I2832QSvf.d〇c/g 九、發明說明： 【發明所屬之技術領域】 本發明是有關於一種碰觸感測技術，且特別是有關於 一種壓電式碰觸感測器，除適用於模仿生物皮膚的觸覺功 此外’也可以用於其他種類的一般碰觸(touch)感應。 【先前技術】 碰觸感測器是一種感測元件或是系統，例如是觸覺感 測器。觸覺感測器的功用例如在於模仿生物皮膚上的觸 覺。藉由感測器與待測物體的直接接觸，所產生的物理效 應，可以測得接觸時的狀態與待測物體表面的物理性質， 例如接觸時的作用力或壓力的大小與在空間上的分佈。物 理性質又例如是待測物體的位置、待測物體的形狀、物體 表面的紋路質地，溫度、硬/軟度或濕度等特性。單一的碰 ，感測器可以用來做為開關。另外，若是二雉的碰觸感測 态就可以得到觸覺影像(tacti!e image)。因此，碰觸感測器 的應用領域非常地廣泛，例如在機器人上，碰觸感測器是 φ 控制機器人的動作，例如抓取物體，是運動時不可缺少的 感測器。在資訊電腦領域方面，碰觸感測器結合顯示器， 以用來做為觸控輸入裝置，目前已廣泛地應用於平板^腦 (Tablet PC)或是個人數位助理(Pers〇nal Digkal Assist_ PDA)上的觸控面板。此外，碰觸感測器也可以做為指’ 識等用途。 傳^的碰觸感測器大多是建構在不可撓曲的基材 上，但是由於待測物體可能為平面、曲面等不規則面，並 6 f.doc/g I283295v 且配合軟性電子的發展，近年來，碰觸感測器已開始 可撓曲化的方向發展。軟性碰觸感測器的應用潛力向 廣泛，例如應用在軟性顯示器，可做為軟性顯示哭的=很 輸入裝置。又例如用於生醫領域方面，智慧型皮声（1料 skin)就是軟性碰觸感測器的應用之一。 打 碰觸感測器一般是利用壓電材料做為感测的機制。“ 於軟性碰觸感測器而言，軟性壓電材料例如是聚偏二二街 烯(polyvinylidene，PVDF)，或是其他有壓電特性的聚$乙 材料。PVDF對於外部施加的應力反應，具有高輸出H物 線性度佳、以及低遲滯效應(hysteresis)的特性，是报、高八 的壓電材料。 合 然而，在傳統的碰觸感測器，如果想要測出細微的 力’其對外部施加的應力的敏感度仍有不足的問題。因此々 製造者或設計者仍積極研發碰觸感測器，以增加對外部a 加的應力的敏感度。換句話說，如何提升壓電式軟性碰/ 感測器的敏感度，是目前製造者的一項挑戰。 > 萄 【發明内容】 本發明的目的就是在提供一種碰觸感測器，可以有致 增加外部施加的應力的敏感度，以使碰觸感測器有更多有 效的應用。 本發明提出一種碰觸感測器，包括一下基板、一下電 極層、一壓電材料層、至少一個電極層以及一上基板。卞 電極層係位於該下基板上方。壓電材料層係位於該下電杻 層上方。至少一個電極層係位於該壓電材料層上方，足分 I28329Sv f.doc/g 別位於一預定位置。上基板係位於該上電極層上方。該下 基板、該壓電材料層與該上基板之至少其一做為一增壓作 用層。該增壓作用層與該下電極層或該上電極層之間設置 有至少一凸狀結構，以減少受力面積，而增加感應施加在 該壓電材料層的一外部應力。當施加該外部應力於該上電 極層時，藉由該壓電材料層感應出個別的一感應信號。 依照本發明的較佳實施例所述之壓電式碰觸感測 為，其中該增壓作用層的該凸狀結構，是依該上電極層的 位置而分佈。 依照本發明的較佳實施例所述之壓電式碰觸感測 器，其中該增壓作用層的該凸狀結構，是依該上電極層的 位置而分佈，且沿著該上電極層的周緣設置一凹陷結構， 以減少該上電極層的該感應信號的互相干擾。 依以本赉明的較佳貫施例所述之壓電式碰觸感測 裔，其中該增壓作用層是該壓電材料層，且該凸狀結構是 设置在該壓電材料層與該上電極層接觸。 _依照本發明的較佳實施例所述之壓電式碰觸感測 裔，其中该增壓作用層是該上基板，且該凸狀結構是設置 在該上基板與該上電極層接觸。 依舨本發明的較佳實施例所述之壓電式碰觸感測 ^其中该增壓作用層是該下基板，且該凸狀結構是設置 在該下基板與該下電極層接觸。 ^依…、本务明的較佳實施例所述之壓電式碰觸感測 其中该增壓作用層是該壓電材料層，且該凸狀結構是 8 .doc/g 設置在該壓電材料層的二個面，分別接觸於該上電極層以 及該下電極層。 依照本發明的較佳實施例所述之壓電式碰觸感測 器，其中該增壓作用層包括該上基板與該下基板，二個該 凸狀結構分別是設置在該上基板與該下基板，分別與該上 電極層與該下電極層接觸。I2832QSvf.d〇c/g IX. Description of the Invention: [Technical Field] The present invention relates to a touch sensing technology, and more particularly to a piezoelectric touch sensor, which is suitable for imitation The tactile function of biological skin can also be used for other kinds of general touch sensing. [Prior Art] A touch sensor is a sensing element or system, such as a tactile sensor. The function of the tactile sensor is, for example, to mimic the sensation on the biological skin. By the physical contact between the sensor and the object to be tested, the physical state of the contact and the physical properties of the surface of the object to be tested can be measured, such as the magnitude of the force or pressure at the time of contact and the space. distributed. The physical properties are, for example, the position of the object to be tested, the shape of the object to be tested, the texture of the surface of the object, temperature, hardness/softness or humidity. A single touch, the sensor can be used as a switch. In addition, a tacti!e image can be obtained if it is a touch sensing state of the second. Therefore, the application field of the touch sensor is very wide. For example, on the robot, the touch sensor is φ to control the action of the robot, for example, grabbing an object, which is an indispensable sensor during exercise. In the field of information computer, the touch sensor is combined with the display for use as a touch input device, and has been widely used in Tablet PC or Personal Digital Assistant (Pers〇nal Digkal Assist_PDA). On the touch panel. In addition, the touch sensor can also be used for purposes such as identification. Most of the touch sensors of the transmission are constructed on an inflexible substrate, but since the object to be tested may be