[go: up one dir, main page]

TWI348401B - Atmospheric pressure plasma cleaning device - Google Patents

Atmospheric pressure plasma cleaning device

Info

Publication number
TWI348401B
TWI348401B TW097118221A TW97118221A TWI348401B TW I348401 B TWI348401 B TW I348401B TW 097118221 A TW097118221 A TW 097118221A TW 97118221 A TW97118221 A TW 97118221A TW I348401 B TWI348401 B TW I348401B
Authority
TW
Taiwan
Prior art keywords
atmospheric pressure
cleaning device
pressure plasma
plasma cleaning
atmospheric
Prior art date
Application number
TW097118221A
Other languages
Chinese (zh)
Other versions
TW200904553A (en
Inventor
Chung Hwan Jung
Kyoung Ho Yu
Original Assignee
K C Tech Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by K C Tech Co Ltd filed Critical K C Tech Co Ltd
Publication of TW200904553A publication Critical patent/TW200904553A/en
Application granted granted Critical
Publication of TWI348401B publication Critical patent/TWI348401B/en

Links

Classifications

    • H10P72/0402—
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32541—Shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32816—Pressure
    • H01J37/32825—Working under atmospheric pressure or higher

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Cleaning In General (AREA)
TW097118221A 2007-05-17 2008-05-16 Atmospheric pressure plasma cleaning device TWI348401B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020070047910A KR101242291B1 (en) 2007-05-17 2007-05-17 Atmospheric pressure plasma cleaning device

Publications (2)

Publication Number Publication Date
TW200904553A TW200904553A (en) 2009-02-01
TWI348401B true TWI348401B (en) 2011-09-11

Family

ID=40125140

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097118221A TWI348401B (en) 2007-05-17 2008-05-16 Atmospheric pressure plasma cleaning device

Country Status (3)

Country Link
KR (1) KR101242291B1 (en)
CN (1) CN101308776B (en)
TW (1) TWI348401B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101251464B1 (en) * 2011-08-26 2013-04-04 한국기계연구원 Plasma reactor with counter discharge type for abatement of pollutions
CN103357619A (en) * 2012-04-05 2013-10-23 中国科学院微电子研究所 Normal pressure plasma free radical cleaning system
JP2019067609A (en) * 2017-09-29 2019-04-25 日本電産株式会社 Plasma processing apparatus
CN118577575A (en) * 2024-05-22 2024-09-03 西安电子科技大学 Device and process for cleaning stainless steel electrodes using atmospheric pressure plasma

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100459847B1 (en) * 2001-07-19 2004-12-03 사단법인 고등기술연구원 연구조합 Electrode structure of plasma surface treatment apparatus
KR20030091438A (en) * 2002-05-28 2003-12-03 (주)플라젠 Plasma spray and its application method in surface treatment

Also Published As

Publication number Publication date
TW200904553A (en) 2009-02-01
CN101308776B (en) 2010-11-10
CN101308776A (en) 2008-11-19
KR101242291B1 (en) 2013-03-12
KR20080101309A (en) 2008-11-21

Similar Documents

Publication Publication Date Title
GB0717430D0 (en) Atmospheric pressure plasma
PL1961475T3 (en) High pressure cleaning device
GB2442136B (en) Pressure barrier apparatus
GB2451925B (en) Vaccuum cleaner
EP2264306A4 (en) Plasma device using valve
PT3260428T (en) Suctioning device
PL2230980T3 (en) Hard surface vacuum cleaning device
GB0808997D0 (en) Nozzle unit ofa vacuum cleaner
ZA200809351B (en) Evacuation device
EP2487277A4 (en) Plasma cvd device
EP2362087A4 (en) Atmospheric pressure estimation device
PL2141968T3 (en) Device for generating an atmospheric pressure plasma
EP2330299A4 (en) Vacuum evacuation device
GB201000729D0 (en) Plasma depositon apparatus
EP2162664A4 (en) Hose device
GB0700475D0 (en) Ionization device
GB0725217D0 (en) Cleaning device
TWI348401B (en) Atmospheric pressure plasma cleaning device
EP2041767A4 (en) Plasma display device
GB2467671B (en) Plasma deposition apparatus
EP2216804A4 (en) Plasma processing apparatus
GB0810216D0 (en) Vacuum cleaner nozzle unit
GB0725198D0 (en) Cleaning device
EP2122601A4 (en) Plasma display apparatus
EP2041768A4 (en) Plasma display device

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees