1277738 九、發明說明： 【發明所屬之技術領域】 ，發明係關於使用於如半導體積體電路等的平板狀受 檢測物通電測試方面之探針。 【先前技術】 二導體積體電料的平板狀受檢㈣，必須施行其是 付口規格的通電測試。此種通電測試之實施，係採用且 =二緊壓受檢測物電極的複數接觸器(即探針)而構成 探針塊、探針單元等電氣連接褒置。此種電氣 接。、，係用來使受檢測物的電極與測試機形成電氣連 線所=電氣連接裝置所使用的探針包含：由導電性金屬細 =Γ二式探針’形成板狀的板狀探針，以及使用探 的探針要ΛΓ緣片(膜)一面的配線上形成突起電極而構成] 曰]銥針要件式探針等。 針.11 ^針包含：由導電性金屬板所製得之單一板型探 電铲對光阻施行曝光與蝕刻、並對經蝕刻的部位施行 施前述處们次以上的積層式探針等。 等的：ί::4形式的探針均是懸臂狀的支撐於如配線基板 尖緊壓:=二=:尖緊[:於受檢測物的電極。若針 斜 寬極上，過負％ (overdrive)便作用於探 十使探針因彈性變形而彎曲。 2連社邱種板狀奴針包含第1與第2臂部、第1與第 、、°。、針尖部、及安襄部；其中，朝第丨方向延伸之 1277738 該第1與第2臂部係在第2方向上相間隔；該第ι( …1M系H亥第丨與第2 f部的前端部（基端部）；該針小 係接續於笫1連么士部的繁9古6 接…之一侧；該安裝部係 接，，於弟2連結部的第2方向上另-側(專利文獻υ。 專利文獻1:W〇2〇〇4-1〇2207號公報A1 上述習知探針巾，料料包含有：連接於第1連結部 的基座部'以及—體連接於該基座部的接觸部。 上述探針係將安裝部安裝於適當的支撐構件，並 =的支撐於此切構件上，在此狀態下將針尖緊壓於= 測，電極上。藉此，過度的負荷便將作用於探針，使探^ 的第1與第2臂部因彈性變形而彎曲。 =，習知探針若產生過負荷，接觸部會發生如折損 鰥都〇 奴針的情形，因為接 蜀π非“、，接觸部的機械強度差，因過負 連接於基座部的部位發生# 妾觸。p 旦^ — 折知狀況，所以頗難增加過負苻 里弟1與第2臂部產生較大的彈性變形。 、。 如上述’因為若無法增加過負荷量，便無法烊加 對党檢測物電極的緊壓力 曰、·十矢 電極盘針.一……）因而便無法將受檢測物 杜/、打大瓜力乂凡好的電氣連接狀態5且必須 上高精度的對準於針尖位置。έ士土矛^々向 檢査。 υ將導致無法進行正確的 【發明内容】 方向延伸的 本I明之目的在於防止接觸部遭受損傷 本發明的通電測試用探針係具備有··朝第 1277738 臂區域；以及接續於該臂區域之第2 上的一側之針尖區 。（人第1方向交叉） 的方向為厚度方二’板狀（以與第1及第2方向交叉 臂區域的基座部：二十尖區域係包含有··接續於 觸部係包含线· 該基部且由上部分的基部’·以及連接於 本於明^述第2方向突出的突出部。 是，因：接:、鉍針，突出部會緊屢於受檢測物電極上。作 為接觸部的基部係形成基座部的—部分，習 r針，接觸部與基座部的接觸面積較大1以，= 接觸部遭受損傷。 方止 卞=區域亦可包含有:在上述第2方向上相間隔朝上 :弟方向延伸的第1與第2臂部；以及將該第i盘第2 臂部的前端部（基端部）相連接的第U第2)連結部；上述針 尖區域亦可一體接續上述第1連結部或上述第2臂部而形 成0[Brief Description of the Invention] [Technical Field] The invention relates to a probe for use in a power-on test of a flat object such as a semiconductor integrated circuit. [Prior Art] The flat-plate type of the second-conducting volume of the electric material is inspected (4), and it must be subjected to a power-on test of the specification. Such an energization test is carried out by using a plurality of contactors (i.e., probes) that are pressed against the object electrode to form an electrical connection such as a probe block or a probe unit. This kind of electrical connection. Used to electrically connect the electrode of the test object to the tester. The probe used in the electrical connection device includes a plate-shaped probe formed by a conductive metal thin=Γ2 probe. And the probe to be probed is formed by forming a bump electrode on the wiring on one side of the edge sheet (film)] 曰] a needle probe or the like. The needle 1111 includes a single plate type shovel made of a conductive metal plate for exposing and etching the photoresist, and applying a laminated probe or the like to the etched portion. Etc.: The probes of the ί::4 form are cantilever-like supports such as the wiring substrate. The pinch is pressed: = two =: tightly [: the electrode of the object to be tested. If the needle is inclined over the wide pole, overdrive (overdrive) acts on the probe to bend the probe due to elastic deformation. 