[go: up one dir, main page]

TWI268570B - Substrate cassette - Google Patents

Substrate cassette

Info

Publication number
TWI268570B
TWI268570B TW092122809A TW92122809A TWI268570B TW I268570 B TWI268570 B TW I268570B TW 092122809 A TW092122809 A TW 092122809A TW 92122809 A TW92122809 A TW 92122809A TW I268570 B TWI268570 B TW I268570B
Authority
TW
Taiwan
Prior art keywords
cassette
supporting bodies
substrate cassette
frame
receiving space
Prior art date
Application number
TW092122809A
Other languages
English (en)
Other versions
TW200509282A (en
Inventor
Cheng-Doul Chuang
Chien-Sung Deng
Hung-Wen Yang
Original Assignee
Innolux Display Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Innolux Display Corp filed Critical Innolux Display Corp
Priority to TW092122809A priority Critical patent/TWI268570B/zh
Priority to US10/923,189 priority patent/US7246708B2/en
Publication of TW200509282A publication Critical patent/TW200509282A/zh
Application granted granted Critical
Publication of TWI268570B publication Critical patent/TWI268570B/zh

Links

Classifications

    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47B—TABLES; DESKS; OFFICE FURNITURE; CABINETS; DRAWERS; GENERAL DETAILS OF FURNITURE
    • A47B57/00—Cabinets, racks or shelf units, characterised by features for adjusting shelves or partitions
    • A47B57/06—Cabinets, racks or shelf units, characterised by features for adjusting shelves or partitions with means for adjusting the height of the shelves
    • A47B57/08—Cabinets, racks or shelf units, characterised by features for adjusting shelves or partitions with means for adjusting the height of the shelves consisting of grooved or notched ledges, uprights or side walls
    • A47B57/10—Cabinets, racks or shelf units, characterised by features for adjusting shelves or partitions with means for adjusting the height of the shelves consisting of grooved or notched ledges, uprights or side walls the grooved or notched parts being the side walls or uprights themselves
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47B—TABLES; DESKS; OFFICE FURNITURE; CABINETS; DRAWERS; GENERAL DETAILS OF FURNITURE
    • A47B81/00—Cabinets or racks specially adapted for other particular purposes, e.g. for storing guns or skis
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B23/00—Record carriers not specific to the method of recording or reproducing; Accessories, e.g. containers, specially adapted for co-operation with the recording or reproducing apparatus ; Intermediate mediums; Apparatus or processes specially adapted for their manufacture
    • G11B23/02—Containers; Storing means both adapted to cooperate with the recording or reproducing means
    • G11B23/023—Containers for magazines or cassettes
    • G11B23/0236—Containers for several cassettes

Landscapes

  • Packaging Frangible Articles (AREA)
  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
TW092122809A 2003-08-20 2003-08-20 Substrate cassette TWI268570B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW092122809A TWI268570B (en) 2003-08-20 2003-08-20 Substrate cassette
US10/923,189 US7246708B2 (en) 2003-08-20 2004-08-20 Adjustable cassette for substrates

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW092122809A TWI268570B (en) 2003-08-20 2003-08-20 Substrate cassette

Publications (2)

Publication Number Publication Date
TW200509282A TW200509282A (en) 2005-03-01
TWI268570B true TWI268570B (en) 2006-12-11

Family

ID=34192396

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092122809A TWI268570B (en) 2003-08-20 2003-08-20 Substrate cassette

Country Status (2)

