TWI251627B - Silicon sheet producing apparatus and solar cell comprising silicon sheet produced by the same - Google Patents

Abstract

A silicon sheet producing apparatus comprising a crucible (14) containing fused silicon and a rotating cooling body (11) rotatably disposed above the crucible (14) and having at least one flat surface (1) for growing a solid silicon sheet (12) on the surface is characterized by comprising a separating/transfer out mechanism for separating a silicon sheet (12) formed on the flat surface (1) of the rotating cooling body (11) by dipping it in a fused silicon (13) by the rotation and then lifting it up from the fused silicon (13) and transferring the separated silicon sheet (12) by the inertia force by the rotation of the rotating cooling body (11) and/or the fall by the gravity out of the apparatus before the silicon sheet (12) is dipped again in the fused silicon (13). With this, a planar silicon sheet free of internal stress can be produced and the silicon sheet can be taken out continuously and stably.

Description

A7 B7 1251627 TECHNICAL FIELD The present invention mainly relates to a solar cell used in a solar cell, a solar cell, and a solar cell fabricated using the same, and is also a prior art... Wang related invention.目(五)~ The main method of immersing the rotary heat sink in the sleek fusion, the main slab, and taking out the slab generated on the cooling surface, 1 ’

A method for purifying a slab as disclosed in Japanese Patent No. 423175. According to this method, the cylindrical surface of the rotary heat sink is partially immersed in the liquid to rotate the rotary heat sink, and a circular 饩 and a P surface make the concrete solidified on the same side. Grow it up and re-melt it, by removing the rush of impurities. It is possible to take the sleek cooling body to soak it in the melting enthalpy; the person _ Ben ώ ώ ώ ώ ώ ώ ώ ώ ώ ώ ώ ώ ώ ώ 29 29 29 29 29 29 29 29 29 29 29 29 29 The disclosed belt manufacturing device. 1. Open the main part of the boring belt manufacturing device, which consists of a heat-melting part of 矽, a heat-melting part of 矽, and a cooling part of a cold-rolling body. The method of taking the (four) tape by the manufacturing apparatus. That is, it will be on the top: Turn cooling:? The cylindrical surface, ^ but the body (51 rotation, the second melt hard 63, - the surface makes the rotation cold take out. The opening /,, the meteorite reverse net 6 5 take out, and then the 矽 belt ^ 2 continuous two:: Secondly, the Jane (four) block is sliced with steel wire and the like, and the raw material fee is obtained. W~ clothes t million method can reduce the labor cost and 73t; SI - (;. 〇Κ 25 荻 尺度 scale suitable for 1251627

As a method of improving the method, a crystal plate manufacturing apparatus disclosed in Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. Fig. 7 is a view showing a method of fabricating a crystal plate obtained by the manufacture of the nutrient. The rotary cooling body 171 is provided with an annular convex portion 77 formed by the name 相 intersecting the rotary shaft and a concave-convex structure formed by the concave portion 78. In the solution 73 of metal or non-ferrous metal, in order not to make the solution, the bottom portion of the concave portion 78 is immersed only in the convex portion. Accordingly, the crystal nucleus occurs in the convex portion 77 and grows with the self-phase _ The convex portion 7 and the grown crystal contact 'forms the crystal plate 7 2. According to this method, the concave portion 78 is not immersed in the melt 73, so that the adhesion strength between the rotary cooling body and the crystal plate 72 is lowered. The crystal plate 72 can be easily peeled off from the rotary heat sink 71. Further, since the crystal nucleus can be controlled to occur only in the convex portion 77, a relatively large crystal L can be obtained. Further, since the concave portion 78 of the rotary heat sink 71 is provided with the crystal plate scraping portion 75 inserted into the front end, the crystal plate 7 2 can be easily and continuously scraped off from the rotary heat sink 71. In the method disclosed in the above-mentioned U.S. Patent No. 423 175, it is necessary to re-melt the metal and take it out in a liquid state. That is, it is impossible to directly take out the plate-like metal, and it is necessary to recrystallize the remelted metal. For this reason, this method is applied to the manufacture of an ankle band, and it requires a lot of processes such as melting, generating a solidified shell, re-melting, and recrystallization, so that it consumes electricity, Japanese temples, and costs. It also gets bigger. Moreover, it is impossible to make a succession. ^ -5 - 1251627 A7

