1279580 九、發明說明： 【發明所屬之技術領域】 本發明是有關於一種顯微鏡的成像系統，特別是指一 種共焦顯微鏡的共焦式成像系統。 【先前技術】 參閱圖1 ’共焦顯微鏡是一種可以將待測物「立體成像 」的顯微鏡；所謂『共焦』，是指其採用的成像系統1的光 源位置至待測物100的一待測面200的距離，等於成像袭 置12至分光鏡13的距離加上分光鏡π至待測物1〇〇的待 側面200的距離之故，再加上成像系統！以針孔14進行空 間濾波，而可進行待測物1 〇〇的立體成像。 參閱圖2 ’目别共焦顯微鏡的成像系統2是針孔轉盤式 多光點光路的設計，包含有一光源模組21、一承置待測物 100的放置檯22、一設置於該光源模組21與放置檯22之 間的第一透鏡組23、一接收自待測物1 〇〇反射的光以成像 的成像裝置24，及一設置於該光源模組21與成像裝置24 之間的第二透鏡組25。 該光源模組21具有一可發出白光的光源211、一具有 複數供光通過之針孔212的針孔盤213 ( pinhole array )、一 δ又置於ό亥光源211與該針孔盤213之間並具有複數供光通過 之微稜鏡214的微稜鏡盤215 (microlens array)，及一設置 於該針孔盤213與微稜鏡盤215之間並可用以分光的分光 鏡216，該針孔盤213與該微稜鏡盤215可彼此相對轉動， 使該光源211發出的光選擇性地依序通過微稜鏡盤215之部 1279580 分的微稜鏡214，與針孔盤213之部分對應於微稜鏡盤215 之部分微稜鏡214的針孔212，而成複數個別獨立的光束向 放置待測物100的放置檯22方向行進。 該第一透鏡組23具有至少一凸透鏡，可將通過的光聚 焦至待測物100表面的預定區域；該第二透鏡組25具有至 少一凸透鏡，可將通過的光聚焦至該成像裝置24 ;該成像 裝置24可接收由第二透鏡組25聚焦的光而建立影像。 此種共焦顯微鏡的成像系統2實際建立待測物1〇〇的 立體影像時，由光源模組21的光源211發出白光，白光通 過彼此相對轉動的針孔盤213與微稜鏡盤215時，因為必 須同時通過對應的針孔212與微稜鏡214，因此被選擇性地 區分成複數光束；此些光束經過第一透鏡組23後並分別聚 焦至待測物1〇〇的預定區域，反射後沿原光路反向通過針 孔212，並在通過光源模組21内的分光鏡216時被其改變 行進方向而向第一透鏡組25方向行進，並在經過第二透鏡 組25後分別聚焦至成像裝置24，而由成像裝置接收待 測物100每個區域的反射光束後，建立出待測@ i⑼整體 的放大立體影像。 由方、此種共焦顯微鏡的成像系統2主要是利用光源模 組21中彼此相對轉動的針孔盤213與微稜鏡盤215時的配 ，合，而同時多點m射成像，所以針對不同的制物_ ，或是所需建立影像的解析度的不同，也必須搭配不同針 孔隸的針孔盤213~通常待_外觀越複雜，或是解析度 越同針孔盤213之針孔212的孔徑也必須越小；而同時 1279580 ，光源211提供的白光強度也必須針對不同針孔孔徑的針孔 盤213而對應增強，方可提供反射聚焦後光強度足夠的光 供成像裝置24接收、建立影像。 也因此，此種共焦顯微鏡的成像系統2在實際使用上 ，具有因為必須因應不同的量測條件與所需的量測結果更 換光源模組21中的針孔盤213、及光源211等零組件，故 在量測使用彈性較差，以及必須以較高的購置成本準備各 式的零組件更換，以因應不同的量測需要的缺點需要改進 〇 【發明内容】 因此，本發明之目的，即在提供一種量測使用彈性大 、且可以快速建立物體立體影像的可調變光源圖像的共焦 式顯微成像糸統。 於是，本發明一種可調變光源圖像的共焦式顯微成像 系統，包含一光源模組、一濾波偏振轉換裝置、一 光裝置、-壓電平台、+透鏡組，及—數位 置。 該光源模組具有一光源、一供該光源發出的光通過之 數位式微鏡片，及一可程式化控制該微鏡片而使該光源發 出的光通過後呈預定圖樣並朝一第一方向行進的控制單元 〇 該濾波偏振轉換裝置使通過的光成一繼續朝第一方白 打進之具有預定波長範圍的偏極光，用以供自該光源模組 發出之呈預定圖樣的光通過後成一繼續朝第一方向行進的 !27958〇 第—偏振光束。 位改：偏振分光裝置使通過之偏極光的電場振動方向與相 向行=，並使電場振動方向不同的偏極光分別朝不同的方 仃，用以供該第一偏振光束通過後成一繼續朝該第一 方向行進的第二偏振光束。 ”亥壓電平台用以承置並帶動待測物位移。 该弟一透鏡組設置於該偏振分光裝置與該壓電平台之 二並具有至少—凸透鏡，而可將該第二偏振光束以面的 :工全域聚焦至該待測物之一待測面上，且當該第二偏振 1全域聚焦至該待測面時，該第二偏振光束以該待測面 反射成之-第三偏振光束反向於該第—方向行進並通過該 偏振分光裝置，而成_朝一第二方向行進的第四偏振光束 該數位式成像裝置用以接收該第四偏振光束，並以數 位方式將接收到的該第四偏振光束建立為該待測物之待測 面的放大影像。 【實施方式】 有關本發明之前述及其他技術内容、特點與功效，在 以下配合參考圖式之一個較佳實施例的詳細說明中，將可 清楚的呈現。 在本發明被詳細描述之前，要注意的是，在以下的說 明内容中，類似的元件是以相同的編號來表示。 參閱圖3,本發明一種可調變光源圖像的共焦式顯微成 像系統3的一第一實施例包含—光源模組Η、—渡波偏振 8 1279580 轉換I置32、一偏振分光裝置33、一壓電平台34、一第一 透鏡組35、一數位式成像裝置36。 該光源模組31具有一光源311、一供該光源311發出 的光通過之數位式微鏡片312，及一可程式化控制該微鏡片 312而使遠光源311發出的光通過後呈預定圖樣並朝一第一 方向仃進的控制單元313，控制單元313可依将測物1〇〇的 外觀複雜度或是實際所需建立影像的解析度，程式化的控 制光源311發出的光通過後呈如圖4所示之光束截面積較小 、排列較為緻密的光點圖樣，或是呈如圖5所示之光束截 面積較大、排列較為疏密的光點圖樣。 該濾波偏振轉換裝置32使通過的光成一繼續朝第一方 向行進之具有預定波長範圍的偏極光，具有供朝該第一方 向行進的光依序通過的—瀘、光鏡321 (m㈣與—偏光轉換 為322 (P-S c〇nverter)，該濾光鏡321可濾除雜光而僅供預 疋波長耗圍的光通過，該偏光轉換器322將通過該濾光鏡 321之預定波長範圍的光轉換成偏極光（p〇iarized light)， 而使付自遠光源模組31發出之呈預定圖樣的光通過後成一 貝朝第-方向行進的第一偏振光束；在本例中，渡光鏡 僅ί、波長是550nm的綠光通過，偏光轉換器322將通 過:綠光轉換成P型線偏極光（p linear_p〇larized Hght)， 使得第-偏振光束是呈預定圖樣、波長在55〇nm的p型線 偏極光。 。亥偏振分光裝f 33使通過之偏極光的電場振動方向與 相位改ki使電場振動方向不同的偏極光分別朝不同的 9 1279580 方向行進，具有供朝第一方向行進的偏極光依序通過的— 偏振光分光隔離器331 (polarization beam splitter)與一四 分之一波片332 ( λ/4 plate)，該偏振光分光隔離器331限制 電場振動方向彼此正交的二偏極光分別朝第一方向與_相 異於弟一方向的第二方向行進（在此，是以第一、二方白 彼此垂直為例說明），該四分之一波片332將朝該第一方向 行進的線偏極光轉換成繼續朝該第一方向行進的圓偏極光 (circular p〇iarized light )，並將朝反向於該第一方向行進 的圓偏極光轉換成繼續朝反向於該第一方向行進的線偏極 光，而可使得第一偏振光束通過後成一繼續朝第一方向行 進的第二偏振光束（左旋圓偏極光）。 該壓電平台34用以承置待測物1〇〇，並可以奈米級的 步進帶動待測物100作三度空間位移。 