1247119 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種電磁訊號量測裝置，特別係關於一利 用電光型電磁場感測器之電磁訊號量測裝置。 【先前技術】 在通訊產品之發展過程中，需要量測天線之發射場型或 电磁干擾以評估產品的品質及性能。電磁輻射源的場型分 布通常都是在微波暗室裡進行，且發射天線與接收天線的 距離至少必須符合2ϋ2/λ的遠場條件，其申D為發射/接收天 線孔徑，λ為工作波長。習知技藝主要係利用大尺寸之接收 天線搭配機械空間掃描以擷取場型分布，例如us 5,432,523、US5,786,680、仍6，181，285等文獻揭示之量測 技=。惟大尺寸之接收天線必須建構一大型微波暗室，方 可符合發射天線與接收天線的距離大於2Ε)2/λ。—般而言， 習知技藝使用之微波暗室的空間約為數十立方公尺或更 大，其建構成本相當高昂，且不適於搬動。 卜省4技蟄以天線接收訊號後，仍然必須透過電纜 線來傳遞訊號，而電—綠合s 、見踝θ輻射些终的電磁波，影響了待 測笔磁場。再者，雷么臨合 、、 電、、見線在傳遞電磁訊號的過程中，也會 造成k號強度的損耗。因此 U此產業上迫切地需要一種具有 低干擾、高敏感度及全作自 1口心的电磁場感測器。 【發明内容】 本發明之主要目的仫担 μ、—種利用電光型電磁場感測器 之兒磁訊號夏測袈置， 用以大幅降低所需微波暗室之尺 PD0083.doc 1247119 寸’進而降低成本支出。 為達成上述目的’本發明揭示—種電磁訊號量測裝置， 其包含一微波暗室、一設置於該微波暗室中之第一載台、 :設置：該第一載台上之待測發射源、一設置於該微波暗 室中之第二載台以及一設置於該第二载台上之電光型感测 器。該電光型感測器可接收該待測發射源產生之電磁訊號。 較佳地，該第一載台係一旋轉載台。該第二載台包含— 水平/月軌、-设置於該水平滑軌上之直立滑執以及一設置 於該直立滑軌上之平台，其中該該電光型感測器係承載於 該=上。藉由該位置控制器控制該第—載台之旋轉角度 與。亥第一載口之水平位置及高度，該電磁訊號量測褒置可 量測該待測發射源之電磁干擾特性以及天線場型。 相較於習知技藝，由於該電光型感測器之尺寸僅約數公 分，因此所需之微波暗室的空間僅約為丨立方公尺，其建構 成本遠低於習知技蓺去。^ αα 文其考因此，本發明可以非常低的成本 量測微小天線之特性。拉而a . _. ㈣肖而吕之’本發明之電磁訊號量測 裝置為可移動式’習知技藝因所需之微波暗室過於龐大而 不適於搬動。 θ 【實施方式】 在通訊產品之發展過程中，需要量測天線之發射 電磁干擾以評估產品的品質及性能。電光型電磁場感測哭 即符合以上的要求，因此非常適合商品化電子產品的量= 應用。特而言之，電光型電磁場感測器搭配適合相關掃描 及旋轉設備，即可應用於量測電子通訊產品之電磁干擾、 PD0083.doc 1247119 天線遠近場場型及無線電頻識別（Radi〇_Fr叫1247119 IX. Description of the Invention: [Technical Field] The present invention relates to an electromagnetic signal measuring device, and more particularly to an electromagnetic signal measuring device using an electro-optical electromagnetic field sensor. [Prior Art] In the development of communication products, it is necessary to measure the emission field type or electromagnetic interference of the antenna to evaluate the quality and performance of the product. The field distribution of the electromagnetic radiation source is usually carried out in a microwave darkroom, and the distance between the transmitting antenna and the receiving antenna must at least meet the far field condition of 2ϋ2/λ. The D is the transmitting/receiving antenna aperture and λ is the working wavelength. Conventional techniques mainly utilize large-sized receiving antennas with mechanical space scanning to extract field-type distributions, such as the measurement techniques disclosed in the literatures of us 5,432,523, US 5,786,680, and still 6,181,285. However, a large-sized receiving antenna must be constructed with a large microwave darkroom to match the distance between the transmitting antenna and the receiving antenna by more than 2 Ε 2/λ. In general, the microwave darkroom used in the conventional art has a space of about several tens of cubic meters or more, and its construction is quite high and is not suitable for moving. After receiving the signal by the antenna, the Bu 4 technology still has to transmit the signal through the cable, and the electro-green s, see 踝θ radiates the final electromagnetic wave, which affects the magnetic field of the pen to be tested. In addition, Lei Mo Linhe, electric, and line will also cause the loss of k strength during the process of transmitting electromagnetic signals. Therefore, there is an urgent need in the industry for an electromagnetic field sensor with low interference, high sensitivity, and full operation. SUMMARY OF THE INVENTION The main object of the present invention is to use a magneto-optical summer measuring device for an electro-optic electromagnetic field sensor, which can greatly reduce the requirement of the microwave oven of the desired microwave darkroom. expenditure. In order to achieve the above object, the present invention discloses an electromagnetic signal measuring device, which comprises a microwave dark