J279601 九、發明說明： 【發明所屬之技術領域】 本發明係指一種雷射微加工處理全光纖型元件之 製作方法，尤指一種以雷射切削（laser a|3lati〇n)方法進 行微加工處理所製作的全光纖型元件。 【先前技術】 (1) 侧磨式光纖輕合器最早是由美國史丹佛大學 _ Prof· Shaw實驗室所提出的;請參閱第一圖（a)，其係將 光纖11埋入石英基板12並對其光殼研磨至距離光芯 約剩數微米的距離後，將此側磨光纖元件對疊形成光 纖搞合窃13，如苐一圖（b)所示。它的i〇ss很低(<〇.5 dB),且具有分光比可調的優點；然而，由於研磨長度 不長、必須使用折射率匹配液體、以及製作成本昂貴 等缺點，使得此型光纖耦合器對於環境的穩定性不高 而不具商用價值。目前，全世界僅剩數家公司生產此 • 型光纖耦合器，但大都使用於保極化光纖之類的可調 式光纖耦合器。（Ref. 1 &、3) (2) 利用火焰製作熔燒式光纖耦合器是由 Kawasaki所率先提出，因為製作方法簡單快速，故如 今已成為光纖耦合器的主流製造技術。利用火焰溶燒 的製造方法很簡單，也可以用來製作各種不同的光纖 元件，例如光纖極化器、極化分波器、波長多工/解多 工器、以及濾波器等，但這樣的方法卻存在一個致命 的缺點，使其無法製作更高等級的光纖元件。也就是 5 1279601 條光纖在、錢拉⑽造成光軸合㈣截面呈心 ’的不對稱結構’導致^同極化難的光具有二J279601 IX. Description of the invention: [Technical field of the invention] The present invention relates to a method for fabricating an all-fiber type component for laser micromachining, in particular to laser processing by laser cutting (laser a|3lati〇n) method Process the fabricated all-fiber type components. [Prior Art] (1) The side-grinding fiber optic light combiner was first proposed by the University of Stanford _ Prof. Shaw Laboratory; please refer to the first figure (a), which is to embed the optical fiber 11 into the quartz substrate 12 After the light shell is ground to a distance of a few micrometers from the optical core, the side-grinding fiber optic components are stacked to form an optical fiber, as shown in Figure (b). Its i〇ss is very low (<〇5 dB) and has the advantage of adjustable splitting ratio; however, due to the short length of the grinding, the necessity to use the refractive index matching liquid, and the manufacturing cost, this type Fiber couplers are not environmentally stable and are not commercially viable. Currently, there are only a few companies in the world that produce this type of fiber coupler, but most of them are used in adjustable fiber couplers such as polarization-maintaining fiber. (Ref. 1 &, 3) (2) The use of flame to make a fusion-fired fiber coupler was first proposed by Kawasaki. Because it is simple and fast, it has become the mainstream manufacturing technology for fiber couplers. The manufacturing method using flame-melting is simple, and can also be used to fabricate various fiber components such as fiber polarizers, polarization splitters, wavelength multiplexers/demultiplexers, and filters, etc. The method has a fatal flaw that prevents it from making higher-level fiber components. That is, 5 1279601 optical fibers, and Qianla (10) cause the optical axis (four) cross-section to be the heart's asymmetric structure, resulting in the same polarization.
=係數，-贿燒拉伸的距離加長時，不同極化態 、土相位差就會大幅度地發生差距，造成不同極化光^ j法同相達某特定長度，這樣光纖元件的通道隔 離度(Channel isolation)就會變得报差。然而，通道間 隔卻又取決於耦合器作用長度的長短，因此，要^用 這樣的做法製作出兼具窄波道間距和高通道隔離度的 光纖輕合器是报不容易的。此外，火焰燃燒會產生大 量的水氣，水氣藉由光纖拉伸的機會滲入光纖造成 1·38 μιη波長附近產生光學損耗，導致此法不適合生 產疏密度分波多工(CWDM)光纖元件(Ref· 2、4、5、8；) (3)因為側磨式與熔燒式各有其優缺點，所以c v.= coefficient, - when the distance of bribery stretching is lengthened, the difference between different polarization states and soil phase will be greatly different, causing different polarizations to be in phase with a certain length, so that the channel isolation of the fiber component (Channel isolation) will become a bad report. However, the channel spacing depends on the length of the coupler's action. Therefore, it is not easy to produce a fiber optic light combiner with narrow channel spacing and high channel isolation. In addition, the combustion of the flame generates a large amount of water vapor, which causes optical loss near the wavelength of 1.38 μη by the opportunity of the fiber to be infiltrated into the optical fiber, which makes the method unsuitable for the production of a densely-wavelength-multiplexed (CWDM) fiber component (Ref). · 2, 4, 5, 8;) (3) Because side grinding and melting type have their own advantages and disadvantages, so c v.