該第一透鏡組35設置於該偏振分光裝·置33與壓電平 台34之間，並具有至少一凸透鏡，而可將該第二偏振光束 以面的形式全域聚焦至待測物1〇〇之一待測面2〇〇上。 一孩數位式成像裝置36包括一可接收光並成像的光電耦 ϋ攝影機361 (CCD camera)，及一可運算處理該光電耦合 攝衫機361所成之像的運算單元362，用以接收第二偏振光 束全域聚焦至該待測面2〇〇而反射並朝第二方向行進的一 第四偏振光束（有關於此等光行進方向、相位、電場振動 方向等之相關轉變容後再述），並以數位方式將接收到的第 四偏振光束建立為待測物1〇〇之待測面2〇〇的放大影像。 本發明可調變光源圖像的共焦式顯微成像系統3實際 10 1279580 建立待測物100的立體影像時，先依所需放大影像的解析 度由光源模組31的控制單元313程式化地改變數位式微鏡 片312的圖像，而使光源311發出的光通過後呈預定圖樣（ 斤而解析度愈阿，每一光束截面積也就愈小、排列也需愈 緻密）向第一方向行進。 當光通過濾、波偏振轉換裝置32的濾光鏡321與偏光轉 換器322之後，成波長範圍屬綠光之ρ型線偏極光的第一 偏振光束繼續朝第-方向行進，並在通過偏振分光裝置Μ 的偏振分光隔離器331時，因第一偏振光束是Ρ型線偏極 光’所以繼續朝第-方向行進並通過四分之—波片332，並 在通過四分之-波# 332時被轉換成為圓偏極光（左旋偏 極光）的第二偏振光'束繼續朝第一方向行進。 當第二偏振光束繼續朝第一方向行進並通過第一透鏡 組：5時被全域聚焦至待測物1〇〇的其中一待測面上， 此時’第二偏振光束以該待測面細為反射面反射成一第 三，振光束反向於第-方向沿原光路行進—因第三偏振光 束是第二偏振光束反射而成，所以第三偏振光束是與第二 偏振光束反相的圓偏極光（右旋偏極光）。 而當第三偏振光束繼續通過偏振分光裳置33的四分之 一波片332後，則被四分之—波片说轉換成為s型線偏 極光的第四偏振光束繼續朝反向於該第一方向行進，並在 通過偏振分光隔離ϋ 331時被限制轉換而朝與第一方向垂 直的第二方向行進。 .當第四偏振光束繼續朝第二方向行進而被數位式成像 1279580 裝置36的光絲合攝影機361接收，而將待測物】⑼的該 一待測面200建立出放大的影像。 而再配合《平台34作垂直於待測物！⑼之該一待測 面200的縱深步進，則可依序建立出複數待測物⑽的不 同待測面的放大影像’再由運算單元362 #此等待測面的 放大影像運算疊加，即可快速正確的得到待測物ι〇〇的放 大立體影像。 參閱圖6，本發明-種可調變光源圖像的共焦式顯微成 像系統3的-第二實施例，是與上述共焦式顯微成像系統3 相似’其不同處僅在於在偏振分光裝置33與數位式成像裝 置36之間’更設置-具有至少-凸透鏡的第二透鏡組37, 用以將自偏振分光裝置33射出的第四偏振光束以面的形式 王域水焦而供違數位式成像裝置％之光電麵合攝影機如 接收，以建立更清晰的放大影像。 综合上述說明可知，本發明一種可調變光源圖像的共 焦式顯微成像线3主要是藉由光源模組31因應所需的量 測要求’程式化地產生不同圖樣的光點掃描，並配合遽波 扁振4置32與偏振分光裝置33的調變行進光與光路，而 最佳化地全域式得到待測物1〇〇的其中一待測面·的最 佳放，：像，再配合壓電平台34以奈米級的步進漸次移動 r即可付到建立出待測4勿100依縱深之多數待測® 200的 最^大影像，再配合數位式成像裝置36運算單元362的 運”且加βρ可快速的建立出待測物100完整的外觀放大 12 I279580 與習知針孔轉盤式多光點光路設計的共焦顯微鏡的成 像系統2相較，本發明具有以下的優點： 1 ·可依貫際罝測由採用可程式化控制之數位式微鏡片3 j 2 以調變光源模組發出光的大小、亮度、圖樣等，以滿足 不同量測條件的需求，使用彈性大。 2·採用濾波偏振裝置32與偏振分光裝置33的調變行進光 為預疋波長的偏極化光與行進光路，有效抑制雜散光以 及降低光在行進中的能量耗損，提昇整體系統光亮度， 進而有效建立清晰的影像。 3·利用程式化、數位化之光源模組31及成像裝置36，配合 I電平口 34的微步進位移，達到多光點平面掃描、全域 聚焦成像，而可快速、低成本的建立待測物1〇〇的高精 度二維立體影像，符合市場奈米級量測需求。 △ I*隹以上所述者，僅為本發明之較佳實施例而已，當不 :以此限疋本發明實施之範目，即大凡依本發明申請專利 範圍及^月β兒明内容所作之簡單的等效變化與修飾，皆仍 屬本發明專利涵蓋之範圍内。 【圖式簡單說明】 回疋不思圖，說明共焦顯微鏡的成像系統的基礎 疋示意圖，說明習知採針孔轉 設計的共焦顯微鏡的成像系統； 丘崔^ / n意圖’說明本發明—種可調變光源圖像* 一、頁微成像系統的-第-較佳實施例； 13 1279580 圖4是一示意圖，說明圖3之成像系統的一光源模組 發出光的圖樣； 圖5是一示意圖，說明圖3之成像系統的一光源模組 發出光的另一種圖樣；及 圖6 共焦式顯 一 立 示心θ ϋ兒明本發明一種可調變光源圖像的 ^成像系統的一第-鈐 不一杈佳實施例。1279580 IX. Description of the Invention: [Technical Field] The present invention relates to an imaging system for a microscope, and more particularly to a confocal imaging system of a confocal microscope. [Prior Art] Referring to Figure 1 'Confocal microscope is a microscope that can "stereoscopically image" the object to be tested. The so-called "confocal" refers to the position of the light source of the imaging system 1 to be tested. The distance of the measuring surface 200 is equal to the distance from the imaging attack 12 to the beam splitter 13 plus the distance from the beam splitter π to the to-be-shoulder 200 of the object to be tested 1 ,, plus the imaging system! The spatial filtering is performed by the pinhole 14, and stereoscopic imaging of the object to be tested 1 〇〇 can be performed. Referring to FIG. 2, the imaging system 2 of the confocal microscope is a design of a pinhole rotating multi-spot optical path, and includes a light source module 21, a placing table 22 for holding the object to be tested 100, and a light source module. a first lens group 23 between