an irregular surface such as a plane or a curved surface, and 6 f.doc/g I283295v and with the development of soft electronics, In recent years, touch sensors have begun to develop in a direction that can be deflected. The application potential of soft touch sensors is broad, for example, applied to soft displays, which can be used as a soft display crying device. For example, in the field of biomedicine, smart skin sound is one of the applications of soft touch sensors. Touch sensors are generally made using piezoelectric materials as a mechanism for sensing. “For soft touch sensors, soft piezoelectric materials are, for example, polyvinylidene (PVDF) or other poly-ethylene materials with piezoelectric properties. PVDF reacts to externally applied stresses, It has high linearity of high output H and low hysteresis. It is a piezoelectric material of the newspaper and high eight. However, in the traditional touch sensor, if you want to measure the small force' Its sensitivity to externally applied stresses is still insufficient. Therefore, manufacturers or designers are still actively developing touch sensors to increase the sensitivity to external a-added stress. In other words, how to increase the pressure. The sensitivity of an electric soft touch/sensor is a challenge for current manufacturers. SUMMARY OF THE INVENTION The object of the present invention is to provide a touch sensor that can increase the externally applied stress. Sensitivity, so that the touch sensor has more effective applications. The present invention provides a touch sensor comprising a lower substrate, a lower electrode layer, a piezoelectric material layer, at least one electrode layer, and an upper substrate. The 卞 electrode layer is located above the lower substrate, and the piezoelectric material layer is located above the lower enamel layer. At least one electrode layer is located above the piezoelectric material layer, and the I28329Sv f.doc/g is located at a predetermined position. The upper substrate is located above the upper electrode layer, and at least one of the lower substrate, the piezoelectric material layer and the upper substrate acts as a pressurization layer. The pressurization layer and the lower electrode layer or the upper electrode layer At least one convex structure is disposed to reduce the force receiving area, and an external stress applied to the piezoelectric material layer is increased. When the external stress is applied to the upper electrode layer, the piezoelectric material layer is used. Inductively detecting an individual sensing signal. The piezoelectric touch sensing according to the preferred embodiment of the present invention is characterized in that the convex structure of the pressurized layer is distributed according to the position of the upper electrode layer. According to a piezoelectric touch sensor according to a preferred embodiment of the present invention, the convex structure of the pressurized layer is distributed according to the position of the upper electrode layer, and along the upper electrode a concave structure is formed on the periphery of the layer To reduce the mutual interference of the sensing signals of the upper electrode layer. According to the piezoelectric touch sensing method of the preferred embodiment of the present invention, wherein the pressurized layer is the piezoelectric material layer, And the convex structure is disposed in the piezoelectric material layer and is in contact with the upper electrode layer. The piezoelectric touch sensing body according to the preferred embodiment of the present invention, wherein the pressurized layer is the upper layer a substrate, and the convex