Cryan等人就將側磨光纖元件熔燒起來，使得側磨光纖 輕合器的穩定度增加。但他們所發展的光纖研磨技術 是利用砂輪機對光纖研磨’溶燒光纖時還必須利用溶 膠-凝膠法(sol-gel method)加入一層薄的液態二氧化石夕 以填補光纖研磨介面；這樣的做法雖然改善了侧磨光 纖輛合裔的穩定度’但可惜的是製作方式不佳，而且 他們沒有提出加入光纖細化(tapering)的製作方法，導 致分光比跟波長選擇特性無法調整。因此實用性不 大。(Ref· 6、7) (4)我國專利公告第493090號案（微型光纖耦合器 及其製造方法，發明人曾孝明、陳南光），則是同時利 用上述侧磨和熔燒的技術，將兩個侧磨過的光纖溶燒 6 、1279601 合而為一，並加入一個微調拉伸動作，以調整光纖的 兩個特徵模之相位關係，並藉此得到所需之分光比。 在這種耦合器的製作過程中，由於這個拉伸光纖動作 的目的僅疋為了微調光纖輕合區的兩個特徵模的相位 差’使得輸出光可以在同一個端子輸出；因此光纖所 具有的光芯在被拉伸的過程中並沒有被破壞，也就是 說光纖耦合器的内部仍然存在有第一及第二光芯之結 構，且光心號的傳導基本上還是利用光芯進行導光。 然而，由於光纖侧磨元件製作過程耗時過長且需使用 大量研磨耗材及極為精準的矽晶片溝槽，故產業上的 實用價值不高。 (5)美國專利第5101090號案（Methods and apparatus for making optical fiber couplers)提出使用準 分子雷射切削（laser ablation)光纖部分光殼到靠近光 芯的地方才停止並形成一道缺口（n〇tch);而停止點的 決定是以另一信號雷射光斜向入射此光纖缺口，同時 以一光偵檢器於光纖尾端量侧進入的信號光能量大 小，直到能量超過閾值後即通知切削雷射光停止動 作；此結構同時並被使用於製作光纖耦合器。然而， 顯而易見的是雷射光切削光纖形成一道缺口後，因為 光殼厚度突然變化，將導致光模場大小突然受改變而 產生高階模態的耦合現象並導致嚴重的光損耗。再 者，雷射切削的深度僅由信號雷射光射入的能量大小 決定並無法真正了解殘餘光殼的厚度，且此結構當成 光纖耦合器使用時將因信號雷射光的傳播常數 7 1279601 (propagation constant)與光芯傳導光的傳播常數不吻 合而導致光纖耦合器的耦合效率不高。此案亦提及準 分子雷射用於切削的光殼為高分子聚合物(polymer)材 料與一般常見的石英玻璃光纖光殼不同，且準分子雷 射不能用於切削紫外光敏光纖(photosensitive fiber)以 避免對光芯產生感光的現象。 職是之故，本創作鑑於習知技術之缺失，乃經悉 心試驗與研究，並一本鍥而不捨之精神，終創作出本 案「雷射微加工處理全光纖型元件之製作方法」。以下 為本案之簡要說明。 【發明内容】 本案之主要目的係提供一種雷射微加工處理全光 纖型元件之製作方法，係直接對光纖之光殼施以雷射 切削（ablati〇n)使得光纖消逝場得以裸露出來光殼切 削的冰度可由另一雷射光干涉條紋間距計算得知。雷 ，切肖】時’光纖必須維持在彎曲的狀態以使得切削光 殼的深度可以緩慢漸變而避免光學損 切削的長度可藉由改變光纖曲率半徑控制。此外^ 對沒有彎曲的光纖進行切削時，則可程式化 狀，以僻t 切削後的光殼形成—弧度漸變的形 纖元件*光子祕。利用此種消逝場型雷射侧削光 可=製作消逝場型光_合器、光 •射及二η纖，慮波器、光極化器、光放大器與 田射及先纖光柵等光纖主被動元件。 8 .1279601 ’俾得一更深入 本案得措由下列圖式及詳細說明 之了解： 【實施方式】 本案所提出之雷射微加工處理全光纖型-作方法可以有多種不同的應用，茲分述如下元件的製 (1)請參閱第二圖’其為本案雷射微加工卢 纖型元件所能夠製作的一種光纖耦合器之結二理全光Cryan et al. fused the side-grinding fiber optic components to increase the stability of the side-grinding fiber optic coupling. However, the fiber grinding technology developed by them is to use a grinder to grind the fiber. When the fiber is burned, it is necessary to add a thin liquid dioxide to the fiber grinding interface by using the sol-gel method; Although the practice has improved the stability of the side-grinding fiber-optic vehicles, it is a pity that the production method is not good, and they did not propose to add fiber tapering methods, which caused the splitting ratio and wavelength selection characteristics to be unadjusted. Therefore, it is not practical. (Ref·6,7) (4) China Patent Publication No. 493090 (Micro-fiber coupler and its manufacturing method, inventor Zeng Xiaoming, Chen Nanguang), using the above-mentioned side grinding and melting technology, The two side-milled fiber-dissolving tubes 6, 1296161 are combined into one, and a fine-tuning stretching action is added to adjust the phase relationship of the two characteristic modes of the fiber, thereby obtaining the desired splitting ratio. In the fabrication process of this coupler, the purpose of this stretched fiber is only to fine-tune the phase difference of the two characteristic modes of the fiber optic light-bonding zone so that the output light can be output at the same terminal; therefore, the fiber has The optical core is not damaged during the stretching process, that is, the structure of the first and second optical cores still exists inside the optical fiber coupler, and the conduction of the optical core is basically guided by the optical core. . However, since the manufacturing process of the fiber side grinding element takes a long time and requires a large amount of polishing consumables and an extremely precise 矽 wafer groove, the industrial practical value is not high. (5) Methods and apparatus for making optical fiber couplers propose to use a laser ablation of a part of the optical fiber to the vicinity of the optical core to stop and form a gap (n〇tch The decision to stop the point is to obliquely incident on the fiber gap by another signal laser light, and at the same time, the amount of signal light entering the side of the fiber end of the optical detector is notified to the cutting mine after the energy exceeds the threshold. The illuminating stop action; this structure is also used in the fabrication of the fiber coupler. However, it is obvious that after the laser light cutting fiber forms a gap, the sudden change of the thickness of the light shell will cause the optical mode field to be suddenly changed to produce a high-order mode coupling phenomenon and cause severe optical loss. Furthermore, the depth of laser cutting is determined only by the amount of energy that the signal laser light enters, and the thickness of the residual light shell cannot be truly understood, and this structure will be used as a fiber coupler because of the propagation constant of the signal laser light 7 1279601 (propagation Constant) does not match the propagation constant of the light-conducting light, resulting in low coupling efficiency of the fiber coupler. The case also mentions that excimer lasers are used for cutting. The photopolymer is different from the common quartz glass fiber optic shell, and the excimer laser cannot be used to cut the photosensitive fiber. ) to avoid the phenomenon of sensitizing the optical core. For the sake of his position, this creation, based on the lack of prior art, was carefully tested and researched, and the spirit of perseverance was used to create the "manufacturing method for laser-processed all-fiber components". The following is a brief description of the case. SUMMARY OF THE INVENTION The main object of the present invention is to provide a method for fabricating an all-fiber type component for laser micromachining, which directly applies laser cutting to the optical shell of the optical fiber so that the evanescent field of the optical fiber is exposed. The ice of the cut can be calculated from the interference of the other laser light interference fringes. Ray, cut] The fiber must be maintained in a curved state so that the depth of the cutting envelope can be slowly graded to avoid optical damage. The length of the cut can be controlled by changing the radius of curvature of the fiber. In addition, when cutting a fiber that is not bent, it can be programmed to form a photo-shell with a curved gradient. Using this evanescent field type laser side shaving can produce optical fibers such as evanescent field type light _ combiner, light ray and two η fiber, wave filter, optical polarizer, optical amplifier and field and pre-fiber grating Active and passive components. 8.1279601 'There is a deeper understanding of the case. The following diagrams and detailed explanations are understood: [Embodiment] The laser micromachining process for all-fiber type processing methods proposed in this case can have many different applications. The following components are described (1) Please refer to the second figure, which is a kind of fiber optic coupler that can be fabricated by laser micromachining of the case.