the group 21 and the placement table 22, an imaging device 24 that receives light reflected from the object 1 to be imaged, and an image forming device 24 disposed between the light source module 21 and the imaging device 24. The second lens group 25. The light source module 21 has a light source 211 that emits white light, a pinhole array 213 having a plurality of pinholes 212 for passing light, and a δ is placed on the illuminating light source 211 and the pinhole disk 213. a microlens array 215 having a plurality of microchannels 214 for transmitting light, and a beam splitter 216 disposed between the pinhole disk 213 and the micro disk 215 and capable of splitting light. The pinhole disk 213 and the micro disk 215 are rotatable relative to each other, so that the light emitted by the light source 211 is selectively passed through the micro 稜鏡 214 of the portion 1279580 of the micro disk 215, and the pinhole disk 213 A portion of the pinhole 212 corresponding to a portion of the micro-twist 214 of the micro-disk 215 is formed in a plurality of independent beams to travel in the direction of the placement table 22 on which the object to be tested 100 is placed. The first lens group 23 has at least one convex lens for focusing the passing light to a predetermined area of the surface of the object to be tested 100; the second lens group 25 has at least one convex lens for focusing the passing light to the imaging device 24; The imaging device 24 can receive light focused by the second lens group 25 to create an image. When the imaging system 2 of the confocal microscope actually creates a stereoscopic image of the object to be tested, the light source 211 of the light source module 21 emits white light, and the white light passes through the pinhole disk 213 and the micro disk 215 which are rotated relative to each other. Because it must pass through the corresponding pinhole 212 and the micro-inch 214 at the same time, it is selectively divided into a plurality of beams; the beams pass through the first lens group 23 and are respectively focused to a predetermined area of the object to be tested, and reflected. The trailing edge of the original light path passes through the pinhole 212 and passes through the beam splitter 216 in the light source module 21 to change the direction of travel to the direction of the first lens group 25, and is respectively focused after passing through the second lens group 25. To the imaging device 24, after the imaging device receives the reflected beam of each region of the object to be tested 100, an enlarged stereoscopic image of the whole @i(9) to be tested is established. The image forming system 2 of such a confocal microscope mainly uses the matching and combining of the pinhole disk 213 and the micro disk 215 which are rotated relative to each other in the light source module 21, and at the same time, multi-point imaging is performed, so Different artifacts _, or the resolution of the image to be created, must also match the pinhole disk 213 of different pinholes. The more complicated the appearance is, or the more the resolution is the same as the needle of the pinhole disk 213 The aperture of the aperture 212 must also be smaller; while at the same time 