room, a first stage disposed in the microwave dark room, and a set: a test source to be tested on the first stage, a second stage disposed in the microwave darkroom and an electro-optic sensor disposed on the second stage. The electro-optic sensor can receive an electromagnetic signal generated by the emission source to be tested. Preferably, the first stage is a rotating stage. The second stage includes a horizontal/moon track, an upright slide disposed on the horizontal slide, and a platform disposed on the upright slide, wherein the electro-optic sensor is carried on the= . The rotation angle of the first stage is controlled by the position controller. The horizontal position and height of the first carrier port of the sea, the electromagnetic signal measuring device can measure the electromagnetic interference characteristics of the transmitting source to be tested and the antenna field type. Compared with the prior art, since the size of the electro-optic sensor is only about several centimeters, the space required for the microwave darkroom is only about 丨 cubic meters, and the construction cost is much lower than that of the prior art. ^αα文其考 Therefore, the present invention can measure the characteristics of a small antenna at a very low cost. 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 θ [Embodiment] In the development of communication products, it is necessary to measure the emission of electromagnetic interference from the antenna to evaluate the quality and performance of the product. Electro-optic electromagnetic field sensing crying meets the above requirements, so it is very suitable for the quantity of commercial electronic products = application. In particular, electro-optical electromagnetic field sensors are suitable for measuring electromagnetic interference in electronic communication products with suitable scanning and rotating equipment. PD0083.doc 1247119 Antenna far and near field type and radio frequency identification (Radi〇_Fr call
Identification，RFID)產品場型。 圖1係本發明之電磁訊號量測裝置100之示意圖。該電磁 :號量測裝置100包含一微波暗室102、一設置於該微波暗 室102中之第-載台110、一設置於該第_載台11〇上之待測 發射源112、一設置於該微波暗室1〇2中之第二載台12〇以及 一設置於該第二載台120上之電光型感測器1〇。該待測發射 源112可為一手機天線，而該電光型感測器1〇則可感測該待 測發射源112產生之電磁訊號。 該電磁訊號量測裝置1 〇〇可另包含一位置控制器丨〇4，用 以控制該第一載台110與該第二載台12〇之相對位置，亦即 控制該待測發射源112與該電光型感測器1〇之相對位置。較 佳地，該第一載台120係一旋轉載台。該第二載台12〇包含 一水平滑軌122、一設置於該水平滑軌122上之直立滑執124 以及一設置於該直立滑執124上之平台126，其中該該電光 型感測器10係承載於該平台126上。藉由該位置控制器丨〇4 控制该弟一載台110之旋轉角度與該第二載台12〇之水平位 置及高度，該電磁訊號量測裝置1〇〇可量測該待測發射源 112之電磁干擾以及天線場型等元件特性。 圖2例示本發明第一實施例之電光型感測器丨〇。該電光型 感測器10包含一晶體基板12、一設置於該晶體基板丨2中之 光輸入波導14、一没置於该晶體基板12中之光輸出波導 16、一設置於該晶體基板12中且連接該光輸入波導14與該 光輸出波導16之光調變波導18A及18B以及一設置於該晶 PD0083.doc 1247119 體基板12表面之天線22。自一雷射光源20發出之雷射光束 自一輸入光纖26導入該光輸入波導14並分光進入該光調變 波導1 8A及1 8B後，再合併到該光輸出波導16。另外，該晶 體基板12可為一銳酸鐘基板。 圖3係圖2所示之電光型感測器1 〇沿A-A線之剖面圖。該 天線22係由二條設置於該光調變波導18A及18B上方之金 屬導電線段24A及24B構成，其可感測該待測發射源112之 電場並施加一電相應電場於該光調變波導18A及1 8B。光束 在介質中之傳播速度係隨著介質之折射率增加而減少。當 該金屬導電線段24A及24B之間有電壓差（即有電場產生） 時，則造成該光調變波導18A及18B之折射率改變，使得行 經該光調變波導1 8A及1 8B之雷射光束之光程改變，因此該 雷射光束自該光調變波導18A及18B進入該光輸出波導16 時將形成一干涉光，而該干涉光之相位及強度將隨該金屬 導電線段24A及24B間之電位差而變化。 復參圖1及圖2 ’該干涉光係經由一輸出光纖2 §傳送至一 光4貞測器3 0將该干涉光之相位及強度轉換成一電訊號，再 經由一訊號處理器32計算該待測發射源U2產生之電場。簡 言之，該電光型感測器ίο可視為一光調制器，當該天線22 感測到來自该待測發射源112之電場時，該電光型感測哭1 〇 即根據感測之電場強度與相位調制該光輸出波導16輸出之 干涉光的相位及強度。因此，該天線22感測之電場強度在 該電光型感測器10上即可轉換成光訊號，再經由該輸出光 纖28傳送至該光债測器30，而不需要用電纜線連接，可解 PD0083.doc 1247119 決習知使用電纜線傳送訊號所產生的干擾問題。 圖4例示本發明第二實施例之電光型感測器4〇。該電光型 感測器40包含一光調制器50以及一感測元件7〇。相較於圖2 所示之電光型感測器1〇使用内建式天線22，圖4之之電光型 感測器40使用一外掛式偶極天線（即該感測元件7〇)。除了在 該光調變波導18A及18B外側邊各設置一電極52A及52B以 及在該電極52A及52B之間設置一電極54外，該光調制器50 之結構大體上相似於圖2所示之電光型感測器丨〇，可依施加 的電場改變經其傳送之光束光程。 邊感測元件70可感測該待測發射源丨丨2之電場及磁場強 度’並施加一電位差於該光調制器5〇之電極52A、52B及電 極54。