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TWI367331B - Probe card assembly and probes therein - Google Patents

Probe card assembly and probes therein

Info

Publication number
TWI367331B
TWI367331B TW097122940A TW97122940A TWI367331B TW I367331 B TWI367331 B TW I367331B TW 097122940 A TW097122940 A TW 097122940A TW 97122940 A TW97122940 A TW 97122940A TW I367331 B TWI367331 B TW I367331B
Authority
TW
Taiwan
Prior art keywords
probes
probe card
card assembly
assembly
probe
Prior art date
Application number
TW097122940A
Other languages
English (en)
Other versions
TW201000913A (en
Inventor
Cheng Chin Ni
Original Assignee
King Yuan Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by King Yuan Electronics Co Ltd filed Critical King Yuan Electronics Co Ltd
Priority to TW097122940A priority Critical patent/TWI367331B/zh
Priority to US12/199,828 priority patent/US7629803B1/en
Publication of TW201000913A publication Critical patent/TW201000913A/zh
Application granted granted Critical
Publication of TWI367331B publication Critical patent/TWI367331B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06772—High frequency probes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
TW097122940A 2008-06-19 2008-06-19 Probe card assembly and probes therein TWI367331B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW097122940A TWI367331B (en) 2008-06-19 2008-06-19 Probe card assembly and probes therein
US12/199,828 US7629803B1 (en) 2008-06-19 2008-08-28 Probe card assembly and test probes therein

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW097122940A TWI367331B (en) 2008-06-19 2008-06-19 Probe card assembly and probes therein

Publications (2)

Publication Number Publication Date
TW201000913A TW201000913A (en) 2010-01-01
TWI367331B true TWI367331B (en) 2012-07-01

Family

ID=41394271

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097122940A TWI367331B (en) 2008-06-19 2008-06-19 Probe card assembly and probes therein

Country Status (2)

Country Link
US (1) US7629803B1 (zh)
TW (1) TWI367331B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI641841B (zh) * 2013-12-31 2018-11-21 美商色拉頓系統公司 用於測試一受試裝置之探針設備、經結構設計以在用於測試一受試裝置之一探針設備中使用之探針心及用於將一探針心閂至一裝置之方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI367329B (en) * 2008-06-19 2012-07-01 King Yuan Electronics Co Ltd Probe card assembly
TWI368743B (en) * 2008-11-04 2012-07-21 King Yuan Electronics Co Ltd Probe card assembly and probes therein
TWI425220B (zh) * 2011-03-11 2014-02-01 Mpi Corp Cantilever probe card

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2632136B2 (ja) * 1994-10-17 1997-07-23 日本電子材料株式会社 高温測定用プローブカード
US6143668A (en) * 1997-09-30 2000-11-07 Intel Corporation KLXX technology with integrated passivation process, probe geometry and probing process
US6478596B2 (en) * 1998-07-09 2002-11-12 Advantest Corporation Semiconductor component mounting apparatus
US6137297A (en) * 1999-01-06 2000-10-24 Vertest Systemsn Corp. Electronic test probe interface assembly and method of manufacture
WO2003100445A2 (en) * 2002-05-23 2003-12-04 Cascade Microtech, Inc. Probe for testing a device under test
US7057404B2 (en) * 2003-05-23 2006-06-06 Sharp Laboratories Of America, Inc. Shielded probe for testing a device under test
TWM259163U (en) * 2004-05-14 2005-03-11 Via Tech Inc Covering structure of probe card
US7451646B2 (en) * 2005-07-28 2008-11-18 The Regents Of The University Of California Device and method for resonant high-speed microscopic impedance probe

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI641841B (zh) * 2013-12-31 2018-11-21 美商色拉頓系統公司 用於測試一受試裝置之探針設備、經結構設計以在用於測試一受試裝置之一探針設備中使用之探針心及用於將一探針心閂至一裝置之方法

Also Published As

Publication number Publication date
US7629803B1 (en) 2009-12-08
US20090315576A1 (en) 2009-12-24
TW201000913A (en) 2010-01-01

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