TWI271019B - Can type linear motor armature and can type linear motor - Google Patents

Abstract

The present invention relates to a can type linear motor armature and a can type linear motor. The can type cover of a linear motor consists of two layers, including an inner can cover (2) and an outer can cover (3). An inner flow channel (7) is formed between an armature winding (9) and the inner can cover (2) and an outer flow channel (8) is formed between the inner can cover (2) and the outer can cover (3). A connecting part (7A, 8A) for connecting the inner flow channel (7) and the outer flow channel (8) is provided nearby the coolant supply (5) of each can cover (2, 3) to allow the coolant supplied from the coolant supplies (5) to flow separately into the inner flow channel (7) and the outer flow channel (8). Thus, by means of flow channel improvements, conventional inert coolants may still be applied to have a high-cooling linear motor armature and a linear motor to prevent any can cover deformation.

Description

1271019 (1) Field of the Invention [Technical Field] The present invention relates to a canned device in which a low temperature rise of a linear motor body is required while being transported on a platform of a semiconductor manufacturing apparatus or a working machine. Linear motor. [Prior Art] Conventionally, while being used in the transportation of a semiconductor manufacturing apparatus or a work machine, the low temperature rise of the linear motor body is a canned type linear motor which is required, for example, disclosed in Patent Document 1. A canned linear motor in the patent document 2 (JP-A-2000-4572). In the linear motor of Patent Document 1, the following description will be made using the drawings. Fig. 9 is an overall perspective view showing a canned linear motor of the prior art. In Fig. 9, the figure 10 is the stator, the figure 11 is the frame, the figure 12 is the canned cover, the figure 13 is the bolt screw, the figure 14 is the pressure plate, and the figure 15 is the terminal block. Figure 16 is a refrigerant supply port, Figure 17 is a refrigerant discharge port, Figure 25 is a movable element, Figure 26 is a field yoke support member, Figure 27 is a field yoke, and Figure 28 is a permanent magnet. One of the movable elements 25 is composed of: two yoke yokes 7 in the form of a flat plate; permanent magnets 28 attached to the surfaces of the respective field yokes 27; and inserted between the two field yokes 27 At the same time, the total excitation yoke support member 26 is composed of four, and has a hollow space portion whose both ends are open. Then, the permanent magnets 28 are formed by alternating magnets of different polarities and arranged adjacent to each other in the inner edge of the field yoke-5-(3) 1271019 body 1 1 , and are provided with grooves around the circumference. The groove is configured with a ring 21. Next, the can cover 12 is placed on the front and back of the casing 11 so as to cover the casing 11. The press plate 14 is laid from the upper surface of the can cover 1 2 along the edge of the frame body 1 1 and locked by bolt screws 13 to fix the can cover 1 2 and the frame 1 1 together. The armature windings 18 are composed of a plurality of coil groups including three-phase and concentric winding coils, and are attached to the left and right sides of the winding fixing frame 19. The power supply to the armature winding 18 is performed by the terminal block 15 mounted on the casing 11. The terminal block 15 and the armature winding 18 are respectively electrically connected by wires (not shown). Further, the refrigerant is supplied from the refrigerant supply port 16 provided in the casing 1 and then discharged from the refrigerant discharge port 17. Between the two, the refrigerant flows through the refrigerant passage 20 between the armature winding 18 and the can-cover 1 2 to cool the heat-generating armature winding 18. The canned linear motor thus constructed is formed by flowing a predetermined current corresponding to the electrical relative position of the movable element 25 and the stator 10 to the armature winding 18 to form a magnetic field with the permanent magnet 28. The action produces a thrust on the movable element 25, causing the movable element 25 to move in the direction of travel as indicated by the arrow symbol in Figure 9. At this time, the armature winding 18 which generates heat due to copper consumption is cooled by the refrigerant flowing through the refrigerant passage 20, so that the surface temperature rise of the can cover 12 can be suppressed. However, the canned linear motor of the prior art has the following problems because the refrigerant passing through the refrigerant passage 20 flows on the surface of the armature winding 18: (1) It is generally used for the armature winding 18 The wire is an enameled wire with a coating for insulation, but during winding operation or armature winding-7-

Claims (1)

I271Q19. Γ l6((1) Pickup, Patent Application No. 93 109602 Patent Application Revision of Chinese Patent Application Revision of the Republic of China on January 19, 1995 1. A canned linear motor armature with: An armature winding formed by a plurality of flat coil groups; a metal frame that surrounds the armature winding in a frame shape; and a can cover that can seal both openings of the frame, and is characterized in that : the two sides of the armature winding are longitudinally oriented, and are clamped and fixed by two winding fixing frames; a refrigerant passage is disposed in a space formed between the canned cover and the winding fixing frame; The gap between the body and the winding fixing frame is provided with a sealing material, and the can coating is bent in advance so that the curved convex surfaces of the canning cover are arranged to face each other with the winding fixing frame. The linear motor is characterized in that: the canned linear motor armature according to the first aspect of the patent application; and the armature is disposed opposite to the magnetic gap; and the polarity is not The plurality of permanent magnets are alternately arranged excitation yokes, and one of the armature and the excitation yoke is a stator, and the other is a movable element, and the excitation yoke and the armature are arranged Formed to operate in a relative manner. 3. A canned linear motor armature, the armature winding is sealed by a can cover, and the armature winding disposed in the sealed space is cooled by the refrigerant # (Mg daily repair (more) the canned linear motor armature that is replacing the negative (2), wherein the armature includes: "the stepped portion in which the upper and lower ends of the flat plate are bent toward the inner side and formed into a convex shape" and "formation" a winding fixing frame of a straight portion between the step portions provided at the upper and lower ends; a step portion in which "the upper and lower ends of the flat plate are curved outwardly and convexly formed" and "a step formed at the upper and lower ends" a canned cover of the straight portion between the portions; an armature winding held between the straight portions of the winding fixing frame; and is formed to be held by the step portion of the canned cover and the step portion of the winding fixing frame a frame formed in a frame-like shape; a refrigerant passage formed in a straight portion of the can bottom cover, a straight portion of the winding fixing frame, and a space between the frames; and a pressure plate provided on an outer side surface of the can cover And an o-ring disposed on a groove surrounding the side edges of the second frame, and a can that is inserted through the platen, the can, the frame, and the winding frame The capping fixing bolt is coupled to the press plate 'the cannula cover, the frame body, and the winding fixing frame to constitute the armature. 4. A canned linear motor, characterized in that: The armature described in the three items; and the plurality of permanent magnets having different polarities disposed opposite to each other with the armature interposed therebetween, wherein the plurality of permanent magnets are alternately arranged adjacent to each other, and the armature and the excitation yoke are further provided In the middle -2 -i name Yineg 日修 (more), one of the replacement pages I (3) is the stator, and the other is the movable element, so that the above-mentioned excitation yoke and the above-mentioned armature are formed to be relatively operable. -3-