TWI357142B - Inverted leadframe on substrate - Google Patents
Inverted leadframe on substrate Download PDFInfo
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- TWI357142B TWI357142B TW096149606A TW96149606A TWI357142B TW I357142 B TWI357142 B TW I357142B TW 096149606 A TW096149606 A TW 096149606A TW 96149606 A TW96149606 A TW 96149606A TW I357142 B TWI357142 B TW I357142B
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- top surface
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- H10W72/884—
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- H10W90/732—
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- Lead Frames For Integrated Circuits (AREA)
Description
九、發明說明: 【發明所屬之技術領域】 本發明係關於一種半導體封裝及製作具有複數個晶粒之 半導體封裝之方法,其中一個晶粒附接至一倒置導線架而 另一晶粒附接至一基板。該導線架隨後附接至該基板。 本申請案主張2006年12月22曰申請之同在申請中之美國 臨時申請案第60/871,509號之權利,該案以引用的方式併入 本文中。 【先前技術】 基於當前之封裝趨勢,一堆疊式晶粒封裝通常包含複數 個封裝成-垂直堆疊之晶粒 '组裝該堆疊式晶粒封裝之習 用方法牽扯將—較小晶粒置於—較大晶粒之頂部上㈣成 —金字塔結構,以使每-晶粒不會座落在緊接著其下方之 晶粒之周邊上,在該周邊處將置放線接合。 备使用需要晶粒堆疊 , ,w '叫、W即,耵頻(l· j)與-較大晶粒(例如,專用積體電路(Asic)晶粒)拥 在-起且該較小晶粒具有導體或電阻限制時,會出現一 題。在此類封裝中,較佳之情形係將RF晶粒連接至一基板 線接合應保持盡可能短。然而,習用晶粒堆疊方法二要 較小RF晶粒堆疊在較大ASI(:晶粒IX. INSTRUCTIONS OF THE INVENTION: TECHNICAL FIELD The present invention relates to a semiconductor package and a method of fabricating a semiconductor package having a plurality of dies, wherein one die is attached to one inverted lead frame and the other die is attached To a substrate. The lead frame is then attached to the substrate. The present application claims the benefit of U.S. Provisional Application Serial No. 60/871,509, the entire disclosure of which is incorporated herein by reference. [Prior Art] Based on current packaging trends, a stacked die package typically includes a plurality of packages packaged in a vertical stack. The conventional method of assembling the stacked die package involves placing a smaller die. The top of the larger die is (four) formed into a pyramid structure such that each die does not land on the periphery of the die immediately below it, where the placement wires are joined. It is necessary to use a die stack, w 'call, W, ie, 耵 (l·j) and - a larger die (for example, a dedicated integrated circuit (Asic) die), and the smaller crystal A problem arises when the grain has a conductor or resistance limit. In such packages, it is preferred to connect the RF die to a substrate. Wire bonding should be kept as short as possible. However, conventional die stacking method 2 requires smaller RF die stacking in larger ASI (: grain
粒相對於ASICH 頂。卩上。因此,該RF ,于於ASICa日粒達—步遠離基板將有—較長線接合。 形成一堆疊式晶粒封裳習 封# &壯+ . 乃凌T因其需要連續實 ,^、裝中所牵扯之過程步驟而係耗時的。 圖刚顯示—用於植裝.一半導體封裝之習用方法在 127888.doc 1357142The grain is relative to the top of the ASICH.卩上. Therefore, the RF, in the ASICa day, will have a longer line junction away from the substrate. Forming a stacked die seals and dressing seals # & Zhuang + . Nai Ling T is time consuming because of the need for continuous real, ^, the process steps involved in the installation. Figure just shows - used for planting. A conventional method of semiconductor packaging at 127888.doc 1357142
驟ci中,使用晶粒附接環氧樹脂將第一晶粒(即,ASIC晶 粒)附接至一基板。接下來,在步驟C2f,將第_晶粒線 接合至該基板。然後,在步驟C3中,使用晶粒附接環氧樹 脂將第二晶粒(即,RF晶粒)附接至第一晶粒。接下來在 步驟C4中’將第二晶粒線接合至該基板。然後,在步驟 C 5中,使該基板及經線接合之晶粒成型。在模製後,在步 驟C6中’將銲錫球附接至半導體封裝。在步驟〇中將 該封裝單個化。如上所述,習用方法牽扯以連續次序發生 的過程步驟。因此,需要改良該等過程以能夠同時地進行 某些步驟以便可減少製造時間。 【發明内容】 本發明之實例性實施例克服上述缺點及以上未閣釋之其 他缺點。同樣,本發明未必需要克服上述缺點,且本發明 之—實例性實施例可能不克服上述問題之任一者。In step ci, the first die (i.e., ASIC grain) is attached to a substrate using a die attach epoxy. Next, in step C2f, the _th grain line is bonded to the substrate. Then, in step C3, the second die (i.e., RF die) is attached to the first die using a die attach epoxy. Next, a second die line is bonded to the substrate in step C4. Then, in step C5, the substrate and the warp-bonded crystal grains are molded. After molding, the solder balls are attached to the semiconductor package in step C6. The package is singulated in step 〇. As mentioned above, conventional methods involve process steps that occur in sequential order. Therefore, there is a need to improve such processes to enable certain steps to be performed simultaneously so that manufacturing time can be reduced. SUMMARY OF THE INVENTION Exemplary embodiments of the present invention overcome the above disadvantages and other disadvantages of the above. Also, the present invention is not necessarily required to overcome the disadvantages described above, and the exemplary embodiments of the present invention may not overcome any of the above problems.
