1271516 九、發明說明： 【發明所屬之技術領域】 本發明是有關於一種微型檢測晶片，特別是指一種微 、 型酸驗值檢測晶片。 ， 【先前技術】 . 隨著微機電系統技術的進步，使的許多科技亦逐漸朝 向微型化發展，而利用微機電製程技術的最大特色在於所 產生之兀件或裝置可更輕薄短小。其中，在生物科技的應 鲁 肖方面，利用分子生物學、基因資訊及分析化學等原理， 並配合微機電製程所開發之生物晶片，因生物晶片中所具 有微流管道設計，使得用以供檢驗分析所需之檢體量可大 幅減少，因而可節省生物試劑與檢體的耗損，並可藉由將 整個檢測系統微小化之設計，來提高反應速率及增加精確 性與靈敏性，進而能突破傳統檢驗技術在效能上的發展瓶 頸，因此，各種檢測領域所需之微型檢測晶片的研究發展 已刻不容緩。 • 【發明内容】 因此，本1¾明之目的，即在提供一種用以快速檢體體 之酸鹼值的微型酸鹼值檢測晶片。 於是，本發明微型酸鹼值檢測晶片，適用於搭配一檢 體使用，並包含-水平基板、一水平疊接於該基板頂面並 與該基板相配合界定出一可供該檢體流動之令空流道的流 道成型板、一設置於該基板頂面而可用以檢測位於該流道 中之檢體的酉复驗值之電極單it，及“水平疊接於該流道成 5 1271516 型板頂面的氣室成型板。該流道成型板具有至少二間隔位 於該流道上方的彈性幫浦部，該氣室成型板則與該流道成 型板相配合界定出二分別涵蓋該等幫浦部且可分別被間歇 地灌注氣體，而使該等幫浦部分別往該流道彈性凹陷而擠 壓推送該檢體於流道中流動之氣室。 藉由流道成型板之該等幫浦段間歇地往該流道中彈性 凹陷的設計，而可使該檢體於該微流道中流動，並可透過 該位於該檢體流經之方向上的電極單元來檢測微量檢體之 酸驗值 【貫施方式】 有關本發明之前述及其他技術内容、特點與功效，在 以下配合參考圖式之二個較佳實施例的詳細說明中，將可 清楚的呈現。 在本發明被詳細描述之前，要注意的是，在以下的說 明内容中，類似的元件是以相同的編號來表示。 如圖1、2所示，為本發明微型酸鹼值檢測晶片之一第 一較佳實施例，適用於檢測一液態檢體（圖未示）之酸鹼 (pH )值，該檢體可以是尿液、血清、血液，或生化試劑 ’而在本實施例中，所採用之檢體為不同酸鹼值之試液。 该酸驗值檢測晶片包含一左右延伸之水平基板4、一固設於 該水平基板頂面之電極單元5、一水平疊接於該基板4與該 電極單元5頂面之流道成型板6，及一水平疊接於該流道成 型板6頂面之氣室成型板7。 在本實施例中，該基板4是由硬質玻璃材料製成，但 ^71516 實施時，該基板4亦可由硬質高分子材料製成，且不以此 為限。 該電極單元5包括前、後間隔地固設於該基板4頂面 的一薄膜狀參考電極51，及一薄膜狀酸鹼檢測電極52。在 本焉知例中，该酸驗檢測電極52是由可用以檢測值之 SKVU02-Ba0-Ti02-La03 (SLBTLO)化合物製成，該參考 電極則是氯化銀（AgCl )，且該酸鹼檢測電極52與參考電 極51是透過金屬薄膜蒸鍍沈澱方法被覆固接於該基板4頂 面。但貫施時，該酸驗檢測電極52與參考電極5 1之設置 位置、設置方式及化學組成皆不以上述型態為限。 如圖2〜4所示，該流道成型板6是由彈性材料製成， 並與疊接於其底面之基板4相配合界定出一左右延伸地凹 陷於其底面，而可供該檢體流動之流道61，且該流道Μ具 有四分別自其中間部位前、後間隔地往右延伸且寬度較窄 之分流段611，每一分流段611則具有三左、右等距間隔而 寬度較寬之擠壓部612。該流道成型板6頂面之左、右端部 分別形成有一往下延伸，並分別與流道61左端及該等分流 段611右端連通之一第一排液孔62與一第一注液孔63，且 該流道成型板6具有多數分別對應位於每一分流段611之每 一擠壓部612正上方的幫浦部64。實施時，該流道61亦可 设计成凹陷形成於該基板4頂面，但實施時不以此為限。 該氣室成型板7則與疊置於其底面之流道成型板6相 配合界疋出三前後延伸，且左、右間隔平行地凹陷於其底 面之中空氣室71，且每一氣室71之前後延伸範圍同時涵蓋 1271516 該流道成型板6之三前、德知 則後相鄰的幫浦部64。而該氣室成 型板7頂面則具有三左、亡„λ ~ 右間隔地彺下延伸且分別與該等 氣室71連通之注氣孔72，及左、右間隔地往下延伸且分別 和該流道成型板6之該等液孔62、63連通之—第二排液孔 73與一第二注液孔74。實施時，該等氣室Μ _可設計成 凹陷形成於該流道成型板6頂面’但實施時不以此為限。1271516 IX. Description of the Invention: [Technical Field] The present invention relates to a micro-detection wafer, and more particularly to a micro-type acid detection wafer. [Prior Art] With the advancement of MEMS technology, many technologies are gradually becoming more and more miniaturized. The most important feature of using MEMS technology is that the components or devices produced can be lighter, thinner and shorter. Among them, in the aspect of biotechnology, Lu Xixiao, using the principles of molecular biology, genetic information and analytical chemistry, and the biochip developed by the microelectromechanical process, due to the microfluidic pipeline design in the biochip, The amount of sample required for inspection and analysis can be greatly reduced, thereby saving the loss of biological reagents and specimens, and by increasing the design of the entire detection system, the reaction rate can be increased, and the accuracy and sensitivity can be increased. Breaking through the development bottleneck of traditional inspection technology in terms of performance, therefore, the research and development of micro-detection wafers required in various inspection fields is urgently needed. • SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a micro-acid-base detecting wafer for quickly detecting the pH value of a body. Therefore, the micro-acid-base detecting wafer of the present invention is suitable for use with a sample, and comprises a horizontal substrate, a horizontally superposed on the top surface of the substrate and cooperates with the substrate to define a flow for the sample. a flow path forming plate for an empty flow path, an electrode single set which is disposed on the top surface of the substrate to detect a 酉retest value of the sample located in the flow path, and a horizontally spliced to the flow path into a type 5 1271516 a gas chamber forming plate on the top surface of the plate. The flow channel forming plate has at least two elastic pump portions spaced above the flow channel, and the gas chamber forming plate cooperates with the flow channel forming plate to define two The pumping portion can be intermittently infused with gas, and the pumping portions are respectively elastically recessed toward the flow passage to press and push the air chamber in which the specimen flows in the flow passage. The pumps are formed by the flow channel forming plate. The segment is intermittently designed to elastically recess in the flow channel, so that the sample can flow in the micro flow channel, and the acid value of the micro sample can be detected through the electrode unit located in the direction in which the sample flows. [Comprehensive method] About this issue The foregoing and other technical contents, features, and advantages of the invention will be apparent from the following detailed description of the preferred embodiments of the accompanying drawings. Before the invention is described in detail, In the description, like elements are denoted by the same reference numerals. As shown in Figures 1 and 2, a first preferred embodiment of the micro-acid-base detecting wafer of the present invention is suitable for detecting a liquid sample ( The pH value of the sample is not shown in the figure. The sample may be urine, serum, blood, or a biochemical reagent. In the present embodiment, the sample used is a test solution having a different pH value. The verification detecting wafer comprises a horizontal substrate 4 extending left and right, an electrode unit 5 fixed on the top surface of the horizontal substrate, a flow channel forming plate 6 horizontally superposed on the top surface of the substrate 4 and the electrode unit 5, and a gas chamber forming plate 7 horizontally attached to the top surface of the flow path forming plate 6. In the embodiment, the substrate 4 is made of a hard glass material, but when implemented, the substrate 4 may also be made of a hard high Made of molecular materials and not limited to this The electrode unit 5 includes a film-shaped reference electrode 51 fixed to the top surface of the substrate 4 at a front and a rear, and a film-shaped acid-base detecting electrode 52. In the present example, the acid detecting electrode 52 is It is made of SKVU02-Ba0-Ti02-La03 (SLBTLO) compound which can be used as a detection value, and the reference electrode is silver chloride (AgCl), and the acid-base detecting electrode 52 and the reference electrode 51 are deposited by metal film evaporation. The method is coated and fixed