structure is disposed on the upper substrate in contact with the upper electrode layer. According to the piezoelectric touch sensing method of the preferred embodiment of the present invention, wherein the pressurized layer is the lower substrate And the convex structure is disposed on the lower substrate and the lower electrode layer. The piezoelectric touch sensing according to the preferred embodiment of the present invention, wherein the pressurized layer is the pressure a layer of electrical material, and the convex structure is 8. doc / g disposed on two faces of the piezoelectric material layer, respectively contacting the upper electrode layer and the lower electrode layer. According to the piezoelectric touch sensor of the preferred embodiment of the present invention, the pressurized layer includes the upper substrate and the lower substrate, and the two convex structures are respectively disposed on the upper substrate and the The lower substrate is in contact with the upper electrode layer and the lower electrode layer, respectively.
依照本發明的較佳實施例所述之壓電式碰觸感測 為，其中該增壓作用層包括該壓電材料層以及該下基板， 二個該凸狀結構分別是設置在壓電材料層與該下基板，分 別該上電極層與該下電極層。 依照本發明的較佳實施例所述之壓電式碰觸感測 器，其中該增壓個層包括該壓電材料層以及該上基板， 二個該凸狀結構分別是設置在壓電材料層與該上基板，分 別接觸於該下電極層與該上電極層。 ^ 本發明的較佳實施例所述之壓電式碰觸感測The piezoelectric touch sensing according to the preferred embodiment of the present invention is characterized in that the pressurization active layer includes the piezoelectric material layer and the lower substrate, and the two convex structures are respectively disposed on the piezoelectric material. a layer and the lower substrate, the upper electrode layer and the lower electrode layer, respectively. A piezoelectric touch sensor according to a preferred embodiment of the present invention, wherein the pressurized layer comprises the piezoelectric material layer and the upper substrate, and the two convex structures are respectively disposed on the piezoelectric material The layer and the upper substrate are in contact with the lower electrode layer and the upper electrode layer, respectively. ^ Piezoelectric touch sensing according to a preferred embodiment of the present invention
二巾辦壓作用層包括該上基板以及該下基板，二個 構相是設置摘上基板與該下基板，分別接觸 於"亥上電極層與該下電極層。 為，本發明之上述和其他目的、特徵和優點能更明顯 ^文特舉較佳實施例，並配合所附圖式，作詳細說 【實施方式】 ^ ^ ^ ^ ^ ^ ^ 別考慮壓電材料的特性，其受外部應力時 f.doc/g 所產生的信號大小，是與外部應力成一函數關係，實質上 (substantially)例如是正比關係。但是，外部應力一般是使 用者所施加的。然而，如果壓電材料無法靈敏地感應出細 祕的外部應力，則就是敏感度不足的現象。 在了解到造成敏感度不足的主要原因之一後，本發明 在不改變外部應力的前提下，提出-凸狀結構，以感 文外部應力，在藉由凸狀結構將壓力傳達給壓電材料，以 提升對外部應力的敏感度。本發明的設計理論基礎是根據 (1) P (壓力）=F (外部應力)/A(受力面積） 的關係。當F (外部應力）是固定時，如果a(受力面積)減 小，則壓電材料感受到的P (壓力）就會增加，也因此增加 碰觸感測的敏感度。於此要注意的是，本發明是用於任 何有娅觸(touch)現象的感測，而不僅限於模仿生物皮膚的 觸覺功能。 本叙明在和:出解決敏感度的構想後，於是提出實際的 設計結構。以下舉一些實施例做為說明，但是本發明不僅 限於所舉的實施例。 圖1繪示依據本發明一實施例，碰觸感測器的剖面結 構與細部透視結構示意圖。參閱圖i，碰觸感測器包括一 下基板100、一下電極層1〇2、一壓電材料層1〇4、至少一 個上電極層106以及-上基板應。下電極層搬係位於 該下基板1GG上方。下基板丨⑻—般與_基礎表面接觸。 I283295vf.d〇c/g 如果石亚觸感測器是採用可撓曲的軟性材料所設計 板100可设置在一曲面上，例如做為機器人的人： 壓電材料層104係位於下電極層1〇2上方。二夕 個上電極層106，係位於壓電材料層104上。於此， 上電極層106之針對一個位置而感測，而多個上電極芦 對多個位置而感測，以達成—維或是二維“測。 換句話說，-個上電極層1〇6就代表一感測區域(或又 測點）。圖1是以多個上電極層1〇6為例做說明。接著，二 上基板108係位於上電極層1〇6的上方。一般設計上，上 基板108例如會與待測物體接觸。換句話說，外部應力會 施加於上基板108上。根據對應上電極層1〇6的位^^ ^的“唬大小，可以感應出全面的觸覺效應。感應出來的 信號，藉由下電極層1〇2與上電極層1〇6的輸出，由外部 ，分析電路(未示於圖1)，進行感測分析，其為一般習此技 藝者可了解，不予詳述。 為了提升碰觸的敏感度，本發明特別提出例如在壓電 材料層104與上電極層1〇6接觸的表面部份，形成有凸狀 結構層112，例如在區域11〇的細部結構。為利於製造(見 圖5A〜5E)，可以直接在壓電材料層1〇4上加工製造出凸狀 結構層112。然而，凸狀結構層112也可以分開製造。如 此，當外部應力從上基板1〇8施加給壓電材料層1〇4時， 由於凸狀結構層112的接觸面積小，因此造成壓力的增 加，進而對應地增加外部應力的敏感度。 對方;麼電材料層104的總厚度一般例如是大約1 〇〇微 1283294 f.doc/g 米，而凸狀結構層112所佔的長度例如是總厚度的約l〇% 〜40%，又或是長度為1〇〜4〇微米，但是所舉長度不是唯° 了的選擇。又，凸狀結構層112的數量可以一個或是多個， 對應上電極層106而分佈。凸狀結構層112例如是柱狀， 而橫柱狀的截面形狀，例如是圓形、橢圓形，或是多邊形。 柱狀是其中較佳的方式，但不是唯一的結構。另外，凸狀 =構層112例如可以是錐狀、球狀，又更例如直條狀以及 彎曲條狀。