合第二圖之光纖耦合器20的結構，本案所^圖二配 方法如下： $的製作 首先，準備光纖21及光纖22，其中光 係由光芯211以及光殼212所構成，而光纖22 ^ 芯221以及光殽222所構成。接著，再利用雷射=光 切削光设212和222以形成二個消逝立曰 (Evanescent-Field)裸露面（圖中未示出），使得光纖^ 及22的光消逝場得以露出光殼212和222，對其進^一 回火(annealing)之後，再將二個消逝場裸露面固^並= 合在一起，以形成貼合區域23。 a 其次，在貼合區域23周圍以雷射熔燒貼合區 域23,使得光纖21及22發生耦合，在耦合的過程中， 利用步進馬達以漸進式的拉力拉伸光纖21及22，萨 以調整耦合區域24的長度以及光相位耦合比例，同日^ 使得光芯211和221在拉伸的過程中逐漸細化並耦合 成一條光芯241，此時的光芯241已經失去了導光 (guiding effect)的作用；也就是說，是由光殼212和 9 1279601 降到了 12-15 dB左右；本案1310/1550的耦合器之波 道隔離則可以高達30 dB。其次，應用於窄波道合/分 波時，習知技術中波道隔離的之所以不佳，問題就是 出在耦合器本身的截面是屬於高度不對稱的啞鈐形 (dumb-bell)結構，導致不同極化光的耦合係數 (coupling coefficient)不相同所造成，在這種情況下為 了應用於窄波道合/分波，則光纖作用長度勢必大幅加 長’導致兩極化光產生更嚴重的相位差，因此波道隔 離就跟著劣化了。而本案的耦合器結構及製作方法剛 好解決了這個缺點。 此外，本案亦解決了傳統側磨式光纖耦合器的穩 定拴不佳、以及有效作用長度不長的問題。雖然，C.V. Cryan等人在西元1 9 9 2年就提出了熔合側磨式光 纖耦合器的觀念，但可惜的是，他們的光纖研磨方法 是利用砂輪機研磨，使得有效作用長度無法很長且熔 燒時必須加入一層液態二氧化矽，以彌補兩光纖難以 熔合的問題；此外，他們也沒有提到對熔合侧磨式光 纖耦合器作出拉伸的動作，以使有效作用長度大幅加 長，並令導光作用耦合到光殼，以製作窄波道光纖合 波器。相反地，本案的光纖耦合器幾乎是圓形對稱的， 所以將其熔燒拉伸後，光纖截面仍是圓形對稱，不會 發生像傳統的啞鈴形的結構，也是故不會造成耦合係 數對極化光不是等向性的問題，因此可以使光纖拉伸 很長而波道隔離仍不會劣質化，加上圓形的光纖截面 不論經過多長的加熱拉伸，仍然維持圓形的形狀。因 1279601 第一雷射42切削光殼411的長度。 在於，利用第一雷射42切削光纖41的時候，必須將 光纖41旋轉，如果便可使得光纖41上出現環繞型態 的消逝場裸露面414。第五圖（a)為使用前述方=所製 (4)請參閱第四圖（b)，其為本案雷射微加工處理全 光纖型元件之再一種製作方法的示意圖。相同的元件 係採用同樣的元件符號，但與第四圖（a)惟一的不同處 成之光纖切削截面的照片，第五圖（b)為雷射切削之中The structure of the fiber coupler 20 of the second figure is as follows: First, the optical fiber 21 and the optical fiber 22 are prepared, wherein the light system is composed of the optical core 211 and the optical shell 212, and the optical fiber 22 ^ The core 221 and the light confuse 222 are formed. Next, the laser = light cutting light settings 212 and 222 are used to form two Evanescent-Field exposed faces (not shown) such that the light evanescent fields of the optical fibers 22 and 22 are exposed to the light housing 212. And 222, after the annealing, the two obsolete fields are fixed and combined to form a bonding area 23. a Next, the laser-bonded bonding area 23 is laser-fired around the bonding area 23, so that the optical fibers 21 and 22 are coupled. During the coupling process, the optical fibers 21 and 22 are stretched by a stepping motor with a progressive pulling force. In order to adjust the length of the coupling region 24 and the optical phase coupling ratio, the same day ^ causes the optical cores 211 and 221 to be gradually refined and coupled into a light core 241 during the stretching process, at which time the optical core 241 has lost the light guide ( The effect of the guiding effect); that is, the reduction of the light shells 212 and 9 1279601 to about 12-15 dB; the channel isolation of the 1310/1550 coupler in this case can be as high as 30 dB. Secondly, when applied to narrow-wave doubling/demultiplexing, the reason why the channel isolation in the prior art is poor is that the cross section of the coupler itself is a highly asymmetrical dumb-bell structure. , resulting in different coupling coefficients of different polarized lights, in this case, in order to apply to narrow-wave doubling/demultiplexing, the length of the fiber is bound to be greatly lengthened, resulting in more serious polarization of the polarized light. The phase difference is such that the channel isolation is