1279580, the intensity of the white light provided by the source 211 must also be correspondingly enhanced for the pinhole disk 213 of different pinhole apertures to provide light sufficient to reflect the focused light intensity for the imaging device 24 Receive and create images. Therefore, the imaging system 2 of such a confocal microscope has practical use, and has to replace the pinhole disk 213 and the light source 211 in the light source module 21 in response to different measurement conditions and required measurement results. Components, so the use of the measurement is less flexible, and must be prepared at a higher cost of purchase of various components, in order to meet the needs of different measurement needs to be improved 发明 [Summary] Therefore, the object of the present invention is A confocal microscopic imaging system is provided which is capable of measuring a variable-variable light source image that uses a large elasticity and can quickly establish a stereoscopic image of an object. Thus, the present invention provides a confocal microscopic imaging system with a variable source image comprising a light source module, a filtered polarization conversion device, an optical device, a piezoelectric platform, a + lens group, and a digital position. The light source module has a light source, a digital microlens through which the light emitted by the light source passes, and a control that can programmatically control the microlens to pass the light emitted by the light source into a predetermined pattern and travel in a first direction. The unit 〇 the filtering polarization conversion device causes the passing light to be a polarized light having a predetermined wavelength range that continues to be directed toward the first square, for the light of the predetermined pattern emitted from the light source module to pass through Traveling in one direction! 27958〇 first—polarized beam. Position change: the polarization beam splitting device makes the direction of the electric field vibration of the polarized light passing through and the opposite direction = and makes the polarized light with different directions of the electric field vibrate toward different directions, respectively, for the first polarized light beam to pass through and then continue to A second polarized beam that travels in a first direction. The hai piezoelectric platform is configured to receive and drive the displacement of the object to be tested. The lens-group is disposed on the polarizing beam splitting device and the piezoelectric platform and has at least a convex lens, and the second polarizing beam can be surfaced Focusing on the surface to be tested of the object to be tested, and when the second polarization 1 is fully focused to the surface to be measured, the second polarized beam is reflected by the surface to be measured into a third polarization The light beam is opposite to the first direction and passes through the polarization beam splitting device to form a fourth polarized light beam traveling in a second direction. The digital imaging device is configured to receive the fourth polarized light beam and receive the digitally polarized light beam in a digital manner. The fourth polarized light