2 The company's plate-shaped slave needles include the first and second arms, the first and the second, and the °. a needle tip portion and an ampoule portion; wherein, 1277738 extending in the direction of the second direction, the first and second arm portions are spaced apart in the second direction; the first dimension (1M is H Haidi and the second f The front end portion (base end portion) of the portion; the small needle system is connected to one side of the 99 ancient 6 joint of the 么1 连 士士部; the mounting portion is coupled, and the second direction of the connecting portion of the mate 2 The other side of the above-mentioned conventional probe towel, the material includes: a base portion connected to the first connecting portion and - The body is connected to the contact portion of the base portion. The probe is attached to the appropriate support member by the mounting portion, and is supported by the cutting member. In this state, the needle tip is pressed against the electrode. As a result, an excessive load acts on the probe, and the first and second arm portions of the probe are bent by elastic deformation. = If the conventional probe is overloaded, the contact portion may be damaged. In the case of a slave needle, since the contact π is not ", the mechanical strength of the contact portion is poor, and the contact is caused by the excessive connection to the base portion. p 旦 ^ - Folding condition, Therefore, it is quite difficult to increase the elastic deformation of the negative armor 1 and the second arm. As above, because if the overload cannot be increased, the pressure on the electrode of the party detector cannot be increased. Ten-position electrode disc needle. One...) Therefore, it is impossible to place the object to be tested, and to make a good electrical connection state 5 and to be aligned with the needle tip position with high precision.向 检查 υ 无法 无法 【 【 】 】 】 】 】 方向 方向 方向 方向 方向 方向 方向 方向 方向 方向 方向 方向 方向 通电 通电 通电 通电 通电 通电 通电 通电 通电 通电 通电 通电 通电 通电 通电 通电 通电 通电 通电 通电 通电 通电 通电 通电 通电 通电 通电 通电 通电 通电The direction of the needle tip region on the second side of the arm region (the direction in which the person is crossed in the first direction) is the thickness of the two-plate shape (the base portion of the cross arm region in the first and second directions: the twenty-tip region) The base portion includes a base portion of the upper portion and a protruding portion that is connected to the second direction in the second direction. The part will be on the electrode of the test object. The base of the contact portion forms a portion of the base portion, and the contact area of the contact portion with the base portion is larger by one, and the contact portion is damaged. The square stop 卞 = area may also include: The first and second arm portions extending in the two directions in the two directions, and the U-th second connecting portion that connects the distal end portion (base end portion) of the second arm portion of the i-th disk; The needle tip region may be integrally connected to the first connecting portion or the second arm portion to form a 0
