1220403 五、發明說明（l) ---- (一）、【發明所屬之技術領域】 本發明係與一種模具及微穿孔薄片之製造方法有關， 特別是關於一種具有製程簡單及可有效降低成本之模具設 計與製造方法及利用此模具製造微穿孔薄片之方法。 〔二）、【先前技術】 按，習知之喷墨印表機之 嘴薄片（nozzle plate)多用電 來製造。然而隨著喷墨頭解析 個微孔間之間距勢必要逐漸縮 供所需的微加工解析度，於是 光刨打孔以製造高解析度的喷 需的加工解析度，惟此法所需 術上仍有極大的發展空間。 除了利用準分子雷射逐一光包,| 薄片之外，藉由塑膠模造亦是 成本的量產方式，但是在利用 嘴薄片時，通常必須施加極高 入模具間隙而造成盲孔，此時 非常容易被破壞或產生變形， 敗。 喷墨頭（Ink-jet head)的喷 鋒法或研磨微粒沖钱等方式 度的提昇，微孔的孔徑與每 小’故上述之方法已無法提 ，目刖多以準分子雷射逐一 嘴薄片，此方法雖可達到所 之成本較高，所以在量產技 打孔以製造高解析度的噴嘴 目前普遍認同降低喷嘴薄片 射出成型技術製造穿孔的噴 的合模壓力，以避免塑料滲 ，數十微米的細微模具結構 而導致喷嘴薄片之製造失 除此之外，亦可利 孔噴嘴薄片，但是 模時必須具有高精 用凹凸的公母模精密 模具加工精度要求極 进之定位，對於模具 配合，以模造微穿 高’同時公母模合 製造及量產成本而1220403 V. Description of the invention (l) ---- (1) [Technical field to which the invention belongs] The present invention relates to a method for manufacturing a mold and a micro-perforated sheet, and particularly to a method with a simple process and effective cost reduction A mold design and manufacturing method and a method for manufacturing a micro-perforated sheet by using the mold. [2], [Prior art] According to the conventional technology, the nozzle plate of the conventional inkjet printer is manufactured by electricity. However, as the distance between the micro-holes of the inkjet head is resolved, it is necessary to gradually reduce the required micro-processing resolution. Therefore, the planing and drilling to produce high-resolution spraying processing resolution is required. There is still great room for development. In addition to the use of excimer laser packages, one by one, thin films, plastic molding is also a cost-effective method of mass production. However, when using nozzle thin films, it is usually necessary to apply extremely high penetration into the mold gap to cause blind holes. Easy to be damaged or deformed. The inkjet head (Ink-jet head) 's spray front method or abrasive particles are used to increase the degree of money. The aperture of the micropores and the size of the holes are small. Therefore, the above methods can not be mentioned. Although this method can achieve the higher cost, it is generally accepted to reduce the clamping pressure of the nozzle sheet injection molding technology to make the perforated spray in the mass production technology to produce high-resolution nozzles to avoid plastic seepage. In addition to the manufacturing of the nozzle sheet due to the fine mold structure of tens of microns, the nozzle sheet can also be sharpened, but the mold must have high-precision concave and convex male and female molds. Precision mold processing requires extreme positioning. Mould matching, in order to mold micro-penetration high 'simultaneous male and female mold manufacturing and mass production costs
