed Critical Inatech Co Ltd
Publication of TW201006748A publication Critical patent/TW201006748A/en
Application granted granted Critical
Publication of TWI370798B publication Critical patent/TWI370798B/en

Links

Classifications

    • H10P72/3202—
    • H10P72/3302—
    • H10P72/3306—
    • H10P72/3308—
    • H10P72/7602—
TW098123225A 2008-07-11 2009-07-09 Apparatus for transferring base plate TWI370798B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020080067805A KR100885877B1 (en) 2008-07-11 2008-07-11 Board Feeder

Publications (2)

Publication Number Publication Date
TW201006748A TW201006748A (en) 2010-02-16
TWI370798B true TWI370798B (en) 2012-08-21

Family

ID=40682178

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098123225A TWI370798B (en) 2008-07-11 2009-07-09 Apparatus for transferring base plate

Country Status (5)

Country Link
JP (1) JP2011527823A (en)
KR (1) KR100885877B1 (en)
CN (1) CN102113108B (en)
TW (1) TWI370798B (en)
WO (1) WO2010005246A2 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101069154B1 (en) 2009-05-28 2011-09-30 주식회사 케이씨텍 Substrate Processing Equipment
KR101078487B1 (en) 2009-09-17 2011-10-31 김재석 vacuum suction unit for pannel and vacuum suction with plural rubber pads
SG181807A1 (en) * 2010-01-08 2012-07-30 Kla Tencor Corp Dual tray carrier unit
US9435826B2 (en) 2012-05-08 2016-09-06 Kla-Tencor Corporation Variable spacing four-point probe pin device and method
KR101853105B1 (en) * 2012-09-10 2018-04-27 어플라이드 머티어리얼스, 인코포레이티드 Substrate transfer device and method of moving substrates
CN109160210B (en) * 2018-09-25 2024-06-07 中国建材国际工程集团有限公司 Plate storing and conveying system and using method thereof
CN112239069A (en) * 2019-07-19 2021-01-19 亚智科技股份有限公司 Forked substrate conveying device and method thereof
CN111848218B (en) * 2020-07-30 2022-11-08 固安浩瀚光电科技有限公司 Semiconductor ceramic soaking and drying integrated device and using method thereof
CN115113015B (en) * 2021-03-18 2025-01-10 深圳麦逊电子有限公司 FPC testing material conveying device, testing system and testing method thereof
CN116946487A (en) * 2023-09-20 2023-10-27 长春市景来科技有限公司 Artificial intelligence commodity circulation parcel packing plant
CN117902271B (en) * 2024-02-27 2025-03-25 苏州天准科技股份有限公司 A lifting and flipping silo

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2913354B2 (en) * 1993-02-26 1999-06-28 東京エレクトロン株式会社 Processing system
JP4476133B2 (en) * 2005-02-24 2010-06-09 東京エレクトロン株式会社 Processing system
JP4440178B2 (en) * 2005-07-25 2010-03-24 東京エレクトロン株式会社 Substrate transfer device
JP4593461B2 (en) * 2005-12-27 2010-12-08 東京エレクトロン株式会社 Substrate transfer system
KR100617454B1 (en) 2006-02-23 2006-09-05 주식회사 인아텍 Substrate Transfer System and Substrate Transfer Method Using the Same
KR100617453B1 (en) 2006-04-27 2006-09-01 주식회사 인아텍 Substrate Transfer System
KR100839570B1 (en) 2007-12-31 2008-06-20 주식회사 인아텍 Substrate Transfer Method and Device

Also Published As

Publication number Publication date
WO2010005246A9 (en) 2010-07-08
KR100885877B1 (en) 2009-02-26
TW201006748A (en) 2010-02-16
WO2010005246A3 (en) 2010-04-29
CN102113108A (en) 2011-06-29
JP2011527823A (en) 2011-11-04
WO2010005246A2 (en) 2010-01-14
CN102113108B (en) 2013-07-10

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