…本發明的探針係可更包含有：在上述第2連結部的上述 第2方向上朝另一側接續的延長區域；以及在該延長區域 的上述第2方向上朝另—側接續的安裝區域。 上述接觸區域的上述基部可具有L字狀、u字狀、τ 子狀或Υ字狀等形狀。上述接觸區域的上述基部亦可形成 上述基座部表面的一部分。此外，也能改成將上述接觸區 域的上述基部埋入於上述基座部中。 上述接觸部可由高硬度金屬材料所形成，上述臂區域 可由高韌性金屬材料所形成。 7 1277738 【實施方式】 以下，第1圖中，將左右方向設為「 昂1方向J ，將 下方向設為「第2方向」’將垂直於紙面的方向設為「第 3方向」，該等方向依承接待通電受檢測物的測試機夹頭 而異。 參照第1圖與第2圖所示，探針1〇係包含有··朝第^ 方向(左右方向)延伸的臂區域12;與臂區域η的前" 下緣呈一體接續的針尖區域14;與臂區域12的基端：： 緣呈-體接續的延長區们6;以及與延長區域“土二 一體接續的安裝區域i 8。 、、主 w係包含有:在第2方向(上下方向)上相間隔 朝弟1方向延伸的第1與第2臂部20,22 ;以 與第2臂冑2〇,22分別連結於前端部與基端部的第上 2連結部24,26。 ，、弟 及第=?4’其具備有:與第2臂部22前端部下緣部 :弟i連、，“ 24下緣部呈一體接續的基座部Μ;以及從 f座部28下緣部突出的接觸部3〇;且係從第i Μ W端側的下緣部朝下方突出。 σ σ 、延長區域16、安裝區域18及基座部28係 、-f相同厚度尺寸的一體狀板形，探針i 〇便形 成整體平坦的板狀探針。 相對於此，接觸部3()係如第2 B所示 基座部28 —部分的Μ 匕3有.形成 部28朝下方突出、:: 及接續於基部32且從基座 出的犬出部34;且整體具有曲柄狀截面形 8 1277738 狀。基部32係具有L字狀截面形狀 接觸部30在下端且右土 /丄邛2δ中。 而有朝下的前端面。此前端面在圖千 例子中，係具有緊屋於受檢測物，、 除料尖r為面狀外，也能改為尖銳的針i 觀看苐1圖所示，左， 長於左右, 右方向的基座部28寬度尺寸將較 係從第…部以…寬度尺寸。所以，基座部28 緣部。作f下緣部起延伸至第2臂部22前端側下 > ^ 將左右方向的基座部28寬度尺寸 為與左右方向的第1連結部24寬度尺寸相同數值。 ，右方向的延長區域16寬度尺寸係與左右方向的第2 、° °卩26寬度尺寸相同。但 區域I6t^w… IT將左右方向的延長 、又、，5又為與左右方向的第2連結部26寬产 尺寸為不同値。 足度 m· 1木/十1〇的素材可舉例如：錄磷合金（Ni~P)、鎳鎢合全 =，)、碟青銅 -:)、及_銘合金（Pd_Ni_c。）等導電性金屬材料。 成。 人/、他部位12，14，16,28為不同的材料製 :者的情況’接觸部3〇可由如铑般的高硬度金屬材料 的金屬二其他部位12，14，16,28則可由如録般具有高款性 7，枓所形成。藉此，即便對探針10作用較大的過 狀二仍可防止臂區域12大幅撓曲導致探針10遭受破損 9 1277738 再者右彳木針1 0整體由相同、^ ^ 3〇之外其餘部位均 /斤衣成、或除接觸部 探針1 〇。 〇 衣成的話，便可輕易的製造 探針10係組裝於如探針卡的電 氣連接裝置在專〗φ 〃連接U上。此種電 此種電U Μ 中已有記載，相關詳細説明省略。 支樓於安裝基板上。 在女裝部18以懸臂狀 狀-彳1G係在懸臂狀支撐於電氣連接裝置之安f Α板的 下，將接觸部針尖緊遷於受檢測物電極上基板的 2尖緊壓於受檢測物電極上，過負 以針广使臂部20,22彈性變形而彎曲。字作用The probe system of the present invention may further include: an extended region that is continuous to the other side in the second direction of the second connecting portion; and a further one that is continuous toward the other side in the second direction of the extended region Installation area. The base portion of the contact region may have a shape such as an L shape, a U shape, a τ sub shape, or a U shape. The base portion of the contact region may also form a part of the surface of the base portion. Further, it is also possible to embed the base portion of the contact region in the base portion. The contact portion may be formed of a high hardness metal material, and the arm region may be formed of a high toughness metal material. 7 1277738 [Embodiment] Hereinafter, in the first drawing, the left-right direction is set to "an 1 direction J, a lower direction is set to a "second direction"", and a direction perpendicular to a paper surface is referred to as a "third direction". The direction of the test machine varies depending on the test machine chuck that receives the test object. Referring to Figs. 1 and 2, the probe 1 includes an arm region 12 extending in the second direction (left-right direction), and a tip region continuous with the front edge of the arm region η. 14; with the base end of the arm region 12:: the edge-to-body extension zone 6; and the extension zone "the soil two integrated connection area i 8 . , , the main w system includes: in the second direction (the up-and-down direction) the first and second arm portions 20, 22 extending in the direction of the younger brother 1 and the upper second connecting portion 24 connected to the distal end portion and the proximal end portion, respectively, with the second arm 胄 2 〇 22 26, , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The