第4頁 五、發明說明（2) 言較不具實際之應用價值。 因此，本發明即在針對上述之困擾，提出/種模具設 計與製造方法及利用此模具製造微穿孔薄片之方法’能夠 有效克服習知之缺失，以達到可實際應用且有麩降低成本 之功效。 ~ (三）、【發明内容】 本發明之主要目的，係在提出一種模具設計與製造方 法及利用此模具製造微穿孔薄片之方法，其係遂過一個模 具的設計方法，再配合微加工技術的應用，無須公母模的 精密定位，即可達到微穿孔薄片之模^，亦矸避免數十微 米之細微模具被破壞或變形，進而達到 < 進行大量生產之 功效。 本發明之另一目的，係在提出一種模具設計與製造方 法及利用此模具製造微穿孔薄片之方法，其係具有製程簡 單、製造時間短，且可有效降低成本之功效，以解決習知 利用準分子雷射製造時所需的較高成本。 為達到上述之目的’本發明係先將一模仁及一模板雙 面研磨加工為平整光滑之表面，在模板表面塗佈一層軟質 材料，並利用微加工技術在模仁表面上模造薄板喷孔的微 柱結構；以及將加工微柱結構後之模仁及研磨為平整表面 後之模板進行合模，以組合成—模具。 本發明之另一實施態樣係為一種利用模具製造微穿孔 薄片之方法，首先，將一模仁及一模板之雙面研磨加工為 1220403 五、發明說明（3) :整光滑之表面，接著，在模板 並再利用微加工技術，在模仁表 二^質材枓， 結構；之後，再將加工微柱姓構德 > 薄板噴孔的微柱 面後之杈板兩者進仃合模，以組成一勺卞i衣 此模具以進行微穿孔薄片之模造製程。、八，後，再利用 :了 J由具體實施例配合所附“ :易瞭解本發明之目的、技術内容、特點及其所：成j (四）、【實施方式】 如第-A圖至第-B圖、第二圖及第三圖所示， 具設計與製造方法’其係包括下列步驟，“ = ί二；著，請參ί第一B圖所示，再利用微加工 模仁π表面上模造薄板喷孔的微柱結構12 技術在 所示，再將-模板14雙面進行研磨加工為平整光圖 面，並在模板14表面塗佈一層數暂 作為模板14及模仁10合模時之枓\二軟質材料16係 灶椹H 4: 以利於模造穿孔微 :構’最*味參考第二圖所示，將模造好微柱結構12之 模仁10及表面研磨好之模板14進行合模，以組合成一模且 18，再利用模具18以進行微穿孔薄片之模造製程。、八 其中’模仁10材料係可選自金屬、合金、陶竞或其複 :材料等材質；而在進行微加工技術時，係可使用光刻電 鑄技術（LIGA)、微放電技術、雷射加工或電化學蝕刻等技 國Page 4 5. Description of the invention (2) The language is less practical. Therefore, the present invention is directed to the above-mentioned problems, and proposes / designs a mold design and manufacturing method and a method for manufacturing a micro-perforated sheet by using the mold ', which can effectively overcome the lack of knowledge to achieve practical application and the effect of reducing the cost of bran. ~ (III) [Content of the invention] The main purpose of the present invention is to propose a mold design and manufacturing method and a method for manufacturing micro-perforated sheet by using the mold. The method is to design a mold and then cooperate with micro-processing technology. In the application, the micro-perforated sheet mold can be achieved without the precise positioning of the male and female molds, and the micro-molds of tens of micrometers can be prevented from being damaged or deformed, thereby achieving the effect of < mass production. Another object of the present invention is to propose a mold design and manufacturing method and a method for manufacturing a micro-perforated sheet by using the mold. The method has the advantages of simple manufacturing process, short manufacturing time, and effective cost reduction in order to solve the conventional utilization. Higher costs required for excimer laser manufacturing. In order to achieve the above-mentioned purpose, the present invention firstly grinds a mold kernel and a template on both sides into a smooth surface, applies a layer of soft material on the surface of the template, and uses micro-machining technology to mold the thin plate nozzle holes on the surface of the mold kernel. A micro-pillar structure; and a mold after processing the micro-pillar structure and a template after grinding to a flat surface to form a mold. Another embodiment of the present invention is a method for manufacturing a micro-perforated sheet by using a mold. First, a two-sided grinding process of a mold kernel and a template is 1220403. V. Description of the invention (3): A smooth surface, then Then, in the template and then using micro-machining technology, the material is structured