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TWI366921B - Semiconductor photodetector - Google Patents

Semiconductor photodetector

Info

Publication number
TWI366921B
TWI366921B TW097133566A TW97133566A TWI366921B TW I366921 B TWI366921 B TW I366921B TW 097133566 A TW097133566 A TW 097133566A TW 97133566 A TW97133566 A TW 97133566A TW I366921 B TWI366921 B TW I366921B
Authority
TW
Taiwan
Prior art keywords
semiconductor photodetector
photodetector
semiconductor
Prior art date
Application number
TW097133566A
Other languages
English (en)
Other versions
TW200945607A (en
Inventor
Kikuchi Matobu
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of TW200945607A publication Critical patent/TW200945607A/zh
Application granted granted Critical
Publication of TWI366921B publication Critical patent/TWI366921B/zh

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/20Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/40Optical elements or arrangements
    • H10F77/413Optical elements or arrangements directly associated or integrated with the devices, e.g. back reflectors
TW097133566A 2008-04-28 2008-09-02 Semiconductor photodetector TWI366921B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008117603A JP5003585B2 (ja) 2008-04-28 2008-04-28 半導体受光素子

Publications (2)

Publication Number Publication Date
TW200945607A TW200945607A (en) 2009-11-01
TWI366921B true TWI366921B (en) 2012-06-21

Family

ID=41214162

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097133566A TWI366921B (en) 2008-04-28 2008-09-02 Semiconductor photodetector

Country Status (3)

Country Link
US (1) US7741691B2 (zh)
JP (1) JP5003585B2 (zh)
TW (1) TWI366921B (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013183178A1 (ja) * 2012-06-05 2013-12-12 浜松ホトニクス株式会社 光検出器
DE112017007177T5 (de) 2017-03-06 2019-12-05 Sumitomo Electric Industries, Ltd. Optisches modul

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01205573A (ja) * 1988-02-12 1989-08-17 Mitsubishi Electric Corp 半導体受光素子
JPH02106979A (ja) * 1988-10-17 1990-04-19 Mitsubishi Electric Corp 波長分波型光検出器
JPH02226776A (ja) * 1989-02-28 1990-09-10 Canon Inc 波長選択光検出器
JPH03152977A (ja) * 1989-11-09 1991-06-28 Nec Corp 半導体受光素子
JPH04116977A (ja) 1990-09-07 1992-04-17 Fujitsu Ltd 半導体受光素子
JPH04249382A (ja) * 1991-02-05 1992-09-04 Nec Corp 半導体受光素子
JPH04261072A (ja) * 1991-02-14 1992-09-17 Mitsubishi Electric Corp 半導体受光素子
JPH0653537A (ja) * 1992-07-31 1994-02-25 Japan Energy Corp 半導体受光素子
JPH07326820A (ja) * 1994-05-30 1995-12-12 Mitsubishi Electric Corp 波長可変半導体レーザ装置
JPH1012913A (ja) * 1996-06-21 1998-01-16 Mitsubishi Electric Corp 半導体受光素子
CA2307745A1 (en) * 1999-07-15 2001-01-15 Sumitomo Electric Industries, Ltd. Photodiode
JP4331428B2 (ja) 2001-12-13 2009-09-16 富士通株式会社 サブバンド間遷移量子井戸型光検知装置
US6894322B2 (en) * 2002-02-11 2005-05-17 Jds Uniphase Corporation Back illuminated photodiodes
JP2004241533A (ja) 2003-02-05 2004-08-26 Nippon Sheet Glass Co Ltd 半導体受光素子
JP2005159002A (ja) * 2003-11-26 2005-06-16 Seiko Epson Corp 受光素子、光モジュール、及び光伝送装置
JP2006179573A (ja) * 2004-12-21 2006-07-06 Sumitomo Electric Ind Ltd 半導体レーザ素子およびその製造方法
JP2007184410A (ja) * 2006-01-06 2007-07-19 Sumitomo Electric Ind Ltd 半導体受光素子およびその製造方法

Also Published As

Publication number Publication date
US7741691B2 (en) 2010-06-22
JP5003585B2 (ja) 2012-08-15
JP2009267251A (ja) 2009-11-12
TW200945607A (en) 2009-11-01
US20090267169A1 (en) 2009-10-29

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