beam is established as an enlarged image of the surface to be tested of the object to be tested. [Embodiment] The foregoing and other technical contents, features and effects of the present invention are in conjunction with a preferred embodiment of the following reference drawings. In the detailed description, the present invention will be clearly described. Before the present invention is described in detail, it is noted that in the following description, similar elements are denoted by the same reference numerals. A first embodiment of a confocal microscopic imaging system 3 for tunable variable source images includes a light source module Η, a wave polarization 8 1279580 conversion I set 32, a polarization splitting device 33, a piezoelectric platform 34, and a The first lens group 35 and the digital imaging device 36. The light source module 31 has a light source 311, a digital microlens 312 through which the light emitted by the light source 311 passes, and a programmable control of the microlens 312. The light emitted by the remote light source 311 passes through the control unit 313 which is in a predetermined pattern and is pushed in a first direction. The control unit 313 can establish the resolution of the image according to the appearance complexity of the object 1 实际 or the actual resolution required to establish the image. The light emitted by the control light source 311 passes through a light spot pattern having a smaller cross-sectional area and a denser arrangement as shown in FIG. 4, or a larger cross-sectional area and a denser arrangement as shown in FIG. The filter polarization conversion device 32 causes the passed light to be a polarized light having a predetermined wavelength range that continues to travel in the first direction, and has a light beam for sequentially traveling through the first direction. 3 21 (m (four) and - polarized light is converted to 322 (PS c〇nverter), the filter 321 can filter out stray light and only pass the light of the pre-twist wavelength, and the polarizing converter 322 will pass the filter 321 The light of the predetermined wavelength range is converted into p〇iarized light, and the light of the predetermined pattern emitted from the remote light source module 31 passes through the first polarized light beam which travels in the first direction. In the example, the multiplexer passes only green light having a wavelength of 550 nm, and the polarization converter 322 converts the green light into p-type line polarized light (p linear_p〇larized Hght) so that the first-polarized light beam is in a predetermined pattern. The p-type line polarized light having a wavelength of 55 〇 nm. The polarized light splitting device f 33 causes the direction of the electric field vibration of the polarized light passing through and the phase change ki to make the polarized light having different electric field vibration directions travel toward different directions of 9 1279580, respectively. There is a polarizing beam splitter 331 (polarization beam splitter) and a quarter wave plate 332 (λ/4 plate) for sequentially passing the polarized light traveling in the first direction, and the polarized light splitting isolator 331 is limited Electric field vibration