1269377 九、發明說明·· 【發明所屬技術領域】 本發明係為一種斜切切辦刀組結構，尤指具有固定傾 斜切角之刀組結構。 【先前技術】 按’習知之化學機械研磨機械係需於晶圓研磨台上設 置研磨墊，並使研漿流至於該研磨墊表面，據以施壓於晶 圓於該研磨墊上，以利用該研磨墊表面之研漿研磨該晶圓 表面。 然而，當更新該晶圓研磨台上之研磨墊時，亦需切割 該研磨墊超出該晶圓研磨台之部分，且須進一步利用人工 方式使用美工刀修整該研磨墊邊緣，使其呈一傾斜角度， 如此以避免突出之研磨墊刮傷晶圓，但，由於人工方=無 法切割出一致性切割角，以致於割傷該晶圓研磨台或切^ 過多的研磨墊，進而導致研漿不易流出該研磨墊而積塞於 研磨墊邊緣，亦使晶圓被研磨墊邊緣之積塞研磨粒刮傷。 緣是，發明人乃根據此等缺失及依據多年來從事製造 產品之相關經驗，悉心觀察且研究之，乃潛心研究並配合 學理之運用，而提出—種設計合理且有效改善該缺失之 發明。 【發明内容】 士，明案之其一目的，在於提供-種斜切切斷刀組結 構藉以具有固疋傾斜角度之切斷刀組結構以切割化學 機械研磨裝置上的研磨塾的角緣，如此即可修整研磨塾之 1269377 磨塾’_免積塞於研 構，一種斜切切斷刀組結 疋角刀口J且谷易操作，並較為安全。 體具'彎 括—座體及刀片’其中該座 該刀片橋互之琴折部的兩侧抵靠於一物件， 同時ί:?二:Γ::該座體抵靠且移_^^ 切物。片糾細物呈—縣角度而據以傾_切該待 -座·===之適於斜切-待切物，其包括 該座體之傾斜面上’因此藉由 2之’其固設於 該可伸缩調整刀片之刀具之物件，： 切物。 一預定角斜切切斷- 【實施方式】 明參閱第一圖所示’本發明後 構’其包括一座體10及一刀片=—種斜切切斷刀、自1269377 IX. INSTRUCTION DESCRIPTION OF THE INVENTION [Technical Field] The present invention is a skew cutting and cutting tool set structure, especially a knife set structure having a fixed inclined cutting angle. [Prior Art] According to the conventional chemical mechanical polishing machine, a polishing pad is disposed on the wafer polishing table, and the slurry is applied to the surface of the polishing pad, thereby applying pressure to the wafer on the polishing pad to utilize the The slurry on the surface of the polishing pad grinds the surface of the wafer. However, when the polishing pad on the wafer polishing table is updated, the polishing pad is also required to be cut beyond the polishing table of the wafer, and the edge of the polishing pad must be further manually trimmed by a utility knife to make it inclined. Angle, so as to avoid the scratching of the wafer by the protruding polishing pad, but because the artificial side = can not cut the uniform cutting angle, so that the wafer polishing table is cut or the polishing pad is cut too much, thereby making the slurry difficult Flowing out of the polishing pad and plugging it on the edge of the polishing pad also causes the wafer to be scratched by the plug abrasive particles at the edge of the polishing pad. The reason is that the inventors have carefully observed and studied based on such deficiencies and based on years of experience in manufacturing products. They have devoted themselves to research and cooperate with the use of academics, and have proposed an invention that is reasonable in design and effective in improving the deficiency. SUMMARY OF THE INVENTION A purpose of the present invention is to provide a cutting-edge cutting blade structure by which a cutting blade structure having a solid angle of inclination is used to cut the corner of the grinding bead on the chemical mechanical polishing device. It can be used to trim the 1269377 grinding 塾 '_ 积 于 于 研 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The body has a 'bending bracket-body and a blade', wherein the sides of the piano bridge of the blade bridge abut against an object, and ί:? 2: Γ:: the body abuts and moves _^^ Cut things. The piece of trimming material is - the angle of the county, and it is suitable for the beveling-to-cut object, which includes the inclined surface of the seat, so it is solidified by 2 An object provided on the tool of the retractable adjustment blade,: a cut object. A predetermined angle bevel cut - [Embodiment] Referring to the first embodiment, the present invention includes a body 10 and a blade = a bevel cutting knife,
