1225840 玖、發明說明： 【發明所屬之技術領域】 本發明係關於在半導體製造線上的複數個處理步 以半導體晶圓的批量單位進行搬送的系統，尤其是 用複雜及多叉道的搬送通路有效地進行半導體晶圓 系統之控制裝置。 【先前技術】 在半導體裝置等的製造工廠中，對於半導體晶圓 淨、乾燥、蝕刻等的各處理步驟，係以批量為單位 各自分開的處理裝置來進行。在對於該批量進行著 理的處理裝置，作為保管場所併設有暫時保管欲搬 步驟的處理裝置的批量及從前步驟搬送來的批量用 櫃（儲存庫）。然後，各儲存庫分別具有固有的櫃子 用的進出入口 、吊車，藉由控制吊車而在櫃子與進 間移動批量。 又，各儲存庫係藉由軌道而形成連結，藉由在軌 動著積載批量的無人搬送車（運載車輛），將半導體 批量搬送至下一處理步驟的指定的處理裝置。此種 搬送系統通常為自動化進行，以圖獲生產線的工作 提升。一般在半導體晶圓的批量搬送系統中，具有 握搬送系統全體的搬送指令用控制器；及由内部網 彼此的各部的控制器。此等具有進行在儲存庫將批 或卸載於運載車輛等的管理的出庫用控制器；及控 批量並進行搬送的運載車輛在連結各儲存庫間的軌 92\瑞薩科技 VTR290-925461 -0501 驟間 關於使 的搬送 進行洗 而藉由 各項處 送至後 的搬送 、搬送 出入口 道上移 晶圓的 批量的 效率的 總體掌 路連接 量積載 制積載 道上的 5 1225840 動作的搬送用控制器。搬送指令用控制器係對各控制器發 出批量的搬送指令。 在此種搬送系統的基礎上，運載車輛積載收納有1份搬 送量的半導體晶圓的運載器，藉由在軌道上行走，而將運 載器從搬送出發地的儲存庫的出庫口搬送至搬送目的地的 儲存庫的入庫口 。通常空載的運載車輛邊以空載的姿態在 軌道上巡迴或待機，邊等待來自搬送指令用控制器的搬送 指令。 曰本專利特開2 0 0 2 - 3 3 3 7 1號公報揭示有此種搬送半導 體晶圓的搬送方法。該公報所揭示的搬送方法，係為沿著 懸吊於半導體製造線之無塵室的頂棚的呈縱、橫及斜向交 又而配置的軌道行走的搬運機器人，根據控制信號的搬送 指示，選擇上述執道中最短或最為鄰近的軌道而自動行走 的方法。 根據該公報所揭示的搬送方法，沿著懸吊於無塵室的頂 棚的呈縱、橫及斜向交叉而配置的軌道行走的搬運機械 臂，根據控制信號的搬送指示，選擇最短或最為鄰近的軌 道而自動行走，因此，可改善製品的搬送通路，並且提升 搬送效率，尤其是可頻繁搬運複數個製品。 曰本專利特開2 0 0 2 - 1 1 0 7 6 6號公報揭示有此種搬送半導 體晶圓的搬送系統。該公報所揭示的搬送系統，係為使無 人搬送車沿著軌道行走，而在搬送物的保管場所間搬送積 載於上述搬送車上的搬送物的類似構成的搬送系統，其包 含有：發出搬送物的搬送指令的搬送指令用控制器；進行 6 92\ 瑞薩科技\】11290-925461 -0501 1225840 以接收到的搬送指令為條件發出安排車輛的要求，同時， 從搬送出發地的保管場所將搬送物搬出庫而積載於軌道上 的搬送車上的控制的出庫用控制器；及控制軌道上的搬送 車的運行，同時，接受從出庫用控制器發出的安排車輛的 要求，使軌道上的巡迴中或待命中的搬送車迎向搬送出發 地的保管場所的搬送用控制器。 根據該公報所揭示的搬送系統，因為具備發出搬送物的 搬送指令的搬送指令用控制器；以接收到的搬送指令為條 件發出安排車輛的要求的出庫用控制器；及接受安排車輛 的要求，使搬送車迎向搬送出發地的保管場所的搬送用控 制器，因此，藉由將運載車輛更為快速地安排於搬送出發 地的儲存庫而可減少等待時間，尤其是可縮短需要搬送時 搬送所要花費的時間。 然而，日本專利特開2 0 0 2 - 3 3 3 7 1號公報所揭示的搬送 方法，僅考慮搬送距離來選擇搬送路徑，而在該搬送路徑 的途中設有停止站點、移載站點等的情況，就無法正確選 擇搬送路徑。又，因為僅考慮搬送距離而未考慮搬送時間， 當即便搬送距離短但仍要選擇搬送時間長的搬送路徑時， 需要較長的搬送時間而無法有效進行半導體晶圓的搬送。 日本專利特開2 0 0 2 - 1 1 0 7 6 6號公報所揭示的搬送系統，不 過為用以控制搬送半導體晶圓的台車的呼叫的系統而已， 其無法有效地使積載著半導體晶圓的台車移動。 【發明内容】 本發明之目的在於，提供使移動在複雜且多叉道的搬送 7 92\瑞薩科技 UR290-925461-0501 1225840 通路的台車有效移動的搬送系統之控制裝置。 本發明之另一目的在於，提供使用距離及時間的所謂定 量指標而使台車有效移動的搬送系統之控制裝置。 本發明之又一目的在於，提供考慮故障路徑而使台車有 效移動的搬送系統之控制裝置。 本發明之再一目的在於，提供考慮阻塞路徑而使台車有 效移動的搬送系統之控制裝置。 本發明之再一目的在於，提供考慮表示作業順序的優先 度而使台車有效移動的搬送系統之控制裝置。 本發明之控制裝置，係於含有複數個分叉點、連接分叉 點彼此的搬送通路、設於分叉點間的站點及移動在從出發 站點至到達站點的搬送通路上的台車的搬送系統中，其控 制複數輛台車的移動。該控制裝置包括：記憶分叉點與站 點的位置關係的第1記憶部；基於位置關係算出從出發站 點至抵達站點的移動台車的搬送通路的第1算出模組；製 成算出的搬送通路的表示搬送狀態的資訊的製成模組；記 憶藉由製成模組所製成的表示複數輛台車的搬送狀態的資 訊的第2記憶部；在台車到達所算出的含於搬送通路内的 分叉點時，基於記憶於第2記憶部的資訊，算出從到達之 分叉點至抵達站點的台車的搬送通路的第2算出模組；及 製成藉由第2算出模組所算出的搬送通路的表示搬送狀態 的資訊，以記憶於第2記憶部的方式，控制製成模組及第 2記憶部的控制模組。 第1算出模組係基於記憶於第1記憶部的分叉點及站點 8 92\瑞薩科技 UR290-925461 -0501 1225840 的位置關係，算出從出發站點至抵達站點的移動台車的搬 送通路。製成模組係製成藉由第1算出模組所算出的搬送 通路的表示搬送狀態的資訊（例如，台車的阻塞資訊）。第 2算出模組係基於記憶於第2記憶部的複數輛台車的表示 搬送狀態的資訊，在台車到達所算出的含於搬送通路内的 分叉點時，算出從到達之分叉點至抵達站點的台車的搬送 通路。藉此，在從出發站點出發後而到達分叉站點時，再 度執行搬送路徑的再設定。為此，可反應該再設定時之搬 送通路的阻塞資訊，而重新設定再度搬送路徑。其結果， 可有效使具有複雜且多叉道的搬送通路的搬送系統的多數 台車移動。 本發明之上述及其之目的、特徵、態樣及優點，藉由與 所附圖式相關連予以理解的有關本發明的詳細說明，應可 一目瞭然。 【實施方式】 以下，參照圖式來說明本發明之實施形態。以下之說明 中，對於相同的零件則賦予相同的元件符號。此等的名稱 及功能也相同。故，並不重複此等的詳細說明。 參照圖1，來說明本實施形態之搬送系統之系統構成 圖。具有複雜的搬送通路的自動搬送設備9為具有天花板 行走型的台車7的搬送設備。該自動搬送設備9係連接於 搬送設備控制裝置1 1，又，連接於屬上位電腦的搬送指令 指示裝置1 0。搬送設備控制裝置1 1係基於從搬送指令指 示裝置1 0接收到的資訊，來控制該自動搬送設備9。又， 9 92\ 瑞薩科技\了1^290-925461-0501 1225840 自動搬送設備9係為具有地板面行走型的台車的搬送設 備。 自動搬送設備9如圖1之俯視圖所示，其台車軌道鐵軌 2係敷設於縱、橫及斜向。台車執道鐵執2具有複數個的 分叉點3，藉由該分叉點3而將台車軌道鐵軌2分叉。在 分叉點3與分叉點3或分叉點3與台車停止點5之間，設 有儲存庫 1A 〜1Z、1AA、1AB、1AC。 參照圖2，詳細說明圖1所示一點虛線内的構成。如圖 2所示，該自動搬送設備9係在分叉點3與分叉點3之間 配置有批量收納用的儲存庫1。在配置有批量收納用儲存 庫1的部位，在台車軌道鐵軌2上的2個部位設有儲存庫 前分又點4。與連接分叉點3彼此的台車軌道鐵軌2平行， 敷設連接儲存庫前移載點6，同時連接儲存庫前分叉點4 彼此的台車軌道鐵執2。在連接儲存庫前分叉點4彼此的 台車軌道鐵軌2上，在對應該批量收納用儲存庫1的部位 設有儲存庫前移載點6。另外，如圖2所示，在連接分叉 點3彼此的台車軌道鐵軌2上，設有暫時使台車7停止的 台車停止點5。台車7係從如此之儲存庫1 A〜1 Z、1 A A、1 A B、 1 A C中的任一個，向著另一個的批量收納用儲存庫，使台 車7移動。該台車上積載著1份搬送量的晶圓。 參照圖3，來說明圖1所示自動搬送設備9的儲存庫名、 移載站點、儲存庫前分叉站點及儲存庫前合流站點。如圖 3所示，對各批量收納用儲存庫命名為S T K * * * ( * * * =0 0 1〜0 2 9 )的儲存庫名。另外，移載站點則命名為S T 0 * 10 92\瑞薩科技 UR290-925461 -0501 1225840 * (* *二01〜29)。另外，儲存庫前分叉站點及儲存庫前合 流站點則命名為S T 2 * *。如此命名完成後，如圖3所示， 即可不致重複來命名自動搬送設備9的移載站點、儲存 庫、儲存庫前分叉站點及儲存庫前合流站點。 參照圖4，顯示圖1所示自動搬送設備9的分叉及停止 站點S T 3 * *與停止站點S T 4 * *。如圖4所示，分叉及停 止站點係設於搬送通路的交叉的位置上。另外，停止站點 S T 4 * *係設於分叉及停止站點S T 3 * *與其他的分叉及 停止站點S T 3 * *的中間。 如上所述，如利用圖1〜圖4所說明之，本實施形態之 自動搬送設備9具有複數個站點、複數個分叉點及複數個 移載點。從搬送指令指示裝置1 0接收到的含有搬送出發地 儲存庫、搬送目的地儲存庫、批量批號、優先度的訊息的 搬送設備控制裝置1 1，係從搬送出發地儲存庫的移載站點 與搬送目的地儲存庫的移載站點開始進行搬送路徑的檢 索。又，後述中將詳述該搬送路徑的檢索。 圖5為顯示儲存庫機器的構成的立體圖。在批量收納用 儲存庫1，介由儲存庫吊車1 4，使用可從移載點1 3移載向 台車的移載裝料器8而將每一批量的晶圓移載於台車7 内。另外，也可從台車7將每一批量的晶圓移載於移載點 1 3。由儲存庫前分叉點4而從台車執道鐵執2分叉的從台 車軌道鐵軌2，停車於儲存庫前移載點6，藉由移載裝料器 8的對台車的移載而按每一批量將晶圓收納於批量收納用 儲存庫1。 11 92\ 瑞薩科技\爪290-925461-0501 1225840 圖1所示之搬送設備控制裝置1 1，具有與自動搬送設備 9的各設備通信用的介面部、基於從介面部輸入的資訊來 進行台車的移動控制的控制部、以及記憶由各種資料表格 及控制部所執行的程式的記憶部。該搬送設備控制裝置1 1 如可由一般的電腦系統來實現。更為詳細而言，該電腦系 統係由具備從各種的記錄媒體讀入或寫入資料和程式的驅 動裝置的電腦、顯示器等的輸出裝置及鍵盤和滑鼠等的輸 入裝置所構成。此種電腦除上述的記錄媒體的驅動裝置 外，還包括相互以匯流排連接的中央處理器（C P U : C e n t r a 1 P r o c e s s i n g U n i t (控制部））及記憶體和固定硬碟（記憶 部）。藉由中央處理器執行下載於記憶體的由複數個模塊構 成的程式，以實現控制搬送設備的功能。 參照圖6，來說明記憶於搬送設備控制裝置1 1之記憶部 的搬送要求表格。如圖6所示，搬送要求表格係按辨識搬 送要求用的每一編號，來記憶對應該要求的台車編號、搬 送出發地儲存庫名（From)與搬送目的地儲存庫名（To)、現 在的位置與現在的狀態以及優先度。優先度為「Q」較「S」 顯示高優先度。在狀態上具有「搬送中」、「等待安排車輛」、 「移載中」及「移動中」。移載中具有「在搬送出發地儲存 庫的移載」及「在搬送目的地儲存庫的移載」。 參照圖7，來說明記憶於搬送設備控制裝置1 1之記憶部 的台車資料表格。如圖7所示，台車資料表格係按辨識台 車用的每一編號，來記憶台車的狀態、現在設定於該台車 的搬送出發地站點與搬送目的地站點、現在的分叉點、現 12 92\ 瑞薩科技\爪290-925461-0501 1225840 在的目的地點、現在的位置、狀態以及優先度。台車的狀 態具有「正常」、「故障」、「空載台車」的3種類。 參照圖8，來說明記憶於搬送設備控制裝置1 1之記憶部 的搬送路徑表格。如圖8所示，該搬送路徑表格係於搬送 出發地站點與搬送目的地站點的每一組合，來記憶中轉的 站點名。在該中轉的站點具有中轉站（1 )〜中轉站（1 1 )。在 各個的搬送出發地站點與搬送目的地站點的每一組合，記 憶著距離、距離優先順位、站點數、站點優先順位、搬送 時間及動作次數。例如，在從S T 0 0 1向著S T 0 0 2移動的搬 送路徑上，設定有作為中轉站（1)的ST 201、作為中轉站（2) 的ST301及作為中轉站（3)的ST203。另外，在從ST001向 著ST003移動的搬送路徑上，具有經由ST201、ST301、 ST203、ST204、ST302 及 ST205 的路徑；經由 ST2(H、ST3(H、 ST203、 ST002、 ST204、 ST302 及 ST205 的路徑：以及經由 ST2(H、 ST3(H、 ST4(H、 ST306、 ST209、 ST005、 ST210、 ST302 及S T 2 0 5的路徑的3個路徑。另外，對應於各個路徑，按 通過的站點數小的順序，來設定站點數優先順位。 參照圖9，來說明記憶於搬送設備控制裝置1 1之記憶部 的搬送距離表格。如圖9所示，該搬送距離表格係於屬開 始點的站點與屬結束點的站點的每一組合，來記憶距離、 時間通過台數及通過禁止旗標。時間通過台數係當成為所 預先規定的臨限值以上的台數時，被判斷為該通路受到阻 塞。在通過禁止旗標被設定（令設定為「1」、重設為「0」） 時，則表示在該搬送通路發生故障及維修等而無法通過。 13 92\瑞薩科技\111290-925461 -0501 1225840 參照圖1 0，來說明記憶於搬送設備控制裝置1 1之記憶 部的搬送路徑選擇規則。如圖1 0所示，該搬送路徑選擇規 則係記憶著使搬送時間優先的規則（1 )、使搬送距離優先的 規則（2 )及使經由的站點數優先的規則（3 )。例如，搬送路 徑選擇規則之規則（1 )係使搬送時間優先，而不優先搬送距 離及站點數。 參照圖1 1，來說明記憶於搬送設備控制裝置1 1之記憶 部的空載台車要求區域設定表格。如圖11所示，空載台車 要求區域設定表格係在各站點的每一站，記憶者顯不要求 停在哪一站點的空載台車用的優先順位。例如，如圖1 1 所示，在站點S Τ 0 0 1的情況，係將停在站點S Τ 2 0 0的空載 台車作為優先（1 )，而將停在站點ST 2 01的空載台車作為優 先（2 )，一直到優先（5 )來進行設定。也就是說，在站點 ST 0 0 1要求空載台車時，以較為有利的順序來記憶優先（1 ) 〜優先（5 )的站點名。 參照圖1 2，來說明記憶於搬送設備控制裝置1 1之記憶 部的空載台車迴繞路徑設定表格。如圖1 2所示，該空載台 車迴繞路徑設定表格係設定使空載台車以哪一種路徑進行 迴繞用的表格。例如，在台車編號為「1」的台車成為空載 台車的情況，設定為迴繞ST 3 0 0、ST301、ST 3 0 2及ST303 的方式的迴繞路徑。例如，也可以多數空載台車圍繞著搬 送要求的頻率高的站點的周圍的方式來設定該空載台車迴 繞路徑設定表格。 參照圖1 3及圖1 4，由搬送設備控制裝置1 1之控制部所 14 92\瑞薩科技\〗11290-925461 -0501 1225840 執行的程式，其關係到實載台車搬送處理，而具有如下的 控制構造。 在步驟（以下簡稱步驟為S) 1 0 0，搬送設備控制裝置1 1 接收來自屬於上位電腦的搬送指令指示裝置1 0。