In the above-mentioned Japanese Laid-Open Patent Publication No. 2001-19759, the crystal plate manufacturing apparatus of the r and the road is provided, and the foot is formed in the cylindrical type, and the 生成 generated on the A-type* > 丨7 1 The solidified structure cannot directly take out the flat stone plate... Since the taken stone plate is not flat, it is difficult to continuously take out. In addition, the "scraping portion" is formed by removing the flat surface of the shovel/mouth shovel and scraping the surface of the shovel, and the crystal growth is performed on the cylindrical slewing cooling body 71. A method of extending in a plane along the cylindrical crystal plate 72. Thus, even in the case where the crystal plate 72 is not completely extended, since the crystal plate 72 remains curved, it is impossible to continuously take out. Further, the crystal taken out The plate 7 2 does not have a planar shape. Further, even when the condition t is stabilized and the crystal plate 72 is completely extended, the internal stress remains on the crystal plate 72, so that the strength of the crystal plate 72 is reduced and pulled out. During the process and slowly cooling, the 曰 曰曰瑕 2 2 2 2 2 2 2 2 2 2 2 2 , , , , 结晶 结晶 结晶 结晶 结晶 结晶 结晶 结晶 结晶 结晶 结晶 结晶 结晶 结晶 结晶 结晶 结晶 结晶 结晶 结晶 结晶 结晶 结晶 结晶 结晶 结晶It is difficult to purchase a flat-shaped slab of slabs at a low cost, and it is difficult to obtain a large number of slabs in the sash manufacturing apparatus disclosed in the above-mentioned Japanese Laid-Open Patent Publication No. Hei. No. Hei. Tubular back The crushed solidified shell formed on the cooling body 6 i is pulled out by the carbon plate at the initial stage of drawing, and by extending, the carbon mesh 6 $ is continued, and the grown planar stone plate 6 2 is continuously pulled out. However, in the case of continuous pulling out, in the case of the ankle strap 62 itself, the subsequent pulling out of the ankle strap 62 becomes a great burden, and therefore the Shishi belt is easily damaged. In this case, Since the carbon plate is used at the beginning of the pull-out, it is impossible to start pulling out the tape 6 2 immediately, and it is necessary to stabilize the -6- paper scale for the Chinese National Standard (CNS) A4 specification (210 X 297). PCT) 1251627 A7 B7 V. INSTRUCTIONS (4) It is difficult to continue pulling out. Also, since the growing crucible is pulled up on the rotary cooling body 61, the stone ribbon 62 is pulled in a flat shape. Therefore, there is internal stress remaining in the ankle strap 62, and the strength of the Shishi belt 62 is weakened. Therefore, during the pulling out process or during the slow cooling process, the strip 62 may be damaged, and it is difficult to stably manufacture continuously. Moreover, the semiconductor characteristics of the semiconductor device fabricated from the tape 62 will follow 3~ Further, when the ankle strap 62 cannot be completely extended, the ankle strap is left to be bent, and it is impossible to continuously take out, and the taken out (four) belt 62 cannot be flat. The present invention is in view of the above. As a matter of fact, it is an object of the present invention to provide a slab manufacturing apparatus which can produce a large number of flat slabs in a stable manner at a low cost, and a solar cell manufactured using the slab sheet. In the present invention, it is possible to provide a slab manufacturing apparatus having the following features: a fused accommodating portion for accommodating a melted crucible, and a slewing cooling body, wherein the fused entangled portion is provided above Rotating and at least one flat surface that solidifies and grows the seesaw sheet on the surface; and is provided with the following means: by swiveling, once immersed in the molten crucible, the spin is pulled from the melting crucible The flat surface of the cooling body is again bubbled before the melting enthalpy, and the gusset sheet formed on the flat surface is peeled off. The inertial force of the rotation of the cooling body and/or the falling of the gravity, and the removal/removal device outside the device. This paper scale applies to China National Standard (CNS) A4 specification !251627

In the invention, since the rotary cooling body is in the flat twist @ I @ h ^ #曰4 丄 面 face, that is, in the batch without the bending piece extending to the flat, it is not necessary to leave the internal stress of the curved raft. delete. The slabs that are not manufactured by the invention's slab manufacturing apparatus are continuously manufactured in a large-scale manner, without the need for separate, and field cutting, and the flat-type stone slabs can be directly obtained, and there is no fine cutting. Loss, so it can be reduced in cost. Moreover, in the invention, the enamel sheet, the 丨 - 取 思 思 耆 耆 耆 耆 耆 耆 耆 耆 耆 耆 耆 耆 耆 耆 耆 耆 耆 耆 耆 耆 耆 耆 耆 耆 耆 耆 耆 耆 耆 耆 耆 耆 耆 耆 耆 耆 耆 耆 耆 耆 耆Or a rectangular slab. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing the construction of a slab manufacturing apparatus in a form of an embodiment of the present invention. Fig. 2 is a structural diagram showing the manufacture of the slab sheet in other versions of the embodiment of the present invention. Fig. 3 is a view showing an i-th stage of the method of peeling the gusset sheet by the peeling member of Fig. 2. Fig. 4 is a view showing a second stage of the method of peeling off the stone plate by the peeling member of Fig. 2; Fig. 5 is a structural diagram for explaining the carry-out auxiliary material provided in the apparatus for manufacturing the stone plate of Figs. 1 and 2; Fig. 6 is a view for explaining the configuration of a conventional slab manufacturing apparatus. Fig. 7 is a view for explaining another configuration of the prior slab manufacturing apparatus. -8-This paper scale applies to China National Standard (CNS) A4 specification (210X 297 mm) V. Invention description (6) Implementation mode::: Attached drawing 'More details on the present invention are not limited to these implementation types state. The second embodiment is the first embodiment of the structure of the cutting board and the manufacturing apparatus of the present invention. The apparatus for manufacturing a slab sheet of the present invention and comprising a stainless steel or the like includes two types of devices: for example, in the interior, for example, a relatively:::: a wide-area heat insulating material, The 矽r T =-heater of the central concentrator of the adder, and the setting, and the smashing 14 (dissolved inside) for 1/1 are used in the 口. The cooling body 11 is rotated. On the circumferential surface of the rotary cooling body U, the plurality of flat faces i of the squares of the squares are flat: the surface of the flat surface 1 which is formed into the seesaw sheet is formed to form the stone plate 12 When the heart is in the 13th in the valley of Yigu, the stone plate produced on the flat surface 1 can be seen to be fixed on the plane of the flat electron microscope for the area of the generated (four) plate. The field, phase 12 is not fixed all attached to the flat surface! On the surface (4), when the appropriate impact is given, it can be easily peeled off during crystal growth. On the flat surface 1 of the sheet 1 2, even if no external impact is applied, under the influence of minute vibration or gravity, the fallen slab piece is peeled off under the rotation of the body η. The self-propelled cooling body 1 i is here described for the second plate 12 from the rotary heat sink u. The gravity action in W 1 dimension firstly puts the flat surface that grows and grows on the lowermost μ flat surface 1 and immerses 1251627. 5. Description of the invention (soaked in melt 1 3 Φ r., grows up. Medium time...12 On the surface of the above flat surface Μ 'W back # cooling #411 lowest point, soaked in the flat of the melting mash; when the position of the surface! is 0 degrees, the 'slewing cooling body η starts from the position of the 〇 degree: =The sheet 12 also rotates with the rotary cooling body. The rotary cooling = 6 专 专 ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' The slab 12 must therefore be detached from the micro-vibration region 12 produced by the rotation of the slewing cooling body before the 360-degree slewing, when the slab 12 is at the twisting degree. When the position of 90 degrees is peeled off from the rotation of Tiu at 1/4 of a week or less, the position of the flat surface 1 of the plate is lower than that of the lower surface of the plate. As a method of recovering the mask 12, the long pipe member 17 must be provided. The position within the two flatness will not fall on the turn 12, then, ~ on the turn. In particular, the slight vibration produced by the rotary cooling body 1 1 does not self-turn the $12 of the cooling body UJ^(4), as the above-mentioned general 'must be self-impact generating member" gives an impact. By using the inertial force generated by the turning slab 12 and the weight = peeling out 'even after the peeling of the slab 12, until: the position of the long pipe member 16 outside the device, the #片12=, Moves in the state above the rotary heat sink 1 1 . When the impact generating member 15 is used back and the sheet U is peeled off at a position within the degree of twist, the broken sheet 12 is located lower than the flat surface i which becomes the reversed weir, so the seesaw sheet is Then fall " / mouth. From -10- This paper scale applies Chinese National Standard (CNS) A4 specification (210X 297 mm) !251627

Further, although the seesaw piece 12 can be taken out using the long pipe member 17, in this case, the long term member 17 and the impact generating member 丨 5 become close to each other. When the seesaw piece 12 is peeled off at a position of 90 to 180 degrees, the seesaw piece 12 is in a state of being flat above; in addition, since the direction of the inertial force due to the rotation and the direction of gravity are opposite Therefore, the rafter does not fall from the flat surface 1, but moves above the plaque and moves to the uppermost point. = That is, the case is the same as the case where the position is separated by 180 degrees at the uppermost point. When the slab 12 is peeled off at a position of 180 to 270 degrees, when the inertial force or gravity is greater than the static friction of the surface of the slab 12 and the flat surface 1, at this point, 矽The sheet 12 will peel off from the flat surface. On the other hand, once the inertial force or the gravity is greater than the static friction force, the seesaw worker 2 will move above the rotary heat sink 1 1 and move at the maximum 27 degrees, and move to 270 degrees. The position is independent of the magnitude of the static friction coefficient and falls vertically. That is, in the position range of 90 degrees to 270 degrees, the seesaw sheet is given. In the case of impact and peeling, the static friction force is independent of the inertial force or gravity, and when the seesaw piece 12 is in the range of 180 to 270 degrees, the cooling body 11 is separated and dropped. s When the Shishi board piece 1 2 is peeled off at a position of 270 degrees to 360 degrees, it is the same as the case where the stone board piece 12 is peeled off at a position of a degree of twist to 90 degrees, since the seesaw piece is located on the flat surface 1 In the lower position, therefore, the slab piece 12 is immediately dropped. In this case, the long pipe member 16 must be placed in the peeling position. Further, the long pipe member 16 and the impact generating member 15 are disposed under the phase. So directly below, at the position -11 - the paper size applies to the Chinese National Standard (CNS) Α 4 specification (210 X 297 mm) 1251627