—彎折部11 ’並且使該座體i 2 體1 0J 壁:滑壓於—晶圓研磨台3 〇 :‘二1上端’ 内壁面滑抵於晶圓研磨台3 On姑塾4 ◦，且下綠 彎折部1 1 ’且該刀片2 〇之 〇橫互於 1之兩壁面，且與該研磨塾4刀別連接於該f折部 U王一預定角度，如此滑 1269377 該座體1 〇並同時利用該傾斜刀片2 0刨切該研磨墊4 0， 請參閱第二圖及第三圖所示，該座體1 〇係包括一第 一板體1 2及一第二板體1 3，且該第一板體1 2及該第 二板體1 3之一端部相互垂直連接，且形成該座體1 〇之 彎折部11，且該座體i〇之下侧之一邊具有一橫向滑槽 1 4 ’且使二導輪件1 5係設置該座體1 〇之下侧之兩 邊’且其中一導輪件1 5係可調整地固設於該座體1〇之 滑槽14上’藉以使該等導輪件1 5分別滾接於該晶圓研 磨口 3 0侧面上，另使一底座1 6鎖接於該座體1 〇之彎 折部1 1之上端部的第一板體1 2内侧壁上，藉以使該底 座1 6滑壓於該研磨墊4 〇上，而避免刮傷該研磨墊4 0，同時可滑移調整該座體丄〇之滑槽上之導輪件丄5， 藉以配合該晶圓研磨台3 Q之侧壁。 該斜切切斷刀組結構係更包括二連接座5 〇其分別固 接於該座體1〇之彎折部1i二側之第—板2及第二 板體1 3内侧壁上，且該刀片2 〇之二端分別固接於該等 連接座5 0上，且該等連接座5⑽為三肖形，如此使該 刀片2 0橫亙於該座體！（3之彎折部11，另，請參閱第 四圖及第五圖所示，其中該刀片2Q或可連接於-連接座 5 〇上，該連接座5 0之—端樞接於彎折部1 1之第-板 體1 2，且另一端藉由螺絲1 9螺接於該第二板體！ 3 上’且该連接座5 Q更具有二凸伸部5】凸伸其上之一侧 面，該刀片2 0之二端分別固接於該等凸伸部5工，以橫 互於料折部1 ljL，因此可藉由旋轉調整獅丄9延伸 1269377 f該第二板體13内側壁之長产， 3 之夹二 於該化學研磨裝’Ϊ之:所示’使該底座1 0魏 =:r研磨裝置導輪件15分別 】1〇:ί物4〇呈-傾斜二侧面，且使該刀 體10俾可以’定傾斜 ^度’並同時移動 即可修整研磨塾塾4 0之角緣，如此 ί4 〇 :因此避免積塞於研磨塾4:〜易於研漿流出研磨 磨粒刮傷晶圓。 〇的邊緣而使積塞之研 另明參閱第六圖及第七图_ 組結構係適於斜切一待切物，:斤示’其中該斜切切斷刀 刀具6 〇，該座體〇及一可伸 一置放底面1 8，該座體！ 〇之，、有一傾斜面1 7及 8係王銳角，且該可伸縮調整刀w、面1 7及置放底面1 體1 0之傾斜面1 7上，且該刀片刀具6 〇固設於該座 傾斜面17，藉此該座體1°〇<放之切面係可平行該 該可伸縮調整刀片之刀且β n 、、研磨塾4 〇上，而使 〇。 、 i^斜切切斷該研磨墊4 其中該座體10係包括—矩形 6，且該矩形柱體5係直立且斜接於+體5及—置放板體 該矩形柱體5之外側面係為該傾斜^置放板體6上，且 6之底面係為置放底面1 8，且更勺7 ’且該置放板體 該座體1 0之置放底面1 8上，^括—底座1 6鎖接於 5亥底座16係可為聚四氟 1269377 乙稀製成，據以使該底座1 6滑置該研磨墊4 〇上時，可 避免刮傷該研磨墊4 〇。 請參閱第八圖所示，該可伸縮調整刀片之刀具6 〇包 括一刀具座6 1、一刀片2 0及一固接件62,該刀具| 6 1之兩側彎折成兩相對兩刀槽6 3，且該刀具座6I固 設於該座體1〇之傾斜面17上，該刀片2 〇之二侧分別 容置於該兩刀槽6 3内，以滑設於其上，該固接件6 2固 接該刀片2 0於該刀具座6 〇上；該固接件6 2係包括一 滑接凡6 4件及一螺絲6 5，且該滑接件6 4具有一卡凸 部6j 1，該卡凸部卡6 4 i穿抵於該刀片2 〇之穿孔2 ^該螺絲6 5鎖接於該滑接件6 4上，據以使其該螺絲 6 5之螺頭底面抵壓於該兩刀槽6 3之外侧壁上；且該可 整刀片之刀具6〇更包括二固料66，別 刀具座6 0之二側，並夾固於該座體1〇上之 相對二姻，另使—刀具傾斜度調整旋紐6 了鎖 端抽i I座6 Q之上端，且該傾斜度調整旋㈣7之底 知抵頂於該座體]_ 〇之傾钭 ，益 （之底 座6 0與該傾斜面17之二猎由_而調整該刀具 刀片2 ’藉由4底座1 6滑抵於該研磨墊4 Q上，且該 有；i::角「斜切切斷刀組結構」藉由該具 t的研磨墊的；緣，學，磨裝 同"易於研漿流出研磨，，因此;; 1269377 =研f粒刮傷晶圓，同時該斜切切斷刀組結構更有易於固 疋切告彳角，且容易操作並較為安全之優點。 淮以上所述僅為本發明之較佳可行實施例，非因此拘 :容變:舉=用本發明之說明書及圖示 内，給予_艾化’均同理皆包含於本發明之範圍 【圖示簡單說明】 ;二月之斜切切斷刀組結構第-實施例示意圖; 弟-=係本發明之斜切域縣結構第—實施例立體組合 圖， 第二圖係本發明之斜切切 圖； 第四圖係本發明之斜切切 第五圖係本發明之斜切切 圖； 斷刀組結構第一實施例立體分解 斷刀組結構第二實施例示意圖； 斷刀組結構第二實施例立體分解 #二：、本1月之斜切切斷刀組結構第三實施例立體示意 圖； 第七^本發明之斜切切斷刀組結構第 例侧視示意 圖；以及 第八=係本發明之斜切切斷政結構第三實施例可伸縮調 正刀片之刀具立體分解圖。 【圖示中參考號數】 [本發明] 1269377 矩形柱體5 置放板體6 座體10 . 彎折部11 - 第一板體12 第二板體13 橫向滑槽14 導輪件15 · 底座1 6 傾斜面1 7 置放底面18 螺絲1 9 刀片2 0 穿孔2 1 晶圓研磨台3 0 研磨墊40 · 連接座5 0 可伸縮調整刀片之刀具6 0 刀具座6 1 固接件Θ 2 刀槽6 3 滑接元Θ4 螺絲Θ 5 11 1269377 卡凸部641 固定件6 6 刀具傾斜度調整旋鈕6 7- the bent portion 11 'and the seat body i 2 body 1 0J wall: sliding on the wafer polishing table 3 〇: 'two upper end' inner wall surface sliding against the wafer grinding table 3 On 塾 4 ◦, And the lower green bent portion 1 1 ′ and the blade 2 〇 〇 〇 〇 1 1 , , , , , , , , , , , , , , 1 1 1 1 1 269 269 269 269 269 269 269 269 269 269 269 269 269 269 269 269 1 〇 and simultaneously use the tilting blade 20 to cut the polishing pad 40. Referring to the second and third figures, the base 1 includes a first plate body 1 2 and a second plate body. 1 3, and one end of the first plate body 1 2 and the second plate body 13 is perpendicularly connected to each other, and the bent portion 11 of the seat body 1 is formed, and one side of the lower side of the seat body i〇 The utility model has a transverse sliding groove 14′′ and two guiding wheel members 15 are disposed on two sides of the lower side of the seat body 1 且 and one of the guiding wheel members 15 is adjustably fixed to the seat body 1 The sliding groove 14 is mounted on the side of the wafer grinding port 30, and the base 16 is locked to the upper end of the bent portion 1 1 of the seat body 1 On the inner side wall of the first plate body 1 2 Sliding the base 16 to the polishing pad 4 to avoid scratching the polishing pad 40, and simultaneously adjusting the guide wheel member 丄5 on the sliding groove of the seat body to match the crystal The side wall of the circular grinding table 3 Q. The beveling cutting blade structure further includes two connecting bases 5 which are respectively fixed on the inner side plates of the first plate 2 and the second plate body 13 on the two sides of the bent portion 1i of the seat body 1 , and the The two ends of the blade 2 are respectively fixed to the connecting blocks 50, and the connecting blocks 5 (10) are three-Shaw shape, so that the blade 20 is transverse to the seat body! (3, the bent portion 11, further, as shown in the fourth and fifth figures, wherein the blade 2Q can be connected to the - connector 5, the end of the connector 50 is pivotally connected to the bend The first plate-plate 1 2 of the portion 1 1 and the other end is screwed to the second plate body by screws 19! 3 and the connecting block 5 Q has two protruding portions 5 projecting thereon On one side, the two ends of the blade 20 are respectively fixed to the convex portions 5 so as to be transverse to the material folding portion 1 ljL, so that the second plate body 13 can be extended by rotating the Griffon 9 1269377 Long-term production of the inner side wall, 3 clips in the chemical grinding device 'Ϊ之: shown 'to make the base 10 Wei =: r grinding device guide wheel 15 respectively】 1 〇: ί 4 〇 - 斜The side surface, and the cutter body 10俾 can be 'slanted and tilted' and moved at the same time to trim the corner edge of the grinding crucible 40, thus ί4 〇: thus avoiding the accumulation of the grinding crucible 4: ~ easy to grind the slurry out of the grinding The abrasive grain scratches the wafer. The edge of the crucible makes the construction of the plug. See also the sixth and seventh figures. _ The group structure is suitable for beveling a to-be-cut object. 6 〇, the seat 〇 一 一 一 底面 底面 底面 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 底面 底面 底面 底面 底面 底面 底面 底面 底面 底面 底面 底面 底面 底面 底面 底面 底面 底面 底面 底面 底面 底面 底面 底面 底面 底面 底面 底面 底面The inclined surface 17 is disposed, and the blade cutter 6 is fixed to the inclined surface 17 of the seat, whereby the seat body is 1° 〇<the cut surface is parallel to the knife of the telescopic adjustment blade and β n , Grinding the crucible 4 〇, and making 〇., i^ chamfering the polishing pad 4, wherein the housing 10 includes a rectangle 6, and the rectangular cylinder 5 is erected and slanted to the + body 5 and placed The outer side of the rectangular cylinder 5 is disposed on the inclined surface of the rectangular body 5, and the bottom surface of the sixth surface is a bottom surface 18 and a further scoop 7 ' and the housing body is placed. The bottom surface 18 is placed on the bottom surface, and the base 16 is locked to the 5th base. The 16 series can be made of polytetrafluoro 1269377, so that when the base 16 is slid on the polishing pad 4, It is possible to avoid scratching the polishing pad 4 〇. As shown in the eighth figure, the tool 6 〇 of the retractable adjustment blade includes a tool holder 6 1 , a blade 20 and a