[go: up one dir, main page]

TWI348767B - Thin film transistor and manufacture method thereof - Google Patents

Thin film transistor and manufacture method thereof

Info

Publication number
TWI348767B
TWI348767B TW096146807A TW96146807A TWI348767B TW I348767 B TWI348767 B TW I348767B TW 096146807 A TW096146807 A TW 096146807A TW 96146807 A TW96146807 A TW 96146807A TW I348767 B TWI348767 B TW I348767B
Authority
TW
Taiwan
Prior art keywords
thin film
film transistor
manufacture method
manufacture
transistor
Prior art date
Application number
TW096146807A
Other languages
Chinese (zh)
Other versions
TW200926413A (en
Inventor
Hanson Liu
Ryan Lee
Chun Hsiang Fang
Original Assignee
Chimei Innolux Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chimei Innolux Corp filed Critical Chimei Innolux Corp
Priority to TW096146807A priority Critical patent/TWI348767B/en
Publication of TW200926413A publication Critical patent/TW200926413A/en
Application granted granted Critical
Publication of TWI348767B publication Critical patent/TWI348767B/en

Links

TW096146807A 2007-12-07 2007-12-07 Thin film transistor and manufacture method thereof TWI348767B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW096146807A TWI348767B (en) 2007-12-07 2007-12-07 Thin film transistor and manufacture method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW096146807A TWI348767B (en) 2007-12-07 2007-12-07 Thin film transistor and manufacture method thereof

Publications (2)

Publication Number Publication Date
TW200926413A TW200926413A (en) 2009-06-16
TWI348767B true TWI348767B (en) 2011-09-11

Family

ID=44729689

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096146807A TWI348767B (en) 2007-12-07 2007-12-07 Thin film transistor and manufacture method thereof

Country Status (1)

Country Link
TW (1) TWI348767B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105336742A (en) * 2014-07-03 2016-02-17 上海和辉光电有限公司 Polycrystalline silicon display substrate and manufacturing method thereof
CN104882485A (en) 2015-03-30 2015-09-02 深超光电（深圳）有限公司 Thin film transistor and manufacturing method thereof
CN118251042A (en) * 2019-04-25 2024-06-25 应用材料公司 Moisture barrier film with low refractive index and low water vapor transmission rate

Also Published As

Publication number Publication date
TW200926413A (en) 2009-06-16

Similar Documents

Publication Publication Date Title
GB2461761B (en) Thin film transistor and method of manufacturing the same
TWI368996B (en) Method for manufacturing thin film transistor
GB2473987B (en) Organic thin film transistor, method of manufacturing the same and display device using the same
GB2455096B (en) Organic thin film transistors and methods of making the same
GB2462591B (en) Organic thin film transistors and methods of making the same
GB0608730D0 (en) Photosensing Thin Film Transistor
TWI367381B (en) Thin film transistor substrate and method of fabricating same
TWI348766B (en) Method of fabricating thin film transistor
EP2221274A4 (en) Carbonaceous thin film and manufacturing method for same
EP2243859A4 (en) Thin film forming method and thin film stack
TWI366272B (en) Thin film transistor, method for fabricating the same and display device
GB2443577B (en) Method for manufacturing thin film transistor
PT2117838T (en) Film and method for producing said film
EP2113944A4 (en) Organic thin film transistor and method for manufacturing organic thin film transistor
TWI316296B (en) Thin-film transistor and fabrication method thereof
GB2439599B (en) Thin film transistor array substrate and method fabricating the same
TWI365232B (en) Thin film manufacturing device and inner block for thin film manufacturing device
TWI316264B (en) Thin film transistor (tft) and method for fabricating the same
TWI348767B (en) Thin film transistor and manufacture method thereof
TWI369693B (en) Thin film resistor structure and fabrication method thereof
KR101421143B9 (en) Thin film deposition device and method for manufacturing thin film transistor using the same
TWI316295B (en) Thin film transistor
GB2448175B (en) Thin film transistor
TWI320604B (en) Thin film transistor and manufacturing method thereof
TWI316297B (en) Thin film transistor substrate