on the surface of the mold. After that, the two micro-cylindrical plates after the micro-pillar holes are processed and the two plates are combined. Mold to make a spoonful of clothes to mold the micro-perforated sheet. Eighth, later, reused: J is supplemented by specific embodiments. ": It is easy to understand the purpose, technical content, characteristics and features of the present invention: Cheng j (four), [Embodiment] As shown in Figure -A to As shown in Figures -B, 2 and 3, the design and manufacturing method includes the following steps: "= ί 二; by, please refer to‚ Figure 1B, and then use micro-machined mold core The micro-pillar structure 12 of the thin plate nozzle holes on the π surface is shown in the figure. Then, the-template 14 is polished on both sides to a flat light surface, and a layer of the surface of the template 14 is temporarily used as the template 14 and the mold core 10模 \ Two soft materials 16 series stove when clamping 椹 H 4: Facilitate the molding of the perforated micro: The structure is the most flavorful. Refer to the second picture, mold the mold core 10 and the surface of the molded micro-pillar structure 12 and polish the surface. The template 14 is clamped to form a mold and 18, and the mold 18 is used to perform a micro-perforated sheet molding process. , Bazhong 'Mould 10 material series can be selected from metals, alloys, Tao Jing or its composite: materials; and when micro-processing technology, the system can use lithographic electroforming technology (LIGA), micro-discharge technology, Laser processing or electrochemical etching
I麵I side
U2〇4〇3 五、發明說明（4) 術來進行。 質材H 5: t模板14表面塗佈多層軟質材料16，而軟 反造：的溫度中，不會與模板“產生 自塑膠、：；： 材質，故軟質材料16係可選 心構材：金、陶£或其複合材料且硬度姻〇。 結;η卜’更可在模板表面加工特殊表面 示，可在模Λ軟質材料；如*四A圖所 j在模板142上加工一咼度斷差， 凹槽“2,，之後，再塗佈軟質 · 斷差係為- 換板144上加工一凸塊144,之高度斷差，之 ⑴佈軟質材料164 ’因此’可藉由此凹槽142，或凸塊 以控制微柱結構之受力大小；如第四c圖所示，模板 更可利用各式加工技術在其上加工複數個微孔丨46,之 ΪμΪΪ佈軟質材料166 ’以增加合模時的強度，亦可避 造成品的品質。 更了避免微柱結構鬆動而影響模 使用上述四種不同之模板14、142、144及〗46， 具有不同的合模效果。當模板丨4為平面，如第二A圖 示，適當控制合模壓力，請同時參考第二B圖，一使模 之微柱結構12接觸的軟質材料16產生塑性變形，而遠一 造微穿孔薄片之目的，·再者，合模壓力不可太小以免塑料 滲入，合模壓力也不可太大以免模仁之微柱結構變形。♦ 模板142之表面有凹槽142’時，如第四a圖所示，戍e且 凸塊144’之模板144，如第四B圖所示，除了擁有當 五、發明說明（5) 1^4平面^所述之效果外’亦可利用塗佈之軟質材料162或 庳六 日加或減少微柱結構與軟質材料162或164的接觸 :接觸應Ϊ是二構表與面軟質材料162或164間維持 如第四C®# -田1 工成複數個微孔146,時， 弟：C圖所不，除了具有當模板“為平面時所述之 θ，#、y利用塗佈之軟質材料16 6，以增加合模時的強 ί而贅：：ϊ 造時塑料滲入間隙’亦可避免微柱結構鬆 成品的品質。再者，也可同時在模板表面加 I ^塊或微孔，以達到所需的合模效果。 ⑴GA):詳：=力二：微；結構利用光刻電鑄技術’ 口圖所-,步作進—步的說明。如第Μ圖至第 沐，如笛不，為描述模仁加工及微柱結構製造之步驟；首 為平整光，圖/斤示’將一不銹鋼模仁20之雙面研磨加工 光rr與電鑄製程;接著二=柱 第 丹I 如第五c圖所示，透過一井置 曝光光刻出所需的光阻結構22,；之後，如第五!）圖所罩干4, 壯構26 .接箬I : 冑鑄模仁2〇至所需厚度之電鍍 2 冑鍍、、、σ構26至預疋厚度，並去除其碎屑與毛邊；尹 Ϊ刭：Ϊ五1!圖所示，以光阻剝除液去除光阻結構22，，以 付到所舄的微柱結構2 §。 接著說明模板之詳細製造過程，如第六a圖至第 五、發明說明（6) 六B圖所示，首先，如第六人圖所示 面研磨加工為平整表面；之後，士 、不銹鋼模板30雙 3〇表面塗佈一層適當厚度的軟“：六6圖所示’在模板 氟龍32。 4軟質材料係為鐵 最後，將模造好微柱結構28之 32之模板30進行合模，如第七 、仁20及塗佈好鐵氟龍 5〇，並利用模具50以進行微穿孔薄片之製造。 …、 接下來說明利用上述之煜1 ς η、， -」η 以進行微穿孔薄片之模 熱壓成型等兩種方法，底下八w ’、有射出成义及 泛兩：i:你=ί別針對射出成型及熱壓成型 ::Ϊ !。