;1290605,. • t . 九、發明說明： 【發明所屬之技術領域】 本發明係關於密封泵，係如密封磁鐵聯結方式之磁鐵 泵或密封馬達泵，於密封外殼之內側配置動葉輪支軸與其 軸承部，藉該密封外殼內外間的磁力作用使外嵌於動葉輪 支軸的轉子與動葉輪一體旋轉。 【先前技術】 一般的，密封磁鐵聯結器方式之磁鐵泵，係於內部連 ^ 通在泵內部的有底筒狀密封外殻之外側，配置與驅動軸一 體化且於內周側具有驅動磁鐵的筒體，同時在該密封外殼 之內側，配置以同心狀嵌裝於動葉輪支軸而於外周側具有 從動磁鐵的轉子，藉兩磁鐵間的磁性吸引力，伴隨驅動軸 之旋轉使轉子與安裝在動葉輪支軸前端的動葉輪一體旋轉 實行泵作用。又於密封馬達泵，在同樣的密封外殻之外側 配置馬達的定子，同時於該密封外殻之內側配置以同心狀 0 嵌裝於動葉輪支軸的馬達之轉子，藉通電於定子使旋轉的 轉子同樣與動葉輪一體旋轉實行泵作用。 於是此等密封泵係動葉輪支軸及轉子含軸承部配置在 密封外殻之內側，因與外部之間不存在有軸封部，所以無 液的洩漏外，亦不產生藉從外部進入微生物的內部污染， 適於作爲有腐蝕性、毒性、引火性、放射性等有危險性的 液體、或飲料、果汁、酒類、調味液等需要高度衛生管理 的液體移送用。 可是在密封泵，從構造上因於動葉輪支軸之軸承部不BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sealed pump, such as a magnet pump or a sealed motor pump in which a sealed magnet is coupled, and a movable impeller shaft is disposed inside the sealed casing. And the bearing portion, by the magnetic force between the inside and the outside of the sealed casing, the rotor embedded in the supporting shaft of the moving impeller and the moving impeller rotate integrally. [Prior Art] In general, a magnet pump of a sealed magnet coupling type is internally connected to the outside of the bottomed cylindrical sealed casing inside the pump, and is disposed integrally with the drive shaft and has a drive magnet on the inner peripheral side. At the same time, the inside of the sealed casing is provided with a rotor which is concentrically fitted to the movable impeller support shaft and has a driven magnet on the outer peripheral side, and the magnetic attraction between the two magnets causes the rotor to rotate with the drive shaft. The pump is acted upon by rotating integrally with the impeller mounted on the front end of the impeller shaft. Further, in the sealed motor pump, the stator of the motor is disposed on the outer side of the same sealed casing, and the rotor of the motor that is concentrically fitted to the movable impeller support shaft is disposed inside the sealed outer casing, and is rotated by the electric current to the stator. The rotor is also rotated integrally with the impeller to perform the pumping action. Therefore, the sealed pump-driven impeller support shaft and the rotor-containing bearing portion are disposed inside the sealed outer casing, and there is no shaft seal portion between the outer and outer portions, so that no liquid leakage occurs, and no microorganisms are allowed to enter from the outside. Internal pollution, suitable for liquids that are corrosive, toxic, flammable, radioactive, etc., or liquids that require high hygiene management, such as beverages, juices, alcohol, and flavoring liquids. However, in the sealed pump, the bearing part of the shaft of the moving impeller is not structurally
I .1290605 « f • 能使用潤滑油，所以一般的作爲夾在該軸承部的滑接構件 使用耐磨耗性佳的高硬度陶瓷材料所成者，另一方面將作 業液之一部分藉密封外殻與轉子之間隙、該轉子與動葉輪 支軸之間隙、或通過該支軸內部於密封外殼之內側予以循 環，藉用此液夾在的潤滑作用謀求防止軸承部之破損及抑 制磨耗，同時冷卻產生磨擦發熱的該軸承部與藉渦電流產 生電阻發熱的密封外殼，作成予以防止起因於液之熱變質 φ 或磁鐵泵熱減磁的作動不良（例如，日本專利文獻1〜4)。 [專利文獻1 ] 日本特開昭5 8 - 1 3 3 4 9號公報 [專利文獻2 ] 日本特開昭5 8 _ 1 3 8 2 9 4號公報 [專利文獻3] 日本特開昭6 1 - 1 6409 8號公報 [專利文獻4] 日本特開昭6 1 - 1 22 3 9 3號公報 【發明內容】 (發明欲解決的課題） 然而在於先前之密封泵，係於送液開始時或中斷後之 • 送液再開始時，藉誤操作等用液不通過至密封外殼之內側 狀態旋轉動葉輪，成爲所謂乾運轉狀態，運轉後不久藉動 葉輪支軸之軸承部破損，時常產生有陷於不能送液的事態 。又作業液藉在前段的空氣放氣孔不完備或自液發生氣泡 變成氣液混合狀態，使動葉輪支軸之軸承部斷續的乾滑接 而磨耗’不得已造成早期更換滑接構件爲大部分。 本發明係有鑑於上述情況，提供作爲密封泵係在一時 的成乾運轉狀態，作業液亦成爲氣液混合狀態，都能防止 1290605 間的隔間板1 6，劃區爲前部殼構件1 1側之泵室1 a，與中 間殼構件1 2側之磁鐵聯結室1 b。又在後部殼構件1 3側設 有省略圖示的藉馬達的泵驅動部。 在殻1 A內之中心部，沿前後方向的動葉輪支軸5 A穿 通隔間板1 6 ’配置爲通過栗室1 a與fe鐵聯結室1 b間。此 動葉輪支軸5A之前端，藉由動葉輪螺帽7a及扣合鍵5a 以不能相對旋轉的安裝有配置在泵室1 a內的動葉輪7 A。 又於磁鐵聯結室1 b內，使厚壁狀底部2 a向後方的有底筒 狀密封外殻2A，將前端凸緣部2b介置於前部殻構件1 1與 環狀凸緣構件1 4之間，同時由於將該前端凸緣部2b藉由 螺栓15d…固定於隔間板16,配置與動葉輪支軸5A爲同心 狀。然後分別旋轉自如地藉由前側軸承部8 f A軸支持動葉 輪支軸5 A前部於隔間板1 6之輪轂部1 6a，同後端部係藉 由後側軸承部8rA軸支持於密封外殼2A底部2a之軸承孔 部2c 〇 磁鐵聯結室1 b之內部係藉密封外殼2 A液密地畫分爲 外側之驅動側空間1 0a與內側之從動側空間1 Ob，同時從 動側空間10b藉設於隔間板16的透孔16b…連通在泵室la 。然後於驅動側空間1 0a，從後方使驅動軸3 A與動葉輪支 軸5 A同心狀的突入，於此驅動軸3 A向前方開放的杯狀筒 體4A，在後端輪轂部4a藉由扣合鍵3a及固定螺釘3b予 以固定。然後此筒體4A係作爲驅動磁力產生裝置，以在內 周設置的驅動磁鐵Μ 1與密封外殻2 A外周面之間保持小間 隙9a狀態，外嵌在該密封外殼2A。一方面於從動側空間 -12- 1290605 » r • 1 〇b，藉由扣合鍵5 b不能相對旋轉地嵌裝於動葉輪支軸5 A 的轉子6A，配置爲於埋設從動磁鐵M2的外周面與密封外 殼2 A內周面之間保持小間隙9b狀態。 前後之軸承部8fA、8rA都藉由3個滑接構件構成：藉 由扣止銷1 7a不能旋轉地扣止在固定側的隔間板1 6的輪轂 部1 6a內側之軸承孔部1 6c，以及密封外殼2A的軸承孔部 2c的軸襯8 1 ;藉由扣合鍵5b不能相對轉動地嵌裝於爲旋 轉側的動葉輪支軸5 A之套筒8 2 ;以及推力環8 3。然後套 • 筒82係配置於軸襯8 1之內側，同時推力環83係嵌合於轉 子6A端面中央側之環狀凹.部6a，配置成如與軸襯81之端 面滑接。 又軸襯81如第3圖所示，在與套筒82外周面滑接的 內周面，於周方向等配形成沿軸方向的複數支（圖爲4支） 通液槽8 1 a，同時亦在與推力環8 3滑接的端面，於周方向 等配形成有連續在內周各通液槽18a的複數支半徑方向之 通液槽81b…。尙第3圖中之81c，係爲扣合該扣止銷17a •(參照第2圖）的扣合槽。 然後，此等軸承部8fA、8rA之軸襯81、套筒82、推 力環83之3個滑接構件，係都於表面全體，形成DLC膜 (類鑽碳膜）如碳化矽（Si C)的陶瓷或如碳化鎢（WC)的超硬 材料之成形物所成。尙密封外殼2A及動葉輪支軸5A係 SUS316等之不銹鋼製。 一方面，於動葉輪支軸5 A與螺設在其前端的動葉輪螺 帽7a，設有將其兩者沿軸心通過全長貫穿的液流通孔2 1 ，又動葉輪支軸5A之後端與密封外殼2A的軸承孔部2c之 -13- /1290605 * ^ * • 間具有液積存部22，液積存部22與泵室1 a藉液流通孔2 1 連通，同時於後側軸承部8 r A的軸襯8 1內周與套筒8 2外 周的環狀滑接部分在後端側面臨於液積存部22。又於前側 軸承部8 f A，亦隔間板1 6之軸插通孔1 6 a與動葉輪7 A之 間構成液流通間隙23，軸襯81內周與套筒82外周之環狀 滑接部分在前端側面臨液流通間隙23。再者於兩軸承部 8 f A、8 r A的軸襯8 1與套筒8 2之滑接部，在外周側面臨於 從動側空間10b。 # 於此第一實施形態之磁鐵泵P 1，係藉驅動軸3 A之驅 動旋轉筒體4A之際，藉其驅動磁鐵Ml與從動磁鐵M2之 磁性吸引力，轉子6A就與動葉輪支軸5 A —體從動轉動， 藉隨著與該動葉輪支軸5A —體之動葉輪7A旋轉的離心泵 作用，運送對象之作業液從液吸入口 1 1 a吸入而自液送出 口 1 1 b壓送於目的部位。 此磁鐵泵P 1在正常的運轉狀態，作業液就透過隔間板 1 6之透孔1 6b及小間隙9b充滿從動側空間1 Ob全體。然 ^ 後於前側軸承部8fA，從泵室1 a通過透孔1 6b進入從動側 空間1 〇b的作業液，係從外側浸入軸襯8 1之通液槽8丨b， 偏及該軸襯8 1與推力環8 3之全體滑接部分，接著浸入軸 襯8 1之通液槽8 1 a…，通過該軸襯8 1與套筒8 2之滑接部 分，再於通過液流通間隙2 3返回泵室1 a，與該泵室1 a內 之作業液合流藉動葉輪7 A送出。又於後側軸承部8 1. A，從 泵室1 a通過透孔1 6 b進入從動側空間1 〇 b的作業液，係通 過周邊側的小間隙9b從外側浸入軸襯8 1的通液槽8 1 b， 通過該軸襯8 1與推力環8 3之滑接部分全體，接著浸入軸 -14- 1290605 « * * * . 襯8 1之通液槽8 1 a…，通過該軸襯8 1與套筒8 2之滑接部 分，再入液積存部22，從此液積存部22通過液流通孔21 返回泵室1 a。因而，兩軸承部8 f A、8 r A都於彼此滑接構 件（8 1〜83)用存在著作業液狀態滑接，藉存在著此液的潤 滑作用予以防止滑接構件（8 1〜8 3)的破損同時抑制了磨耗 ，又藉與該作業液的熱交換之冷卻作用可避免滑接部之摩 擦發熱以及密封外殻2A的伴隨電阻發熱之溫度上升。 另一方面，於送液開始時疏於起動注給，或因中斷後 ^ 之送液再開始時疏於確認泵內之液位準等誤操作等，而成 爲用液未通過從動側空間1 〇b全體的狀態運轉的乾運轉狀態 時，兩軸承部8fA、8rA之彼此滑接構件（81〜83)變成在沒 有液的潤滑作用下乾滑接。然而，爲兩軸承部8fA、8rA滑 接構件的軸襯81、套筒82、推力環83，都由表面全體形成 DLC膜的碳化矽之成形物所成，此DLC膜由於爲極硬外非 常的低摩擦，所以乾運轉繼續某種程度之時間，亦可抑制 I 在其間之該滑接面的滑動轉矩爲較小，可防止因負載衝擊 的破損同時幾乎不產生磨耗，無障礙的能實行以後之正常 運轉。又藉乾運轉後不留置充分的時間來注液，予以急冷 在摩擦發熱升溫的滑接構件（81〜83)，亦不產生起因於其 熱衝擊的龜裂或龜裂’用健全的狀態可實行以後之送液。 再者’作業液在前段的空氣放氣孔不完備或藉從液產 生的氣泡成氣液混合狀態時，由於其氣泡進入滑接構件（8】 〜8 3 )之滑接部分，兩軸承部8 f A、8 r A變成斷續的乾滑接 。然而在此狀況，滑接構件（8 1〜8 3 )係由滑接表面爲非常 -15- 1290605 低摩擦且極硬的DLC膜所成’同時該DLC膜對基材之陶瓷 或超硬材料堅固的密接，所以其間幾乎不產生磨耗，其後 恢復至正常運轉無障礙的實行送液’同時由作業液之種類 等氣液混合狀態之產生頻度變高時能抑制於輕微的磨耗， 所以經過長期可繼續使用。 尙變成上述之乾運轉或氣液混合運轉事態，係吐出壓 力之不足，液流之停止或變動’電流値之異常低下等即可 知。 ® 第4圖所示之第二實施形態的磁鐵泵P2，係殼1 B由 具備液吸入口 3 1 a及液送出口 3 1 b的前部殼構件3 1、於此 前端殼構件31用前端凸緣部32a藉由螺栓15e…連結的圓 筒狀中間殻構件32、用前端凸緣部33a藉由螺栓15f…連 結於此中間殼構件3 2後端凸緣部3 2b的圓筒狀後部殻構件 3 3所構成。又在殻1 B內，由於有底筒狀之密封外殼2B， 於前部殼構件3 1與中間殻構件3 2的相對端面間，夾持前 端凸緣部2e，因此將底部2f向後方配置。然後藉此密封外 殻2B在殼構件1 B內，劃區爲該密封外殻2B外側之驅動 側空間20a，與從該密封外殻2B內側經過前部殼構件3 1 側之泵室3 0的從動側空間20b。於後部殼構件3 3側設有 省略圖示藉馬達的泵驅動部。 在驅動側空間2 0 a，從後方驅動軸3 B與密封外殼2 B 同心狀的突入，於此驅動軸3 B藉由鍵槽3 c及固定螺釘3 d 將固定後端輪轂部4 6的杯狀筒體4 B，作爲驅動磁力產生 裝置配置成在設在內周的驅動磁鐵Μ 1與密封外殻2 B外周 -16- 1290605 面之間保持小間隙9c狀態。 一方面於從動側空間20b，沿密封外殼2B中心鋪 葉輪支軸5 B，藉由將剖面缺口圓形之前端部5 c插攝 體形成於前部殻構件3 1的輪轂部3 1 c，同時將後端 插嵌於形成在密封外殻2 B底部2 f內面側中央的輪轂 ，保持於不能旋轉。然後在密封外殼2B內於動葉軺 5 B藉由前後之軸承部8 fB、8 ι*Β嵌裝爲旋轉自如的轉 ，係於埋設有從動磁鐵M2的外周面與密封外殼2 B內 之間，配置爲保持小間隙9d狀態。又於泵室3 0內伤 有一體安裝在該轉子6B前端的動葉輪7B。 前側軸承部8 fB係嵌合於轉子6 B前端面中央側之 凹部6b，且藉由扣止銷17b扣止於該轉子6B的軸襯 與不能旋轉地嵌裝在動葉輪支軸5B剖面缺口圓形之 部5 c (第4圖）的推力環8 5二個滑接構件構成，軸襯 內周面滑接於動葉輪支軸5 B之外周面’同時該軸襯 前端面成爲如滑接於推力環8 5之後端面。又後側軸 8 rB係於轉子6 B後端側，僅將與前端側同樣地嵌裝扣 軸襯84作爲滑接構件，該軸襯84在內周面成爲滑 葉輪支軸5 B外周面的構成。尙軸襯8 4與於第一實 的軸襯8 1同樣，於內周面等配形成沿軸方向的複數支 槽8 4 a…，同時亦在外側端面等配形成有接續於各通 8 4 a的複數支半徑方向之通液槽8 4 b。 於是，爲兩軸承部8fB、8ι·Β滑接構件的軸襯84 力環8 5，與於第一實施形態的軸承部8 f A、81· Α之滑 :的動 :於一 部5d 部2g =支軸 子6B 周面 :配置 ，環狀 84， 二,·♦ JLU4 刖贿 84在 84之 承部 止的 :於動 :形態 通液 液槽 與推 ‘接構 -17- .1290605 • 件（8 1〜8 3 )同樣，都由表面全體形成D L C膜的如碳化矽 (s i C)陶瓷或如碳化鎢（W C)超硬材料之成形物所成。又動葉 輪支軸5B，係於前後之兩軸承部8fB、8rB爲了與軸襯84 滑接，使用如碳化矽陶瓷所成成形物。 此第二實施形態之磁鐵泵P2，爲動葉輪支軸固定型， 藉驅動軸3B之驅動使筒體4B旋轉之際，由其驅動磁鐵 Μ 1與從動磁鐵M2之磁性吸引力，轉子6B以動葉輪支軸 5Β爲中心與動葉輪7Β —體從動旋轉，藉伴隨此動葉輪7Β ^ 旋轉的離心泵作用，輸送對象之作業液從液吸入口 3 1 a吸 入而自液送出口 3 1 b壓送於目的部位。然後於正常的運轉 狀態，作業液充滿了從動側空間20b之全體，一部分泵室 之作業液，通過小間隙9d向從動側空間20b之中心側，由 後側軸承部8rB的軸襯84之外側端面通液槽84b…，浸入 該軸襯84內周之通液槽84a…通過動葉輪支軸5B的滑接 部分，再通過該動葉輪支軸5B與轉子6B之間環狀空間向 前方，浸入前側軸承部8fB的軸襯84之內周通液槽84a… 通過與動葉輪支軸5B之滑接部分，接著浸入軸襯84外側 端面之通液槽84b…，通過於此軸襯84與推力環85之滑 接部分，再通過該推力環8 5外周與動葉輪7B基部內周之 間返回泵室30，與該泵室30內之作業液一起藉動葉輪7B 送出。因而，在兩軸承部8fB、8 rB之各滑接部分存在著作 業液，用其潤滑作用確保了動葉輪7B圓滑的旋轉，防止滑 接構件（84、85)破損，同時亦抑制滑接構件（84、8 5)與滑接 於此等的動葉輪支軸5B表面之磨耗，又藉與該作業液的熱 -18- 1290605 父換之冷卻作用亦可避免滑接部之摩擦發熱以及隨著密 外殻2B之阻力發熱的溫度上升。 一方面因液開始時疏於起動注給，或中斷後之送液 開始時疏於確認泵內之液位準等誤操作等，即使成爲在 液未通過從動側空間20b全體之狀態運轉的乾運轉狀態 或作業液因前段的空氣放氣孔不完備或從液產生的氣泡 變成氣液混合狀態，亦與該第一實施形態同樣，滑接構 之軸襯84及推力環85之表面爲非常低摩擦極硬的DLC ^ ’且對基材之陶瓷或超硬材料的該DLC膜之密接強度優 ，所以抑制其間在該滑接面的滑動轉矩爲較小，防止由 載衝擊的破損同時幾乎不產生磨耗，於異常檢測後返回 常運轉無障礙的實行送液，同時於乾運轉後不置於充分 時間而注液時，不產生藉熱衝擊的剝離或龜裂。 第5圖所示第三實施形態之密封馬達泵P3，係殻 由具備液吸入口 5 1 a及液送出口 5 1 b的前部殼構件5 1， 於此前部殻構件5 1在周緣部藉由螺栓1 5g…連結的隔間 ^ 5 2，與對此中間隔間板5 2在前端凸緣部5 3 a藉由螺栓1 …連結的大致圓筒狀之後部殻構件5 3，與於此後部殻構 5 3後端在周緣部藉由螺栓1 5 i…連結的後端板5 4 ’及於 部殼構件5 3下部藉由螺栓1 5 j…連結的支持基台5 5所構 〇 然後用後部殼構件53與後端板54構成有底筒狀之 封外殻2 C，此密封外殼2 C之內側成爲轉子室6 0 ’於該 子室6 0內在其中心部，藉由前後軸承部8 f C、8 r C配置 封 再 用 而 件 膜 越 負 正 的 1C 與 板 5h 件 後 成 密 轉 軸 -19- 1290605 k » • 支持於隔間板52及後端板54的動葉輪支軸5C ’同時由 繞此動葉輪支軸5 C的線圈部6 1與不銹鋼蓋部62 ’形成 馬達的轉子6 C。又動葉輪支軸5 C係前端部貫穿隔間板 突入泵室5 0內，於此前端部藉由動葉輪螺帽及扣合 5e不能相對旋轉地安裝動葉輪7C。一方面後部殼構件 之周壁部5 3 b內，對轉子室5 0用薄壁之內壁部5 3 c所隔 子坑4 0形成於周方向複數處所，各定子坑4 0配設有作 馬達驅動磁力產生裝置的鐵心4 1與線圈部42所成的定 馨 4 C。尙轉子6 C之不銹鋼蓋部6 2，係其外周面與密封外 2C內周面之間配置保持小間隙9e的狀態° 轉子室60係藉設在隔間板52周邊側的透孔24…連 在泵室50。又於殻1C之液送出口 51b面前位置分岐有 流出口 2 5，此環流出口 2 5藉由接頭2 6 a連通連接環流 26之一端側，同時於開口在後端板54之軸承孔部54a 央的環流入口 27，藉由接頭26b連通連接該環流管26 另一端側。 ^ 前後之軸承部8fC、8rC係都與該第一實施形態的磁 泵P 1的前後軸承部8 f A、8 r A同樣，由3個滑接構件構 :在爲固定側的隔間板52的輪轂部52a之內側軸承孔 52b，以及後端板54之軸承孔部54a，藉由扣止銷17c扣 爲不能旋轉的軸襯8 6 ;藉由扣合鍵5 f不能相對旋轉地嵌 於爲旋轉側的動葉輪支軸5 C之套筒8 7 ;以及推力環8 8 然後套筒87係配置於軸襯86之內側，同時推力環88係 合設於動葉輪支軸5 C的凸緣部5 6之環狀凹部，配置如 卷 於 52 鍵 53 定 爲 子 殻 通 環 管 中 之 鐵 成 部 止 裝 〇 嵌 與 -20- .1290605 • 軸襯86之端面滑接，尙後軸軸承部8rC之滑接構件（86〜 8 8 )，係夾持在動葉輪支軸5 C之後側凸緣部5 6，與螺合在 該動葉輪支軸5 C後端部的螺帽5 7之間。 然後此等軸承部8fC、8rC之軸襯86、套筒87、推力 環8 8之3個滑接構件，係於與第一實施形態的軸承部8 f A 、8ι·Α的滑接構件（8 1〜83)同樣，都由表面全體形成DLC 膜的如碳化矽（SiC)陶瓷或如碳化鎢（WC)超硬材料之成形 物所成。又軸襯8 6與於第一及第二實施形態的軸襯8 1、 ^ 84同樣，於內周面沿軸方向等配形成複數支之通液槽86a …，同時亦在外側端面等配形成連續於各通液槽86a的複 數支半徑方向之通液槽86a…（參照第3圖）。 然後在後端板54之軸承孔部54a與螺帽57之間構成 液積存部2 8，後側軸承部8 rC的軸襯8 6內周與套筒8 7外 周之環狀滑接部分，係在後端側面臨於該液積存部2 8。又 於前側軸承部8fC，亦在隔間板52之軸插通孔52c與動葉 0 輪7C之間構成液流通間隙29，軸襯86內周與套筒87外 周的環狀滑接部分在前端側面臨於液流通間隙29。再者， 於兩軸承部8fC、8rC的軸襯86與套筒87的滑接部，在外 周側面臨於轉子室60。 於此第三實施形態之密封馬達泵P3，係藉通電於定子 4 C產生的磁性吸引力，轉子6 C與動葉輪支軸5 C —體旋轉 ，藉伴隨與該動葉輪支軸5C —體之動葉輪7C旋轉的離心 泵作用，運送對象之作業液從液吸入口 5 1 a吸入而從液送 出口 5 1 b壓送於目的部位。 -21- 1290605 »- · - 在此密封馬達泵P3之正常的運轉狀態，係作業液充滿 在泵室5 0和轉子室6 0之全體。於是伴隨泵運轉的液送出 口 5 1 b側之壓力比轉子室60內之壓力爲大，所以向液送出 口 5 1 b的作業液之一部分，從環流出口 25通過環流管26 自後端板5 4之環流入口流入液積存部2 8，浸入於後側軸 承部8rC的軸襯86之通液槽86a…，通過該軸襯86與套 筒8 7的滑接部分，接著浸入軸襯8 6之通液槽8 6b，通過 了該軸襯8 6與推力環8 8的滑接部分全體，入泵室6 0之後 • 側空間，再通過小間隙9e進入該泵室60之前側空間。此 泵室60之前側空間除了從後側空間之流入，作業液亦從隔 間板5 2之透孔24…進入，但此作業液亦浸入於前側軸承 部8fC的軸襯86之通液槽86b，通過該軸襯86與推力環 88的滑接部分全體，接著浸入軸襯86之通液槽86a…，通 過該軸襯8 6與套筒8 7的滑接部分，再通過液流通間隙2 9 返回泵室50。因而兩軸承部8fC、8rC，都彼此滑接構件（86 〜8 8)於介置有作業液狀態滑接，藉介置此液之潤滑作用防 止了滑接構件（8 6〜8 8 )之破損同時亦抑制了磨耗，又藉與 該作業液的熱交換的冷卻作用，避免了伴隨滑接部之摩擦 發熱以及馬達之發熱的溫度上升。 一方面因送液開始時疏於起動注給，或中斷後之送液 再開始時疏於確認泵內之液位準等誤操作等，即使成爲在 用液通過泵室5 0及轉子室60全體的狀態運轉而變成乾運 轉狀態’或作業液藉在前段的空氣放氣孔的不完備或從液 產生的氣泡變成氣液混合狀態，亦與該第一及第二實施形 -22- /1290605 » · . 態同樣，滑接構件（8 6〜8 8 )之表面爲非常低的摩擦極硬的 DLC膜，且對基材之陶瓷或超硬材料的該DLC膜之密接強 度優越，所以抑制其間之該滑接面的滑動轉矩爲較小，防 止了藉負載衝擊的破損同時幾乎不產生磨耗，異常檢測後 返回正常運轉無障礙的實行送液，同時乾運轉後不置於充 分的時間而注液時，亦不產生因熱衝擊的剝離或龜裂。 此外，於本密封泵，軸承部的滑接構件並非必須如前 述第--第三實施形態在表面全體設置DLC膜，在滑接面 ® 具有該DLC膜即可。且，在軸承部介置複數種滑接構件時 ，全部滑接構件的滑接面具有DLC膜較理想，但本發明包 含滑接面具有該DLC膜的滑接構件和不具有該DLC膜的滑 接構件之組合構成。再者，本發明中，關於殻的構造、密 封外殻的安裝構造、動葉輪的形狀、該動葉軸和轉子的連 結構造、介置在軸承部的滑接構件種類及組合和保持構造 、用於使作業液通過軸承部的滑接部分之液通路構成、細 部構成，可做實施形態以外的各種變更。 在此作爲設於軸承部滑接構件之滑接面的DLC膜形成 裝置’係種種之方法爲所知，但對藉軸襯之內周面或套筒 之外周面等三維表面部（非平面部）成膜性，及密接性等之 面以電漿離子佈植法（非專利文獻1、2)爲合適。亦即此電 發離子佈植法，係於浸過電漿的基材施加負的高電壓脈衝 ’用形成在基材表面的鞘（sheath)電場加速離子（DLC膜爲 碳離子）佈植者，可沿基材表面生成離子覆蓋（ion sheath) ’所以可向三維表面部均等的佈植離子，同時從基材周圍 -23- 1290605 > « 、 . 之電漿直接取出離子而能取得大量束電流，在短時間可實 行高密度之離子佈植。又藉電漿之控制能夠低溫處理，有 裝置構成亦比較的單純且可廉價製作的優點。 [非專利文獻 1] J.R· Conrad, L.A· Dodd, F.G. Worzarz and N.C. Tran : Plasma sourceion-implantation technique for surface modification of materials, J . App 1. P hy s . 6 2 p 4591-4596(1987) [非專利文獻 2] Ed. By A. Anders: Handbook of Plasma Immersion Ion Implantat-ion and Deposition，John Wiley & Sons, INC. (2000)I .1290605 « f • Lubricating oil can be used, so it is generally used as a sliding member sandwiched between the bearing parts and a high-hardness ceramic material with good wear resistance. On the other hand, one part of the working fluid is sealed. The gap between the shell and the rotor, the gap between the rotor and the rotor shaft, or the inside of the seal housing is circulated through the inside of the seal housing, and the lubrication of the liquid is used to prevent the bearing portion from being damaged and the wear is suppressed. The bearing portion that generates frictional heat is cooled and the sealed casing that generates heat by the eddy current is generated to prevent malfunction due to thermal deterioration of the liquid φ or thermal demagnetization of the magnet pump (for example, Japanese Patent Laid-Open Publication No. Hei. [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei. No. 5-8 - 1 3 3 4 9 [Patent Document 2] Japanese Patent Laid-Open No. 5 8 _ 1 3 8 2 9 4 [Patent Document 3] Japanese Patent Laid-Open No. 6 1 - Japanese Patent Application Laid-Open No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. After the interruption, when the liquid supply is restarted, the impeller is rotated to the inner side of the sealed casing by the erroneous operation, and the impeller is turned into a dry operation state. The bearing portion of the impeller support shaft is damaged shortly after the operation, and is often trapped. The situation that cannot be sent. In addition, the working fluid is incomplete in the air venting hole in the front stage or changes from the liquid bubble to the gas-liquid mixing state, so that the bearing portion of the moving impeller shaft is intermittently dry-slided and worn, which has caused the early replacement of the sliding member as the majority. . In view of the above, the present invention provides a dry running state as a sealed pump system at one time, and the working fluid also becomes a gas-liquid mixed state, and can prevent the partition plate 1 of the 1290605 from being the front shell member 1 The pump chamber 1 a on the 1 side is coupled to the magnet 1 1 on the side of the intermediate shell member 1 2 . Further, a pump driving portion of the motor (not shown) is provided on the side of the rear casing member 13 side. In the center portion of the casing 1 A, the movable impeller support shaft 5 A in the front-rear direction is disposed through the partition plate 16' to pass between the chest chamber 1a and the fe iron joint chamber 1b. At the front end of the impeller support shaft 5A, the movable impeller 7A disposed in the pump chamber 1a is mounted by the movable impeller nut 7a and the snap key 5a so as not to be relatively rotatable. Further, in the magnet coupling chamber 1b, the bottomed cylindrical sealed casing 2A is formed with the thick-walled bottom portion 2a rearward, and the front end flange portion 2b is interposed between the front casing member 1 1 and the annular flange member 1 At the same time, the front end flange portion 2b is fixed to the partition plate 16 by the bolts 15d, and is disposed concentrically with the movable impeller support shaft 5A. Then, the hub portion 16a of the partition plate 16 is supported by the front bearing portion 8f A axis by the front bearing portion 8f A axis, and the rear end portion is supported by the rear bearing portion 8rA shaft. The bearing hole portion 2c of the bottom portion 2a of the sealed casing 2A is internally connected to the driven side space 1 0a and the driven side space 1 Ob of the inner side by the sealed casing 2 A. The side space 10b is connected to the pump chamber la via the through hole 16b of the partition plate 16. Then, in the drive side space 10a, the drive shaft 3A and the movable impeller support shaft 5A are concentrically protruded from the rear, and the cup-shaped cylinder 4A whose drive shaft 3A is opened forward is borrowed from the rear end hub portion 4a. It is fixed by the fastening key 3a and the fixing screw 3b. Then, the cylindrical body 4A is used as a driving magnetic force generating means, and is fitted to the sealed casing 2A while maintaining a small gap 9a between the driving magnet Μ 1 provided on the inner circumference and the outer peripheral surface of the sealed casing 2 A. On the one hand, in the driven side space -12- 1290605 » r • 1 〇b, the rotor 6A of the movable impeller support shaft 5 A can be inserted in a relatively rotatable manner by the snap-fit key 5 b, and is configured to embed the driven magnet M2. A small gap 9b state is maintained between the outer peripheral surface and the inner peripheral surface of the sealed casing 2A. The front and rear bearing portions 8fA, 8rA are each constituted by three sliding members: the bearing hole portion 16c inside the hub portion 16a of the partition plate 16 on the fixed side is non-rotatably locked by the buckle pin 17a And a bushing 8 1 for sealing the bearing hole portion 2c of the outer casing 2A; a sleeve 8 2 that is not rotatably fitted to the movable impeller shaft 5 A on the rotating side by the snap key 5b; and a thrust ring 83. Then, the sleeve 82 is disposed inside the bushing 81, and the thrust ring 83 is fitted to the annular recessed portion 6a on the center side of the end face of the rotor 6A, and is disposed to be slidably attached to the end surface of the bushing 81. Further, as shown in FIG. 3, the bushing 81 is formed on the inner peripheral surface that is slidably attached to the outer peripheral surface of the sleeve 82, and is formed in a plurality of (four in the drawing) liquid-passing grooves 8 1 a in the axial direction in the circumferential direction. At the same time, in the end surface which is slidably connected to the thrust ring 83, a liquid-passing groove 81b which is continuous in the radial direction of each of the liquid-passing grooves 18a in the inner circumference is formed in the circumferential direction. 81c in Fig. 3 is a fastening groove for fastening the buckle pin 17a (see Fig. 2). Then, the sliding members 81 of the bearing portions 8fA and 8rA, the sleeve 82, and the three sliding members of the thrust ring 83 are all formed on the entire surface to form a DLC film (diamond-like carbon film) such as tantalum carbide (Si C). A ceramic or a molded product of a superhard material such as tungsten carbide (WC). The hermetic seal housing 2A and the movable impeller support shaft 5A are made of stainless steel such as SUS316. On the one hand, the movable impeller support shaft 5A and the movable impeller nut 7a screwed at the front end thereof are provided with a liquid flow hole 2 1 which penetrates both of them along the axial center, and the rear end of the impeller support shaft 5A. There is a liquid reservoir 22 between the 13-/1290605*^* of the bearing hole portion 2c of the sealed casing 2A, and the liquid reservoir 22 communicates with the pump chamber 1a through the liquid flow hole 2 1 while the rear bearing portion 8 The inner circumferential circumference of the bushing 8 1 of r A and the annular sliding portion of the outer circumference of the sleeve 8 2 face the liquid reservoir 22 on the rear end side. Further, the front side bearing portion 8 f A also forms a liquid flow gap 23 between the shaft insertion hole 16 a of the partition plate 16 and the movable impeller 7 A, and the inner circumference of the bushing 81 and the outer circumference of the sleeve 82 are ring-slip. The joint portion faces the liquid flow gap 23 on the front end side. Further, the sliding portion of the bushing 8 1 and the sleeve 8 2 of the two bearing portions 8 f A, 8 r A faces the driven side space 10b on the outer peripheral side. In the magnet pump P1 of the first embodiment, when the drive shaft 3A is driven to rotate the cylinder 4A, the rotor 6A and the movable impeller are supported by the magnetic attraction force of the drive magnet M1 and the driven magnet M2. The shaft 5 A is driven to rotate, and the working fluid of the object to be transported is sucked from the liquid suction port 1 1 a from the liquid supply port 1 by the action of the centrifugal pump that rotates with the movable impeller 7A of the movable impeller shaft 5A. 1 b is pressed to the target site. In the normal operation state of the magnet pump P1, the working fluid fills the entire driven side space 1 Ob through the through hole 16b and the small gap 9b of the partition plate 16. Then, in the front side bearing portion 8fA, the working fluid that has entered the driven side space 1 〇b from the pump chamber 1a through the through hole 16b is immersed from the outside into the liquid passing groove 8丨b of the bushing 8 1 The sliding portion of the bushing 8 1 and the thrust ring 8 3 is then immersed in the through groove 8 1 a of the bushing 8 1 , through the sliding portion of the bushing 8 1 and the sleeve 8 2, and then through the liquid The flow gap 2 3 is returned to the pump chamber 1 a, and the working fluid in the pump chamber 1 a is merged and sent by the impeller 7 A. Further, the rear side bearing portion 8 1. A, the working fluid that has entered the driven side space 1 〇b from the pump chamber 1 a through the through hole 16 b, is immersed into the bushing 8 1 from the outside through the small gap 9b on the peripheral side. The liquid-passing groove 8 1 b passes through the entire sliding portion of the bushing 8 1 and the thrust ring 83, and then is immersed in the shaft-14-1290605 «***. The liquid-passing groove 8 1 a... of the liner 8 1 The sliding portion of the bushing 81 and the sleeve 8 2 is reintroduced into the liquid reservoir 22, and is returned from the liquid reservoir 22 to the pump chamber 1a through the liquid flow hole 21. Therefore, the two bearing portions 8 f A, 8 r A are slidably connected to each other in the state of the working fluid state by the sliding members (8 1 to 83), and the sliding member (8 1~) is prevented by the lubricating action of the liquid. 8 3) The damage is suppressed at the same time, and the cooling effect by the heat exchange with the working fluid can prevent the frictional heat generation of the sliding portion and the temperature rise accompanying the resistance heating of the sealed casing 2A. On the other hand, when the liquid supply is started, the start-up injection is neglected, or the liquid supply is stopped after the interruption, and the liquid level in the pump is ignored, and the liquid is not passed through the driven side space. In the dry operation state in which the entire state of the 〇b is operated, the sliding members (81 to 83) of the two bearing portions 8fA and 8rA are dry-slidably connected without the lubrication of the liquid. However, the bushing 81, the sleeve 82, and the thrust ring 83, which are the sliding members of the two bearing portions 8fA and 8rA, are formed of a molded body of tantalum carbide which forms a DLC film on the entire surface, and the DLC film is extremely hard. The low friction, so the dry operation continues for a certain period of time, and the sliding torque of the sliding surface between the I can be suppressed to be small, and the damage due to the load impact can be prevented and the wear is hardly generated, and the barrier-free energy can be prevented. Carry out normal operation in the future. In addition, after the dry operation, the liquid is injected for a sufficient period of time, and the sliding members (81 to 83) which are cooled by friction and heat are not cooled, and cracks or cracks due to thermal shock are not generated. After the implementation of the liquid delivery. Furthermore, when the air venting hole of the working fluid is incomplete in the front stage or the air bubble generated by the liquid is mixed into the gas-liquid mixture state, the two bearing portions 8 are formed by the air bubbles entering the sliding portion of the sliding member (8] to 8 3 ). f A, 8 r A becomes an intermittent dry slip. However, in this case, the sliding members (8 1 to 8 3 ) are made of a DLF film having a sliding surface of very -15 to 1290605 which is low in friction and extremely hard, and a ceramic or superhard material of the DLC film to the substrate. Since it is tightly bonded, it hardly causes wear, and then it returns to normal operation, and the liquid supply is carried out. At the same time, when the frequency of the gas-liquid mixing state such as the type of the working fluid becomes high, it can be suppressed from being slightly worn. It can be used for a long time. When the enthalpy becomes the above-mentioned dry operation or gas-liquid mixed operation, the pressure is insufficient, and the flow stops or changes, and the abnormality of the current 値 is low. ® The magnet pump P2 of the second embodiment shown in Fig. 4, the shell 1 B is provided with a front case member 31 having a liquid suction port 31a and a liquid supply port 3 1b, and the front case member 31 is used for the front end case member 31. The front end flange portion 32a is connected to the cylindrical intermediate case member 32 connected by the bolts 15e, and the front end flange portion 33a is coupled to the cylindrical shape of the rear end flange portion 3 2b of the intermediate case member 3 2 by bolts 15f... The rear shell member 33 is constructed. Further, in the case 1 B, since the bottomed cylindrical sealed casing 2B has the front end flange portion 2e sandwiched between the opposite end faces of the front casing member 31 and the intermediate casing member 32, the bottom portion 2f is disposed rearward. . Then, the sealed casing 2B is in the casing member 1 B, the driving side space 20a outside the sealing casing 2B, and the pump chamber 30 passing from the inside of the sealing casing 2B through the front casing member 3 1 side. The driven side space 20b. A pump drive unit that omits the illustrated motor is provided on the side of the rear case member 3 3 . In the driving side space 20 a, a concentric projection from the rear driving shaft 3 B and the sealed casing 2 B is formed, and the driving shaft 3 B fixes the cup of the rear end hub portion 46 by the key groove 3 c and the fixing screw 3 d The cylindrical body 4B is disposed as a driving magnetic force generating means in a state of maintaining a small gap 9c between the driving magnet Μ 1 provided on the inner circumference and the outer circumference - 16 - 1290605 of the sealed casing 2 B. On the one hand, in the driven side space 20b, the impeller support shaft 5B is laid along the center of the sealed casing 2B, and the hub portion 3 1 c of the front casing member 3 1 is formed by inserting the cross-sectional notch circular front end portion 5 c into the body. At the same time, the rear end is inserted into the hub formed at the center of the inner surface side of the bottom portion 2 f of the sealed casing 2 B, and is kept from rotating. Then, in the sealed casing 2B, the buckets 5B are rotatably rotated by the front and rear bearing portions 8 fB and 8 ι*, and are attached to the outer peripheral surface of the driven magnet M2 and the sealed casing 2 B. Between, it is configured to maintain a small gap 9d state. Further, the impeller 7B integrally attached to the tip end of the rotor 6B is wound in the pump chamber 30. The front side bearing portion 8 fB is fitted into the recessed portion 6b on the center side of the front end surface of the rotor 6 B, and the bushing of the rotor 6B is fastened by the clasp pin 17b and the cross section of the movable impeller shaft 5B is non-rotatably fitted. The circular ring portion 5 c (Fig. 4) has a two-sliding member of the thrust ring 8 5 , and the inner peripheral surface of the bushing is slidably attached to the outer peripheral surface of the movable impeller support shaft 5 B while the front end surface of the bushing becomes slippery. Connected to the end face of the thrust ring 8 5 . Further, the rear side shaft 8 rB is attached to the rear end side of the rotor 6 B, and the buckle bushing 84 is fitted as a sliding member only in the same manner as the front end side, and the bushing 84 becomes the outer peripheral surface of the sliding impeller shaft 5 B on the inner peripheral surface. Composition. Similarly to the first actual bushing 8 1 , the yoke bushing 8 4 is formed on the inner peripheral surface or the like to form a plurality of grooving grooves 8 4 a... along the axial direction, and is also formed on the outer end faces and the like to be connected to the respective through 8 4 a of the plurality of through-flow slots 8 4 b. Then, the bushing 84 of the two bearing portions 8fB, 8i, and 8b is a force ring 85, and the bearing portion 8 f A, 81· of the first embodiment is slid: the movement is: a part 5d 2g = fulcrum 6B circumference: configuration, ring 84, two, ♦ JLU4 刖 briber 84 at the end of 84: in motion: shape through liquid tank and push 'connected -17-.1290605 • Similarly, the members (8 1 to 8 3 ) are formed of a molded body of a silicon carbide (si C) ceramic or a superhard material such as tungsten carbide (WC) which forms a DLC film on the entire surface. Further, the moving wheel support shaft 5B is formed by forming a molded body such as tantalum carbide ceramic in order to be slidably attached to the bushing 84 by the front and rear bearing portions 8fB and 8rB. The magnet pump P2 of the second embodiment is a movable impeller shaft fixing type, and when the cylinder 4B is rotated by the driving of the drive shaft 3B, the magnetic attraction force of the magnet Μ 1 and the driven magnet M2 is driven, and the rotor 6B is driven. The moving impeller 7 is driven to rotate with the moving impeller 5 Β as the center, and the working fluid of the conveying object is sucked from the liquid suction port 31 1 a from the liquid feeding port 3 by the centrifugal pump function of the rotating impeller 7 Β ^ rotation. 1 b is pressed to the target site. Then, in the normal operation state, the working fluid fills the entire driven side space 20b, and the working fluid of a part of the pump chamber passes through the small gap 9d toward the center side of the driven side space 20b, and the bushing 84 of the rear side bearing portion 8rB The outer end surface liquid passage groove 84b is immersed in the inner circumferential groove 84a of the bushing 84, passes through the sliding portion of the movable impeller support shaft 5B, and passes through the annular space between the movable impeller support shaft 5B and the rotor 6B. The inner circumferential through groove 84a of the bushing 84 immersed in the front side bearing portion 8fB passes through the sliding portion with the movable impeller support shaft 5B, and then is immersed in the through groove 84b of the outer end surface of the bushing 84, through the bushing 84 and The sliding portion of the thrust ring 85 is returned to the pump chamber 30 through the outer circumference of the thrust ring 85 and the inner circumference of the base of the movable impeller 7B, and is sent out by the impeller 7B together with the working fluid in the pump chamber 30. Therefore, there is a writing liquid in each of the sliding portions of the two bearing portions 8fB and 8rB, and the lubricating action ensures the smooth rotation of the movable impeller 7B, prevents the sliding members (84, 85) from being damaged, and also suppresses the sliding member. (84, 8 5) and the wear of the surface of the movable impeller shaft 5B which is slid to the same, and the cooling effect of the heat of the working fluid can also avoid the frictional heating of the sliding portion and The temperature at which the resistance of the dense outer casing 2B rises is increased. On the one hand, when the liquid starts to be drunk during the start of the injection, or when the liquid supply at the start of the interruption is neglected, the liquid level in the pump is corrected, and the like, even if the liquid does not pass through the entire driven side space 20b. In the operating state or the working fluid, the air venting holes in the front stage are incomplete or the air bubbles generated from the liquid are changed to the gas-liquid mixed state. Similarly to the first embodiment, the surfaces of the sliding bushing 84 and the thrust ring 85 are extremely low. The extremely hard DLC ^ ' is rubbed and the adhesion strength to the DLC film of the ceramic or super-hard material of the substrate is excellent, so that the sliding torque at the sliding surface is suppressed to be small, and the damage by the load is prevented at the same time. No abrasion occurs, and the liquid is returned to the normal operation after the abnormality detection, and the liquid is not peeled or cracked by the thermal shock when the liquid is not filled for a sufficient period of time after the dry operation. In the sealed motor pump P3 of the third embodiment shown in Fig. 5, the casing is provided with a front casing member 51 having a liquid suction port 5 1 a and a liquid supply port 5 1 b at the peripheral portion of the front casing member 51. The partitioning member 52 connected by the bolts 15 5 g... and the substantially cylindrical rear casing member 53 which is connected to the front end flange portion 5 3 a by the bolts 1 ... The rear end plate 5 4 ' at the rear end of the rear casing 5 3 is connected by a bolt 1 5 i... at the peripheral portion, and the supporting base 5 5 connected by a bolt 1 5 j... at the lower portion of the casing member 53 The structure then forms a bottomed cylindrical casing 2 C with the rear casing member 53 and the rear end plate 54. The inside of the sealing casing 2 C becomes the rotor chamber 60' in the center portion of the sub-chamber 60. The front and rear bearing portions 8 f C, 8 r C are arranged for sealing and the more positive the film is, the more positive the 1C and the plate 5h are, and the dense shaft -19- 1290605 k » • supported by the partition plate 52 and the rear end plate 54 The movable impeller support shaft 5C' is simultaneously formed by the coil portion 61 of the movable impeller support shaft 5 C and the stainless steel cover portion 62' to form the rotor 6 C of the motor. The front end portion of the movable impeller support shaft 5 C is inserted into the pump chamber 50 through the partition plate, and the movable impeller 7C is attached to the front end portion so that the movable impeller nut and the snap ring 5e cannot rotate relative to each other. On the one hand, in the peripheral wall portion 5 3 b of the rear case member, the rotor chamber 50 is formed with a thin wall inner wall portion 5 3 c and the sub-pit 40 is formed in a plurality of positions in the circumferential direction, and each of the stator pits 40 is provided. The motor drives the core 4 1 of the magnetic force generating device and the constant portion 4 C formed by the coil portion 42. The stainless steel cover portion 6 2 of the crucible rotor 6 C is in a state in which a small gap 9e is disposed between the outer peripheral surface and the inner peripheral surface of the seal outer portion 2C. The rotor chamber 60 is provided with a through hole 24 on the peripheral side of the partition plate 52... Connected to the pump chamber 50. Further, in the position in front of the liquid supply outlet 51b of the casing 1C, there is an outlet port 25, which is connected to one end side of the circulation 26 by the joint 26a, and at the bearing hole portion 54a of the rear end plate 54. The central circulation inlet 27 is connected to the other end side of the circulation pipe 26 by a joint 26b. ^ The front and rear bearing portions 8fC and 8rC are the same as the front and rear bearing portions 8 f A and 8 r A of the magnetic pump P 1 of the first embodiment, and are composed of three sliding members: a partition plate on the fixed side. The inner bearing hole 52b of the hub portion 52a of the 52, and the bearing hole portion 54a of the rear end plate 54 are fastened by the buckle pin 17c to the non-rotating bushing 86; the engaging key 5f cannot be relatively rotated by the engaging key 5f. The sleeve 8 7 of the moving impeller support shaft 5 C on the rotating side; and the thrust ring 8 8 and then the sleeve 87 are disposed on the inner side of the bushing 86, and the thrust ring 88 is coupled to the convex portion of the movable impeller support shaft 5 C The annular recess of the rim portion 56 is arranged such that it is wound on the 52-key 53 and is defined as a sub-shell through-tube. The iron-forming portion is embedded with the -20-.1290605. The end surface of the bushing 86 is slidably connected to the rear axle. The sliding members (86 to 8 8 ) of the bearing portion 8rC are clamped to the rear flange portion 5 of the movable impeller support shaft 5 C and the nut 5 screwed to the rear end portion of the movable impeller support shaft 5 C Between 7. Then, the three sliding members 86 of the bearing portions 8fC and 8rC, the sleeve 87, and the thrust ring 880 are attached to the sliding members of the bearing portions 8 f A and 8 Α of the first embodiment ( 8 1 to 83) Similarly, a DLC film, such as a tantalum carbide (SiC) ceramic or a molded article of a tungsten carbide (WC) superhard material, is formed. Similarly, in the same manner as the bushings 8 1 and ^ 84 of the first and second embodiments, the bushings 86 are formed on the inner circumferential surface in the axial direction or the like to form a plurality of liquid-passing grooves 86a, and are also provided on the outer end faces. A liquid-passing groove 86a (see Fig. 3) which is continuous in the radial direction of each of the liquid-passing grooves 86a is formed. Then, between the bearing hole portion 54a of the rear end plate 54 and the nut 57, the liquid reservoir portion 2, the inner circumference of the bushing 86 of the rear side bearing portion 8rC and the annular sliding portion of the outer circumference of the sleeve 807 are formed. It faces the liquid reservoir 28 on the rear end side. Further, in the front side bearing portion 8fC, a liquid flow gap 29 is formed between the shaft insertion hole 52c of the partition plate 52 and the bucket 0 wheel 7C, and the annular sliding portion of the inner circumference of the bushing 86 and the outer circumference of the sleeve 87 is The front end side faces the liquid flow gap 29. Further, the sliding portion between the bushing 86 of the two bearing portions 8fC and 8rC and the sleeve 87 faces the rotor chamber 60 on the outer peripheral side. The sealed motor pump P3 of the third embodiment is rotated by the magnetic attraction force generated by the stator 4 C, and the rotor 6 C and the movable impeller support shaft 5 C are integrally rotated, and are coupled to the movable impeller support shaft 5C. The centrifugal pump of the impeller 7C rotates, and the working fluid to be transported is sucked from the liquid suction port 51 1 a and is pressure-fed from the liquid supply port 5 1 b to the target portion. -21- 1290605 »- - - In the normal operation state of the sealed motor pump P3, the working fluid is filled in the pump chamber 50 and the rotor chamber 60. Therefore, the pressure on the liquid supply outlet 5 1 b side of the pump operation is larger than the pressure in the rotor chamber 60, so that one part of the working fluid to the liquid supply outlet 5 1 b passes through the circulation flow tube 26 from the circulation outlet 26 from the rear end plate. 5 4 of the circulation inlet inflow liquid reservoir 2, the liquid passage groove 86a of the bushing 86 immersed in the rear side bearing portion 8rC, through the sliding portion of the bushing 86 and the sleeve 87, and then immersed in the bushing 8 The through tank 8 6b of 6 passes through the entire sliding portion of the bushing 86 and the thrust ring 88, enters the pump room 60, and then enters the space on the front side of the pump chamber 60 through the small gap 9e. In addition to the inflow of the front side space of the pump chamber 60 from the rear side space, the working fluid also enters through the through holes 24 of the partition plate 52, but the working fluid is also immersed in the through groove of the bushing 86 of the front side bearing portion 8fC. 86b, through the sliding portion of the bushing 86 and the thrust ring 88, and then immersed in the liquid-passing groove 86a of the bushing 86, through the sliding portion of the bushing 86 and the sleeve 87, and through the liquid flow gap 2 9 Return to pump chamber 50. Therefore, the two bearing portions 8fC and 8rC are slidably connected to each other by the sliding members (86 to 8 8), and the lubricating action of the liquid prevents the sliding members (8 6 to 8 8 ). At the same time, the damage is also suppressed, and the cooling effect by the heat exchange with the working fluid avoids the temperature rise accompanying the frictional heat generation of the sliding portion and the heat generation of the motor. On the one hand, when the start of the liquid supply is neglected, or the liquid supply after the interruption is restarted, the liquid level in the pump is ignored, and the like, even if the liquid is passed through the pump chamber 50 and the rotor chamber 60. The state is turned into a dry running state' or the working fluid is incomplete in the air venting hole in the front stage or the air bubble is changed from the liquid to the gas-liquid mixed state, and the first and second embodiments are also -22- / 1290605 » In the same manner, the surface of the sliding member (8 6 to 8 8 ) is a very low frictional and extremely hard DLC film, and the adhesion strength to the DMC film of the ceramic or superhard material of the substrate is excellent, so that the adhesion is suppressed. The sliding torque of the sliding surface is small, and the damage caused by the impact of the load is prevented, and the wear is hardly generated. After the abnormality detection, the normal operation is performed, and the liquid feeding is performed, and the dry operation is not placed in sufficient time. In the case of liquid, peeling or cracking due to thermal shock does not occur. Further, in the present sealing pump, the sliding member of the bearing portion does not have to have a DLC film on the entire surface as in the above-described third-third embodiment, and the DLC film may be provided on the sliding surface ® . Further, when a plurality of kinds of sliding members are interposed in the bearing portion, it is preferable that the sliding surfaces of all the sliding members have a DLC film, but the present invention includes a sliding member having the sliding surface and having the DLC film and the like without the DLC film. The combination of the sliding members. Further, in the present invention, the structure of the casing, the mounting structure of the sealed casing, the shape of the impeller, the connection structure of the blade shaft and the rotor, the type of the sliding member interposed in the bearing portion, the combination and the holding structure, The liquid passage structure and the thin portion for allowing the working fluid to pass through the sliding portion of the bearing portion can be variously modified in addition to the embodiment. Here, as a method of various types of DLC film forming apparatuses provided on the sliding surfaces of the bearing portion sliding members, a three-dimensional surface portion (non-planar) such as an inner circumferential surface of the bushing or an outer circumferential surface of the sleeve is used. The film forming property and the adhesion property are suitable by the plasma ion implantation method (Non-Patent Documents 1 and 2). That is, the electro-ion ion implantation method applies a negative high-voltage pulse to the substrate immersed in the plasma to accelerate the ion (the DLC film is a carbon ion) implanter with a sheath electric field formed on the surface of the substrate. It can generate ion sheath along the surface of the substrate. Therefore, ions can be uniformly distributed to the three-dimensional surface portion, and a large amount of ions can be directly extracted from the plasma around the substrate -23- 1290605 > Beam current, high-density ion implantation can be performed in a short time. Moreover, it can be treated at low temperature by the control of the plasma, and the device has the advantages of being simple and inexpensive to manufacture. [Non-Patent Document 1] JR·Conrad, LA·Dodd, FG Worzarz and NC Tran: Plasma sourceion-implantation technique for surface modification of materials, J. App 1. P hy s . 6 2 p 4591-4596 (1987) [ Non-Patent Document 2] Ed. By A. Anders: Handbook of Plasma Immersion Ion Implantat-ion and Deposition, John Wiley & Sons, INC. (2000)
又如此的電漿離子佈植法之中，高頻（RF)、高電壓脈 衝重疊方式（專利文獻5)，係由於在厚膜能形成均勻性及密 接性優越的DLC膜，特別推薦作爲使用於本發明密封泵之 軸承部的滑接構件之DLC膜形成裝置。此高頻、高電壓脈 衝重疊方式，例如第6圖所示，將於內部配置被處理物Μ 的真空容器Β內藉排氣管Ο真空吸引後，在該真空容器Β ® 內從給氣管I導入電漿形成氣體，電漿生成用的脈衝高頻 電源s 1與離子佈植用的高電壓脈衝電源s 2藉重疊整合電 路C重疊（邊防止相互的感應障礙，邊互相的結合）’由於 將此重疊的電力藉由導體L施加在被處理物Μ ’於被處理 物Μ之周圍產生電漿Ρ，同時將此電漿Ρ中之離子藉負的 高電壓脈衝誘引、佈植被處理物，又亦在該離子之基 (radical)種堆積中伴隨佈植離子實行成膜者。尙圖中之F 係介置在真空容器B之導體插通部將高電壓從真空容器B 24- 1290605 . f. ν 產生，調查停止後之泵內部，任何之滑接構件都無異常， 亦無產生磨耗。尙將此泵運轉開始後8 0秒鐘予以停止，係 爲了避免藉長時間之繼續乾運轉的密封外殻2A之高溫化。 [測定乾靜摩擦係數] 於上述性能試驗1使用在本發明泵之具有DLC膜的套 筒83，與使用於先前泵的無DLC膜的套筒，測定了乾靜摩 擦係數，對於後者的乾靜摩擦係數爲0 · 3 9 1，獲得前者之乾 靜摩擦係數係爲約1/4的0.0 99的結果。因而，了解DLC ® 膜之表面係比SiC表面極爲低摩擦。 [藉氣液混合運轉的性能試驗] 與藉使用乾運轉的性能試驗1者同樣構成之本發明泵 及用先前構成之泵，對自來水混入容積比約50%空氣的氣 液混合狀態之作業液作送液對象，設定於旋轉數3 6 0 0rpm (套筒82之周速約6m/分、軸承負載約3. 7kgf)實行15分鐘 的氣液混合運轉。調查此運轉後之泵內部，在先前構成之 _ 泵係後側軸承部8rA之軸襯81及套筒82產生有磨耗，但 本發明之泵兩軸承部8fA、8rA之3種滑接構件（81〜83)均 完全無異常，保持在試驗前同樣良好的狀態。尙運轉時間 作爲1 5分鐘，係與上述同樣爲了避免密封外殼2 A之高溫 化。 [藉乾運轉的性能試驗2] 於第1圖及第2圖所示構成於最大吐出量100L/分的小 型磁鐵泵，作爲前後之軸承部8 f A、81· A的軸襯8 1、套筒 8 2、推力環8 3之3種滑接構件，在由標準S i C所成的成形 -27- ^ 4 1290605 ! ι . SUS316之基材表面使用同樣設DLC膜者，設定旋轉數3600 rpm(套筒82之周速約4.7m/分、軸承負載約lkgf)實行無作 業液的乾運轉，從運轉開始在9分2 5秒後因產生了異變， 停止了運轉。此乾運轉停止後調查泵內部，兩軸承部8 f A 、8rA都在軸襯81無異常，但於後側軸承部8rA的套筒82 係磨耗DLC膜而有露出SUS316之基材材質的處所，又於 前側軸承部8 f A的套筒8 2認有若干的磨耗，同時於從動側 空間1 〇b之底部積存有DLC膜之磨耗粉。