圖4繪示幾種較佳的凸狀結構層112， 用來限制本發明。 一 換句活說，壓電材料層1〇4在圖3的實施例可以是視 為增壓作用層，其對應物不應力而言，會使施力面積所 小’也因此貫際在壓電材料層1〇4所施加的壓力增加。如 此，感測器對外部應力的敏感度就增加。 又，為進一步避免屬於相鄰不同上電極層1〇6的信 號’互相干擾造成所謂的串音(crosstalk)現象，可以例如在 上電極層106的周緣，設置一凹陷結構114，如此相鄰不 同一上電極層106之間的串音可以有效減少。 圖2依據本發明一實施例，碰觸感測器的結構分解示 意圖。參閱圖1與圖2,在多個上電極層1〇6以陣列方式 設置於上基板108的内表面。壓電材料層1〇4的凸狀結構 層112，對應上電極層1〇6的位置而設置。下電極層1〇2 則設置在下基板100的内表面。如此，下基板1〇〇、壓電 材料層104與上基板1〇8，構成碰觸感測器。 圖3依據本發明另一實施例。依照與圖1相同的壓力 12 f.doc/g I283295v 感測機制，凸狀結構層112不必一定要設置在壓電材料層 104本身的一部分。參閱圖3，碰觸感測器包括一下基板 300、一下電極層302、一壓電材料層304、至少一個上電 極層306以及一上基板3〇8。於此實施例，凸狀結構層31〇 疋6又置在上基板308，且在與上電極層306接觸的區域設 置凸狀結構層31〇。另外，為了防止串音現象，也可以設 置凹陷結構312。此時上基板308可以一增壓作用層。 又’圖1與圖3也不是用來限制本發明的可能設計變 化，但疋可以將圖丨與圖3的特徵適當組合與延伸。也就 疋，增壓作用層也可以設置在下基板3〇〇，使下基板3〇〇 具有凸狀結構層。又或是，凸狀結構層除了可以設置在下 基板300、一下電極層302、一壓電材料層304其一的單獨 一層，另外也可以同時設置在下基板3〇〇、一下電極層 302、一壓電材料層3〇4的至少二層。換句話說，增壓作用 2可以分佈到二層或三層。每一增壓作用層都設置有凸狀 結構，其皆可以由圖i與圖3的特徵組合而達成，不予詳 細描述。 圖=繪示依據本發明實施例的幾種凸狀結構。凸狀結 構，，疋圓柱狀4〇〇a、四邊形柱狀400b，直條狀400c、 或，寫、曲條狀4〇〇d。另外，相對凸狀結構的其他部份就是 = 口構。圖中所示的形狀，也可以是凹陷結構的形狀， 其變化都不脫離本發明的基本特徵。又同理，本發明不僅 限制^圖4所舉的例子，其他例如圓球狀，角錐狀等也是 可以採用’凸狀單體的數量也不受限制。根據本發明，其 13 l283294,〇c/g 基本❹十原則就是，使受力面積所縮小。 、又，，於前面所提及的製造方法，為了利於製造，可 以1接在壓電材料層1〇4上加工製造出凸狀結構層112。 圖5A〜5E繪示依據本發明實施例的製造流程，剖面示意 圖^對於要製作凸狀結構的增壓作用層層而言，例如想要 f壓電材料—層的聚合物材料層500上製作凸狀結構，先設 2好一石英模板5〇2，其凹陷的部分就是預計的凸狀結 >才。、於，5A，將石英模板502壓置放在聚合物材料層5〇〇 上的預定位置。於圖5B，例如利用雷射加熱504，以將聚 :物材料層500的上部轉化成一近似融態層5()1。接著於 囷5C將石奂模板502壓入近似融態層501。於圖5D， 進行冷部固化。於圖5E，將石英模板5〇2從聚合物材料 私開。於疋，聚合物材料5〇〇上形成預定的凸狀結構。 這個流程是傳統的熱壓成形的流程，可以簡化製作流程。 人另外，圖1中的凹陷結構114,雖然在圖5八〜5£沒有 、、、曰出，但疋可以用相同方式同時製作完成。 •圖6繪示依據本發明實施例的碰觸感測器，其一連續 的製作流程示意圖。參閱圖6，在壓電材料層1〇4上，利 用圖5A〜5E的流程，利用石英模板，以熱壓製作出壓 ，材，層1〇4。此時，上基板106與丁基板100也都分ς 衣作7L成。於是進行黏貼步驟，將上基板1〇6與下基板忉〇 組合於壓電材料層104的兩面，完成製作。 、上述的製流程，僅是描述本發明碰觸感測器的製作方 式之一。只要具有上述本發明的結構特徵，其製作方式可 14 doc/g 12832 版 以有不同流程。 根據本發_結構設計，從理 證，大致上描述於後。 土 , A的& 關係式為: 仏電㈣的材枓組成張量(t_) ⑴ Gii=D(iki£ki-elijEm (2) ❿ 其中〜為應力張量，％為電位，。為 ， 電場梯度，φ為電場，M A V摄又里，£卜一却/电為 數、為㈣_力碰“f祕度在零狀態下的彈性係 為 力係數為介電係數。其中式⑴可以寫 (3) 也就是將式⑴的㈣應力係數 此，如果採請D壓電材料，其雜係數m 向性，因此材料係數簡化成 包係數為均 εδ r 〇 (5) 壓電係數 設定 E-3GPa，ν==α35 n = nxl(rH)恤偷。 15 1283總 f-d〇c/g 1283總 f-d〇c/g 例如 ^211 =23x1 O'12 m/V〇lt = -33 … …πχ10_12 m/V〇lt，其餘的 说為V'，其中下標2代表壓電材料的厚度方向，下標1和 3為垂直於厚度方向的座標軸。 依照上述的關係，針對圖丨的方式與圖3的方式，且 f狀結構例如是圖4的四邊形柱狀4_，分別進行模擬驗 m $電材料厚度例如5微米，而凸出或凹陷結構的大小 例如疋一微米立方的形狀。另外也改變四邊形柱狀的大小 =及相鄰二餘狀的距離，做進—步的驗證。驗證結果顯 不、’對於相同的施力下，本發明的結構都有效地增加壓點 材料所感應出的電位差。較佳結果顯示可以提升5〇%以 上。當然實際增加的感應能力，會隨凸狀結構的不同形狀 與大小而改變，可依實際設計來調整，於此不一一描述。 /綜上所述，在本發明，經過研究探討碰觸感測器的原 f後’利用P (壓力)=F (外部應力)/A(受力面積)的關係， 設计出具有凸狀結構的感測器。在相同的外部應力下，可 以增加對壓電材料層的壓力作用，使得有效提升壓力敏感 度。 〜 雖然本發明已以較佳實施例揭露如上，然其並非用以 限定本發明’任何熟習此技藝者，在不脫離本發明之精神 和範圍内，當可作些許之更動與潤飾，因此本發明之保護 範圍當視後附之申請專利範圍所界定者為準。 【圖式簡單說明】 圖1繪示依據本發明一實施例，碰觸感測器的剖面結 構與細部透視結構示意圖。 16 I2832sQ5wf.d〇c/g 圖2依據本發明一實施例，碰觸感測器的結構分解示 意圖。 圖3依據本發明另一實施例。 圖4繪示依據本發明實施例的幾種凸狀結構。 圖5A〜5E繪示依據本發明實施例的碰觸感測器的製 造流程，剖面示意圖。 圖6繪示依據本發明實施例的碰觸感測器，其一連續 的製流程示意圖。 【主要元件符號說明】 100、300 :下基板 102 、 302 下電極層 104 、 304 壓電材料層 106 、 306 上電極層 108 、 308 上基板 110 細部結構 112 、 310 凸狀結構 114、312 凹陷結構 400a〜400d : 凸狀結構 500 :聚合物材料層 502 、 702 : 石英模板 501 :融態層 504 : :雷射加熱 17The second film pressing layer includes the upper substrate and the lower substrate, and the two structures are provided with the upper substrate and the lower substrate respectively contacting the upper electrode layer and the lower electrode layer. The above and other objects, features, and advantages of the present invention will become more apparent from the description of the preferred embodiments and The characteristics of the material, the magnitude of the signal produced by f.doc/g when subjected to external stress, is a function of external stress, and is substantially, for example, a proportional relationship. However, external stress is generally applied by the user. However, if the piezoelectric material