directions are orthogonal to each other The two polarized lights respectively travel in a second direction that is different from the first direction in the first direction (here, the first and the two sides are perpendicular to each other as an example), and the quarter wave plate 332 will face The linearly polarized light traveling in the first direction is converted into a circular p〇iarized light that continues to travel in the first direction, and the circularly polarized light traveling in the opposite direction is converted into a continuous anti-reverse The line traveling toward the first direction is polarized, and the first polarized beam is passed through to form a second polarized beam (left-handed circularly polarized light) that continues to travel in the first direction. The piezoelectric platform 34 is used for receiving the object to be tested, and can drive the object to be tested 100 for three-degree spatial displacement in a nanometer step. The first lens group 35 is disposed between the polarization beam splitting device 33 and the piezoelectric platform 34, and has at least one convex lens, and the second polarized light beam can be globally focused to the object to be tested in the form of a surface. One of the surfaces to be tested is 2 〇〇. The one-child digital imaging device 36 includes a photo-coupled camera 361 (CCD camera) that can receive light and image, and an arithmetic unit 362 that can process the image formed by the photoelectric coupling camera 361 for receiving the first a fourth polarized light beam that is totally focused on the plane to be measured and that is reflected and travels in the second direction (related changes in the direction of travel, phase, direction of vibration of the electric field, etc.) And the received fourth polarized light beam is digitally established as an enlarged image of the to-be-measured surface 2〇〇 of the object to be tested. The confocal microscopic imaging system 3 of the adjustable variable light source image of the present invention is actually 10 1279580. When the stereoscopic image of the object to be tested 100 is established, the resolution of the enlarged image is first modified by the control unit 313 of the light source module 31. The image of the digital microlens 312 is such that the light emitted by the light source 311 passes through a predetermined pattern (the resolution is higher, the smaller the cross-sectional area of each beam, and the more dense the arrangement is), the first direction is performed. After the light passes through the filter 321 of the filter, wave polarization conversion device 32 and the polarization converter 322, the first polarized beam of the p-type line polarized light having a wavelength range of green light continues to travel in the first direction and passes through the polarization. When the polarization splitting isolator 331 of the spectroscopic device ,, since the first polarized beam is a 线-type line polarized light, it continues to travel in the first direction and passes through the quarter-wave plate 332, and passes through the quarter-wave #332. The second polarized light beam that is converted into a circularly polarized light (left-handed auroral light) continues