此時，搬 送設備控制裝置1 1接收F r ο Π1點、T 〇點、批量編號及優先 度的指令内容。在S 1 0 2，搬送設備控制裝置1 1基於所接 收的含於搬送指令内的優先度來判斷優先度是否高。當優 先度高時（S 1 0 2中為YES )，則處理移向S 1 0 4。若非如此的 話（S 1 0 2中為N0 )，則處理移向S 1 0 6。在S 1 0 4，搬送設備 控制裝置1 1將搬送要求表格（參照圖6 )的要求表值中的優 先度登錄為「Q」。 在S 1 0 6，搬送設備控制裝置1 1登錄搬送要求表格（參照 圖8 )的最初的F r 〇 m點與最初的T 〇點。此時，登錄從屬於 上位電腦的搬送指令指示裝置1 0接收的F r 〇 m點與T 〇點。 在S 1 0 8，搬送設備控制裝置1 1開始進行搬送路徑的選 擇。在S 1 1 0，搬送設備控制裝置1 1登錄搬送要求表格（參 照圖8)的現在的From點與下一 To點。在SI 1 2，搬送設備 控制裝置1 1確認搬送路徑選擇規則（參照圖1 0 )。此時， 優先確認搬送時間、搬送距離及站點數中任一者。而在 S 1 1 4，搬送設備控制裝置1 1參照搬送路徑表格（參照圖 8 )，並根據搬送路徑選擇規則（參照圖1 0 )，從現在的F r 〇 in 點與下一 T 〇點來決定中轉點。在S 1 1 6，搬送設備控制裝 置1 1參照搬送距離表格（參照圖9 )，檢知阻塞狀況。此時， 當搬送距離表格（參照圖9 )的時間通過台數為所預先規定 15 92\瑞薩科技\JR290-925461-0501 1225840 的台數以上時，檢測為有阻塞。當檢測為有阻塞時（S 1 1 6 中為Y E S )，則處理移向S 1 1 8。若非如此的話（S 1 1 6中為 N 0 )，則處理移向圖1 4之S 1 2 2。 在S 1 1 8，搬送設備控制裝置1 1判斷阻塞點是否對應於 選擇路徑。當阻塞點對應於選擇路徑時（S 1 1 8中為Y E S )， 則處理移向S 1 2 0。若非如此的話（S 1 1 8中為N 0 )，則處理 移向S 1 2 2。 在S 1 2 0，搬送設備控制裝置1 1參照搬送路徑表格（參照 圖8 )，並根據搬送路徑選擇規則（參照圖1 0 )，從現在的 F r 〇 m點與下一 T 〇點來決定中轉點。此後，處理移向圖1 4 之 S1 28 〇 參照圖1 4，在S1 2 2，搬送設備控制裝置1 1參照搬送距 離表格（參照圖9 )，檢測故障狀況。此時，檢知設定為圖9 所示的通過禁止旗標的（1 )的搬送路徑發生故障。當檢測為 有故障狀況時（S1 22中為YES)，則處理移向S1 24。若非如 此的話（S 1 2 2中為N 0 )，則處理移向S 1 2 8。 在S 1 2 4，搬送設備控制裝置1 1判斷通過禁止點是否對 應於選擇路徑。當通過禁止點對應於選擇路徑時（S 1 2 4中 為Y E S )，則處理移向S 1 2 6。若非如此的話（S 1 2 4中為N 0 )， 則處理移向S 1 2 8。在S 1 2 6，搬送設備控制裝置1 1參照搬 送路徑表格（參照圖8 )，並根據搬送路徑選擇規則（參照圖 1 0 )，從現在的F r 〇 m點與下一 T 〇點來決定中轉點。在 S 1 2 8，搬送設備控制裝置1 1係於搬送路徑表格（參照圖8 ) 的從現在點至最終點的各中轉路徑上加上1。在S 1 3 0，搬 16 92\瑞薩科技 VFR290-925461 -0501 1225840 送設備控制裝置1 1於台車7執行動作指示。 在S 1 3 2，搬送設備控制裝置1 1，判斷是否接收到來自 台車7的到達分叉點的訊息。當接收到來自台車7的到達 分叉點的訊息時（S 1 3 2中為Y E S )，則處理移向S 1 3 4。若非 如此的話（S 1 3 2中為N 0 )，則處理移向S 1 3 2，等待來自台 車7的到達分叉點的訊息。 在S 1 3 4，搬送設備控制裝置1 1，判斷接收到來自台車 的分叉點是否最終點。當為最終點時（S 1 3 4中為Y E S )，則 處理移向S 1 3 6。若非如此的話（S 1 3 4中為N 0 )，則處理移 向圖1 3之S1 0 8，在進入1個點的狀態再度開始搬送路徑 的選擇。 在S 1 3 6，搬送設備控制裝置1 1開放台車。在S 1 3 8，搬 送設備控制裝置1 1作為空載台車使其開始回送。此時，以 記憶於圖1 2所示之空載台車迴繞路徑設定表格的站點順 序執行空載台車的回送。 參照圖1 5，由搬送設備控制裝置1 1執行的空載台車回 送處理，具有如下的控制構造。又，在圖15及圖16所示 的流程中，對於與前述圖1 3及圖1 4所示的流程相同的處 理則賦予相同的步驟編號。而關於此等的處理也相同。故， 在此並不重複此等的詳細說明。 在S 2 0 0，搬送設備控制裝置1 1參照空載台車迴繞路徑 設定表格（參照圖1 2 )，依空載台車行走路徑執行空載台車 的回送。此後，S 1 0 8〜S 1 3 2的處理，係執行與前述實載台 車搬送處理相同的處理，避免阻塞點及故障點，依搬送路 17 92\瑞薩科技\JR290-925461 -0501 1225840 徑選擇規則（參照圖1 ο)來選擇搬送路徑。 參照圖1 6，在S 2 0 2，搬送設備控制裝置1 1當接收到來 自空載台車的到達分叉點的訊息時，判斷是否有對該台車 的預約。在有預約的情況（S 2 0 2中為Y E S )，則處理移向 S 2 0 4。若非如此的話（S 2 0 2中為N 0 )，則處理移向圖1 5之 S1 08 ° 在S 2 0 4，搬送設備控制裝置1 1，指示將台車移動至預 約的F r 〇 m站點。也就是說，因為有晶圓的搬送預約，即依 該預約指示移動至屬移載晶圓用的站點的From站點。 在S 2 0 6，搬送設備控制裝置1 1，作為搬送台車開始該 台車的移動。 參照圖1 7，由搬送設備控制裝置1 1執行的台車預約處 理，具有以下的控制構造。 在S 3 0 0，搬送設備控制裝置11，接收來自屬於上位電 腦的搬送指令指示裝置1 0的搬送指令。此時，接收From 點、To點、批量編號及優先度的搬送指令。 在S 3 0 2，搬送設備控制裝置1 1確認接收的搬送指令中 的From點的From儲存庫。在S304，搬送設備控制裝置11 參照搬送要求表格（參照圖6 )，判斷為搬送中的台車，且 其最終點是否存在為F r 〇 m站點的台車。若存在如此的台車 (S 3 0 4中為YES)，則處理移向S 3 0 6。若非如此的話（S304 中為N 0 )，則處理移向S 3 0 8。在S 3 0 6，搬送設備控制裝置 1 1等待抵達台車而執行預約。其後結束處理。 在S 3 0 8，搬送設備控制裝置1 1參照空載台車要求區域 18 92 端薩科技 \JR290-925461-0501 1225840 設定表格（參照圖1 1 )，判斷在接近F r 〇 m站點的站點是否 存在台車。若在如此的站點存在台車（S 3 0 8中為Y E S )，則 處理移向S 3 1 4。若非如此的話（S 3 0 8中為N 0 )，則處理移 向 S31 0。 在S 3 1 0，搬送設備控制裝置1 1參照搬送要求表格（參照 圖6 )，判斷為搬送中的台車，且其最終點是否存在為F rom 站點的台車。當存在如此的台車時（S 3 1 0中為Y E S )，則處 理移向S 3 1 2。若非如此的話（S 3 1 0中為N 0 )，則處理移向 S 3 0 8 ° 在S 3 1 2，搬送設備控制裝置1 1等待抵達台車而執行預 約處理。其後結束處理。 在S 3 1 4，搬送設備控制裝置1 1執行預約處理。進行預 約台車的回送處理。 又，除圖1 3〜圖1 7所示流程的處理外，搬送設備控制 裝置1 1還基於介由介面而接收到來自自動搬送設備9的資 訊，執行插入處理。該插入處理當在搬送通路上的任一通 路發生故障時，設定搬送距離表格（參照圖9 )的通過禁止 旗標（將「0」設定為「1」）。另外，當接收到表示故障恢 復的資訊時，則重設搬送距離表格（參照圖9)的通過禁止 旗標（將「1」重設為「0」）。 基於如上的構造及流程，說明本實施形態之搬送系統的 動作。搬送設備控制裝置1 1接收來自屬於其上位電腦的搬 送指令指示裝置1 0的搬送指示（S 1 0 0 )。此時，接收含有屬 搬送出發地儲存庫的F r 〇 m點、屬搬送目的地儲存庫的T 〇 19 92\瑞薩科技\JR290-925461-0501 1225840 點、批量編號及優先度的訊息。基於所接收的指令内容， 從搬送出發地儲存庫（例如：s Τ Κ 0 0 1 ) 1 A的移載站點（例 如：ST001 )與搬送目的地儲存庫（例如：STK 0 0 2 ) 1 B的移載 站點（例如：S T 0 0 2 )開始搬送路徑的檢索（S 1 0 8 )。確認搬送 路徑選擇規則（參照圖1 0 )( S 1 1 2 )，根據按優先度順序排列 替換的搬送要求表格，來按該搬送要求的編號順序檢索搬 送路徑。若根據優先順序而輪到搬送順序的話，則根據圖 1 7所示台車預約處理進行台車的準備。在該搬送中的搬送 目的地站點與自己要求的搬送出發地站點一致的情況 (S3 04中為yes)，因為無進行台車的預約與準備的必要， 而等待抵達台車執行預約（S306)。在其他之搬送中的搬送 站點與自己要求的搬送出發地站點不一致的情況（S 3 0 4中 為N 0 )，則有台車預約的必要。參照空載台車要求區域設 定表格（參照圖1 1 )，判斷在接近F r 〇 m站點的站點是否存 在於台車資料表格（參照圖7)的空台車的下一站點 (S 3 0 8 )。若存在的情況（S 3 0 8中為YES)，則進行預約處理 而使預約台車回送處理（s 3 1 4 ) °當執行有該s 3 1 4的處理 時，則執行圖1 5及圖1 6所示空载台車回送處理。 為移動至搬送目的地站點（例如· s T 0 0 1 )’檢索從自己 的站點至搬送目的地站點的搬送路徑。此時，檢索記載於 搬送路徑表格（參照圖8)的From-To,並根據搬送路徑選擇 規則（參照圖1 0 )，來決定搬送路徑。並根據決定的搬送路 徑而於搬送距離表格（參照圖9)的使用路徑加上1。在此， 視所計之數如1 0以上的路徑為阻塞中或阻塞’而進行不同 92\ 瑞薩科技\了112%-925461 -0501 20 1225840 的路徑的檢索（S118中為YES、而進入S120)。 在搬送途中搬送台車發生故障等路徑被封鎖的 距離表格（參照圖9 ))的旗標，在通過禁止點對 則的情況選擇不同的路徑（S 1 2 4中為Y E S，而3 在執行搬送而到達下一分叉點時，進行再次 索。這對應於從圖13及圖14、圖15及圖16έ S 1 0 8的循環路。在進行再次的路徑檢索時，從 格（參照圖9 )的使用路徑減去1。也就是說，因 變的情況，而成為從迄今為止設定的路徑的搬 (參照圖9 )的使用路徑減去1。當藉由在每次到 一分叉點時反覆執行進行再度路徑檢索的作業 點時（S 1 3 4中為Y E S )，即於搬送路徑表格（參月 送路徑動作次數上加上1，同時，對於搬送時 作次數X搬送時間+搬送時間）+ (動作次數+ 1 ) 動作時間代入某一固定週期如1 9次或9 9次， 次數的搬送時間代入此等的1 9次或9 9次的平 間，而於加上此等的搬送時間代入2 0次或1 0 0 間。也就是說，藉由演算最近的2 0次或1 0 0次 的平均值，可更為正確地反應實時變動的搬送 時間。 如上所述，根據本實施形態之搬送系統，可 設於具有複雜組入的搬送路徑的製造線的搬送 輛台車。也就是說，在設定搬送路徑的情況， 離、搬送時間、故障狀況、阻塞狀況來選擇搬 92\瑞薩科技 VFR290-925461 -0501 另外，參照 情況（搬送 應於選擇規 复入S126) 〇 的路徑檢 心S134返回 搬送距離表 為有路徑改 送距離表格 達如此之下 而到達最終 展圖8 )的搬 間寫入{(動 }。此時，於 於乘上動作 均搬送時 次的搬送時 的搬送時間 路徑的搬送 有效控制敷 系統的複數 考慮搬送距 送路徑，可 21 1225840 以加上搬送等待時間與搬送時間的時間成為最短的方式而 有效設定搬送路徑。尤其是，習知一旦從搬送出發地站點 出發的台車，由此時所定的通路而進行至屬最終目的地的 搬送出發地站點的搬送，當在搬送的途中的時點前面行走 中的台車發生故障等而停止的情況，在該故障被解除前只 能停止。另外，在該台車的前方出現阻塞的情況，在該阻 塞被解消前只能停止。然而，根據本實施形態之搬送系統， 在從搬送出發地站點出發後而到達分叉站點時，執行再度 搬送路徑的再設定。為此，反應該再設定時之搬送路徑的 故障狀況及阻塞狀況，可重新設定再度搬送路徑。其結果， 在具有複雜且多叉道的搬送通路的搬送系統中可有效移動 複數輛的台車。 以上，雖有詳細說明了本發明，但此僅為例示而已，並 未有任何限定，發明之精神與範圍僅是藉由所附的申請專 利範圍所限定。 【圖式簡單說明】 圖1為本發明之實施形態之搬送系統之系統構成圖。 圖2為將圖1之系統構成圖的局部放大的圖。 圖3為在圖1之系統構成圖記載儲存庫及移載站點名的 圖。 圖4為在圖1之系統構成圖記載分叉站點名及停止站點 名的圖。 圖5為顯示儲存庫的構成的立體圖。 圖6為表示記憶於搬送設備控制裝置之記憶部的搬送要 22 92\瑞薩科技\了11290-925461 -0501 1225840 求表格的圖。 圖7為表示記憶於搬送設備控制裝置之記憶部的台車資 料表格的圖。 圖8為表示記憶於搬送設備控制裝置之記憶部的搬送路 徑表格的圖。 圖9為表示記憶於搬送設備控制裝置之記憶部的搬送距 離表格的圖。 圖1 0為表示記憶於搬送設備控制裝置之記憶部的搬送 路徑選擇規則的圖。 圖1 1為表示記憶於搬送設備控制裝置之記憶部的空載 台車要求區域設定表格的圖。 圖1 2為表示記憶於搬送設備控制裝置之記憶部的空載 台車迴繞路徑設定表格的圖。 圖1 3及圖1 4為顯示由搬送設備控制裝置之控制部所執 行的實載台車搬送處理的控制步驟順序的流程圖。 圖1 5及圖1 6為顯示由搬送設備控制裝置之控制部所執 行的空載台車回送處理的控制步驟順序的流程圖。 圖1 7為顯示由搬送設備控制裝置之控制部所執行的台 車預約處理的控制步驟順序的流程圖。 (元件符號說明） 1 A〜1Z、1 AA、1AB、1 AC 儲存庫 1 儲存庫 2 台車軌道鐵軌 3 分叉點 23 92瑞薩科技\JR290-925461 -0501 1225840 4 儲 存 庫 前 分 叉 點 5 台 車 停 止 點 6 儲 存 庫 前 移 載 點 7 台 車 8 移 載 裝 料 器 9 白 動 搬 送 δ又 10 搬 送 指 令 指 示 裝 置 11 搬 送 設 備 控 制 裝 置 13 移 載 點 14 儲 存 庫 吊 車 STK * * * ( * * * = 001 029 ST0 氺 氺 (* * =0 1 〜29) ST2 * 氺 儲 存 庫 前 分 又 站 點 ST2 * * 儲 存 庫 前 合 流 站 點 ST3 * * 分 叉 及 停 止 站 點 ST4 * 氺 停 止 站 點 批量收納用儲存庫 移載站點1225840 玖, Description of the invention: [Technical field to which the invention belongs] The present invention relates to a system for transferring a plurality of processing steps on a semiconductor manufacturing line in batches of semiconductor wafers. In particular, the control device of a semiconductor wafer system is effectively performed using a complicated and multi-lane conveying path. [Prior Art] In a manufacturing plant such as a semiconductor device, For semiconductor wafers dry, Various processing steps such as etching, It is carried out in batches and separate processing apparatuses. In a processing device that processes the batch, As a storage place, a batch of processing equipment that temporarily stores the step to be transferred and a batch cabinet (storage) transferred from the previous step are provided. then, Each storage room has its own cabinet access, crane, The batch is moved between cabinets and bays by controlling the crane. also, Repositories are linked by tracks, With unmanned delivery vehicles (carriages) moving in batches on rails, The semiconductor batch is transferred to a designated processing device in the next processing step. Such transfer systems are usually automated, To get the job improvement of the production line. Generally, in a semiconductor wafer batch transfer system, With a transfer command controller that holds the entire transfer system; And the controllers of each part by the intranet. These have an outbound controller that manages batches or unloads in a storage warehouse to a carrier vehicle, etc .; And control the batch and transfer of the delivery vehicles on the rails connecting each storage warehouse Transfers the entrance and exit lanes up. The batch efficiency of the wafers. The overall palm connection. The controller for the transfer instruction issues a batch transfer instruction to each controller. On the basis of this transport system, A carrier vehicle stores a carrier containing one semiconductor wafer of a transported amount, By walking on the track, The carrier is moved from the warehouse exit of the transfer departure point to the warehouse entrance of the transfer destination. Usually an unloaded carrier vehicle patrols or waits on the track with an unloaded attitude, While waiting for a transfer command from the transfer command controller. Japanese Patent Application Laid-Open No. 2000- 3 3 3 71 discloses such a semiconductor wafer transfer method. The transportation method disclosed in the bulletin, It is a vertical, horizontal, vertical ceiling of a clean room suspended from a semiconductor manufacturing line. Orbital moving robots that are arranged horizontally and diagonally, According to the conveying instruction of the control signal, Select the shortest or the nearest track among the above-mentioned roads to automatically walk. According to the transportation method disclosed in the bulletin, Vertically along the ceiling suspended from the clean room, A horizontally and diagonally-arranged conveying robotic arm, According to the conveying instruction of the control signal, Choose the shortest or nearest track and walk automatically, therefore, Can improve the conveying path of products, And improve the efficiency of transportation, In particular, multiple products can be handled frequently. Japanese Patent Application Laid-Open No. 2000-2101106 discloses such a semiconductor wafer transfer system. The transport system disclosed in the bulletin, To make the unmanned vehicle move along the track, A similarly configured transport system is used to transport the transported objects stored on the transport vehicle between the storage places of the transported objects. Its package contains: A controller for a transfer instruction that issues a transfer instruction for the transfer item; Carry out 6 92 \ Renesas Technology \】 11290-925461 -0501 1225840 A request to arrange a vehicle is issued on the condition of the received transportation instruction, Simultaneously, A warehouse-out controller for controlling a warehouse from a storage place at the place of departure from a warehouse and loading it on a rail car; And control the operation of the transport vehicle on the track, Simultaneously, Accepting a request to arrange a vehicle from the outbound controller, The transport controller on the track or on standby is brought to the transport controller of the storage place at the transport departure point. According to the transportation system disclosed in the bulletin, Because it has a transport command controller that issues a transport command for the transported object; The outbound controller that issues a request to arrange a vehicle based on the received transportation instruction; And accept requests for vehicle arrangements, The transport controller that moves the transport vehicle toward the storage place at the transport departure point, therefore, Reduce waiting times by arranging delivery vehicles more quickly in storage at the point of departure, In particular, it can shorten the time required for transportation. however, The conveying method disclosed in Japanese Patent Laid-Open No. 2 0 2-3 3 3 71, Considering only the transport distance to select the transport route, There are stop stops along the way, When transferring sites, etc. It is not possible to select the transport route correctly. also, Because only the transport distance is considered and the transport time is not considered, When it is necessary to select a transport route with a long transport time even if the transport distance is short, A long transfer time is required, and the semiconductor wafer cannot be efficiently transferred. The conveying system disclosed in Japanese Patent Laid-Open No. 2 0 2-1 10 7 6 This is just a system for controlling the call of a trolley carrying semiconductor wafers, It cannot effectively move a trolley carrying a semiconductor wafer. SUMMARY OF THE INVENTION The object of the present invention is to: Provides a control system for a conveying system that efficiently moves the trolleys in a complex and multi-lane conveyance 7 92 \ Renesas Technology UR290-925461-0501 1225840 passageway. Another object of the present invention is: A control device for a transport system is provided that uses a so-called quantitative index of distance and time to move the trolley efficiently. Another object of the present invention is to: Provides a control system for a conveyance system that allows the trolley to efficiently move in consideration of a failure path. Another object of the present invention is to: A control system is provided for a conveyance system that allows a trolley to be efficiently moved in consideration of a blocked path. Another object of the present invention is to: A control device is provided for a transport system that allows the trolley to be moved efficiently in consideration of the priority of the work order. The control device of the present invention, Tied