一種根據本發明之一實施例之半導體封裝包含:一基 板,其具有一頂表面及一底表面;一導線架,其具有一頂 晶粒襯墊表面、底晶粒襯墊表面及複數個導線其中該導 線架附接至該基板之頂表面;一第一晶粒,其具有一頂表 面及一底表面’其中該底表面附接至該基板之頂表面且該 第一晶粒電連接至該基板;一第二晶粒,其具有一頂表面 及一底表面’其中該頂表面附接至該導線架之底晶粒襯墊 表面且忒第二晶粒電連接至該導線架;一囊封劑,其覆蓋 該導線架及基板之至少一部分。 該半導體封裝亦可包含 一具有一頂表面及一底表面之 第 127888.doc 1357142 三晶粒,其_該底表面附接至該基板之頂表面且該第三晶 粒電連接至該基板。 該半導體封裝亦可包含一具有一頂表面及一底表面之第 四晶粒,其中該頂表面附接至該第二晶粒之頂底表面且該 第四晶粒電連接至該導線架。 該半導體封裝亦彳包含一具冑一頂纟面及一底表面之第 三晶粒,其中該底表面附接至該第一晶粒之頂表面且該第 二晶粒電連接至該基板。 該半導體封裝亦可包含一具有一頂表面及一底表面之第 四曰曰粒,其令該頂表面附接至該第二晶粒之底表面且該第 四晶粒電連接至該導線架。 該半導體封裝亦可包含:一第三晶粒,其具有一頂表面 及底表面’其中該頂表面附接至該第二晶粒之底表面; 及複數個接合線’其連接於該第三晶粒之底表面與該導線 架上的導線之間。 該半導體封裝亦π包含使囊封劑覆蓋該導線架之整個頂 晶粒補*塾表面。 該半導體封裝亦可包含使囊封劑覆蓋除複數個區域之外 的該導線架之整個頂晶粒襯墊表面。 #半導n封裝亦可包含—經由該複數個區域連接至該導 線架之第二半導體封裝。 ”玄半導體封裝亦可包含使該導線架之頂晶粒襯塾表面具 有、、里钱亥j之區域且使該囊封劑覆蓋該經触刻區域而不覆 蓋該頂晶粒襯墊表面之剩餘部分。 127888.doc 1357142 —種根據本發明之第二實施例之半導體封裝包含:一導 線架’其具有-頂晶粒觀墊表面、底晶粒概塾表面及複數 個導線,基板,其具有一頂表面'_底表面及一空腔, 其中該導線架附接至該基板之頂表面;一第一晶粒,其具 ‘ 冑一頂表面及-底表面,其中該底表面附接至該基板之空 、 腔且該第一晶粒電連接至該基板;一第二晶粒,其具有一 頂表面及-底表面,其中該頂表面附接至該導線架之底晶 φ 粒襯塾表面且該第二晶粒電連接至該導線架;一囊封劑, 其覆蓋該導線架及基板之至少一部分。 根據本發明之第二實施例之半導體封裝亦可包含一具有 頂表面及一底表面之第三晶粒,其中該底表面附接至該 • 基板之空腔且該第三晶粒電連接至該基板。 根據本發明之第二實施例之半導體封裝亦可包含一具有 頂表面及一底表面之第四晶粒,其中該頂表面附接至該 第二晶粒之底表面且該第四晶粒電連接至該導線架。 • 根據本發明之第二實施例之半導體封裝亦可包含一具有 一頂表面及一底表面之第三晶粒,其中該底表面附接至該 第一晶粒之頂表面且該第三晶粒電連接至該基板。 根據本發明之第二實施例之半導體封裝亦可包含一具有 . 一頂表面及一底表面之第四晶粒’其中該頂表面附接至該 第二晶粒之底表面且該第四晶粒電連接至該導線架。 根據本發明之第二實施例之半導體封裝亦可包含—具有 一頂表面及一底表面之第三晶粒,其中該頂表面附接至該 第二晶粒之底表面且該第三晶粒電連接至該導線架。 127888.doc -10- 1357142 根據本發明之第二實施例之丰導^駐+ 牛導體封裝亦可包含使囊封 劑覆蓋該導線架之整個頂晶粒襯墊表面。 根據本發明之第二實施例之半導體封裝亦可包含使囊封劑 覆蓋除複數個區域之外的該導線架之整個頂晶粒襯塾表面。 根據本發明之第二實施例之半導體封裝亦可包含一經由 該複數個區域連接至該導線架之第二半導體封裝。. 根據本發明之第二實施例之半導體封裝亦可包含使該導線 =之頂晶粒襯録面包含—經半㈣之區域錢該囊封劑覆 蓋該經半钱刻區域而不覆蓋該頂晶粒襯墊表面之剩餘部分。 一種根據本發明之一實施例之製造一半導體封裝之方法 包含(a)提供一具有一頂表面及一底表面之基板;b)提供一 具有一頂晶粒襯墊表面、一底晶粒襯墊表面及複數個導線 之導線架;(C)將一具有一頂表面及一底表面之第一晶粒附 接至該基板,其中該第一晶粒之底表面附接至該基板之頂 表面且該第一晶粒電連接至該基板;(d)將一具有一頂表面 及一底表面之第二晶粒附接至該導線架,其中該第二晶粒 之頂表面附接至該導線架之底晶粒襯墊表面且該第二晶粒 電連接至該導線架;(e)將該導線架附接至該基板之頂表 面;及(f)囊纣該導線架及基板之至少一部分。 製造該半導體封裝之方法亦可包含將銲錫球附接至該基 板且將該等半導體封裝單個化成個別半導體封裝。 製造該半導體封裝之方法亦可包含使步驟((^及(d)同時 地發生。 一種根據本發明之一第二實施例之製造複數個半導體封 I27888.doc -II - 1357142 裝之方法可包含(a)提供一具有一頂表面及一底表面之基板 條,b)提供一具有一頂晶粒襯墊表面、一底晶粒概墊表面 及複數個導緣之導線架條;(0將具有頂表面及底表面之複 數個第一晶粒附接至該基板條,其中該等第一晶粒之底表 面附接至該基板條之頂表面且該等第一晶粒電連接至該基 板條;(d)將具有頂表面及底表面之複數個第二晶粒附接至 該導線架,其中該等第二晶粒之頂表面附接至該導線架條 之底晶粒襯墊表面且該等第二晶粒電連接至該導線架條; (e)將該導線架條附接至該基板條之頂表面;及⑴囊封該 導線架條及基板條之至少一部分。 製造該半導體封裝之第二方法亦可包含將銲錫球附接至 該基板條且將該等半導體封裝單個化成個別半導體封裝。 製造該半導體封裝之第二方法亦可包含使步驟⑷ 同時地發生。 【實施方式】 以下將參照圖式以實例性實施例詳細闡釋本發明。所聞 釋之實例性實施例意欲幫助理解本發明而非意欲以任何方 式限制本發明之範.圍。在所有用於解釋該等實例性實施例 之圖式中,具有相同功能之組件攜載相同之參考編 而將省略對該等組件之重複解释。 本發明之半導體封裝包含一附接至一基板之倒置 架。該倒置導線架及基板之每一者固持一個或多個晶粒、: 當將該倒置導線架附接至該基板時,在該倒置導線架㈣ 基板之間形成-封㈣域且料線架上及該基板上相庫= 127888.doc 1357142 一個或多個晶粒彼此面對。藉由一存在於該基板上或該導 線架之導線上之銲料連接該導線架及基板。該銲料可預先 印製到該導線架上或該基板上,囊封該導線架及基板之至 少一部分之成型材料亦可將兩個結構固持在適當位置。 圖ΙΑ、2A及2B顯示本發明之半導體封裝1〇之一實施例 之實例。該封裝包含:一基板100,其具有一頂表面1〇〇& 及一底表面100b,· 一導線架200,其具有一晶粒襯墊部分 201及複數個導線220 ; —第一半導體晶粒3〇〇,其具有一 頂表面300a及一底表面300b,其中底表面3〇〇b附接至基板 100之頂表面100a ;及一第二半導體晶粒4〇〇,其具有一頂 表面400a及一底表面400b,其中頂表面4〇〇a附接至導線架 200之底晶粒襯墊表面201b。封裝1〇亦可包含一具有一頂 表面500a及一底表面500b之第三半導體晶粒5〇〇,其中底 表面500b附接至第一半導體晶粒3〇〇之頂表面3〇〇a。導線 架2 0 0具有一晶粒襯塾部分2 〇 1、第一傾斜部分2 〇 2、中間 部分203、第二傾斜部分204及底部分205。第一傾斜部分 202將晶粒襯墊部分201鄰接至中間部分2〇3,且第二傾斜 部分204將中間部分203鄰接至底部分205以形成一雙不置 框架,如圖ΙΑ、2A及2B中所示。晶粒襯塾部分2〇1具有一 頂晶粒襯整部分201 a及一底晶粒襯塾部分2〇 1 b。中間部分 203、第二傾斜部分204及底部分205形成導線架2〇〇之導 線。應瞭解,儘管在該實施例中所闡述之導線架具有一雙 下置框架’但亦可使用多於兩個下置件之導線架。 第一半導體晶粒300藉由黏合劑7〇〇附接至基板1〇〇,以 127888.doc •13- 1357142 使其底表面300b面對基板100之頂表面1〇〇&。第一半導體 晶粒300藉助自第一半導體晶粒3〇〇之頂表面3〇〇3延伸至基 板100之頂表面l〇〇a之線接合310電連接至基板1〇〇。第二 半導體晶粒400藉由黏合劑700附接至導線架2〇〇之底晶粒 襯墊部分201a。第二半導體晶粒400藉助自第二半導體晶 粒400之底表面400b延伸至導線架200之中間部分203之線 接合410電連接至導線架2〇〇之中間部分203。第三半導體 φ 晶粒500藉由黏合劑700附接至第一半導體晶粒300之頂表 面300a。線接合5 1〇將第三半導體晶粒5〇0電連接至基板 100。銲錫球800附接至基板100之底表面i〇〇b。除了暴露 至外部的頂晶粒襯塾表面201a外,導線架200由成型化合 物900囊封。因為導線架200之頂晶粒襯墊表面2〇la暴露至 外部,因此增強熱耗散。應瞭解,儘管在該實施例中將線 接合闡釋為一用於在晶粒與其相應基板或導線架之間形成 電連接之手段’但其他形式之電連接(例如,圖5中所示之 覆晶連接)亦係可能的。 在該特定實施例中,將三個半導體晶粒400中之最大者 附接至導線架200。由於兩個較小之半導體晶粒300、500 - 附接至基板100而非導線架,因此與習用半導體封裝中垂 • 直堆疊三個晶粒300、400、500的情況相比,與較小晶粒 3 00、500相關聯之接合線可以更短。 圖1B係一導線架200之拐角部分201c之替代實施例之放 大圖。在圖1B中之實施例中,在導線架200之拐角部分 201 c中蝕刻(例如,半蝕刻)一缺口 240。缺口 240可改良成 127888.doc •14· 型材料900與導線架200之嚙合且因此可更好將導線架2〇〇 固定至基板100。應瞭解,儘管缺口 24〇在該替代實施例中 閣釋為係在拐角部分201c處蝕刻,但缺口 24〇可形成在導 線架200中可促進成型材料9〇〇與其嚙合之任何其他部分 上。 圖4顯示一本發明之半導體封裝1〇之一第二實施例之實 例。具有相同編號之元件係與先前圖中之彼等者相同之元 件。在該實施例中,基板1〇〇具有一空腔11()。另一個不同 之處係第一晶粒300藉由黏合劑7〇〇附接至基板空腔11〇之 底部。 圖5顯示一本發明之半導體封裝1〇之一第三實施例之實 例。具有相同編號之元件係與先前圖中之彼等者相同之元 件。類似於第二實施例,該實施例亦具有一位於基板1〇〇 中之空腔110。另一個不同之處係第一晶粒3〇〇藉由銲料凸 塊320附接至基板空腔11〇之底部。 圖6顯示一本發明之半導體封裝1〇之一第四實施例之實 例。具有相同編號之元件係與先前圖中之彼等者相同之元 件。此實施例除具有一藉由黏合劑7〇〇附接至第二半導體 晶粒400之底表面400b之額外半導體晶粒6〇〇外,其類似於 第一實施例。另外,還存在將第四半導體晶粒6〇〇電連接 至導線架200中間部分203之線接合61 〇。 圖7顯示一本發明之半導體封裝1〇之一第五實施例之實 例。具有相同編號之元件係與先前圖中之彼等者相同之元 件。此實施例除僅顯示第一及第二半導體晶粒3〇〇及4〇〇 127888.doc •15- 1357142 外,其類似於第一實施例。