to travel in the first direction. When the second polarized light beam continues to travel in the first direction and passes through the first lens group: 5, it is globally focused to one of the surfaces to be tested 1 ,, at which time the second polarized light beam is to be measured. The fine reflecting surface is reflected as a third, and the vibrating beam travels along the original optical path in the opposite direction - since the third polarized light beam is reflected by the second polarized light beam, the third polarized light beam is inverted from the second polarized light beam. Round biased aurora (right-handed aurora). When the third polarized light beam continues to pass through the quarter-wave plate 332 of the polarization splitting beam 33, the fourth polarized light beam converted into the s-shaped line polarized light by the quarter-wave plate continues to be reversed. The first direction travels and is restricted in switching while passing through the polarization splitting isolation 331 to travel in a second direction perpendicular to the first direction. When the fourth polarized light beam continues to travel in the second direction, it is received by the optical fiber camera 361 of the digital imaging 1279580 device 36, and the one to be tested surface 200 of the object to be tested (9) establishes an enlarged image. And then cooperate with the "platform 34 for perpendicular to the object to be tested! (9) The depth step of the one to be tested surface 200 can sequentially create an enlarged image of the different to-be-measured surfaces of the plurality of objects to be tested (10), and then the arithmetic unit 362 The magnified stereo image of the object to be tested can be obtained quickly and correctly. Referring to Figure 6, the second embodiment of the confocal microscopic imaging system 3 of the present invention is a similar to the confocal microscopic imaging system 3 described above. The difference is only in the polarization beam splitting device 33. Between the digital imaging device 36, a second lens group 37 having at least a convex lens is disposed to image the fourth polarized light beam emitted from the polarization beam splitting device 33 in the form of a surface. The device's photo-electrical camera is received to create a sharper magnified image. According to the above description, the confocal microscopic imaging line 3 of the adjustable variable light source image of the present invention mainly generates a spot scan of different patterns by the light source module 31 according to the required measurement requirements, and cooperates with The chopper flat vibration 4 is disposed at 32 and the polarization beam splitting device 33 to modulate the traveling light and the optical path, and optimally globally obtains the best placement of one of the to-be-measured surfaces of the object to be tested 1 :: In conjunction with the piezoelectric platform 34, the nanometer step is gradually moved to obtain the largest image of the majority of the test 200 to be tested, and the digital imaging device 36 is operated by the arithmetic unit 362. And the addition of βρ can quickly establish the complete appearance of the object to be tested 100. 