如第八a圖至第八c圖所示，為描述以 射出成型模造微穿孔薄片之方法，首先，如第八八圖所 :’為合模後之模具50，該模具50具有複數個模穴34;接 者’如第八B圖所示，將加熱軟化的塑料36射入模穴以 中’並進行保壓充填；最後，如第从圖所示，等待射入 之塑料36冷W固化之後，再將模造好的微穿孔薄片38頂出 脫模。 接著，以熱壓成型模造微穿孔薄片進行說明，如第九 A+圖至第九C圖所示，首先，如第九a圖所示，在模仁2〇與 模板30合模之前’可先將適當的塑料4〇放置於模板3〇上， 隨後加熱至適當溫度使塑料4〇軟化；接著，再進行合模之 步驟’如第九β圖所示，施加適當壓力將模仁2〇熱壓至塑 料40上’以進行模仁2〇與模板3〇之合模及微穿孔薄片模造 製成；最後’如第九C圖所示，待熱壓的塑料冷卻固化至U2〇04〇5, invention description (4) operation. Material H 5: t The template 14 is coated with multiple layers of soft material 16, and the temperature of the soft counter-processing: will not be generated from the plastic with the template ":;, so the soft material 16 is an optional heart material: Gold, pottery or its composite materials and hardness 0. Knot; η can also be processed on the surface of the template, special surface can be shown, mold Λ soft material; as shown in Figure 4A on the template 142 Broken gap, groove "2", and then coated with soft. The broken gap is-the height of the gap is processed by a bump 144 on the plate 144, so the soft material 164 can be recessed by this. Slot 142, or bumps, to control the force of the micro-pillar structure; as shown in Figure 4c, the template can use a variety of processing technologies to process a number of micro-holes in it, 46, of the soft material 166 ' In order to increase the strength when clamping, it can also avoid the quality of the product. It also prevents the micro-pillar structure from loosening and affecting the mold. The use of the four different templates 14, 142, 144, and 46 above has different mold clamping effects. When the template 4 is a plane, as shown in the second A diagram, the mold clamping pressure is appropriately controlled. Please also refer to the second B diagram at the same time. The purpose of the perforated sheet is: · Furthermore, the clamping pressure should not be too small to prevent plastic from penetrating, and the clamping pressure should not be too large to prevent deformation of the micro-pillar structure of the mold core. ♦ When the surface of the template 142 has grooves 142 ', as shown in Figure 4a, the template 144 of 戍 e and bumps 144', as shown in Figure 4B, except for the fifth, invention description (5) 1 ^ 4 plane ^ In addition to the effects described in the 'can also use the coated soft material 162 or 26 days to increase or reduce the contact between the micro-pillar structure and the soft material 162 or 164: the contact should be a two-structure surface and surface soft material 162 Or 164 maintain the same number of micro holes 146 as in the fourth C® #-田 1. Brother: What C does not, except that it has θ, #, y described above when the template is a flat surface. Soft material 16 6 to increase the strength when mold clamping :: 塑料 Plastics penetrate into the gap during manufacture can also avoid the quality of the loose product of the micro-pillar structure. In addition, you can also add I ^ blocks or micro Holes to achieve the desired clamping effect. ⑴GA): Details: = Force 2: Micro; Structure using photolithographic electroforming technology. 