on the top surface of the substrate 4. However, when the application, the position, arrangement and chemical composition of the acid detecting electrode 52 and the reference electrode 51 are not limited to the above type. As shown, the flow path forming plate 6 is made of an elastic material and cooperates with the substrate 4 laminated on the bottom surface thereof to define a flow path 61 which is recessed on the bottom surface thereof to extend left and right, and the sample is allowed to flow. And the flow channel Μ has four shunt segments 611 extending from the front portion and the rear portion of the middle portion to the right and having a narrow width, and each of the shunt segments 611 has three left and right equidistant intervals and a wide width. Pressure portion 612. The left and right end portions of the top surface of the flow path forming plate 6 are respectively formed with a downwardly extending and respectively communicating with the left end of the flow path 61 and the right end of the flow dividing portion 611, a first liquid discharging hole 62 and a first liquid filling hole. 63, and the flow path forming plate 6 has a plurality of pump portions 64 respectively corresponding to each of the pressing portions 612 of each of the flow dividing portions 611. In the implementation, the flow path 61 can also be designed to be recessed on the top surface of the substrate 4, but is not limited thereto. The air chamber forming plate 7 extends in a front-rear direction with the flow path forming plate 6 stacked on the bottom surface thereof, and the left and right sides are parallelly recessed in parallel with the air chamber 71 in the bottom surface thereof, and each of the air chambers 71 The front and rear extension ranges simultaneously cover 1271516. The runner portion 64 of the runner molding plate 6 and the adjacent pump portion 64. The top surface of the air chamber forming plate 7 has three air holes, a gas injection hole 72 extending downwardly and spaced apart from the air chamber 71, and extending downwardly from the left and right sides and respectively The liquid holes 62, 63 of the flow path forming plate 6 communicate with the second liquid discharge hole 73 and a second liquid injection hole 74. In practice, the gas chambers _ can be designed to be recessed in the flow path. The top surface of the forming plate 6 is not limited to this.
如圖1、4、5所示’該酸驗值檢測晶片使用時，可搭 配-控制系統8與-訊號操取系统9使用，該控制系統8 包括-可與該酸鹼值檢測晶片之氣室成型才反7的該等注氣 孔72選擇地連通之氣料元81、—與該制單元81組接 而用以控制該氣閥單元81與該等注氣孔72連通之可程式 控制單元82，及-與該可程式控制單元82組接而用以提供 一咼壓氣體之氣體供給單元83。該可程式控制單元82可控 制該氣閥單元81由右至左地依序與其中一注氣孔72間歇 連通，而使該氣體供給單元83所提供之高壓氣體間歇地由 右至左依序間歇地灌入每一氣室7丨中。該訊號擷取系統9 則是用以和該電極單元5之電極5丨、52電連接，而可擷取 分析該等電極51、52之檢測訊號。 由於該可程式控制單元82控制該氣閥單元81作動之 技術’以及該訊號擷取系統9擷取分析訊號的技術皆已為 熟習該項技術者所知悉，因此不再加以詳述。 如圖3、5、6所示，當要以該微型酸鹼值檢測晶片檢 測該檢體之酸驗值時，是先將預定體積之檢體滴入該等第 一注液孔63、74中，然後透過該控制系統8，將高壓氣體 8 1271516 由右至左依序間歇地灌入該等氣室71中，而使該流道成型 板6對應位於每一分流段611之三擠壓部612正上方的三幫 浦部64，由右至左相對延遲地往所對應之擠壓部612彈性 凹陷’而如圖6所示之作動狀態。藉由不斷地重複此作動 模式’而可產生一蠕動式幫浦效應，使得該流道Η中之空 氣可不斷地被由右往左擠壓推送，而可將位於該等注液孔 63、74中之檢體往左吸入每一分流段611中，並逐漸地將 其沿箭頭10方向擠壓推進。