TWI290429B - Method for inspecting laser marks on IC packages - Google Patents
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- 238000012015 optical character recognition Methods 0.000 claims abstract description 15
- 238000010330 laser marking Methods 0.000 claims description 57
- 238000001514 detection method Methods 0.000 claims description 15
- 230000003287 optical effect Effects 0.000 claims description 7
- 206010000234 Abortion spontaneous Diseases 0.000 abstract 1
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- 238000011179 visual inspection Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 13
- 238000005259 measurement Methods 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- 238000003825 pressing Methods 0.000 description 3
- 238000007689 inspection Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
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Description
1290429 九、發明說明: 【發明所屬之技術領域】 本發明係有II於-種在積體電路封裝件上 之檢測方法,特職有關於—種能針對在龍電路封2 上雷射標印進行自動檢測與統計之方法。 【先前技術】 習知積體電路產品在封裝保護之後,會在封裝件之一 表面印上雷射標印(lasermark),以標明批號與品名。但雷 射標印有可能發生字元錯誤與位置偏移,例如人為因素: 資料輸入錯誤或是系統老舊導致蓋印的對位誤差過大。 目刖的在積體電路封裝件上雷射標印之檢測方式 為,人工方式進行兩次交讀雷射標印之字元,即便如此二 會有錯誤之發生,且效桌呈。. >文羊甚差此外,為了防止雷射標印 之位置偏移無法被發現,目前的檢測方式為以人工方式使 用顯微鏡量測蓋印位置,在經過原點調整與實施量測1時 間約10分鐘,相當耗時。且不同之量測人員有不同之量 測結果,重現性不佳。 【發明内容】 本發明之主要目的係在於提供一種在積體電路封裝 件上雷射標印之檢測方法,其係影像擷取至少一待測積體 電路封裝件之雷射標印,並將該雷射標印之影像以光學字 元辨識(Optical Character Recognition, OCR)方式轉換成字 兀,再與標準雷射標印之字元進行比對,解決習知以目測 比對產生之人為誤判。 1290429 本發明之次-目的係在於提供在積體電路封裝件上 雷射標印之檢測方法’每一雷射標印係包含有一定位點, 可由該雷射標印之影像找出該定位點之座標值,並以一檢 測程式加以確認是否在標準定位點之容許㈣内,以快速 判別雷射標印之位置正確性。1290429 IX. Description of the invention: [Technical field to which the invention pertains] The present invention relates to a method for detecting a type of circuit package on an integrated circuit package, and the special purpose is related to the laser marking of the dragon circuit seal 2 A method of automatic detection and statistics. [Prior Art] After the package protection, the conventional integrated circuit product is printed with a laser mark on the surface of one of the packages to indicate the lot number and the product name. However, there may be character errors and positional shifts in the laser markings, such as human factors: data input errors or excessive alignment errors caused by the old system. The method of detecting the laser marking on the integrated circuit package is to manually read the characters of the laser marking twice, even if there is an error, and the effect table is presented. In addition, in order to prevent the positional deviation of the laser marking from being undetectable, the current detection method is to manually measure the stamping position using the microscope, and adjust and measure the time after the origin adjustment. About 10 minutes, quite time consuming. And different measurement personnel have different measurement results, and the reproducibility is not good. SUMMARY OF THE INVENTION The main object of the present invention is to provide a method for detecting a laser marking on an integrated circuit package, which is to capture at least one laser marking of an integrated circuit package to be tested, and The image of the laser marking is converted into a character by optical character recognition (OCR), and then compared with the character of the standard laser marking, and the human error caused by the visual comparison is solved. . 1290429 The second aspect of the present invention is to provide a method for detecting a laser marking on an integrated circuit package. Each laser marking system includes an positioning point, and the positioning point can be found by the image of the laser marking. The coordinate value is confirmed by a detection program whether it is within the tolerance of the standard positioning point (4) to quickly determine the correctness of the position of the laser marking.
依據本發明之在積體電路封裝件上雷射標印之檢測 方法:包含之步驟為,建立一標準雷射標印之檔案其包 ^有複數個標準字元;載人該檔案至-檢測程式,該檢測 程式係S有光學子元辨識系統;影像操取至少一待測 積體電路封裝件之待測雷射標印;以及,以光學字元辨識 方式由該待測雷射標印之影像轉換出複數個第一字元,並 與該些標準字元進行字元比對。 【實施方式】 在本發明之一具體實施例中,如第i圖所示,一種在 積體電路封裝件上雷射標印之檢測方法係主要包含有「建The method for detecting a laser marking on an integrated circuit package according to the present invention comprises the steps of: establishing a standard laser marking file with a plurality of standard characters; carrying the file to the detection a program, the detection program S has an optical sub-component identification system; the image captures at least one laser marking to be tested of the integrated circuit package to be tested; and the laser marking is detected by the optical character identification method The image is converted into a plurality of first characters and compared with the standard characters. [Embodiment] In an embodiment of the present invention, as shown in FIG. 1, a method for detecting a laser marking on an integrated circuit package mainly includes "building".
立一標準雷射標印之檔案」步驟1、「載入該檔案至一檢測 秩式」步驟2、「影像擷取在待測積體電路封裝件上之待測 田射軚印」步驟3、「以光學字元辨識方式由該待測雷射標 印之影像轉換成字元,並進行字元比對」步驟4、「確認該 待測雷射標印之定位點之座標值」步驟5、以及「統計並 刀析整批待測積體電路封裝件上之待測雷射標印之檢測 結果」步驟6。Set up a standard laser marking file" Step 1, "Load this file to a detection rank" Step 2, "Image capture on the test circuit package to be tested" Step 3 , "Converting the image of the laser to be detected into a character by optical character recognition, and performing character matching" Step 4, "Confirming the coordinate value of the positioning point of the laser marking to be tested" 5. Step 6 of “Statistical Analysis of the Detection Results of the Laser Marks to Be Measured on the Whole Batch of Packages to Be Measured”.
首先,在步驟1,在一資料庫中建立有各種積體電路 、裝件之^準雷射標印之檔案(圖未繪出),其係能被一 VI ⑧ 1290429 檢測程式開啟。此外,請參閱第2圖,該VI檢測程式係 安裝在一視窗作業系統中,其圖示係以圖號1〇〇代表之。 通常該vi檢測程式100係包含有一光學字元辨識(0ptical Character Recognition,〇CR)系統,其中該光學字元辨識系 統係包含一 CCD攝影器以及一辨識服務軟體(圖未繪 出)。在點選並執行該VI檢測程式1〇〇後,其主晝面係如 第3圖所示。請參閱第4圖,該vi檢測程式ι〇〇之主畫 面内具有一 “Tools”鈕101,在按下後可選擇工作模式, 在’’Operator”欄打勾並輸入正確之密碼,便可進行雷射標 印之檢測前置作業。VI該檢測程式1〇〇係另包含有一電腦 條碼系統(Barcode System),以連結至該資料庫,而能帶出 待測積體電路封裝件之批號基本資料。 ,該VI檢測程式First, in step 1, a file of various types of integrated circuit and assembly laser markings (not shown) is built in a database, which can be turned on by a VI 8 1290429 detection program. In addition, referring to Fig. 2, the VI detection program is installed in a window operating system, and its illustration is represented by the figure number 1〇〇. Generally, the vi detection program 100 includes an optical character recognition (〇CR) system, wherein the optical character recognition system includes a CCD camera and an identification service software (not shown). After clicking and executing the VI test program, the main face is shown in Figure 3. Please refer to Fig. 4. The main screen of the vi detection program has a “Tools” button 101. After pressing, you can select the working mode. Tick the “'Operator” field and enter the correct password. Performing the front-end inspection of the laser marking. The VI detection program 1 further includes a Barcode System to connect to the database, and can bring out the batch number of the integrated circuit package to be tested. Basic information. , the VI detection program
之後,请參閱第5圖,在步驟2中, 之主畫面内具有一 “Load”紐1〇2。在 1290429 TAIWAN 0417A9K2N-5B」,與第6圖之雷射標印211所示 「DD2508AMTA TAIWAN 0417A9K2N-6B」為不相同,但 亦可為相同。下載之同時,在一容許範圍XY轴上下限值 顯示區115中,分別在”X-Offset”欄位顯示出該標準定位 點212之X軸上限值與X軸下限值、以及在”Y-Offset”攔 位顯示出該標準定位點212之Y軸上限值與Y軸下限值。 在本實施例中,X轴上限值為2.100,X轴下限值為1.500, Y軸上限值為2.100,Y轴下限值為1.500。 在檢測作業之開始時,請參閱第7圖,可以在一選取 欄104選擇適當之生產機台編號。之後,將待測積體電路 封裝件放置於一緩衝區(可稱為buffer或kit)内,並如第 8圖所示,在該VI檢測程式100之主畫面中,點選一批號 顯示區105並可由該電腦條碼系統讀入批號,並可將該批 號之基本資料(即該標準雷射標印之標準字元” DD2508AMTA TAIWAN 0417A9K2N-5B”)自動帶出而顯示 於一標準字元顯示區106。或者,當該電腦條碼系統無法 使用、不存在或是該VI檢測程式100未連接至該電腦條 碼系統時,可以手動鍵入(key-in)該標準雷射標印之標準 字元後按”Enter”,即能輸入標準字元於該VI檢測程式 100 〇 在執行上述之「影像擷取在待測積體電路封裝件上之 待測雷射標印」步驟3中,請先參閱第9圖,在該VI檢 測程式100之主畫面中,勾選“RunLive”鈕107,以動態 擷取影像(Live畫面),並將一第一待測積體電路封裝件220 1290429 j攝心框内作影像擷取,完成影像擷取之後可將已勾選After that, please refer to Fig. 5. In step 2, there is a “Load” button 1 in the main screen. In 1290429 TAIWAN 0417A9K2N-5B", it is different from "DD2508AMTA TAIWAN 0417A9K2N-6B" shown in the laser marking 211 of Fig. 6, but it may be the same. At the same time of downloading, in the allowable range XY axis upper and lower limit value display area 115, the X-axis upper limit value and the X-axis lower limit value of the standard positioning point 212 are displayed in the "X-Offset" field, respectively, and The Y-Offset" display shows the Y-axis upper limit and the Y-axis lower limit of the standard set point 212. In this embodiment, the upper limit of the X axis is 2.100, the lower limit of the X axis is 1.500, the upper limit of the Y axis is 2.100, and the lower limit of the Y axis is 1.500. At the beginning of the inspection operation, please refer to Figure 7, where an appropriate production machine number can be selected in a selection field 104. After that, the integrated circuit package to be tested is placed in a buffer (which can be called a buffer or a kit), and as shown in FIG. 8, in the main screen of the VI detection program 100, a batch of number display area is selected. 105 and the batch number can be read by the computer barcode system, and the basic data of the batch number (ie, the standard character of the standard laser mark DD2508AMTA TAIWAN 0417A9K2N-5B") can be automatically brought out and displayed in a standard character display. Area 106. Alternatively, when the computer barcode system cannot be used, does not exist, or the VI detection program 100 is not connected to the computer barcode system, you can manually key-in the standard character of the standard laser mark and press "Enter" ”, that is, the standard character can be input to the VI detection program 100. In the third step of performing the above-mentioned “image capture of the laser mark to be tested on the integrated circuit package to be tested”, please refer to FIG. 9 first. In the main screen of the VI detection program 100, the "RunLive" button 107 is selected to dynamically capture the image (Live screen), and a first integrated circuit package 220 1290429 j is taken in the frame. Image capture, after the image capture is completed, it will be checked
Llve鈕107取消。此時,在該第一待測積體電 于裝件220上係形成有一第一待測雷射標印221,且較 佳地,該第一待測雷射標印221應包含有複數個第一字元 以及一第一待測定位點222。 之後進仃一光學字元辨識與比對之步驟4,請再參閱 圖在。亥VI檢測程式100之主晝面中按下,,0CR,,鈕 08如第10圖所不,開啟該光學字元辨識系統之次畫面, Z該第-待測雷射標印221之影像自動進行字元辨識。 當字元辨冑完成冑,會纟次畫面内一字元辨識顯示視窗 109顯示出辨識結|,即將第一待測雷射標221之影像 轉換出複數個第一字元。在本實施例中,該些第一字元係 為「DD2508AMTATAIWAN0417A9K2N-5B」。之後,按下 一 “OCR Close”紐110,即可退出該光學字元辨識系統之 次畫面而回到該VI檢測程式1〇〇之主畫面。之後,請參 閱第11圖,在該VI檢測程式1〇〇之主畫面中,一待測字 元顯示區111會顯示上述字元辨識操作後之該些第一字 元,並與為在該標準字元顯示區1〇6上之該標準雷射標印 之該些標準字元進行字元比對。如帛12圖所示,字元辨 識之檢測結果會顯示在該VI檢測程式1〇〇之主晝面内之 字元辨識結果顯示區112,其中” 0CR Pass,,表示第一待測 雷射標印221之第一待測字元係與標準雷射標印之標準字 元相同,故通過字元比對之檢測。反之,若顯示,,〇CRFaii” 表示有錯誤之字元。, 1290429 之後,可進行一定位點座標確認之步驟5。如第12圖 所示’在該VI檢測程式10〇之主畫面中,點選 FmdEageCenter ’,鈕 113,之後在”Mark〇ffsetX”The Llve button 107 is cancelled. At this time, a first laser marking 221 to be tested is formed on the first electrical component to be tested 220, and preferably, the first laser marking 221 to be tested should include a plurality of laser markings 221 The first character and a first to-be-determined site 222. After step 4 of the optical character recognition and comparison, please refer to the figure. Pressing the main surface of the Hai VI detection program 100, 0CR, and button 08 as shown in Fig. 10, the secondary image of the optical character recognition system is turned on, and the image of the first-to-be-measured laser marking 221 is Automatic character recognition. When the character recognition is completed, the character recognition display window 109 in the secondary screen displays the identification knot|, that is, the image of the first to-be-detected laser target 221 is converted into a plurality of first characters. In this embodiment, the first characters are "DD2508AMTATAIWAN0417A9K2N-5B". Then, by pressing an "OCR Close" button 110, the secondary screen of the optical character recognition system can be exited and returned to the main screen of the VI detection program. After that, referring to FIG. 11, in the main screen of the VI detection program, a character display area 111 to be tested displays the first characters after the character recognition operation, and The standard characters of the standard laser mark on the standard character display area 1〇6 are compared by a character. As shown in Fig. 12, the detection result of the character recognition is displayed in the character recognition result display area 112 in the main surface of the VI detection program, where "0CR Pass," indicates the first laser to be detected. The first character to be tested of the label 221 is the same as the standard character of the standard laser mark, so it is detected by the word comparison. Conversely, if displayed, 〇CRFaii" indicates that there is an error character. After 1290429, step 5 of confirming the coordinates of the anchor point can be performed. As shown in Figure 12, in the main screen of the VI detection program, click FmdEageCenter ’, button 113, then “Mark〇ffsetX”
與”Mark〇ffsetY”攔位中分示出—量測後—χ抽座標 值與一 γ轴座標值,分別代表該第一待測定位點222至該 第一待測積體電路封裝件220之乂軸邊緣之間距以及代表 該第一待測定位點222至該第—待測積體電路封裝件22〇 之γ軸邊緣之間距。在本實施例中,在”Mark〇ffsetx,,之 ^測值為1.771,在”Mark0ffsetY,,之量測值為丨882,均 落在該標m點212之X轴上下限值(2.1004.500)與γ 軸上下限值ακκχ·)範圍内,即表示上述包含該第一 待測定位點222之第一待測雷射標印221係位置正確地形 成於該第一待測積體電路封装件220上。And the "Mark ffsetY" block is shown in the following - the measured - χ 座 coordinate value and a γ axis coordinate value respectively represent the first to-be-measured site 222 to the first to-be-tested integrated circuit package 220 The distance between the edges of the x-axis and the distance between the first to-be-determined site 222 and the γ-axis edge of the first-to-be-tested integrated circuit package 22〇. In this embodiment, in "Mark〇ffsetx,, the measured value is 1.771, and the measured value of "Mark0ffsetY," is 丨882, which falls on the X-axis upper and lower limits of the target m point 212 (2.1004. 500) and the γ-axis upper and lower limit value ακκχ·), that is, the first detected laser marking 221 line including the first to-be-measured site 222 is correctly formed on the first to-be-tested integrated circuit. On the package 220.
明再參閲第12圖,字元辨識與定位點確認之最終檢 測結果會顯示於一螢幕,其係位在該νι檢測程式1〇〇之 主畫面内之一最終檢測結果顯示區116中。其中” PASS”表 示該第-待測雷射標印221為字元正確且無偏移地形成於 该第一待測積體電路封裝件22〇上。其顯示顏色可為綠 色,以顏色簡易辨識結果。 重覆上述步驟3至5,連續檢測複數個待 測積體電路封裝件Μ 々一 雷射私印。請參閱第13圖,檢測在 一第二待測積體電路封奘 了裒件230上之第二待測雷射標印 231 ’該第二待測 由町&印231可包含有一第二待測定位 點232。在步驟q 士 中’勾選“RunLive”鈕1〇7,該第二待 ⑧ 10 Γ290429 測積體電路封裝件230包含該第二待測雷射標印231之影 像係顯示於該VI檢測程式100之主畫面内;之後在步驟4 中,該第二待測雷射標印231之第二字元經光學字元辨識 後為「DD2508AMTATAIWAN0417A9K2N-6B」並顯示於 該字元顯示區110,不同於該標準雷射標印之標準字元, 故會在該字元辨識結果顯示區112顯示出”OCR Fail”。之 後,在步驟5中,在該定位點XY轴座標值顯示區114中, 該第二待測定位點232之X軸座標值為2.040,其係顯示 於”MarkOffsetX”欄位,該第二待測定位點232之Y軸座 標值為2.054,其係顯示於”MarkOffsetY”欄位,均在合格 範圍内,因此,在該最終檢測結果顯示區116會顯示 出”Mark Fail”,表示該第二待測雷射標印231有錯誤字元 但位置無偏移。 此外,當檢測在一第三待測積體電路封裝件240之一 第三待測雷射標印241時,同樣進行上述步驟3至5。請 參閱第14圖,該第三待測雷射標印241可包含有一第三 待測定位點242。在步驟3中,該第三待測積體電路封裝 件240包含該第三待測雷射標印241之影像係顯示於該 VI檢測程式100之主畫面内;之後在步驟4中,該第三待 測雷射標印231經光學字元辨識後轉變成複數個第三字元 為「DD2508AMTA TAIWAN 0417A9K2N-5B」,其係顯示於 該字元顯示區110,與該標準雷射標印之標準字元相同, 故會在該字元辨識結果顯示區112顯示出”0CR Pass”。之 後,在步驟5中,在該定位點XY軸座標值顯示區114中, 11 Γ290429 該第三待測定位點242之X軸座標值為2.160,其係顯示 於”MarkOffsetX”欄位,超過在該容許範圍XY轴上下限值 顯示區115之2.100 X軸上限值(在X_Offset欄位Max); 該第三待測定位點242之Y軸座標值為1.879,其係顯示 於”MarkOffsetY”欄位,其係在合格範圍内,因此,在該最 終檢測結果顯示區116會顯示出”Tx/Ty Fail”,表示該第三 待測雷射標印241無錯誤字元但位置發生偏移。 當量測一第四待測積體電路封裝件250之一第四待測 > 雷射標印251時,同樣進行上述步驟3至5。請參閱第15 圖,該第四待測雷射標印251可包含有一第四待測定位點 252。在步驟3中,該第四待測積體電路封裝件250包含 該第四待測雷射標印251之影像係顯示於該VI檢測程式 100之主畫面内;之後在步驟4中,該第四待測雷射標印 251經光學字元辨識後轉變成複數個第四字元為 「DD2508AMTA TAIWAN 0417A9K2N-6B」,其係顯示於該 _ 字元顯示區110,與該標準雷射標印之標準字元不相同, 故會在該字元辨識結果顯示區112顯示出”0CR Fail”。之 後,在步驟5中,在該定位點XY軸座標值顯示區114中, 該第四待測定位點252之X軸座標值為2.438,其係顯示 於”MarkOffsetX”欄位,超過在該容許範圍XY轴上下限值 顯示區115之2·100 X軸上限值;該第四待測定位點252 之Y轴座標值為2.054,其係顯示於”MarkOffsetY”欄位, 其係在合格範圍内,因此,在該最終檢測結果顯示區116 會顯示出”Fail”,表示該第四待測雷射標印251有錯誤字 12 1290429 元且位置發生偏移。 最後,在整批積體電路封裝件上之雷射標印檢測完畢 後’進行上述步驟6。請參閱第16圖,在該^檢測程式 _之主畫面中,按下-“0CRClear,,紐117,以清除資 料’例如删除在該批號顯示區⑽、標準字元顯示區106、 以及定位點XY軸座標值顯示區114内之字元或數值。同 時,如第η圖所示,加以統計與分析,可以得到整批積 體電:封裝件在雷射標印後之量測總數、良品數量、不良 品數量、良品率,以及檢測花費時間等等。 义 之保護範㈣視後附〇料㈣圍所界定 者為準,任何熟知此項技蓺者 ㈣J在不脫離本發明之精神和 :圍内所作之任何變化與修改,均屬於本發明之保護範 【圖式簡單說明】 第1圖 第2 第3圖 第4圖 第5圖 依據本發明之一具體實施例,一 種在積體電路 •裝件上雷射標印之檢測方法流程圖。 •依^本發明之_具體實施例,_檢測程式之圖 •不颂不於一作業視窗時之晝面示意圖。 •依據本發明之一呈體眚綠点丨. 式之…-體實㈣’在開啟該檢測程 飞之後之畫面示意圖。 依據本發明之-具时施例,在登錄 面示意圖。 | 依據本發明之一呈許眚,、體貫施例,在載入一 射標印之檔荦之滿由查 π 雷 田系之過転中畫面示意圖。 ⑧ 13 1290429 第6圖:依據本發明之一具體實施例,一摔;+ 之圖案顯示於該檢測程式中畫面二準雷射標印 圖·依據本發明之-具體實施例,在、:^ 編號時之畫面示意圖。 產機台 第8圖·依據本發明之一具體實施例,顯示' 路封裝件之批號與基本資料之*不待蜊積體電 第9圖:依據本發明之一具體實施例;二意取圖 待測積體電路封裝件之畫面示意圖/取一第一 第10圖·依據本發明之一具體實施例,對在診★ 積體電路封裝件上之一第一待測雷射::測 光學字元辨識之畫面示意圖。 仃 第11圖··依據本發明之一具體實施例,顯示在光學字一 辨識後之字元之晝面示意圖。 第12圖:依據本發明之一具體實施例,對該第—待測雷 射標印進行定位點座標值確認並顯示判定結果 之晝面示意圖。 第圖:依據本發明之一具體實施例,顯示對一第二待 測雷射標印之判定結果之畫面示意圖。 第14圖:依據本發明之一具體實施例,顯示對一第三待 測雷射標印之判定結果之晝面示意圖。 第15圖:依據本發明之一具體實施例,顯示對一第四待 測雷射標印之判定結果之畫面示意圖。 第16圖:依據本發明之一具體實施例,在整批待測雷射 標印檢測後之清除資料之畫面示意圖。 14 ⑧Referring again to Fig. 12, the final detection result of the character recognition and the positioning point confirmation is displayed on a screen which is located in one of the final detection result display areas 116 in the main picture of the νι detection program. Wherein "PASS" indicates that the first-to-be-tested laser mark 221 is formed on the first integrated circuit package 22b to be tested with the correct character and without offset. The display color can be green, and the result can be easily identified by color. Repeat steps 3 to 5 above to continuously detect a plurality of integrated circuit packages to be tested. Referring to FIG. 13, detecting a second to-be-detected laser mark 231 on a second in-process integrated circuit to seal the element 230. The second to-be-tested & 231 may include a second Site 232 to be determined. In the step q, 'check the "RunLive" button 1〇7, the second to-be- 8 10 Γ 290429. The integrated circuit package 230 includes the image of the second to-be-detected laser mark 231 displayed in the VI detection program. In the main screen of 100; then in step 4, the second character of the second laser mark 231 to be tested is identified by the optical character and is displayed as "DD2508AMTATAIWAN0417A9K2N-6B" and displayed in the character display area 110, different The standard character of the standard laser mark is displayed, and "OCR Fail" is displayed in the character recognition result display area 112. Then, in step 5, in the positioning point XY-axis coordinate value display area 114, the X-axis coordinate value of the second to-be-determined site 232 is 2.040, which is displayed in the "MarkOffsetX" field, the second waiting The Y-axis coordinate value of the measurement site 232 is 2.054, which is displayed in the "MarkOffsetY" field, and both are within the acceptable range. Therefore, "Mark Fail" is displayed in the final detection result display area 116, indicating the second The laser mark 231 to be tested has an error character but the position is not offset. Further, when detecting the third laser mark 241 to be tested which is one of the third integrated circuit package packages 240 to be tested, the above steps 3 to 5 are also performed. Referring to Figure 14, the third laser marking 241 to be tested may include a third location to be determined 242. In step 3, the image system of the third to-be-tested integrated circuit package 240 including the third to-be-detected laser mark 241 is displayed in the main screen of the VI detection program 100; then in step 4, the first The three laser markings to be detected 231 are converted into a plurality of third characters by the optical character recognition and are "DD2508AMTA TAIWAN 0417A9K2N-5B", which is displayed in the character display area 110, and the standard laser marking The standard characters are the same, so "0CR Pass" is displayed in the character recognition result display area 112. Then, in step 5, in the positioning point XY axis coordinate value display area 114, 11 Γ 290429, the third axis to be measured 242 has an X-axis coordinate value of 2.160, which is displayed in the "MarkOffsetX" field, exceeding The allowable range XY axis upper and lower limit display area 115 has a 2.100 X axis upper limit value (in the X_Offset field Max); the third to-be-determined position 242 has a Y-axis coordinate value of 1.879, which is displayed in the "MarkOffsetY" column. The bit is within the qualified range. Therefore, "Tx/Ty Fail" is displayed in the final detection result display area 116, indicating that the third to-be-detected laser mark 241 has no error character but the position is shifted. Equivalent Measurement One of the fourth to-be-tested integrated circuit package 250 is a fourth to be tested > When the laser marking 251 is performed, the above steps 3 to 5 are also performed. Referring to Figure 15, the fourth laser marking 251 to be tested may include a fourth location to be determined 252. In step 3, the image system of the fourth to-be-tested integrated circuit package 250 including the fourth to-be-detected laser mark 251 is displayed in the main screen of the VI detection program 100; then in step 4, the first The four laser markings to be detected 251 are converted into a plurality of fourth characters by the optical character recognition and are "DD2508AMTA TAIWAN 0417A9K2N-6B", which is displayed in the _ character display area 110, and the standard laser marking The standard characters are not the same, so "0CR Fail" is displayed in the character recognition result display area 112. Then, in step 5, in the positioning point XY-axis coordinate value display area 114, the X-axis coordinate value of the fourth to-be-determined site 252 is 2.438, which is displayed in the "MarkOffsetX" field, exceeding the tolerance. The range of the XY axis upper and lower limit display area 115 is 2·100 X axis upper limit value; the fourth axis to be measured 252 has a Y axis coordinate value of 2.054, which is displayed in the “MarkOffsetY” field, which is in the qualified range. Therefore, "Fail" is displayed in the final detection result display area 116, indicating that the fourth to-be-detected laser mark 251 has the error word 12 1290429 and the position is shifted. Finally, after the laser marking on the entire batch of integrated circuit packages is detected, the above step 6 is performed. Referring to FIG. 16, in the main screen of the detection program _, press - "0CRClear,, 117, to clear the data", for example, delete the batch number display area (10), the standard character display area 106, and the anchor point. The XY axis coordinate value displays the character or value in the area 114. At the same time, as shown in the figure η, statistics and analysis can be used to obtain the whole batch of integrated electricity: the total number of measurements of the package after laser marking, good product Quantity, number of defective products, yield rate, and time spent on testing, etc. The protection of the righteousness (4) is subject to the definition of the attached material (4). Anyone who is familiar with the technology (4) J does not deviate from the spirit of the present invention. Any changes and modifications made in the surroundings are the protection of the present invention. [Simplified description of the drawings] Fig. 1 2nd 3rd, 4th, 4th, 5th, according to an embodiment of the present invention, an integrated body A flow chart of a method for detecting a laser mark on a circuit or a package. According to the present invention, a diagram of a test program is a schematic diagram of a face view of a work window. A body is green and green. (4) Schematic diagram of the screen after the start of the test flight. According to the present invention, a schematic diagram of the login surface is provided. | According to one of the present inventions, a scheme is applied, and a shot is loaded. The picture of the 荦 雷 雷 由 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 Laser Marking Diagram According to a specific embodiment of the present invention, a schematic diagram of the screen at the time of:: ^. Number 8 of the production machine. According to an embodiment of the present invention, the batch number and basic of the road package are displayed. The data of the data is not stored in the ninth figure: according to a specific embodiment of the present invention; the second is to take a picture of the circuit package of the test object to be measured / take a first 10th figure · according to one of the specific Embodiments, a schematic diagram of a first laser to be measured on the integrated circuit package of the diagnostics:: optical optical character recognition. 仃11.. according to an embodiment of the present invention, displayed in optical A schematic diagram of the character after the word is recognized Figure 12 is a schematic view showing the coordinate value of the positioning point to be confirmed and displaying the determination result according to an embodiment of the present invention. A screen diagram showing the determination result of a second laser mark to be tested. FIG. 14 is a schematic diagram showing the determination result of a third laser mark to be tested according to an embodiment of the present invention. Figure 15 is a schematic diagram showing the determination result of a fourth laser mark to be tested according to an embodiment of the present invention. Figure 16: A batch of mines to be tested according to an embodiment of the present invention A schematic diagram of the clearing of the data after the marking is detected. 14 8
1290429 第17圖··依據本發明之一且 ,、體實知例’顯示整批待测雷 射標印檢測統計與分析數值之畫面示意圖。【主要元件符號說明】 1建立一標準雷射標印之檔案 2載入該檔案至一檢測程式 3影像擷取在待測積體電路封裝件 4以光學子元辨識方式由該待測雷 字元’並進行字元比對 上之待洌雷射標印 射標印之影像轉換成 5 確認該待測雷射標印之定位點 6 統計並分析整批待測積體電路 印之檢測結果 之座標值 封裝件上之待測雷射標 100 VI檢測程式之圖示 101 “Tools”鈕 102 “Load”鈕 103檔案名稱顯示區 105批號顯示區 104選取襴 106標準字元顯示區1〇7 “RunLive”鈕 108 “OCR,,紐 109子元辨識顯不視窗 110 “OCR Close”鈕 111待測字元顯示區112字元辨識結果顯示區 113 “FindEageCenter”紐 114定位點XY轴座標值顯示區 115容許範圍XY軸上下限值顯示區 116最終檢測結果顯示區 117 “OCRClear”鈕 15 1290429 210標準積體電路封裝件 211雷射標印 212標準定位 220第一待測積體電路封裝件 221第一待測雷射標印 222第一待測定位點 230第二待測積體電路封裝件 231第二待測雷射標印 232第二待測定位點 240第三待測積體電路封裝件 241第三待測雷射標印 242第三待測定位點 250第四待測積體電路封裝件 251第四待測雷射標印 252第四待測定位點1290429 Fig. 17 is a schematic diagram showing the statistical and analytical values of the entire batch of laser markings to be tested in accordance with one of the present inventions. [Description of main component symbols] 1Create a standard laser marking file 2 Load the file into a detection program 3 Image capture in the integrated circuit package 4 to be tested by the optical sub-component identification method Yuan' and carry on the character comparison, the image of the laser marking mark is converted into 5, confirm the positioning point of the laser marking to be tested, and analyze and analyze the detection result of the whole batch of circuit printed circuit The icon of the laser to be tested on the coordinate value package 100 VI detection program 101 "Tools" button 102 "Load" button 103 file name display area 105 batch number display area 104 select 襕 106 standard character display area 1 〇 7 "RunLive" button 108 "OCR," New 109 sub-ID recognition display window 110 "OCR Close" button 111 to be tested character display area 112 character recognition result display area 113 "FindEageCenter" button 114 positioning point XY axis coordinate value display Zone 115 allowable range XY axis upper and lower limit value display area 116 Final detection result display area 117 "OCRClear" button 15 1290429 210 Standard integrated circuit package 211 Laser mark 212 Standard position 220 First test integrated circuit package 221 First waiting Laser marking 222 first to be determined position 230 second to be tested integrated circuit package 231 second to be tested laser marking 232 second to be determined position 240 third to be measured integrated circuit package 241 Three to be tested laser marking 242 third to be determined position 250 fourth to be measured integrated circuit package 251 fourth to be detected laser marking 252 fourth to be determined
1616
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW94113316A TWI290429B (en) | 2005-04-26 | 2005-04-26 | Method for inspecting laser marks on IC packages |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW94113316A TWI290429B (en) | 2005-04-26 | 2005-04-26 | Method for inspecting laser marks on IC packages |
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| TW200638744A TW200638744A (en) | 2006-11-01 |
| TWI290429B true TWI290429B (en) | 2007-11-21 |
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| TWI511820B (en) * | 2013-12-02 | 2015-12-11 | Ardentec Corp | Parameter loading method of laser process machine |
| CN105252911B (en) * | 2015-09-22 | 2017-04-12 | 深圳市创鑫激光股份有限公司 | Correction method and device for laser marking |
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