to a plurality of bifurcation points, Transport path connecting bifurcation points, Stations located between bifurcation points and transport systems for trolleys moving on the transport path from the departure station to the arrival station, It controls the movement of multiple trolleys. The control device includes: The first memory unit that memorizes the positional relationship between the bifurcation point and the station; The first calculation module for calculating the transport path of the mobile trolley from the departure station to the arrival station based on the position relationship; A module for generating information indicating the transport status of the calculated transport path; A second memory unit for memorizing information indicating the transport status of a plurality of carts, which is made by forming modules; When the trolley reaches the calculated bifurcation point contained in the transport path, Based on the information stored in the second memory, The second calculation module for calculating the transport path of the trolley from the arrival bifurcation point to the arrival station; And create information indicating the conveyance status of the conveyance path calculated by the second calculation module, By memorizing in the second memory, Control module and control module of the second memory. The first calculation module is based on the positional relationship of the bifurcation points and stations 8 92 \ Renesas Technology UR290-925461 -0501 1225840, Calculate the transport path of the mobile trolley from the departure station to the arrival station. The production module is information that indicates the conveyance status (for example, the conveyance path calculated by the first calculation module). Trolley blocking information). The second calculation module is based on information indicating the transport status of the plurality of trolleys stored in the second memory section. When the trolley reaches the calculated bifurcation point contained in the transport path, Calculate the transportation path from the arrival bifurcation point to the trolley at the station. With this, When you arrive at the bifurcation site after leaving the departure site, Reset the transport path again. to this end, It can reflect the blocking information of the transport path at the time of resetting. And reset the transport route again. the result, Most of the carts of a transport system having a complicated and multi-lane transport path can be efficiently moved. The above and its objects of the present invention, feature, Appearance and advantages, The detailed description of the present invention, which is understood in connection with the drawings, It should be clear at a glance. [Embodiment] The following, An embodiment of the present invention will be described with reference to the drawings. In the following description, The same component symbols are assigned to the same parts. These names and functions are also the same. Therefore, These detailed descriptions are not repeated. Referring to Figure 1, The system configuration of the transfer system of this embodiment will be described. The automatic conveying equipment 9 having a complicated conveying path is a conveying equipment having a ceiling-mounted trolley 7. This automatic conveying equipment 9 is connected to the conveying equipment control device 11 also, It is connected to the transfer instruction indicating device 10 of the host computer. The transport equipment control device 11 is based on information received from the transport instruction instructing device 10, To control the automatic conveying device 9. also, 9 92 \ Renesas Technology \ ^ 1-290-925461-0501 1225840 Automatic transfer equipment 9 is a transfer equipment with a floor-mounted walking trolley. The automatic conveying equipment 9 is shown in the top view of FIG. 1. The trolley rail 2 is laid in the longitudinal and Horizontal and oblique. Trolley Tie Tie Tie 2 has a plurality of bifurcation points 3, By this branching point 3, the trolley rail 2 is branched. Between bifurcation point 3 and bifurcation point 3 or bifurcation point 3 and trolley stop point 5, There are storage banks 1A to 1Z, 1AA, 1AB, 1AC. Referring to Figure 2, The structure within a one-dot chain line shown in FIG. 1 is explained in detail. as shown in picture 2, This automatic transfer device 9 is provided with a storage 1 for batch storage between the branch point 3 and the branch point 3. At the place where the batch storage bank 1 is arranged, A storage warehouse is provided at two locations on the trolley rail 2 and the front sub-point 4 is also provided. Parallel to the trolley rails 2 connecting the bifurcation points 3 to each other, Lay load point 6 before laying the connection repository, At the same time, the front fork points 4 of the storage tanks are connected to each other by trolley rails 2. On the trolley rails 2 at the fork points 4 of each other before connecting the storage, A storage front transfer point 6 is provided at a position corresponding to the storage 1 for batch storage. In addition, as shown in picture 2, On the trolley rail 2 connecting the bifurcation points 3 to each other, A trolley stop point 5 is provided to temporarily stop the trolley 7. The trolley 7 is from such a storage 1 A ~ 1 Z, 1 A A, 1 A B, Any of 1 A C, To another batch storage repository, The trolley 7 is moved. One wafer is transferred on this trolley. Referring to Figure 3, Describe the name of the repository of the automatic transfer device 9 shown in FIG. 1, Transfer site, Fork site in front of the repository and confluence site in front of the repository. As shown in Figure 3, Each batch storage bank is named a storage bank name of STK * * * (* * * = 0 0 1 to 0 2 9). In addition, The transfer site is named S T 0 * 10 92 \ Renesas Technology UR290-925461 -0501 1225840 * (* * 2 01 ~ 29). In addition, The front fork site and the front merge site are named S T 2 * *. After so named, As shown in Figure 3, Namely, the transfer site of the automatic transfer equipment 9 is not repeated, Repository, Fork site in front of the repository and confluence site in front of the repository. Referring to Figure 4, The bifurcation and stop stations S T 3 * * and the stop stations S T 4 * * of the automatic transfer facility 9 shown in FIG. 1 are displayed. As shown in Figure 4, The bifurcation and stop stations are located at intersections of the conveyance paths. In addition, Stop station S T 4 * * is located in the middle of the fork and stop station S T 3 * * and other fork and stop stations S T 3 * *. As mentioned above, As explained using