額外半導體晶粒可係半導體封 裝1〇= 一部分。另外,導線架200之頂晶粒襯墊表面201a 不暴露至外部,而是成型化合物900完全覆蓋整個導線架 2〇〇 〇 ’、 圖8顯示一本發明之半導體封裝1〇之一第六實施例之實 例。具有相同編號之元件係與先前圖中之彼等者相同之元 牛此實施例除第二半導體晶粒500藉由黏合劑7〇〇連接至 基板100而非第一半導體晶粒300之頂表面30〇a外,其亦類 似於第一實施例。 圖9A、9B及9C顯示一本發明之半導體封裝之一第七實 施例之實例。具有相同編號之元件係與先前圖中之彼等者A semiconductor package according to an embodiment of the invention includes: a substrate having a top surface and a bottom surface; a lead frame having a top die pad surface, a bottom die pad surface, and a plurality of wires Wherein the lead frame is attached to a top surface of the substrate; a first die having a top surface and a bottom surface 'where the bottom surface is attached to a top surface of the substrate and the first die is electrically connected to a second die having a top surface and a bottom surface 'where the top surface is attached to the bottom die pad surface of the lead frame and the second die is electrically connected to the lead frame; An encapsulant covering at least a portion of the leadframe and the substrate. The semiconductor package can also include a third die having a top surface and a bottom surface, the bottom surface being attached to a top surface of the substrate and the third crystal grain being electrically connected to the substrate. The semiconductor package can also include a fourth die having a top surface and a bottom surface, wherein the top surface is attached to a top and bottom surface of the second die and the fourth die is electrically connected to the leadframe. The semiconductor package also includes a third die having a top surface and a bottom surface, wherein the bottom surface is attached to a top surface of the first die and the second die is electrically connected to the substrate. The semiconductor package may further include a fourth germanium having a top surface and a bottom surface, the top surface being attached to the bottom surface of the second die and the fourth die electrically connected to the lead frame . The semiconductor package may further include: a third die having a top surface and a bottom surface 'where the top surface is attached to a bottom surface of the second die; and a plurality of bonding wires 'connected to the third The bottom surface of the die is between the wire on the leadframe. The semiconductor package also includes a masking agent covering the entire top die fill surface of the leadframe. The semiconductor package can also include an entire top die pad surface that allows the encapsulant to cover the leadframe except for a plurality of regions. The #semiconductor n package can also include a second semiconductor package connected to the leadframe via the plurality of regions. The semiconductor package may also include a surface of the top lining of the lead frame having a region of the lining, and the encapsulant covering the etched region without covering the surface of the top die pad. 127888.doc 1357142 - A semiconductor package according to a second embodiment of the present invention includes: a lead frame having a top grain pad surface, a bottom grain surface, and a plurality of wires, a substrate Having a top surface '_ bottom surface and a cavity, wherein the lead frame is attached to a top surface of the substrate; a first die having a top surface and a bottom surface, wherein the bottom surface is attached to An empty space and a cavity of the substrate are electrically connected to the substrate; a second die having a top surface and a bottom surface, wherein the top surface is attached to the bottom crystal of the lead frame a surface of the crucible and the second die electrically connected to the lead frame; an encapsulant covering at least a portion of the lead frame and the substrate. The semiconductor package according to the second embodiment of the present invention may further comprise a top surface and a third die of a bottom surface, wherein the The bottom surface is attached to the cavity of the substrate and the third die is electrically connected to the substrate. The semiconductor package according to the second embodiment of the present invention may further comprise a fourth die having a top surface and a bottom surface The top surface is attached to the bottom surface of the second die and the fourth die is electrically connected to the lead frame. The semiconductor package according to the second embodiment of the present invention may further comprise a top surface and a third die of a bottom surface, wherein the bottom surface is attached to a top surface of the first die and the third die is electrically connected to the substrate. The semiconductor package according to the second embodiment of the present invention may also include a fourth die having a top surface and a bottom surface, wherein the top surface is attached to a bottom surface of the second die and the fourth die is electrically connected to the lead frame. According to the second aspect of the present invention The semiconductor package of an embodiment may further include a third die having a top surface and a bottom surface, wherein the top surface is attached to a bottom surface of the second die and the third die is electrically connected to the lead frame 127888.doc -10- 1357142 according to the invention The second embodiment of the present invention may also include an encapsulating agent covering the entire top die pad surface of the lead frame. The semiconductor package according to the second embodiment of the present invention may also comprise an encapsulation The coating covers the entire top grain lining surface of the lead frame except for a plurality of regions. The semiconductor package according to the second embodiment of the present invention may further include a second semiconductor connected to the lead frame via the plurality of regions Package: The semiconductor package according to the second embodiment of the present invention may further comprise: the top die padding surface of the wire = containing the half (four) area of the encapsulant covering the half-cut area without covering A portion of the surface of the top die pad. A method of fabricating a semiconductor package in accordance with an embodiment of the present invention includes (a) providing a substrate having a top surface and a bottom surface; b) providing a top a die pad surface, a bottom die pad surface, and a plurality of wire lead frames; (C) attaching a first die having a top surface and a bottom surface to the substrate, wherein the first crystal Bottom surface of the grain Connecting to a top surface of the substrate and electrically connecting the first die to the substrate; (d) attaching a second die having a top surface and a bottom surface to the lead frame, wherein the second die a top surface attached to a bottom die pad surface of the leadframe and the second die electrically connected to the leadframe; (e) attaching the leadframe to a top surface of the substrate; and (f) a bladder至少 at least a portion of the lead frame and the substrate. The method of fabricating the semiconductor package can also include attaching solder balls to the substrate and singulating the semiconductor packages into individual semiconductor packages. The method of fabricating the semiconductor package may also include the steps ((^ and (d) occurring simultaneously. A method of fabricating a plurality of semiconductor packages I27888.doc-II-1357142 according to a second embodiment of the present invention may include (a) providing a substrate strip having a top surface and a bottom surface, b) providing a lead frame strip having a top die pad surface, a bottom die pad surface, and a plurality of lead edges; a plurality of first dies having a top surface and a bottom surface attached to the substrate strip, wherein bottom surfaces of the first dies are attached to a top surface of the substrate strip and the first dies are electrically connected to the a substrate strip; (d) attaching a plurality of second dies having a top surface and a bottom surface to the lead frame, wherein a top surface of the second dies is attached to a bottom die pad of the lead frame strip And the second die is electrically connected to the leadframe strip; (e) attaching the leadframe strip to a top surface of the substrate strip; and (1) encapsulating the leadframe strip and at least a portion of the substrate strip. The second method of the semiconductor package can also include attaching a solder ball to the substrate And singulating the semiconductor packages into individual semiconductor packages. The second method of fabricating the semiconductor package may also include the step (4) occurring simultaneously. [Embodiment] The present invention will be explained in detail below by way of example embodiments with reference to the drawings. The exemplified embodiments are intended to be illustrative of the invention and are not intended to limit the scope of the invention in any way. In all the drawings for explaining the exemplary embodiments, the components having the same function carry the same The reference package will omit repeated explanation of the components. The semiconductor package of the present invention comprises an inverted frame attached to a substrate. Each of the inverted lead frame and the substrate holds one or more dies, When the inverted lead frame is attached