1270396 九、發明說明： 【發明所屬之技術領域】 ▲本發明是有關於一種表面塗裝的方法，特別是指一種 高爾夫球桿之桿身及其表面塗裝方法，可呈現出多層次色 彩之金屬光澤表面。 【先前技術】1270396 IX. Description of the invention: [Technical field to which the invention pertains] ▲ The invention relates to a method for surface coating, in particular to a shaft of a golf club and a surface coating method thereof, which can exhibit multi-layer color Metallic shiny surface. [Prior Art]
Ik著國民生活水平的提高，從事高爾夫球運動的人數Ik, the improvement of national living standards, the number of people engaged in golf
正逐漸地增加中。肖費者在購買高爾夫球桿前，除了考慮 其功此之外’尚會考量桿身的色澤是否美觀。京尤目前的高 爾，球桿之桿身而言，其材質大多為金屬材質所製成，主 要疋強度要求之考量。由於金屬材質本身就具金屬光澤， 口此通吊只在其外表面上塗覆_層保護膜，以保護表面 不受刮傷磨損。近年央，* ^ 牛木以厌纖維材質所製成的桿身逐漸 受到大果的歡迎，主山， 要疋因為奴纖維質量較輕，而且強度 亦足夠，以致於能為大眾所接受。 由於以碳纖維材質所製成的桿身，其外表是 給人有種質感不佳的烕謦 a、+ 仏見因此，通常會加上其他顏色的 色I ’而使之呈現出不回沾洛 门的色澤。大致上的作法是先在碳 纖維桿身上塗覆-層底漆。接著，在該底漆的表面再塗覆 曰色之後’在該色漆的表面印上商標圖案。最後， 在該色漆上再塗一透明沾/里啥、未 # 的保護漆。為使色漆可以緊密地附 者於底漆上，在塗色汰夕义 — 已泰之則’必須先對該底漆的外表面進 订細研磨，而使其表面略呈粗糙。 …、而以上述方法所製成的桿身，其色漆容易發生發 5 1270396 生剝離，或塗覆不均等問題，而且色漆本身並不具有強度 ，當保護漆磨損後，色漆亦會隨之被磨損而失去色澤。 如圖1所不’中華民國申請案第92107956號「高爾夫 球桿之塗層及其塗裝方法」發明專利案，是為改善上述之 問題，在於保護漆與色漆之間新增一金屬層，其是以離子 - 蒸鍍（Ion VaP〇r Deposition)的方式，將鈦、鉻、鋁或錯等其 中之一金屬鍍覆於色漆上，利用金屬的強度與色澤，保護 色漆、增加金屬光澤，並提高其耐磨強度。上述的離子蒸 釀 鍍疋屬於物理氣相沉積（physical Vap〇r Dep〇siti〇n，PVD)， 利用電弧放電產生高熱，使蒸鍍的材料（即靶材）熔解蒸發並 錢覆於高爾夫球桿上。 從上述說明不難發現，習知的塗裝方法有下列幾項缺 黑占· 一、 製程時間較長而造成成本耗費··由於該金屬層並 不透光，當該金屬層鍍覆於色漆上時，色漆的色澤會被該 I 金屬層所遮蔽，其顏色根本無法顯現出來，反而失去原先 使用色漆的目的，其製程時間也被拉長而造成製造成本相 對地提高。 二、 易有軟化變形的問題：由於該離子蒸鍍方式是以 利用高温溶解靶材，再鍍覆於色漆的外表面上，因而容易 使/、體環i兄溫度隨之昇南’使得原先已塗覆的底漆與色 漆因溫昇而會有軟化變形的現象，致使整體的平整性與均 勻性受到影響。 三、 球桿色澤變化少：由於僅使用單一種金屬材質的 6 1270396 作為球杯的色澤，因此，亦僅能顯現出所用之金屬原色而 已，可供選擇的色澤較少，難以滿足不同消費者的需求。 【發明内容】 此本舍明之目的’即在提供一種高爾夫球桿之桿 身及其表面塗I方法，可精簡製程步驟，以縮短製程時間 與節省製造成本。Gradually increasing. Before the purchase of golf clubs, Xiao Fei will consider whether the color of the shaft is beautiful, in addition to considering its merits. In Beijing's current Gore, the shaft of the club is mostly made of metal, which is mainly considered for strength requirements. Since the metal material itself has a metallic luster, the sling is only coated with a protective film on its outer surface to protect the surface from scratches and abrasions. In recent years, the shaft made of oxwood with anaplastic fiber material has been gradually welcomed by the big fruit. The main mountain, because the slave fiber is lighter in weight and strong enough, it can be accepted by the public. Due to the shape of the shaft made of carbon fiber, the appearance is a kind of 烕謦a, + 仏 给 因此 因此 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 The color of the door. The general approach is to apply a layer of primer to the carbon fiber rod. Next, after the surface of the primer is further coated with a ochre, a trademark pattern is printed on the surface of the lacquer. Finally, apply a transparent varnish, lining, and no protective lacquer to the lacquer. In order for the paint to be closely attached to the primer, it is necessary to finely grind the outer surface of the primer to make it slightly rough on the surface. ..., the shaft made by the above method, the color paint is prone to occur 5 1270396 peeling, or uneven coating, and the paint itself does not have strength, when the protective paint is worn, the paint will also It is then worn away and loses its color. As shown in Figure 1, the invention patent case of "the coating and coating method of golf clubs" of the Republic of China application No. 92107956 is to improve the above problem, and a metal layer is added between the protective paint and the paint. It is a method of ion-vapor deposition (Ion VaP〇r Deposition), one of titanium, chromium, aluminum or the wrong metal is plated on the paint, using the strength and color of the metal to protect the paint and increase Metallic luster and improved wear resistance. The above-mentioned ion-exchanged rhodium plating is a physical vapor deposition (physical Vap〇r Dep〇siti〇n, PVD), and the arc discharge is used to generate high heat, so that the evaporated material (ie, the target material) is melted and evaporated and covered with the golf ball. On the pole. It is not difficult to find from the above description that the conventional coating method has the following defects: 1. The process time is long and the cost is expensive. · Since the metal layer is not transparent, when the metal layer is plated in color When the paint is applied, the color of the paint will be covered by the I metal layer, and the color cannot be revealed at all. Instead, the original use of the paint is lost, and the processing time is also lengthened to cause the manufacturing cost to be relatively increased. Second, the problem of easy softening and deformation: Since the ion evaporation method is to dissolve the target material by high temperature and then plate it on the outer surface of the color paint, it is easy to make the temperature of the body ring rise to the south. The originally applied primer and paint have softening and deformation due to temperature rise, which affects the overall flatness and uniformity. Third, the club color change is less: because only a single metal material of 6 1270396 is used as the color of the cup, therefore, only the metal primary color used can be displayed, and the available color is less, which is difficult to satisfy different consumers. Demand. SUMMARY OF THE INVENTION The purpose of the present invention is to provide a golf club body and a surface coating method thereof, which can streamline the process steps to shorten the process time and save manufacturing costs.
^本發明之另一目的，可使高爾夫球桿呈現出多層次色 七之金屬光澤’提高美觀並增加質感，並提供更多種不同 勺金屬光澤’增加其色澤的多樣性，以滿足不同消費者的 一；疋，本發明高爾夫球桿之桿身，是固定結合在一球 頭上，該回爾夫球之桿身包含一以非金屬材質製成的素桿 一 _基礎、膜層組、一金屬亮彩膜層組，及一保護膜層 該基礎相層組具有_平整地塗覆於該素桿體表面上的 u層該金屬党彩膜層組具有—鍍覆於該基礎漆膜層 、且可透光且呈現出多層次色彩的多色膜層，該多色膜 :疋由金屬材貝與含氮氧碳氫氣體共同反應化合而成之亮 瓷材質所製成。該保護膜層是包覆於該金屬亮彩膜層 、、且的表面’用於保護該金屬亮彩膜層組。 本發明高爾夫球桿之桿身的表面塗裝方法，依序包含 備製步驟、-基礎漆塗覆步驟、—金屬亮彩鐘膜步驟， 及一保護膜層塗霜牛啊 ^ ^^ s ^^ 覆^驟。该備製步驟是備製一長桿狀且為 1=所製成的素桿體，並對該素桿體進行研磨與抛 、〜5漆錢步驟是在該素桿體表面上塗覆-基礎漆 7 1270396 丨隐:丨 膜層組並使之乾燥硬化，該基礎漆塗覆步驟具.有一緩丨塗 覆步驟，該基礎漆膜層組具有一底漆膜層，該底漆塗覆步s 驟是將底漆塗覆於該素桿體的表面上，以形成該底漆膜層| 。该金屬亮彩鍍膜步驟是在該基礎漆膜層組上沉積一可呈:) 現出多層次色衫的金屬亮彩膜層組，該金屬亮彩膜層組具 有一以金屬材質與含氮氧碳氫氣體化合而成並可呈現出多：: 層次色彩之可透光的多色膜層，該金屬亮彩鍍膜步驟具有丨 一多色鍍膜步驟’該多色鍍膜步驟是以真空磁控濺射方法士 形成該多色膜層。該保護膜塗覆步驟是在該金屬亮彩膜層貞 組的表面上塗覆透明的保護漆，以形成一可保護該金屬亮;; 彩膜層組的保護膜層。 本發明之功效在於完成該底漆膜層的製作之後，立即 鍍覆忒金屬焭彩膜層組，而不需要再經細研磨、塗覆色漆 等製程步驟，達到精簡製程步驟，藉此縮短製造的時間， 而可以節省製造成本。再者，利用該金屬亮彩膜層組之多 色膜層，使該桿身的表面可以呈現出多層次色彩鮮豔之金 屬光澤。此多層次之金屬光澤會隨著該金屬亮彩膜層組之 金屬材質與氮氧碳氳氣體化合比例的不同，而呈現出不同 的顏色與層次。而且，當該多色膜層的厚度愈厚，則可呈 現的顏色種類愈多。藉此，使該高爾夫球桿之桿身呈現出 多層次色彩之金屬光澤，提高美觀並增加質感，並可增加 其色澤的多樣性1消費者可以有更多樣性的選擇，挑出 自己喜好的色澤。 【實施方式】 1270396 、有關本發明<前述及其他技術内纟、特點與功效，在 X下配合參考圖式之一個較佳實施例的詳細說明中， 清楚的呈現。 ^如圖2、3所示，本發明高爾夫球桿之桿身3之較佳實 ^例’是固定結合在—球頭2上，該高爾夫球桿之桿身3 依序包含-素桿體3卜_基礎漆膜層組32、—金屬亮彩膜 ^組33，及一保護膜層％。在該較佳實施例中，該桿身; 疋應用在屬於木;}:干之南爾夫球桿類型上，但也可以應用在 鐵桿與推桿上。 /素#干體31疋呈長桿狀或是長桿管狀，並以碳纖維材 ^之非金屬材質所製成，但也可以是高強度之工程塑膠與 鬲分子材料等所製成。 該基礎漆膜層組32具有一底漆膜層321，及一亮漆膜 層322。該底漆膜層奶是平整地塗覆於該素桿體μ的表 面上。該亮漆膜層322是塗覆於該底漆膜層321的表面上 ’以提高其平整度與亮度，較佳地是提昇至近鏡面程度。 在實際操作時，只要該底漆膜層321的表面足夠光滑，並 不一定要該亮漆膜層322。 該金屬焭彩膜層組33具有一鍍覆於該基礎漆膜層組32 之亮漆膜㉟322 |面上且不透光的反光膜| 331，及一鐘覆 於該反光膜層331表面上且呈可透光的多色膜層332。 該反光膜層331是銘金屬所製成，用於反射光線以增 加明亮度。當然'，該反光膜層331 ,亦可以鈦、鉻、鐵、錄 或是锆金屬，或其合金所製成，同樣可以達到反射光線的 9 1270396 效果。 該多色膜層332是為鍅之金屬材質與含氮氧碳氯氣體 化合而成之金屬陶瓷材質所製成。在該較佳實施例中，所 使用的金屬材質是鈦、鉻、鐵、鎳或是鋁金屬，但也可以 是上述金屬材質之合金。而所使用的氮氧碳氫氣體是氮氣 (乂）、氧氣（Ο,)與甲烷（CH4)之混合氣體，其中，甲烷也可以 乙炔（匸汨2)來取代。由於甲烷與乙炔的分子量較小，其活性 會較大而易於與金屬材質反應化合而成金屬陶瓷。 由於金屬陶瓷是熔合了金屬與氮氧碳氫化合物兩種材 料，而兼有金屬的和陶瓷的優點，因此，具有較佳的硬度 與耐磨性，並且均較使用單一金屬材質來得高。同時，金 屬陶瓷比較不會因為驟冷或驟熱而產生脆裂，在長期的使 用下仍可保持原有的光澤而不易被磨損消失。 值得一提的是，該金屬亮彩膜層組33之反光膜層331 能將光線予以反射，以提高亮度，但在實際操作時，並不 一定要設置該反光膜層331，仍可藉由該多色膜層332呈現 出多層次之豔麗色澤。關於該金屬亮彩膜層組33之反光膜 層331與多色膜層332如何形成於該基礎漆膜層組32之表 面上的方法，後面將有詳細的說明。 在該金屬亮彩膜層組33之多色膜層332中，可藉由調 整其金屬材質與含氮氣碳氫氣體之比例，變化出更多樣性 之多層次色彩的金屬光澤。例如，是呈現出顏色較淺的金 汽色’或疋顏色較冰的才示色寺色糸並如虹彩般的漸層色澤 ’其中所呈現出的色系則由該反光膜層331所使用的金屬 10 1270396 以鬲溫烘烤或是紫外線照射的方式，使底漆乾燥硬化，而 形成出平整的底漆膜層321。Another object of the present invention is to enable the golf club to exhibit a multi-layered color of metallic luster to enhance the appearance and texture, and to provide more kinds of different scoops of metallic luster to increase the diversity of its color to meet different consumption. The shaft of the golf club of the present invention is fixedly coupled to a ball head, and the shaft of the golf ball comprises a non-metallic material, a base, a film layer, a metal bright color film layer set, and a protective film layer, the basic phase layer group having a u layer uniformly coated on the surface of the element body, the metal party color film layer group having - plating on the base paint film a multi-color film layer which is light-transmissive and exhibits a multi-layer color, and is formed of a bright ceramic material obtained by co-reacting a metal shell and a nitrogen-oxygen-containing hydrocarbon gas. The protective film layer is coated on the surface of the metallic bright color film layer to protect the metallic bright color film layer. The surface coating method of the shaft of the golf club of the invention comprises the preparation step, the base paint coating step, the metal bright color clock step, and the protective film layer coating the cream cow ^ ^^ s ^ ^ Overlay. The preparation step is to prepare a long rod-shaped and 1=-made solid rod body, and grind and throw the solid rod body, and the step of coating the powder is coated on the surface of the element body. Paint 7 1270396 丨 丨: 丨 film layer set and dry hardening, the base lacquer coating step has a slow coating step, the basic paint film layer set has a primer film layer, the primer coating step The primer is applied to the surface of the rod body to form the primer film layer. The metal bright color coating step is to deposit a metal bright color film layer on the base paint film layer group: a multi-layer color shirt having a metal material and a nitrogen-containing layer Oxygen-hydrocarbon gas is compounded and can be multi-layered: a gradable color permeable multi-color film layer, the metal bright color coating step has a multi-color coating step 'The multi-color coating step is vacuum magnetron The sputtering method forms the multicolor film layer. The protective film coating step is to apply a transparent protective lacquer on the surface of the metal bright color film layer to form a protective film layer which can protect the metal light; The effect of the invention is that after the preparation of the primer film layer, the layer of the ruthenium metal ruthenium film layer is plated immediately, and the process steps such as fine grinding and color lacquering are not required, thereby shortening the process steps, thereby shortening The time of manufacture can save manufacturing costs. Moreover, by using the multi-color film layer of the metal bright color film layer group, the surface of the shaft body can exhibit multi-layered and bright metallic luster. The multi-layered metallic luster exhibits different colors and levels as the metal material of the metallic bright film layer differs from the oxynitride gas. Moreover, as the thickness of the multi-color film layer is thicker, the more types of colors that can be exhibited. Thereby, the golf club shaft presents a multi-layered metallic luster, improves the appearance and adds texture, and increases the diversity of its color. 1 Consumers can have more diverse choices and pick their own preferences. The color. [Embodiment] 1270396, the present invention < The foregoing and other technical features, features and effects are clearly shown in the detailed description of a preferred embodiment of the reference drawing with reference to X. As shown in FIGS. 2 and 3, the preferred embodiment of the shaft 3 of the golf club of the present invention is fixedly coupled to the ball head 2, and the shaft 3 of the golf club includes the element body in sequence. 3 _ basic paint film layer set 32, - metal bright color film set 33, and a protective film layer%. In the preferred embodiment, the shaft; 疋 is applied to the wood; }: dry Nalph club type, but can also be applied to irons and putters. /素# The dry body 31疋 is long rod-shaped or long-rod tubular, and is made of non-metallic material of carbon fiber material, but it can also be made of high-strength engineering plastics and bismuth molecular materials. The base paint film layer 32 has a primer film layer 321 and a lacquer film layer 322. The primer film layer of milk is applied flat on the surface of the element body μ. The lacquer film layer 322 is applied to the surface of the primer film layer 321 to improve its flatness and brightness, preferably to a near-mirror level. In actual operation, as long as the surface of the primer film layer 321 is sufficiently smooth, the lacquer film layer 322 is not necessarily required. The metal enamel film layer group 33 has a glazing film 35322 surface coated on the lacquer film layer 32 of the base paint film layer 32 and opaque to the surface of the reflective film layer 331 And a light transmissive multicolor film layer 332. The reflective film layer 331 is made of metal and is used to reflect light to increase brightness. Of course, the reflective film layer 331 can also be made of titanium, chromium, iron, nickel or zirconium metal, or an alloy thereof, and can also achieve the effect of reflecting light of 9 1270396. The multicolor film layer 332 is made of a cermet material obtained by combining a metal material of ruthenium with a gas containing oxynitride. In the preferred embodiment, the metal material used is titanium, chromium, iron, nickel or aluminum metal, but it may be an alloy of the above metal materials. The nitrogen-oxygen hydrocarbon gas used is a mixed gas of nitrogen (helium), oxygen (?) and methane (CH4), and methane can also be substituted by acetylene (?2). Since methane and acetylene have a small molecular weight, their activity is large and they are easily combined with metal materials to form a cermet. Since cermet is a combination of a metal and a nitrogen-oxygen hydrocarbon material, and has both metal and ceramic advantages, it has better hardness and wear resistance, and is higher than a single metal material. At the same time, metal ceramics are less likely to be brittle due to quenching or sudden heat, and can retain their original luster under long-term use without being easily worn away. It is worth mentioning that the reflective film layer 331 of the metallic bright color film layer group 33 can reflect the light to improve the brightness, but in actual operation, the reflective film layer 331 is not necessarily provided, The multi-color film layer 332 exhibits a multi-layered radiance. A method of how the reflective film layer 331 and the multicolor film layer 332 of the metallic bright color film layer group 33 are formed on the surface of the base paint film layer group 32 will be described in detail later. In the multi-color film layer 332 of the metallic bright color film layer group 33, the metal luster of a more diverse multi-layer color can be changed by adjusting the ratio of the metal material to the nitrogen-containing hydrocarbon gas. For example, it is a light-colored gold vapor color 'or a color that is lighter than ice, and an iridescent color like the iridescent color'. The color system presented therein is used by the reflective film layer 331. The metal 10 1270396 is dried and hardened by rubbing or ultraviolet irradiation to form a flat primer film layer 321 .
類似地，該亮漆塗覆步驟422是將保護漆塗覆於該底 漆膜層321的表面上，再以高溫烘烤或是紫外線照射的方 式，使保護漆乾燥硬化，而形成出該亮漆膜層322，利用該 亮漆膜層322來增加該基礎漆膜層組32的平整度與亮度， 較佳地，是可呈現近鏡面形態，以提高後續之金屬亮彩鍍 膜步驟43之品質。在實際操作日夺，若所形成的底漆膜層 321的光滑度足夠，是可以不實施該亮漆塗覆步驟422。 該金屬亮彩鍍膜步驟43是利用一真空磁控濺射設備 7(Va_m Magnetron SpuUering System)進行真空磁控濺射 ，在該基礎漆膜層組32上沉積-可呈現出多層次色彩的金 屬亮彩膜層組33。該金屬亮彩膜層組33具有一以銘金屬製 成且呈不透光以將光線反射的反光膜層331，及_以錯金屬 材質與含氮氧碳氫氣體化合而成並可呈現出多層次色彩之 可透光的多色膜層332。該金屬亮彩鍍膜步驟43具有一反 光鍍膜步驟431，及一多色鍍膜步驟432。 、該反光鍍膜步驟431是將該反光膜層331鍍覆於該基 礎漆膜層組32之亮漆膜層322表面上並位於該多色膜層 332的下方。該多色賴步驟432是將該多色膜層鐘覆 形成於該反光膜層331的表面上。 μ如圖3'5、6所示’以下說明如何利用該真空磁控滅 射又備7進仃真空磁控濺射，以形成該反光膜層别與多 色膜層332。 12 1270396 【主要元件符號說明】 2 11101111111111ίϊ| 頭 43 ΠΙΙΙΊΙH11II1111 ^ 屬亮彩鍍膜步Similarly, the lacquer coating step 422 is to apply a protective lacquer to the surface of the primer film layer 321 and then dry and harden the protective lacquer by high temperature baking or ultraviolet ray to form the bright lacquer. The paint film layer 322 uses the lacquer film layer 322 to increase the flatness and brightness of the base paint film layer 32, preferably, it can exhibit a near-mirror morphology to improve the quality of the subsequent metal bright color coating step 43. . In actual operation, if the smoothness of the formed primer film layer 321 is sufficient, the lacquer coating step 422 may not be performed. The metal bright color coating step 43 is performed by vacuum magnetron sputtering using a vacuum magnetron sputtering device 7 (Va_m Magnetron SpuUering System), and deposited on the base paint film layer 32 - a metal light which exhibits multi-layer color Color film layer group 33. The metal bright color film layer group 33 has a reflective film layer 331 made of metal and opaque to reflect light, and is formed by combining a wrong metal material with a nitrogen-oxygen-containing hydrocarbon gas. A multi-layered opaque multi-color film layer 332. The metallic bright coating step 43 has a reflective coating step 431 and a multi-color coating step 432. The reflective coating step 431 is performed by plating the reflective film layer 331 on the surface of the lacquer film layer 322 of the base paint film layer 32 and below the multi-color film layer 332. The multi-color step 432 is performed by forming the multi-color film layer on the surface of the reflective film layer 331. μ is as shown in Figs. 3', 5'. The following describes how to use the vacuum magnetron to extinguish and further perform vacuum magnetron sputtering to form the reflective film layer and the polychromatic film layer 332. 12 1270396 [Key component symbol description] 2 11101111111111ίϊ| Head 43 ΠΙΙΙΊΙH11II1111 ^ Bright color coating step
3 111IIII11111111IIII _ 身 3 1 I I! II I! IIII I! II!! 康桿體 3 2 απ 11 11 11 11 11 基礎漆膜層組 321 CI II || || || || 應漆膜層 322 [I II || || || || 廣漆膜層 3 3 niF IIII mi II 讼屬亮彩膜層組 331 [I II II II II II 反光膜層 332 Π： II || || || || ]多色膜層 34 ΓΚΤίΓ II II II II II :條護膜層 3 5 ΠΠΠΓ II || || || || 嫁桿半成品 41 ΠΠΠΓ II || || || || 满製步驟 42 iimmiimi基礎漆塗覆步驟 421 U1JU1M1底漆塗覆步驟 477 1 IIIIIIIIIIII 鹿漆塗覆步驟3 111IIII11111111IIII _ Body 3 1 II! II I! IIII I! II!! Recreational body 3 2 απ 11 11 11 11 11 Basic paint layer set 321 CI II || || |||| I II || || || || Wide paint layer 3 3 niF IIII mi II Licensing bright color film layer 331 [I II II II II II reflective film layer 332 Π: II || || || || Multi-color film layer 34 ΓΚΤίΓ II II II II II : Strip film layer 3 5 ΠΠΠΓ II || || || | Marriage semi-finished product 41 ΠΠΠΓ II || || || || Full step 42 iimmiimi base paint Coating step 421 U1JU1M1 Primer coating step 477 1 IIIIIIIIIIII Deer coating step
44 ΓΊΙIIIInilIIIIII Ϊ呆護膜塗覆步驟 7 I II II II II (I II II II II 滇空磁控濺射設 備 71 1-11011II1111II 真空腔體 7 7 11 n il IIIIIIIIII :抽氣單元 73 _圓丨1汰轉盤 74 I II111111111111II >J> 轉盤 75 1.:..1111111.11.11111. ^ 射單元 751 1.00.0.磁性件 752 1 111111111111 金屬把材 753 L.mu.i輸氣件 76 LMOlilL輸氣單元44 ΓΊΙIIIInilIIIIII Ϊ coating method 7 I II II II II (I II II II II hollow magnetron sputtering equipment 71 1-11011II1111II vacuum chamber 7 7 11 n il IIIIIIIIII : pumping unit 73 _ round 丨 1 Turntable 74 I II111111111111II >J> Turntable 75 1.:..1111111.11.11111. ^ Shooting unit 751 1.00.0. Magnetic parts 752 1 111111111111 Metal material 753 L.mu.i gas conveying unit 76 LMOlilL gas conveying unit
2020