contact portion 3 that protrudes from the lower edge portion of the portion 28 protrudes downward from the lower edge portion of the i-th W end side. The σ σ , the extended region 16 , the mounting region 18 , and the base portion 28 are formed in a single plate shape having the same thickness dimension as -f, and the probe i is formed into a flat plate probe as a whole. On the other hand, the contact portion 3 () is a portion of the base portion 28 shown in FIG. 2B. The formation portion 28 protrudes downward, and: and the dog that is connected to the base portion 32 and is discharged from the base The portion 34 has an overall crank-shaped cross-sectional shape of 8 1277738. The base portion 32 has an L-shaped cross-sectional shape. The contact portion 30 is at the lower end and the right soil / 丄邛 2δ. There is a front side facing down. In the previous example, in the case of the figure, it is tightly attached to the object to be tested, and the tip of the material is r-shaped. It can also be changed to a sharp needle i. See the figure ,1, left, longer than left, right. The width of the base portion 28 will be greater than the width of the ... portion. Therefore, the base portion 28 has an edge portion. The lower edge portion of the f extends to the front end side of the second arm portion 22 > ^ The width of the base portion 28 in the left-right direction is the same as the width dimension of the first connecting portion 24 in the left-right direction. The width of the extended region 16 in the right direction is the same as the width of the second, °, and 26 in the left and right directions. However, the area I6t^w...IT extends the left-right direction, and the width of the second connection portion 26 in the left-right direction is different. The material of the degree m·1 wood/ten 1 〇 can be, for example, a conductive alloy such as a phosphorus alloy (Ni~P), a nickel-tungsten alloy, and a metal alloy (Pd_Ni_c). metallic material. to make. The person/the other part 12, 14, 16, 28 is made of different materials: the case of the 'contact portion 3' can be made of a metal such as a high-hardness metal material such as a crucible, other parts 12, 14, 16, 28 can be Recorded with a high degree of money, 7 formed. Thereby, even if the probe 10 is subjected to a large excessive shape, the arm region 12 can be prevented from being greatly deflected, thereby causing the probe 10 to be damaged. 9 1277738 Further, the right eucalyptus needle 10 is entirely the same, ^^3〇 The rest of the area is / kg, or in addition to the contact probe 1 〇. 〇 If it is made, it can be easily fabricated. The probe 10 is assembled on an electrical connection device such as a probe card on the special φ 〃 connection U. Such an electric such U Μ has been described, and the detailed description is omitted. The branch is on the mounting base. In the women's section 18, the cantilever-like 1G is supported in the cantilever shape under the mounting plate of the electrical connecting device, and the tip of the contact portion is pressed against the substrate on the substrate of the object to be tested. On the object electrode, the arm portions 20, 22 are elastically deformed and bent over the needle. Word function