to the substrate, a - (four) domain is formed between the inverted lead frame (four) substrate and the substrate is on the wire frame and the substrate is 127888.doc 1357142 one or more crystal grains are facing each other The lead frame and the substrate are connected by solder existing on the substrate or the lead of the lead frame. The solder may be pre-printed onto the substrate or on the substrate The molding material encapsulating the leadframe and at least a portion of the substrate may also hold the two structures in place. Figures 2A and 2B show an example of an embodiment of the semiconductor package 1 of the present invention. The package includes: The substrate 100 has a top surface 1 & and a bottom surface 100b, a lead frame 200 having a die pad portion 201 and a plurality of wires 220; a first semiconductor die 3? It has a top surface 300a and a bottom surface 300b, wherein the bottom surface 3〇〇b is attached to the top surface 100a of the substrate 100; and a second semiconductor die 4〇〇 having a top surface 400a and a bottom surface 400b, wherein the top surface 4A is attached to the bottom die pad surface 201b of the leadframe 200. The package 1 can also include a third semiconductor die 5A having a top surface 500a and a bottom surface 500b, wherein the bottom surface 500b is attached to the top surface 3A of the first semiconductor die 3A. The lead frame 200 has a grain lining portion 2 〇 1, a first inclined portion 2 〇 2, an intermediate portion 203, a second inclined portion 204, and a bottom portion 205. The first inclined portion 202 abuts the die pad portion 201 to the intermediate portion 2〇3, and the second inclined portion 204 abuts the intermediate portion 203 to the bottom portion 205 to form a double unframed frame, as shown in FIGS. 2A and 2B. Shown. The grain lining portion 2〇1 has a top grain lining portion 201a and a bottom grain lining portion 2〇1b. The intermediate portion 203, the second inclined portion 204, and the bottom portion 205 form a guide wire of the lead frame 2''. It will be appreciated that although the leadframe illustrated in this embodiment has a double lower frame', it is also possible to use leadframes with more than two lower members. The first semiconductor die 300 is attached to the substrate 1 by means of an adhesive 7〇〇 with its bottom surface 300b facing the top surface 1 of the substrate 100 with 127888.doc • 13-1357142. The first semiconductor die 300 is electrically connected to the substrate 1 via a wire bond 310 extending from the top surface 3〇〇3 of the first semiconductor die 3〇〇 to the top surface 10a of the substrate 100. The second semiconductor die 400 is attached to the bottom die pad portion 201a of the lead frame 2 by an adhesive 700. The second semiconductor die 400 is electrically connected to the intermediate portion 203 of the lead frame 2 by a wire bond 410 extending from the bottom surface 400b of the second semiconductor wafer 400 to the intermediate portion 203 of the lead frame 200. The third semiconductor φ die 500 is attached to the top surface 300a of the first semiconductor die 300 by an adhesive 700. The wire bonding 5 1 电 electrically connects the third semiconductor die 5 〇 0 to the substrate 100. The solder ball 800 is attached to the bottom surface i〇〇b of the substrate 100. The lead frame 200 is encapsulated by the molding compound 900 in addition to the top grain lining surface 201a exposed to the outside. Since the top die pad surface 2〇la of the lead frame 200 is exposed to the outside, heat dissipation is enhanced. It should be understood that although in this embodiment wire bonding is illustrated as a means for forming an electrical connection between a die and its respective substrate or leadframe, other forms of electrical connections (eg, the overlay shown in Figure 5) Crystal connection) is also possible. In this particular embodiment, the largest of the three semiconductor dies 400 is attached to the leadframe 200. Since the two smaller semiconductor dies 300, 500 - are attached to the substrate 100 instead of the lead frame, compared to the case where the three dies 300, 400, 500 are stacked vertically in a conventional semiconductor package, The bond wires associated with the die 300, 500 can be shorter. Figure 1B is an enlarged view of an alternate embodiment of a corner portion 201c of a leadframe 200. In the embodiment of Fig. 1B, a notch 240 is etched (e.g., half etched) in the corner portion 201c of the leadframe 200. The notch 240 can be modified to engage the lead frame 200 and thus better secure the lead frame 2 to the substrate 100. It will be appreciated that although the notch 24 is