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TWI367595B - Variable filter element, variable filter module and fabrication method thereof - Google Patents

Variable filter element, variable filter module and fabrication method thereof

Info

Publication number
TWI367595B
TWI367595B TW097115239A TW97115239A TWI367595B TW I367595 B TWI367595 B TW I367595B TW 097115239 A TW097115239 A TW 097115239A TW 97115239 A TW97115239 A TW 97115239A TW I367595 B TWI367595 B TW I367595B
Authority
TW
Taiwan
Prior art keywords
variable filter
fabrication method
filter element
filter module
module
Prior art date
Application number
TW097115239A
Other languages
English (en)
Other versions
TW200901549A (en
Inventor
Xiaoyu Mi
Takeaki Shimanouchi
Masahiko Imai
Satoshi Ueda
Yoshio Satoh
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Publication of TW200901549A publication Critical patent/TW200901549A/zh
Application granted granted Critical
Publication of TWI367595B publication Critical patent/TWI367595B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/20—Frequency-selective devices, e.g. filters
    • H01P1/201—Filters for transverse electromagnetic waves
    • H01P1/2013—Coplanar line filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/20—Frequency-selective devices, e.g. filters
    • H01P1/201—Filters for transverse electromagnetic waves
    • H01P1/203—Strip line filters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P11/00—Apparatus or processes specially adapted for manufacturing waveguides or resonators, lines, or other devices of the waveguide type
    • H01P11/007—Manufacturing frequency-selective devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/01—Frequency selective two-port networks
    • H03H7/0123—Frequency selective two-port networks comprising distributed impedance elements together with lumped impedance elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/01—Frequency selective two-port networks
    • H03H7/0153—Electrical filters; Controlling thereof
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/01—Frequency selective two-port networks
    • H03H7/17—Structural details of sub-circuits of frequency selective networks
    • H03H7/1741—Comprising typical LC combinations, irrespective of presence and location of additional resistors
    • H03H7/175—Series LC in series path
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/01—Frequency selective two-port networks
    • H03H7/17—Structural details of sub-circuits of frequency selective networks
    • H03H7/1741—Comprising typical LC combinations, irrespective of presence and location of additional resistors
    • H03H7/1775—Parallel LC in shunt or branch path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/40—Structural combinations of variable capacitors with other electric elements not covered by this subclass, the structure mainly consisting of a capacitor, e.g. RC combinations

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Acoustics & Sound (AREA)
  • Filters And Equalizers (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
  • Micromachines (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
TW097115239A 2007-04-27 2008-04-25 Variable filter element, variable filter module and fabrication method thereof TWI367595B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007118583A JP4542117B2 (ja) 2007-04-27 2007-04-27 可変フィルタ素子、可変フィルタモジュール、およびこれらの製造方法

Publications (2)

Publication Number Publication Date
TW200901549A TW200901549A (en) 2009-01-01
TWI367595B true TWI367595B (en) 2012-07-01

Family

ID=39760632

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097115239A TWI367595B (en) 2007-04-27 2008-04-25 Variable filter element, variable filter module and fabrication method thereof

Country Status (6)

Country Link
US (1) US20080266029A1 (zh)
EP (2) EP2101412A1 (zh)
JP (1) JP4542117B2 (zh)
KR (1) KR100889218B1 (zh)
CN (1) CN101295809B (zh)
TW (1) TWI367595B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI738366B (zh) * 2019-06-10 2021-09-01 日商村田製作所股份有限公司 濾波器模組