該感測元件7〇包含一第一導電線段71、一設置於該 第一導電線段71之一末端的第一光開關74、一設置於第一 導電線段71之另一末端的第二光開關乃、一經由第一光開 關74與該第一導電線段71連接之第二導電線段72、一經由 該第二光開關75與該第一導電線段71連接之第三導電線段 73。當该感測元件7〇感測到該待測發射源丨12之電磁訊號 後，即在該電極52A、523及54之間施加一相應該電場訊號 之電位差。 當该第一光開關74及該第二光開關75導通時，該第一導 電線段71、該第二導電線段72及該第三導電線段科即形成 可感'則磁場訊號之環形天線，而當該第一光開關74及該 第一光開關75不導通時，該第二導電線段72及該第三導電 線k 74即形成一可感測電場訊號之線形天線。光纖％及口 PD0083.doc 1247119 係用以傳送控制第-光開關74及第二光開關75之開關訊 號。此外’該環形天線除了設置成圖4所示之四方形外亦可 為圓形’即如圖5所示之圓形天線8 j。 該微波暗室H)2的空間大小主要係取決於該待測發射源 112與該電光型❹ΠΙ 1G之接收天線22之尺寸。該接收天線 22的長度僅約數公分，且若該待測發射源ιΐ2之尺寸亦為數 公分（例如手機天線），則所需之微波暗室1〇2僅約為i立方公 尺，其建構成本遠低於習知技藝者。相較於習知技藝，本 發明可以非常低的成本量測微小天線之特性。特而言之， 本發明之電磁訊號量測裝置1〇〇因其輕巧而為可移動式，習 知技藝因所需之微波暗室過於龐大而不適於搬動。 本發明之技術内容及技術特點已揭示如上，然而熟悉本 項技術之人士仍可能基於本發明之教示及揭示而作種種不 背離本發明精神之替換及修飾。因此，本發明之保護範圍 應不限於實施例所揭示者，而應包括各種不背離本發明之 替換及修飾，並為以下之申請專利範圍所涵蓋。 【圖式簡單說明】 圖1係本發明之電磁訊號量測裝置之示意圖； 圖2例示本發明第一實施例之電光型感測器； 圖3係圖2所示之電光型感測器沿a-A線之剖面圖； 圖4例示本發明第二實施例之電光型感測器；以及 圖5例示本發明另一實施例之感測元件。 【主要元件符號說明】 10 電光型感測器 12 晶體基板 PD0083.doc -11 - 1247119 14 輸入波導 18A光調變波導 20 雷射光源 24A金屬導電線段 26 輸入光纖 30 光偵測器 40 電光型感測器 52A電極 54 電極 71 第一導電線段 73 第三導電線段 75 第二光開關 77 光纖 100電磁訊號量測裝置 104位置控制器 112待測發射源 122水平滑執 126平台 輸出波導 光調變波導 天線 金屬導電線段 輸出光纖 訊號處理器 光調制器 電極 感測元件 φ 第二導電線段 第一光開關 光纖 圓形天線 微波暗室 第一載台 第二載台 直立滑執 _ PD0083.doc -12-Identification, RFID) product type. 1 is a schematic diagram of an electromagnetic signal measuring device 100 of the present invention. The electromagnetic measuring device 100 includes a microwave dark room 102, a first stage 110 disposed in the microwave dark room 102, a test emission source 112 disposed on the first stage 11A, and a The second stage 12〇 of the microwave dark room 1〇2 and an electro-optic sensor 1〇 disposed on the second stage 120. The to-be-tested emission source 112 can be a mobile phone antenna, and the electro-optical sensor 1 can sense the electromagnetic signal generated by the to-be-detected emission source 112. The electromagnetic signal measuring device 1 can further include a position controller 4 for controlling the relative position of the first stage 110 and the second stage 12, that is, controlling the emission source 112 to be tested. The relative position to the electro-optic sensor 1〇. Preferably, the first stage 120 is a rotating stage. The second stage 12 includes a horizontal slide 122, an upright slide 124 disposed on the horizontal slide 122, and a platform 126 disposed on the upright slide 124. The electro-optic sensor The 10 series is carried on the platform 126. The electromagnetic signal measuring device 1 can measure the emission source to be tested by controlling the rotation angle of the tray 110 and the horizontal position and height of the second stage 12 by the position controller 丨〇4. 112 electromagnetic interference and antenna characteristics such as antenna field type. Fig. 2 illustrates an electro-optical sensor 丨〇 according to a first embodiment of the present invention. The electro-optic sensor 10 includes a crystal substrate 12, an optical input waveguide 14 disposed in the crystal substrate 2, a light output waveguide 16 not disposed in the crystal substrate 12, and a crystal output substrate 12 disposed on the crystal substrate 12. And connecting the optical input waveguide 14 and the optical modulation waveguides 18A and 18B of the optical output waveguide 16 and an antenna 22 disposed on the surface of the substrate PD12 of the crystal PD0083.doc 1247119. A laser beam emitted from a laser source 20 is introduced into the optical input waveguide 14 from an input fiber 26 and split into the optical modulation waveguides 18A and 18B, and then incorporated into the optical output waveguide 16. Alternatively, the crystal substrate 12 can be a sharp acid clock substrate. 3 is a cross-sectional view of the electro-optical sensor 1 shown in FIG. 2 taken along line A-A. The antenna 22 is composed of two metal conductive segments 24A and 24B disposed above the optical modulation waveguides 18A and 18B, which can sense the electric field of the emission source 112 to be tested and apply an electric corresponding electric field to the optical modulation waveguide. 18A and 1 8B. The propagation velocity of the beam in the medium decreases as the refractive index of the medium increases. When there is a voltage difference between the metal conductive segments 24A and 24B (that is, an electric field is generated), the refractive indices of the optical modulation waveguides 18A and 18B are changed, so that the light passing through the optical modulation waveguides 18A and 18B The optical path of the beam changes, so that the laser beam will form an interference light from the optical modulation waveguides 18A and 18B into the optical output waveguide 16, and the phase and intensity of the interference light will follow the metal conductive line segment 24A and The potential difference between 24B changes. Referring to FIG. 1 and FIG. 2, the interference light is transmitted to an optical detector 2 through an output optical fiber 2 to convert the phase and intensity of the interference light into an electrical signal, and then calculated by a signal processor 32. The electric field generated by the emission source U2 to be tested. In short, the electro-optical sensor ίο can be regarded as a light modulator. When the antenna 22 senses an electric field from the emission source to be tested 112, the electro-optic type sensing is based on the electric field of sensing. The intensity and phase modulate the phase and intensity of the interference light output by the optical output waveguide 16. Therefore, the electric field intensity sensed by the antenna 22 can be converted into an optical signal on the electro-optic sensor 10, and then transmitted to the optical debt detector 30 via the output optical fiber 28 without connecting with a cable. Solution PD0083.doc 1247119 The problem of interference caused by the use of cable to transmit signals is known. Fig. 4 illustrates an electro-optic sensor 4 of the second embodiment of the present invention. The electro-optical sensor 40 includes a light modulator 50 and a sensing element 7A. Compared to the electro-optic sensor 1 shown in Fig. 2, the built-in antenna 22 is used, and the electro-optic sensor 40 of Fig. 4 uses an external dipole antenna (i.e., the sensing element 7). The optical modulator 50 is substantially similar in structure to that shown in FIG. 2 except that an electrode 52A and 52B are disposed on the outer side of the optical modulation waveguides 18A and 18B and an electrode 54 is disposed between the electrodes 52A and 52B. The electro-optic sensor 改变 changes the beam path of the beam transmitted by the applied electric field. The side sensing element 70 senses the electric field and magnetic field strength of the source to be tested 并2 and applies a potential difference to the electrodes 52A, 52B and the electrode 54 of the light modulator 5. The sensing element 7A includes a first conductive line segment 71, a first optical switch 74 disposed at one end of the first conductive line segment 71, and a second optical switch disposed at the other end of the first conductive line segment 71. A second conductive line segment 72 connected to the first conductive line segment 71 via the first optical switch 74, and a third conductive line segment 73 connected to the first conductive line segment 