FIG. 1 to FIG. 4, The automatic transfer facility 9 of this embodiment has a plurality of stations, A plurality of bifurcation points and a plurality of transfer points. Received from the transport instruction instructing device 10 including the storage place of the transport departure point, Transfer destination repository, Batch number, The conveyance equipment control device 11 of the priority message, Retrieval of the transport route is started from the transfer site of the storage at the departure point and the transfer site of the storage at the transfer destination. also, The retrieval of this transport route will be described in detail later. FIG. 5 is a perspective view showing a configuration of a storage machine. In the batch storage repository 1, Via the storage crane 1 4 Each batch of wafers is transferred into the trolley 7 using a transfer loader 8 which can transfer from the transfer point 13 to the trolley. In addition, It is also possible to transfer each batch of wafers from the trolley 7 to the transfer point 1 3. From the bifurcation point 4 in front of the warehouse and from the trolley to the railroad, the bifurcation from the trolley rail 2 Parked in front of storage point 6 The wafers are stored in the batch storage library 1 for each batch by the transfer of the trolley by the transfer loader 8. 11 92 \ Renesas Technology \ Claw 290-925461-0501 1225840 The conveying equipment control device 11 shown in Figure 1, Has an interface for communication with each device of the automatic transfer device 9, A control unit that controls the movement of the trolley based on information input from the interface, And a memory unit that memorizes programs executed by various data tables and control units. The conveying equipment control device 1 1 can be realized by a general computer system, for example. In more detail, The computer system is a computer having a drive device that reads or writes data and programs from various recording media, It is composed of an output device such as a display, and an input device such as a keyboard and a mouse. In addition to the drive device of the recording medium described above, Also includes central processing units (C P U: C e n t r a 1 P r o c e s s i n g U n i t (control part)) and memory and fixed hard disk (memory part). A program composed of a plurality of modules downloaded to the memory is executed by a central processing unit, In order to realize the function of controlling the conveying equipment. Referring to Figure 6, The transfer request form stored in the storage unit of the transfer device control device 11 will be described. As shown in Figure 6, The transfer request form is based on each number used to identify the transfer request. To remember the number of the trolley that should be requested, The name of the transfer departure storage location (From) and the transfer destination storage location name (To), Current position and current status and priority. "Q" shows higher priority than "S". In status, "in transit", "Waiting for Vehicle Arrangement", "Loading" and "Moving". The transfer includes "transfer to the storage at the departure point" and "transfer to the storage at the transfer destination". Referring to Figure 7, The trolley data table stored in the storage unit of the transporting device control device 11 will be described. As shown in Figure 7, The trolley data table is based on each number used to identify the trolley. To memorize the state of the trolley, Currently set at the point of departure and destination of the car, Current bifurcation point, Now 12 92 \ Renesas Technology \ Claw 290-925461-0501 1225840 at the destination point, current location, Status and priority. The status of the trolley is "normal", "malfunction", Three types of "no-load trolleys". Referring to Figure 8, The transfer path table stored in the storage unit of the transfer device control device 11 will be described. As shown in Figure 8, The transfer route table is for each combination of the transfer destination station and the transfer destination station. To remember the name of the transit site. The transfer station includes a transfer station (1) to a transfer station (1 1). At each combination of the transfer start station and the transfer destination station, Remember the distance, Distance priority, Number of sites, Site priority, Transfer time and number of operations. E.g, On the transport path moving from S T 0 0 1 to S T 0 0 2, ST 201 is set as a relay station (1), ST301 as the transfer station (2) and ST203 as the transfer station (3). In addition, On the transport path moving from ST001 to ST003, With ST201, ST301, ST203, ST204, ST302 and ST205 paths; Via ST2 (H, ST3 (H, ST203, ST002, ST204, ST302 and ST205 paths: And via ST2 (H, ST3 (H, ST4 (H, ST306, ST209, ST005, ST210, Three paths of ST302 and ST T205. In addition, For each path, In the order of the small number of sites that passed, To set the priority of the number of stations. Referring to Figure 9, The transfer distance table stored in the storage unit of the transfer device control device 11 will be described. As shown in Figure 9, The transfer distance table is for each combination of the site belonging to the start point and the site belonging to the end point, To remember the distance, Time passes the number of units and passes the prohibition flag. The number of time-passing units is when the number of units exceeds a predetermined threshold, It was judged that the path was blocked. When the pass prohibition flag is set (set to "1", Reset to "0"), It means that there is a failure, maintenance, etc. in the transport path and it cannot pass. 13 92 \ Renesas Technology \ 111290-925461 -0501 1225840 Referring to Figure 10, The transport route selection rule stored in the storage unit of the transport equipment control device 11 will be described. As shown in Figure 10, This transport route selection rule is a rule that prioritizes the transport time (1), A rule (2) for prioritizing the transport distance and a rule (3) for prioritizing the number of stations passed. E.g, The rule (1) of the transport path selection rule is to prioritize the transport time. No priority is given to the distance and number of stops. Referring to Figure 11 A description will be given of a no-load trolley request area setting table stored in the storage section of the transport device control device 11. As shown in Figure 11, No-load trolley requires that the area setting form be at each stop of each station, The memorizer does not require the priority order for the no-load trolleys to stop at. E.g, As shown in Figure 11 In the case