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TWI370370B - Virtual metrology system and method applied on chemical vapor deposition process - Google Patents

Virtual metrology system and method applied on chemical vapor deposition process

Info

Publication number
TWI370370B
TWI370370B TW096151622A TW96151622A TWI370370B TW I370370 B TWI370370 B TW I370370B TW 096151622 A TW096151622 A TW 096151622A TW 96151622 A TW96151622 A TW 96151622A TW I370370 B TWI370370 B TW I370370B
Authority
TW
Taiwan
Prior art keywords
vapor deposition
chemical vapor
deposition process
method applied
metrology system
Prior art date
Application number
TW096151622A
Other languages
Chinese (zh)
Other versions
TW200928843A (en
Inventor
Ching Shun Chen
Chun I Chu
Tze Chin Chou
Original Assignee
Ind Tech Res Inst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ind Tech Res Inst filed Critical Ind Tech Res Inst
Priority to TW096151622A priority Critical patent/TWI370370B/en
Publication of TW200928843A publication Critical patent/TW200928843A/en
Application granted granted Critical
Publication of TWI370370B publication Critical patent/TWI370370B/en

Links

TW096151622A 2007-12-31 2007-12-31 Virtual metrology system and method applied on chemical vapor deposition process TWI370370B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW096151622A TWI370370B (en) 2007-12-31 2007-12-31 Virtual metrology system and method applied on chemical vapor deposition process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW096151622A TWI370370B (en) 2007-12-31 2007-12-31 Virtual metrology system and method applied on chemical vapor deposition process

Publications (2)

Publication Number Publication Date
TW200928843A TW200928843A (en) 2009-07-01
TWI370370B true TWI370370B (en) 2012-08-11

Family

ID=44864254

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096151622A TWI370370B (en) 2007-12-31 2007-12-31 Virtual metrology system and method applied on chemical vapor deposition process

Country Status (1)

Country Link
TW (1) TWI370370B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107346286A (en) * 2017-07-03 2017-11-14 武汉大学 A kind of Software Defects Predict Methods based on core principle component analysis and extreme learning machine
CN112002114A (en) * 2020-07-22 2020-11-27 温州大学 Electromechanical equipment wireless data acquisition system and method based on 5G-ZigBee communication
TWI889000B (en) * 2023-03-24 2025-07-01 日商斯庫林集團股份有限公司 Analysis device, analysis method and analysis program

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102841979A (en) * 2012-06-26 2012-12-26 广州市新之地环保产业有限公司 Sludge reflux prediction method based on PCA-GA-SVR (principal component analysis-genetic algorithm-support vector regression)
TWI612433B (en) 2016-11-17 2018-01-21 財團法人工業技術研究院 Ensemble learning prediction aparatus and method, and non-transitory computer-readable storage medium
CN112906155B (en) * 2021-02-05 2023-07-07 深圳市浦联智能科技有限公司 Virtual measurement method for injection molding information
KR20230008543A (en) 2021-07-07 2023-01-16 삼성전자주식회사 Semiconductor process modeling system and method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107346286A (en) * 2017-07-03 2017-11-14 武汉大学 A kind of Software Defects Predict Methods based on core principle component analysis and extreme learning machine
CN107346286B (en) * 2017-07-03 2020-05-12 武汉大学 A Software Defect Prediction Method Based on Kernel Principal Component Analysis and Extreme Learning Machine
CN112002114A (en) * 2020-07-22 2020-11-27 温州大学 Electromechanical equipment wireless data acquisition system and method based on 5G-ZigBee communication
TWI889000B (en) * 2023-03-24 2025-07-01 日商斯庫林集團股份有限公司 Analysis device, analysis method and analysis program

Also Published As

Publication number Publication date
TW200928843A (en) 2009-07-01

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