口 图 所-, step by step-step description. , Such as flute, to describe the process of mold core processing and micro-pillar structure manufacturing; the first is flattening, the picture / jin shows' the double-side grinding processing of a stainless steel mold core 20 rr and electroforming process; then two = Zhu Didan I, as shown in Figure 5c, through a well exposure photolithography required photoresist structure 22; afterwards, as shown in the fifth!) mask 4 , Zhuang structure 26. Connection I: 电镀 2 to the required thickness of electroplating 2 胄, 、, σ structure 26 to pre- 疋 thickness, and remove its debris and burrs; Yin Ϊ 刭: Ϊ5 1! As shown in the figure, the photoresist structure 22 is removed by a photoresist stripping solution to provide the micro-pillar structure 2 §. Next, the detailed manufacturing process of the template will be described, such as the sixth a to the fifth, the description of the invention (6 ) As shown in Figure 6B, first, the surface is ground to a flat surface as shown in the sixth figure. After that, the surface of the stainless steel and stainless steel template 30 double 30 is coated with a soft layer of appropriate thickness. Template Fluoron 32. 4 The soft material is iron. Finally, the mold 30 with the micro-pillar structure 28 32 molded is clamped, such as the seventh, the core 20, and the Teflon 50 coated, and the mold 50 is used for the micro-perforated sheet. Manufacturing. …, Next, we will explain the two methods of using the above-mentioned Yu 1 ς η ,,-”η for hot-press molding of micro-perforated thin films. The following eight w ', there are injection and meaning: i: 你 = ί Don't target injection molding and hot-press molding:: Ϊ!. As shown in Figures 8a to 8c, in order to describe the method of making micro-perforated sheets by injection molding, first, as shown in Figure 88: 'is the mold 50 after the mold is closed, the mold 50 has a plurality of molds Cavity 34; then, as shown in Figure 8B, the heated and softened plastic 36 is injected into the cavity and filled with pressure; finally, as shown in the second figure, the plastic 36 waiting for injection is cold W After curing, the molded microperforated sheet 38 is ejected from the mold. Next, the micro-perforated sheet is described by hot-press molding, as shown in Figures 9 + A to 9C. First, as shown in Figure 9a, before the mold core 20 is closed with the template 30, Place the appropriate plastic 40 on the template 30, and then heat it to an appropriate temperature to soften the plastic 40. Then, the mold clamping step is performed. As shown in the ninth β diagram, the mold core is heated by applying appropriate pressure. Press onto the plastic 40 'to mold and mold the micro-perforated sheet of mold core 20 and template 30; finally, as shown in Figure 9C, the plastic to be hot-pressed is cooled and solidified.