Since it is difficult to make the peeling-producing device 15 and the impact of the fallen sand hammer in the structure of the apparatus, it is preferable to set the length of the long-length pipe member 16 to 90 to 270. Within the range of degrees. In the case of the above-mentioned reason, the long tube structure is moved to 180 degrees to 27 degrees. Within the range of degrees;::f: ! plate below the track. \ 十坦面1 Separation falls to the figure β, which shows that the long tube member of the square is placed, close to the rotary cooling body 11, and will be flushed to the degree of the plate Μ" riFr - ^ _ hand ^ The raw member 1 5 faces the face of the seesaw, and gives an upper direction of 10,000 degrees in the vertical direction, and the long pipe member 16 placed on the edge is set at 7 The reverse position is in the vicinity of the slewing cooling body /. /, The structure of the impact generating member 15 is not limited to the specific characteristics, but is preferably used to take the early physical In the impact generation method, the solid matter ', ' is pressed against the surface of the stone plate 12 . "The force of the heart knife f is 10,000 faces, and the peeling member is in contact with the seesaw - edge (end portion on the upstream side in the direction of rotation) 'In: The Γ method of the end side of the second is the material test from the erg ==11 sinister on the end of the slab 12, relative to the impact of the slab Compared with the vertical impact of the force, the force can easily pre-neparate the phase η, and the handcuffs on the surface of the stone plate are preliminarily thought to be used with a small force. Heat. 7. The upper limit of the impact force of the ruthenium plate 丨2 is also very large. However, in the case of giving an impact in the parallel direction, it must not be 1251627, the invention description (the cold part U contact, but only Give the #1 mu board a 1 2 impact. That is, it is necessary to give an impact only to the side portion of the thickness of the f-cut sheet 12. Fig. 2 is a view showing the release of the invention (4) sheet manufacturing apparatus, In the case of the construction of the farmer's structure, 释 且 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了Composition, Inna Ping, there is a flat surface on the surface of the surface of the surface of the surface of the surface of the surface of the surface of the surface of the surface of the surface of the surface of the surface of the surface of the surface. In the front end (front end) and the rear end of the universal direction (the side 22a, 22b, the radius of gyration of the other portion of the cutting board 25 25. Therefore, the sharp-angled peeling member core for promoting the peeling of the stone slab 22 is not The flat end of the slewing cooling body 21 of Xingchen PCT is in contact with the end of the ΪΓ2 (The upstream side of the turning direction) - After the contact with the ground is fixed, the 冉 1T J is peeled off to effectively perform the slab sheeting. However, the peeling front end of the peeling member 25 must be set in the following two In the case of the rotary cooling body 2 on which the slab 22 is formed, the circular trajectory of the maximum slewing radius through which the corner portion on the distal end side passes is formed on the flat surface of the scoop, and the thickness portion of the slab 22 is only from the child. 3 is a circular orbital provided on the outer side. FIG. 3 is a front end of the peeling member 1 for displaying the shape of the peeling member 25 before the contact with the plated member. The maximum turning radius of the corner (edge line) of the front end side of the direction is 3, and the outer side is slightly outside. == As shown in Fig. 3, it can be understood that (4) the portion of the front end of the sheet 22 in the direction of progress is a portion other than the line k22a, which is further inside than the rail 31. -'^0^25 -13 - This paper scale is suitable for HS home transfer (CNS) M specification (χ 297 DON) 1251627 A? ------------B7 V. Invention description (11 1 - Fig. 4 shows a state in which the lying body v, k is to be cooled, and the peeling member 25 is in contact with the broken piece 22 in the state of Fig. 3 . In Fig. 4, the cast cold body 2 1 is completely out of contact with the peeling member 2 5 . The stone slab sheet 2 2 is connected to the peeling member 25 only on the side 22a of the square side of the square side and the second side, and the self-flat surface 1 is peeled off, and the soil is formed. After the pipe member 26 is removed, the thickness of the stone plate 22 is rotated by the temperature condition of the molten stone, and the number of revolutions of the cold body 2 1 is cooled or cooled. The conditions and the like are different; in the case of a general solar cell, the thickness is _μηι, so the peeling member h can be provided with an accuracy of 100 μΐΏ. Further, the position at which the peeling member 25 is provided is set based on almost the same consideration as the case where the impact is given on the surface of the above-mentioned stone plate. Similarly to the above, when the position of the flat surface i immersed in the melting enthalpy 13 at the lowest point of the rotary cooling body 〇 is set to 〇, the rotary cooling body 11 must be rotated 360 degrees, and The immersion plate 2 2 is taken out before being immersed in the molten crucible 23 again. The peeling member 25 is different from the impact generating member 15 in that the seesaw piece 22 peeled off from the flat surface due to the peeling member 25 is not placed on the rotary heat sink 2 1 and moves away from the peeling member. In the set position of the peeling member 25, immediately from the flat position of the peeling member 25, and when the peeling member 25 is set at a position of 0 to 18 degrees, the side of the broken plate is 2222 and the rotary heat sink The direction of rotation of 2 1 is reversed, and the side is separated from the rotary heat sink 2 1 . For this reason, the plate 2 2 slides on the ι pipe member 28 and can be taken out. However, the peeling position and the long pipe member ^ -14 - This paper scale applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 1251627 V. Invention description (the larger the distance of η, the greater the impact of the drop) .

Because the impact of the drop is slowed down, the I piece 2 5 is close to the long pipe member 26 . The _ 3 罝 is simplified, and it is desirable to make the peeling configuration at a position of _degrees to 270 degrees or a body. In the configuration in which the exfoliation member 25 is provided in a 26-piece configuration, the crucible is removed from the debonding member 25 and the long tube to the cooling body 2, and the light is removed from the crucible. ; = slowly slide down to the long tube member 26... in giving the other movable member: two. No: It is necessary to swim the heat sink 2! The god other than the turn of the 丨 丨 丨 囚 囚 囚 囚 囚 囚 囚 囚 囚 囚 囚 囚 囚 囚 囚 囚 囚 囚 耐久性 耐久性In the early stage, the first and second examples of the apparatus described above can be simplistic and used as the "self-weight"; the device structure of the == device is forced to move by the rotary power structure and the like. That is, the piece is not inclined to the top plate + k of the slab, and 疋 is preferably such that the length of the long pipe is above the angle, and the piece will fall due to its own weight and long self-weight: the structure outside the device. G 牛上'弓洛, and the pepper Further, it is possible to efficiently carry out the loading and unloading assistance by attaching a roller or the like. The embodiment of the present invention can be explained based on the embodiment of the present invention. Further, the present invention is not limited to these matters. ... her example embodiment 1 shell her example 1 is the use of the method of the formation of 矽 plane-like stone plate in the vertical side ... bell body < flat surface and peeling method of interpretation: "to a hit, and will - plate from The flat surface is in the stone slab manufacturing apparatus of the first embodiment, as shown in FIG.

1251627 V. Description of invention (13) The following items are composed: the perpetuation of the priest Shi Xi’s teaching cry (he t / 4' w solution to the hang _: Tan:: the rotary cooling body &quot;, can be rotated Support the back:: two rotary axes (not shown on the map, , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , Each of the components is housed in a body of a long body having a heat insulating material 7 (not shown). A closed environment in which an argon atmosphere can be maintained is applied to the inside of the device body. In the sheet 12 produced on the surface of the cooling body U, the surface of the cold part 1 1 is immersed in the surface of the body, and there is a part of the piece that is separated by the length of the member. 7Transported. The rotary cooling body 1 1 丨丨 φ φ 士 m , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , Turn to the body 11 "the method of giving impact to the slab piece that can not be peeled off by the micro-vibration, as long as it can be synchronized with one side; two '"pfe The structure of the 5th plate piece 12 which applies a predetermined impact force to all the flat surfaces is not particularly limited. In the example of the material, a hitting material such as a bar made of ruthenium or the like is used as a rope.赪圮轱4 is directly above the adjacent body 1 1 to synchronize with the returning cooling body 1 1 , and (4) the plate 12 reaches the uppermost point, and the striking material 4 is doubled to the flat surface 1 The impact of the impact of the entire slab piece 1 2 M: the piece 15. When the impact position of the striking member is dropped, the position of the lower point of the pk 1 1 is the position of 丨 80 degrees (the uppermost point) when the 〇 degree is ' 7-U)Xl -16 This paper size is applicable to ^i^(CNS) ΑΪ specifications (21GX297 public 1251627 A7 B7 5. Invention description (14) In this position, the vertical direction of the slab 12 is impacted. ; S &amp; mid-month' | all use the pulsating motor on the rotary drive source of the rotary cooling body 1 1 million; the state of the rotary cooling body 1 1 (slewing angle), can be issued according to the feed from the pulsating motor The pulse signal is mastered, so you can grasp the flat surface to reach 18Q degrees. At the timing of the (most i point) position, the impact generating member i 5 is driven. The other end of the rope connected to the striking member is fixed to the reel provided on the rotary shaft of the motor, and the revolving shaft is positive. • The reverse poem is wound and unwound by the reel. The positive (reverse) of the above (4) is synchronized with the rotation of the returning heat sink 11. That is, each flat surface reaches 180 degrees (takes the point) At the time of the position, the striking member of the loosely wound roll on the reel is dropped on the flat surface due to its own weight! _ the sheet 12. = The impact generating member 15 is not limited to the structure of the striking member as described above, and can be borrowed. The position and the striking angle on the seesaw piece 12 for giving an impact can be arbitrarily set by connecting the rotary shaft and the gear to the full swing. The material of the hand striking member is a carbon rod in the present embodiment; the 高温 can be used to measure the high temperature in the device, and the material can be, and is not particularly limited. The material of the sound is, in particular, On the carbon, the hard member is covered with SlC, or the member with the ratio of _: Structure:: 'Because it is more effective than the stone eve, it can also be _ _ ^ ~ I 'for the improvement of sputum and slave powder The effect of the temple dyeing prevention. The shape of the second striking member is also as long as it can give the impact force specified by ^, and it is not particularly W-shaped. The impact force is concentrated on -1 = 7.Η)Η1-υ.&lt;()Κ25 paper Scale PCT) -17-

1251627 V. INSTRUCTION OF THE INVENTION (The striking surface of the 15 striking member is preferably formed by the shape of the curved surface. In the form of phase (four), or flat, and the impact member having a plurality of hitting members, the impact of these blows is simultaneously performed. It can also be used to alleviate the concentration of the force. In these cases, I will leave the Shih-Hui board 1 2 long camp description | Ling tablets with 17, compared with (four) with the seesaw sheet 12 hunting by the weight The plate-like sliding surface. As shown in Fig. 5, in general, the anti-cut sheet 12 is deflected by the long tube members 16, 17 and falls in the lateral direction. [Better 7 乂 士 a 勺 $ $ $ $ 构件 构件 构件 构件, the side of the 17's is also used as a moving out auxiliary member, 4 to prevent the use of the guide... : '=5, generally, for the step-by-step promotion of the cutting board. In the present embodiment, the sample guide 54' as the carry-out assisting member and the long pipe member 51' of the switch 53 are provided at (9) degrees and 2 positions. The set angle (inclination angle) of the long pipe member 5 i is inclined toward 30 degrees below the water direction' The slab 12 has a self-weight as a structure outside the unloading device. The arrangement position of the long pipe member 51 must take into consideration the configuration of the device, the separation of the slab 12 from the slewing cooling body 11, the drop position, and the like. The angle must be set within the condition that the material of the long pipe member 51 and the plate 12, etc., the slab piece 12 is slid by its own weight. $ About the surface of the long pipe member 51 (16, 17) Type, for the reduction of the date with the Shixi board -18 This paper scale applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm)

1251627 V. Description of invention (16 pieces of 1 2 &lt; between the frictional force, 俾 可 可 匕 I take a smooth selection of the surface as a material of this kind 'for example, something of ten π. In the case of quality, can be eased The plate is in the =:, 2 also soft impact of the material, and can prevent the cutting plate 12::; long pipe members ... - even if it is, bad; but reduce durability test: = coating stock In the case of a hard material, it is also possible to set the angle or the position of the tester + I曰丨~ in the structure of the broken piece 12. Different, and may not damage the rotary heat sink 1 1 preferably In addition, the outer plate piece has a structure other than the flat surface 1, and does not π bubble in the melting crucible 23. In addition, the structure k of the early pure rotary cooling body is a multi-angle of the crucible sectional shape. ^ Ί λλ The configuration of the moon, but in this case, the faces adjacent to the thousand faces 1 may be integrated by the sheets 12 of each other. Therefore, the adjacent (four) plates g are hereby present in the present invention. As shown in Fig. 1, a gear type rotary cooling body in which a polygonal column is cut and a dot is cut inward is used. Because it is made up of the above-mentioned farm, it is a simple structure that can be connected to the side of the polygonal column, so that it can be impacted even if it is not a continuous impact. An example of a method for making a stone plate. First, the crucible 14 filled with the solid crucible is heated by the heater, so that the crucible melts the two people to raise the crucible 14 as shown in Fig. 1. Generally, the flat side of the rotary cooling body 1/3^' is wrapped in In the Rongzheng 1 3, the rotary cooling body is rotated. According to this, on the flat surface of all of the gear type rotary cooling body, a substantially identical slab piece 12 is produced. The control is to repeat the underground, each and at a certain time interval, so that when the planar slab piece 12 is at the uppermost flat surface 1 -19-