degraded. The coupler structure and manufacturing method of this case just solved this shortcoming. In addition, the present case also solves the problem of poor stability and low effective length of the conventional side-grinding fiber coupler. Although CV Cryan et al. proposed the concept of fusion side-grinding fiber couplers in 1982, unfortunately, their fiber grinding method uses grinder grinding, so that the effective length cannot be long. A layer of liquid cerium oxide must be added during the melting to compensate for the problem that the two fibers are difficult to fuse; in addition, they do not mention the stretching action of the fused side-grinding fiber coupler, so that the effective length is greatly lengthened, and The light guiding effect is coupled to the light housing to produce a narrow channel fiber multiplexer. On the contrary, the fiber coupler of this case is almost circularly symmetrical, so after the melt-stretching, the fiber cross-section is still circularly symmetrical, and does not have a conventional dumbbell-shaped structure, and thus does not cause a coupling coefficient. The problem of polarized light is not isotropic, so the fiber can be stretched for a long time and the channel isolation will not be inferior, and the circular fiber cross section will remain circular regardless of the length of heating and stretching. shape. Because 1279601 the first laser 42 cuts the length of the light housing 411. In that, when the optical fiber 41 is cut by the first laser 42, the optical fiber 41 must be rotated, so that the evanescent field exposed surface 414 of the wraparound type appears on the optical fiber 41. The fifth figure (a) is the use of the above-mentioned square = (4), please refer to the fourth figure (b), which is a schematic diagram of another method for manufacturing the laser-processed all-fiber type component of the present invention. The same components are the same component symbols, but the photo of the fiber cutting section is different from the only one of (a), and the fifth figure (b) is laser cutting.
心區域的照片’而第五圖⑷為雷射切削之邊緣區域的 照片。 (5)請參閱第六圖⑻及(b)，其為本案雷射微加工處 理全光纖型元件之製作方法之應用面的示意圖。使用 前述之切削方法製作二條切削後的光纖61及，再 將切削部份互相貼合、加熱以及溶燒，便可以形成一 耦合區域63。此外，若是微幅拉伸耦合區域63"亦可 以改變光耦合比例，當然，亦能夠不實施拉伸動作 直接加以使用。 v ”月 > 阅乐-叫，六巧个杀又雷射切削方 所製作之2*2光纖耦合器及4*4光纖耦合器的示意圖。 在製作2*2光纖耦合器時，係先使用前述之U為 切削方法製作-光纖元件7卜再將兩個^目同結構的弁 纖元件以切削部份相互貼合後加以炫燒及拉伸 尸本的光芯712失去作用，以構成—的 = 合器70。 ’祸 而在製作4*4光纖耦合器時，係先以製作 13 1279601 纖耦合器的方式完成兩個光纖元件71的貼合之後，再 對其加以雷射切削，再將兩個同樣的結構相互對疊後 加以熔燒及拉伸，以構成一 4*4的光纖耦合器80。 (7)請參閱第八圖，其為使用本案之雷射切削方法 所製作之N*N光纖耦合器的示意圖（圖示為以7*7為 例進行說明）。 在製作N*N光纖耦合器時，係先以前述之環狀雷 射切削的方式製作一光纖元件71，再將N個光纖元件 | 7丨以彼此的切削部份貼合之後，加以熔燒及拉伸，以 構成一 N*N的光纖耦合器81。 、（8)凊參閱第九圖（a)，其為使用本案之雷射切削方 法所製作之光纖塞取多工器（add-dr〇p multiplexer)的 不意圖。同樣係先以前述之雷射切削的方式製作二光 纖疋件71，再將二個光纖元件71以彼此的切削部份 貼合之後，於耦合區域寫入光纖光栅82，再加以熔燒 及拉伸，以構成一光纖塞取多工器83。 • 請參閱第九圖（b)，其為使用本案之雷射切削方法 作之串聯式光纖塞取多工器的示意圖。其係將二 /、則述的光纖塞取多工器83以輸出/入端相接合所構 成。 (9)请參閱第十圖，其為使用本案之雷射切削方法 所製作之可調式光纖窄波道多工/解多工器的示意 ，。雖然同樣係以前述之雷射切削的方式製作二光纖 疋件71和72，但其差異在於，藉由前述干涉條紋之 間距的控制，使得光纖元件72的切削深度較深，如此 -1279601 在貼合兩光纖元件71及72時，締的差異便會形成 -空隙’接著再於熔燒之後在該空隙内填人一折射 y隨溫度而變的光學色散物質9G(如高分子聚合物 等），以構成一可調式光纖塞取多工器84。 "(10)請參閱第十-圖（a)，其為使用本案之雷射切 削方法所製作之光纖光栅的*意圖。其製作方法是， 使用前述之雷射切削方法以第—雷射間隔地切削光纖 73，使其上形成複數個消逝場裸露面74，以構成光 光栅85。此外，若是在以第—雷射進行間隔切削的過 程中緩慢變化切削的深度，則可能形成消逝場裸露面 74被鐘形化(ap〇dize)的光纖光柵86，如第十一圖 所示。 (11)请參閱第十二圖，其為使用本案之雷射切削方 法所製作之另一種可調式光纖塞取多工器的示意圖。 其製作方法是，將二條第十一圖（a)之光纖光柵85相互 貼合並加以熔燒之後，在其中的複數個空隙中填入前 述折射率可隨溫度而變的光學色散物質，以構成可調 式光纖塞取多工器87。 