is not sensitive to the delicate external stress, it is a phenomenon of insufficient sensitivity. After knowing one of the main causes of the lack of sensitivity, the present invention proposes a convex-convex structure to sense the external stress and convey the pressure to the piezoelectric material by the convex structure without changing the external stress. To increase sensitivity to external stresses. The design theory basis of the present invention is based on the relationship of (1) P (pressure) = F (external stress) / A (forced area). When F (external stress) is fixed, if a (forced area) is reduced, the P (pressure) felt by the piezoelectric material is increased, thus increasing the sensitivity of the touch sensing. It is to be noted here that the present invention is intended for sensing of any touch phenomenon, and is not limited to mimicking the tactile function of biological skin. After the narrative and the idea of solving the sensitivity, the actual design structure is proposed. Some embodiments are described below as illustrative, but the invention is not limited to the embodiments shown. 1 is a schematic cross-sectional view showing a cross-sectional structure and a detailed perspective structure of a touch sensor according to an embodiment of the invention. Referring to Figure i, the touch sensor includes a lower substrate 100, a lower electrode layer 1, 2 a piezoelectric material layer 1〇4, at least one upper electrode layer 106, and an upper substrate. The lower electrode layer is positioned above the lower substrate 1GG. The lower substrate 丨 (8) is generally in contact with the _ base surface. I283295vf.d〇c/g If the stone touch sensor is made of a flexible soft material, the plate 100 can be placed on a curved surface, such as a robot: The piezoelectric material layer 104 is located in the lower electrode layer. 1〇2 above. The upper electrode layer 106 is located on the piezoelectric material layer 104. Herein, the upper electrode layer 106 is sensed for one position, and the plurality of upper electrode reeds are sensed for a plurality of positions to achieve a dimensional or two-dimensional "measurement. In other words, an upper electrode layer 1 〇6 represents a sensing area (or a measuring point). Figure 1 is an example of a plurality of upper electrode layers 1 〇 6. Next, the upper substrate 108 is located above the upper electrode layer 1 〇 6. In design, the upper substrate 108 is, for example, in contact with the object to be tested. In other words, external stress is applied to the upper substrate 108. According to the size of the corresponding electrode layer 1〇6, the total size can be induced. The haptic effect. The induced signal is subjected to sensing analysis by an external, analytical circuit (not shown in FIG. 1) by the output of the lower electrode layer 1〇2 and the upper electrode layer 1〇6, which is known to those skilled in the art. , will not be detailed. In order to enhance the sensitivity of the touch, the present invention particularly proposes, for example, a surface portion where the piezoelectric material layer 104 is in contact with the upper electrode layer 1〇6, and a convex structure layer 112, for example, a fine structure in the region 11A, is formed. To facilitate fabrication (see Figures 5A to 5E), the convex structure layer 112 can be fabricated directly on the piezoelectric material layer 1〇4. However, the convex structure layer 112 can also be manufactured separately. Thus, when external stress is applied from the upper substrate 1〇8 to the piezoelectric material layer 1〇4, since the contact area of the convex structure layer 112 is small, the pressure is increased, and the