71 via the second optical switch 75. When the sensing element 7 〇 senses the electromagnetic signal of the emission source 待 12 to be tested, a potential difference corresponding to the electric field signal is applied between the electrodes 52A, 523 and 54. When the first optical switch 74 and the second optical switch 75 are turned on, the first conductive line segment 71, the second conductive line segment 72, and the third conductive line segment form a loop antenna that can sense a magnetic field signal. When the first optical switch 74 and the first optical switch 75 are not turned on, the second conductive line segment 72 and the third conductive line k 74 form a linear antenna capable of sensing an electric field signal. The optical fiber % and port PD0083.doc 1247119 are used to transmit and control the switching signals of the first optical switch 74 and the second optical switch 75. Further, the loop antenna may be circular except that it is arranged in a square shape as shown in Fig. 4, that is, a circular antenna 8 j as shown in Fig. 5. The spatial size of the microwave darkroom H)2 is mainly determined by the size of the transmitting source 112 to be tested and the receiving antenna 22 of the electro-optic type ❹ΠΙ 1G. The length of the receiving antenna 22 is only about several centimeters, and if the size of the transmitting source to be tested is also several centimeters (for example, a mobile phone antenna), the required microwave darkroom 1 〇 2 is only about i cubic meters, and its construction constitutes a far center. Less than the skilled artisan. Compared to the prior art, the present invention can measure the characteristics of a small antenna at a very low cost. In particular, the electromagnetic signal measuring device 1 of the present invention is movable due to its light weight, and the conventional technique is not suitable for handling because the microwave chamber required is too large. The technical contents and technical features of the present invention have been disclosed as above, and those skilled in the art can still make various substitutions and modifications without departing from the spirit and scope of the invention. Therefore, the scope of the present invention should be construed as being limited by the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view of an electromagnetic signal measuring device of the present invention; FIG. 2 is an electro-optical sensor according to a first embodiment of the present invention; FIG. 3 is an electro-optical sensor device shown in FIG. 4A is a cross-sectional view of FIG. 4; FIG. 4 illustrates an electro-optical sensor according to a second embodiment of the present invention; and FIG. 5 illustrates a sensing element of another embodiment of the present invention. [Main component symbol description] 10 Electro-optical sensor 12 Crystal substrate PD0083.doc -11 - 1247119 14 Input waveguide 18A optical modulation waveguide 20 Laser light source 24A metal conductive segment 26 Input fiber 30 Photodetector 40 Electro-optic type Detector 52A electrode 54 electrode 71 first conductive line segment 73 third conductive line segment 75 second optical switch 77 optical fiber 100 electromagnetic signal measuring device 104 position controller 112 to be tested emission source 122 horizontal sliding 126 platform output waveguide optical modulation waveguide Antenna metal conductive line segment output fiber signal processor light modulator electrode sensing element φ second conductive line segment first optical switch fiber circular antenna microwave dark room first stage second stage erect sliding _ PD0083.doc -12-