綜上所述，本案係提供一種雷射微加工處理全光 纖型元件之裝作方法，係直接對光纖之部分光殼施以 雷射切削去除，使得光纖内的消逝場(evanescent field) 能夠裸露出來，切削的深度可藉由量測雷射光干涉條 紋間距的方法得知；雷射切削形成的消逝場之作用長 度則可透過改變光纖曲率半徑控制。將側削後之光纖 彼此靠合，使其光’肖逝場能夠發生輕合後予以加熱熔 15 1279601 第八圖：使用本案之雷射切削方法所製作之N*N 光纖耦合器的示意圖； 第九圖（a):使用本案之雷射切削方法所製作之光 纖塞取多工器的示意圖； 第九圖（b):使用本案之雷射切削方法所製作之串 聯式光纖塞取多工器的示意圖； 第十圖：使用本案之雷射切削方法所製作之可調 式光纖窄波道多工/解多工器的示意圖； 第十一圖（a)〜(b):使用本案之雷射切削方法所製 作之光纖光柵的示意圖；以及 第十二圖：使用本案之雷射切削方法所製作之另 一種可調式光纖塞取多工器的示意圖。 【主要元件符號說明】 Π、2卜 22、41、52、61、62、73 光纖 12石英基板 13、30、31、32、33、70、80、81 光纖耦合器 211、 221、241、412 光芯 212、 222、242、411 光殼 23、 53貼合區域 24、 63耦合區域 413切削部份 414、74消逝場裸露面 415曲率半徑 42第一雷射 17 1279601 43反射鏡 44、46凸透鏡 45第二雷射 47屏幕 48第三雷射 49光偵檢器 71、72光纖元件 83、84、87光纖塞取多工器 85光纖光柵 90光學色散物質 【參考之相關文獻及論文】 (1) R,A. Burgh, G. Kotler， and H J· Shaw, "Single-mode fibre optic directional coupler，"Electron. Lett·，vol· 16, pp. 260-261，1980· (2) B.S. Kawasaki，Κ·0· Hill，and R.G· Lamont，" Biconical隱taper single-mode fiber coupler，" Opt· Lett·， vol. 6, pp. 327-328, 1981. (3) Michel Digonnet，and ELJ· Shaw，"Wavelength multiplexing in single-mode fiber couplers, /fAppl. Opt. vol. 22? pp. 484-491, 1983. (4) Michael Eisenmann， and Edgar weidel， "Single-mode fused biconical couplers for wavelength division multiplexing with channel spacing between 100 and 300nm，"J· Lightwave Technol·，vol· 6, pp· 113-119, 18 1279601 1988. (5) Katsumi Morishita，and Katsuyoshi Takashina， "Polarization properties of fused fiber couplers and polarizing beamsplitters，〃 J· Lightwave Technol·，vol· 9, pp. 1503-1507, 1991. (6) C.V. Cryan, and C,D. Hussey, ffFused-polished singlemode fibre couplers, "Electron. Lett” vol· 28, pp.204-2055 1992.The photo of the heart area' and the fifth figure (4) are photographs of the edge area of the laser cutting. (5) Please refer to the sixth figure (8) and (b), which is a schematic diagram of the application of the method of manufacturing the all-fiber type component of the laser micromachining process. A coupling region 63 can be formed by fabricating the two cut fibers 61 using the cutting method described above, and then bonding the portions to each other, heating, and firing. Further, if the micro-stretch coupling region 63" can also change the optical coupling ratio, it is of course also possible to use it without performing the stretching operation. v 『月> 乐乐-叫, a schematic diagram of a 2*2 fiber coupler and a 4*4 fiber coupler made by Liu Qiao and laser cutting. When making a 2*2 fiber coupler, Using the above-mentioned U for the cutting method - the optical fiber component 7 and then the two fiber-optic components of the same structure are bonded to each other, and then the optical core 712 of the corpse is burned and stretched to lose its effect. —==合合70. 'When the 4*4 fiber coupler is fabricated, the two fiber components 71 are bonded together by making a 13 1279601 fiber coupler, and then laser-cutting is performed. The two identical structures are then stacked and then melted and stretched to form a 4*4 fiber coupler 80. (7) Please refer to the eighth figure, which is fabricated using the laser cutting method of the present invention. Schematic diagram of the N*N fiber coupler (illustrated by taking 7*7 as an example). When fabricating the N*N fiber coupler, a fiber optic component 71 is first fabricated by the aforementioned annular laser cutting method. Then, N fiber optic components | 7 贴 are bonded to each other, and then melted and stretched to An N*N fiber coupler 81. (8) 凊 Refer to the ninth figure (a), which is an add-dr〇p multiplexer manufactured by the laser cutting method of the present invention. It is not intended to be the same. First, the two-fiber element 71 is fabricated by the above-mentioned laser cutting method, and after the two fiber elements 71 are bonded to each other, the fiber grating 82 is written in the coupling region and then melted. Burning and stretching to form a fiber-optic plug-in multiplexer 83. • Refer to Figure 9(b), which is a schematic diagram of a tandem fiber-optic plug-in multiplexer using the laser cutting method of the present invention. The fiber plug multiplexer 83 described in the second/second is formed by joining the output/input end. (9) Please refer to the tenth figure, which is a tunable fiber narrow wave made by the laser cutting method of the present invention. The schematic diagram of the multiplexer/demultiplexer. Although the two-fiber rafters 71 and 72 are also fabricated by the aforementioned laser cutting method, the difference is that the fiber optic components are controlled by the aforementioned spacing of the interference fringes. 72 has a deep depth of cut, so -1279601 fits two fiber elements In the case of the parts 71 and 72, the difference in the formation will be formed into a void, and then after the melting, an optical dispersing substance 9G (such as a polymer or the like) whose refractive value y changes with temperature is filled in the gap to constitute a composition. A tunable fiber optic plug multiplexer 84. "(10) Please refer to the tenth-figure (a), which is the * intent of the fiber grating fabricated using the laser cutting method of the present invention. The laser cutting method described above cuts the optical fiber 73 at a first-laser interval to form a plurality of evanescent field exposed surfaces 74 to form an optical grating 85. Further, in the process of cutting at intervals of the first laser Slowly varying the depth of the cut, it is possible to form a fiber grating 86 that is obscured by the evanescent field exposed surface 74, as shown in FIG. (11) Please refer to Fig. 12, which is a schematic diagram of another adjustable fiber optic plug-in multiplexer fabricated using the laser cutting method of the present invention. The optical fiber gratings 85 of the two eleventh figure (a) are bonded to each other and melted, and then the plurality of voids are filled with the optical dispersion material whose refractive index changes with temperature to form Adjustable fiber optic plug multiplexer 87. In summary, the present invention provides a method for mounting a full-fiber type component in laser micromachining, which directly removes a portion of the optical fiber by laser cutting, so that the evanescent field in the optical fiber can be exposed. The depth of the cutting can be obtained by measuring the interference of the laser light interference fringes; the length of the evanescent field formed by the laser cutting can be controlled by changing the radius of curvature of the fiber. The side-cut optical fibers are brought into close contact with each other, so that the light 'disappearing field can be lightly combined and then heated and melted 15 1279601. Fig. 8 is a schematic view of the N*N fiber coupler fabricated by the laser cutting method of the present invention; Figure 9 (a): Schematic diagram of a fiber-optic plug-in multiplexer fabricated using the laser cutting method of the present invention; Figure 9 (b): Serial fiber-optic plug-in