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TWI370519B - Metal gate transistor and method for fabricating the same - Google Patents

Metal gate transistor and method for fabricating the same

Info

Publication number
TWI370519B
TWI370519B TW097132536A TW97132536A TWI370519B TW I370519 B TWI370519 B TW I370519B TW 097132536 A TW097132536 A TW 097132536A TW 97132536 A TW97132536 A TW 97132536A TW I370519 B TWI370519 B TW I370519B
Authority
TW
Taiwan
Prior art keywords
fabricating
same
metal gate
gate transistor
transistor
Prior art date
Application number
TW097132536A
Other languages
Chinese (zh)
Other versions
TW201010008A (en
Inventor
Chien Ting Lin
Li Wei Cheng
Jung Tsung Tseng
Che Hua Hsu
Chih Hao Yu
Tian Fu Chiang
Yi Wen Chen
Chien Ming Lai
Cheng Hsien Chou
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW097132536A priority Critical patent/TWI370519B/en
Publication of TW201010008A publication Critical patent/TW201010008A/en
Application granted granted Critical
Publication of TWI370519B publication Critical patent/TWI370519B/en

Links

TW097132536A 2008-08-26 2008-08-26 Metal gate transistor and method for fabricating the same TWI370519B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW097132536A TWI370519B (en) 2008-08-26 2008-08-26 Metal gate transistor and method for fabricating the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW097132536A TWI370519B (en) 2008-08-26 2008-08-26 Metal gate transistor and method for fabricating the same

Publications (2)

Publication Number Publication Date
TW201010008A TW201010008A (en) 2010-03-01
TWI370519B true TWI370519B (en) 2012-08-11

Family

ID=44828031

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097132536A TWI370519B (en) 2008-08-26 2008-08-26 Metal gate transistor and method for fabricating the same

Country Status (1)

Country Link
TW (1) TWI370519B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7923321B2 (en) * 2008-11-03 2011-04-12 Taiwan Semiconductor Manufacturing Company, Ltd. Method for gap filling in a gate last process
US8872286B2 (en) 2011-08-22 2014-10-28 United Microelectronics Corp. Metal gate structure and fabrication method thereof

Also Published As

Publication number Publication date
TW201010008A (en) 2010-03-01

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