[go: up one dir, main page]

TWI347672B - Self-aligned, embedded phase change ram and manufacturing method - Google Patents

Self-aligned, embedded phase change ram and manufacturing method

Info

Publication number
TWI347672B
TWI347672B TW095123683A TW95123683A TWI347672B TW I347672 B TWI347672 B TW I347672B TW 095123683 A TW095123683 A TW 095123683A TW 95123683 A TW95123683 A TW 95123683A TW I347672 B TWI347672 B TW I347672B
Authority
TW
Taiwan
Prior art keywords
aligned
self
manufacturing
phase change
change ram
Prior art date
Application number
TW095123683A
Other languages
Chinese (zh)
Other versions
TW200802817A (en
Inventor
Hsiang Lan Lung
Shih Hung Chen
Original Assignee
Macronix Int Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/424,749 external-priority patent/US8237140B2/en
Application filed by Macronix Int Co Ltd filed Critical Macronix Int Co Ltd
Publication of TW200802817A publication Critical patent/TW200802817A/en
Application granted granted Critical
Publication of TWI347672B publication Critical patent/TWI347672B/en

Links

TW095123683A 2006-06-16 2006-06-29 Self-aligned, embedded phase change ram and manufacturing method TWI347672B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/424,749 US8237140B2 (en) 2005-06-17 2006-06-16 Self-aligned, embedded phase change RAM

Publications (2)

Publication Number Publication Date
TW200802817A TW200802817A (en) 2008-01-01
TWI347672B true TWI347672B (en) 2011-08-21

Family

ID=38943371

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095123683A TWI347672B (en) 2006-06-16 2006-06-29 Self-aligned, embedded phase change ram and manufacturing method

Country Status (2)

Country Link
CN (1) CN100573899C (en)
TW (1) TWI347672B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102024839B (en) * 2009-09-11 2013-06-19 中芯国际集成电路制造(上海)有限公司 Phase change memory, isolation structure for memory unit and manufacturing method thereof
US8962411B2 (en) 2012-08-09 2015-02-24 Nanya Technology Corp. Circuit pattern with high aspect ratio and method of manufacturing the same
US9564357B2 (en) 2014-01-24 2017-02-07 Taiwan Semiconductor Manufacturing Company Limited Method of forming semiconductor device using etch stop layer

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4928045B2 (en) * 2002-10-31 2012-05-09 大日本印刷株式会社 Phase change type memory device and manufacturing method thereof
KR100564608B1 (en) * 2004-01-29 2006-03-28 삼성전자주식회사 Phase change memory device
KR100568543B1 (en) * 2004-08-31 2006-04-07 삼성전자주식회사 Manufacturing method of phase change memory device having small contact point
KR100827653B1 (en) * 2004-12-06 2008-05-07 삼성전자주식회사 Phase change memory cells and manufacturing methods thereof
US7220983B2 (en) * 2004-12-09 2007-05-22 Macronix International Co., Ltd. Self-aligned small contact phase-change memory method and device

Also Published As

Publication number Publication date
CN100573899C (en) 2009-12-23
TW200802817A (en) 2008-01-01
CN101090130A (en) 2007-12-19

Similar Documents

Publication Publication Date Title
EP2141393A4 (en) Valve manufacturing method, and valve
EP2154596A4 (en) Insert molding laminate and its manufacturing method, and, insert molding and its manufacturing method
TWI367407B (en) Intelligent production station and production method
EP2084745A4 (en) Device, and method for manufacturing the same
EP2063489A4 (en) Antenna element and method for manufacturing same
EP2213188A4 (en) Wig, and its manufacturing method
PL2806044T3 (en) Copper-zinc alloy, method for its manufacture and use
EP1993322A4 (en) Ultrasonic sensor, and its manufacturing method
PL2106225T3 (en) Aroma-therapeutic bedding set, and a method for the manufacture thereof
GB0716775D0 (en) Directory caches,and method for operation thereof
EP2004373A4 (en) Method for producing sintered body, and sintered body
PT2225314T (en) Silicone-self-adhesives, method for the production thereof, complexes using same and uses
GB0719592D0 (en) Compound, use and method
EG24715A (en) Pipe, method for production thereof and corresponding tool
EP2187073A4 (en) Bearing structure, and its manufacturing method
GB0905984D0 (en) Shaping condition deciding method, and shaping condition deciding system
PL2158095T3 (en) Planar element, and method for the production thereof
EP2006875A4 (en) Electron emission element, display employing electron emission element, and method for fabricating electron emission element
EP1995335A4 (en) Process for manufacturing metal member, and structural member
PT1981846T (en) Markers, method for manufacturing them and their applications
GB0408887D0 (en) Manufacturing method
TWI347672B (en) Self-aligned, embedded phase change ram and manufacturing method
AP2011005738A0 (en) A composition and method thereof.
EP2021559A4 (en) Roofing and its manufacturing method
EP2095928A4 (en) Disc forming die, disc substrate and method for forming the disc substrate