This paper scale is suitable for the standard of wealth and wealth (21〇Ti^iT 1251627 V. Invention description (17 becomes horizontal – when sleeping 9 FI goes to 4 + ^ ^ f, the impact generating member 15 falls vertically, Yu 矽 矽 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 The broken plate is falling down and the other is lowered; the position of the second to 18 degrees is self-leveling by vibration. The long pipe member of the concrete slides down and moves out of the device to return about 70% of the remaining 矽.柘仕比'曰, ^小板片, all take the point (18 degrees of position, the face is peeled off, then, &amp; - Θ ... 涊 涊 坦 坦 坦 1 分离 分离 分离 分离 分离 分离 分离 分离 分离 分离 分离 分离 分离16. Recycling outside the unit for recycling. The recovered stone slabs! 2 In addition to having a smooth surface, all thicknesses are Μ 270 μηιη Μ 〃 〃 〃 〃 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 2B, her case 2 gives an impact on the flat surface of the rotary cooling body that forms the slab sheet and the planar slab sheet in the parallel direction. The method for peeling off the stone plate from the flat surface: ^ The apparatus for manufacturing the slab in the second embodiment of FIG. 2, as shown in FIG. 2, is generally constructed by the same structure as that of the first embodiment; 1 different points are as follows: the impact generating member 5 for the surface impact of the planar broken piece 2 2 and the 仏 set for the degree of the lowermost point relative to the lowermost side of the rotating cooling body 2 Further, the acute-angled peeling member 25 of the peeling stone sheet 2 is peeled off, and the peeling member 25 is integrally formed with the long tubular member 26 for carrying out the seesaw sheet. The peeling member 25 will be described with reference to Fig. 3 . In the training component 2 5 'use the carbon that will process the front end acute angle. The peeling structure -20- This paper scale applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 1251627

The member 25 is disposed in parallel with the tangent of the circular orbit 31 made at the corner portion 30 of the flat surface 1 at the lowest position of the rotary heat sink 21, and is separated from the circular rail by 3 1 1〇〇 The position on the outer side of μπι. According to this, the gusset sheet 22 having a thickness of 100 μm or more can be peeled off from the flat surface. The peeling member 25 is integrated with the front end portion of the long pipe member 26 which is inclined at a horizontal level of 3 degrees, whereby the simplification of the device member is obtained. As shown in Fig. 2, in the same manner as in the first embodiment, the long pipe members 26 and 28 which carry out the peeling slab 22 are provided with the guide 54 and the rotor 53. The arrangement position, angle, surface type, material, and the like of the long pipe members 26 and 28 are set to be the same as in the embodiment. In the same manner as in the example}, the rotary cold portion body 2 1 is a gear type heat sink in which the apex of the polygonal column is cut inward. In particular, when the peeling member 25 is used, when the adjacent seesaw pieces 2 2 are integrated with each other, the side 22a of the leading end side of the seesaw piece 2 in the progress direction is brought into contact with the peeling member 25, and It is difficult to give an impact in a direction parallel to the plane-shaped seesaw piece 2 2, and therefore it is desirable to have a gear-like configuration like a rotary heat sink 2 . In the device configuration in the example, the member which is movable in synchronism with the rotary cooling body and the movable member 15 does not exist, so that the flat surface formed on the rotary heat sink 21 is not a periodic continuous structure. It is also possible that the interval between the adjacent flat surfaces 1 and the size of each flat surface 1 may be different. A method of manufacturing the dam piece 2 2 will be described using the above-described apparatus. First, the crucible filled with the solid crucible is heated by a heater to melt the crucible. Next, the crucible 24 is raised, as shown in Fig. 2, the flat surface 1 of the gear type rotary cooling body 21 is immersed in the molten crucible 2, and the rotary cooling body 2 1 is rotated - 21 - the paper scale is applicable China National Standard (CNS) A4 specification (210 X 297 mm) 1251627