As shown in Figures 1, 4 and 5, when the acid test wafer is used, it can be used in conjunction with the control system 8 and the signal operation system 9, which includes - can detect the wafer with the pH value The gas element 81 selectively connected to the gas injection holes 72 of the chamber 7 is connected to the programmable unit 81 for controlling the gas valve unit 81 to communicate with the gas injection holes 72. And a gas supply unit 83 for supplying a pressurized gas in combination with the programmable control unit 82. The programmable control unit 82 can control the gas valve unit 81 to intermittently communicate with one of the gas injection holes 72 from right to left, and intermittently intermittently press the high pressure gas supplied from the gas supply unit 83 from right to left. The ground is poured into each of the air chambers. The signal extraction system 9 is electrically connected to the electrodes 5, 52 of the electrode unit 5, and can detect the detection signals of the electrodes 51, 52. The technique for controlling the actuation of the valve unit 81 by the programmable control unit 82 and the technique for extracting the analysis signal by the signal acquisition system 9 are known to those skilled in the art and will not be described in detail. As shown in FIGS. 3, 5 and 6, when the micro acid value detecting wafer is to be used to detect the acid value of the sample, a predetermined volume of the sample is first dropped into the first liquid filling holes 63, 74. Then, through the control system 8, the high pressure gas 8 1271516 is intermittently poured into the air chambers 71 from right to left, and the flow channel forming plate 6 is correspondingly placed in each of the divided sections 611. The three gangs 64 directly above the portion 612 are elastically recessed from the right to the left with a relatively delayed delay from the corresponding pressing portion 612, and are in an actuated state as shown in FIG. By repeatedly repeating this mode of operation, a peristaltic pumping effect can be generated, so that the air in the runner can be continuously pushed from right to left, and can be located in the injection holes 63, The sample in 74 is sucked into each of the divided sections 611 to the left, and is gradually pushed and pushed in the direction of the arrow 10.
實施時，可藉由控制灌入該等氣室71中之高壓氣體的 壓力大小與灌注頻率，來分別改變該流道成型板6之該等 幫浦部64的彈性凹陷程度與凹陷頻率，進而可改變該檢體 的推送速率。另外，亦可將該流道成型板6設計成僅該等 幫浦部64是由彈性材料製成，而其餘部分則由硬質材料製 成，但實施時不以此為限。 、、當該檢體持續被往左推送經過該等分流段611而流至該 流道61較寬之左半部時’該檢體會同時與該電極單元$之 參考電極及酸鹼檢測電極52接觸，此時，該參考電極 51可提供一穩定不變的電化學能，而該酸鹼檢測電極”則 可與檢體中的氣離子（H+)反應，而使得該酸驗 52之電化學能產生改變，因&，可藉由該訊號掏料：9 不斷地檢測分析該參考電極51與酸驗檢測電極52 = 化學旎差的變化量，亦即檢測 ' — 4 4電極5 1、52間之電位# ’更可推算得知該檢體之酸鹼值 M ^ ^ ^ "丄 成1凡畢之檢體則會In the implementation, the degree of elastic depression and the depression frequency of the pump portions 64 of the flow channel forming plate 6 can be respectively changed by controlling the pressure magnitude and the perfusion frequency of the high pressure gas injected into the gas chambers 71. Change the push rate of the specimen. Alternatively, the flow path forming plate 6 may be designed such that only the pump portions 64 are made of an elastic material, and the remainder is made of a hard material, but it is not limited thereto. When the specimen is continuously pushed to the left through the shunt segments 