Country Link
US (1) US7246708B2 (zh)
TW (1) TWI268570B (zh)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7748532B2 (en) * 2002-10-10 2010-07-06 Seagate Technology Llc Cassette for holding disks of different diameters
JP2005340480A (ja) * 2004-05-26 2005-12-08 Nippon Oil Corp 基板カセット用サポートバー
TWI248909B (en) * 2004-10-12 2006-02-11 Au Optronics Corp A cassette for placing multiple-sized substrate
JP2006293257A (ja) * 2005-04-08 2006-10-26 Samsung Electronics Co Ltd 表示パネル用ガラスを積載するためのガラスカセット
TWI315002B (en) * 2005-04-15 2009-09-21 Innolux Display Corp Substrate cassette
US7395933B2 (en) * 2005-06-14 2008-07-08 Intel Corporation Carrier to hold semiconductor device using opposed rollers
JP5123851B2 (ja) 2005-07-08 2013-01-23 クロッシング オートメーション インコーポレイテッド 加工物を格納するための加工物容器
US20090101067A1 (en) * 2005-07-08 2009-04-23 Bonora Anthony C Method and apparatus for wafer support
US7748542B2 (en) * 2005-08-31 2010-07-06 Applied Materials, Inc. Batch deposition tool and compressed boat
TWM309202U (en) * 2006-08-15 2007-04-01 Gudeng Prec Industral Co Ltd Wafer pod and wafer holding device thereof
CN101503128B (zh) * 2008-02-04 2010-12-22 北京京东方光电科技有限公司 装载箱和装卸系统
DE202010000875U1 (de) * 2010-01-12 2011-05-26 Paul Hettich GmbH & Co. KG, 32278 Vorrichtung zum Transport von Gegenständen
US20110272420A1 (en) * 2010-05-05 2011-11-10 Applied Materials, Inc. Enclosed vertical rack for storing and transporting large substrates
KR101212889B1 (ko) * 2010-10-01 2012-12-14 하이디스 테크놀로지 주식회사 기판 적재용 카세트
JP5857776B2 (ja) * 2011-04-08 2016-02-10 東京エレクトロン株式会社 基板保持具及び縦型熱処理装置並びに縦型熱処理装置の運転方法
US9144901B2 (en) * 2012-08-08 2015-09-29 Weibing Yang Storage device for multilayer substrate
CN102826303A (zh) * 2012-08-28 2012-12-19 深圳市华星光电技术有限公司 玻璃基板卡匣
US8896964B1 (en) 2013-05-16 2014-11-25 Seagate Technology Llc Enlarged substrate for magnetic recording medium
CN103448048B (zh) * 2013-09-09 2015-11-25 深圳市华星光电技术有限公司 基板存放架
CN104309946B (zh) * 2014-11-17 2017-01-18 合肥鑫晟光电科技有限公司 一种显示面板存储装置
CN104986573B (zh) * 2015-05-28 2017-03-08 合肥京东方光电科技有限公司 用于承载基板的承载装置
CN106829215B (zh) * 2017-03-01 2018-10-23 合肥鑫晟光电科技有限公司 面板存放装置及其控制方法
KR102777080B1 (ko) * 2020-06-05 2025-03-05 삼성전자주식회사 개폐형 기판 수용 카세트 및 그 시스템
JP2023160460A (ja) * 2022-04-22 2023-11-02 株式会社ニックス 産業用マガジンラック

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4191295A (en) * 1978-08-14 1980-03-04 Rca Corporation Processing rack
TW344847B (en) * 1996-08-29 1998-11-11 Tokyo Electron Co Ltd Substrate treatment system, substrate transfer system, and substrate transfer method
JPH10203584A (ja) * 1997-01-22 1998-08-04 Nec Corp 基板用カセット
KR100247138B1 (ko) * 1997-11-20 2000-03-15 구본준, 론 위라하디락사 유리기판 적재용 카세트
US5890597A (en) * 1997-12-19 1999-04-06 Industrial Technology Research Institute Wafer retaining mechanism
US5960959A (en) * 1998-01-13 1999-10-05 Industrial Technology Research Institute Wafer retaining mechanism
US6145673A (en) * 1999-03-31 2000-11-14 Applied Materials, Inc. Wafer transfer cassette
KR100737846B1 (ko) * 1999-09-06 2007-07-12 요도가와 휴텍 가부시키가이샤 카세트용 장척(長尺)리브 및 기판용 카세트
US6749072B2 (en) * 2001-06-12 2004-06-15 Nix, Inc. Frame structure for housing panel plates
TWI230999B (en) * 2003-10-27 2005-04-11 Ind Tech Res Inst Holding device of cleaning container

Also Published As

Publication number Publication date
US7246708B2 (en) 2007-07-24
TW200509282A (en) 2005-03-01
US20050041325A1 (en) 2005-02-24

Similar Documents

Publication Publication Date Title
TWI268570B (en) Substrate cassette
AU2003229196A8 (en) Ceramic thin film on various substrates, and process for producing same
TW571144B (en) Substrate assembling apparatus
AU2003295647A1 (en) RELAXED SiGe LAYERS ON Si OR SILICON-ON-INSULATOR SUBSTRATES BY ION IMPLANTATION AND THERMAL ANNEALING
AU2002354485A8 (en) Phosphor single crystal substrate and method for preparing the same, and nitride semiconductor component using the same
AU2003297934A1 (en) Packaging two different substrates
WO2007066180A3 (en) Use of timing information for handling aggregated frames in a wireless network
ZA200502210B (en) Substrates for O6-alkylguanine-DNA alkyltansferase.
SG117435A1 (en) Calibration methods, calibration substrates, lithographic apparatus and device manufacturing methods
AU2002316697A1 (en) 300mm single stackable film frame carrier
IN2012DN02609A (zh)
TW200619734A (en) Method of manufacturing flexible display device
TWI229650B (en) Substrate accommodating tray
AU2003283248A1 (en) Extremely thin substrate support
TW200636328A (en) Substrate cassette
SG121817A1 (en) Glass substrate for flat planel display, and process for producing the same
TW553195U (en) Substrate supporting slot plate and substrate cassette using the same
IL174350A0 (en) Spinel articles and methods for forming same
AU2003209628A1 (en) Method for manufacturing flat panel display substrates
MY148114A (en) A conversion kit
TW200508122A (en) Substrate transfer
AU2002353351A1 (en) Lithography process for transparent substrates
WO2005069742A3 (en) Crystal form ii of memantine hydrochloride
WO2007000543A3 (fr) Dispositif de fixation pour substrats, en particulier des substrats verriers
AU2002334941A1 (en) Testing circuits on substrates

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees