TWI348198B - Wafer carrier - Google Patents

Wafer carrier

Info

Publication number: TWI348198B
Authority: TW; Taiwan
Prior art keywords: wafer carrier; wafer; carrier
Prior art date: 2007-08-16

Application number

TW096130382A

Other languages

Chinese (zh)

Other versions

TW200910493A (en

Inventor

Archer Chen

Eric Lo

Original Assignee

Gintech Energy Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2007-08-16

Filing date

2007-08-16

Publication date

2011-09-01

2007-08-16 Application filed by Gintech Energy Corp filed Critical Gintech Energy Corp

2007-08-16 Priority to TW096130382A priority Critical patent/TWI348198B/en

2009-03-01 Publication of TW200910493A publication Critical patent/TW200910493A/en

2011-09-01 Application granted granted Critical

2011-09-01 Publication of TWI348198B publication Critical patent/TWI348198B/en

Links

TW096130382A 2007-08-16 2007-08-16 Wafer carrier TWI348198B (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
TW096130382A TWI348198B (en)	2007-08-16	2007-08-16	Wafer carrier

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
TW096130382A TWI348198B (en)	2007-08-16	2007-08-16	Wafer carrier

Publications (2)

Publication Number	Publication Date
TW200910493A TW200910493A (en)	2009-03-01
TWI348198B true TWI348198B (en)	2011-09-01

Family

ID=44724383

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
TW096130382A TWI348198B (en)	2007-08-16	2007-08-16	Wafer carrier

Country Status (1)

Country	Link
TW (1)	TWI348198B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
TWI567817B (en) *	2015-04-30	2017-01-21	中勤實業股份有限公司	Cassette for carrying solar cells and producing the solar cells using thereof
CN119890125B (en) *	2023-10-24	2026-01-27	北京北方华创微电子装备有限公司	Limiting structure, wafer drying apparatus and wafer drying method

2007
- 2007-08-16 TW TW096130382A patent/TWI348198B/en not_active IP Right Cessation

Also Published As

Publication number	Publication date
TW200910493A (en)	2009-03-01

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Legal Events

Date	Code	Title	Description
2015-06-01	MM4A	Annulment or lapse of patent due to non-payment of fees