etched at the corner portion 201c in this alternative embodiment, the notch 24 can be formed in any other portion of the wire guide 200 that facilitates engagement of the molding material 9〇〇 with it. Fig. 4 shows an example of a second embodiment of a semiconductor package 1 of the present invention. Elements having the same number are the same as those of the previous figures. In this embodiment, the substrate 1 has a cavity 11(). Another difference is that the first die 300 is attached to the bottom of the substrate cavity 11 by an adhesive 7〇〇. Fig. 5 shows an example of a third embodiment of a semiconductor package 1 of the present invention. Elements having the same number are the same as those of the previous figures. Similar to the second embodiment, this embodiment also has a cavity 110 in the substrate 1〇〇. Another difference is that the first die 3 is attached to the bottom of the substrate cavity 11 by solder bumps 320. Fig. 6 shows an example of a fourth embodiment of a semiconductor package 1 of the present invention. Elements having the same number are the same as those of the previous figures. This embodiment is similar to the first embodiment except that it has an additional semiconductor die 6 which is attached to the bottom surface 400b of the second semiconductor die 400 by an adhesive 7?. In addition, there is also a wire bond 61 〇〇 electrically connecting the fourth semiconductor die 6 〇〇 to the intermediate portion 203 of the lead frame 200. Fig. 7 shows an example of a fifth embodiment of a semiconductor package 1 of the present invention. Elements having the same number are the same as those of the previous figures. This embodiment is similar to the first embodiment except that only the first and second semiconductor dies 3A and 4〇〇 127888.doc •15-1357142 are shown. The additional semiconductor die can be a semiconductor package 1 〇 = part. In addition, the top die pad surface 201a of the lead frame 200 is not exposed to the outside, but the molding compound 900 completely covers the entire lead frame 2', and FIG. 8 shows a sixth implementation of the semiconductor package 1 of the present invention. An example of an example. The elements having the same number are the same as those of the previous figures. This embodiment is in addition to the second semiconductor die 500 being bonded to the substrate 100 by the adhesive 7〇〇 instead of the top surface of the first semiconductor die 300. It is similar to the first embodiment except for 30 〇a. 9A, 9B and 9C show an example of a seventh embodiment of a semiconductor package of the present invention. Components with the same number are the same as those in the previous figure
相同之元件。在此實施例中,成型化合物9〇〇囊封除圖9A 之俯視圖中所示複數個區域26〇外的封裝導線架2〇〇之整個 頂晶粒襯墊表面201a。區域26〇暴露複數個導線。如圆9c 中所示,一個四方扁平封裝(QFp)2〇可藉由導線22附接至 所暴露之複數個導線260。同樣,一個四方扁平無導線封 裝(QFN)(未顯示)可藉由銲料連接附接至所暴露之複數個 導線260 〇 接下來,將結合圖1 〇 A闞釋一組裝本發明性半導體封裝 之方法。 在步驟S1A中,將第二半導體晶粒4〇〇附接至導線架2〇〇 之底晶粒襯墊表面201b,且同時在步驟sib中,將第一半 導體晶粒300附接至基板100之頂表面1〇〇a ;接下來,在步 驟S2A中,將第二晶粒4〇〇線接合至導線架2〇〇 ,且同時在 127888.doc 1357142 步驟S2B中’將第一晶粒300線接合至基板loo ;然後,在 步驟S3中,將導線架200倒置且使用銲料在底部分205處附 接至基板100,且此後將導線架200及基板1〇〇置於一模型 中’其中成型材料900囊封基板1〇〇及導線架2〇〇之至少一 部分;在進行成型後,在步驟S4中,將銲錫球800附接至 基板100之底表面l〇〇b。在步驟S5中,將該封裝單個化。The same components. In this embodiment, the molding compound 9 encapsulates the entire top die pad surface 201a of the package leadframe 2 except for the plurality of regions 26 shown in the top view of Fig. 9A. Zone 26〇 exposes a plurality of wires. As shown in circle 9c, a quad flat pack (QFp) 2 can be attached to the plurality of exposed wires 260 by wires 22. Similarly, a quad flat no-wire package (QFN) (not shown) can be attached to the exposed plurality of wires 260 by solder connections. Next, the inventive semiconductor package can be assembled in conjunction with FIG. method. In step S1A, the second semiconductor die 4 is attached to the bottom die pad surface 201b of the lead frame 2, and at the same time, in step sib, the first semiconductor die 300 is attached to the substrate 100. The top surface 1〇〇a; next, in step S2A, the second die 4 is wire bonded to the lead frame 2〇〇, and at the same time in 127888.doc 1357142 step S2B 'the first die 300 The wire is bonded to the substrate loo; then, in step S3, the lead frame 200 is inverted and attached to the substrate 100 at the bottom portion 205 using solder, and thereafter the lead frame 200 and the substrate 1 are placed in a model. The molding material 900 encapsulates at least a portion of the substrate 1 and the lead frame 2A; after molding, the solder ball 800 is attached to the bottom surface 10b of the substrate 100 in step S4. In step S5, the package is singulated.