sensitivity of the external stress is correspondingly increased. The total thickness of the electro-chemical material layer 104 is generally, for example, about 1 〇〇 micro 1283294 f.doc/g m, and the length of the convex structural layer 112 is, for example, about 10% to 40% of the total thickness. Or the length is 1〇~4〇 microns, but the length is not the only choice. Further, the number of the convex structure layers 112 may be one or more, and is distributed corresponding to the upper electrode layer 106. The convex structure layer 112 is, for example, a columnar shape, and the cross-sectional shape of the horizontal column shape is, for example, a circle, an ellipse, or a polygon. Columnar is the preferred one, but not the only one. Further, the convex = structuring layer 112 may be, for example, a tapered shape, a spherical shape, and more, for example, a straight strip shape and a curved strip shape. Figure 4 illustrates several preferred convex structure layers 112 for limiting the invention. In other words, the piezoelectric material layer 1〇4 can be regarded as a pressurized layer in the embodiment of FIG. 3, and the corresponding object does not stress, so that the applied area is small, and thus the pressure is constant. The pressure applied by the layer of electrical material 1〇4 is increased. As such, the sensitivity of the sensor to external stresses increases. Moreover, in order to further prevent the signals 'interferences belonging to the adjacent different upper electrode layers 1〇6 from interfering with each other to cause a so-called crosstalk phenomenon, for example, a recessed structure 114 may be disposed on the periphery of the upper electrode layer 106, so that the adjacent ones are different. The crosstalk between the upper electrode layers 106 can be effectively reduced. Figure 2 is an exploded perspective view of a touch sensor in accordance with an embodiment of the present invention. Referring to Figures 1 and 2, a plurality of upper electrode layers 1〇6 are disposed in an array on the inner surface of the upper substrate 108. The convex structure layer 112 of the piezoelectric material layer 1〇4 is provided corresponding to the position of the upper electrode layer 1〇6. The lower electrode layer 1〇2 is provided on the inner surface of the lower substrate 100. Thus, the lower substrate 1 , the piezoelectric material layer 104 and the upper substrate 1 8 constitute a touch sensor. Figure 3 is a view of another embodiment of the present invention. According to the same pressure 12 f.doc/g I283295v sensing mechanism as in Fig. 1, the convex structure layer 112 does not have to be disposed in a part of the piezoelectric material layer 104 itself. Referring to FIG. 3, the touch sensor includes a lower substrate 300, a lower electrode layer 302, a piezoelectric material layer 304, at least one upper electrode layer 306, and an upper substrate 3A. In this embodiment, the convex structure layer 31〇6 is again placed on the upper substrate 308, and the convex structure layer 31〇 is provided in a region in contact with the upper electrode layer 306. Further, in order to prevent the crosstalk phenomenon, the recess structure 312 may be provided. At this time, the upper substrate 308 can be a pressurized layer. Further, Figures 1 and 3 are not intended to limit possible design variations of the present invention, but may be combined and extended as appropriate with the features of Figure 3. That is, the pressurization active layer may be disposed on the lower substrate 3〇〇 such that the lower substrate 3〇〇 has a convex structure layer. Alternatively, the convex structure layer may be disposed on the lower substrate 