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010135614A (ja) * 2008-12-05 2010-06-17 Fujitsu Ltd 可変容量素子
JP5294013B2 (ja) * 2008-12-25 2013-09-18 富士通株式会社 フィルタ、通信モジュール、および通信装置
US7863752B2 (en) * 2009-02-25 2011-01-04 Capella Photonics, Inc. MEMS device with integrated via and spacer
JP2010220139A (ja) 2009-03-19 2010-09-30 Fujitsu Ltd フィルタ、フィルタリング方法、および通信装置
EP2416330A4 (en) * 2009-03-30 2013-10-16 Murata Manufacturing Co MODULE OF VARIABLE CAPACITY AND CORRESPONDING SWITCH MODULE
US8362853B2 (en) * 2009-06-19 2013-01-29 Qualcomm Incorporated Tunable MEMS resonators
JP5240136B2 (ja) * 2009-09-09 2013-07-17 富士通株式会社 電子部品およびその製造方法
JP5428771B2 (ja) * 2009-11-06 2014-02-26 富士通株式会社 可変分布定数線路、可変フィルタ、および通信モジュール
JP5418316B2 (ja) * 2010-03-11 2014-02-19 富士通株式会社 Ｍｅｍｓデバイス
JP5565091B2 (ja) * 2010-05-19 2014-08-06 富士通株式会社 可変バンドパスフィルタ及び通信装置
JP5703813B2 (ja) 2011-02-16 2015-04-22 セイコーエプソン株式会社 波長可変干渉フィルター、光モジュール、及び光分析装置
JP2012191521A (ja) 2011-03-11 2012-10-04 Fujitsu Ltd 可変フィルタ装置および通信装置
WO2013021425A1 (ja) * 2011-08-10 2013-02-14 富士通株式会社 可変容量素子を有する電子機器とその製造方法
US9373447B2 (en) 2011-08-19 2016-06-21 Cavendish Kinetics, Inc. Routing of MEMS variable capacitors for RF applications
KR101937781B1 (ko) * 2011-09-02 2019-01-11 카벤디시 키네틱스, 인크. Ｒｆ ｍｅｍｓ 분리, 직렬 및 션트 dvc, 및 소형 ｍｅｍｓ
WO2015017743A1 (en) * 2013-08-01 2015-02-05 Cavendish Kinetics, Inc Dvc utilizing mems resistive switches and mim capacitors
CN104854792B (zh) * 2013-10-17 2018-11-06 株式会社村田制作所 高频电路
CN103928731A (zh) * 2014-04-30 2014-07-16 华为技术有限公司 Tem模介质滤波器和制造方法
US9811205B2 (en) * 2015-09-29 2017-11-07 Synaptics Incorporated Variable time anti-aliasing filter
EP3378079A1 (en) 2015-11-16 2018-09-26 Cavendish Kinetics, Inc. Esd protection of mems rf applications
WO2019217892A1 (en) 2018-05-10 2019-11-14 Advanced Energy Industries, Inc. Precision digital to analog conversion in the presence of variable and uncertain fractional bit contributions
WO2020020336A1 (zh) * 2018-07-27 2020-01-30 京东方科技集团股份有限公司 功能面板及其制造方法、终端
US11335238B2 (en) 2018-07-27 2022-05-17 Chongqing Boe Optoelectronics Technology Co., Ltd. Signal transmission method and apparatus, and display device
CN110764639B (zh) 2018-07-27 2024-08-27 京东方科技集团股份有限公司 功能面板及其制造方法、终端
WO2020020347A1 (zh) * 2018-07-27 2020-01-30 京东方科技集团股份有限公司 功能面板及其制造方法、终端
TWI835020B (zh) * 2019-05-13 2024-03-11 美商先驅能源工業公司 在可變和不確定的小數位元貢獻的存在下的精確數位至類比轉換
CN117852472A (zh) * 2022-09-30 2024-04-09 腾讯科技（深圳）有限公司 芯片版图的空桥布设方法、装置、设备及存储介质

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5374909A (en) * 1992-02-28 1994-12-20 Ngk Insulators, Ltd. Stripline filter having internal ground electrodes
US5408053A (en) * 1993-11-30 1995-04-18 Hughes Aircraft Company Layered planar transmission lines
JPH09199970A (ja) * 1996-01-19 1997-07-31 Murata Mfg Co Ltd 可変フィルタ
JPH10242794A (ja) 1997-02-27 1998-09-11 Kyocera Corp 表面実装型容量内蔵圧電共振子
US6617943B1 (en) * 2001-07-27 2003-09-09 Applied Micro Circuits Corporation Package substrate interconnect layout for providing bandpass/lowpass filtering
US6717496B2 (en) * 2001-11-13 2004-04-06 The Board Of Trustees Of The University Of Illinois Electromagnetic energy controlled low actuation voltage microelectromechanical switch
JP2003234606A (ja) * 2002-02-07 2003-08-22 Nippon Telegr & Teleph Corp <Ntt> マイクロ波伝送線路
JP3869756B2 (ja) 2002-05-16 2007-01-17 アルプス電気株式会社 結合度調整可能な共振フィルタ
JP2004040257A (ja) * 2002-06-28 2004-02-05 Nippon Telegr & Teleph Corp <Ntt> 高速信号線
US7084724B2 (en) * 2002-12-31 2006-08-01 The Regents Of The University Of California MEMS fabrication on a laminated substrate
CA2418674A1 (en) * 2003-02-07 2004-08-07 Tak Shun Cheung Transmission lines and transmission line components with wavelength reduction and shielding
JP2004363961A (ja) * 2003-06-05 2004-12-24 Sony Corp 高周波信号フィルタ装置および電子機器
JP4109182B2 (ja) * 2003-11-10 2008-07-02 株式会社日立メディアエレクトロニクス 高周波ｍｅｍｓスイッチ
JP2005277675A (ja) * 2004-03-24 2005-10-06 Mitsubishi Electric Corp 高周波スイッチ装置とその製造方法
JP4638711B2 (ja) * 2004-10-27 2011-02-23 株式会社エヌ・ティ・ティ・ドコモ 共振器
US7276991B2 (en) * 2005-09-09 2007-10-02 Innovative Micro Technology Multiple switch MEMS structure and method of manufacture
EP1770820B1 (en) * 2005-09-28 2009-03-11 Siemens Milltronics Process Instruments Inc. Galvanic isolation mechanism for a planar circuit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI738366B (zh) * 2019-06-10 2021-09-01 日商村田製作所股份有限公司 濾波器模組

Also Published As

Publication number Publication date
US20080266029A1 (en) 2008-10-30
EP1986319A3 (en) 2008-12-03
KR100889218B1 (ko) 2009-03-17
JP4542117B2 (ja) 2010-09-08
TW200901549A (en) 2009-01-01
JP2008278147A (ja) 2008-11-13
CN101295809A (zh) 2008-10-29
EP2101412A1 (en) 2009-09-16
EP1986319A2 (en) 2008-10-29
KR20080096441A (ko) 2008-10-30
CN101295809B (zh) 2012-11-14

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MM4A Annulment or lapse of patent due to non-payment of fees