of site S Τ 0 0 1, Priority is given to no-load trolleys parked at station ST 2 0 0 (1), The priority is given to the no-load trolley stopped at station ST 2 01 (2), Set until priority (5). That is, When an unloaded trolley is required at station ST 0 0 1, Remember the priority (1) to priority (5) site names in a more favorable order. Referring to Figure 12 The table for setting the winding path of the no-load trolley stored in the storage unit of the transporting device control device 11 will be described. As shown in Figure 12, The unloaded trolley winding path setting table is a table for setting which route the unloaded trolley is allowed to rewind. E.g, When the trolley with the trolley number "1" becomes an unloaded trolley, Set to rewind ST 3 0 0, ST301, The winding path of ST 302 and ST303. E.g, It is also possible to set the no-load trolley winding path setting table so that a large number of no-load trolleys surround the station with a high frequency of transportation requirements. Referring to FIGS. 13 and 14, 14 92 \ Renesas Technology \〗 11290-925461 -0501 1225840 Program executed by the control department of the transport equipment control device 11 It is related to the handling of the trucks. It has the following control structure. In the step (hereinafter referred to as step S) 1 0 0, The transport equipment control device 1 1 receives a transport instruction instructing device 10 from a host computer. at this time, Transport equipment control device 1 1 receives F r ο Π 1 point, T 〇 point, Contents of batch number and priority. At S 1 0 2, The transport equipment control device 11 determines whether the priority is high based on the received priority included in the transport instruction. When the priority is high (YES in S 102), Processing then moves to S 104. If this is not the case (N0 in S 1 0 2), The process then moves to S 1 0 6. At S 1 0 4, The conveyance equipment control device 11 registers the priority in the request form value of the conveyance request form (see FIG. 6) as "Q". At S 1 0 6, The transport facility control device 11 registers the first F r om point and the first T o point of the transport request form (see FIG. 8). at this time, Register the F r 〇 m and T 〇 points received from the transfer instruction instructing device 10 of the host computer. At S 1 0 8, The transport equipment control device 11 starts to select a transport path. At S 1 1 0, The transfer facility control device 11 registers the current From point and the next To point of the transfer request form (see FIG. 8). In SI 1 2, The conveyance equipment control device 11 confirms a conveyance route selection rule (refer to FIG. 10). at this time, Priority confirmation of delivery time, Either the transport distance or the number of stations. While at S 1 1 4 The transport equipment control device 11 refers to the transport path table (see FIG. 8), And according to the transport route selection rule (refer to FIG. 10), The transition point is determined from the current F r 〇 in point and the next T 〇 point. On S 1 1 6 The conveying equipment control device 1 1 refers to the conveying distance table (refer to FIG. 9), Detect congestion. at this time, When the number of units in the transport distance table (refer to Figure 9) passes by more than the predetermined 15 92 \ Renesas Technology \ JR290-925461-0501 1225840 Detected as blocked. When detected as blocking (Y E S in S 1 1 6), The process then moves to S 1 1 8. If this is not the case (N 0 in S 1 1 6), The process then moves to S 1 2 2 in FIG. 14. At S 1 1 8 The transporting device control device 11 determines whether the blocking point corresponds to the selected route. When the blocking point corresponds to the selected path (Y E S in S 1 1 8), Processing then moves to S 1 2 0. If this is not the case (N 0 in S 1 1 8), The process moves to S 1 2 2. At S 1 2 0, The transport equipment control device 11 refers to the transport path table (see FIG. 8), And according to the transport route selection rule (refer to FIG. 10), The transition point is determined from the current F r 〇 m point and the next T 〇 point. Since then, The processing moves to S1 28 in FIG. 14. Referring to FIG. 14, On S1 2 2 The transport equipment control device 11 refers to the transport distance table (refer to FIG. 9), Detect fault conditions. at this time, It is detected that the transport path (1) passing the prohibition flag shown in FIG. 9 has failed. When a fault condition is detected (YES in S1 22), Processing then moves to S1 24. If this is not the case (N 0 in S 1 2 2), The process then moves to S 1 2 8. At S 1 2 4 The transport equipment control device 11 determines whether or not the passing prohibited point corresponds to the selected route. When the passing prohibited point corresponds to the selected path (Y E S in S 1 2 4), The process then moves to S 1 2 6. If this is not the case (N 0 in S 1 2 4), The process then moves to S 1 2 8. On S 1 2 6, The transport equipment control device 11 refers to the transport path table (see FIG. 8), And according to the transport route selection rules (refer to FIG. 10), The transition point is determined from the current F r 0 m point and the next T 0 point. On S 1 2 8 The conveyance equipment control device 11 adds 1 to each of the transit routes from the current point to the final point in the transfer path table (see FIG. 8). At S 1 3 0, Move 16 92 \ Renesas Technology VFR290-925461 -0501 1225840 Send the device control device 1 1 and execute the operation instruction on the trolley 7. On S 1 3 2, Carrying equipment control device 1 1, It is judged whether or not a message from the trolley 7 to the fork point is received. When receiving a message from the trolley 7 to the bifurcation point (Y E S in S 1 32), The process then moves to S 1 3 4. If this is not the case (N 0 in S 1 32), The process moves to S 1 3 2 Waiting for a message from the trolley 7 to the fork. On S 1 3 4, Carrying equipment control device 1 1, It is judged whether the fork point received from the trolley is the final point. When it is the final point (Y E S in S 1 3 4), Then the process moves to S 1 3 6. If this is not the case (N 0 in S 1 3 4), Then the processing moves to S1 0 8 in FIG. After entering one point, the selection of the transport route is started again. On S 1 3 6, The transport equipment control device 11 opens the trolley. On S 1 3 8, The transport device control device 11 is used as an unloaded trolley to start the return. at this time, The loopback of the no-load trolley is performed sequentially at the stations memorized in the no-load trolley rewinding path setting