300, the lower electrode layer 302, and the piezoelectric material layer 304, or may be disposed on the lower substrate 3, the lower electrode layer 302, and a pressure. At least two layers of the electrical material layer 3〇4. In other words, the pressurization effect 2 can be distributed to two or three layers. Each of the pressurization layers is provided with a convex structure, which can be achieved by combining the features of Fig. 1 and Fig. 3, and will not be described in detail. Figure = illustrates several convex structures in accordance with an embodiment of the present invention. The convex structure, the cylindrical shape 4〇〇a, the quadrangular column shape 400b, the straight strip shape 400c, or the write, curved strip shape 4〇〇d. In addition, the other part of the convex structure is the mouth structure. The shape shown in the drawings may also be the shape of the recessed structure, and variations thereof do not depart from the essential features of the present invention. By the same token, the present invention is not limited to the example shown in Fig. 4. Other examples such as a spherical shape, a pyramid shape, and the like can also be employed. According to the present invention, the principle of 13 l283294, 〇c/g is that the force area is reduced. Further, in the manufacturing method mentioned above, in order to facilitate the manufacture, the convex structure layer 112 can be processed by the piezoelectric material layer 1〇4. 5A to 5E illustrate a manufacturing process according to an embodiment of the present invention. The cross-sectional view is made for a layer of a pressurization layer on which a convex structure is to be formed, for example, a polymer material layer 500 of a piezoelectric material layer. Convex structure, first set 2 good one quartz template 5〇2, the concave part is the expected convex knot>. At 5A, the quartz template 502 is pressed against a predetermined position on the layer 5 of the polymer material. In Fig. 5B, for example, laser heating 504 is utilized to convert the upper portion of the layer of polymeric material 500 into an approximately molten layer 5()1. The sarcophagus template 502 is then pressed into the approximately fused layer 501 at 囷5C. In Figure 5D, cold forming is performed. In Fig. 5E, the quartz template 5〇2 is opened from the polymer material. In the crucible, a predetermined convex structure is formed on the polymer material 5〇〇. This process is a traditional hot press forming process that simplifies the production process. In addition, the recessed structure 114 in Fig. 1 can be fabricated simultaneously in the same manner although it is not shown, and is not shown in Fig. 5-8. FIG. 6 is a schematic diagram showing a continuous manufacturing process of the touch sensor according to an embodiment of the invention. Referring to Fig. 6, on the piezoelectric material layer 1〇4, using the flow of Figs. 5A to 5E, a press, a material, and a layer 1〇4 were formed by hot pressing using a quartz template. At this time, the upper substrate 106 and the butyl plate 100 are also divided into 7L. Then, the bonding step is carried out, and the upper substrate 1〇6 and the lower substrate 组合 are combined on both surfaces of the piezoelectric material layer 104 to complete the fabrication. The above-described manufacturing process is only one of the methods for describing the touch sensor of the present invention. As long as it has the structural features of the present invention described above, it can be manufactured in 14 doc/g 12832 for different processes. According to the present invention, the structural design is generally described in the following. Soil, A & relationship is: 