八：？ ’因為接觸部30的基部32係形成基座部2 刀，相較於習知探針，接觸 〇P 積較大n 接觸。卩3G與基座部28間的接觸面 的桩 1可防止發生接觸部30從基座部28上剝落等 的接觸部30折損狀況。 別洛專 ，將基部32埋設於基座部28中，亦可改 所不探針40，加女技艇如 乐3圖 .r , 大接觸。卩30的基部42,使基部42形成 基座部28側面與下面的一部分。 成 形成^二所，示探針44係將接觸部3G的基部46截面形狀 /子，並將接觸部30的截面形狀形成Y字狀。基 纟埋叹於基座部28中。此探針44亦將達成如同： ，十1 0相同的作用效果。 一:等基邛46埋没於基座部28中，亦可改為如第$圖 48加大接觸部30的基部50，使基部50形^ 10 1277738 基座部28側面與下面的一部分。 第6圖所示探針μ係將技 形成T字狀，蔣垃， 妾觸邛30的基部54截面形狀 〜成子狀將接觸部30的截面形仙f Α、π〜 M ^ a . 面形狀形成丁字狀。基部54 係埋°又於基座部28中。此探針 土 ,Ζ亦將達如同摄1 Π ；t曰 同的作用效果。 咬Νί木針10相 參照第7圖至第1 Θ在十對具有第1圖盘第2同所千 構造的探針10之萝 CI/、弟2圖所不 、， n仏方法一例進行説明。 首先’如第7(A)圖所示，在 七一^ 川叮丁在不銹鋼製板狀基材6〇其 中面上，利用濺鍍形成金屬層62(鎳層）。 /、人’如弟7(B)圖所示， 川尸/1 丁將先阻64塗佈於金屬層62 上0 ^著’如第7(C)圖所示’對光阻“施行曝光與顯影， 先阻64上形成相對應於臂區域12、延長區域16、安 I區域18及基座部28 一部分的凹處 接著，如第7(D)圖所示 _金屬材料的電鍍，在凹處66 域1 6、安裝區域1 8及基座部 其次，如第7(E)圖所示， 用减鍍形成金屬層70(鎳層）。 其次，如第7(F)圖所示， 上。 藉由採用鎳鉻合金等高韌性 形成作為臂區域12、延長區 28 一部分的金屬層68。 在光卩且64與金屬層68上利 將光限72塗佈於金屬層7〇 其次，如第8(A)圖所示，對光阻72施行曝光與顯影， 俾在光阻Μ中形成凹處74。 其次，如第8(B)圖所示，利用電鍍在凹處74中形成 11 1277738 爾後將去除的犧牲層7 6。 將光阻72去除而裸露出金 塗佈於金屬層7〇 對光阻72施行曝光與顯影， 其次，如第8(C)圖所示 屬層70與犧牲層76。 其次，如第8(D)圖所示 與犧牲層76上。 其*，如弟8(E)圖所示， ，心呢仃曝 皁在光阻78上形成對應於接觸部3〇的凹處肋。 丨其次，如第8(F)圖所示，藉由採用如 屬材料的電穿，在凹卢s 〇由 、焉硬度性金 T十曰7 %鍍，在凹處8〇中形成作 82。 接觸°卩30的金屬層 其次，如第9(A)圖所示，將光 μ „ 78去除而裸霡屮j 屬層70382與犧牲層76。 出至 其次，如第9(B)圖所示，將光阻 與犧牲層76上。 塗佈於金屬層7M2 其次’如第9(C)圖所示，對井阳 ,¾ A 4, RZL rb 4施行曝光與顯影， 而在先阻84中形成對應臂區域 θ 。 延長區域1 6、安奘闰 或8及基座部28其餘部分的凹處％。 ° 其次，如第9(D)圖所示，藉由 屬好山、，。^ 用錄•鉻等南韋刃性金 镯何啊的龟鍍，在旧處86中形认扯 域16、—继r > 紙區域12、延長區 一 女裒區域18及基座部28 JL&i 甘A 丨其餘部分的金屬層88 〇 其:人’如第9⑻圖所示’將 裸露出金屬層7M2與犧牲層76β 去除’而 其次，如第10(A)圖所示，利用 部分與犧牲層76。 j用餘刻去除金屬層72 一 12 1277738 其次，如第10(B)圖所示，將剩餘的光 裸露出金屬層62。 64去除，而 部八其第1G(C)圖所示，利用㈣去除金屬層62 -口15刀 而稞露出基材60。 其次，如第10(D)圖所示，從基材6〇上 6^68,7〇,82及88分離開。藉此便製得探針1〇。 - 在上=製造方法中’金屬…7。係為提 ，及88的附著性而所採用，所以依金屬層68 82及88 所使用的金屬材料亦可省略。 ， 其他的探針4G，44,48及52亦均如同上述，採 技術先鎮技術、微影技術、触刻技術等便可製得。又 本^明並不僅限於上述實施例，在不脫逸其主旨的前 如下，均可施行各種變更。 【圖式簡單說明】 51圖係本發明探針之第1實施例的前視圖。. 第2圖係第1圖所示探針的右側視圖。 第3圖係本發明探針之第2實施例的右側視圖。 第4圖係本發明探針之第3實施例的右側視圖。 第5圖係本發明探針之第4實施例的右倒視圖u 第6圖係本發明探針之第5實施例的右側視圖。 第7(A)〜(F)圖係第1圖所示探針之製造方法-實施例 的步驟圖。 第8(A)〜(F)圖係接續第7圖的步驟説明圖。 第9(A)〜(E)圖係接續第8圖的步驟説明圖。 13 1277738 第10(A)〜(D)圖係接續第9圖的步驟説明圖。 【主要元件符號說明】Eight:? Since the base portion 32 of the contact portion 30 forms the base portion 2, the contact 〇P product has a larger n contact than the conventional probe. The pile 1 of the contact surface between the 卩3G and the base portion 28 can prevent the contact portion 30 from being peeled off from the base portion 28 by the contact portion 30 from being broken. In the case of Belo, the base 32 is buried in the base portion 28, and the probe 40 can be changed, and the female skill boat is like a music figure. The base portion 42 of the crucible 30 is such that the base portion 42 forms a portion of the side surface and the lower surface of the base portion 28. The probe 44 is formed such that the base portion 46 of the contact portion 3G has a cross-sectional shape/subsection, and the cross-sectional shape of the contact portion 30 