table shown in FIG. 12. Referring to Figures 1, 5, No-load trolley return processing performed by the transport equipment control device 11 It has the following control structure. also, In the processes shown in FIG. 15 and FIG. 16, The same steps are assigned to the same processes as the processes shown in Figs. 13 and 14 described above. The same applies to these processes. Therefore, These detailed descriptions are not repeated here. At S 2 0 0, The conveyance equipment control device 11 refers to the winding path setting table of the empty trolley (see FIG. 12) Perform the return of the no-load trolley according to the no-load trolley travel path. Since then, S 1 0 8 to S 1 3 2 processing, The same processing as the aforementioned live-carriage transfer processing is performed, Avoid blocking points and failure points, Select the transport route according to the transport route selection rules of 17 92 \ Renesas Technology \ JR290-925461 -0501 1225840 (refer to Figure 1). Referring to Figure 16 At S 2 0 2, When the transport device control device 11 receives a message from the unloaded trolley to the bifurcation point, Determine if there is an appointment for the cart. In case of reservation (Y E S in S 2 0 2), Processing then moves to S 2 0 4. If this is not the case (N 0 in S 2 0 2), Then the processing moves to S1 08 ° in Fig. 1 at S 2 0 4 Carrying equipment control device 1 1, Instruct the cart to move to the scheduled Fr0m station. That is, Because there is an appointment for wafer transfer, That is, according to the reservation instruction, it is moved to the From station, which is a station for transferring wafers. At S 2 0 6, Carrying equipment control device 1 1, The movement of the trolley is started as a transport trolley. Referring to Figure 17, The trolley reservation processing performed by the transport equipment control device 11 It has the following control structure. At S 3 0 0, Transport equipment control device 11, A transfer instruction from the transfer instruction instructing device 10 belonging to the host computer is received. at this time, Receive from points, To point, Batch number and priority transfer instruction. At S 3 0 2, The transport equipment control device 11 checks the From repository of the From point in the received transport instruction. On S304, The transport equipment control device 11 refers to the transport request form (see FIG. 6), Judged as a trolley in transit, And whether its final point is a trolley at the F r 0 m station. If such a cart exists (YES in S 3 0 4), The process then moves to S 3 0 6. If this is not the case (N 0 in S304), The process then moves to S 3 0 8. At S 3 0 6, The transport equipment control device 1 1 waits for the arrival of the trolley and executes an appointment. After that, the process ends. At S 3 0 8, Transport equipment control device 1 1 Refer to the no-load trolley request area 18 92 Duansa Technology \ JR290-925461-0501 1225840 setting table (refer to Figure 1 1), It is determined whether there is a trolley at a station close to the F r 0 m station. If there is a trolley at such a station (Y E S in S 3 0), Then the process moves to S 3 1 4. If this is not the case (N 0 in S 3 0 8), Processing then moves to S31 0. At S 3 1 0, The transport equipment control device 11 refers to the transport request form (refer to FIG. 6), Judged as a trolley in transit, And whether its final point is a trolley at the F rom station. When there is such a trolley (Y E S in S 3 1 0), Processing then moves to S 3 1 2. If this is not the case (N 0 in S 3 1 0), Then the process moves to S 3 0 8 ° at S 3 1 2 The transport equipment control device 11 waits for the arrival of the trolley and executes the reservation process. After that, the process ends. At S 3 1 4 The transport facility control device 11 executes a reservation process. Carry out the return processing of the reservation trolley. also, In addition to the processing shown in the flow of Fig. 13 to Fig. 17, The conveying equipment control device 11 also receives information from the automatic conveying equipment 9 based on the interface, Perform insert processing. When this insertion process fails on any of the transport paths, Set the pass prohibition flag (set "0" to "1") in the transport distance table (see Figure 9). In addition, When receiving information indicating recovery from a failure, Then, the pass prohibition flag of the conveyance distance table (refer to FIG. 9) is reset ("1" is reset to "0"). Based on the above structure and process, The operation of the transfer system of this embodiment will be described. The transport equipment control device 11 receives a transport instruction (S 1 0 0) from the transport instruction instructing device 10 belonging to the host computer. at this time, Receiving F r 〇 m T 〇 19 92 \ Renesas Technology \ JR290-925461-0501 1225840 points, Batch number and priority information. Based on the content of the instruction received, Depots from the transport (eg: s Τ Κ 0 0 1) 1 A transfer site (for example: ST001) and destination storage (eg: STK 0 0 2) 1 B transfer station (eg: S T 0 0 2) The search of the transport route is started (S 1 0 8). Confirm the transport route selection rules (refer to Figure 10) (S 1 1 2), According to the priority order of replacement, To search the transport route in the order of the number of the transport request. If it is the turn order according to the priority order, Then, the trolley is prepared according to the trolley reservation processing shown in FIG. If the destination station of the transfer is the same as the destination station of the transfer (yes in S3 04), Because it is not necessary to make reservations and preparations for trolleys, And wait for the arrival of the trolley to make an appointment (S306). In the case where the transfer station in other transfers is not the same as the transfer departure station requested by you (N 3 in S 3 04), It is necessary to make a reservation for the trolley. Refer to the required area setting form for the empty trolley (refer to Figure 1 1). It is determined whether a station near the F r om station exists at the next station (S 3 0 8) of the empty trolley of the trolley information table (see FIG. 7). If present (YES in S 3 0 8), Then the reservation process is performed to make the reservation trolley return process (s 3 1 4) ° When the process of s 3 1 4 is executed, Then, the return processing of the no-load trolley shown in FIG. 15 and FIG. 16 is performed. To move to a transfer destination station (for example, · s T 0 0 1) ', a transfer route from its own station to the transfer destination