第9頁 1220403 五、發明說明（7) 適當程度之後’即可脫模取出微穿孔薄片42之成品。 其中’在進行射出成型及熱壓成型時，必須適當地控 制合模壓力，使模仁之微柱結構接觸的軟質材料產生塑性 變形’而達到模造微穿孔薄片之目的；而合模壓力不可太 小以免塑料滲入，合模壓力也不可太大以免微柱結構變 形’故合模壓力必須在適當的範圍内。 本發明係在提出一種模具設計與製造方法及利用此模 /、製造微穿孔薄片之方法，其係透過一個模具的設計方 法，再配合微加工技術的應用，而無須公母模的精密定 位，即可達到微穿孔薄片之模造，亦可避免數細 微模具被破壞或變形，進而達到可進行大量生產之^力效。 且本發明具有製程簡單、製造時間短，並可有效降低成本 之f效，而解決習知利用準分子雷射加工製造時，所需的 惟以上所述者，僅為本發明之較佳實施例而已，並非 用來限定本發明之實施範圍。故即凡 圍所述之形狀、構造、特徵及精神所為之均二:：範 飾，均應包括於本發明之申請專利範圍内。 或‘ (五）、【圖號說明】 12 微柱結構 16 軟質材料 162 、 164 、 166 144’凸塊 軟質材料Page 9 1220403 V. Description of the invention (7) After a proper degree, the finished product of the micro-perforated sheet 42 can be removed from the mold. Among them, 'in injection molding and hot pressing molding, the clamping pressure must be properly controlled so that the soft material in contact with the micro-pillar structure of the mold core is plastically deformed' to achieve the purpose of molding the micro-perforated sheet; and the clamping pressure must not be too small In order to avoid plastic infiltration, the clamping pressure should not be too large to prevent deformation of the micro-pillar structure. Therefore, the clamping pressure must be within a proper range. The present invention is to propose a mold design and manufacturing method and a method for manufacturing micro-perforated thin films by using the mold. The method of designing a mold and the application of micro-machining technology without the need for precise positioning of the male and female molds. It can achieve the molding of micro-perforated sheets, and it can also avoid the damage or deformation of several micro molds, thereby achieving the effect of mass production. In addition, the present invention has the advantages of simple manufacturing process, short manufacturing time, and can effectively reduce the cost. However, when the conventional manufacturing using excimer laser processing is required, the only requirements mentioned above are only the preferred implementation of the present invention. The examples are not intended to limit the implementation scope of the present invention. Therefore, all the shapes, structures, features, and spirits mentioned in the above description are equal to the two :: ornaments, which should be included in the scope of patent application of the present invention. Or "(5), [Illustration of drawing number] 12 Micro-pillar structure 16 Soft material 162, 164, 166 144 'Bump Soft material
10 模仁 14 模板 142、144、146 模板 14 2’ 凹槽 146J 微孔10 Mould 14 Template 142, 144, 146 Template 14 2 ’Groove 146J Microhole
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第11頁 1220403 圖式簡單說明 第一 A圖至第一 B圖為本發明之模具製造流程圖示意圖。 第二圖為本發明之模板結構示意圖。 第三圖為本發明之合模示意圖。 第四A圖至第四C圖為本發明模板之各種實施例。 第五A圖至第五F圖為本發明較佳實施例之模仁製造流程示 意圖。 第六A圖至第六B圖為本發明較佳實施例之模板製造流程示 意圖。 第七圖為本發明較佳實施例之合模示意圖。 第八A圖至第八C圖為本發明應用於射出成型時之製造流程 示意圖。 第九A圖至第九C圖為本發明應用於熱壓成型時之製造流程 示意圖。Page 11 1220403 Brief Description of Drawings Figures A through B are schematic diagrams of the mold manufacturing process of the present invention. The second figure is a schematic diagram of the template structure of the present invention. The third figure is a schematic diagram of the mold clamping of the present invention. Figures 4A to 4C show various embodiments of the template of the present invention. Figures 5A to 5F are schematic diagrams showing the manufacturing process of the mold core in the preferred embodiment of the present invention. Figures 6A to 6B are schematic diagrams of a template manufacturing process according to a preferred embodiment of the present invention. The seventh diagram is a schematic diagram of a mold clamping according to a preferred embodiment of the present invention. Figures 8A to 8C are schematic diagrams of the manufacturing process when the present invention is applied to injection molding. Figures 9A to 9C are schematic diagrams of the manufacturing process when the present invention is applied to hot press molding.
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