611 and flows to the wider left half of the runner 61, the specimen will simultaneously be associated with the reference electrode of the electrode unit $ and the acid-base detecting electrode 52. Contact, at this time, the reference electrode 51 can provide a stable electrochemical energy, and the acid-base detection electrode can react with the gas ions (H+) in the sample, so that the acidity of the acid test 52 The change can be caused by &, by the signal: 9 continuously detecting and analyzing the change amount of the reference electrode 51 and the acid detection detecting electrode 52 = chemical enthalpy difference, that is, detecting '-4 4 electrode 5 1 , The potential of 52 is # ' It can be estimated that the pH value of the sample is M ^ ^ ^ "
被在左推心餘由該等排液孔62、73㈣㈣道I 1271516 實把寺、°亥乳至成型板7可不設置該等液孔73、74， 可將肌〔成里板6之該等液孔Q、幻設計成分別自其側 面=凹陷延伸，而分別與該流道61左、右兩相反端連通 J欢體貝J可先:置於一與該第一注液孔W氣密組接且連 通之導f (圖未示）中，但實施時不以上述型態為限。 如圖7所示，去、、n、、士古两、 、，、 田雇/主同壓氣體80的頻率增加時，該流The left side of the heart is made up of the liquid drain holes 62, 73 (four) (four) road I 1271516, the temple, the sea milk to the forming plate 7 may not be provided with the liquid holes 73, 74, and the muscles can be The liquid holes Q and the phantoms are respectively designed to extend from the side surface = the recesses, and respectively communicate with the opposite ends of the left and right sides of the flow path 61. The first and second right injection holes are airtight. It is connected and connected to the guide f (not shown), but it is not limited to the above type. As shown in Fig. 7, when the frequency of the go, n, and Skull two, ,,, and the field employer/main pressure gas 80 increases, the flow
、成型板6之忒等幫浦部64彈性凹陷入所對應之擠壓段 612中的解會㈣增加，進而使得該檢體於該流道η中 之流動速率相對加快。而當灌注壓力提高日夺，由於該流道 成里板6之。亥等幫浦部64被擠壓凹陷入該流道6 ^中之程 度會相對較大’因此每次擠壓推送之檢體量亦相對變大， 所以可提高檢體之流動速率。 如圖8、9所示，是該微型酸鹼值檢測晶片連續對多數 具有不同酸鹼值之檢體進行檢測之結果，檢測條件··高壓 氣體灌注頻率8 Hz，高壓氣體壓力1〇 psi，檢體流率16〆 L/min，而各檢體體積5 ，該等檢體之酸鹼值範圍 2·04〜10.25。由圖8顯示之訊號曲線可知，該酸鹼值檢測晶 片的檢測反應時間相當快，每一檢體之檢測訊號皆可在4 分鐘内達到平衡狀態，且不論由酸到鹼或由鹼到酸之檢測 方式，其靈敏度皆可達_55 mV/pH以上。 如圖10、11所示，本發明微型酸鹼值檢測晶片之第二 較佳實施例與該第一較佳實施例不同處在於··該流道成型 板6與基板4相配合界定之流道61形狀，以及該氣室成型 板7與流道成型板6相配合界定之該等氣室71之形狀與設 10 1271516 置位置。為方便說明，以下僅將針對該第二實施例與第一 實施例不同處進行說明。 ,在本實施例中，該流道61右半部僅具有一寬度較窄且 别後^伸之刀，瓜段611，且該分流段61丨具有三前、後間隔 之知壓邠612。而该荨乳室71的橫截面形狀是呈圓形，且 刀別位於该分流段611之該等擠壓部612正上方。 由於本實施利之酸鹼值檢測晶片於檢測該檢體之酸鹼 值時，各相關構件間之作動方式皆與該第一實施例相同， 因此不再重複敘述。 歸納上述，藉由該基板4、該流道成型板6之該等彈性 幫浦。卩64與5亥氣室成型板7之外型設計，以及該流道6】 與該等氣t 71的相對位置關係，使得該等氣室71可被間 歇地灌入高壓氣體，而迫使該流道成型板6之該等左、右 間隔之餐浦部64由右至左相對延遲地往所對應擠壓部 彈性凹陷，而產生一蠕動式幫浦效應，使得位於該等注液 孔63、74中之檢體可被吸入該流道61中並往該等排液孔 62、73方向推進，而可藉由該參考電極51與酸鹼檢測電極 間之電位差憂化，快速且準確地對該檢體進行酸驗值檢 測，靈敏度可達-55 mV/ρΗ以上且再現性佳，而每一檢體之 酸鹼值檢測時間則少於4分鐘，更因該流道61之體積：當 小，因此所需之各檢體量僅需約5 # L。所以，確實可達到 本發明之目的。 惟以上所述者，僅為本發明之二較佳實施例而已，當 不犯以此限定本發明實施之範圍，即大凡依本發明申請專 1271516 利範圍及發明說明内容所作之矜置& 谷听1下之間早的荨效變化與修飾，皆 仍屬本發明專利涵蓋之範圍内。 【圖式簡單說明】 - ® 1本發明微型酸驗值檢測晶片之第-較佳實施例之 . 立體組合圖； ·· 圖2是圖1之立體分解圖； _ _ ® 3是® 1之—基板與—f極單元移除後之仰視圖， 說明一流道與三氣室之相對位置關係； _ 圖4是圖1之後側視剖面圖； 圖5是該第一較佳實施例配合一控制系統與一訊號搁 取系統使用之方塊示意圖； 圖6是該第一較佳實施例於檢測過程中，該等氣室、 流道與一流道成型板間之作動示意圖； 圖7是該第一較佳實施例在不同高壓氣體注入頻率及 注入壓力時，與相對產生之檢體流率的關係曲線圖，· 圖8是該第一較佳實施例實際檢測多個不同酸鹼值之 籲 檢體時，所得到之電位差與時間的關係曲線圖； 圖9疋圖8之電位差與酸驗值的關係曲線圖； 圖10是本發明微型酸鹼值檢測晶片之第二較佳實施例 的立體分解圖；及 圖11疋该弟一較佳貫施例之一基板與一電極單元移除 後的仰視圖。 