5. Description of the Invention (19. According to this, in all the flat faces u of the gear-type cooling body 21, the same seesaw piece 2 2 is generated. ° Thus, the stone plate 22 is grown, and the peephole of the device is confirmed. , Shishiban:: Large: 30% is at a position of 0 to 180 degrees, and the long tube member 28 on one side of the flat surface is slid down due to vibration and is removed from the device. The approximately 鸠 (4) slabs are all in contact with the peeling member ,, and the flat surface i is rotated, and then separated from the rotary heat sink 2 ι, and then slipped off the other long pipe member 26, and then removed from the device and recovered. The recovered Shishi board 12 is the same as the old one of the embodiment, and the thickness is also the same (the average thickness is about ~, Ϊ = 连 、, Λ Λ crystallization grows to form a columnar slab. Comparative Example 1 The comparative example was produced by the #片片制造装置 manufactured by the prior art. (4) The sheet was made lighter than: =:: broken sheet production, as shown in Fig. 7 The shovel 4 is provided with a rotary cooling body f having a concavo-convex structure. The shovel is made of a slab sheet as shown in Fig. 7. Made, and the practice of the workmanship, her example 1 has almost the same structure" clothing and different (where, back,: the _ surrounding surface is provided with convex parts 77 to two: 7: for: concave Insertion of the W-end Shao (4) plate scraping: in (4) on the peripheral surface of the rotary cooling body 71 and the concave parallel formation. /, ^ Fu shaft straight moon and each other and use this hairline to use the above Device, an example of the method of making a wonderful plate - 22 - S scale standard standard X 297 mm) 1251627 A7 B7 V. Description of the invention (first fill the solid 矽 followed by 坩埚 74 on ^ π '' one. Extinguish, so that the crucible melts. Li, as shown in Figure 7, 'only only back 71:?:" 7 soaked in the cool fuse, so that the rotary cooling body 71 is rotated::: ;=Γ only the cylindrical cooling body (four) - Generation = crystal growth from the 4th core as the starting point. The second liquid 73 is contacted with the crystal grown from the adjacent convex portion 77, and the contact with the concave portion 78 is generated. The recessed part-, that is, due to the pleat between the two pieces of Pfe71, the slab piece J is inserted into the front end part of the ear P 7 5 ® The sheet 7 2 is forced to deform f from the cylindrical shape toward the planar shape, and is carried out in the same manner as the mask scraping portion 75. The self-regulating step confirms the growth of the seesaw sheet 72, the seesaw sheet After 72 minutes, it is destroyed once along the field of the scraping portion 75. This is because the curved portion which is not completely extended exists in the slab sheet, and the straight line of the slab sheet 72 is hindered. The slab piece 7 2 that has been carried out is thickly grown at a portion corresponding to the convex portion 7 7 and grows thinly in a portion corresponding to the concave portion 718. Further, the average thickness of the slab piece 72 is The convex portion 7 7 is approximately 25 μm, and the concave portion 7 8 is approximately 200 μm. Example 3 The solar cell was fabricated by using the Shishi plate sheets prepared in Comparative Examples 1 and 2 and Comparative Example 1. The order of manufacture of the battery is based on the following well-known methods: Washing of the broken sheet sample, texture etching, diffusion layer formation, oxide film removal -23- The paper scale is suitable for the financial standard (21GX297) y 1251627

Each step of anti-reflection film formation, anti-etching, and pole formation. The above-described =4 pole formation and the light-receiving surface electric system 5 are performed by the automatic transfer device. The transfer between the steps 'substantially', her example 1 and the seesaw piece of the example 2, can carry out all automatic transfer; there is a comparison of the example -: the step between the steps of the plate is left with f@, In the production:: the moving transport device 'can not be transported to the lower-step sheet production: the positive T is simulated by the simulation in the examples 1 and 2 plus the comparative example! The characteristics of the too 1% 3⁄4 pool produced , the test results are displayed in the table '[Table 1]

As can be seen from Table 1, the short-circuit current densities of the solar cells of Example 丨 and Example 2 were both 27 mA/cm2, which is better than the comparative example! The 25 mA/cm2 is large. This reason is considered to be a defect caused by the strain of the inner-spin stress remaining in the slab. Regarding the curve factor, in the comparative example, the influence of the shortcoming caused by the strain of the internal stress remaining in the stone plate can be greatly reduced. Regarding the conversion efficiency (%), with respect to 1 〇% of Comparative Example 1, in Example 7. (10) i-l). U! S25 - 24 · Chinese National Standard (CNS) A4 specification (210X297 mm) ~ ----- 1251627 A7 B7 V. INSTRUCTIONS (24) Compared with the solar cells of the slabs manufactured by the previous slab manufacturing device, the short-circuit current density and the curve factor become larger, so the conversion can be continuously improved. Efficiency can reduce manufacturing costs. DESCRIPTION OF SYMBOLS 1 Flat surface 53 Rotor 11 Rotary cooling body 54 Guide part 12 Plate 6 1 Rotary cooling body 13 Melting crucible 62 Stone strip 14 坩埚 63 Melting second 15 Impact generating member 64 Movable type 长 16 Long tube member 65 Carbon net 17 Long tube member 7 1 Rotary cooling body 2 1 Rotary cooling body 72 Crystal plate 22 Plate sheet 73 Solution 22a Side 74 坩埚 22b Side 75 Crystal plate scraping portion 23 Melting 矽 77 Projection 24 坩埚 78 Concave portion 2 5 Stripping Parts 2 6 Long tube members 2 8 Long tube members 3 0 Corners 3 1 Round rails 5 1 Long tube members -27- This paper scale applies to China National Standard (CNS) A4 specifications (210X 297 mm)