由於已組合了用於半導體晶粒之兩個晶粒附接步驟(s t A 及S 1B)及兩個線接合步驟(S2A及S2B),因此組裝時間降低 而且單位時間(UPH)速率增加。 該組裝方法亦可針對複數個半導體封裝來實施。例如, 參見圖3A、3B及3C。圖3A顯示一包含複數個導線架2〇〇之 導線架條200,之剖視圖。圖3A亦顯示一包含複數個基板 1〇〇(在底表面100’b處形成有外銲錫球連接8〇〇)之基板條 1〇(Γ之剖視圖。 ,圖3Β顯示-顯示—導線架細矩陣之導線架條·之俯 視圖。圖3C顯示一顯示一基板1〇〇矩陣之基板條1〇〇.之俯 視圖。 在製造過程期間,可同時將複數個半導體晶粒附接至導 線架條2〇°’及基板條1〇〇·兩者。接下來,針對所有半導體 晶粒實施線接合步驟。然後,將導線架條2〇〇·及基板條 1〇0·彼此附接並置於-模型,其中囊封導線架條·,及基 板條⑽•。在囊封後,藉由單個化形成個別半導體封裝 10° 將半導體封裝組裝成一 條形式可增加單位時間速率 及準 I27888.doc -17· 1357142 確性兩者。 本發明提供勝過習用封裝及方法之數個優點。例如,當 將一具有導體/電阻限制之較小晶粒及一較大晶粒相紫^ 半導體封裝中時,在將較小晶粒附接至基板之同時 日月之半導體封裝中用於較小晶粒之線接合保持盡可能短。 在習用半導體封裝中’頂部較小晶粒將具有一較長 ' 合。 # 在本發明中,當堆疊多餘兩個晶粒時,在將用於具有導 體/電阻限制之較小晶粒之線接合保持盡可能短之同時可 維持導線架上及基板上之”金字塔"晶粒堆疊。此可藉由將 具有導體/電阻限制之較小晶粒在基板上堆疊成一 ^字塔 ,结構且以相同方式在導線架上堆疊較大晶粒堆而達成。在 晶粒堆疊之習用方法中,為維持用於較小晶粒之最短可能 線接合,需要以-倒置金字塔方式將晶粒堆疊在基板上。 如熟悉此項技術者將瞭解,堆疊晶粒之"倒置金字塔"方式 ►冑需要其他處理步驟以使較大之頂部晶粒不座落在較小底 部晶粒之接合襯墊上。該等其他處理步驟可包含在可導致 潛在封裝可靠性問題之晶粒之間使用間隔物或插入物。 如上所述,當導線架之頂晶粒襯墊表面暴露至外部時, 導線架可充當-可在Θ Ja(接面至周圍)及θ (接面至殼體) 兩個方面提供增加之熱效能之散熱器。導線架亦可在將封 裝組裝至一印刷電路板(PCB)上時充當一屏蔽(即,電磁干 擾屏蔽)。 最後,儘管各種實施例僅顯示了堆疊在一起的兩個晶 I27888.doc -18· 粒,但藉由使用倒置導線架及基板而可在維持封裝高度之 同時向封裝添加更多晶粒。可藉由將倒置導線架耦接至基 板中之空腔來進一步改良封裝之薄細程度。 儘官上文已參照本發明之實例性實施例特別地顯示及闡 釋了本發明,但熟悉此項技術者將瞭解,在不背離下述申 請專利範圍所界定之本發明之精神及範圍的情況下,可在 本發明之形式及細節上做出各種改變。 【圖式簡單說明】 可參照以T圖式更好地理解本發明之諸多態樣。該等圖 式中之組件未必符合比例尺,而重點在於清晰地圖解說明 本發明之原理。此外,在該等圖式中的所有數個視圖中, 相同之參考編號表示相應之部件。 圖1A顯示一本發明之第一實施例之剖視圖。 圖1B係一對本發明之導線架之修改之剖視圖。 圖2A及2B顯示本發明之一方法之實施例之剖視圖及透 視_。 圖3Α、3Β及3C顯示本發明之導線架及基板之一實施例 之剖視圖及俯視圖。 圖4顯示一本發明之一第二實施例之剖視圖。 圖5顯示一本發明之一第三實施例之剖視圖。 圖6顯示一本發明之一第四實施例之剖視圖。 圖7表示本發明之第五實施例之代表性視圖。 圖8顯示一本發明之一第六實施例之剖視圖。 圖9A、9Β及9C顯示本發明之一第七實施例之俯視圖及 127888.doc -19· 1357142 剖視圖。 圖10A顯示一本發明之一方法之實施例。 圖10B顯示一組裝一封裝之習用方法之實施例。 【主要元件符號說明】 10 半導體封裝 20 四方扁平封裝(QFP) 22 導線Since the two die attaching steps (s t A and S 1B) for the semiconductor die and the two wire bonding steps (S2A and S2B) have been combined, the assembly time is reduced and the unit time (UPH) rate is increased. The assembly method can also be implemented for a plurality of semiconductor packages. See, for example, Figures 3A, 3B, and 3C. Figure 3A shows a cross-sectional view of a leadframe strip 200 comprising a plurality of leadframes 2''. 3A also shows a substrate strip 1 包含 (Γ 。 。 包含 包含 在 在 在 在 在 在 在 在 在 在 在 在 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板A top view of a lead frame strip of a matrix. Figure 3C shows a top view of a substrate strip 1 〇〇. of a substrate. During the manufacturing process, a plurality of semiconductor dies can be simultaneously attached to the lead frame strip 2 〇°' and the substrate strip 1 〇〇 both. Next, a wire bonding step is performed for all the semiconductor dies. Then, the lead frame strip 2 及 and the substrate strip 1 〇 0· are attached to each other and placed in a - model , in which the lead frame strips and the substrate strips (10) are encapsulated. After the encapsulation, the individual semiconductor packages are formed by singulation. 10° The semiconductor package is assembled into a form to increase the unit time rate and the quasi-I27888.doc -17· 1357142 Authenticity Both. The present invention provides several advantages over conventional packages and methods, for example, when a smaller die with conductor/resistance limitations and a larger die phase semiconductor package are used, Smaller die attached to the substrate The wire bonding for smaller dies in semiconductor packages of the time is kept as short as possible. In conventional semiconductor packages, the 'small die at the top will have a longer length. # In the present invention, when stacking more than two For a die, the "pyramid" pattern stack on the leadframe and on the substrate can be maintained while keeping the wire bond for the smaller die with conductor/resistance limits as short as possible. Smaller dies with conductor/resistance limitations are stacked on a substrate as a tower, and the structure is achieved by stacking larger die stacks on the leadframe in the same manner. In the conventional method of die stacking, The shortest possible wire bonding of smaller dies requires stacking the dies on the substrate in an inverted pyramid. As will be appreciated by those skilled in the art, stacking dies with "inverted pyramid" So that the larger top die does not land on the bond pads of the smaller bottom die. These other processing steps can include the use of spacers or insertions between the die that can cause potential package reliability issues. As described above, when the top grain pad surface of the lead frame is exposed to the outside, the lead frame can serve as an increase in both Θ Ja (junction to surrounding) and θ (junction