12 1271516 【主要元件符號說明】 基板 7…… …♦氣室成型板 電極單元 71…· …·氣室 *♦*♦«♦*♦ 參考電極 72 ♦… *…注氣孔 5 ******** 酸驗檢測電極 73 ·… •…第二排液孔 流道成型板 74…. …·第二注液孔 ^31 »****♦·* 流道 8…μ· …·控制系統 611…·… 分流段 81…· •…氣閥單元 612……* 擠壓部 82…· ♦…可程式控制單元 6 2，* ♦ *，*，* 第一排液孔 83·，·* •…氣體供給單元 63*，“*" 第一注液孔 9…… …·訊號擷取系統 6 ^-J· ♦♦**♦*** 幫浦部The solution (6) in the pressing section 612 corresponding to the elastic recess of the pumping portion 64 of the forming plate 6 is increased, so that the flow rate of the sample in the flow path η is relatively accelerated. And when the perfusion pressure is increased, the flow path is made into the inner plate 6 . The extent to which the pump portion 64 such as the hai is squeezed into the flow path 6 ^ will be relatively large. Therefore, the amount of the sample pushed per squeezing is relatively large, so that the flow rate of the sample can be increased. As shown in Figures 8 and 9, the micro-acid-base detection wafer continuously detects the results of a plurality of samples having different pH values, and the detection conditions include a high-pressure gas perfusion frequency of 8 Hz and a high-pressure gas pressure of 1 〇 psi. The sample flow rate is 16 〆L/min, and the volume of each sample is 5, and the pH value of the samples ranges from 2·04 to 10.25. It can be seen from the signal curve shown in FIG. 8 that the detection reaction time of the pH detecting wafer is relatively fast, and the detection signal of each sample can reach an equilibrium state within 4 minutes, regardless of acid to alkali or alkali to acid. The detection method has a sensitivity of up to _55 mV/pH. As shown in FIGS. 10 and 11, the second preferred embodiment of the micro-acid-base detecting wafer of the present invention is different from the first preferred embodiment in that the flow path forming plate 6 and the substrate 4 are combined to define a flow. The shape of the passage 61 and the shape and arrangement of the air chambers 71 defined by the air chamber forming plate 7 and the flow path forming plate 6 are set to 10 1271516. For convenience of explanation, only differences between the second embodiment and the first embodiment will be described below. In the present embodiment, the right half of the flow path 61 has only a knife having a narrow width and a rearward extension, a melon segment 611, and the diverting segment 61 has a front and rear spaced pressure 612. The cross-sectional shape of the breast milk chamber 71 is circular, and the knife is located directly above the pressing portion 612 of the flow dividing portion 611. Since the pH value of the sample for detecting the pH value of the sample is the same as that of the first embodiment, the description will not be repeated. In summary, the elastic guides of the substrate 4 and the flow path forming plate 6 are summarized. The outer shape design of the 卩64 and 5 liter chamber molding plates 7, and the relative positional relationship of the flow passages 6 with the gas s 71, so that the plenums 71 can be intermittently filled with high pressure gas, forcing the The left and right spaced meal portions 64 of the flow path forming plate 6 are elastically recessed from the right to the left with a relative delay to the corresponding pressing portion, thereby