is formed into a Y shape. The base is buried in the base portion 28. This probe 44 will also achieve the same effect as: One: the base 46 is buried in the base portion 28, and the base portion 50 of the contact portion 30 may be enlarged as shown in Fig. 48 such that the base portion 50 is formed with a side portion and a lower portion of the base portion 28. The probe μ shown in Fig. 6 is formed into a T-shape, and the cross-sectional shape of the base portion 54 of the 垃 30 妾 30 is formed into a sub-shape. The cross-sectional shape of the contact portion 30 is f Α, π 〜 M ^ a. Formed in a T-shape. The base 54 is embedded in the base portion 28. This probe soil, Ζ will also be as good as 1 Π; t 曰 the same effect. The bite Ν 木 针 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 . First, as shown in Fig. 7(A), a metal layer 62 (nickel layer) is formed by sputtering on a surface of a stainless steel plate-like substrate 6? /, person's brother 7 (B) picture shows, Chuan corpse / 1 ding will apply 64 on the metal layer 62 0 ^ ' as shown in Figure 7 (C) 'exposure to the photoresist' With the development, a recess corresponding to the arm region 12, the extended region 16, the Am region 18, and a portion of the base portion 28 is formed on the first resistor 64, followed by plating of the metal material as shown in Fig. 7(D). The recess 66 is in the region 16. The mounting region 18 and the base portion are next, and as shown in Fig. 7(E), the metal layer 70 (nickel layer) is formed by subtractive plating. Next, as shown in Fig. 7(F) The metal layer 68 is formed as a part of the arm region 12 and the extension region 28 by using a high toughness such as a nichrome alloy. The light limit 72 is applied to the metal layer 7 on the pupil 64 and the metal layer 68. As shown in Fig. 8(A), the photoresist 72 is exposed and developed, and a recess 74 is formed in the photoresist 。. Next, as shown in Fig. 8(B), electroplating is used in the recess 74. The sacrificial layer 71 which will be removed after 11 1277738 is formed. The photoresist 72 is removed and the exposed gold is applied to the metal layer 7 to expose and develop the photoresist 72, and then, as shown in Fig. 8(C) 70 with a sacrificial layer 76. Next, as shown in Fig. 8(D) and the sacrificial layer 76. Its *, as shown in the figure 8(E), the core of the soap is formed on the photoresist 78 to form a concave corresponding to the contact portion 3〇. The ribs. Secondly, as shown in Fig. 8(F), by using the electrical wear of the genus material, it is plated in the concave s 〇 焉, 焉 hardness gold T 曰 曰 7 %, in the recess 8 〇 Formed as 82. The metal layer contacting the 卩30 is next, as shown in Fig. 9(A), the light μ „78 is removed and the smectic layer 70382 and the sacrificial layer 76 are bare. Next, as shown in Fig. 9(B), the photoresist is placed on the sacrificial layer 76. It is applied to the metal layer 7M2. Next, as shown in Fig. 9(C), exposure and development are performed on the wells, 3⁄4 A 4 , and RZL rb 4 , and the corresponding arm regions θ are formed in the precursors 