Claims (1)

s ® 1984 Patent Application 凊 Patent Scope Replacement (94 years) February) Application for Patent Park 1 · 2. A slab manufacturing device, characterized in that: 4: The material is a fused and fused hard accommodating portion. , and set in the solution::: square and can be rotated 'and at least have a can on the surface of the flat surface of the surface of the rotating cooling body; set: hunting by the sleek and then immersed in the melting 矽, after Melting the 的 上 上 上 上 上 上 上 上 上 " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " When the gravity falls, the peeled sheet is carried out of the peeling and unloading mechanism. For example, the apparatus for manufacturing a chip-cutting sheet is provided, wherein the peeling and unloading mechanism is provided with an impact generating member that peels off the gusset sheet by giving a physical impact to the slewing cooler. Such as the scope of patent application! An apparatus for manufacturing a sheet cutting sheet, wherein the peeling and unloading mechanism is provided with an acute-angle peeling member that peels off the gusset sheet by being in contact with the side end portion in the rotation direction of the gusset sheet formed on the flat surface of the slewing cooling body . The apparatus for manufacturing a slab sheet according to the first aspect of the invention, wherein the peeling/unloading mechanism is located at a lowest point of the rotary cooling body, and is at a position of 0 degree when the position of the flat surface of the fused enthalpy is 0. When the position where the rotary cooling body is rotated once is 360 degrees, the gusset sheet is peeled off at a position ranging from 90 degrees to 27 degrees. The slab manufacturing apparatus of any one of the above-mentioned claims, wherein the detaching and unloading mechanism is provided with 矽73081-941202.DOC which is peeled off from the flat surface. (CNS) M Specifications (10)X297&amp;ft) 1251627 Factory One-------------- A 8 j $ $hp ' I ___ C8 丨 Six, Apply for Patent Fan Park 6 · 8. 9. Board The long tube member for carrying out the outside of the device is carried out. For example, the patented device is a single-piece manufacturing device of the fifth item, wherein the long-tube member is configured to resist the peeling of the self-flattening surface with the broken piece that is peeled off from the flat surface. tilt. In the fifth aspect of the patent, a sheet cutting sheet manufacturing apparatus is provided, wherein the peeling and transporting mechanism includes an auxiliary member for carrying out an auxiliary sheet in addition to the long tube member. The apparatus for manufacturing a slit sheet according to the fifth aspect of the patent application, wherein the long tube member is integrated with the acute-angle peeling member of the third application of the patent application. The apparatus for manufacturing a slit sheet according to the eighth aspect of the patent application, wherein the acute-angle peeling member is at a lowermost point of the rotary cooling body and is immersed in a position of a 2-face of the molten stone, and is a twist. When the position at which the position of the rotary cooling body is rotated once is 360 degrees, the end portion on the upstream side in the rotation direction of the slab piece is brought into contact with the position of 180 degrees to 270 degrees, and the slab is peeled off. 10. The apparatus for manufacturing a stone plate according to claim 1, wherein the rotary cooling system includes a gear-type rotating body in which the apex of the polygonal column is cut inward, and the flat surface is formed on the side surface of the polygonal column. 1 1 A method for producing a slab sheet, comprising: a step of solidifying and growing, which is rotatably provided on a flat surface of a slewing cooling body above a fused accommodating portion for accommodating a melting crucible, and is temporarily immersed in a molten stone eve And the stone plate is solidified and grown on the flat surface; the peeling step is performed before the flat surface of the rotary heat sink pulled up by the rotation is again immersed in the molten crucible, and the crucible 73081-941202 generated on the flat surface is peeled off. DOC This paper scales in the coffee standard® national standard X 297 mm) 1251627, the patented range of plates; 8 8 8 8 A BCD 2 / 6 (: step, using the rotary inertia of the rotary cooling body and / Ge Li fall 'When the peeled sheet is removed from the device. 12·If the patent is made, the manufacture of the wafer of the i-th patent is augmented by a μ liter of fine, and the raw member gives the physical impact of the rotary cooling body.剥7 13· The manufacturing method of the stone slab sheet according to the eleventh aspect of the patent application, wherein the gusset sheet formed by the acute-angle peeling member and the flat surface of the slewing heat sink &lt; slewing The upstream end of the direction is contacted to peel off the slab sheet. 14. The method for manufacturing the slab sheet according to the scope of claim U, wherein the slab is placed at the lowest point of the slewing cooling body and immersed in the melting enthalpy The position of the flat surface is the twist, and when the position where the rotary cooling body is rotated once is 360 degrees from the position of 0 degree, the slab is peeled off in the position range of 9 至 to 27 。. The method for manufacturing a Shixia board according to any one of the above-mentioned items JJ to J4, wherein the steel tube sheet which is peeled off from the flat surface is taken out by the long tube member for carrying out, and is carried out of the apparatus. The method for manufacturing a stone slab sheet according to the fifteenth aspect of the patent application, wherein the long tube member for carrying out is disposed such that the detached sheet piece peeled off from the flat surface resists the friction with the child-length member and can be self-body The method of manufacturing the slab of the slab of the slab of the slab of the slab of the slab of the slab of the slab of the slab of the slab of the slab of the slab of the slab of the slab of the slab of the slab. Manufacturing method, wherein the 73081-941202. DOC This paper scale applies to China National Standard (CNS) A4 specification (210X 297 public I) 1251627 VI. Scope of Application for Patent – The long pipe member is integrated with the acute-angled peeling member of the 13th article of the patent application. &amp; 1 9 . The method for manufacturing a slab sheet according to the patent application No. 18, wherein the position at the lowest point of the rotary cooling body and immersed in the flat surface of the melted pulverization is set to a degree, and When the position of the degree of rotation starts to be 360 degrees at a position where the rotary cooling body is rotated once, the acute-angled peeling member is brought into contact with the upstream end portion in the rotation direction of the seesaw piece in the position range of 180 degrees to 270 degrees, and the broken piece is peeled off. . 2 0. The method for manufacturing a broken sheet according to the scope of the patent application, wherein the broken sheet is used for making a solar cell. 73081-941202.DOC -4 - This paper size applies to Chinese National Standard (CNS) A4 specification (210 X 297 mm)