multiplex fabrication using the laser cutting method of the present invention Schematic diagram of the device; Figure 10: Schematic diagram of the adjustable fiber narrow-channel multiplex/demultiplexer fabricated using the laser cutting method of the present invention; Figure 11 (a) ~ (b): using the thunder of the case A schematic diagram of a fiber grating fabricated by a laser cutting method; and a twelfth image: a schematic diagram of another adjustable fiber optic plug multiplexer fabricated using the laser cutting method of the present invention. [Description of main component symbols] Π, 2 卜 22, 41, 52, 61, 62, 73 Optical fiber 12 quartz substrate 13, 30, 31, 32, 33, 70, 80, 81 Fiber couplers 211, 221, 241, 412 Light core 212, 222, 242, 411 light shell 23, 53 bonding area 24, 63 coupling area 413 cutting portion 414, 74 evanescent field exposed surface 415 radius of curvature 42 first laser 17 1279601 43 mirror 44, 46 convex lens 45 second laser 47 screen 48 third laser 49 light detector 71, 72 fiber optic components 83, 84, 87 fiber optic plug multiplexer 85 fiber grating 90 optical dispersion material [Reference related literature and papers] (1 R, A. Burgh, G. Kotler, and HJ· Shaw, "Single-mode fibre optic directional coupler,"Electron. Lett·, vol· 16, pp. 260-261, 1980· (2) BS Kawasaki ,Κ·0· Hill,and RG· Lamont," Biconical hidden taper single-mode fiber coupler," Opt· Lett·, vol. 6, pp. 327-328, 1981. (3) Michel Digonnet, and ELJ · Shaw, "Wavelength multiplexing in single-mode fiber couplers, /fAppl. Opt. vol. 22? pp. 484-491, 1983. (4) Mic Hael Eisenmann, and Edgar weidel, "Single-mode fused biconical couplers for wavelength division multiplexing with channel spacing between 100 and 300nm,"J·Lightwave Technol·, vol· 6, pp· 113-119, 18 1279601 1988. 5) Katsumi Morishita, and Katsuyoshi Takashina, "Polarization properties of fused fiber couplers and polarizing beamsplitters,〃 J· Lightwave Technol·, vol· 9, pp. 1503-1507, 1991. (6) CV Cryan, and C,D Hussey, ffFused-polished singlemode fibre couplers, "Electron. Lett” vol· 28, pp.204-2055 1992.
(7) C.V. Cryan，J.M. Lonergan，and C.D. Hussey， "Overcoming the effects of polishing induced stress when fabricating fused polished couplers, "Electron. Lett·，vol· 29, pp. 1243-1244, 1993· (8) T丄· Wu，and H.C· Chang，"Rigorous analysis of form birefringence of fused fibre couplers, "Electron· Lett·，vol. 30, pp. 998-999，1994. (9) G· Kakarantzas，Τ·Ε· Dimmick，Τ·Α· Birks，R· Le Roux, and P. St· Ressell，"Miniature all-fiber devices based on C02 laser microstructuring of tapered fibers，" Opt. Lett·，vol· 26, pp· 1137-1139, 2001· (10) Nan-Kuang Chen5 Sien Chi5 and Shiao-Min Tseng， "Fused-polished fiber couplers， 〃 in OptoElectronics and Communications Conference 2003 (OECC’2003)，p.299. 19(7) CV Cryan, JM Lonergan, and CD Hussey, "Overcoming the effects of polishing induced stress when fabricating fused polished couplers, "Electron. Lett·, vol· 29, pp. 1243-1244, 1993· (8) T丄· Wu, and HC· Chang,"Rigorous analysis of form birefringence of fused fibre couplers, "Electron· Lett·, vol. 30, pp. 998-999, 1994. (9) G· Kakarantzas, Τ· Ε· Dimmick, Τ·Α· Birks, R· Le Roux, and P. St. Ressell, "Miniature all-fiber devices based on C02 laser microstructuring of tapered fibers," Opt. Lett·, vol· 26, pp · 1137-1139, 2001· (10) Nan-Kuang Chen5 Sien Chi5 and Shiao-Min Tseng, "Fused-polished fiber couplers, 〃 in OptoElectronics and Communications Conference 2003 (OECC'2003), p.299. 19