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TWI350568B - Method of fabricating semiconductor device - Google Patents

Method of fabricating semiconductor device

Info

Publication number
TWI350568B
TWI350568B TW096142842A TW96142842A TWI350568B TW I350568 B TWI350568 B TW I350568B TW 096142842 A TW096142842 A TW 096142842A TW 96142842 A TW96142842 A TW 96142842A TW I350568 B TWI350568 B TW I350568B
Authority
TW
Taiwan
Prior art keywords
semiconductor device
fabricating semiconductor
fabricating
semiconductor
Prior art date
Application number
TW096142842A
Other languages
Chinese (zh)
Other versions
TW200921797A (en
Inventor
Tai Ju Chen
Tung Hsing Lee
Da Kung Lo
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW096142842A priority Critical patent/TWI350568B/en
Publication of TW200921797A publication Critical patent/TW200921797A/en
Application granted granted Critical
Publication of TWI350568B publication Critical patent/TWI350568B/en

Links

TW096142842A 2007-11-13 2007-11-13 Method of fabricating semiconductor device TWI350568B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW096142842A TWI350568B (en) 2007-11-13 2007-11-13 Method of fabricating semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW096142842A TWI350568B (en) 2007-11-13 2007-11-13 Method of fabricating semiconductor device

Publications (2)

Publication Number Publication Date
TW200921797A TW200921797A (en) 2009-05-16
TWI350568B true TWI350568B (en) 2011-10-11

Family

ID=44727989

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096142842A TWI350568B (en) 2007-11-13 2007-11-13 Method of fabricating semiconductor device

Country Status (1)

Country Link
TW (1) TWI350568B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI489629B (en) * 2010-10-04 2015-06-21 聯華電子股份有限公司 Semiconductor structure and method for making the same
US8587074B2 (en) * 2011-05-05 2013-11-19 Taiwan Semiconductor Manufacturing Company, Ltd. Device having a gate stack

Also Published As

Publication number Publication date
TW200921797A (en) 2009-05-16

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees