12837611283761
九、發明說明： 【發明所屬之技術領域】 本發明是係提供一種複合式之光學元件，特別是本 發明利用壓模、射出成形法之製程方式製作一棱鏡式透 鏡光柵，並配合一光纖裝置，達到分波多工器之功效。 【先前技術】 習用複合式之光學元件其光柵的製作大多是利用鑽 石刀重複刻劃光柵結構於稜鏡表面，其溝槽與溝槽間的 距離需要高精度控制，以維持週期固定，且重複刻晝耗 時且不易批次量產，光柵小表面（facet)之平整度 (Roughness)不易達到高度的光學品質，為了不影響繞射 效率，故多應用於極小週期之光柵。本發明之光柵結構 經半導體微影製程可改善光柵表面結構之平整性，以提 升繞射效率，可應用於較大週期之光柵，改善小線寬光 柵之電場偏振方向選擇性損耗（PDL)，該半導體微影製程 兼具可批次量產之優點，將可以大幅降低光柵結構之成 本；且本發明係利用壓模、射出成形法之製程方式製作 的複合式之光學元件，可大幅降低光電元件之製作成 本，與精密對準之成本。 1283761IX. Description of the Invention: [Technical Field] The present invention provides a composite optical component, and in particular, the present invention utilizes a process of a stamper and an injection molding method to fabricate a prismatic lens grating, and is coupled with a fiber optic device. , to achieve the effect of the split multiplexer. [Prior Art] Conventional composite optical elements are mostly fabricated by using a diamond knife to repeatedly scribe the grating structure on the surface of the crucible. The distance between the groove and the groove needs to be controlled with high precision to maintain the period fixed and repeat. It is time-consuming and difficult to mass-produce, and the roughness of the facet of the grating is not easy to achieve high optical quality. In order not to affect the diffraction efficiency, it is often applied to gratings with very small periods. The grating structure of the invention can improve the flatness of the surface structure of the grating by the semiconductor lithography process, thereby improving the diffraction efficiency, and can be applied to the grating of a large period, and the selective polarization loss (PDL) of the electric field polarization direction of the small line width grating is improved. The semiconductor lithography process has the advantages of mass production, which can greatly reduce the cost of the grating structure; and the invention is a composite optical component produced by a process of a stamper and an injection molding method, which can greatly reduce the photoelectricity. The cost of manufacturing components and the cost of precision alignment. 1283761
本發明係一種複合式之光學元件，係包括一稜鏡、 一準直透鏡及一火焰型光柵結構，該準直透鏡設置於該 稜鏡之一侧，而該火焰型光柵結構則設置於該棱鏡之另 一側，形成一稜鏡式透鏡光柵（Grismlens)，且在鄰近 於該準直透鏡設置一光纖裝置。該稜鏡式透鏡光柵係先 利用射出成形法經由半導體微影製程（Lithography)、精 密鑽石刀切割法（Diamond Tunneling)或熱壓法（Hot Embossing)製作以準直透鏡與火焰型光柵結構或以火焰 型光柵結構為模仁，精準對位模仁等元件後，即可經由 塑膠射出方式批次量產；或利用壓模法經由半導體微影 製程（Lithography)、精密鑽石刀切割法（Diamond Tunneling)或熱壓法（Hot Embossing)製作以準直透鏡或 以火焰型光柵結構為模仁，選擇與稜鏡折射率匹配的光 學膠，經由主動對準方式，將準直透鏡與火焰型光柵結 構或火焰型光柵結構貼覆於棱鏡表面，固化光學膠後， 即得稜鏡式透鏡光柵再配合光纖裝置構成複合式之光學 元件。經由射出成形、壓模法，該火焰型光柵結構與準 直透鏡可一次成形、可批次量產、免重複之高精度對位 等優點。且火焰型光栅結構經半導體微影製程可改善光 柵表面結構之平整性，以提升繞射效率，可應用於較大 週期之光栅，改善小線寬光柵之電場偏振方向選擇性損 耗（PDL);且該半導體微影製程兼具可批次量產之優點， 將可以大幅降低成本。 1283761The present invention is a composite optical component comprising a cymbal, a collimating lens and a flame grating structure, the collimating lens is disposed on one side of the cymbal, and the flame grating structure is disposed on the On the other side of the prism, a lenticular lens grating is formed, and a fiber optic device is disposed adjacent to the collimating lens. The 稜鏡-type lens grating is first fabricated by an injection molding method via a semiconductor lithography process, a diamond tunneling method or a hot embossing method (Hot Embossing) to form a collimating lens and a flame grating structure or The flame-type grating structure is a mold core, and the components such as the precision alignment die can be mass-produced by plastic injection method; or through the semiconductor lithography process and the diamond diamond cutting method by using the compression molding method (Diamond Tunneling) Or hot pressing method (Hot Embossing) to make a collimating lens or a flame-type grating structure as a mold, select an optical glue matching the refractive index of the crucible, and the collimating lens and the flame grating structure through active alignment Or the flame-type grating structure is attached to the surface of the prism, and after curing the optical glue, the 透镜-type lens grating is combined with the optical fiber device to form a composite optical component. Through the injection molding and compression molding method, the flame-type grating structure and the collimating lens can be formed at one time, can be mass-produced, and can be repetitively and accurately aligned. The flame-type grating structure can improve the flatness of the surface structure of the grating by the semiconductor lithography process, so as to improve the diffraction efficiency, and can be applied to the grating of a large period, and the selective polarization loss (PDL) of the electric field polarization direction of the small line width grating is improved; Moreover, the semiconductor lithography process has the advantages of mass production, which can greatly reduce the cost. 1283761
請參閱『第1、2圖』所示，係本發明之最佳實施 例之示意圖、係本發明之利用半導體微影製程之火培光 柵圖。如圖所示：本發明係一種複合式之光學元件，係 包括一稜鏡1 1、一準直透鏡1 3及一火焰型光柵結構 1 2，該準直透鏡設置1 3於該稜鏡1 1之一侧，而該 火焰型光柵結構1 2則設置於該稜鏡1 1之另一側，形 成一稜鏡式透鏡光柵（Grismlens) 1，且在鄰近於該準 直透鏡1 3設置一光纖裝置2。本發明係利用火焰型光 柵結構1 2作為分波之光學元件，一入射光2 1穿透該 準直透鏡1 3後，經由繞射光柵的調變後，原透鏡聚焦 後之折射光2 2，在相對應的輸出光纖上可接收各波長 的光訊號；該火焰型光栅結構1 2利用火焰形角度 (Blazed Angle)的改變，可以調變不同階之繞射光束且 具有極強之繞射效率。經由半導體微影製程 (Lithography)、精密鑽石刀切割法（Diamond Tunneling) 或熱壓法（HotEmbossing)製作火焰型光栅結構1 2 ;該 火媳型光柵結構1 2為一具平等間距凹溝之傾斜面，且 經由半導體微影製程可改善光拇表面結構之平整性，以 提升繞射效率，可應用於較大週期之光柵，改善小線寬 光柵之電場偏振方向選擇性損耗（PDL);且該半導體微影 製程兼具可批次量產之優點，將可以大幅製作成本；該 火焰型光柵結構1 2可經選擇反射、抗反射之鍍膜法， 使其繞射光束可分別應用於穿透、反射式之火焰型光 1283761 柵參閱『第3圖』所示’係本發明之複合式光學元 件不忍圖。如圖所示：本發明之準直透鏡卫3可為球面、 ，球面透鏡’可作為折射式元件、繞射式元件（咖），如·· 非涅耳透鏡（Fresne丨丨ens)，該準直透鏡丄3可將光纖、 波導管等發散光源準直，如♦•利特羅基板 (LITTROW-MOUNT)之火焰型光柵，該準直透鏡工3 於回光路時為聚焦透鏡之功能。 請參閱『第4〜6®』所示，係本發明之壓模法流 程圖、本發明之模具射出法示意圖、本發明之修正型光 纖陣列結構圖。如圖所示：本發明之製造方法可分為壓 模法及射出成形法，其本發明之一製造方法為利用射出 成形法經由半導體微影製程、精密鑽石刀切割法或熱壓 法製作準直透鏡與火焰型光柵結構或火焰型光栅結構為 模仁，精準對位模具等元件後，經由射出成形法即得一 稜鏡式透鏡光栅，經由射出成形法毋須再處理準直透鏡 與火焰型光柵結構之對位問題，將可以簡化系統之封 裝、對準之步驟；另一製法為利用壓模法經由半導體微 影製程、精密鑽石刀切割法或熱壓法製作之準直透鏡與 火焰型光柵結構或火焰型光柵結構，選擇與稜鏡折射率 相同的光學膠，降低介面間折反射之問題，經由主動對 準方式，將準直透鏡與火焰型光柵結構或火焰型光栅結 構貼覆於稜鏡表面’最後經由晶面之濕式餘刻液將模具Referring to Figures 1 and 2, there is shown a schematic view of a preferred embodiment of the present invention, which is a schematic diagram of a fire absorbing grating using the semiconductor lithography process of the present invention. As shown in the figure: the present invention is a composite optical component, comprising a 稜鏡1, a collimating lens 13 and a flame grating structure 12, the collimating lens is disposed on the 稜鏡1 One side of the flame-type grating structure 12 is disposed on the other side of the crucible 11 to form a lenticular lens grating 1 and is disposed adjacent to the collimating lens 13 Fiber optic device 2. In the present invention, the flame-type grating structure 12 is used as the optical component of the splitting wave. After the incident light 21 penetrates the collimating lens 13 and is modulated by the diffraction grating, the refracted light is focused by the original lens. The optical signal of each wavelength can be received on the corresponding output fiber; the flame-type grating structure 12 can change the diffracted beam of different orders and has strong diffraction by using the change of the Blazed Angle. effectiveness. The flame-type grating structure 1 2 is fabricated by a semiconductor lithography process, a diamond tunneling method or a hot embossing method (HotEmbossing); the fire-type grating structure 12 is an inclined pitch of an equally spaced groove Surface, and through the semiconductor lithography process can improve the flatness of the light surface structure of the light to improve the diffraction efficiency, can be applied to the grating of a large period, and improve the selective polarization loss (PDL) of the electric field polarization direction of the small line width grating; The semiconductor lithography process has the advantages of mass production, and can be greatly cost-produced; the flame-type grating structure 12 can be selectively reflected and anti-reflective coated so that the diffracted beams can be separately applied for penetration. Reflective flame type light 1283761 Grid is shown in "Fig. 3". The composite optical element of the present invention cannot be tolerated. As shown in the figure: the collimating lens 3 of the present invention can be a spherical surface, and the spherical lens can be used as a refractive element, a diffractive element, or a Fresnel lens. The collimating lens 丄3 can collimate a divergent light source such as an optical fiber or a waveguide, such as a flame-type grating of a LITTROW-MOUNT, which is a function of a focusing lens when returning to the optical path. Referring to the "4th to 6th", the flow chart of the present invention, the mold injection method of the present invention, and the modified optical fiber array structure of the present invention. As shown in the figure, the manufacturing method of the present invention can be divided into a compression molding method and an injection molding method, and one of the manufacturing methods of the present invention is produced by an injection molding method via a semiconductor lithography process, a precision diamond knife cutting method or a hot pressing method. Straight lens and flame type grating structure or flame type grating structure is a mold core, and after accurately aligning the mold and other components, a 透镜 lens grating is obtained by injection molding, and the collimating lens and the flame type need not be processed again by the injection molding method. The alignment problem of the grating structure will simplify the packaging and alignment steps of the system; the other method is a collimating lens and a flame type which are fabricated by a semiconductor lithography process, a precision diamond knife cutting method or a hot pressing method by a compression molding method. A grating structure or a flame-type grating structure, selecting an optical glue having the same refractive index as that of the ytterbium, reducing the problem of inter-fade reflection, and attaching the collimating lens to the flame-type grating structure or the flame-type grating structure via active alignment稜鏡 surface 'finally mold the mold through the wet surface of the crystal
1283761 腐蝕，即得稜鏡式透鏡光柵。壓模、射出成形法，該火 焰型光柵結構與準直透鏡可一次成形、可批次量產、免 重複之高精度對位等優點，可大幅降低光電元件之製作 成本，與精密對準之成本。該複合式之光學元件之光纖 裝置之光纖陣列一般為V型凹槽（V - groove)或錐形波 導陣歹4 (taper waveguide array) 3之結構，其中，該 錐形波導陣列（ taper waveguide array)係將一光纖陣 列3 1穿透一耦合器3 2傳送至一錐形結構3 3，為一 具高精度對位及特別之輸出之設計。本發明之稜鏡式透 鏡光柵可視作一可見光或紅外光之光譜儀 (Spectroscopes)或一自由空間之光柵式分波多工器 (Free Space-Grating Based WDM System)，並搭配 LD、 光纖等裝置，達到傳統分波多工器之功效。 惟以上所述者，僅為本發明之較佳實施例而已，當 不能以此限定本發明實施之範圍；故，凡依本發明申請 專利範圍及發明說明書内容所作之簡單的等效變化與修 飾，皆應仍屬本發明專利涵蓋之範圍内。 9 12837611283761 Corrosion, that is, a 透镜 lens grating. The stamping and injection molding method, the flame-type grating structure and the collimating lens can be formed at one time, can be mass-produced, and can be repetitively and accurately aligned, and can greatly reduce the manufacturing cost of the photovoltaic element, and precisely align with it. cost. The optical fiber array of the optical device of the composite optical component is generally a V-groove or a tapered waveguide array 3, wherein the tapered waveguide array A fiber array 31 is transmitted through a coupler 3 2 to a tapered structure 33 for a high precision alignment and special output design. The 稜鏡 lens grating of the present invention can be regarded as a visible light or infrared light spectrometer (Spectroscopes) or a free space grating multiplexer (Free Space-Grating Based WDM System), and is matched with LD, optical fiber and the like to achieve The effect of traditional split-wave multiplexers. However, the above is only the preferred embodiment of the present invention, and the scope of the present invention is not limited thereto; therefore, the simple equivalent changes and modifications made in accordance with the scope of the present invention and the contents of the invention are modified. All should remain within the scope of the invention patent. 9 1283761
j θ6正·香投頁I 【圖式簡單說明】匕一一J 第1圖’係本發明之最佳實施例之示意圖。 第2圖’係本發明之利用半導體微影製程之火焰光柵圖。 第3圖’係本發明之複合式光學元件之準直透鏡示意圖。 第4圖’係本發明之壓模法流程圖。 第5圖，係本發明之模具射出法示意圖。 第6圖’係本發明之修正型光纖陣列結構圖。 【主要元件符號說明】 稜鏡1 1 準直透鏡 13 入射光 2 1 錐形波導陣列 3 耦合器3 2 稜鏡式透鏡光柵 1 火焰型光柵結構 12 光纖裝置 2 折射光 22 光纖陣列 31 錐形結構 33j θ6 正·香投页 I [Simplified illustration of the drawing] Fig. 1 is a schematic view of a preferred embodiment of the present invention. Fig. 2 is a flame grating diagram of the present invention using a semiconductor lithography process. Fig. 3 is a schematic view of a collimating lens of the composite optical element of the present invention. Fig. 4 is a flow chart of the stamping method of the present invention. Fig. 5 is a schematic view showing the mold injection method of the present invention. Fig. 6 is a structural view of a modified optical fiber array of the present invention. [Description of main component symbols] 稜鏡1 1 Collimating lens 13 Incident light 2 1 Conical waveguide array 3 Coupler 3 2 Lens lens grating 1 Flame grating structure 12 Fiber device 2 Refracted light 22 Fiber array 31 Tapered structure 33