station is searched. at this time, Search the From-To listed in the transport route table (see Figure 8), And according to the transport route selection rules (refer to FIG. 10), To determine the delivery route. Based on the determined conveying path, 1 is added to the use path of the conveying distance table (see FIG. 9). here, Depending on the number of counted paths such as 10 or more, it is blocked or blocked ’92 \ Renesas Technology \ searches 112% -925461 -0501 20 1225840 (YES in S118, And proceed to S120). The distance table (refer to Figure 9) for which the transportation cart is blocked during transportation, etc. Choose a different path when the point rule is forbidden (Y E S in S 1 2 4 And 3 when the next fork point is reached by performing the transfer, Proceed again. This corresponds to Figures 13 and 14, Fig. 15 and Fig. 16 are circular paths of S 108. When doing a second route search, Subtract 1 from the use path of the grid (see Figure 9). That is, Variable circumstances, Instead, 1 is subtracted from the use path of the path set so far (see FIG. 9). When the operation point for re-retrieving the path is repeatedly executed every time a bifurcation point is reached (Y E S in S 1 3 4), That is, add 1 to the number of transport route operations in the transport route table. Simultaneously, For the transfer time, the number of operations X transfer time + transfer time) + (number of operations + 1) The operation time is substituted into a fixed period such as 19 times or 9 9 times. The number of transfer times is substituted into these 19 or 99 times rooms, In addition, the transfer time is added to 20 times or 100 times. That is, By calculating the average of the most recent 20 or 100 times, It is possible to more accurately reflect the real-time fluctuation of the delivery time. As mentioned above, According to the transfer system of this embodiment, Transfer carts that can be installed on manufacturing lines with complex incorporated transfer paths. That is, When setting the transport route, from, Shipping time, Fault conditions, Choose to move the jam condition 92 Renesas Technology VFR290-925461 -0501 In addition, Refer to the situation (transportation should be selected in S126). The route checker S134 returns. The transfer distance table has the route transfer distance table below this level and reaches the final display (Figure 8). Write {(movement). at this time, The transfer time at the time of the transfer is the transfer time of the route, the transfer of the route is effectively controlled, and the number of transfer systems is considered. Yes 21 1225840 Effectively set the transport route by adding the transport waiting time and transport time to the shortest time. especially, Once you know the trolleys that depart from the station The transportation to the final destination is carried out through the route determined at this time. When the trolley in front of the vehicle stops when it is stopped during transportation, It can only be stopped before the fault is resolved. In addition, There is a blockage in front of the trolley, It can only stop until the block is removed. however, According to the transfer system of this embodiment, When arriving at the bifurcation site after departing from the transfer departure site, Reset the transport path. to this end, The failure status and congestion status of the conveying path at the time of resetting, You can reset the transport path again. the result, A plurality of trolleys can be efficiently moved in a conveying system having a complicated and multi-lane conveying path. the above, Although the present invention has been described in detail, But this is just an example. There are no restrictions. The spirit and scope of the invention are only limited by the scope of the attached patent application. [Brief Description of the Drawings] FIG. 1 is a system configuration diagram of a transfer system according to an embodiment of the present invention. FIG. 2 is a partially enlarged view of the system configuration diagram of FIG. 1. FIG. Fig. 3 is a diagram showing a repository and a transfer site name in the system configuration diagram of Fig. 1. Fig. 4 is a diagram showing the names of forked sites and stop sites in the system configuration diagram of Fig. 1; FIG. 5 is a perspective view showing the structure of a storage. Fig. 6 is a diagram showing a transfer request stored in a memory section of a transfer device control device 22 92 \ Renesas Technology \ 11290-925461 -0501 1225840. Fig. 7 is a diagram showing a trolley data table stored in a memory section of a control device of a transport facility. Fig. 8 is a diagram showing a transfer path table stored in a storage unit of a transfer device control device. Fig. 9 is a diagram showing a transfer distance table stored in a storage unit of a transfer device control device. Fig. 10 is a diagram showing a transport route selection rule stored in a storage unit of a transport equipment control device. Fig. 11 is a diagram showing a setting table of the no-load trolley request area stored in the storage section of the control device of the conveying equipment. Fig. 12 is a diagram showing a setting table for the winding path of the no-load trolley stored in the storage section of the control device of the transport equipment. Fig. 13 and Fig. 14 are flowcharts showing the sequence of control steps of the transport processing of the pallet truck executed by the control unit of the transport device control device. Fig. 15 and Fig. 16 are flowcharts showing the sequence of control steps for the return processing of the empty trolley performed by the control section of the control device of the conveying equipment. Fig. 17 is a flowchart showing the sequence of control steps for the cart reservation process executed by the control section of the control device of the transport facility. (Element symbol description) 1 A ~ 1Z, 1 AA, 1AB, 1 AC storage 1 Storage 2 Trolley rails 3 Bifurcation points 23 92 Renesas Technology \ JR290-925461 -0501 1225840 4 Front bifurcation point of the storage tank 5 Stop point of the trolley 6 Front loading point of the storage tank 7 Trolley 8 Transfer Loader 9 white moving δ and 10 conveying instruction indicating device 11 conveying equipment control device 13 transfer point 14 storage crane STK * * * (* * * = 001 029 ST0 氺 氺 (* * = 0 1 to 29) ST2 * 分 Repository before the relocation station ST2 * * Confluence site before the repo ST3 * * Fork and stop station ST4 * 氺 Stop site Repository transfer site for bulk storage
92\瑞薩科技\】11290-925461-0501 2492 \ Renesas Technology \】 11290-925461-0501 24