從此結果，軸承 ® 部之滑接構件即使滑接面設有DLC膜，基材爲金屬時，與 基材爲陶瓷特別與碳化矽或超硬材料之碳化鎢者比較，不 能獲得充分的密接強度及耐磨耗性，可知有乾運轉之誤操 作之際急速地損及DLC膜。 【圖式簡單說明】 第1圖係關於本發明第一實施形態之磁鐵泵之縱剖側 視圖。 第2圖係關於同磁鐵泵放大要部表示的縱剖側視圖。 ® 第3圖係用於同磁鐵泵的軸襯斜視圖。 第4圖係關於本發明第二實施形態之磁鐵泵之縱剖側 視圖。 第5圖係關於本發明第三實施形態之密封馬達泵之縱 剖側視圖。 第6圖係藉高頻、高電壓脈衝重疊方式之電漿離子佈 植法形成類鑽碳膜之形成原理模式圖。 -30- 1290605 明】 【主要元件符號說In the plasma ion implantation method, a high-frequency (RF) and high-voltage pulse superimposition method (Patent Document 5) is a DLC film which is excellent in uniformity and adhesion in a thick film, and is particularly recommended for use. A DLC film forming apparatus for a sliding member of a bearing portion of a sealed pump of the present invention. This high-frequency, high-voltage pulse superimposing method, for example, as shown in Fig. 6, will be vacuum-sucked in a vacuum container inside the workpiece Μ, and then evacuated from the air supply pipe I in the vacuum container Β ® The plasma-forming gas is introduced, and the pulsed high-frequency power source s 1 for plasma generation overlaps with the high-voltage pulse power source s 2 for ion implantation by overlapping the integrated circuit C (while preventing mutual sensing obstacles and combining with each other) The superimposed electric power is applied to the object to be treated by the conductor L to generate a plasma crucible around the object to be treated, and at the same time, the ions in the plasma crucible are induced by a high voltage pulse, and the vegetation is treated. Also, in the deposition of the ion species, the film formation is carried out along with the implant ions. In the figure, the F is placed in the conductor insertion portion of the vacuum vessel B to generate a high voltage from the vacuum vessel B 24- 1290605 . f. ν. After the investigation is stopped, there is no abnormality in any of the sliding members. No wear is produced. 8 Stop the pump 80 seconds after the start of the pump operation, in order to avoid the high temperature of the sealed casing 2A that has been continuously operated for a long time. [Measurement of dry static friction coefficient] The dry static friction coefficient was measured for the above-mentioned performance test 1 using the sleeve 83 having the DLC film of the pump of the present invention and the sleeve without the DLC film used in the previous pump, and the dry static friction coefficient for the latter The result is a dry friction coefficient of about 1/4 of 0.099 for 0. Thus, understanding the surface of the DLC ® film is extremely low friction compared to the SiC surface. [Performance test by gas-liquid mixing operation] The pump of the present invention having the same configuration as that of the dry-running performance test 1 and the previously configured pump are mixed with tap water into a gas-liquid mixed state liquid having a volume ratio of about 50% of air. For the liquid supply, the gas-liquid mixing operation was performed for 15 minutes at a number of revolutions of 3,600 rpm (the peripheral speed of the sleeve 82 was about 6 m/min, and the bearing load was about 3.7 kgf). Investigating the inside of the pump after this operation, the bushing 81 and the sleeve 82 of the pump-side rear bearing portion 8rA which was previously formed are worn, but the sliding members of the two bearing portions 8fA and 8rA of the pump of the present invention ( 81 to 83) were completely abnormal, and remained in the same good state before the test. The operation time of the crucible is as long as the above, in order to avoid the high temperature of the sealed casing 2A. [Performance Test 2 for Dry Operation] A small magnet pump having a maximum discharge amount of 100 L/min as shown in Figs. 1 and 2 is used as a bushing 8 1 for the front and rear bearing portions 8 f A and 81·A. Sleeve 8 2, 3 kinds of sliding members of the thrust ring 8.3, the same number of DLC films are used for the surface of the formed -27-^ 4 1290605 ! ι SUS316 made of standard S i C, and the number of rotations is set. At 3600 rpm (the circumferential speed of the sleeve 82 was about 4.7 m/min and the bearing load was about lkgf), the dry operation without the working fluid was carried out, and the operation was stopped after 9 minutes and 25 seconds from the start of the operation. After the dry operation was stopped, the inside of the pump was inspected, and both the bearing portions 8 f A and 8rA were not abnormal in the bushing 81. However, the sleeve 82 of the rear bearing portion 8rA was worn by the DLC film to expose the substrate material of the SUS316. Further, the sleeve 8 2 of the front side bearing portion 8 f A recognizes a certain amount of wear, and at the same time, the wear powder of the DLC film is accumulated at the bottom of the driven side space 1 〇b. As a result, even if the sliding member of the bearing® portion is provided with a DLC film and the base material is metal, sufficient adhesion strength cannot be obtained as compared with a case where the base material is ceramic, particularly tungsten carbide of a niobium carbide or a superhard material. As well as the wear resistance, it is known that the DLC film is rapidly damaged when the dry operation is erroneously operated. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a longitudinal sectional side view of a magnet pump according to a first embodiment of the present invention. Fig. 2 is a longitudinal sectional side view showing the same as the enlarged portion of the magnet pump. ® Figure 3 is a perspective view of the bushing used with the magnet pump. Fig. 4 is a longitudinal sectional side view showing a magnet pump according to a second embodiment of the present invention. Fig. 5 is a longitudinal sectional side view showing a sealed motor pump according to a third embodiment of the present invention. Fig. 6 is a schematic diagram showing the formation principle of a diamond-like carbon film by a plasma ion implantation method using a high-frequency, high-voltage pulse overlap method. -30- 1290605 明] [The main component symbol says
1 A〜 3 A 2 A〜 2C 3A、 3B 4A、 4B 4C 5 A〜 5C 6 A〜 6C 7 A〜 7C 8fA 〜8fC 8 r A - -8rC 8卜 84、86 82、 87 83 ^ 85 ^ 88 Ml M2 泵殼 密封外殼 驅動軸 筒體（驅動磁力產生裝置） 定子（驅動磁力產生裝置） 動葉輪支軸 轉子 動葉輪 前側軸承部 後側軸承部 軸襯 套筒 推力環 驅動磁鐵 從動磁鐵1 A~ 3 A 2 A~ 2C 3A, 3B 4A, 4B 4C 5 A~ 5C 6 A~ 6C 7 A~ 7C 8fA ~8fC 8 r A - -8rC 8 Bu 84, 86 82, 87 83 ^ 85 ^ 88 Ml M2 pump casing seal housing drive shaft cylinder (drive magnetic force generating device) stator (drive magnetic force generating device) moving impeller support shaft rotor impeller front side bearing part rear side bearing bushing sleeve thrust ring drive magnet driven magnet