fixing member 62 , the tool | 6 1 Bent on both sides into two phases Two sipe 6 3 , and the tool holder 6I is fixed on the inclined surface 17 of the seat body 1 , and the two sides of the blade 2 are respectively received in the two sipe 6 3 to be slid thereon The fixing member 6 2 is fixed to the blade 20 on the tool holder 6; the fixing member 6 2 includes a sliding member 64 and a screw 65, and the sliding member 64 has a card protrusion 6j1, the card protrusion card 6 4 i is inserted through the hole 2 of the blade 2 ^ 2 ^ The screw 6 5 is locked to the sliding member 64, so that the screw 6 5 The bottom surface of the screw head is pressed against the outer side wall of the two sipe 6 3; and the cutter 6 〇 of the screed blade further comprises two solid materials 66, two sides of the tool holder 60, and is clamped to the seat body 1 The relative two marriages on the raft, and the other - the tool inclination adjustment knob 6 is the upper end of the lock end, and the bottom of the inclination adjustment knob (4) 7 is close to the seat body] _ 〇钭, Benefit (the base 60 and the inclined surface 17 are hunted by the _ and the cutter blade 2' is slid on the polishing pad 4 Q by the 4 base 16 and has; i:: angle" "Chamfering knife set structure" by the polishing pad with t; edge, learning, grinding It is easy to grind the slurry out of the grinding, so; 1269377 = Grinding the wafer to scratch the wafer, and the structure of the beveling cutting blade is easier to fix, and easy to operate and safer. . The above description is only a preferred embodiment of the present invention, and is not limited to the following: in the specification and the drawings of the present invention, the same is given to the scope of the present invention. Brief Description of the Drawings]; schematic diagram of the second embodiment of the oblique cutting cutting blade structure in the second embodiment; the brother-= is the three-dimensional combination drawing of the oblique-cutting county structure of the present invention, and the second drawing is the oblique cutting of the present invention Figure 4 is a perspective view of the present invention; a fifth embodiment of a three-dimensional exploded broken blade group structure of a first embodiment; a second embodiment of a broken blade group structure Stereoscopic decomposition #二:, a three-dimensional schematic diagram of the third embodiment of the oblique cutting cutting blade structure of the present invention; a seventh side schematic view of the first example of the oblique cutting cutting blade structure of the present invention; and the eighth = the oblique of the present invention The third embodiment of the cut and cut structure is a three-dimensional exploded view of the tool of the telescopic adjustment blade. [Reference number in the drawing] [Invention] 1269377 Rectangular cylinder 5 Ply body 6 Seat body 10. Bending portion 11 - First plate body 12 Second plate body 13 Lateral chute 14 Guide wheel member 15 Base 1 6 Inclined surface 1 7 Placed bottom surface 18 Screw 1 9 Insert 2 0 Perforated 2 1 Wafer grinding table 3 0 Grinding pad 40 · Connector 5 0 Tool for telescopic adjustment blade 6 0 Tool holder 6 1 Retaining memberΘ 2 Slot 6 3 Sliding element Θ 4 Screw Θ 5 11 1269377 Card projection 641 Fixing member 6 6 Tool tilt adjustment knob 6 7
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