84. Extend the area 16.6, the ampoule or 8 and the recess % of the rest of the base portion 28. ° Secondly, as shown in Figure 9(D), by virtue of the good mountain,. ^ Use the smear, chrome and other Nanwei blade gold bracelets, the tortoise plate, in the old 86, the shape of the domain 16, the following r > paper area 12, the extension area, a son-in-law area 18 and the base part 28 JL&i The rest of the metal layer 88 〇 : : : 人 人 人 人 人 人 人 人 人 人 人 人 人 人 人 人 人 第 第 第 第 第 第 第 第 第 第 第 裸 裸 裸 裸 裸 裸 裸 裸 裸 裸 裸 裸 裸 裸 裸 裸 裸 裸 裸 裸 裸 裸 裸Partially with the sacrificial layer 76. jRemoving the metal layer 72 with a residual 12-1277738 Next, as shown in Fig. 10(B), the remaining light is exposed to the metal layer 62. 64 is removed, and as shown in Fig. 1G(C), the substrate 60 is exposed by removing (4) the metal layer 62 - port 15 knife. Next, as shown in Fig. 10(D), 6^68, 7〇, 82 and 88 are separated from the substrate 6〇. Thereby, the probe 1 is produced. - In the upper = manufacturing method 'metal...7. It is used for the adhesion and the adhesion of 88. Therefore, the metal materials used for the metal layers 68 82 and 88 may be omitted. Other probes 4G, 44, 48 and 52 are also similar to the above, and can be obtained by adopting technology first town technology, lithography technology, and etch technology. Further, the present invention is not limited to the above embodiment, and various modifications can be made as follows without departing from the gist thereof. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 51 is a front view showing a first embodiment of the probe of the present invention. Figure 2 is a right side view of the probe shown in Figure 1. Fig. 3 is a right side view showing a second embodiment of the probe of the present invention. Fig. 4 is a right side view showing a third embodiment of the probe of the present invention. Fig. 5 is a right side view of a fourth embodiment of the probe of the present invention. Fig. 6 is a right side view showing a fifth embodiment of the probe of the present invention. 7(A) to (F) are diagrams showing the steps of the method for producing the probe shown in Fig. 1 and the embodiment. 8(A) to (F) are diagrams illustrating the steps of Fig. 7. The 9th (A) to (E) drawings are diagrams illustrating the steps in the eighth diagram. 13 1277738 Figures 10(A) to (D) are diagrams illustrating the steps in Figure 9. [Main component symbol description]
1〇,4〇,44,48,52 探針 12 臂區域 14 針尖區域 16 延長區域 18 安裝區域 20,22 臂部 24,26 連結部 28 針尖區域之基座部 30 針尖區域之接觸部 32,42,46,50,54 接觸部之基部 34 接觸部之突出部 60 不錢鋼製板狀基材 62,68,70,82,88 金屬層 64,72,78,84 光阻 66,74,80,86 凹處 76 犧牲層 141〇,4〇,44,48,52 probe 12 arm region 14 needle tip region 16 extension region 18 mounting region 20, 22 arm portion 24, 26 joint portion 28 base portion 30 of the needle tip region contact portion 32 of the needle tip region, 42,46,50,54 base portion 34 of the contact portion, the projection portion 60 of the contact portion is not made of steel plate-like substrate 62, 68, 70, 82, 88 metal layer 64, 72, 78, 84 photoresist 66, 74, 80,86 recess 76 sacrificial layer 14