generating a peristaltic pumping effect, so that the liquid filling holes 63 are located. The sample in 74 can be sucked into the flow path 61 and pushed in the direction of the liquid discharge holes 62, 73, and can be quickly and accurately determined by the potential difference between the reference electrode 51 and the acid-base detection electrode. The sample is tested for acidity, the sensitivity is up to -55 mV/ρΗ and the reproducibility is good, and the pH detection time of each sample is less than 4 minutes, and the volume of the flow path 61: Small, so the amount of each sample required is only about 5 # L. Therefore, the object of the present invention can be achieved. However, the above is only the preferred embodiment of the present invention, and the scope of the present invention is not limited thereto, that is, the installation and the valley of the invention according to the scope of the application and the description of the invention. It is still within the scope of the present invention to cover the early changes and modifications between the two. BRIEF DESCRIPTION OF THE DRAWINGS - ® 1 The first preferred embodiment of the micro acid detection wafer of the present invention. A three-dimensional combination diagram; · Figure 2 is an exploded perspective view of Figure 1; _ _ ® 3 is a ® 1 - a bottom view of the substrate and the -f pole unit removed, illustrating the relative positional relationship between the first and third air chambers; _ Figure 4 is a side cross-sectional view of Fig. 1; Fig. 5 is a first preferred embodiment of the first embodiment FIG. 6 is a schematic diagram showing the operation of the control system and a signal take-up system; FIG. 6 is a schematic diagram of the operation between the air chamber, the flow path and the first-class forming plate in the detecting process of the first preferred embodiment; A preferred embodiment of the relationship between the injection rate of the high pressure gas and the injection pressure, and the relative flow rate of the sample, FIG. 8 is a schematic representation of the actual detection of a plurality of different pH values in the first preferred embodiment. FIG. 9 is a graph showing the relationship between the potential difference and the acid value of the sample; FIG. 10 is a second preferred embodiment of the micro-acid-base detecting wafer of the present invention; An exploded view; and Figure 11 is one of the preferred embodiments of the brother A bottom view of the substrate and an electrode unit removed. 12 1271516 [Description of main component symbols] Substrate 7............ ♦ Air chamber forming plate electrode unit 71...···Air chamber*♦*♦«♦*♦ Reference electrode 72 ♦... *... Gas injection hole 5 ***** *** Acid test electrode 73 ·... •...Second drain hole flow path forming plate 74....·Second liquid injection hole ^31 »****♦·* Flow path 8...μ·...·Control System 611...·... Shunting section 81...·......valve unit 612......* Squeeze section 82...· ♦...programmable control unit 6 2,* ♦ *,*,* First drain hole 83·,· * •... gas supply unit 63*, “*" first injection hole 9... ...· signal extraction system 6 ^-J· ♦♦**♦*** 帮
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