仏Electrical (four) material 枓 tensor (t_) (1) Gii=D(iki£ki-elijEm (2) ❿ where ~ is the stress tensor, % is the potential, . The electric field gradient, φ is the electric field, MAV is taken again, and the electric quantity is (4) _ force hits. The elastic coefficient of the frity is zero. The force coefficient is the dielectric coefficient. The formula (1) can be written ( 3) That is, the (four) stress coefficient of the formula (1). If the D piezoelectric material is used, its heterogeneity is m-directional, so the material coefficient is simplified into a package coefficient of εδ r 〇(5). The piezoelectric coefficient is set to E-3GPa. , ν==α35 n = nxl(rH) shirt stealing. 15 1283 total fd〇c/g 1283 total fd〇c/g For example, ^211 =23x1 O'12 m/V〇lt = -33 ... ...πχ10_12 m/ V〇lt, the rest is said to be V', wherein the subscript 2 represents the thickness direction of the piezoelectric material, and the subscripts 1 and 3 are the coordinate axes perpendicular to the thickness direction. According to the above relationship, the manner for the figure is the same as that of FIG. And the f-shaped structure is, for example, the quadrangular column shape 4_ of FIG. 4, respectively performing a simulation test, the thickness of the electric material is, for example, 5 micrometers, and the size of the convex or concave structure is, for example, one micron cube. Shape. In addition, the size of the quadrilateral column is also changed = and the distance between the adjacent two shapes is verified by the step-by-step verification. The verification result is not shown, 'The structure of the present invention effectively increases the pressure point for the same applied force. The potential difference induced by the material. The better result shows that it can be increased by more than 5%. Of course, the actual increased sensing capacity will vary with the shape and size of the convex structure, which can be adjusted according to the actual design. Description. In summary, in the present invention, after researching and exploring the relationship between the original sensor of the touch sensor and using P (pressure) = F (external stress) / A (force area), A sensor of convex structure. Under the same external stress, the pressure effect on the piezoelectric material layer can be increased, so that the pressure sensitivity is effectively improved. ~ Although the present invention has been disclosed above in the preferred embodiment, it is not used. In order to limit the invention, it is to be understood that those skilled in the art can make some modifications and refinements without departing from the spirit and scope of the invention, and the scope of the invention is defined by the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic cross-sectional view showing a cross-sectional structure and a detailed perspective structure of a touch sensor according to an embodiment of the present invention. 16 I2832sQ5wf.d〇c/g FIG. 2 is an embodiment of the present invention. FIG. 3 illustrates several convex structures according to an embodiment of the present invention. FIGS. 5A to 5E illustrate touches according to an embodiment of the present invention. FIG. 6 is a schematic diagram of a manufacturing process of a sensor according to an embodiment of the present invention. [Main component symbol description] 100, 300: lower substrate 102, 302 lower electrode layer 104, 304 piezoelectric material layer 106, 306 upper electrode layer 108, 308 upper substrate 110 detailed structure 112, 310 convex structure 114, 312 concave structure 400a~400d: convex structure 500: polymer material layer 502, 702: quartz template 501: melted layer 504: : laser heating 17