to housing). A heat sink that can also act as a shield (ie, EMI shield) when the package is assembled onto a printed circuit board (PCB). Finally, although various embodiments show only two stacked together The crystal can be added to the package while maintaining the package height by using the inverted lead frame and the substrate. The inverted lead frame can be coupled to the cavity in the substrate. To further improve the thinness of the package, the present invention has been particularly shown and described with reference to the exemplary embodiments of the present invention, but those skilled in the art will understand that, without departing from the scope of the following claims Various changes may be made in the form and details of the invention. BRIEF DESCRIPTION OF THE DRAWINGS A number of aspects of the present invention can be better understood with reference to the T-pattern. The components in the drawings are not necessarily to scale, and the emphasis is on a clear understanding of the principles of the invention. In addition, in all the several views in the drawings, the same reference numerals indicate corresponding parts. Fig. 1A shows a cross-sectional view of a first embodiment of the invention. Figure 1B is a cross-sectional view showing a modification of a pair of lead frames of the present invention. 2A and 2B show a cross-sectional view and a perspective view of an embodiment of a method of the present invention. 3A, 3B and 3C show a cross-sectional view and a plan view of an embodiment of a lead frame and a substrate of the present invention. Figure 4 shows a cross-sectional view of a second embodiment of one of the inventions. Figure 5 shows a cross-sectional view of a third embodiment of the present invention. Figure 6 is a cross-sectional view showing a fourth embodiment of the present invention. Fig. 7 shows a representative view of a fifth embodiment of the present invention. Figure 8 shows a cross-sectional view of a sixth embodiment of the present invention. 9A, 9A and 9C are plan views showing a seventh embodiment of the present invention and a cross-sectional view of 127888.doc-19-1357142. Figure 10A shows an embodiment of a method of the present invention. Figure 10B shows an embodiment of a conventional method of assembling a package. [Main component symbol description] 10 Semiconductor package 20 Quad flat package (QFP) 22 wire
100 基板 100' 基板條 100a 頂表面 100b 底表面 110 空腔 200 導線架 200' 導線架條 201 晶粒襯墊部分100 substrate 100' substrate strip 100a top surface 100b bottom surface 110 cavity 200 lead frame 200' lead frame strip 201 die pad portion
201a 頂晶粒襯墊部分 201b 底晶粒襯墊部分 201c 拐角部分 202 第一傾斜部分 203 中間部分 204 第二傾斜部分 205 底部分 220 導線 240 缺口 127888.doc •20- 1357142201a top die pad portion 201b bottom die pad portion 201c corner portion 202 first inclined portion 203 intermediate portion 204 second inclined portion 205 bottom portion 220 wire 240 notch 127888.doc • 20- 1357142
260 區域 300 第一半導體晶粒 300a 頂表面 300b 底表面 310 線接合 320 銲料凸塊 400 第二半導體晶粒 400a 頂表面 400b 底表面 410 線接合 500 第三半導體晶粒 500a 頂表面 500b 底表面 510 線接合 600 額外半導體晶粒 610 線接合 700 黏合劑 800 焊錫球 900 成型化合物 127888.doc -21 -260 region 300 first semiconductor die 300a top surface 300b bottom surface 310 wire bond 320 solder bump 400 second semiconductor die 400a top surface 400b bottom surface 410 wire bond 500 third semiconductor die 500a top surface 500b bottom surface 510 line Bonding 600 Additional Semiconductor Die 610 Wire Bonding 700 Adhesive 800 Solder Ball 900 Molding Compound 127888.doc -21 -
Claims (1)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US87150906P | 2006-12-22 | 2006-12-22 |
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| Publication Number | Publication Date |
|---|---|
| TW200845348A TW200845348A (en) | 2008-11-16 |
| TWI357142B true TWI357142B (en) | 2012-01-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW096149606A TWI357142B (en) | 2006-12-22 | 2007-12-21 | Inverted leadframe on substrate |
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| Country | Link |
|---|---|
| SG (1) | SG144112A1 (en) |
| TW (1) | TWI357142B (en) |
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2007
- 2007-12-21 TW TW096149606A patent/TWI357142B/en not_active IP Right Cessation
- 2007-12-21 SG SG200718943-4A patent/SG144112A1/en unknown
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| Publication number | Publication date |
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| TW200845348A (en) | 2008-11-16 |
| SG144112A1 (en) | 2008-07-29 |
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