12 I279580 Compared with the imaging system 2 of the confocal microscope designed by the conventional pinhole carousel multi-spot optical path, the present invention has the following advantages. : 1 · It can be used to measure the size, brightness, pattern, etc. of the light source module by using the programmable digital lens 3 j 2 to meet the requirements of different measurement conditions. 2·Using a filtered polarizing device 3 2 The modulated traveling light with the polarization beam splitting device 33 is a pre-turned wavelength polarized light and a traveling optical path, which effectively suppresses stray light and reduces energy loss during traveling, thereby improving the overall system brightness, thereby effectively establishing a clear image. 3. Using the stylized and digitized light source module 31 and the imaging device 36, the micro-step displacement of the I-level port 34 is matched to achieve multi-spot planar scanning and global focus imaging, and can be quickly and cost-effectively established. The high-precision two-dimensional stereo image of the object is in line with the market demand for nanometer measurement. △ I*隹 The above is only the preferred embodiment of the present invention, when not: The scope of the invention, that is, the simple equivalent changes and modifications made by the patent application scope and the content of the invention are still within the scope of the invention patent. Unthinking, illustrating the basic 疋 diagram of the imaging system of the confocal microscope, illustrating the imaging system of the confocal microscope designed for pinhole rotation design; Qiu Cui ^ / n intended to illustrate the invention - a variable variable light source Image * First, page micro-imaging system - first preferred embodiment; 13 1279580 Figure 4 is a schematic diagram showing a light source module of the imaging system of Figure 3 emitting light; Figure 5 is a schematic view A light source module of the imaging system of 3 emits another pattern of light; and FIG. 6 shows a state of the image system of the adjustable light source image of the present invention. A good example.
14 1279580 【主要元件符號說明】 100 待測物 3 200 待測面 31 1 成像系統 311 12 成像裝置 312 13 分光鏡 313 14 針孔 32 2 成像系統 321 21 光源模組 322 211 光源 33 212 針孔 331 213 針孔盤 332 214 微棱鏡 34 215 微棱鏡盤 35 216 分光鏡 36 22 放置檯 361 23 第一透鏡組 362 24 成像裝置 37 25 第二透鏡組 共焦式顯微成像系統 光源模組 光源 數位式微鏡片 控制單元 濾波偏振轉換裝置 濾光鏡 偏光轉換器 偏振分光裝置 偏振光分光隔離器 四分之一波片 壓電平台 第一透鏡組 數位式成像裝置 光電耦合攝影機 運算單元 第二透鏡組 1514 1279580 [Description of main component symbols] 100 DUT 3 200 Surface to be tested 31 1 Imaging system 311 12 Imaging device 312 13 Beam splitter 313 14 Pinhole 32 2 Imaging system 321 21 Light source module 322 211 Light source 33 212 Pinhole 331 213 pinhole plate 332 214 microprism 34 215 microprism disk 35 216 beam splitter 36 22 placement table 361 23 first lens group 362 24 imaging device 37 25 second lens group confocal micro imaging system light source module light source digital micro lens control Unit Filter Polarization Conversion Device Filter Polarization Converter Polarization Beam Splitter Polarization Light Splitting Isolator Quarter Wave Plate Piezoelectric Platform First Lens Group Digital Imaging Device Optocoupler Camera Operation Unit Second Lens Group 15